US20050053490A1 - Oscillating-piston drive for a vacuum pump and an operating method for said drive - Google Patents

Oscillating-piston drive for a vacuum pump and an operating method for said drive Download PDF

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Publication number
US20050053490A1
US20050053490A1 US10/491,770 US49177004A US2005053490A1 US 20050053490 A1 US20050053490 A1 US 20050053490A1 US 49177004 A US49177004 A US 49177004A US 2005053490 A1 US2005053490 A1 US 2005053490A1
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US
United States
Prior art keywords
drive
piston
coils
current
sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/491,770
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English (en)
Inventor
Rudolf Bahnen
Josef Hodapp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Assigned to LEYBOLD VAKUUM GMBH reassignment LEYBOLD VAKUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BAHNEN, RUDOLF, HODAPP, JOSEF
Publication of US20050053490A1 publication Critical patent/US20050053490A1/en
Abandoned legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00Pump parameters
    • F04B2201/02Piston parameters
    • F04B2201/0201Position of the piston
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00Motor parameters
    • F04B2203/04Motor parameters of linear electric motors
    • F04B2203/0401Current

Definitions

  • the invention relates to an oscillating-piston drive for a vacuum pump with a piston, which presents two piston sections and an intermediate zone provided with a drive magnet, cylinder sections associated to said piston sections, an annular recess arranged between the cylinder sections at a central yoke, said recess forming the space for movement of said drive magnet and an electromagnetic drive surrounding the piston, which comprises yoke components and coils situated to the sides of said central yoke.
  • the present invention relates to an operating method for the drive.
  • An oscillating piston drive of the aforementioned kind is known from WO 00/63 556, drawing FIG. 8 . It exhibits a number of components (coils, pole components, cylinders etc.), adjacent with respect to the space for movement of the drive magnet and which have an influence on the delivery rate.
  • the space for movement be linked by means of slots between the components or current feedthroughs to the outer surroundings. Through such slots, air enters into the space for movement and increases the low pressure forming during operation of the pump within the space for movement. Measures for sealing these slots (for example, adhesive or sealant layers) may impair the efficiency of the electromagnetic drive, since these will increase the distance between the individual components.
  • a pipe section peripherally delimiting the space for movement of the drive magnet reduces the number of slots opening out into the space for movement so that the risk of unwanted pressure increases in this volume is substantially removed.
  • the wall thickness of the pipe may be very small, below 1 mm, for example, so that impairments in the efficiency of the electromagnetic drive are negligible.
  • Expedient materials for the can are those which offer good sliding properties, like plastic, aluminium, stainless steel 1) or alike (not—or only weakly ferromagnetic) 2) .
  • the can may consist of a more strongly ferromagnetic material, and its wall thickness selected at least in the area of the sections outside the central yoke such that the drive magnet magnetises the respective section to the saturation point when it is located in the zones outside of the central yoke.
  • This embodiment of the can has the effect that it at least partly becomes part of the drive.
  • the in each instance saturated section is practically no longer existent for the magnetic field of the related coil.
  • This has an effect equivalent to an enlargement of the air gap for this coil and results in a reduction in the inductance of specifically this coil.
  • the current in a coil is built up when the drive magnet is located in the area of this coil, i.e. the corresponding can section is saturated.
  • phase angle regulator This may be implemented with a simple thyristor regulator.
  • the current amplitude of each half-wave may be adjusted by means of a simple, cost-effective phase angle regulator, as is known from electric drilling machines, for example.
  • the input signal for the phase angle regulator may for example be
  • the frequency of the piston's stoke will in all cases result from the frequency of the supplied alternating current.
  • the drawing figures each depict a piston vacuum pump 1 with a piston 2 .
  • This exhibits piston sections 3 and 4 , to the unoccupied face sides of which each a cylindrical pump chamber 5 , respectively 6 is assigned.
  • the piston 2 and the pump chambers 5 , 6 are located in a housing 7 with cylinder sections 8 , 9 for the piston sections 3 , 4 .
  • the materials for the sliding cylinder surfaces and the corresponding piston surfaces are selected in a basically known manner such that the pump may be operated dry, i.e. without lubricant.
  • a linear drive is assigned to the piston 2 .
  • Said linear drive comprises on the side of the piston a permanent magnet ring 11 , encompassing the piston 2 at its central zone.
  • the permanent magnet ring 11 moves in the annular volume (recess 12 ) encompassing the piston 2 .
  • further permanent magnet rings 13 , 14 are assigned to the permanent magnet 12 on the side of the piston, said further permanent rings axially delimiting the annular recess 12 .
  • cylinder sections 8 , 9 terminate.
  • the coils 15 and 16 are components of the linear drive on the stator side. These are partly encompassed by yoke components 17 , 18 and jointly with these yoke components said coils encompass the cylinder sections 8 , respectively 9 .
  • Currents are made to flow through coils 15 , 16 such that the magnetic field produced by the coils and guided by the yoke components 17 to 19 interact with the magnetic fields of the permanent magnet rings 11 , 13 and 14 in the desired manner.
  • the piston 2 shall oscillate about its centre position such that during this movement the face sides of the piston may fulfil their pumping function.
  • the compression chambers 5 , 6 are each equipped with an inlet valve and an outlet valve (only depicted in drawing FIG. 1 ).
  • an inlet aperture 21 , respectively 22 which is each located between an outer inlet chamber 23 , respectively 24 and the corresponding pump chamber 5 , respectively 6 .
  • the inlet apertures 21 , 22 are designed by way of slot-like radially extending openings in the respective cylinder wall 8 , respectively 9 .
  • the piston sections 3 and 4 release the respective inlet aperture when assuming one of their two dead centres (each in the retracted position in the cylinder section).
  • the outlet valves 26 , 27 are located at the respective face sides.
  • closure components 28 , 29 separate the respective compression chamber 5 , respectively 6 from an outlet chamber 31 , 32 so long until they are opened by the respective piston section 3 , respectively 4 —at high pressure differences also by the generated pressure.
  • the closure components 28 , 29 are designed by way of flexible discs extending over the entire cross-section of the cylinder sections 3 , 4 , said disks being centrally affixed at the housing 7 and which are peripherally actuated by the produced pressure or the face sides of the piston 2 .
  • the piston face sides have been designed to have a concave contour.
  • the face sides of the components forming the cylinder sections 8 , 9 have the function of the valve seats.
  • the can is designated as 34 . It encompasses the annular chamber, respectively the recess 12 , and extends into the area of the stator permanent magnet rings 13 , 14 .
  • FIG. 2 depicts that the can 34 exhibits two lateral sections 35 , 36 of relatively small wall thickness and a centre section with a greater wall thickness.
  • the wall thickness of the lateral sections 35 , 36 is below 1 mm, preferably 0.7 mm. At these wall thicknesses, the desired saturation through the drive magnet 11 occurs, provided the drive magnet is located in the vicinity of the sections 35 , 36 .
  • the greater wall thickness in the centre zone is only required when the can needs to offer a sufficient degree of mechanical strength.
  • FIG. 3 depicts the vacuum pump 1 with its linear drive only in a highly schematic manner. Additionally depicted is an embodiment for the power supply in accordance with the present invention for the coils 15 , 16 .
  • an alternating current preferably the mains current at 50 Hz is supplied to two thyristor regulators 42 , 43 , of which each is connected to one coil 15 , respectively 16 .
  • Regulator 42 allows the passage only of the positive half-wave
  • regulator 43 allows the passage of only the negative half-wave of the alternating current. Passing of currents through the coils is thus no longer effected simultaneously but alternatingly at only one of the two current polarities.
  • the current/time diagrams 44 , 45 , 46 presented in each instance the area of the current feed and between the regulators 42 , 43 and the coils 15 , 16 render apparent the power supply in accordance with the present invention.
  • the coils 15 , 16 are switched on in the respective supply circuit in such a manner that they effect repelling forces on the drive magnet 11 .
  • the piston will oscillate about its central position at the frequency of the supplied alternating current.
  • the permanent magnets 13 , 14 are expediently magnetised such that they will effect on the drive magnet a repelling action. This solution offers the advantage that mechanical springs which move the piston back to its central position can be omitted.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US10/491,770 2001-10-06 2002-09-28 Oscillating-piston drive for a vacuum pump and an operating method for said drive Abandoned US20050053490A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10149506A DE10149506A1 (de) 2001-10-06 2001-10-06 Schwingkolbenantrieb für eine Vakuumpumpe sowie Betriebsverfahren für diesen Antrieb
DE10149506.4 2001-10-06
PCT/EP2002/010921 WO2003031818A1 (de) 2001-10-06 2002-09-28 Schwingkolbenantrieb für eine vakuumpumpe sowie betriebsverfahren für diesen antrieb

Publications (1)

Publication Number Publication Date
US20050053490A1 true US20050053490A1 (en) 2005-03-10

Family

ID=7701745

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/491,770 Abandoned US20050053490A1 (en) 2001-10-06 2002-09-28 Oscillating-piston drive for a vacuum pump and an operating method for said drive

Country Status (6)

Country Link
US (1) US20050053490A1 (ja)
EP (1) EP1432912A1 (ja)
JP (1) JP2005504928A (ja)
CN (1) CN1564911A (ja)
DE (1) DE10149506A1 (ja)
WO (1) WO2003031818A1 (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1936188A1 (en) * 2006-12-19 2008-06-25 Dresser Wayne Ab Vapour recovery pump and fuel dispenser
EP1936193A1 (en) * 2006-12-19 2008-06-25 Dresser Wayne Ab Vapour recovery pump and fuel dispenser
US20080164287A1 (en) * 2006-12-19 2008-07-10 Larsson Bengt I Fluid pump and fuel dispenser
US20110052430A1 (en) * 2006-12-18 2011-03-03 Andreas Hofer Hochdrucktechnik Gmbh Fluid machine
US20120317995A1 (en) * 2011-06-18 2012-12-20 Magna Steyr Fahrzeugtechnik Ag & Co Kg Pump for conveying a cryogenic fluid
CN104033354A (zh) * 2014-03-21 2014-09-10 湛江古力高新科技有限公司 电磁外置式压缩机
ES2530416A1 (es) * 2013-08-31 2015-03-02 Gimenez Diego Parra Compresor de gases lineal
WO2019060736A1 (en) * 2017-09-21 2019-03-28 Dayco Ip Holdings, Llc SOLENOID-ACTIVATED VACUUM PUMP FOR A MOTOR SYSTEM AND SYSTEM EQUIPPED WITH SAME
US11033830B2 (en) * 2014-03-11 2021-06-15 Obotics Inc. Methods and devices to hydraulic consumer devices

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006025546A (ja) * 2004-07-08 2006-01-26 Nidec Sankyo Corp アクチュエータ、およびポンプ装置
JP5277554B2 (ja) * 2006-12-27 2013-08-28 シンフォニアテクノロジー株式会社 リニアアクチュエータ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3422765A (en) * 1967-03-24 1969-01-21 Gen Electric Superconducting liquid helium pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3196797A (en) * 1961-09-18 1965-07-27 Mario Pagano S P A Dynamic thrust electromagnetic compressor, particularly suitable for compressing liquid or gaseous substances
WO1989003480A2 (en) * 1987-10-08 1989-04-20 Helix Technology Corporation Linear motor compressor with stationary piston
JPH02145679U (ja) * 1989-05-16 1990-12-11
JPH0442536Y2 (ja) * 1990-02-09 1992-10-07
DE19504751A1 (de) * 1995-02-03 1996-08-08 Werner Sommer Magnetpumpe zum Fördern von flüssigen und gasförmigen Medien
KR0176909B1 (ko) * 1996-05-08 1999-10-01 구자홍 선형 압축기 구동장치
GB2330012B (en) * 1997-10-04 1999-09-15 Zhang Wei Min Linear motor compressor
US6736614B1 (en) * 1999-04-19 2004-05-18 Leybold Vakuum Gmbh Rotary piston drive mechanism
KR100317301B1 (ko) * 2000-01-21 2001-12-22 구자홍 선형 압축기의 피스톤 위치 제어장치 및 방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3422765A (en) * 1967-03-24 1969-01-21 Gen Electric Superconducting liquid helium pump

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110052430A1 (en) * 2006-12-18 2011-03-03 Andreas Hofer Hochdrucktechnik Gmbh Fluid machine
EP1936188A1 (en) * 2006-12-19 2008-06-25 Dresser Wayne Ab Vapour recovery pump and fuel dispenser
EP1936193A1 (en) * 2006-12-19 2008-06-25 Dresser Wayne Ab Vapour recovery pump and fuel dispenser
US20080164287A1 (en) * 2006-12-19 2008-07-10 Larsson Bengt I Fluid pump and fuel dispenser
US8512011B2 (en) 2006-12-19 2013-08-20 Dresser, Inc. Fluid pump and fuel dispenser
US20120317995A1 (en) * 2011-06-18 2012-12-20 Magna Steyr Fahrzeugtechnik Ag & Co Kg Pump for conveying a cryogenic fluid
ES2530416A1 (es) * 2013-08-31 2015-03-02 Gimenez Diego Parra Compresor de gases lineal
US11033830B2 (en) * 2014-03-11 2021-06-15 Obotics Inc. Methods and devices to hydraulic consumer devices
CN104033354A (zh) * 2014-03-21 2014-09-10 湛江古力高新科技有限公司 电磁外置式压缩机
WO2019060736A1 (en) * 2017-09-21 2019-03-28 Dayco Ip Holdings, Llc SOLENOID-ACTIVATED VACUUM PUMP FOR A MOTOR SYSTEM AND SYSTEM EQUIPPED WITH SAME

Also Published As

Publication number Publication date
WO2003031818A1 (de) 2003-04-17
DE10149506A1 (de) 2003-04-10
JP2005504928A (ja) 2005-02-17
EP1432912A1 (de) 2004-06-30
CN1564911A (zh) 2005-01-12

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AS Assignment

Owner name: LEYBOLD VAKUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BAHNEN, RUDOLF;HODAPP, JOSEF;REEL/FRAME:015943/0101;SIGNING DATES FROM 20040225 TO 20040226

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION