USD404369S - Manifold cover for use in a semiconductor wafer heat processing apparatus - Google Patents

Manifold cover for use in a semiconductor wafer heat processing apparatus Download PDF

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Publication number
USD404369S
USD404369S US29/082,981 US8298198F USD404369S US D404369 S USD404369 S US D404369S US 8298198 F US8298198 F US 8298198F US D404369 S USD404369 S US D404369S
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US
United States
Prior art keywords
processing apparatus
semiconductor wafer
heat processing
wafer heat
manifold cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/082,981
Inventor
Satoshi Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KAWACHI, SATOSHI
Application granted granted Critical
Publication of USD404369S publication Critical patent/USD404369S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 a perspective view of a cover manifold cover for use in a semiconductor wafer heat processing apparatus;
FIG. 2 a front elevational view thereof;
FIG. 3 a rear elevational view thereof;
FIG. 4 a top plan view thereof;
FIG. 5 a bottom plan view thereof;
FIG. 6 a right side view thereof;
FIG. 7 a left side view thereof; and,
FIG. 8 a cross-sectional view taken along line VIII-VIII in FIG. 2.

Claims (1)

  1. I claim the ornamental design for a manifold cover for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/082,981 1997-08-20 1998-02-02 Manifold cover for use in a semiconductor wafer heat processing apparatus Expired - Lifetime USD404369S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9-65097 1997-08-20
JP6509797 1997-08-20

Publications (1)

Publication Number Publication Date
USD404369S true USD404369S (en) 1999-01-19

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US29/082,981 Expired - Lifetime USD404369S (en) 1997-08-20 1998-02-02 Manifold cover for use in a semiconductor wafer heat processing apparatus

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802790S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD802545S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Lower chamber for a plasma processing apparatus
USD804436S1 (en) * 2015-06-12 2017-12-05 Hitachi High-Technologies Corporation Upper chamber for a plasma processing apparatus
USD812578S1 (en) * 2016-02-26 2018-03-13 Hitachi High-Technologies Corporation Upper chamber for a plasma processing apparatus
USD840365S1 (en) * 2017-01-31 2019-02-12 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD849227S1 (en) * 2017-12-12 2019-05-21 Systems Spray-Cooled, Inc. Burner bump out
USD849228S1 (en) * 2017-12-19 2019-05-21 Systems Spray-Cooled, Inc Burner bump out
USD851237S1 (en) * 2017-11-01 2019-06-11 Systems Spray-Cooled, Inc Watertight sidewall dustcover
USD851743S1 (en) * 2017-12-19 2019-06-18 Systems Spray-Cooled, Inc Burner bump out
USD925481S1 (en) * 2018-12-06 2021-07-20 Kokusai Electric Corporation Inlet liner for substrate processing apparatus
USD953985S1 (en) * 2020-08-11 2022-06-07 Neturen Co., Ltd. Rectifier
USD953986S1 (en) * 2020-08-11 2022-06-07 Neturen Co., Ltd. Rectifier
USD954649S1 (en) * 2020-08-11 2022-06-14 Neturen Co., Ltd. Rectifier
USD954648S1 (en) * 2020-08-11 2022-06-14 Neturen Co., Ltd. Rectifier
USD1003243S1 (en) * 2021-06-28 2023-10-31 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD1003834S1 (en) * 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD1008967S1 (en) * 2022-05-16 2023-12-26 Japan Aviation Electronics Industry, Limited Collar for connector

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802545S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Lower chamber for a plasma processing apparatus
USD804436S1 (en) * 2015-06-12 2017-12-05 Hitachi High-Technologies Corporation Upper chamber for a plasma processing apparatus
USD802790S1 (en) * 2015-06-12 2017-11-14 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD812578S1 (en) * 2016-02-26 2018-03-13 Hitachi High-Technologies Corporation Upper chamber for a plasma processing apparatus
USD840365S1 (en) * 2017-01-31 2019-02-12 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD851237S1 (en) * 2017-11-01 2019-06-11 Systems Spray-Cooled, Inc Watertight sidewall dustcover
USD849227S1 (en) * 2017-12-12 2019-05-21 Systems Spray-Cooled, Inc. Burner bump out
USD851743S1 (en) * 2017-12-19 2019-06-18 Systems Spray-Cooled, Inc Burner bump out
USD849228S1 (en) * 2017-12-19 2019-05-21 Systems Spray-Cooled, Inc Burner bump out
USD925481S1 (en) * 2018-12-06 2021-07-20 Kokusai Electric Corporation Inlet liner for substrate processing apparatus
USD953985S1 (en) * 2020-08-11 2022-06-07 Neturen Co., Ltd. Rectifier
USD953986S1 (en) * 2020-08-11 2022-06-07 Neturen Co., Ltd. Rectifier
USD954649S1 (en) * 2020-08-11 2022-06-14 Neturen Co., Ltd. Rectifier
USD954648S1 (en) * 2020-08-11 2022-06-14 Neturen Co., Ltd. Rectifier
USD1003243S1 (en) * 2021-06-28 2023-10-31 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD1003834S1 (en) * 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD1008967S1 (en) * 2022-05-16 2023-12-26 Japan Aviation Electronics Industry, Limited Collar for connector

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