USD571833S1 - Top panel for microwave introduction window of plasma processing apparatus - Google Patents

Top panel for microwave introduction window of plasma processing apparatus Download PDF

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Publication number
USD571833S1
USD571833S1 US29/252,840 US25284006F USD571833S US D571833 S1 USD571833 S1 US D571833S1 US 25284006 F US25284006 F US 25284006F US D571833 S USD571833 S US D571833S
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United States
Prior art keywords
processing apparatus
plasma processing
top panel
microwave introduction
introduction window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US29/252,840
Inventor
Kinya Ota
Cai zhong Tian
Junichi Kitagawa
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KITAGAWA, JUNICHI, OTA, KINYA, TIAN, CAI ZHONG
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Publication of USD571833S1 publication Critical patent/USD571833S1/en
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FIG. 1 is a front view of a top panel for microwave introduction window of plasma processing apparatus showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a sectional view taken along line 77 of FIG. 5;
FIG. 8 is an enlarged view taken along line 88 of FIG. 7;
FIG. 9 is an enlarged view taken along line 99 of FIG. 7; and,
FIG. 10 is a perspective view thereof.

Claims (1)

  1. The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as show and described.
US29/252,840 2005-07-29 2006-01-30 Top panel for microwave introduction window of plasma processing apparatus Expired - Lifetime USD571833S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005022105 2005-07-29

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USD571833S1 true USD571833S1 (en) 2008-06-24

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD732094S1 (en) * 2012-07-20 2015-06-16 Ivoclar Vivadent Ag Firing plate for a dental furnace
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD828190S1 (en) * 2016-10-03 2018-09-11 Sintokogio, Ltd. Probe
USD830865S1 (en) * 2016-10-03 2018-10-16 Sintokogio, Ltd. Probe
USD851144S1 (en) * 2017-12-04 2019-06-11 Liqua-Tech Corporation Register gear adapter plate
USD851693S1 (en) * 2017-12-04 2019-06-18 Liqua-Tech Corporation Register gear adapter plate
USD862539S1 (en) * 2017-12-04 2019-10-08 Liqua-Tech Corporation Register gear adapter plate
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD894137S1 (en) 2017-10-05 2020-08-25 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD902165S1 (en) 2018-03-09 2020-11-17 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD908645S1 (en) 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD940765S1 (en) 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
US11362404B2 (en) 2020-10-30 2022-06-14 Applied Materials, Inc. Microwave window including first and second plates with vertical stepped areas configured for pressure sealing a dielectric plate between the first and second plates
USD967081S1 (en) 2020-10-30 2022-10-18 Applied Materials, Inc. Microwave transmission window assembly
USD970566S1 (en) 2020-03-23 2022-11-22 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD982638S1 (en) * 2021-12-30 2023-04-04 Cloudminds Robotics Co., Ltd. Harmonic actuator
USD982970S1 (en) * 2021-04-12 2023-04-11 Gripwiq ApS Suction cup
USD1007449S1 (en) 2021-05-07 2023-12-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD732094S1 (en) * 2012-07-20 2015-06-16 Ivoclar Vivadent Ag Firing plate for a dental furnace
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD828190S1 (en) * 2016-10-03 2018-09-11 Sintokogio, Ltd. Probe
USD830865S1 (en) * 2016-10-03 2018-10-16 Sintokogio, Ltd. Probe
USD894137S1 (en) 2017-10-05 2020-08-25 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD851144S1 (en) * 2017-12-04 2019-06-11 Liqua-Tech Corporation Register gear adapter plate
USD851693S1 (en) * 2017-12-04 2019-06-18 Liqua-Tech Corporation Register gear adapter plate
USD862539S1 (en) * 2017-12-04 2019-10-08 Liqua-Tech Corporation Register gear adapter plate
USD946638S1 (en) 2017-12-11 2022-03-22 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD902165S1 (en) 2018-03-09 2020-11-17 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD908645S1 (en) 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD970566S1 (en) 2020-03-23 2022-11-22 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
US11362404B2 (en) 2020-10-30 2022-06-14 Applied Materials, Inc. Microwave window including first and second plates with vertical stepped areas configured for pressure sealing a dielectric plate between the first and second plates
USD967081S1 (en) 2020-10-30 2022-10-18 Applied Materials, Inc. Microwave transmission window assembly
USD940765S1 (en) 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD966357S1 (en) 2020-12-02 2022-10-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD982970S1 (en) * 2021-04-12 2023-04-11 Gripwiq ApS Suction cup
USD1007449S1 (en) 2021-05-07 2023-12-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD982638S1 (en) * 2021-12-30 2023-04-04 Cloudminds Robotics Co., Ltd. Harmonic actuator

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