US20180058478A1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
US20180058478A1
US20180058478A1 US15/674,560 US201715674560A US2018058478A1 US 20180058478 A1 US20180058478 A1 US 20180058478A1 US 201715674560 A US201715674560 A US 201715674560A US 2018058478 A1 US2018058478 A1 US 2018058478A1
Authority
US
United States
Prior art keywords
rotor
cover
recessed portion
cover portion
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US15/674,560
Other languages
English (en)
Inventor
Hiroaki Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Assigned to SHIMADZU CORPORATION reassignment SHIMADZU CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KIMURA, HIROAKI
Publication of US20180058478A1 publication Critical patent/US20180058478A1/en
Priority to US16/890,160 priority Critical patent/US10989225B2/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts

Definitions

  • the present invention relates to a vacuum pump.
  • a rotor of a turbo-molecular pump is, using a fastening member such as a bolt, fastened to a shaft as a rotor shaft (see, e.g., Patent Literature 1, Japanese Patent No. 3974772).
  • a turbo-molecular pump described in Patent Literature 1 a turbo-molecular pump described in Patent Literature 1, a recessed portion is formed at a suction-port-side end surface of a rotor, and a bottom portion of the recessed portion is bolt-fastened to a shaft.
  • a vacuum pump such as a turbo-molecular pump
  • particles generated due to a chemical change in a process gas component upon discharge of process gas flow into the vacuum pump through a suction port As described above, in the case where a recessed portion is formed at a suction-port-side end surface of a rotor, the particles tend to accumulate in the recessed portion.
  • gas inflow into a semiconductor manufacturing device chamber is adjusted such that the internal pressure of the chamber repeatedly increases/decreases, the particles accumulated in the recessed portion rebound toward the chamber. As a result, this leads to lowering of a quality in semiconductor manufacturing.
  • a vacuum pump comprises: a pump rotor rotatably driven by a motor and fastened to a shaft; a recessed portion formed at a suction-port-side end surface of the pump rotor; and a rotor balance correction member including a cover portion configured to cover the recessed portion.
  • a rotor-axial position of the cover portion is set between a position at which an outer surface of the cover portion is coincident with an edge of an inner wall of the recessed portion and a position at which an inner surface of the cover portion is coincident with the suction-port-side end surface of the pump rotor.
  • the pump rotor has an inclined surface having an ascending gradient and connecting between the edge of the inner wall of the recessed portion and the suction-port-side end surface of the pump rotor.
  • the rotor balance correction member includes a first component having a first balance correction portion disposed in the recessed portion, and a second component provided with the cover portion.
  • the cover portion includes a second balance correction portion.
  • the first component includes a third correction portion disposed on an outer peripheral side of the cover portion to cover a portion of the recessed portion and having both of a cover function and a balance correction function.
  • the first component, the pump rotor, and the shaft are fastened together with a bolt, and the second component is fixed to the first component.
  • the shaft penetrates the pump rotor to protrude into the recessed portion, and the rotor balance correction member is fixed to a portion of the shaft protruding into the recessed portion.
  • the shaft penetrates the pump rotor to protrude into the recessed portion, and the second component is fixed to a portion of the shaft protruding into the recessed portion.
  • the vacuum pump further comprises: a communication path connecting between the recessed portion and an external space of the cover portion.
  • FIG. 1 is a view of one embodiment of a vacuum pump of the present invention
  • FIG. 2 is a partial enlarged view of a recessed portion of a pump rotor
  • FIGS. 3A and 3B are views for describing the steps of assembling a balance ring and a cover portion and a balance adjustment method
  • FIGS. 4A and 4B are views for describing the axial position of the cover portion
  • FIG. 5 is a view of a first variation of the present embodiment
  • FIGS. 6A and 6B are views of a second variation of the present embodiment
  • FIG. 7 is a view of a third variation of the present embodiment.
  • FIG. 8 is a view of a fourth variation of the present embodiment.
  • FIGS. 9A and 9B are views of a fifth variation of the present embodiment.
  • FIGS. 10A to 10C are views of a sixth variation of the present embodiment.
  • FIGS. 11A and 11B are views of another example of the sixth variation of the present embodiment.
  • FIG. 1 is a view of one embodiment of a vacuum pump of the present invention, and is a cross-sectional view of an outline configuration of a turbo-molecular pump 1 .
  • the stationary blades 31 and the rotor blades 41 are alternately arranged in an axial direction.
  • the stationary blades 31 are stacked on each other with a spacer ring 33 being interposed between adjacent ones of the stationary blades 31 in a pump axial direction.
  • the shaft 4 b is supported by radial electromagnets 34 , 35 and axial electromagnets 36 provided at a base 3 in a non-contact manner. Displacement from a target levitation position of the shaft 4 b is detected by gap sensors 34 a, 35 a, 36 a.
  • the rotor unit 4 is rotatably driven by a motor 10 .
  • the shaft 4 b is supported by emergency mechanical bearings 37 a, 37 b.
  • gas molecules taken in through a pump suction port 30 are sequentially exhausted by the turbo pump stage (the rotor blades 41 , the stationary blades 31 ) and the screw groove pump stage (the cylindrical portion 42 , the stator 32 ), and then, are discharged through an exhaust port 38 .
  • the base 3 is provided with a coolant water pipe 39 for base cooling.
  • a recessed portion 43 is formed at a pump-suction-port-side end surface 402 of the pump rotor 4 a .
  • a balance correction member 65 is provided at the recessed portion 43 .
  • the balance correction member 65 includes a cover portion 6 configured to cover the recessed portion 43 , and a balance ring 5 for balance correction.
  • the cover portion 6 is, with bolts 75 , fixed to a boss portion 502 of the balance ring 5 such that the cover portion 6 and the balance ring 5 are integrated together as the balance correction member 65 .
  • the balance ring 5 and the pump rotor 4 a are fastened together to the shaft 4 b with bolts 70 .
  • FIG. 2 is a partial enlarged view of the recessed portion 43 of the pump rotor 4 a.
  • a boss portion 401 formed at the top of the shaft 4 b and a boss portion 501 formed on a back side of the balance ring 5 are inserted into a through-hole 400 formed at a bottom surface of the recessed portion of the pump rotor 4 a.
  • a raised portion 503 is formed at the top of the boss portion 502 of the balance ring 5 , and is fitted into a recessed portion 601 formed on a back side of the cover portion 6 such that the cover portion 6 is positioned.
  • the height (the axial position) of an outer surface 602 of the cover portion 6 will be described later.
  • FIGS. 3A and 3B are views for describing the steps of assembling the balance ring 5 and the cover portion 6 and a balance adjustment method.
  • the pump rotor 4 a and the balance ring 5 are fastened together to the shaft 4 b with the bolts 70 as shown in FIG. 3A .
  • the pump rotor 4 a and the shaft 4 b are integrated together, and the balance ring 5 is fixed to the bottom surface of the recessed portion of the pump rotor 4 a.
  • an unbalance amount of the rotor unit 4 is measured by a rotation testing machine with the cover portion 6 being not attached.
  • a portion of a correction portion 504 of the balance ring 5 is cut off with, e.g., a drill to reduce the unbalance amount.
  • unbalance may be corrected in such a manner that, e.g., the mass of a locking screw is added to the correction portion 504 .
  • the pump rotor 4 a is made of aluminum alloy, and anti-corrosion treatment is performed for a turbo-molecular pump for the purpose of a semiconductor device application.
  • the anti-corrosion treatment is performed using, e.g., nickel plating.
  • the above-described first and second steps are performed before plating.
  • a corrosion-resistance metal material such as stainless steel is used for the balance ring 5 and the cover portion 6 .
  • plating is performed for the pump rotor 4 a.
  • the cover portion 6 is fixed to the balance ring 5 with the pump rotor 4 a being assembled with the shaft 4 b. Subsequently, balance correction is performed for the rotor unit 4 as in the case of the above-described third step.
  • FIGS. 4A and 4B are views for describing the axial position of the cover portion 6 .
  • FIG. 4A is the view for describing the lower limit of the axial position of the cover portion 6 .
  • the lower position of the outer surface 602 of the cover portion 6 is set at a position coincident with the edge of an inner wall 431 of the recessed portion 43 .
  • the pump rotor 4 a is provided with an inclined surface 403 connecting between the edge (an upper end) of the inner wall 431 of the recessed portion 43 and the pump-suction-port-side end surface 402 . That is, the edge of the recessed portion 43 is chamfered. In this case, the edge of the inner wall 431 serves as a lower end of the inclined surface 403 .
  • the particles P on the outer surface 602 move up to the end surface 402 on the inclined surface 403 as indicated by dashed arrows, and then, move to the rotor blade 41 . Subsequently, the particles P are exhausted.
  • the gradient of the inclined surface 403 is preferably small so that the particles P can easily move over the inclined surface 403 .
  • the lower position of the height of the cover portion 6 is, in terms of the axial position, set such that the outer surface 602 and the end surface 402 are coincident with each other.
  • FIG. 4B is the view for describing the upper limit of the axial position of the cover portion 6 .
  • the axial height of the rotor unit 4 is preferably as small as possible.
  • the upper position of the cover portion 6 is preferably a position when an inner surface 604 of the cover portion 6 contacts the end surface 402 .
  • the axial position of the outer surface 602 of the cover portion 6 is a value obtained by addition of the thickness dimension t of the cover portion 6 to the axial position of the end surface 402 .
  • FIG. 5 is a view of a first variation of the present embodiment. As described with reference to FIGS. 3A and 3B , balance adjustment is performed even after the cover portion 6 has been attached to the balance ring 5 . When the unbalance amount exceeds the reference value, the correction portion 603 of the cover portion 6 is cut off for balance correction. Thus, in the first variation illustrated in FIG. 5 , the thickness of the correction portion 603 is increased such that an extra margin of correction increases.
  • a raised portion 605 is formed at the cover portion 6
  • a recessed portion 505 is formed at the balance ring 5 .
  • a clearance G is formed between the inclined surface 403 and the correction portion 603 of the cover portion 6 .
  • a space of the recessed portion 43 and an external space communicate with each other through the clearance G.
  • the clearance G formed as illustrated in FIG. 5 allows gas in the recessed portion 43 to be promptly exhausted upon vacuum pumping.
  • a though-hole may be formed at the cover portion 6 instead of forming the clearance G.
  • FIGS. 6A and 6B are views of a second variation of the present embodiment.
  • the pump rotor 4 a and the balance ring 5 are integrally fastened together to the shaft 4 b with the bolts 70 .
  • the pump rotor 4 a and the shaft 4 b are fastened together with a bolt 71
  • the pump rotor 4 a and the balance ring 5 are fastened together with a bolt 72 .
  • bolt fastening is performed from a side close to the recessed portion 43 .
  • FIG. 6A bolt fastening is performed from a side close to the recessed portion 43 .
  • a flange 404 is formed at the shaft 4 b, and using a bolt 73 , is fastened to the pump rotor 4 a. Fastening of the bolt 73 is performed from a shaft side (the lower side as viewed in the figure).
  • FIG. 7 is a view of a third variation of the present embodiment.
  • the pump rotor 4 a is provided with a recessed portion 405 for shaft fastening and a boss portion 406 for balance ring fastening.
  • a recessed portion 506 to be fitted onto the boss portion 406 is formed on the back side of the balance ring 5 .
  • the pump rotor 4 a, the shaft 4 b, and the balance ring 5 are integrated together in the following manner: the boss portion 401 of the shaft 4 b is fitted into the recessed portion 405 , and the boss portion 406 of the pump rotor 4 a is fitted into the recessed portion 506 of the balance ring 5 ; and then, fastening with the bolts 70 is performed.
  • FIG. 8 is a view of a fourth variation of the present embodiment. Unlike the balance ring 5 illustrated in FIG. 2 , the outer diameter dimension of the cover portion 6 varies, in a configuration illustrated in FIG. 8 , according to the configuration of the balance ring 5 . As described with reference to FIGS. 3A and 3B , in a balance adjustment process, balance correction is performed using the balance ring 5 before attachment of the cover portion 6 , and is performed again by cutting off of the cover portion 6 after attachment of the cover portion 6 . In the fourth variation, it is configured such that both of these types of balance correction are performed using only the balance ring 5 .
  • a standing portion 507 extending in an opening direction of the recessed portion 43 is formed at an outer peripheral portion of the correction portion 504 , and a correction portion 507 a is provided at a tip end of the standing portion 507 .
  • the correction portion 507 a is disposed on an outer peripheral side of the cover portion 6 , and the correction portion 507 a and the cover portion 6 together cover a portion of the recessed portion 43 . That is, the correction portion 507 a has a balance correction function and a cover function.
  • balance correction before attachment of the cover portion 6 a portion of the correction portion 504 of the balance ring 5 is cut off with, e.g., the drill as in the case illustrated in FIG. 3A .
  • balance correction after attachment of the cover portion 6 balance correction is performed in such a manner that a portion of the correction portion 507 a is cut off with, e.g., the drill.
  • a cutting margin for balance correction is not necessarily provided at the cover portion 6 , and therefore, the thickness of the cover portion 6 can be decreased.
  • the balance correction member 65 has the balance correction function and the cover portion function.
  • the number of steps of an assembly process can be reduced as compared to the case of including two components as in FIG. 2 .
  • balance correction is performed only once after integration of the pump rotor 4 a, the shaft 4 b, and the balance correction member 65 .
  • FIG. 9B shows the case where the correction portion 650 a for balance correction is disposed on the inside of the recessed portion 43 covered with the cover portion 650 .
  • a through-hole of the correction portion 650 a needs to be formed at the cover portion 650 in balance correction, and the configuration with two components is preferable.
  • FIGS. 9A and 9B it is configured such that the balance correction member 65 is fixed to the pump rotor 4 a with bolts 74 .
  • the pump rotor 4 a, the shaft 4 b, and the balance correction member 65 may be fastened together using bolts.
  • FIGS. 10A to 10C and FIGS. 11A and 11B are views of a sixth variation of the present embodiment.
  • the boss portion 401 of the shaft 4 b is configured to penetrate the through-hole 400 of the pump rotor 4 a as illustrated in FIG. 10A .
  • a tip end of the boss portion 401 protruding toward the recessed portion 43 is fitted into the recessed portion 505 formed at the balance ring 5 .
  • the configuration of the cover portion 6 is similar to that illustrated in FIG. 5 .
  • a configuration illustrated in FIG. 10C is made such that the boss portion 401 of the shaft 4 b penetrates the through-hole 400 of the pump rotor 4 a in the configuration of FIG. 8 .
  • the cover portion 6 has the same shape as that in the case illustrated in FIG. 8 , and the configuration of the balance ring 5 is substantially similar to that in the case illustrated in FIG. 8 .
  • the boss portion 401 of the shaft 4 b penetrates the pump rotor 4 a, and therefore, the recessed portion 405 is formed on the back side of the balance ring 5 and the tip end of the shaft 4 b is fitted into the recessed portion 405 .
  • a configuration illustrated in FIG. 11A is made such that the cover portion 6 is fixed to the tip end of the boss portion 401 of the shaft 4 b in the configuration illustrated in FIG. 10B .
  • a configuration illustrated in FIG. 11B is made such that the balance correction member 65 having the balance correction function and the cover portion function is fixed to the tip end of the boss portion 401 of the shaft 4 b.
  • the pump rotor 4 a is bolted to the shaft 4 b, and the balance correction member 65 is bolted to the tip end of the boss portion 401 .
  • a recessed portion 651 to be fitted onto the boss portion 401 is formed at the center of the balance correction member 65 on a back side thereof, and an outer peripheral portion of the cover portion 650 is provided with the thick correction portion 650 a.
  • the balance adjustment process is performed after the pump rotor 4 a and the shaft 4 b have been fastened together and the balance correction member 65 has been fixed to the tip end of the shaft 4 b. In balance correction, a portion of the correction portion 650 a of the balance correction member 65 is cut off.
  • the present embodiment provides the following features and advantageous effects.
  • the turbo-molecular pump 1 includes the balance correction member 65 having the cover portion 6 configured to cover the recessed portion 43 .
  • this can prevent the particles P flowing into the pump from dropping onto the end surface 402 and the outer surface 602 of the cover portion 6 and accumulating in the recessed portion 43 .
  • the particles P on the end surface 402 and the outer surface 602 move in the direction toward the rotor blade 41 due to the centrifugal force, and then, are exhausted toward the pump downstream side. This can prevent accumulation of the particles P on the pump rotor end surface, and can prevent rebounding of the particles P into the semiconductor device chamber due to the increased/decreased pressure of the chamber.
  • the rotor-axial position of the cover portion 6 is set between the position (the position illustrated in FIG. 4A ) at which the outer surface 602 of the cover portion 6 is coincident with the edge of the inner wall 431 of the recessed portion 43 and the position (the position illustrated in FIG. 4B ) at which the inner surface 604 of the cover portion 6 is coincident with the suction-port-side end surface 402 of the pump rotor 4 a.
  • the edge of the inner wall 431 as the lower position limit within a set area is the line of intersection between the inclined surface 403 and the inner wall 431 .
  • the particles P on the outer surface 602 of the cover portion 6 can easily move in the direction toward the rotor blade due to the centrifugal force.
  • the particles P moving on the outer surface 602 are held back by the inner wall 431 , and accumulate at such a portion.
  • the lower position limit of the outer surface 602 is the edge of the inner wall 431 , and therefore, such accumulation of the particles P can be prevented.
  • the vertical inner wall 431 is not exposed, and therefore, wiping of the particles P on the outer surface 602 is facilitated upon pump maintenance.
  • the balance correction member 65 includes two components of the balance ring 5 and the cover portion 6 arranged in the recessed portion 43 , and therefore, the balance correction process by the balance ring 5 is facilitated. Moreover, a material suitable for each component can be used. For example, metal with a great specific gravity is used for the balance ring 5 , and a metal material with a small specific gravity is used for the cover portion 6 .
  • the correction portion 603 for balance correction is also provided at the cover portion 6 , and therefore, there is an extra amount of a correctable margin in balance correction after attachment of the cover portion 6 .
  • the balance ring 5 includes the correction portion 507 a disposed on the outer peripheral side of the cover portion 6 to cover a portion of the recessed portion 43 and having the cover function and the balance correction function.
  • balance correction can be performed by the correction portion 507 a in any of balance correction before attachment of the cover portion 6 and after attachment of the cover portion 6 .
  • the component (the balance ring 5 ) for the balance correction function and the component (the cover portion 6 ) for the cover function are provided as precisely-separated components, and therefore, the configuration dedicated to each function can be provided. For example, the thickness and weight of the cover portion 6 can be reduced as much as possible.
  • FIG. 2 it is configured such that the balance ring 5 , the pump rotor 4 a, and the shaft 4 b are fastened together with the bolts 70 , and therefore, the number of assembly processes can be reduced.
  • the turbo-molecular pump has been described as an example in the above-described embodiment.
  • the present invention is also applicable to a vacuum pump having a rotor configured to rotate at high speed, such as a molecular drag pump.
  • the bolt for attachment of the cover portion may be in such a shape that the bolt slightly protrudes upward from the cover portion.
  • the balance ring and the cover may be plated for corrosion resistance. In this case, the entire surfaces of the balance ring and the cover may be plated, or only an upper surface of the cover portion exposed through the recessed portion may be plated.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
US15/674,560 2016-08-29 2017-08-11 Vacuum pump Abandoned US20180058478A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US16/890,160 US10989225B2 (en) 2016-08-29 2020-06-02 Vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016166990A JP2018035684A (ja) 2016-08-29 2016-08-29 真空ポンプ
JP2016-166990 2016-08-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US16/890,160 Continuation US10989225B2 (en) 2016-08-29 2020-06-02 Vacuum pump

Publications (1)

Publication Number Publication Date
US20180058478A1 true US20180058478A1 (en) 2018-03-01

Family

ID=61241872

Family Applications (2)

Application Number Title Priority Date Filing Date
US15/674,560 Abandoned US20180058478A1 (en) 2016-08-29 2017-08-11 Vacuum pump
US16/890,160 Active US10989225B2 (en) 2016-08-29 2020-06-02 Vacuum pump

Family Applications After (1)

Application Number Title Priority Date Filing Date
US16/890,160 Active US10989225B2 (en) 2016-08-29 2020-06-02 Vacuum pump

Country Status (4)

Country Link
US (2) US20180058478A1 (ja)
JP (1) JP2018035684A (ja)
CN (1) CN107795499B (ja)
TW (1) TWI639771B (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2601320A (en) * 2020-11-25 2022-06-01 Edwards S R O Rotor assembly for a turbomolecular pump
US20220252074A1 (en) * 2019-05-31 2022-08-11 Edwards Japan Limited Vacuum pump and vacuum pump component

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
TWI696754B (zh) * 2019-03-15 2020-06-21 承輝先進股份有限公司 具有改良型蓋子之轉子裝置
TWI730470B (zh) * 2019-10-24 2021-06-11 致揚科技股份有限公司 渦輪分子幫浦及其防塵式轉子元件
CN112814927B (zh) * 2019-11-18 2023-05-30 致扬科技股份有限公司 涡轮分子泵及其防尘式转子元件
JP2022111724A (ja) * 2021-01-20 2022-08-01 エドワーズ株式会社 真空ポンプ、回転体、カバー部および回転体の製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6755611B1 (en) * 1999-05-28 2004-06-29 Boc Edwards Japan Limited Vacuum pump
US20140271174A1 (en) * 2013-03-14 2014-09-18 Roger L. Bottomfield Turbine Cap for Turbo-Molecular Pump
US20140369809A1 (en) * 2012-01-21 2014-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolecular pump
US9976572B2 (en) * 2012-09-26 2018-05-22 Shimadzu Corporation Vacuum pump protection net, method for manufacturing the same, and vacuum pump
US20190032669A1 (en) * 2016-02-12 2019-01-31 Edwards Japan Limited Vacuum pump, and flexible cover and rotor used in vacuum pump

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3877546A (en) * 1973-04-12 1975-04-15 Airco Inc Lubrication system for vertical spindle motor
US5217346A (en) * 1988-07-13 1993-06-08 Osaka Vacuum, Ltd. Vacuum pump
JP3812635B2 (ja) * 1999-06-14 2006-08-23 株式会社荏原製作所 ターボ分子ポンプ
JP3974772B2 (ja) 2001-11-16 2007-09-12 Ｂｏｃエドワーズ株式会社 真空ポンプ
ITTO20030421A1 (it) * 2003-06-05 2004-12-06 Varian Spa Pompa da vuoto compatta
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
JP2006342791A (ja) * 2005-05-13 2006-12-21 Boc Edwards Kk 真空ポンプ
DE102005041500A1 (de) * 2005-09-01 2007-03-08 Leybold Vacuum Gmbh Vakuumpumpe
JP4872640B2 (ja) * 2006-12-12 2012-02-08 株式会社島津製作所 真空ポンプおよび製造方法
DE102007051988A1 (de) * 2007-10-31 2009-05-07 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
FR2936287B1 (fr) * 2008-09-22 2018-06-22 Soc De Mecanique Magnetique Pompe turbomoleculaire a montage souple
JP5973839B2 (ja) * 2012-08-21 2016-08-23 株式会社荏原製作所 真空ポンプ用モータ及びこれを備える真空ポンプ
JP6190580B2 (ja) * 2012-09-13 2017-08-30 エドワーズ株式会社 真空ポンプの回転部及び真空ポンプ
CN103398013B (zh) * 2013-08-12 2016-08-24 北京中科科仪股份有限公司 涡轮分子泵

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6755611B1 (en) * 1999-05-28 2004-06-29 Boc Edwards Japan Limited Vacuum pump
US20140369809A1 (en) * 2012-01-21 2014-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolecular pump
US9976572B2 (en) * 2012-09-26 2018-05-22 Shimadzu Corporation Vacuum pump protection net, method for manufacturing the same, and vacuum pump
US20140271174A1 (en) * 2013-03-14 2014-09-18 Roger L. Bottomfield Turbine Cap for Turbo-Molecular Pump
US20190032669A1 (en) * 2016-02-12 2019-01-31 Edwards Japan Limited Vacuum pump, and flexible cover and rotor used in vacuum pump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220252074A1 (en) * 2019-05-31 2022-08-11 Edwards Japan Limited Vacuum pump and vacuum pump component
US11933310B2 (en) * 2019-05-31 2024-03-19 Edwards Japan Limited Vacuum pump and vacuum pump component
GB2601320A (en) * 2020-11-25 2022-06-01 Edwards S R O Rotor assembly for a turbomolecular pump
GB2601320B (en) * 2020-11-25 2023-04-26 Edwards S R O Rotor assembly for a turbomolecular pump

Also Published As

Publication number Publication date
TW201807317A (zh) 2018-03-01
US20200291963A1 (en) 2020-09-17
CN107795499A (zh) 2018-03-13
CN107795499B (zh) 2021-02-12
JP2018035684A (ja) 2018-03-08
US10989225B2 (en) 2021-04-27
TWI639771B (zh) 2018-11-01

Similar Documents

Publication Publication Date Title
US10989225B2 (en) Vacuum pump
US8087907B2 (en) Turbo vacuum pump
US20050249618A1 (en) Vacuum pump
US8109744B2 (en) Turbo vacuum pump
CN108474383B (zh) 真空泵及用于该真空泵的挠性罩及转子
US9771940B2 (en) Vacuum pump
US10781820B2 (en) Turbo-molecular pump
KR102106658B1 (ko) 로터, 및, 이 로터를 구비한 진공 펌프
US20050042118A1 (en) Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US20150354567A1 (en) Scroll compressor
EP3115631B1 (en) Bearing, and scroll-type fluid machinery
JP6706553B2 (ja) 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
US8221052B2 (en) Turbo-molecular pump
JP6908161B2 (ja) 真空ポンプ
JP6190580B2 (ja) 真空ポンプの回転部及び真空ポンプ
US8459931B2 (en) Turbo-molecular pump
JP5157842B2 (ja) ターボ分子ポンプおよび回転体の重心位置調整方法
US20230096958A1 (en) Vacuum pump
JP5577798B2 (ja) ターボ分子ポンプ
TW202130914A (zh) 渦輪分子真空泵
US20200141471A1 (en) Flywheel With Bifurcated Molecular Pump
CN112814927B (zh) 涡轮分子泵及其防尘式转子元件
CN104747465A (zh) 真空泵
WO2017104541A1 (ja) 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
JP2009257213A (ja) ターボ型真空ポンプ

Legal Events

Date Code Title Description
AS Assignment

Owner name: SHIMADZU CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:KIMURA, HIROAKI;REEL/FRAME:043279/0588

Effective date: 20170713

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: ADVISORY ACTION MAILED

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION