USD405430S - Inner tube for use in a semiconductor wafer heat processing apparatus - Google Patents

Inner tube for use in a semiconductor wafer heat processing apparatus Download PDF

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Publication number
USD405430S
USD405430S US29/074,301 US7430197F USD405430S US D405430 S USD405430 S US D405430S US 7430197 F US7430197 F US 7430197F US D405430 S USD405430 S US D405430S
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US
United States
Prior art keywords
processing apparatus
semiconductor wafer
inner tube
heat processing
wafer heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/074,301
Inventor
Noriaki Matsushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MATSUSHIMA, NORIAKI
Application granted granted Critical
Publication of USD405430S publication Critical patent/USD405430S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1: a perspective view of a inner tube for use in a semiconductor wafer heat processing apparatus;
FIG. 2: a front elevational view thereof, the rear elevational view, the right side view and the left side view are identical with the front view;
FIG. 3: a top plan view thereof;
FIG. 4: a bottom plan view thereof; and,
FIG. 5: a cross sectional view thereof taken along line V-V in FIG. 3.

Claims (1)

  1. I claim the ornamental design for inner tube for use in a semiconductor wafer heat processing apparatus, as shown and described.
US29/074,301 1997-01-31 1997-07-24 Inner tube for use in a semiconductor wafer heat processing apparatus Expired - Lifetime USD405430S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9-2653 1997-01-31
JP265397 1997-01-31

Publications (1)

Publication Number Publication Date
USD405430S true USD405430S (en) 1999-02-09

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US29/074,301 Expired - Lifetime USD405430S (en) 1997-01-31 1997-07-24 Inner tube for use in a semiconductor wafer heat processing apparatus

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD704807S1 (en) 2011-01-14 2014-05-13 Kohler Co. Waterspout
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD744967S1 (en) 2012-03-20 2015-12-08 Veeco Instruments Inc. Spindle key
USD748591S1 (en) * 2012-03-20 2016-02-02 Veeco Instruments Inc. Keyed spindle
USD749287S1 (en) * 2014-11-10 2016-02-09 Dennis T. Thompson, Sr. Hydraulic jack extension
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD797011S1 (en) * 2016-09-28 2017-09-12 Kent R. Madison Trailer tongue extender
USD798423S1 (en) * 2015-12-21 2017-09-26 Ipex Technologies Inc. Pipe with extended bell portion
US9816184B2 (en) 2012-03-20 2017-11-14 Veeco Instruments Inc. Keyed wafer carrier
USD812595S1 (en) * 2015-11-30 2018-03-13 Kmw Inc. Antenna
USD813210S1 (en) * 2016-06-23 2018-03-20 Voxx International Corporation Antenna housing
USD971192S1 (en) 2019-06-03 2022-11-29 Space Exploration Technologies Corp. Antenna apparatus
USD971900S1 (en) * 2019-06-03 2022-12-06 Space Exploration Technologies Corp. Antenna apparatus
USD976242S1 (en) * 2019-06-03 2023-01-24 Space Exploration Technologies Corp. Antenna apparatus
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD704800S1 (en) 2011-01-14 2014-05-13 Kohler Co. Showerhead
USD704802S1 (en) 2011-01-14 2014-05-13 Kohler Co. Faucet
USD704805S1 (en) 2011-01-14 2014-05-13 Kohler Co. Faucet handle
USD704807S1 (en) 2011-01-14 2014-05-13 Kohler Co. Waterspout
US9816184B2 (en) 2012-03-20 2017-11-14 Veeco Instruments Inc. Keyed wafer carrier
USD744967S1 (en) 2012-03-20 2015-12-08 Veeco Instruments Inc. Spindle key
USD748591S1 (en) * 2012-03-20 2016-02-02 Veeco Instruments Inc. Keyed spindle
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD749287S1 (en) * 2014-11-10 2016-02-09 Dennis T. Thompson, Sr. Hydraulic jack extension
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD812595S1 (en) * 2015-11-30 2018-03-13 Kmw Inc. Antenna
USD798423S1 (en) * 2015-12-21 2017-09-26 Ipex Technologies Inc. Pipe with extended bell portion
USD813210S1 (en) * 2016-06-23 2018-03-20 Voxx International Corporation Antenna housing
USD845936S1 (en) 2016-06-23 2019-04-16 Voxx International Corporation Antenna housing
USD797011S1 (en) * 2016-09-28 2017-09-12 Kent R. Madison Trailer tongue extender
USD971192S1 (en) 2019-06-03 2022-11-29 Space Exploration Technologies Corp. Antenna apparatus
USD971900S1 (en) * 2019-06-03 2022-12-06 Space Exploration Technologies Corp. Antenna apparatus
USD976242S1 (en) * 2019-06-03 2023-01-24 Space Exploration Technologies Corp. Antenna apparatus
USD1012070S1 (en) 2019-06-03 2024-01-23 Space Exploration Technologies Corp. Antenna apparatus
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

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