TWM548606U - Flexible microgripper device - Google Patents

Flexible microgripper device Download PDF

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Publication number
TWM548606U
TWM548606U TW106209088U TW106209088U TWM548606U TW M548606 U TWM548606 U TW M548606U TW 106209088 U TW106209088 U TW 106209088U TW 106209088 U TW106209088 U TW 106209088U TW M548606 U TWM548606 U TW M548606U
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Taiwan
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link
flexible
actuator
micro
clamping device
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TW106209088U
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Chinese (zh)
Inventor
楊倬昀
沈毓達
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中華精測科技股份有限公司
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Priority to TW106209088U priority Critical patent/TWM548606U/en
Publication of TWM548606U publication Critical patent/TWM548606U/en

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Abstract

A flexible microgripper device includes a gripper part and a flexible linkage device. The flexible linkage device has a single degree of freedom and connects with the gripper part. The flexible linkage device includes two four-linkage mechanisms symmetrical to each other, wherein each of the four-linkage mechanisms includes four linkages, three flexible hinges, and a linear sliding joint. The flexible linkage device is configured to drive the gripper part to open and close for holding a small component.

Description

可撓性微型夾持裝置 Flexible micro-clamping device

本創作是有關於一種夾持裝置,且特別是有關於一種可撓性微型夾持裝置。 The present invention relates to a clamping device, and in particular to a flexible microclamping device.

隨著現今科技的日益發達,產品微小化已成為現今科技發展的主流技術,在微奈米生醫、資訊、和半導體測試等各個領域中,其工作對象越來越小,迫使人們開發一些對微小元件的微細作業方法與手段。然而由於現今的微小元件因尺寸極小,在加工、組裝、移動和定位上都是需被解決的問題。 With the development of today's technology, product miniaturization has become the mainstream technology of today's technology development. In the fields of micro-nanomedicine, information, and semiconductor testing, its working objects are getting smaller and smaller, forcing people to develop some pairs. Micro-working methods and means for small components. However, due to the extremely small size of today's tiny components, problems in processing, assembly, movement, and positioning are all problems to be solved.

目前習知技術是將一般尺寸之夾持裝置,例如夾爪機構,縮小至微尺寸。但一些轉動接頭的製作將會變的非常困難、精度差且壽命短。或是利用微機電技術製造出單一桿件的微夾爪搭配微致動器進行夾取,其製作成本太高且受限材料而導致使用壽命較短。 At present, the conventional technique is to reduce the clamping device of a general size, such as a jaw mechanism, to a micro size. However, the manufacture of some rotary joints will become very difficult, poor precision and short life. Or micro-electromechanical technology to create a single rod micro-claw with a micro-actuator for clamping, the production cost is too high and the material is limited and the service life is shorter.

故,有需要提供一種可撓性微型夾持裝置,以解決習知技術存在的問題。 Therefore, there is a need to provide a flexible micro-clamping device to solve the problems of the prior art.

本創作之主要目的在於提供一種可撓性微型夾持裝置,其結構簡單且容易製造。 The main object of the present invention is to provide a flexible micro-clamping device which is simple in structure and easy to manufacture.

為達上述之目的,本創作提供一種可撓性微型夾持裝置,其包含一夾持部以及一可撓性連桿裝置。可撓性連桿裝置具有單自由度且連接夾持部,其中可撓性連桿裝置包括相互對稱之二個第一四連桿機構,每個第一四連桿機構包括四個連桿、三個可撓性結構及一個線性滑動接頭。可撓性連桿裝置用以驅動夾持部開閉以夾取一微小元件。 To achieve the above objects, the present invention provides a flexible micro-clamping device comprising a clamping portion and a flexible linkage device. The flexible linkage device has a single degree of freedom and is connected to the clamping portion, wherein the flexible linkage device comprises two first four-bar linkages that are symmetrical to each other, and each of the first four-bar linkage mechanisms includes four links, Three flexible structures and one linear sliding joint. The flexible link device is used to drive the clamping portion to open and close to grip a small component.

在本創作之一實施例中,四個連桿分別為一第一連桿、一第二連桿、一第三連桿以及一第四連桿。第一連桿藉由線性滑動接頭連接第二連桿,第一連桿藉由可撓性結構連接第四連桿,以及第三連桿藉由可撓性結構分別連接第二連桿及第四連桿。 In one embodiment of the present invention, the four links are a first link, a second link, a third link, and a fourth link. The first link is connected to the second link by a linear sliding joint, the first link is connected to the fourth link by a flexible structure, and the third link is respectively connected to the second link by a flexible structure Four links.

在本創作之一實施例中,第一連桿為一固定桿,第二連桿、第三連桿以及第四連桿分別為一運動桿。 In an embodiment of the present invention, the first link is a fixed rod, and the second link, the third link and the fourth link are respectively a moving rod.

在本創作之一實施例中,可撓性連桿裝置還包括相互對稱之二個第二四連桿機構,用以與二個第一四連桿機構合成相互對稱之二個六連桿機構,每個六連桿機構包括六個連桿、六個可撓性結構以及一個線性滑動接頭。 In an embodiment of the present invention, the flexible link device further includes two second four-bar linkages symmetrical with each other for synthesizing two six-bar linkages symmetric with the two first four-bar linkages. Each six-bar linkage includes six links, six flexible structures, and one linear sliding joint.

在本創作之一實施例中,六個連桿分別為一第一連桿、一第二連桿、一第三連桿、一第四連桿、一第五連桿以及一第六連桿。第一連桿藉由線性滑動接頭連接第二連桿,第一連桿藉由可撓性結構分別連接第四連桿及第六連桿,第三連桿藉由可撓性結構分別連接第二連桿及第四連桿,以及第五連桿藉由可撓性結構分別連接第四連桿及第六連桿。 In one embodiment of the present invention, the six links are a first link, a second link, a third link, a fourth link, a fifth link, and a sixth link. . The first link is connected to the second link by a linear sliding joint, and the first link is respectively connected to the fourth link and the sixth link by a flexible structure, and the third link is respectively connected by the flexible structure The two links and the fourth link, and the fifth link are respectively connected to the fourth link and the sixth link by a flexible structure.

在本創作之一實施例中,第一連桿為一固定桿,第二連桿、第三連桿、第四連桿、第五連桿以及第六連桿分別為一運動桿。 In an embodiment of the present invention, the first link is a fixed rod, and the second link, the third link, the fourth link, the fifth link, and the sixth link are respectively a moving rod.

在本創作之一實施例中,每個第二四連桿機構包括四個連桿及四個可撓性結構。 In one embodiment of the present invention, each of the second four-bar linkages includes four links and four flexible structures.

在本創作之一實施例中,第二四連桿機構的四個連桿分別為一第七連桿、一第八連桿、一第九連桿以及一第十連桿,第七連桿藉由可撓性結構分別連第八連桿及第十連桿,第九連桿藉由可撓性結構分別連接第八連桿及第十連桿。 In an embodiment of the present invention, the four links of the second four-bar linkage are a seventh link, an eighth link, a ninth link, and a tenth link, and the seventh link The eighth link and the tenth link are respectively connected by the flexible structure, and the ninth link is respectively connected to the eighth link and the tenth link by the flexible structure.

在本創作之一實施例中,第二四連桿機構的第七連桿及第十連桿之間連接的可撓性結構與第一四連桿機構的第一連桿及第四連桿之間連接的可撓性結構、連接第十連桿的第七連桿與第一連桿、以及第十連桿與第四連桿分別於合成六連桿機構後重疊。 In an embodiment of the present invention, the flexible structure connected between the seventh link and the tenth link of the second four-bar linkage mechanism and the first link and the fourth link of the first four-bar linkage mechanism The flexible structure connected between the seventh link connecting the tenth link and the first link, and the tenth link and the fourth link are respectively overlapped after synthesizing the six-bar linkage.

在本創作之一實施例中,可撓性結構為一撓性軸承,且連桿及可撓性結構係一體成形的結構。 In one embodiment of the present invention, the flexible structure is a flexible bearing, and the connecting rod and the flexible structure are integrally formed.

在本創作之一實施例中,可撓性結構的材料不同於連桿的材料,且連桿及可撓性結構係分別形成的結構。 In one embodiment of the present invention, the material of the flexible structure is different from the material of the connecting rod, and the connecting rod and the flexible structure are respectively formed structures.

在本創作之一實施例中,可撓性微型夾持裝置更包括一致動器用以驅動可撓性連桿裝置之線性滑動接頭,且致動器透過可撓性連桿裝置驅動夾持部。 In one embodiment of the present invention, the flexible microclamping device further includes an actuator for driving the linear sliding joint of the flexible linkage device, and the actuator drives the clamping portion through the flexible linkage device.

在本創作之一實施例中,當致動器控制可撓性連桿裝置的位移方向為朝向夾持部移動時,夾持部係相互分開來位於開啟位置。 In an embodiment of the present invention, when the actuator controls the displacement direction of the flexible link device to move toward the clamping portion, the clamping portions are separated from each other to be in the open position.

在本創作之一實施例中,當致動器控制可撓性連桿裝置的位移方向為遠離夾持部移動時,夾持部係相互接近來位於閉合位置。 In an embodiment of the present invention, when the actuator controls the displacement direction of the flexible link device to move away from the clamping portion, the clamping portions are adjacent to each other to be in the closed position.

在本創作之一實施例中,致動器為一壓電式致動器、一形狀 記憶合金式致動器、一熱膨脹式致動器、一電磁式致動器、一靜電式致動器、一電歪式致動器、一液氣壓式致動器、一熱能式致動器、一磁歪式致動器、一磁流變體式致動器、一電流變體式致動器、一光能式致動器或一電化學效應致動器。 In one embodiment of the present invention, the actuator is a piezoelectric actuator, a shape Memory alloy actuator, a thermal expansion actuator, an electromagnetic actuator, an electrostatic actuator, an electric actuator, a liquid pressure actuator, a thermal actuator A magnetic actuator, a magnetorheological actuator, an electrorheological actuator, a light energy actuator or an electrochemical effect actuator.

本創作實施例利用多連桿機構、多個可撓性結構及一線性滑動接頭來設計可撓性微型夾持裝置,因此可撓性微型夾持裝置的結構簡單、加工容易及製作成本可以進一步降低。 The present embodiment uses a multi-link mechanism, a plurality of flexible structures, and a linear sliding joint to design a flexible micro-clamping device. Therefore, the flexible micro-clamping device has a simple structure, easy processing, and manufacturing cost. reduce.

100‧‧‧可撓性微型夾持裝置 100‧‧‧Flexible miniature clamping device

110‧‧‧夾持部 110‧‧‧ gripping department

120‧‧‧可撓性連桿裝置 120‧‧‧Flexible linkage device

122‧‧‧第一四連桿機構 122‧‧‧First four-bar linkage

130‧‧‧致動器 130‧‧‧Actuator

200‧‧‧可撓性微型夾持裝置 200‧‧‧Flexible miniature clamping device

210‧‧‧夾持部 210‧‧‧Clamping Department

220‧‧‧可撓性連桿裝置 220‧‧‧Flexible linkage device

222‧‧‧第一四連桿機構 222‧‧‧First four-bar linkage

224‧‧‧第二四連桿機構 224‧‧‧Second four-bar linkage

226‧‧‧六連桿機構 226‧‧‧ six-bar linkage

230‧‧‧致動器 230‧‧‧Actuator

L11‧‧‧第一連桿 L11‧‧‧first link

L12‧‧‧第二連桿 L12‧‧‧second connecting rod

L13‧‧‧第三連桿 L13‧‧‧ third link

L14‧‧‧第四連桿 L14‧‧‧fourth link

L21‧‧‧第一連桿 L21‧‧‧first link

L22‧‧‧第二連桿 L22‧‧‧second connecting rod

L23‧‧‧第三連桿 L23‧‧‧ third link

L24‧‧‧第四連桿 L24‧‧‧fourth link

L25‧‧‧第五連桿 L25‧‧‧ fifth link

L26‧‧‧第六連桿 L26‧‧‧ sixth link

L31‧‧‧第七連桿 L31‧‧‧ seventh link

L32‧‧‧第八連桿 L32‧‧‧eight link

L33‧‧‧第九連桿 L33‧‧‧ ninth link

L34‧‧‧第十連桿 L34‧‧‧ Tenth link

S1‧‧‧可撓性結構 S1‧‧‧Flexible structure

S2‧‧‧可撓性結構 S2‧‧‧Flexible structure

P1‧‧‧線性滑動接頭 P1‧‧‧Linear sliding joint

P2‧‧‧線性滑動接頭 P2‧‧‧Linear sliding joint

第1圖為本創作第一實施例之可撓性微型夾持裝置之使用示意圖。 Fig. 1 is a schematic view showing the use of the flexible micro-clamping device of the first embodiment of the present invention.

第2圖為本創作第一實施例之第一四連桿機構之使用示意圖。 Fig. 2 is a schematic view showing the use of the first four-bar linkage mechanism of the first embodiment of the present invention.

第3圖為本創作一實施例之連桿與可撓性結構連接之使用示意圖。 Fig. 3 is a schematic view showing the use of the connecting rod and the flexible structure according to an embodiment of the present invention.

第4圖為本創作另一實施例之連桿與可撓性結構連接之使用示意圖。 Figure 4 is a schematic view showing the use of the connecting rod and the flexible structure of another embodiment of the present invention.

第5圖為本創作第一實施例之可撓性微型夾持裝置位於開啟位置之使用示意圖。 Fig. 5 is a schematic view showing the use of the flexible micro-clamping device of the first embodiment in the open position.

第6圖為本創作第一實施例之可撓性微型夾持裝置位於閉合位置之使用示意圖。 Figure 6 is a schematic view showing the use of the flexible micro-clamping device of the first embodiment of the present invention in a closed position.

第7圖為本創作第二實施例之可撓性微型夾持裝置之使用示意圖。 Figure 7 is a schematic view showing the use of the flexible micro-clamping device of the second embodiment of the present invention.

第8A圖為本創作第二實施例之第二四連桿機構之使用示意圖。 Fig. 8A is a schematic view showing the use of the second four-bar linkage mechanism of the second embodiment of the present invention.

第8B圖為本創作第二實施例之第一四連桿機構之使用示意圖。 Figure 8B is a schematic view showing the use of the first four-bar linkage mechanism of the second embodiment of the present invention.

第8C圖為本創作第二實施例之六連桿機構之使用示意圖。 Fig. 8C is a schematic view showing the use of the six-bar linkage mechanism of the second embodiment of the present invention.

第9圖為本創作第二實施例之可撓性微型夾持裝置位於開啟位置之使用示意圖。 Figure 9 is a schematic view showing the use of the flexible micro-clamping device of the second embodiment in the open position.

第10圖為本創作第二實施例之可撓性微型夾持裝置位於閉合位置 之使用示意圖。 Figure 10 is a view showing the flexible micro-clamping device of the second embodiment of the present invention in a closed position A schematic diagram of the use.

為了讓本創作之上述及其他目的、特徵、優點能更明顯易懂,下文將特舉本創作較佳實施例,並配合所附圖式,作詳細說明如下。再者,本創作所提到的方向用語,例如上、下、頂、底、前、後、左、右、內、外、側面、周圍、中央、水平、橫向、垂直、縱向、軸向、徑向、最上層或最下層等,僅是參考附加圖式的方向。因此,使用的方向用語是用以說明及理解本創作,而非用以限制本創作。 In order to make the above and other objects, features and advantages of the present invention more comprehensible, the preferred embodiments of the present invention will be described in detail below. Furthermore, the directional terms mentioned in this creation, such as upper, lower, top, bottom, front, rear, left, right, inner, outer, side, surrounding, central, horizontal, horizontal, vertical, vertical, axial, Radial, uppermost or lowermost, etc., only refer to the direction of the additional schema. Therefore, the directional terminology used is used to describe and understand the creation, and is not intended to limit the creation.

請參照第1至2圖,本創作第一實施例之可撓性微型夾持裝置100包括一夾持部110以及一可撓性連桿裝置120。可撓性連桿裝置120具有單自由度且連接夾持部110,其中可撓性連桿裝置120包括相互對稱之二個第一四連桿機構122,每個第一四連桿機構122包括四個連桿L11、L12、L13、L14、三個可撓性結構S1與一個線性滑動接頭P1。在本創作一實施例中,可撓性微型夾持裝置100例如為撓性夾爪機構。可撓性微型夾持裝置100主要應用於微小元件夾取,例如夾取微米細針之探針卡應用。 Referring to FIGS. 1 to 2, the flexible microclamping device 100 of the first embodiment of the present invention includes a clamping portion 110 and a flexible linkage device 120. The flexible linkage device 120 has a single degree of freedom and is coupled to the clamping portion 110, wherein the flexible linkage device 120 includes two first four-bar linkages 122 that are symmetrical to each other, each of the first four-bar linkages 122 including Four links L11, L12, L13, L14, three flexible structures S1 and one linear sliding joint P1. In one embodiment of the present invention, the flexible microclamping device 100 is, for example, a flexible jaw mechanism. The flexible micro-clamping device 100 is mainly used for micro-component clamping, such as probe card applications for picking up micro-fine needles.

請參照第2圖,本創作第一實施例之每個第一四連桿機構122的四個連桿L11、L12、L13、L14分別為一第一連桿L11、一第二連桿L12、一第三連桿L13以及一第四連桿L14。第一連桿L11藉由線性滑動接頭P1連接第二連桿L12,第一連桿L11藉由可撓性結構S1連接第四連桿L14,第三連桿L13藉由可撓性結構S1分別連接第二連桿L12及第四連桿L14。在本創作之一實施例中,第一連桿L11為一固定桿,而第二連桿L12、第三連桿L13以及第四連桿L14分別為一運動桿。 Referring to FIG. 2, the four links L11, L12, L13, and L14 of each first four-bar linkage 122 of the first embodiment of the present invention are a first link L11 and a second link L12, respectively. A third link L13 and a fourth link L14. The first link L11 is connected to the second link L12 by a linear sliding joint P1, and the first link L11 is connected to the fourth link L14 by the flexible structure S1, and the third link L13 is respectively separated by the flexible structure S1 The second link L12 and the fourth link L14 are connected. In an embodiment of the present invention, the first link L11 is a fixed rod, and the second link L12, the third link L13, and the fourth link L14 are respectively a moving rod.

請參照第3圖,在本創作之一實施例中,可撓性結構S1為一撓性軸承,且連桿L11、L12、L13、L14及可撓性結構S1係一體成形的結構。 Referring to FIG. 3, in one embodiment of the present invention, the flexible structure S1 is a flexible bearing, and the links L11, L12, L13, L14 and the flexible structure S1 are integrally formed.

請參照第4圖,在本創作之另一實施例中,可撓性結構S1的材料不同於連桿L11、L12、L13、L14的材料,且連桿L11、L12、L13、L14及可撓性結構S1係為分別形成的結構。 Referring to FIG. 4, in another embodiment of the present invention, the material of the flexible structure S1 is different from the materials of the links L11, L12, L13, and L14, and the links L11, L12, L13, and L14 are flexible. The structure S1 is a structure formed separately.

請參照第5至6圖,本創作第一實施例之可撓性微型夾持裝置100更包括一致動器130(actuator)用以驅動可撓性連桿裝置120之線性滑動接頭P1,且致動器130透過可撓性連桿裝置120驅動夾持部110。當致動器130控制可撓性連桿裝置120的位移方向為朝向夾持部110移動時,夾持部110係相互分開來位於開啟位置。當致動器130控制可撓性連桿裝置120的位移方向為遠離夾持部110移動時,夾持部110係相互接近來位於閉合位置。藉此,可撓性微型夾持裝置100可進行微小元件的夾持與移動。在本創作之一實施例中,透過致動器130驅動夾持部110,並搭配外部定位系統,例如機械手臂,用以搬運及定位可撓性微型夾持裝置100,便可達到自動化,取代人工操作。 Referring to FIGS. 5-6, the flexible micro-clamping device 100 of the first embodiment of the present invention further includes an actuator 130 for driving the linear sliding joint P1 of the flexible connecting rod device 120, and The actuator 130 drives the nip 110 through the flexible link device 120. When the actuator 130 controls the displacement direction of the flexible link device 120 to move toward the clamping portion 110, the clamping portions 110 are separated from each other to be in the open position. When the actuator 130 controls the displacement direction of the flexible link device 120 to move away from the clamping portion 110, the clamping portions 110 are close to each other to be in the closed position. Thereby, the flexible microclamping device 100 can perform the clamping and movement of the minute elements. In one embodiment of the present invention, the clamping portion 110 is driven by the actuator 130 and coupled with an external positioning system, such as a robot arm, for handling and positioning the flexible micro-clamping device 100, thereby achieving automation and replacing Manual operation.

在本創作之一實施例中,致動器130為一壓電式致動器、一形狀記憶合金式致動器、一熱膨脹式致動器、一電磁式致動器、一靜電式致動器、一電歪式致動器、一液氣壓式致動器、一熱能式致動器、一磁歪式致動器、一磁流變體式致動器、一電流變體式致動器、一光能式致動器或一電化學效應致動器。 In one embodiment of the present invention, the actuator 130 is a piezoelectric actuator, a shape memory alloy actuator, a thermal expansion actuator, an electromagnetic actuator, and an electrostatic actuation. , an electric actuator, a liquid pressure actuator, a thermal actuator, a magnetic actuator, a magnetorheological actuator, an electrorheological actuator, a A light energy actuator or an electrochemical effect actuator.

本創作第一實施例利用多連桿機構(相互對稱之二個第一四連桿機構122)、多個可撓性結構S1(三個可撓性結構S1)及一線性滑動接頭P1 來設計可撓性微型夾持裝置100。因此,可撓性微型夾持裝置100的結構簡單、加工容易及製作成本可以進一步降低。 The first embodiment of the present invention utilizes a multi-link mechanism (two first four-bar linkages 122 that are symmetrical to each other), a plurality of flexible structures S1 (three flexible structures S1), and a linear sliding joint P1. The flexible microclamping device 100 is designed. Therefore, the flexible micro-clamping device 100 has a simple structure, is easy to process, and can be further reduced in manufacturing cost.

此外,本創作第一實施例的可撓性微型夾持裝置100除了微機電製作方式,因其結構簡單,還可以使用一般機械加工來製作,藉以降低成本,並提高壽命。利用撓性結構S1的彈性變形取代轉動接頭,獲得高精度的可撓性微型夾持裝置100。此外,可藉由控制致動器130位移量進而控制夾持部110的閉合量,並藉由閉合量推算夾取力量。因此,本創作第一實施例的可撓性微型夾持裝置100可有以下優點:方便夾取微小元件、可加速製程作業、可一體適用各種微小元件之外型、可控制夾取閉合量以及適用不同大小的微小元件。 In addition, the flexible micro-clamping device 100 of the first embodiment of the present invention can be manufactured by using general mechanical processing in addition to the micro-electromechanical manufacturing method, thereby reducing the cost and improving the life. The high-precision flexible micro-clamping device 100 is obtained by replacing the rotary joint with the elastic deformation of the flexible structure S1. Further, the amount of closing of the grip portion 110 can be controlled by controlling the amount of displacement of the actuator 130, and the gripping force can be estimated by the amount of closure. Therefore, the flexible micro-clamping device 100 of the first embodiment of the present invention has the following advantages: convenient for picking up small components, accelerating process work, integral application of various small component shapes, controllable gripping closure amount, and Suitable for small components of different sizes.

請參照第7至8A-8C圖,本創作第二實施例之可撓性微型夾持裝置200包括一夾持部210以及一可撓性連桿裝置220。可撓性連桿裝置220具有單自由度且連接夾持部210,其中可撓性連桿裝置220包括相互對稱之二個第一四連桿機構222。每個第一四連桿機構222包括四個連桿L21、L22、L23、L24、三個可撓性結構S2與一個線性滑動接頭P2。此外,可撓性連桿裝置220還包括相互對稱之二個第二四連桿機構224,用以與二個第一四連桿機構222合成相互對稱之二個六連桿機構226。每個六連桿機構226包括六個連桿L21、L22、L23、L24、L25、L26、六個可撓性結構S2與一個線性滑動接頭P2。在本創作一實施例中,可撓性微型夾持裝置200例如為撓性夾爪機構。可撓性微型夾持裝置200主要應用於微小元件夾取,例如夾取微米細針之探針卡應用。 Referring to FIGS. 7-8A-8C, the flexible microclamping device 200 of the second embodiment of the present invention includes a clamping portion 210 and a flexible connecting rod device 220. The flexible linkage device 220 has a single degree of freedom and is coupled to the clamping portion 210, wherein the flexible linkage device 220 includes two first four-bar linkages 222 that are symmetrical to each other. Each of the first four-bar linkages 222 includes four links L21, L22, L23, L24, three flexible structures S2 and a linear sliding joint P2. In addition, the flexible link device 220 further includes two second four-bar linkages 224 that are symmetric with each other for synthesizing the two six-bar linkages 226 that are symmetric with each other with the two first four-bar linkages 222. Each six-bar linkage 226 includes six links L21, L22, L23, L24, L25, L26, six flexible structures S2 and one linear slip joint P2. In an embodiment of the present invention, the flexible microclamping device 200 is, for example, a flexible jaw mechanism. The flexible micro-clamping device 200 is mainly used for micro-component clamping, such as probe card applications for picking up micro-fine needles.

請參照第8A圖,在本創作之一實施例中,每個第二四連桿 機構224包括四個連桿L31(L21)、L32、L33、L34(L24)及四個可撓性結構S2。第二四連桿機構224的四個連桿L31(L21)、L32、L33、L34(L24)分別為一第七連桿L31(L21)、一第八連桿L32、L33、一第九連桿L33、以及一第十連桿L34(L24),第七連桿L31(L21)藉由可撓性結構S2分別連第八連桿L32及第十連桿L34(L24),第九連桿L33藉由可撓性結構S2分別連接第八連桿L32及第十連桿L34(L24)。 Please refer to FIG. 8A. In one embodiment of the present creation, each second four-link The mechanism 224 includes four links L31 (L21), L32, L33, L34 (L24) and four flexible structures S2. The four links L31 (L21), L32, L33, L34 (L24) of the second four-bar linkage mechanism 224 are respectively a seventh link L31 (L21), an eighth link L32, L33, and a ninth link. a rod L33, and a tenth link L34 (L24), the seventh link L31 (L21) is connected to the eighth link L32 and the tenth link L34 (L24) by the flexible structure S2, respectively, the ninth link L33 connects the eighth link L32 and the tenth link L34 (L24) by the flexible structure S2, respectively.

請參照第8B圖,在本創作之一實施例中,每個第一四連桿機構222的四個連桿L21、L22、L23、L24分別為一第一連桿L21、一第二連桿L22、一第三連桿L23以及一第四連桿L24。第一連桿L21藉由線性滑動接頭P2連接第二連桿L22,第一連桿L21藉由可撓性結構S2連接第四連桿L24,第三連桿L23藉由可撓性結構S2分別連接第二連桿L22及第四連桿L24。 Referring to FIG. 8B, in one embodiment of the present invention, the four links L21, L22, L23, and L24 of each first four-bar linkage 222 are a first link L21 and a second link, respectively. L22, a third link L23 and a fourth link L24. The first link L21 is connected to the second link L22 by a linear sliding joint P2, and the first link L21 is connected to the fourth link L24 by the flexible structure S2, and the third link L23 is respectively separated by the flexible structure S2 The second link L22 and the fourth link L24 are connected.

請參照8A-8C圖,第二四連桿機構224的第七連桿L31及第十連桿L34之間連接的可撓性結構S2與第一四連桿機構222的第一連桿L21及第四連桿L24之間連接的可撓性結構S2、連接第十連桿L34的第七連桿L31與第一連桿L21、以及第十連桿L34與第四連桿L24分別於合成六連桿機構226後重疊。 Referring to FIGS. 8A-8C, the flexible structure S2 connected between the seventh link L31 and the tenth link L34 of the second four-bar linkage mechanism 224 and the first link L21 of the first four-bar linkage mechanism 222 and The flexible structure S2 connected between the fourth link L24, the seventh link L31 connecting the tenth link L34 and the first link L21, and the tenth link L34 and the fourth link L24 are respectively synthesized The link mechanism 226 is rearwardly overlapped.

請參照第8C圖,在本創作之一實施例中,六個連桿L21、L22、L23、L24、L25、L26分別為一第一連桿L21、一第二連桿L22、一第三連桿L23、一第四連桿L24、一第五連桿L25以及一第六連桿L26。第一連桿L21藉由線性滑動接頭P2連接第二連桿L22,第一連桿L21藉由可撓性結構S2分別連接第四連桿L24及第六連桿L26,第三連桿L23藉由可撓性結構S2 分別連接第二連桿L22及第四連桿L24,以及第五連桿L25藉由可撓性結構S2分別連接第四連桿L24及第六連桿L26。在本創作之一實施例中,第一連桿L21為一固定桿,第二連桿L22、第三連桿L23、第四連桿L24、第五連桿L25以及第六連桿L26分別為一運動桿。 Referring to FIG. 8C, in one embodiment of the present invention, the six links L21, L22, L23, L24, L25, and L26 are a first link L21, a second link L22, and a third connection, respectively. A lever L23, a fourth link L24, a fifth link L25, and a sixth link L26. The first link L21 is connected to the second link L22 by a linear sliding joint P2. The first link L21 is connected to the fourth link L24 and the sixth link L26 respectively by the flexible structure S2, and the third link L23 is borrowed. Flexible structure S2 The second link L22 and the fourth link L24 are respectively connected, and the fifth link L25 is connected to the fourth link L24 and the sixth link L26 by the flexible structure S2, respectively. In an embodiment of the present invention, the first link L21 is a fixed rod, and the second link L22, the third link L23, the fourth link L24, the fifth link L25, and the sixth link L26 are respectively A sports pole.

在本創作之一實施例中,可撓性結構S2為一撓性軸承,且連桿L21、L22、L23、L24、L25、L26及可撓性結構S2係一體成形的結構。在本創作之另一實施例中,可撓性結構S2的材料不同於連桿L21、L22、L23、L24、L25、L26的材料,且連桿L21、L22、L23、L24、L25、L26及可撓性結構S2係分別形成的結構。 In one embodiment of the present invention, the flexible structure S2 is a flexible bearing, and the links L21, L22, L23, L24, L25, L26 and the flexible structure S2 are integrally formed. In another embodiment of the present invention, the material of the flexible structure S2 is different from the materials of the links L21, L22, L23, L24, L25, L26, and the links L21, L22, L23, L24, L25, L26 and The flexible structure S2 is a structure separately formed.

請參照第9至10圖,本創作第二實施例之可撓性微型夾持裝置200更包括一致動器230用以驅動可撓性連桿裝置220之線性滑動接頭S2,且制動器230透過可撓性連桿裝置220驅動夾持部210。當致動器230控制可撓性連桿裝置220的位移方向為朝向夾持部210移動時,夾持部210係相互分開來位於開啟位置。當致動器230控制可撓性連桿裝置220的位移方向為遠離夾持部210移動時,夾持部210係相互接近來位於閉合位置。藉此,可撓性微型夾持裝置200可進行微小元件的夾持與移動。 Referring to FIGS. 9-10, the flexible micro-clamping device 200 of the second embodiment of the present invention further includes an actuator 230 for driving the linear sliding joint S2 of the flexible connecting rod device 220, and the brake 230 is transparent. The flexible link device 220 drives the clamping portion 210. When the actuator 230 controls the displacement direction of the flexible link device 220 to move toward the clamping portion 210, the clamping portions 210 are separated from each other to be in the open position. When the actuator 230 controls the displacement direction of the flexible link device 220 to move away from the clamping portion 210, the clamping portions 210 are close to each other to be in the closed position. Thereby, the flexible microclamping device 200 can perform the clamping and movement of the minute elements.

在本創作之一實施例中,致動器2300為一壓電式致動器、一形狀記憶合金式致動器、一熱膨脹式致動器、一電磁式致動器、一靜電式致動器、一電歪式致動器、一液氣壓式致動器、一熱能式致動器、一磁歪式致動器、一磁流變體式致動器、一電流變體式致動器、一光能式致動器或一電化學效應致動器。 In one embodiment of the present invention, the actuator 2300 is a piezoelectric actuator, a shape memory alloy actuator, a thermal expansion actuator, an electromagnetic actuator, and an electrostatic actuation. , an electric actuator, a liquid pressure actuator, a thermal actuator, a magnetic actuator, a magnetorheological actuator, an electrorheological actuator, a A light energy actuator or an electrochemical effect actuator.

本創作第二實施例利用多連桿機構(相互對稱之二個六連桿 機構226)、多個可撓性結構S2(六個可撓性結構S2)及一個線性滑動接頭P2來設計可撓性微型夾持裝置200,因此可撓性微型夾持裝置200的結構簡單、加工容易及製作成本可以進一步降低。 The second embodiment of the present invention utilizes a multi-link mechanism (two six-links symmetric with each other) The flexible micro-clamping device 200 is designed by the mechanism 226), the plurality of flexible structures S2 (six flexible structures S2) and one linear sliding joint P2, so that the flexible micro-clamping device 200 has a simple structure. Easy processing and production costs can be further reduced.

此外,本創作第二實施例的可撓性微型夾持裝置200除了微機電製作方式,因其結構簡單,還可以使用一般機械加工來製作,藉以降低成本,並提高壽命。利用撓性結構S2的彈性變形取代轉動接頭,獲得高精度的可撓性微型夾持裝置200。此外,可藉由控制致動器230位移量進而控制夾持部210的閉合量,並藉由閉合量推算夾取力量。因此,本創作第二實施例的可撓性微型夾持裝置200可有以下優點:方便夾取微小元件、可加速製程作業、可一體適用各種微小元件之外型、可控制夾取閉合量以及適用不同大小的微小元件。 In addition, the flexible micro-clamping device 200 of the second embodiment of the present invention can be manufactured by using general mechanical processing in addition to the micro-electromechanical manufacturing method, thereby reducing the cost and improving the life. The high-precision flexible micro-clamping device 200 is obtained by replacing the rotary joint with the elastic deformation of the flexible structure S2. Further, the amount of closing of the grip portion 210 can be controlled by controlling the amount of displacement of the actuator 230, and the gripping force can be estimated by the amount of closure. Therefore, the flexible micro-clamping device 200 of the second embodiment of the present invention has the following advantages: facilitating the clamping of small components, accelerating the process, integrally adapting various micro-components, controlling the amount of gripping and closing, and Suitable for small components of different sizes.

綜上所述,本創作實施例利用多連桿機構、多個可撓性結構及一個線性滑動接頭來設計可撓性微型夾持裝置,因此可撓性微型夾持裝置的結構簡單、加工容易及製作成本可以進一步降低。 In summary, the present embodiment uses a multi-link mechanism, a plurality of flexible structures, and a linear sliding joint to design a flexible micro-clamping device, so that the flexible micro-clamping device has a simple structure and is easy to process. And production costs can be further reduced.

雖然本創作已以較佳實施例揭露,然其並非用以限制本創作,任何熟習此項技藝之人士,在不脫離本創作之精神和範圍內,當可作各種更動與修飾,因此本創作之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in its preferred embodiments, it is not intended to limit the present invention, and anyone skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. The scope of protection is subject to the definition of the scope of the patent application.

100‧‧‧可撓性微型夾持裝置 100‧‧‧Flexible miniature clamping device

110‧‧‧夾持部 110‧‧‧ gripping department

120‧‧‧可撓性連桿裝置 120‧‧‧Flexible linkage device

122‧‧‧第一四連桿機構 122‧‧‧First four-bar linkage

L11‧‧‧第一連桿 L11‧‧‧first link

L12‧‧‧第二連桿 L12‧‧‧second connecting rod

L13‧‧‧第三連桿 L13‧‧‧ third link

L14‧‧‧第四連桿 L14‧‧‧fourth link

S1‧‧‧可撓性結構 S1‧‧‧Flexible structure

P1‧‧‧線性滑動接頭 P1‧‧‧Linear sliding joint

Claims (16)

一種可撓性微型夾持裝置,包括:一夾持部;以及一可撓性連桿裝置,具有單自由度且連接該夾持部,其中該可撓性連桿裝置包括相互對稱之二個第一四連桿機構,每個第一四連桿機構包括四個連桿、三個可撓性結構及一個線性滑動接頭,該可撓性連桿裝置用以驅動該夾持部開閉以夾取一微小元件。 A flexible micro-clamping device comprising: a clamping portion; and a flexible connecting rod device having a single degree of freedom and connecting the clamping portion, wherein the flexible connecting rod device comprises two mutually symmetrical a first four-bar linkage mechanism, each of the first four-bar linkage mechanisms includes four links, three flexible structures and a linear sliding joint, and the flexible link device is configured to drive the clamping portion to open and close for clamping Take a tiny component. 如申請專利範圍第1項所述之可撓性微型夾持裝置,其中該四個連桿分別為一第一連桿、一第二連桿、一第三連桿以及一第四連桿,該第一連桿藉由該線性滑動接頭連接該第二連桿,該第一連桿藉由該可撓性結構連接該第四連桿,該第三連桿藉由該可撓性結構分別連接該第二連桿及該第四連桿。 The flexible micro-clamping device of claim 1, wherein the four links are a first link, a second link, a third link, and a fourth link, respectively. The first link is connected to the second link by the linear sliding joint, and the first link is connected to the fourth link by the flexible structure, wherein the third link is respectively separated by the flexible structure Connecting the second link and the fourth link. 如申請專利範圍第2項所述之可撓性微型夾持裝置,其中該第一連桿為一固定桿,該第二連桿、該第三連桿以及該第四連桿分別為一運動桿。 The flexible micro-clamping device of claim 2, wherein the first link is a fixed rod, and the second link, the third link and the fourth link are respectively a movement Rod. 如申請專利範圍第1項所述之可撓性微型夾持裝置,其中該可撓性連桿裝置還包括相互對稱之二個第二四連桿機構,用以與該二個第一四連桿機構合成相互對稱之二個六連桿機構,每個六連桿機構包括六個連桿、六個可撓性結構以及一個線性滑動接頭。 The flexible micro-clamping device of claim 1, wherein the flexible connecting rod device further comprises two second four-bar linkages symmetrical with each other for connecting the two first four links The rod mechanism synthesizes two six-bar linkages that are symmetrical to each other, each six-bar linkage including six links, six flexible structures, and one linear slip joint. 如申請專利範圍第4項所述之可撓性微型夾持裝置,其中該六個連桿分別為一第一連桿、一第二連桿、一第三連桿、一第四連桿、一第五連桿以及一第六連桿,該第一連桿藉由該線性滑動接頭連接該第二連桿,該第一連桿藉由該可撓性結構分別連接該第四連桿及該第六連桿,該第三連桿藉由該可撓性結構分別連接該第二連桿及該第四連桿,該第五連桿藉由該可撓性結構分別連接該第四連桿及該第六連桿。 The flexible micro-clamping device of claim 4, wherein the six links are a first link, a second link, a third link, and a fourth link, respectively. a fifth link and a sixth link, wherein the first link is connected to the second link by the linear sliding joint, and the first link is respectively connected to the fourth link by the flexible structure and The sixth link is connected to the second link and the fourth link respectively by the flexible structure, and the fifth link is respectively connected to the fourth link by the flexible structure Rod and the sixth link. 如申請專利範圍第5項所述之可撓性微型夾持裝置,其中該第一連桿為一固定桿,該第二連桿、該第三連桿、該第四連桿、該第五連桿以及該第六連桿分別為一運動桿。 The flexible micro-clamping device of claim 5, wherein the first link is a fixed rod, the second link, the third link, the fourth link, the fifth The connecting rod and the sixth connecting rod are respectively a moving rod. 如申請專利範圍第5項所述之可撓性微型夾持裝置,其中該第一四連桿機構的該四個連桿分別為一第一連桿、一第二連桿、一第三連桿以及一第四連桿,該第一連桿藉由該線性滑動接頭連接該第二連桿,該第一連桿藉由該可撓性結構連該第四連桿,該第三連桿藉由該可撓性結構分別連接該第二連桿及該第四連桿。 The flexible micro-clamping device of claim 5, wherein the four links of the first four-bar linkage are a first link, a second link, and a third connection. a rod and a fourth link connected to the second link by the linear sliding joint, the first link being connected to the fourth link by the flexible structure, the third link The second link and the fourth link are respectively connected by the flexible structure. 如申請專利範圍第7項所述之可撓性微型夾持裝置,其中每個第二四連桿機構包括四個連桿及四個可撓性結構。 The flexible microclamping device of claim 7, wherein each of the second four-bar linkages comprises four links and four flexible structures. 如申請專利範圍第8項所述之可撓性微型夾持裝置,其中該第二四連桿機構的該四個連桿分別為一第七連桿、一第八連桿、一第九連桿以及一第十連桿,該第七連桿藉由該可撓性結構分 別連該第八連桿及該第十連桿,該第九連桿藉由該可撓性結構分別連接該第八連桿及該第十連桿。 The flexible micro-clamping device of claim 8, wherein the four links of the second four-bar linkage are a seventh link, an eighth link, and a ninth link. a rod and a tenth link, the seventh link being separated by the flexible structure The eighth link and the tenth link are connected, and the ninth link is connected to the eighth link and the tenth link respectively by the flexible structure. 如申請專利範圍第9項所述之可撓性微型夾持裝置,其中該第二四連桿機構的該第七連桿及該第十連桿之間連接的該可撓性結構與該第一四連桿機構的該第一連桿及該第四連桿之間連接的該可撓性結構、連接該第十連桿的該第七連桿與該第一連桿、以及該第十連桿與該第四連桿分別於合成該六連桿機構後重疊。 The flexible micro-clamping device of claim 9, wherein the flexible structure and the connection between the seventh link and the tenth link of the second four-bar linkage The flexible structure connected between the first link and the fourth link of a four-bar linkage mechanism, the seventh link connecting the tenth link and the first link, and the tenth The connecting rod and the fourth link respectively overlap after synthesizing the six-bar linkage. 如申請專利範圍第1項所述之可撓性微型夾持裝置,其中該可撓性結構為一撓性軸承,且該至少一連桿及該可撓性結構係一體成形的結構。 The flexible micro-clamping device of claim 1, wherein the flexible structure is a flexible bearing, and the at least one connecting rod and the flexible structure are integrally formed. 如申請專利範圍第1項所述之可撓性微型夾持裝置,其中該可撓性結構的材料不同於該連桿的材料,且該至少一連桿及該可撓性結構係分別形成的結構。 The flexible micro-clamping device of claim 1, wherein the material of the flexible structure is different from the material of the connecting rod, and the at least one connecting rod and the flexible structure are respectively formed structure. 如申請專利範圍第1項所述之可撓性微型夾持裝置,更包括一致動器用以驅動該可撓性連桿裝置之該線性滑動接頭,且該致動器透過該可撓性連桿裝置驅動該夾持部。 The flexible micro-clamping device of claim 1, further comprising an actuator for driving the linear sliding joint of the flexible connecting rod device, and the actuator transmits the flexible connecting rod The device drives the clamping portion. 如申請專利範圍第13項所述之可撓性微型夾持裝置,其中當該致動器控制該可撓性連桿裝置的位移方向為朝向該夾持部移動時,該夾持部係相互分開來位於開啟位置。 The flexible micro-clamping device of claim 13, wherein when the actuator controls the displacement direction of the flexible link device to move toward the clamping portion, the clamping portions are mutually Separate to be in the open position. 如申請專利範圍第13項所述之可撓性微型夾持裝置,其中當該致動器控制該可撓性連桿裝置的位移方向為遠離該夾持部移動時,該夾持部係相互接近來位於閉合位置。 The flexible micro-clamping device of claim 13, wherein when the actuator controls the displacement direction of the flexible link device to move away from the clamping portion, the clamping portions are mutually Close to the closed position. 如申請專利範圍第13項所述之可撓性微型夾持裝置,其中該致動器為一壓電式致動器、一形狀記憶合金式致動器、一熱膨脹式致動器、一電磁式致動器、一靜電式致動器、一電歪式致動器、一液氣壓式致動器、一熱能式致動器、一磁歪式致動器、一磁流變體式致動器、一電流變體式致動器、一光能式致動器或一電化學效應致動器。 The flexible micro-clamping device of claim 13, wherein the actuator is a piezoelectric actuator, a shape memory alloy actuator, a thermal expansion actuator, an electromagnetic Actuator, an electrostatic actuator, an electric actuator, a liquid pressure actuator, a thermal actuator, a magnetic actuator, a magnetorheological actuator An electrorheological actuator, a light energy actuator or an electrochemical effect actuator.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630978B (en) * 2017-06-22 2018-08-01 中華精測科技股份有限公司 Flexible microgripper device
CN113664583A (en) * 2021-08-13 2021-11-19 张腾达 Electric automatization anchor clamps

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630978B (en) * 2017-06-22 2018-08-01 中華精測科技股份有限公司 Flexible microgripper device
CN113664583A (en) * 2021-08-13 2021-11-19 张腾达 Electric automatization anchor clamps

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