US7531491B2 - Aqueous cleaning solution for integrated circuit device and method of cleaning using the cleaning solution - Google Patents
Aqueous cleaning solution for integrated circuit device and method of cleaning using the cleaning solution Download PDFInfo
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- US7531491B2 US7531491B2 US10/982,406 US98240604A US7531491B2 US 7531491 B2 US7531491 B2 US 7531491B2 US 98240604 A US98240604 A US 98240604A US 7531491 B2 US7531491 B2 US 7531491B2
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- cleaning solution
- aqueous cleaning
- control agent
- corrosion inhibitor
- metal corrosion
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- 238000004140 cleaning Methods 0.000 title claims abstract description 142
- 238000000034 method Methods 0.000 title abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 62
- 239000002184 metal Substances 0.000 claims abstract description 62
- 230000007797 corrosion Effects 0.000 claims abstract description 40
- 238000005260 corrosion Methods 0.000 claims abstract description 40
- 239000004094 surface-active agent Substances 0.000 claims abstract description 31
- 239000003112 inhibitor Substances 0.000 claims abstract description 30
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 27
- 239000003513 alkali Substances 0.000 claims abstract description 12
- 230000002378 acidificating effect Effects 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000005187 foaming Methods 0.000 claims description 30
- -1 iso-octyl Chemical group 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 15
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 10
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 8
- DGVVWUTYPXICAM-UHFFFAOYSA-N β‐Mercaptoethanol Chemical group OCCS DGVVWUTYPXICAM-UHFFFAOYSA-N 0.000 claims description 8
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 6
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 6
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 4
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 claims description 4
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 claims description 4
- PJUIMOJAAPLTRJ-UHFFFAOYSA-N monothioglycerol Chemical compound OCC(O)CS PJUIMOJAAPLTRJ-UHFFFAOYSA-N 0.000 claims description 4
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 3
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 3
- 125000005645 linoleyl group Chemical group 0.000 claims description 3
- 125000001421 myristyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 3
- JCXJVPUVTGWSNB-UHFFFAOYSA-N Nitrogen dioxide Chemical compound O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 2
- 239000000908 ammonium hydroxide Substances 0.000 claims description 2
- DLDJFQGPPSQZKI-UHFFFAOYSA-N but-2-yne-1,4-diol Chemical compound OCC#CCO DLDJFQGPPSQZKI-UHFFFAOYSA-N 0.000 claims description 2
- OTJZCIYGRUNXTP-UHFFFAOYSA-N but-3-yn-1-ol Chemical compound OCCC#C OTJZCIYGRUNXTP-UHFFFAOYSA-N 0.000 claims description 2
- 125000004432 carbon atom Chemical group C* 0.000 claims description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 2
- 150000004820 halides Chemical class 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims description 2
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 2
- 125000001117 oleyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])/C([H])=C([H])\C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims description 2
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 2
- 125000000446 sulfanediyl group Chemical group *S* 0.000 claims description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims 1
- DKAGJZJALZXOOV-UHFFFAOYSA-N hydrate;hydrochloride Chemical compound O.Cl DKAGJZJALZXOOV-UHFFFAOYSA-N 0.000 claims 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 1
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 239000006260 foam Substances 0.000 abstract description 8
- 239000000243 solution Substances 0.000 description 84
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 22
- 229920005591 polysilicon Polymers 0.000 description 22
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 13
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- 229910052721 tungsten Inorganic materials 0.000 description 9
- 239000010937 tungsten Substances 0.000 description 9
- 239000002736 nonionic surfactant Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- TUJKJAMUKRIRHC-UHFFFAOYSA-N hydroxyl Chemical group [OH] TUJKJAMUKRIRHC-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- BWDBEAQIHAEVLV-UHFFFAOYSA-N 6-methylheptan-1-ol Chemical group CC(C)CCCCCO BWDBEAQIHAEVLV-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 150000001447 alkali salts Chemical class 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 150000001413 amino acids Chemical class 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000003093 cationic surfactant Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000004088 foaming agent Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 241000047703 Nonion Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- WCYWZMWISLQXQU-UHFFFAOYSA-N methyl Chemical compound [CH3] WCYWZMWISLQXQU-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 229940035024 thioglycerol Drugs 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0026—Low foaming or foam regulating compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/72—Ethers of polyoxyalkylene glycols
- C11D1/721—End blocked ethers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0073—Anticorrosion compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/044—Hydroxides or bases
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/164—Organic compounds containing a carbon-carbon triple bond
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/30—Amines; Substituted amines ; Quaternized amines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/34—Organic compounds containing sulfur
- C11D3/3427—Organic compounds containing sulfur containing thiol, mercapto or sulfide groups, e.g. thioethers or mercaptales
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Definitions
- the present invention relates, generally, to an aqueous cleaning solution for cleaning an integrated circuit device and a method of cleaning using the same, and more particularly, to an aqueous cleaning solution for cleaning an integrated circuit device on which a metal and polysilicon are simultaneously exposed, and a method of cleaning using the same.
- SC-1 Standard Cleaning 1, NH 4 OH/H 2 O 2 /H 2 O
- SPM sulfuric Peroxide Mixture, H 2 SO 4 /H 2 O 2
- hydrogen peroxide acts as a strong oxidant.
- an organic substance on a surface of a wafer dissolves and oxidizes.
- hydrogen peroxide may corrode a metal on the surface of the wafer due to the metal reacting with oxygen of the hydrogen peroxide.
- polysilicon formed on the surface of the wafer oxides so as to form a natural silicon oxide layer. Then, the silicon oxide layer is removed together with particles on the surface of the wafer.
- a metal e.g., tungsten
- H 2 O 2 hydrogen peroxide
- the SC-1 or SPM cleaning solution cannot be used as a cleaning solution in the process of forming the gate line.
- the gate line is partially exposed in a subsequent process.
- using the SC-1 or SPM cleaning solution can corrode the gate line in the subsequent process.
- an aqueous cleaning solution that contains a metal corrosion inhibitor is used.
- a conventional aqueous cleaning solution that contains a metal corrosion inhibitor such as aliphatic alcohol with an element of a mercapto group bound thereto, that is, 2-mercaptoethanol or thioglycerol, is disclosed in U.S. Pat. No. 6,200,947.
- This conventional aqueous cleaning solution is a pro-environmental cleaning solution containing a metal corrosion inhibitor and has a superior capability for removing particles, ashing residues, and/or polymers.
- the conventional aqueous cleaning solution protects a metal such as tungsten from corrosion because it contains a metal corrosion inhibitor.
- the conventional aqueous cleaning solution has a high etching characteristic toward polysilicon. Therefore, when cleaning a wafer with exposed polysilicon using the conventional aqueous cleaning solution, undercutting of the polysilicon or Si pitting can occur.
- Another conventional aqueous cleaning solution that is widely used for cleaning a metal includes a cationic surfactant or a nonionic surfactant.
- the cleaning ability is improved due to the superior foaming characteristics of the cleaning solution.
- such an aqueous solution generates a lot of foam during a cleaning process.
- excessive generation of foam can cause an overflow of the cleaning solution in a cleaning bath, which can deteriorate a uniformity of a cleaning effect on a wafer because some of the foam can adhered to the surface of the wafer. This incomplete cleaning can cause a defect on the integrated circuit substrate.
- aqueous cleaning solution that can be used for cleaning a wafer on which both a metal and polysilicon are exposed is disclosed in Korea Laid-Open Patent Application No. 2002-0005388.
- the aqueous cleaning solution contains a silicon corrosion inhibitor that prevents corrosion of polysilicon, and is represented by the following formulas 1 or 2: HO- ⁇ (EO) x -(PO) y ⁇ z —H [Formula 1] R-[ ⁇ (EO) x -(PO) y ⁇ z —H] m [Formula 2]
- EO is an oxyethylene radical
- PO is an oxypropylene radical
- R is a remainder of an alcohol or amine without a hydrogen atom of a hydroxide radical of the alcohol or amine or a remainder of amino acid without a hydrogen atom of the amino acid.
- the aqueous cleaning solution containing a non-ion surfactant represented by the above formulas 1 and 2 can prevent polysilicon from being etched. Also, the above compounds have a low defoaming rate because the compounds have a high foaming characteristic. Therefore, when the aqueous cleaning solution is used for cleaning a wafer, there is a high possibility of an overflow of the aqueous cleaning solution. Moreover, the generated foam can adhere to the surface of the wafer resulting in the wafer having a non-uniform clean surface, which can further cause defects on the surface of the wafer.
- exemplary embodiments of the present invention include aqueous cleaning solutions that are suitable for cleaning an integrated circuit device on which both a metal and polysilicon are exposed while preventing overflow of the aqueous cleaning solution during a cleaning process and obtaining a uniformly clean surface on the wafer after the cleaning process is complete.
- exemplary embodiments of the present invention include methods of cleaning an integrated circuit device on which both a metal and polysilicon are exposed, preventing overflow of the aqueous cleaning solution from a surface of a wafer during a cleaning process, and providing a uniformly clean surface of the wafer after a cleaning process is completed are provided.
- an aqueous cleaning solution for cleaning an integrated circuit device comprises a low foaming surfactant, a metal corrosion inhibitor, a pH control agent, and water.
- the pH control agent is an acidic pH control agent or an alkali pH control agent.
- a surfactant promotes a surface reaction, thereby improving a cleaning ability of the aqueous cleaning solution and protecting polysilicon from an aqueous cleaning solution for cleaning metal.
- the aqueous cleaning solution includes a low foaming surfactant.
- the low foaming surfactant is a modified form of nonionic surfactant that comprises an aliphatic alcohol added to ethylene oxide and a terminal hydroxyl radical that is capped by an alkyl radical.
- the aqueous cleaning solution for cleaning an integrated circuit device further comprises a metal corrosion inhibitor that prevents corrosion of an exposed metal during a cleaning process. Therefore, the aqueous cleaning solution is suitable for cleaning an integrated circuit device in which both a metal and polysilicon are exposed.
- the aqueous cleaning solution is especially suitable for cleaning a metal such as tungsten used to form a gate electrode to reduce a resistance of an integrated circuit device, or to form a metal contact in an early stage of fabricating a semiconductor device.
- the metal corrosion inhibitor of the aqueous cleaning solution can be a material that prevents corrosion of a metal, e.g., tungsten or copper, used for forming a wiring formation of a semiconductor device or a barrier metal, e.g., titanium or titanium nitride.
- a metal e.g., tungsten or copper
- a barrier metal e.g., titanium or titanium nitride.
- the aqueous cleaning solution includes a low foaming surfactant.
- the low foaming surfactant is a modified form of a nonionic surfactant, wherein the low foaming surfactant comprises an aliphatic alcohol added to ethylene oxide and a terminal hydroxyl radical of which is capped by an alkyl radical.
- the aqueous cleaning solution for cleaning an integrated circuit device further comprises a metal corrosion inhibitor that prevents corrosion of an exposed metal during a cleaning process. Therefore, the aqueous cleaning solution is suitable for cleaning an integrated circuit device in which both a metal and polysilicon are exposed.
- the aqueous cleaning solution is especially suitable for cleaning a metal such as tungsten used to form a gate electrode to reduce a resistance of an integrated circuit device, or to form a metal contact in an early stage of fabricating a semiconductor device.
- the metal corrosion inhibitor can be a material that prevents corrosion of a metal for wiring such as tungsten or copper and a barrier metal such as titanium or titanium nitride by the aqueous cleaning solution.
- the aqueous cleaning solution for cleaning an integrated circuit device further includes a compound for controlling a pH of the aqueous cleaning solution such as an alkali pH control agent or an acidic pH control agent.
- a compound for controlling a pH of the aqueous cleaning solution such as an alkali pH control agent or an acidic pH control agent.
- the aqueous cleaning solution can be acidified or basified.
- the aqueous cleaning solution includes an alkali pH control agent that basifies.
- the FIGURE is a graph showing a comparison of defoaming rates of an aqueous cleaning solution which comprises a low foaming surfactant according to exemplary embodiments of the present invention and an aqueous cleaning solution which contains a conventional surfactant.
- a low foaming surfactant contained in an aqueous cleaning solution is represented by the following formula 3: R 1 —O(CH 2 CH 2 O) m —X [Formula 3]
- R1 is a hydrophobic alkyl group such as methyl, butyl, iso-butyl, iso-octyl, nonyl phenyl, octyl phenyl, decyl, tridecyl, lauryl, myristyl, cetyl, stearyl, oleyl, linoleyl or behnyl, m is a number ranging from 0 to 50, and X is a hydrophobic and short alkyl group such as ethyl, propyl, iso-propyl, butyl, or iso-butyl.
- An aqueous cleaning solution comprising a low foaming agent has a faster defoaming rate than an aqueous cleaning solution that contains a cationic surfactant or a nonionic surfactant. Because of the faster defoaming rate, the aqueous cleaning solution comprising the low foaming agent prevents the overflow of the aqueous cleaning solution and the foam from adhering to the surface of the wafer being cleaned.
- the low foaming surfactant exhibits a different solubility in an aqueous cleaning solution and a different capability of surface activating capability at an interface between the polysilicon and the aqueous cleaning solution according to the compounds R1 and X and the value of m. That is, the rate of foaming and defoaming can be controlled by selecting R1, X, and m appropriately.
- a concentration of the low foaming surfactant is preferably from about 0.0001 to about 10 wt %, and more preferably from about 0.001 to about 1 wt %.
- concentration of the low foaming surfactant is too low, the foaming ability of the cleaning solution could be significantly decreased resulting in a decrease in the surfactants ability to protect polysilicon.
- concentration of the low foaming surfactant increases, the foaming ability and polysilicon protection ability of the cleaning solution also increase.
- the concentration of the low forming surfactant reaches a certain level, the polysilicon protection ability of the cleaning solution is neither increased nor decreased.
- the concentration of the low foaming surfactant, at this stage can be varied in accordance with R1, X, the value of m and/or the pH of the aqueous cleaning solution.
- a metal corrosion inhibitor included in the aqueous cleaning solution for cleaning an integrated circuit prevents corrosion of metals such as tungsten, copper, titanium, and titanium nitride, and their alloys by the aqueous cleaning solution.
- the metal corrosion inhibitor can be a compound having a triple bond and including more than one hydroxyl group that can be represented by the following formula 4: R 2 (Z)-C ⁇ C-(Z)-R 3 [Formula 4]
- Z is a straight or branched hydrocarbon group having 1 ⁇ 10 carbon atoms
- R2 and R3 are independently methyl (CH3), methoxy (OCH3), a halide (X), amino (NH2), nitro (NO2), thio (SH), hydroxy(OH), an aldehyde (CHO) or a carboxylic acid (COOH).
- the triple bond prevents corrosion of a metal, and materials constituting R2 and R3 control solubility of the anticorrosive agent in the aqueous cleaning solution and control a surface activating capability at the interface between the surface of the metal and/or polysilicon and the aqueous cleaning solution.
- An example of compound represented by formula 4 is 2-butyne-1, 4-diol or 3-butyne-1-ol.
- the metal corrosion inhibitor can be a thiol compound.
- thiol compounds are 2-mercaptoethanol or 1-mercapto-2,3-propandiol.
- metal corrosion inhibitors that is, thiol compounds and compounds represented by formula 4 have shown favorable characteristics on metal surfaces. Both materials exhibit excellent metal protection characteristics. However, a compound represented by formula 4 exhibits a superior ability to protect polysilicon over the thiol compounds because the compound represented by formula 4 has lower etching rate for polysilicon than the thiol compounds.
- the concentration of the metal corrosion inhibitor in an aqueous cleaning solution is preferably from about 0.0001 to about 10 wt %, and more preferably from about 0.001 to about 1 wt %.
- concentration of the metal corrosion inhibitor is low, metal corrosion caused by the aqueous cleaning solution increases. As the concentration of the metal corrosion inhibitor increases, metal corrosion caused by the cleaning solution decreases. However, when the concentration of the metal corrosion inhibitor reaches a certain level in the cleaning solution, the anticorrosion effect is not linearly increased but unchanged.
- the concentration of a metal corrosion inhibitor in the cleaning solution where the anticorrosion effect is unchanged varies according to the type of metal corrosion inhibitor and pH of the aqueous cleaning solution.
- An aqueous cleaning solution which includes a low foaming surfactant and a metal corrosion inhibitor can be an acidic aqueous solution or a basic aqueous solution. That is, the aqueous cleaning solution can include an acidic pH control agent or an alkali pH control agent for controlling the pH of the aqueous cleaning solution and water.
- the aqueous cleaning solution preferably includes the alkali pH control agent. Examples of processes of which the main purpose is to remove particles are a process of etching tungsten for forming a conductive line such as a gate line or a bit line, or a chemical mechanical polishing (CMP) process for forming a contact or a conductive line by using a damascene process.
- CMP chemical mechanical polishing
- a compound including an inorganic basic salt or an organic basic salt can be used as the alkali pH control agent.
- the former are NaOH, KOH, and NH 4 OH, and examples of the latter are tetra methyl ammonium hydroxide (TMAH) and chlorides.
- TMAH tetra methyl ammonium hydroxide
- chlorides Amongst the above examples, TMAH is preferable for the alkali pH control agent.
- the concentration of the basic pH control agent is preferably from about 0.0001 to about 10 wt %, and more preferably from about 0.01 to about 5 wt %.
- concentration of the basic pH control agent is too low, i.e., alkalinity of the solution is too low, cleaning ability decreases.
- concentration of the basic pH control agent is too high, i.e., an alkalinity of the solution is too high, the cleaning ability of the cleaning solution increases, but the aqueous cleaning solution can corrode a metal on a wafer surface, and moreover, it can corrode cleaning equipment.
- the purpose of the present experiment is to examine defoaming rates of an aqueous cleaning solution that includes a low foaming surfactant according to the exemplary embodiments of the present invention and an aqueous cleaning solution that contains a conventional nonionic surfactant.
- an ammonium hydroxide solution having a pH value at 10.5 was used for both of the aqueous cleaning solutions.
- a height of foam with respect to time was measured after adjusting an initial height of 55 ml.
- the nonionic surfactant is an iso-octyl alcohol ethylene oxide adduct that is represented by formula 5, and the low foaming surfactant according to the exemplary embodiments of the present invention is a low foaming iso-octyl alcohol ethylene oxide adduct, represented by formula 6.
- the low foaming surfactant is a compound in which the hydroxyl radical of the nonionic surfactant is capped by a methyl radical.
- FIG. 1 is a graph showing the defoaming rates of the experiment results.
- the defoaming rate of the aqueous cleaning solution including the low foaming surfactant is 1.175 ml/sec, which is three times faster than that of the aqueous cleaning solution containing a conventional nonionic surfactant, which has a defoaming rate of 0.375 ml/sec.
- An aqueous cleaning solution according to the exemplary embodiments of the present invention is effective for cleaning particles and/or contaminants from a wafer without damaging a pattern formed of a metal and polysilicon. Therefore, the aqueous cleaning solution according to the present invention is suitable for removing particles after forming a gate line formed of a metal such as tungsten.
- the aqueous cleaning solution according to the present invention is effective for protecting the polysilicon and/or integrated circuit substrate and the aqueous cleaning solution does not overflow in a bath since it includes a low foaming surfactant.
- a low foaming surfactant included in the aqueous cleaning solution.
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
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- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
HO-{(EO)x-(PO)y}z—H [Formula 1]
R-[{(EO)x-(PO)y}z—H]m [Formula 2]
R1—O(CH2CH2O)m—X [Formula 3]
R2(Z)-C≡C-(Z)-R3 [Formula 4]
C8H17—O(CH2CH2O)8—H [Formula 5]
C8H17—O(CH2CH2O)8—CH3 [Formula 6]
Claims (10)
R2(Z)-C≡C-(Z)-R3 [Formula 8]
R1—O(CH2CH2O)m—X [Formula 7]
R1—O(CH2CH2O)m—X [Formula 7]
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KR1020030078640A KR20050044085A (en) | 2003-11-07 | 2003-11-07 | Aqueous cleaning solution for integrated circuit device and cleaning method using the cleaning solution |
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US11124884B2 (en) | 2016-04-29 | 2021-09-21 | Chemetall Gmbh | Composition for reducing the removal of material by pickling in the pickling of metal surfaces that contain galvanized and/or ungalvanized steel |
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KR20050044085A (en) | 2005-05-12 |
US20050159322A1 (en) | 2005-07-21 |
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