CN104802155A - Spatial three-dimensional motion full-compliant parallel micro-motion platform - Google Patents
Spatial three-dimensional motion full-compliant parallel micro-motion platform Download PDFInfo
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- CN104802155A CN104802155A CN201510228721.2A CN201510228721A CN104802155A CN 104802155 A CN104802155 A CN 104802155A CN 201510228721 A CN201510228721 A CN 201510228721A CN 104802155 A CN104802155 A CN 104802155A
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Abstract
The invention discloses a spatial three-dimensional motion full-compliant parallel micro-motion platform. The spatial three-dimensional motion full-compliant parallel micro-motion platform comprises a base platform, a moving platform, three PUU type full-compliant branch chains and three piezoelectric ceramic drivers, wherein the three piezoelectric ceramic drivers are respectively mounted on the three branch chains; each PUU type full-compliant branch chain comprises a flexible parallel plate moving pair and two flexible hooke joints; piezoelectric ceramics are piezoelectric ceramics with a position detection function; the three branch chains are orthogonal with one another, are mounted on the base platform and are connected with the moving platform; a full-compliant parallel branch chain structure is formed by linear cutting on a whole elastic steel plate; the moving platform can realize transition along X-coordinate, Y-coordinate and Z-coordinate. According to the orthogonal arrangement of the three branch chains, motion decoupling can be achieved; displacement is loaded to a certain branch chain, so that motion output in a corresponding direction of the moving platform can be controlled; the problem of motion coupling of a conventional three-branch three-dimensional motion parallel micro-motion mechanism is overcome; the spatial three-dimensional motion full-compliant parallel micro-motion platform has the characteristics that the structure is simple, the branch chain structures are symmetrical, the machining is easy, a control algorithm is simple, and the dynamic characteristics are great.
Description
Technical field
The invention belongs to jiggle robot technical field, particularly a kind of by the three branch space three-dimensional motion parallel micro-motion mechanism of Piezoelectric Ceramic containing elastic joint.
Background technology
Parallel micro-moving robot has without friction, gapless, and the features such as response is fast, compact conformation, therefore have a wide range of applications in fields such as the processing of micro electronmechanical product, micro-micro-wound surgical operation, chromosome cutting, pH effect, Ultra-precision Turning.Along with the development of nanometer technology, the multiple degrees of freedom jiggle robot with nano grade positioning precision is had higher requirement.At present, the version of six-freedom parallel jiggle robot many employings Stewart or its distortion, because side chain is six, exist between its kinematic variables and be highly coupled, thus add the difficulty of control system realization, because often increase one degree of freedom, just mean increase by movement branched chain and a set of driving servo unit.Bring difficulty so not only to processing and assembling, and system realizes costly, in practice, space lower-mobility (three, four-degree-of-freedom) jiggle robot just can meet the needs of most of practical application.The parallel micro-moving robot of space three-freedom is the class having very much practical prospect in parallel robot, but its research and development is also very insufficient.At present, it is by the flexibility of rigidity parallel institution that the space three-dimensional of development both at home and abroad moves micromotion mechanism great majority, and application pseudo rigid-body method is to the kinematical theory modeling of mechanism, and a large amount of practices has proved the deficiency of its precision, and spatial movement decoupling is poor.How to design content with funtion requirement, it is a urgent problem that kinematics controls the full compliant parallel mechanism of novel Three Degree Of Freedom simple, cheap for manufacturing cost.
Summary of the invention
The invention discloses a kind of space three-dimensional and move complete submissive parallel micromotion platform, for overcoming the deficiency of precisely locating platform.Three piezoelectric ceramic actuators that this micromotion platform comprises based platform, moving platform, three full compliant brancheds of PUU type and is arranged on respectively in described three branches; Described three branches are mutually orthogonal, to be installed on described based platform and to be connected with moving platform; Complete submissive branched structure in parallel is formed through Linear cut on monoblock spring steel plate, and each branched chain comprises compliant translational joint and two flexible Hooke's hinges; Described compliant translational joint is monolateral parallel-plate moving sets, and flexible Hooke's hinge is made up of the compliant rotational pair that two axial lines is mutually orthogonal; Described piezoelectric ceramic actuator is the piezoelectric ceramics detected with position, and piezoelectric ceramic actuator is arranged in parallel-plate moving sets, and when Piezoelectric Ceramic, compliant translational joint produces corresponding displacement.Adopt the method for coordinates matrix conversion, by the modeling of single flexible joint stiffness models applying in the full compliant branched stiffness matrix of PUU type, by setting up the equation of comptability, deriving the motion model of full compliant parallel mechanism, realizing micromotion platform three-dimensional translating extra accuracy location.The moving platform of this micromotion platform can realize along the translation of X, Y, Z reference axis, and its structure is simple, branched structure is symmetrical, easy processing, control method are simple.
Beneficial effect: a kind of Novel free assemble mechanism utilizing the elastic deformation transmission of compliant component or converting motion, energy, adopt flexible joint as driving-chain, by three side chain quadrature arrangement, mobile decoupling can be realized, load deflection in certain branch, just can control the movement output on moving platform correspondence direction, overcome conventional three branch's three-dimensional motion parallel micro-motion mechanism sports coupling problems, there is the advantages such as control algolithm is simple, dynamic characteristic is good.
Accompanying drawing explanation
Fig. 1 is the structural representation that space three-dimensional of the present invention moves complete submissive parallel micromotion platform.
Fig. 2 is the structural representation of the full compliant branched of PUU type in Fig. 1.
1 based platform in figure, 2.PUU side chain, 3. moving platform, 4.PUU side chain, 5. piezoelectric ceramics, 6. PUU side chain, 7. parallel-plate compliant translational joint, 8. connecting rod, 9. flexible Hooke's hinge, 10. connecting rod, 11. flexible Hooke's hinges.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the invention will be further described: as depicted in figs. 1 and 2, space three-dimensional of the present invention moves complete submissive parallel micromotion platform, three piezoelectric ceramic actuators 5 comprising based platform 1, moving platform 3, three full compliant brancheds of PUU type 2,4,6 and be arranged on respectively in described three branches; Described three branches 2,4,6 mutually orthogonal, to be installed on described based platform 1 and to be connected with moving platform 3; Complete submissive branched structure in parallel is formed through Linear cut on monoblock spring steel plate, and each branched chain comprises compliant translational joint 7 and two flexible Hooke's hinges 9,11; After the piezoelectric ceramics 5 be arranged on the full compliant branched of PUU type drives, compliant translational joint 7 deforms, by the connection of connecting rod 8, flexible Hooke's hinge 9 is passed in amoeboid movement, the elastic deformation of flexible Hooke's hinge 9 moves through connecting rod 10 and amoeboid movement is passed to flexible Hooke's hinge 11, and is passed to moving platform 3.Determine the motion of fine motion moving platform 3 according to the motion of three full compliant brancheds, thus realize Ultra-precision positioning.Load deflection in certain branch, just can control the movement output on moving platform correspondence direction, overcomes conventional three branch's three-dimensional motion parallel micro-motion mechanism sports coupling problems, has the advantages such as control algolithm is simple, dynamic characteristic is good.
Described piezoelectric ceramic actuator 5 moves for driving piezoelectric ceramics, by three same branches, moving platform is connected with based platform, when controlling complete submissive micromotion mechanism, the digital micromanipulator of E-712.3CD type that piezoelectric ceramic actuator adopts German PI Corp. to produce, the piezoelectric ceramics that piezoelectric ceramics adopts the P-016.15H type of German PI Corp. to detect with position.
Claims (3)
1. space three-dimensional moves a complete submissive parallel micromotion platform, it is characterized in that: three piezoelectric ceramic actuators comprising based platform, moving platform, three full compliant brancheds of PUU type and be arranged on respectively on described three side chains; Three branched chain are mutually orthogonal, to be arranged on described based platform and to be connected with moving platform; Complete submissive side chain in parallel is formed through Linear cut by whole block material, becomes the compliant branched being integrated with multiple compliant motion pair in overall structure; Described PUU side chain comprises flexible parallel-plate moving sets, two flexible Hooke's hinges, flexible parallel-plate moving sets is connected on based platform, the other end of flexible parallel-plate moving sets is connected with flexible Hooke's hinge by connecting rod, flexible Hooke's hinge is connected by the flexible Hooke's hinge of intermediate connecting rod and another simultaneously, finally transfers the motion to moving platform.
2. a kind of space three-dimensional moves complete submissive parallel micromotion platform according to claim 1, it is characterized in that: flexible Hooke's hinge is made up of the compliant rotational pair that two axial lines is mutually orthogonal, be integrated on full compliant branched, for full compliant branched movement output end provides rotational restraint.
3. space three-dimensional according to claim 1 moves complete submissive parallel micromotion platform, it is characterized in that: described piezoelectric ceramics is the piezoelectric ceramics detected with position.
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| CN201510228721.2A CN104802155A (en) | 2015-05-07 | 2015-05-07 | Spatial three-dimensional motion full-compliant parallel micro-motion platform |
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| CN201510228721.2A CN104802155A (en) | 2015-05-07 | 2015-05-07 | Spatial three-dimensional motion full-compliant parallel micro-motion platform |
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Cited By (7)
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| EP3305477A3 (en) * | 2016-10-05 | 2018-04-25 | AIRBUS HELICOPTERS DEUTSCHLAND GmbH | Device for three-dimensional positioning of a coupling component and actuator system |
| CN107984443A (en) * | 2017-12-28 | 2018-05-04 | 大连交通大学 | One kind intersects curved beam six-freedom parallel compliant mechanism |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109256174A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision spatial translation mini positioning platform |
| CN110883761A (en) * | 2019-11-18 | 2020-03-17 | 东北大学 | Six-degree-of-freedom motion decoupling compliant mechanism |
| CN112757262A (en) * | 2021-01-16 | 2021-05-07 | 北京工业大学 | Micro-motion 3-UPU compliant parallel mechanism with pure movement |
| CN114922904A (en) * | 2022-05-20 | 2022-08-19 | 哈尔滨工业大学 | Parallel decoupling xyz large-stroke positioning platform based on compliant hinge |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3305477A3 (en) * | 2016-10-05 | 2018-04-25 | AIRBUS HELICOPTERS DEUTSCHLAND GmbH | Device for three-dimensional positioning of a coupling component and actuator system |
| CN107984443A (en) * | 2017-12-28 | 2018-05-04 | 大连交通大学 | One kind intersects curved beam six-freedom parallel compliant mechanism |
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| CN109256174A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision spatial translation mini positioning platform |
| CN110883761A (en) * | 2019-11-18 | 2020-03-17 | 东北大学 | Six-degree-of-freedom motion decoupling compliant mechanism |
| CN110883761B (en) * | 2019-11-18 | 2022-11-25 | 东北大学 | Six-degree-of-freedom motion decoupling compliant mechanism |
| CN112757262A (en) * | 2021-01-16 | 2021-05-07 | 北京工业大学 | Micro-motion 3-UPU compliant parallel mechanism with pure movement |
| CN114922904A (en) * | 2022-05-20 | 2022-08-19 | 哈尔滨工业大学 | Parallel decoupling xyz large-stroke positioning platform based on compliant hinge |
| CN114922904B (en) * | 2022-05-20 | 2024-03-19 | 哈尔滨工业大学 | Parallel decoupling xyz large-stroke positioning platform based on compliant hinge |
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Application publication date: 20150729 |