USD749531S1 - Diffusion assembly for front opening unified pod - Google Patents
Diffusion assembly for front opening unified pod Download PDFInfo
- Publication number
- USD749531S1 USD749531S1 US29/510,673 US201429510673F USD749531S US D749531 S1 USD749531 S1 US D749531S1 US 201429510673 F US201429510673 F US 201429510673F US D749531 S USD749531 S US D749531S
- Authority
- US
- United States
- Prior art keywords
- front opening
- opening unified
- unified pod
- diffusion assembly
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103303461F TWD172679S (zh) | 2014-06-09 | 2014-06-09 | 晶圓盒之氣體擴散裝置 |
TW103303461 | 2014-06-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD749531S1 true USD749531S1 (en) | 2016-02-16 |
Family
ID=55275808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/510,673 Active USD749531S1 (en) | 2014-06-09 | 2014-12-02 | Diffusion assembly for front opening unified pod |
Country Status (2)
Country | Link |
---|---|
US (1) | USD749531S1 (zh) |
TW (1) | TWD172679S (zh) |
Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD342529S (en) * | 1992-04-30 | 1993-12-21 | S & K Products | Holder for carrying wafers |
US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
US5844683A (en) * | 1996-05-22 | 1998-12-01 | Applied Materials, Inc. | Position sensor system for substrate holders |
US5960959A (en) * | 1998-01-13 | 1999-10-05 | Industrial Technology Research Institute | Wafer retaining mechanism |
US20030052039A1 (en) * | 2001-09-18 | 2003-03-20 | Cu Ruben S. | Wafer Boat |
US6981594B1 (en) * | 2003-06-17 | 2006-01-03 | National Semiconductor Corporation | Method and apparatus to facilitate transport of semiconductor wafers |
US20080273959A1 (en) * | 2005-12-09 | 2008-11-06 | Alcatel Lucent | Sealed Enclosure for Transporting and Storing Semiconductor Substrates |
US7500564B2 (en) * | 2004-08-16 | 2009-03-10 | Dongbu Electronics Co., Ltd. | Wafer carrying apparatus |
USD589474S1 (en) * | 2007-06-06 | 2009-03-31 | Tokyo Electron Limited | Wafer holding member |
USD589912S1 (en) * | 2007-06-06 | 2009-04-07 | Tokyo Electron Limited | Wafer holding member |
USD594424S1 (en) * | 2007-07-12 | 2009-06-16 | Hiwin Mikrosystem Corp. | Wafer carrier |
US7556153B2 (en) * | 2006-08-15 | 2009-07-07 | Gudeng Precision Industrial Co., Ltd. | Wafer pod and wafer holding device thereof |
US7857139B2 (en) * | 2007-09-24 | 2010-12-28 | Intel Corporation | Invertible front opening unified pod |
US7857140B2 (en) * | 2005-12-06 | 2010-12-28 | Fujitsu Semiconductor Limited | Semiconductor wafer storage case and semiconductor wafer storing method |
USD674366S1 (en) * | 2011-01-20 | 2013-01-15 | Tokyo Electron Limited | Wafer holding member |
USD674761S1 (en) * | 2011-10-20 | 2013-01-22 | Tokyo Electron Limited | Wafer holding member |
US8544651B2 (en) * | 2012-01-20 | 2013-10-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer transfer pod for reducing wafer particulate contamination |
US8783463B2 (en) * | 2008-03-13 | 2014-07-22 | Entegris, Inc. | Wafer container with tubular environmental control components |
-
2014
- 2014-06-09 TW TW103303461F patent/TWD172679S/zh unknown
- 2014-12-02 US US29/510,673 patent/USD749531S1/en active Active
Patent Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD342529S (en) * | 1992-04-30 | 1993-12-21 | S & K Products | Holder for carrying wafers |
US5452795A (en) * | 1994-11-07 | 1995-09-26 | Gallagher; Gary M. | Actuated rotary retainer for silicone wafer box |
US5844683A (en) * | 1996-05-22 | 1998-12-01 | Applied Materials, Inc. | Position sensor system for substrate holders |
US5960959A (en) * | 1998-01-13 | 1999-10-05 | Industrial Technology Research Institute | Wafer retaining mechanism |
US20030052039A1 (en) * | 2001-09-18 | 2003-03-20 | Cu Ruben S. | Wafer Boat |
US6981594B1 (en) * | 2003-06-17 | 2006-01-03 | National Semiconductor Corporation | Method and apparatus to facilitate transport of semiconductor wafers |
US7500564B2 (en) * | 2004-08-16 | 2009-03-10 | Dongbu Electronics Co., Ltd. | Wafer carrying apparatus |
US7857140B2 (en) * | 2005-12-06 | 2010-12-28 | Fujitsu Semiconductor Limited | Semiconductor wafer storage case and semiconductor wafer storing method |
US20080273959A1 (en) * | 2005-12-09 | 2008-11-06 | Alcatel Lucent | Sealed Enclosure for Transporting and Storing Semiconductor Substrates |
US7556153B2 (en) * | 2006-08-15 | 2009-07-07 | Gudeng Precision Industrial Co., Ltd. | Wafer pod and wafer holding device thereof |
USD589474S1 (en) * | 2007-06-06 | 2009-03-31 | Tokyo Electron Limited | Wafer holding member |
USD589912S1 (en) * | 2007-06-06 | 2009-04-07 | Tokyo Electron Limited | Wafer holding member |
USD594424S1 (en) * | 2007-07-12 | 2009-06-16 | Hiwin Mikrosystem Corp. | Wafer carrier |
US7857139B2 (en) * | 2007-09-24 | 2010-12-28 | Intel Corporation | Invertible front opening unified pod |
US8783463B2 (en) * | 2008-03-13 | 2014-07-22 | Entegris, Inc. | Wafer container with tubular environmental control components |
USD674366S1 (en) * | 2011-01-20 | 2013-01-15 | Tokyo Electron Limited | Wafer holding member |
USD674761S1 (en) * | 2011-10-20 | 2013-01-22 | Tokyo Electron Limited | Wafer holding member |
US8544651B2 (en) * | 2012-01-20 | 2013-10-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer transfer pod for reducing wafer particulate contamination |
Also Published As
Publication number | Publication date |
---|---|
TWD172679S (zh) | 2015-12-21 |
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