US3345059A - Crucible for holding molten metal - Google Patents

Crucible for holding molten metal Download PDF

Info

Publication number
US3345059A
US3345059A US439238A US43923865A US3345059A US 3345059 A US3345059 A US 3345059A US 439238 A US439238 A US 439238A US 43923865 A US43923865 A US 43923865A US 3345059 A US3345059 A US 3345059A
Authority
US
United States
Prior art keywords
crucible
molten metal
insulation
metal
shell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US439238A
Inventor
Joseph K Swindt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Priority to US439238A priority Critical patent/US3345059A/en
Priority to NL6603129A priority patent/NL6603129A/xx
Priority to FR52830A priority patent/FR1470946A/en
Priority to DE1521564A priority patent/DE1521564C3/en
Priority to BE677752D priority patent/BE677752A/xx
Priority to GB11151/66A priority patent/GB1098238A/en
Application granted granted Critical
Publication of US3345059A publication Critical patent/US3345059A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/08Details peculiar to crucible or pot furnaces
    • F27B14/10Crucibles
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00Casings; Linings; Walls; Roofs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S264/00Plastic and nonmetallic article shaping or treating: processes
    • Y10S264/57Processes of forming layered products

Definitions

  • a crucible for holding molten metal includes a metal container in a double-walled vessel, the Walls being of thermally insulating material and separated by a cushioning layer. The insulation Walls are confined in an outer box lined with insulation powder.
  • This invention relates to a crucible and, in particular, to a crucible specially adapted to hold molten metal while the surface thereof is being heated sufficiently to effect rapid evolution of the vapor of the metal.
  • the prime requisite is a satisfactory crucible for holding the molten coating metal, e. g. aluminum, while the surface thereof is heated, as by electron bombardment, to effect vaporization at a rapid rate.
  • the problem of providing a satisfactory high-temperature crucible as a source is rendered acute by the fact that many otherwise suitable refractory materials are subject to cracking from sudden thermal expansion and contraction, and are thus not leakproof. Others are subject to attack by the molten metal. Artificially cooled crucibles have a low thermal efiiciency.
  • my crucible comprises an inner receptacle or container of highly refractory material surrounded by a vessel of thermal insulation.
  • the vessel has double walls of insulation with an intermediate layer of compressible refractory or thermal insulation.
  • the entire crucible is disposed within a binding of metal plate but is separated therefrom by a layer of packed refractory powder.
  • an inner receptacle or container is dimensioned to hold a charge of molten metal 11 to be evaporated.
  • the crucible may be of any desired shape in plan but will usually be rectangular. It is composed of a highly refractory material such as the nitride of boron, aluminum or silicon, but need not be free from cracking on heating and cooling.
  • Container 10 is positioned within a double-walled vessel 12 composed of separate walls or shells 12a and 12b of thermal insulation, having a cushioning or expansion layer 13 therebetween.
  • Shells 12a and 12b are preferably made of a castable insulation having a high alumina content.
  • the expansion layer 13 between the side walls of these spaced shells is preferably aluminum-silicate fibers, refractory pebbles or crushable shapes. In any event, it is compressible so as to permit expansion of shell 12a without materially stressing shell 12b.
  • the bottoms of shells 12a and 12b are spaced by a layer 14 of granular material, e.g. alumina powder.
  • a binding of metal plate such as box 15 surrounds the entire crucible structure but is separated therefrom by a densely packed layer 16 of powdery material, such as alumina, similar to that of layer 14.
  • a crucible comprising an innermost vessel of refractory material, confined within a double wall of insulation, the walls being separated by a compressible filling, the entire crucible structure having an outside binding or vessel spaced from it by a densely packed refractorypowder layer.
  • Layer 13 of course, permits expansion and contraction of shell 12a independently of shell 12b while shell 12b aflfords a rigid refractory support for shell 12a. Separating layer 16 further seals against possible contact of a leak of molten metal with binding 15.
  • a crucible for holding molten metal comprising a metal box, a lining of thermal-insulation powder therein, an outer shell of solid thermal insulation seated in said lining, a second lining of thermal-insulation powder in said outer shell, an inner shell of solid thermal insulation seated in said second lining and a container of refractory metal seated in the said inner shell.

Description

Oct. 3, 1967 J. K. SWINDT CRUCIBLE FOR HOLDING MOLTEN METAL Filed March 12, 1965 mus/won JOSEPH K. SW/IVDT r M Attorney United States Patent C) 3,345,059 CRUCIBLE FOR HOLDING MOLTEN METAL Joseph K. Swindt, Manhattan Beach, Calif, assignor to United States Steel Corporation, a corporation of Delaware Filed Mar. 12, 1965, Ser. No. 439,238 1 Claim. (Cl. 266-39) ABSTRACT OF THE DISCLOSURE A crucible for holding molten metal includes a metal container in a double-walled vessel, the Walls being of thermally insulating material and separated by a cushioning layer. The insulation Walls are confined in an outer box lined with insulation powder.
This invention relates to a crucible and, in particular, to a crucible specially adapted to hold molten metal while the surface thereof is being heated sufficiently to effect rapid evolution of the vapor of the metal.
In the coating of material with metal by vapor deposition in a vacuum, the prime requisite is a satisfactory crucible for holding the molten coating metal, e. g. aluminum, while the surface thereof is heated, as by electron bombardment, to effect vaporization at a rapid rate. The problem of providing a satisfactory high-temperature crucible as a source is rendered acute by the fact that many otherwise suitable refractory materials are subject to cracking from sudden thermal expansion and contraction, and are thus not leakproof. Others are subject to attack by the molten metal. Artificially cooled crucibles have a low thermal efiiciency.
I have invented a novel composition crucible which permits expansion and contraction incident to cyclical heating and cooling and yet takes care of leakage of molten metal, in the event of a crack, in such manner as to permit continued operation. In a present preferred embodiment, my crucible comprises an inner receptacle or container of highly refractory material surrounded by a vessel of thermal insulation. The vessel has double walls of insulation with an intermediate layer of compressible refractory or thermal insulation. The entire crucible is disposed within a binding of metal plate but is separated therefrom by a layer of packed refractory powder.
A complete understanding of the invention may be obtained from the following detailed description and explanation which refer to the accompanying drawing illustrating the present preferred embodiment. In the drawing the single figure is a perspective view of a crucible according to my invention, showing a transverse section therethrough.
Referring now in detail to the drawing, an inner receptacle or container is dimensioned to hold a charge of molten metal 11 to be evaporated. The crucible may be of any desired shape in plan but will usually be rectangular. It is composed of a highly refractory material such as the nitride of boron, aluminum or silicon, but need not be free from cracking on heating and cooling.
Container 10 is positioned within a double-walled vessel 12 composed of separate walls or shells 12a and 12b of thermal insulation, having a cushioning or expansion layer 13 therebetween. Shells 12a and 12b are preferably made of a castable insulation having a high alumina content. The expansion layer 13 between the side walls of these spaced shells is preferably aluminum-silicate fibers, refractory pebbles or crushable shapes. In any event, it is compressible so as to permit expansion of shell 12a without materially stressing shell 12b. The bottoms of shells 12a and 12b are spaced by a layer 14 of granular material, e.g. alumina powder.
A binding of metal plate such as box 15 surrounds the entire crucible structure but is separated therefrom by a densely packed layer 16 of powdery material, such as alumina, similar to that of layer 14.
It will be evident from the foregoing that I have provided a crucible comprising an innermost vessel of refractory material, confined within a double wall of insulation, the walls being separated by a compressible filling, the entire crucible structure having an outside binding or vessel spaced from it by a densely packed refractorypowder layer.
The advantage of such crucible is that, in the event of a crack in vessel 10, leakage of molten metal therethrough is confined by the insulation walls 12a and 12b or, if not, is caused to solidify by reason of the steep temperature gradient between the space inside and that outside of the double-walled insulation vessel. Any such leak is thereby plugged by a cementing or self-healing action and exerts no ill effect on continued operation of the crucible. The tendency of the molten metal to react with the crucible parts is much inhibited at the reduced temperature on the exterior of insulation shell 12b. Vessel 10 may therefore be of material resistant to such reaction, regardless of whether it cracks on repeated heating and cooling.
Layer 13, of course, permits expansion and contraction of shell 12a independently of shell 12b while shell 12b aflfords a rigid refractory support for shell 12a. Separating layer 16 further seals against possible contact of a leak of molten metal with binding 15.
Although I have disclosed herein the preferred embodiment of my invention, I intend to cover as well any change or modification therein which may be made without departing from the spirit and scope of the invention as set forth in the claim.
I claim:
A crucible for holding molten metal comprising a metal box, a lining of thermal-insulation powder therein, an outer shell of solid thermal insulation seated in said lining, a second lining of thermal-insulation powder in said outer shell, an inner shell of solid thermal insulation seated in said second lining and a container of refractory metal seated in the said inner shell.
References Cited UNITED STATES PATENTS 2,557,834 6/1951 McMullen 266-43 X 3,079,136 2/1963 Soine 266-39 3,227,431 1/ 1966 Steeves 263--48 J SPENCER OVERHOLSER, Primary Examiner.
E. MAR, Assistant Examiner.
UNITED STATES PATENT OFFICE CERTIFICATE OF CORRECTION Patent No. 3,345,059 October 3, 1967 Joseph K. Swindt It is hereby certified that error appears in the above numbered patent requiring correction and that the said Letters Patent should read as corrected below.
I Columml, line 35, for "composition" read composite column 2, line 53, for "metal" read material Signed and sealed this 29th day of October 1968.
(SEAL) Attest:
EDWARD J. BRENNER Edward M. Fletcher, Jr.
Commissioner of Patents Attesting Officer
US439238A 1965-03-12 1965-03-12 Crucible for holding molten metal Expired - Lifetime US3345059A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US439238A US3345059A (en) 1965-03-12 1965-03-12 Crucible for holding molten metal
NL6603129A NL6603129A (en) 1965-03-12 1966-03-09
FR52830A FR1470946A (en) 1965-03-12 1966-03-10 Crucible
DE1521564A DE1521564C3 (en) 1965-03-12 1966-03-10 Evaporation crucible for primary metals
BE677752D BE677752A (en) 1965-03-12 1966-03-11
GB11151/66A GB1098238A (en) 1965-03-12 1966-03-14 Crucible for holding molten metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US439238A US3345059A (en) 1965-03-12 1965-03-12 Crucible for holding molten metal

Publications (1)

Publication Number Publication Date
US3345059A true US3345059A (en) 1967-10-03

Family

ID=23743882

Family Applications (1)

Application Number Title Priority Date Filing Date
US439238A Expired - Lifetime US3345059A (en) 1965-03-12 1965-03-12 Crucible for holding molten metal

Country Status (6)

Country Link
US (1) US3345059A (en)
BE (1) BE677752A (en)
DE (1) DE1521564C3 (en)
FR (1) FR1470946A (en)
GB (1) GB1098238A (en)
NL (1) NL6603129A (en)

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3437328A (en) * 1967-04-13 1969-04-08 Air Reduction Powder crucibles
US3492383A (en) * 1967-05-12 1970-01-27 Sulzer Ag Process of manufacturing a crack resistant multi-layer furnace lining
JPS5071522A (en) * 1973-07-30 1975-06-13
JPS5091608A (en) * 1973-12-19 1975-07-22
US3914527A (en) * 1974-03-28 1975-10-21 Wheeling Pittsburgh Steel Corp Lining for zinc pot induction heater
US3973076A (en) * 1973-06-07 1976-08-03 Lukens Steel Company Furnace for melting highly corrosive slag
US4149705A (en) * 1977-06-08 1979-04-17 Caterpillar Tractor Co. Foundry ladle and method of making the same
US4208043A (en) * 1977-07-08 1980-06-17 Granges Weda Ab Holding vessel
EP0051910A1 (en) * 1980-11-10 1982-05-19 Aikoh Co. Ltd. A vessel for molten metal
US4339115A (en) * 1979-03-22 1982-07-13 Daussan Et Compagnie Heat insulating lining for metallurgical vessels
US4367866A (en) * 1981-04-10 1983-01-11 Sunbeam Equipment Corporation Furnace adapted to contain molten metal
US4399981A (en) * 1980-10-01 1983-08-23 Noemtak Ants Vessel for molten metal
FR2585273A1 (en) * 1985-07-24 1987-01-30 Daussan & Co COATING FOR PROTECTING THE INTERIOR OF A METALLURGICAL CONTAINER AND METHOD FOR MAKING THE COATING
US4734031A (en) * 1985-10-30 1988-03-29 Micropore International Limited Vessel for holding high temperature bulk materials
US4773852A (en) * 1985-06-11 1988-09-27 Denki Kagaku Kogyo Kabushiki Kaisha Pyrolytic boron nitride crucible and method for producing the same
US5120029A (en) * 1988-02-19 1992-06-09 Durbin Robert J Linings for crucible furnaces and transfer vessels and method of applying same
US5158750A (en) * 1990-06-06 1992-10-27 Praxair S.T. Technology, Inc. Boron nitride crucible
US6245287B1 (en) 1998-03-24 2001-06-12 Nippon Crucible, Co., Ltd. Molten metal vessel and molten metal holding furnace
EP1139049A1 (en) * 2000-03-30 2001-10-04 Novatherm (Sarl) Refractory lining for furnaces containing molten metal
US7194197B1 (en) * 2000-03-16 2007-03-20 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
WO2008003425A1 (en) * 2006-07-06 2008-01-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for electron beam evaporation
US20090255469A1 (en) * 2008-04-15 2009-10-15 Global Solar Energy, Inc. Apparatus and methods for manufacturing thin-film solar cells
DE102009014891A1 (en) * 2009-03-25 2010-09-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for evaporating material inside vacuum chamber, comprises vessel, in which material is evaporatable, where surface area of vessel outer wall is covered with porous heat-insulating layer, which is spaced with gap from outer wall
US20110177622A1 (en) * 2009-12-28 2011-07-21 Global Solar Energy, Inc. Apparatus and methods of mixing and depositing thin film photovoltaic compositions
US20140004641A1 (en) * 2011-03-15 2014-01-02 Sharp Kabushiki Kaisha Vapor deposition device, vapor deposition method, and method for producing organic el display device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2557834A (en) * 1949-02-23 1951-06-19 Carborundum Co Refractory glass wool
US3079136A (en) * 1961-04-26 1963-02-26 Tyler S Soine Reusable reaction vessel
US3227431A (en) * 1961-11-22 1966-01-04 Nat Res Corp Crucible externally lined with filamentary carbon

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2557834A (en) * 1949-02-23 1951-06-19 Carborundum Co Refractory glass wool
US3079136A (en) * 1961-04-26 1963-02-26 Tyler S Soine Reusable reaction vessel
US3227431A (en) * 1961-11-22 1966-01-04 Nat Res Corp Crucible externally lined with filamentary carbon

Cited By (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3437328A (en) * 1967-04-13 1969-04-08 Air Reduction Powder crucibles
DE1758159B1 (en) * 1967-04-13 1972-02-03 Air Reduction Process for the production of a surface-heated crucible for holding molten metal
US3492383A (en) * 1967-05-12 1970-01-27 Sulzer Ag Process of manufacturing a crack resistant multi-layer furnace lining
US3973076A (en) * 1973-06-07 1976-08-03 Lukens Steel Company Furnace for melting highly corrosive slag
JPS5071522A (en) * 1973-07-30 1975-06-13
JPS548448B2 (en) * 1973-07-30 1979-04-16
JPS5091608A (en) * 1973-12-19 1975-07-22
JPS5338282B2 (en) * 1973-12-19 1978-10-14
US3914527A (en) * 1974-03-28 1975-10-21 Wheeling Pittsburgh Steel Corp Lining for zinc pot induction heater
US4149705A (en) * 1977-06-08 1979-04-17 Caterpillar Tractor Co. Foundry ladle and method of making the same
US4208043A (en) * 1977-07-08 1980-06-17 Granges Weda Ab Holding vessel
US4339115A (en) * 1979-03-22 1982-07-13 Daussan Et Compagnie Heat insulating lining for metallurgical vessels
US4399981A (en) * 1980-10-01 1983-08-23 Noemtak Ants Vessel for molten metal
US4532092A (en) * 1980-10-01 1985-07-30 Noemtak Ants Method of making a vessel for molten metal
EP0051910A1 (en) * 1980-11-10 1982-05-19 Aikoh Co. Ltd. A vessel for molten metal
US4367866A (en) * 1981-04-10 1983-01-11 Sunbeam Equipment Corporation Furnace adapted to contain molten metal
US4773852A (en) * 1985-06-11 1988-09-27 Denki Kagaku Kogyo Kabushiki Kaisha Pyrolytic boron nitride crucible and method for producing the same
US4913652A (en) * 1985-06-11 1990-04-03 Denki Kagaku Kogyo Kabushiki Kaisha Pyrolytic boron nitride crucible and method for producing the same
FR2585273A1 (en) * 1985-07-24 1987-01-30 Daussan & Co COATING FOR PROTECTING THE INTERIOR OF A METALLURGICAL CONTAINER AND METHOD FOR MAKING THE COATING
EP0214882A1 (en) * 1985-07-24 1987-03-18 Daussan Et Compagnie Protective lining for the interior of a metallurgical vessel, and process for making the lining
US4799652A (en) * 1985-07-24 1989-01-24 Daussan Et Compagnie Lining for protecting the interior of a metallurgical vessel and a method for forming said lining
AU586519B2 (en) * 1985-07-24 1989-07-13 Daussan Et Compagnie A lining for protecting the interior of a metallurgical vessel and a method for forming said lining
US4734031A (en) * 1985-10-30 1988-03-29 Micropore International Limited Vessel for holding high temperature bulk materials
US5120029A (en) * 1988-02-19 1992-06-09 Durbin Robert J Linings for crucible furnaces and transfer vessels and method of applying same
US5158750A (en) * 1990-06-06 1992-10-27 Praxair S.T. Technology, Inc. Boron nitride crucible
US6245287B1 (en) 1998-03-24 2001-06-12 Nippon Crucible, Co., Ltd. Molten metal vessel and molten metal holding furnace
US8059945B2 (en) 2000-03-16 2011-11-15 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US7194197B1 (en) * 2000-03-16 2007-03-20 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US20070253686A1 (en) * 2000-03-16 2007-11-01 Wendt Robert G Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US20080247738A1 (en) * 2000-03-16 2008-10-09 Wendt Robert G Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US20080247737A1 (en) * 2000-03-16 2008-10-09 Wendt Robert G Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US8190006B2 (en) 2000-03-16 2012-05-29 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US7760992B2 (en) 2000-03-16 2010-07-20 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US8184963B2 (en) 2000-03-16 2012-05-22 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
EP1139049A1 (en) * 2000-03-30 2001-10-04 Novatherm (Sarl) Refractory lining for furnaces containing molten metal
FR2807151A1 (en) * 2000-03-30 2001-10-05 Novatherm REFRACTORY LINING FOR FURNACES CONTAINING FUSED METAL
CN101484966B (en) * 2006-07-06 2012-05-30 弗劳恩霍弗实用研究促进协会 Apparatus for electron beam evaporation
WO2008003425A1 (en) * 2006-07-06 2008-01-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for electron beam evaporation
US20090255469A1 (en) * 2008-04-15 2009-10-15 Global Solar Energy, Inc. Apparatus and methods for manufacturing thin-film solar cells
US8198123B2 (en) 2008-04-15 2012-06-12 Global Solar Energy, Inc. Apparatus and methods for manufacturing thin-film solar cells
US8202368B2 (en) 2008-04-15 2012-06-19 Yakima Products, Inc. Apparatus and methods for manufacturing thin-film solar cells
US8980008B2 (en) 2008-04-15 2015-03-17 Hanergy Hi-Tech Power (Hk) Limited Apparatus and methods for manufacturing thin-film solar cells
US10312403B2 (en) 2008-04-15 2019-06-04 Global Solar Energy, Inc. Apparatus and methods for manufacturing thin-film solar cells
DE102009014891A1 (en) * 2009-03-25 2010-09-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for evaporating material inside vacuum chamber, comprises vessel, in which material is evaporatable, where surface area of vessel outer wall is covered with porous heat-insulating layer, which is spaced with gap from outer wall
DE102009014891B4 (en) * 2009-03-25 2012-12-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for vaporizing a material in a vacuum chamber
US20110177622A1 (en) * 2009-12-28 2011-07-21 Global Solar Energy, Inc. Apparatus and methods of mixing and depositing thin film photovoltaic compositions
US20140004641A1 (en) * 2011-03-15 2014-01-02 Sharp Kabushiki Kaisha Vapor deposition device, vapor deposition method, and method for producing organic el display device
US9748526B2 (en) * 2011-03-15 2017-08-29 Sharp Kabushiki Kaisha Vapor deposition device, vapor deposition method, and method for producing organic el display device

Also Published As

Publication number Publication date
DE1521564B2 (en) 1974-06-12
DE1521564A1 (en) 1969-10-23
NL6603129A (en) 1966-09-13
FR1470946A (en) 1967-02-24
BE677752A (en) 1966-09-12
GB1098238A (en) 1968-01-10
DE1521564C3 (en) 1975-01-23

Similar Documents

Publication Publication Date Title
US3345059A (en) Crucible for holding molten metal
RU2358831C2 (en) Heated flute for molten metal
JPS5987037A (en) Sensor element used in chemical vapor deposition process performed in radiant absorbing type heater system
US3466662A (en) Fireproof shielded containers for radioactive materials
US2925637A (en) Manufacture of metal ingots and castings
EP0024037B1 (en) A base for a kiln car
US3732068A (en) Cylindrical elongated furnace for treating material at high temperature and under high pressure
JPS5781945A (en) Container for molten metal
US3435881A (en) Anisotropic continuous casting mold
US3491992A (en) Vaporizing crucible
US2856657A (en) Insulating cover
US2915384A (en) Method of producing zirconium
RU2665860C2 (en) Method of metalation of bulky blanks in the reactor of the plant for volumetric metalation, the design of the reactor and the method of its manufacturing
US3389823A (en) Container for the storage and/or transportation of liquefied gases
SU567491A1 (en) Device for settling of layers from a gaseous phase
ES435917A1 (en) Process for producing vessels for containing reactive molten metal
JPS6342095Y2 (en)
JPS6328190Y2 (en)
US1637486A (en) Electric furnace
JPS6043913B2 (en) Crucible for evaporation source
SU1543212A1 (en) Furnace lining
US1838163A (en) Combined receiver and holder
US2016914A (en) Furnace
US4290475A (en) Ingot casting
US1404427A (en) Furnace, kiln, or the like