USD749531S1 - Diffusion assembly for front opening unified pod - Google Patents

Diffusion assembly for front opening unified pod Download PDF

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Publication number
USD749531S1
USD749531S1 US29/510,673 US201429510673F USD749531S US D749531 S1 USD749531 S1 US D749531S1 US 201429510673 F US201429510673 F US 201429510673F US D749531 S USD749531 S US D749531S
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US
United States
Prior art keywords
front opening
opening unified
unified pod
diffusion assembly
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/510,673
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English (en)
Inventor
Chih-Ming Lin
Ming-Chien Chiu
Jui-Ken Kao
Chen-Hao Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gudeng Precision Industrial Co Ltd
Original Assignee
Gudeng Precision Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gudeng Precision Industrial Co Ltd filed Critical Gudeng Precision Industrial Co Ltd
Assigned to GUDENG PRECISION INDUSTRIAL CO., LTD. reassignment GUDENG PRECISION INDUSTRIAL CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHIU, MING-CHIEN, CHANG, CHEN-HAO, KAO, JUI-KEN, LIN, CHIH-MING
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Publication of USD749531S1 publication Critical patent/USD749531S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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US29/510,673 2014-06-09 2014-12-02 Diffusion assembly for front opening unified pod Active USD749531S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW103303461F TWD172679S (zh) 2014-06-09 2014-06-09 晶圓盒之氣體擴散裝置
TW103303461 2014-06-09

Publications (1)

Publication Number Publication Date
USD749531S1 true USD749531S1 (en) 2016-02-16

Family

ID=55275808

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/510,673 Active USD749531S1 (en) 2014-06-09 2014-12-02 Diffusion assembly for front opening unified pod

Country Status (2)

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US (1) USD749531S1 (zh)
TW (1) TWD172679S (zh)

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD342529S (en) * 1992-04-30 1993-12-21 S & K Products Holder for carrying wafers
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US5844683A (en) * 1996-05-22 1998-12-01 Applied Materials, Inc. Position sensor system for substrate holders
US5960959A (en) * 1998-01-13 1999-10-05 Industrial Technology Research Institute Wafer retaining mechanism
US20030052039A1 (en) * 2001-09-18 2003-03-20 Cu Ruben S. Wafer Boat
US6981594B1 (en) * 2003-06-17 2006-01-03 National Semiconductor Corporation Method and apparatus to facilitate transport of semiconductor wafers
US20080273959A1 (en) * 2005-12-09 2008-11-06 Alcatel Lucent Sealed Enclosure for Transporting and Storing Semiconductor Substrates
US7500564B2 (en) * 2004-08-16 2009-03-10 Dongbu Electronics Co., Ltd. Wafer carrying apparatus
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
USD594424S1 (en) * 2007-07-12 2009-06-16 Hiwin Mikrosystem Corp. Wafer carrier
US7556153B2 (en) * 2006-08-15 2009-07-07 Gudeng Precision Industrial Co., Ltd. Wafer pod and wafer holding device thereof
US7857139B2 (en) * 2007-09-24 2010-12-28 Intel Corporation Invertible front opening unified pod
US7857140B2 (en) * 2005-12-06 2010-12-28 Fujitsu Semiconductor Limited Semiconductor wafer storage case and semiconductor wafer storing method
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US8544651B2 (en) * 2012-01-20 2013-10-01 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer transfer pod for reducing wafer particulate contamination
US8783463B2 (en) * 2008-03-13 2014-07-22 Entegris, Inc. Wafer container with tubular environmental control components

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD342529S (en) * 1992-04-30 1993-12-21 S & K Products Holder for carrying wafers
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US5844683A (en) * 1996-05-22 1998-12-01 Applied Materials, Inc. Position sensor system for substrate holders
US5960959A (en) * 1998-01-13 1999-10-05 Industrial Technology Research Institute Wafer retaining mechanism
US20030052039A1 (en) * 2001-09-18 2003-03-20 Cu Ruben S. Wafer Boat
US6981594B1 (en) * 2003-06-17 2006-01-03 National Semiconductor Corporation Method and apparatus to facilitate transport of semiconductor wafers
US7500564B2 (en) * 2004-08-16 2009-03-10 Dongbu Electronics Co., Ltd. Wafer carrying apparatus
US7857140B2 (en) * 2005-12-06 2010-12-28 Fujitsu Semiconductor Limited Semiconductor wafer storage case and semiconductor wafer storing method
US20080273959A1 (en) * 2005-12-09 2008-11-06 Alcatel Lucent Sealed Enclosure for Transporting and Storing Semiconductor Substrates
US7556153B2 (en) * 2006-08-15 2009-07-07 Gudeng Precision Industrial Co., Ltd. Wafer pod and wafer holding device thereof
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
USD594424S1 (en) * 2007-07-12 2009-06-16 Hiwin Mikrosystem Corp. Wafer carrier
US7857139B2 (en) * 2007-09-24 2010-12-28 Intel Corporation Invertible front opening unified pod
US8783463B2 (en) * 2008-03-13 2014-07-22 Entegris, Inc. Wafer container with tubular environmental control components
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US8544651B2 (en) * 2012-01-20 2013-10-01 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer transfer pod for reducing wafer particulate contamination

Also Published As

Publication number Publication date
TWD172679S (zh) 2015-12-21

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