TWD172679S - 晶圓盒之氣體擴散裝置 - Google Patents

晶圓盒之氣體擴散裝置

Info

Publication number
TWD172679S
TWD172679S TW103303461F TW103303461F TWD172679S TW D172679 S TWD172679 S TW D172679S TW 103303461 F TW103303461 F TW 103303461F TW 103303461 F TW103303461 F TW 103303461F TW D172679 S TWD172679 S TW D172679S
Authority
TW
Taiwan
Prior art keywords
wafer box
design
gas diffusion
air inlet
accommodation space
Prior art date
Application number
TW103303461F
Other languages
English (en)
Original Assignee
家登精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 家登精密工業股份有限公司 filed Critical 家登精密工業股份有限公司
Priority to TW103303461F priority Critical patent/TWD172679S/zh
Priority to US29/510,673 priority patent/USD749531S1/en
Publication of TWD172679S publication Critical patent/TWD172679S/zh

Links

Abstract

【物品用途】;本設計物品係設置於晶圓盒內，用以將氣體均勻擴散至晶圓盒內。;【設計說明】;本設計晶圓盒之氣體擴散裝置，其中左側視圖與右側視圖相對稱，故省略左側視圖。;本設計晶圓盒之氣體擴散裝置，包括一本體，該本體具有一容置空間；一進氣部，位於容置空間底側；一檔止件位於容置空間，該檔止件與本體後側形成一間隙。;該檔止件面向本體前側具有一平面，該平面具有靠近進氣部之一第一部分(B’-B’端面剖視圖)，及遠離進氣部之一第二部分(A’-A’端面剖視圖)；該第一部分寬度不變，該第二部分寬度往遠離進氣部方向漸增。;綜上所述，本設計之晶圓盒擴散裝置，利用內部容置空間設計，完成氣體擴散均勻之效果。
TW103303461F 2014-06-09 2014-06-09 晶圓盒之氣體擴散裝置 TWD172679S (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW103303461F TWD172679S (zh) 2014-06-09 2014-06-09 晶圓盒之氣體擴散裝置
US29/510,673 USD749531S1 (en) 2014-06-09 2014-12-02 Diffusion assembly for front opening unified pod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103303461F TWD172679S (zh) 2014-06-09 2014-06-09 晶圓盒之氣體擴散裝置

Publications (1)

Publication Number Publication Date
TWD172679S true TWD172679S (zh) 2015-12-21

Family

ID=55275808

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103303461F TWD172679S (zh) 2014-06-09 2014-06-09 晶圓盒之氣體擴散裝置

Country Status (2)

Country Link
US (1) USD749531S1 (zh)
TW (1) TWD172679S (zh)

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD342529S (en) * 1992-04-30 1993-12-21 S & K Products Holder for carrying wafers
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US5844683A (en) * 1996-05-22 1998-12-01 Applied Materials, Inc. Position sensor system for substrate holders
US5960959A (en) * 1998-01-13 1999-10-05 Industrial Technology Research Institute Wafer retaining mechanism
US6615994B2 (en) * 2001-09-18 2003-09-09 Intel Corporation Wafer boat
US6981594B1 (en) * 2003-06-17 2006-01-03 National Semiconductor Corporation Method and apparatus to facilitate transport of semiconductor wafers
KR100573896B1 (ko) * 2004-08-16 2006-04-26 동부일렉트로닉스 주식회사 웨이퍼 이탈방지 장치 및 방법
WO2007066384A1 (ja) * 2005-12-06 2007-06-14 Fujitsu Limited 半導体ウェハの収納ケース及び半導体ウェハの収納方法
FR2896912B1 (fr) * 2005-12-09 2008-11-28 Alcatel Sa Enceinte etanche pour le transport et le stockage de substrats semi-conducteurs
TWM309202U (en) * 2006-08-15 2007-04-01 Gudeng Prec Industral Co Ltd Wafer pod and wafer holding device thereof
USD589474S1 (en) * 2007-06-06 2009-03-31 Tokyo Electron Limited Wafer holding member
USD589912S1 (en) * 2007-06-06 2009-04-07 Tokyo Electron Limited Wafer holding member
USD594424S1 (en) * 2007-07-12 2009-06-16 Hiwin Mikrosystem Corp. Wafer carrier
US7857139B2 (en) * 2007-09-24 2010-12-28 Intel Corporation Invertible front opening unified pod
CN102017119B (zh) * 2008-03-13 2014-01-01 安格斯公司 具有管状环境控制部件的晶圆容器
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US8544651B2 (en) * 2012-01-20 2013-10-01 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer transfer pod for reducing wafer particulate contamination

Also Published As

Publication number Publication date
USD749531S1 (en) 2016-02-16

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