US20020008443A1 - Thin film, method for manufacturing thin film, and electronic component - Google Patents
Thin film, method for manufacturing thin film, and electronic component Download PDFInfo
- Publication number
- US20020008443A1 US20020008443A1 US09/874,713 US87471301A US2002008443A1 US 20020008443 A1 US20020008443 A1 US 20020008443A1 US 87471301 A US87471301 A US 87471301A US 2002008443 A1 US2002008443 A1 US 2002008443A1
- Authority
- US
- United States
- Prior art keywords
- thin film
- substrate
- electronic component
- flow rate
- piezoelectric thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 124
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 23
- 239000007789 gas Substances 0.000 claims abstract description 13
- 238000004544 sputter deposition Methods 0.000 claims abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 229910052593 corundum Inorganic materials 0.000 claims description 6
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 6
- 229910052681 coesite Inorganic materials 0.000 claims description 5
- 229910052906 cristobalite Inorganic materials 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 229910052682 stishovite Inorganic materials 0.000 claims description 5
- 229910052905 tridymite Inorganic materials 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 8
- 239000010408 film Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Definitions
- the present invention relates to a thin film, a method for manufacturing the thin film, and an electronic component. More particularly, the present invention relates to a thin film, for example, a piezoelectric material thin film, a dielectric material thin film, and a magnetic material thin film, or other suitable thin film, used for an electronic component, for example, a piezoelectric thin film resonator, a filter, sensor, and an actuator or other suitable device.
- a thin film for example, a piezoelectric material thin film, a dielectric material thin film, and a magnetic material thin film, or other suitable thin film, used for an electronic component, for example, a piezoelectric thin film resonator, a filter, sensor, and an actuator or other suitable device.
- the C axis is preferably oriented in the direction that is perpendicular to the substrate, and the half-width of the rocking curve is preferably small, as described in, for example, “Acoustic Wave Technology Handbook” written by the Japan Society for the Promotion of Science, 150th Committee on Acoustic Wave Technology issued by Ohmsha, Ltd., 1991.
- an excellent C axis preferred orientation film is produced at a low gas pressure region, that is, at a film generating a pressure of 0.6 Pa or less, as described in, for example, J.
- a thin film primarily including AlN formed on a surface of a substrate in which the crystallinity is the C axis preferred orientation, the half-width of a rocking curve is about 1.4° to about 1.6°, and an internal stress can be controlled within the range of approximately ⁇ 1 GPa.
- a method for manufacturing a thin film includes the steps of forming a thin film according to various preferred embodiments of the present invention by a sputtering method using a mixed gas including Ar and nitrogen, wherein the mixed gas has a nitrogen flow rate ratio, that is, a nitrogen flow rate relative to an Ar flow rate and the nitrogen flow rate, of about 10% to about 75%.
- the internal stress of the thin film can be controlled without changing the preferred orientation property of the thin film.
- FIG. 2 is a graph showing the dependency of the internal stress of the AlN piezoelectric thin film on the nitrogen flow rate ratio
- FIG. 3 is a graph showing dependency of the C axis preferred orientation of the AlN piezoelectric thin film on the nitrogen flow rate ratio
- FIG. 4 is a sectional schematic diagram of an AlN piezoelectric thin film resonator according to a preferred embodiment of the present invention.
- FIG. 5 is a sectional schematic diagram of an example of a conventional piezoelectric thin film resonator.
- FIG. 6 is a sectional schematic diagram of another example of a conventional piezoelectric thin film resonator.
- FIG. 1 is a sectional schematic diagram of an AlN piezoelectric thin film according to a preferred embodiment of the present invention.
- An AlN piezoelectric thin film 10 as shown in FIG. 1 is formed on a substrate 12 that is preferably made of, for example, Si or other suitable material.
- the AlN piezoelectric thin film 10 is formed preferably using an RF magnetron sputtering apparatus including an Al target and using a mixed gas including Ar and nitrogen.
- the AlN piezoelectric thin film 10 is formed at a temperature of the substrate 12 of approximately 100° C., with an RF power of the apparatus of 100 W, and at a nitrogen flow rate ratio of about 5% to about 90%.
- the internal stress ⁇ was calculated from the relationship represented by Formula 1 among the warp amount ⁇ of the substrate 12 before and after the formation of the AlN piezoelectric thin film 10 , the measurement distance L of the warp amount, the film thickness d of the AlN piezoelectric thin film 10 , the Young's modulus E of the substrate 12 , the thickness t of the substrate 12 , and the Poisson ratio p of the substrate 12 .
- the internal stress of the AlN piezoelectric thin film 10 can be controlled within the range of about ⁇ 1 GPa, while the C axis preferred orientation of the AlN piezoelectric thin film 10 is in a high, stable region of about 1.4° to about 1.6°.
- the internal stress can be controlled, while the C axis preferred orientation is kept high, by controlling the nitrogen flow rate ratio, which is a film formation parameter.
- FIG. 4 is a sectional schematic diagram of an AlN piezoelectric thin film resonator according to another preferred embodiment of the present invention.
- a piezoelectric thin film resonator 20 as shown in FIG. 4 includes an Si substrate 22 .
- a thin film 24 preferably made of SiO 2 , Si 3 N 4 , or Al 2 O 3 , or other suitable material, a lower layer electrode 26 a , an AlN piezoelectric material thin film 28 primarily including AlN as a piezoelectric thin film, and an upper layer electrode 26 b are formed in the aforementioned order.
- the thin film 24 is preferably formed over the entire top surface of the Si substrate 22 .
- the lower layer electrode 26 a is formed on a portion including the central portion on the top surface of the thin film 24 .
- the AlN piezoelectric thin film 28 is formed on the top surfaces of the thin film 24 and the lower layer electrode 26 a corresponding to the portion including the central portion of the thin film 24 .
- the upper layer electrode 26 b is formed on the top surface of the AlN piezoelectric thin film 28 corresponding to the portion including the central portion of the thin film 24 .
- the AlN piezoelectric thin film 28 is preferably formed under the conditions which are the same as those existing when forming the AlN piezoelectric thin film 10 as shown in the aforementioned FIG. 1.
- the thin film 24 , the lower layer electrode 26 a , and the upper layer electrode 26 b are formed preferably by sputtering, vapor deposition, or other suitable process.
- the film thickness ratio of the thin film 24 relative to the AlN piezoelectric thin film 28 may be adjusted to improve the resonance characteristics, such as the temperature characteristics of the resonant frequency, although the adjustment of the warp of the diaphragm 30 due to the change in the film thickness ratio can be controlled with the internal stress of the AlN piezoelectric thin film 28 .
- the present invention can be applied to not only the piezoelectric material thin films, but also to other thin films, such as dielectric material thin films and magnetic material thin films, and other thin films.
- the present invention can be applied to piezoelectric thin film resonators as described above, but the present invention can also be applied to other electronic components, such as filters, sensors, and actuators.
- the internal stress can be controlled while the preferred orientation property is kept high in the thin films, for example, the piezoelectric material thin films, used for the electronic components, for example, the piezoelectric thin film resonators.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Acoustics & Sound (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Physical Vapour Deposition (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/338,709 US6931701B2 (en) | 2000-07-19 | 2003-01-09 | Method for manufacturing a thin film |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-219619 | 2000-07-19 | ||
JP2000219619A JP3509709B2 (ja) | 2000-07-19 | 2000-07-19 | 圧電薄膜共振子及び圧電薄膜共振子の製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/338,709 Division US6931701B2 (en) | 2000-07-19 | 2003-01-09 | Method for manufacturing a thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
US20020008443A1 true US20020008443A1 (en) | 2002-01-24 |
Family
ID=18714365
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/874,713 Abandoned US20020008443A1 (en) | 2000-07-19 | 2001-06-05 | Thin film, method for manufacturing thin film, and electronic component |
US10/338,709 Expired - Lifetime US6931701B2 (en) | 2000-07-19 | 2003-01-09 | Method for manufacturing a thin film |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/338,709 Expired - Lifetime US6931701B2 (en) | 2000-07-19 | 2003-01-09 | Method for manufacturing a thin film |
Country Status (5)
Country | Link |
---|---|
US (2) | US20020008443A1 (de) |
EP (1) | EP1174525B1 (de) |
JP (1) | JP3509709B2 (de) |
KR (1) | KR20020007212A (de) |
DE (1) | DE60120052T2 (de) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6521100B2 (en) * | 2001-02-02 | 2003-02-18 | Nokia Mobile Phones Ltd | Method of producing a piezoelectric thin film and bulk acoustic wave resonator fabricated according to the method |
US6548937B1 (en) * | 2002-05-01 | 2003-04-15 | Koninklijke Philips Electronics N.V. | Array of membrane ultrasound transducers |
US20060133953A1 (en) * | 2003-12-30 | 2006-06-22 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
US20070211358A1 (en) * | 2006-03-10 | 2007-09-13 | Epson Toyocom Corporation | Total reflection mirror |
WO2011142845A2 (en) * | 2010-01-20 | 2011-11-17 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Acting For And On Behalf Of Arizona State University | Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same |
WO2021134606A1 (en) * | 2019-12-31 | 2021-07-08 | Applied Materials, Inc. | Method and apparatus for deposition of piezo-electric materials |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2004221622A (ja) * | 2002-01-08 | 2004-08-05 | Murata Mfg Co Ltd | 圧電共振子、圧電フィルタ、デュプレクサ、通信装置および圧電共振子の製造方法 |
US6906451B2 (en) | 2002-01-08 | 2005-06-14 | Murata Manufacturing Co., Ltd. | Piezoelectric resonator, piezoelectric filter, duplexer, communication apparatus, and method for manufacturing piezoelectric resonator |
JP2004048639A (ja) * | 2002-05-17 | 2004-02-12 | Murata Mfg Co Ltd | 圧電共振子及びその製造方法等 |
KR20030064530A (ko) * | 2002-01-28 | 2003-08-02 | 엘지이노텍 주식회사 | 박막 용적 공진기 |
JP4240445B2 (ja) * | 2002-05-31 | 2009-03-18 | 独立行政法人産業技術総合研究所 | 超高配向窒化アルミニウム薄膜を用いた圧電素子とその製造方法 |
JP2004297693A (ja) | 2003-03-28 | 2004-10-21 | Fujitsu Media Device Kk | 弾性表面波デバイスの製造方法及び弾性表面波デバイス |
KR100950020B1 (ko) * | 2007-06-28 | 2010-03-29 | 충남대학교산학협력단 | AlN 기판 상에 증착된 Ti(N) 박막저항체를 이용한 감쇠기 |
US8513863B2 (en) | 2009-06-11 | 2013-08-20 | Qualcomm Mems Technologies, Inc. | Piezoelectric resonator with two layers |
JP5471612B2 (ja) * | 2009-06-22 | 2014-04-16 | 日立金属株式会社 | 圧電性薄膜素子の製造方法及び圧電薄膜デバイスの製造方法 |
DE102011114671A1 (de) | 2011-09-30 | 2013-04-04 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip |
DE102011114670A1 (de) * | 2011-09-30 | 2013-04-04 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines optoelektronischen Halbleiterchips und optoelektronischer Halbleiterchip |
WO2016072270A1 (ja) * | 2014-11-05 | 2016-05-12 | 株式会社村田製作所 | 圧電デバイス |
GB2555835B (en) * | 2016-11-11 | 2018-11-28 | Novosound Ltd | Ultrasound transducer |
CN111809154B (zh) * | 2020-06-23 | 2021-07-23 | 奥趋光电技术(杭州)有限公司 | 一种制备高质量硅基氮化铝模板的方法 |
CN112760615B (zh) * | 2020-12-17 | 2023-04-28 | 武汉新芯集成电路制造有限公司 | 一种二氧化硅薄膜及其低温制备方法 |
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JPS5748820A (en) * | 1980-09-05 | 1982-03-20 | Murata Mfg Co Ltd | Surface acoustic wave element |
JPS62214167A (ja) * | 1986-03-17 | 1987-09-19 | Nec Corp | 圧電薄膜の製造方法 |
US4961820A (en) * | 1988-06-09 | 1990-10-09 | Fujitsu Limited | Ashing method for removing an organic film on a substance of a semiconductor device under fabrication |
JPH03175811A (ja) * | 1989-12-05 | 1991-07-30 | Sanyo Electric Co Ltd | 弾性表面波素子 |
JPH03140684A (ja) * | 1990-09-28 | 1991-06-14 | Toto Ltd | 水栓 |
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JPH06284654A (ja) * | 1993-03-25 | 1994-10-07 | Fuji Electric Co Ltd | 高圧回転機巻線の絶縁処理方法 |
US5370029A (en) * | 1993-06-01 | 1994-12-06 | Kramer; Justin | Electromagnetically operated valve |
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JPH07316809A (ja) | 1994-05-27 | 1995-12-05 | Fine Ceramics Center | 窒化アルミニウム薄膜の製造方法 |
JPH08148957A (ja) * | 1994-11-18 | 1996-06-07 | Sumitomo Electric Ind Ltd | 圧電薄膜ウェハーおよびその製造法 |
JP3716440B2 (ja) | 1995-03-01 | 2005-11-16 | 住友電気工業株式会社 | ホウ素含有窒化アルミニウム薄膜および製造方法 |
JP4142753B2 (ja) * | 1996-12-26 | 2008-09-03 | 株式会社東芝 | スパッタターゲット、スパッタ装置、半導体装置およびその製造方法 |
KR19980083268A (ko) * | 1997-05-13 | 1998-12-05 | 윤덕용 | 산화아연/질화알루미늄 2층박막을 이용한 탄성표면과 필터 제조방법 |
JP3813740B2 (ja) * | 1997-07-11 | 2006-08-23 | Tdk株式会社 | 電子デバイス用基板 |
US6312568B2 (en) * | 1999-12-07 | 2001-11-06 | Applied Materials, Inc. | Two-step AIN-PVD for improved film properties |
-
2000
- 2000-07-19 JP JP2000219619A patent/JP3509709B2/ja not_active Expired - Lifetime
-
2001
- 2001-06-05 US US09/874,713 patent/US20020008443A1/en not_active Abandoned
- 2001-07-06 DE DE2001620052 patent/DE60120052T2/de not_active Expired - Lifetime
- 2001-07-06 EP EP20010116486 patent/EP1174525B1/de not_active Expired - Lifetime
- 2001-07-13 KR KR1020010042421A patent/KR20020007212A/ko active Search and Examination
-
2003
- 2003-01-09 US US10/338,709 patent/US6931701B2/en not_active Expired - Lifetime
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6521100B2 (en) * | 2001-02-02 | 2003-02-18 | Nokia Mobile Phones Ltd | Method of producing a piezoelectric thin film and bulk acoustic wave resonator fabricated according to the method |
US6548937B1 (en) * | 2002-05-01 | 2003-04-15 | Koninklijke Philips Electronics N.V. | Array of membrane ultrasound transducers |
US7914740B2 (en) * | 2003-12-30 | 2011-03-29 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
US20060133952A1 (en) * | 2003-12-30 | 2006-06-22 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
US7871569B2 (en) * | 2003-12-30 | 2011-01-18 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
US20060133953A1 (en) * | 2003-12-30 | 2006-06-22 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
US20110086438A1 (en) * | 2003-12-30 | 2011-04-14 | Yuegang Zhang | Biosensor utilizing a resonator having a functionalized surface |
US8173436B2 (en) | 2003-12-30 | 2012-05-08 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
US8940234B2 (en) | 2003-12-30 | 2015-01-27 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
US9267944B2 (en) | 2003-12-30 | 2016-02-23 | Intel Corporation | Biosensor utilizing a resonator having a functionalized surface |
US20070211358A1 (en) * | 2006-03-10 | 2007-09-13 | Epson Toyocom Corporation | Total reflection mirror |
WO2011142845A2 (en) * | 2010-01-20 | 2011-11-17 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Acting For And On Behalf Of Arizona State University | Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same |
WO2011142845A3 (en) * | 2010-01-20 | 2012-01-05 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Acting For And On Behalf Of Arizona State University | Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same |
US8704191B2 (en) | 2010-01-20 | 2014-04-22 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona, Acting For And On Behalf Of Arizona State University | Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same |
WO2021134606A1 (en) * | 2019-12-31 | 2021-07-08 | Applied Materials, Inc. | Method and apparatus for deposition of piezo-electric materials |
Also Published As
Publication number | Publication date |
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JP2002043646A (ja) | 2002-02-08 |
DE60120052D1 (de) | 2006-07-06 |
EP1174525A3 (de) | 2002-01-30 |
JP3509709B2 (ja) | 2004-03-22 |
US20030141788A1 (en) | 2003-07-31 |
KR20020007212A (ko) | 2002-01-26 |
US6931701B2 (en) | 2005-08-23 |
DE60120052T2 (de) | 2006-10-26 |
EP1174525A2 (de) | 2002-01-23 |
EP1174525B1 (de) | 2006-05-31 |
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