M440287 四、 指定代表圖： (5)圖 單說明： (一） 本案指定代表圖為：第 3 :馬達； 5:驅動軸； 9 :鏈條； 11 :減速機 (二） 本代表圖之元件符號簡 2 :輥輪； 4 :螺旋齒輪； 7 :螺旋齒輪； 10 :原動軸； 12 :轉矩限制器。 五、 新型說明： 【新型所屬之技術領域】 本創作係關於用以將填充在匣鉢的電子 电卞7C件用粉體等 進行加熱所被使用的輥道窯。 【先前技術】 加熱爐雖有很多種類，但是在進行電子工業用零件或 其原料粉末等的加熱時’係廣泛使用來自爐的持旦 熱里 小、且容易控制爐内氣體環境的輥道窯。成為加熱對象的 粉體等係被收納在被稱為匣鉢的陶瓷製容器，— 囱在輥輪 上行走’一面被加熱成預定溫度。 眾所周知’輥道熏係將多數輥輪以預定間距配 J在爐 長方向，並且使各輥輪朝同一方向旋轉來一面搬送工件 面加熱的形式的爐。為了使多數輥輪朝同一方向旋轉， 般為如專利文獻1所示將設在各輥輪的鏈齒，藉由行走 M440287 若爐長變長，會不易 大部分採用以爐長方 無端環鏈來進行驅動的構造。但是， 藉由單一的驅動鏈來驅動全體，因此 向分割成複數驅動單元的構造。 此U驅動單元為5七左右，若亦包含返回側 、’ 1條無端環鏈的長度係成為1〇Dl以上，與溫度變化或 張力變化相對應的鏈條的伸展係有達到數⑽的情形。因此 如第1圖所示’必須使鏈條具有充分的鬆弛度。M440287 IV. Designation of representative drawings: (5) Description of the drawings: (1) The representative drawings of the case are: 3: motor; 5: drive shaft; 9: chain; 11: reducer (2) component symbol of the representative figure Jane 2: Roller; 4: Helical gear; 7: Helical gear; 10: Momentary shaft; 12: Torque limiter. V. New type of description: [Technical field to which the new type belongs] This is a roller kiln used to heat a powder for charging an electronic device 7C filled in a crucible. [Prior Art] Although there are many types of heating furnaces, when heating parts for the electronics industry or raw material powders, etc., the roller kiln with small heat from the furnace and easy control of the gas atmosphere in the furnace is widely used. . The powder or the like to be heated is stored in a ceramic container called a crucible, and the crucible is heated on the roll to be heated to a predetermined temperature. It is known that the "roller smoke" is a furnace in which a plurality of rolls are arranged at a predetermined pitch in the direction of the length of the furnace, and each of the rolls is rotated in the same direction to convey the surface of the workpiece. In order to rotate a plurality of rollers in the same direction, as shown in Patent Document 1, the sprocket provided on each roller is used. If the length of the furnace is long, the length of the furnace is not easily used. To drive the construction. However, since the whole is driven by a single drive chain, it is divided into a structure of a complex drive unit. The U drive unit is about 5 or so. If the return side is also included, the length of the 'one endless loop chain' is 1 〇 Dl or more, and the chain extension corresponding to the temperature change or the tension change is up to the number (10). Therefore, as shown in Fig. 1, the chain must have sufficient slack.
大部分的情形是工件係在被填充在㈣的狀態在棍輪 上被搬送’但是為了防止爐内㈣排位偏ie鉢係以前 後方向不會隔著間隔而相密接的狀態下進行搬送為宜。爐 内E鍺排位偏差的原因有輥輪的尺寸精度、驅動裝置的安 裝精度問題等各式各樣，若為加熱爐，伴隨著溫度變化的 ϋ鉢的膨脹/收縮的影響較大。 亦即’匣鉢係在通過最高溫度區域後，由於溫度會逐 漸降低，因此會不可避免地進行熱收縮，在爐的後段部分， 形成相互隔開間隔的傾向。_此’為了避免爐内昆鉢排位 偏差，亦嘗試使爐的後段部分的驅動單元的工件搬送速度 降低》 但是在使後側（下游側）的驅動單元的工件搬送速度 降低時，藉由由前側（上游側）的驅動單元所被送出的匿 鉢按壓後側的驅動單元上的結果，^ 2圖所示藉 由&鉢，使得後側的驅料元的冑輪以比 速過量旋轉。結果，鍵條以比設定速度更為高速被傳^ 會有下游側的鏈條在其支持軌道上***成山狀的情形。若 财40287 形成為如上所示之狀態時’鏈條與各輥輪的鏈齒無法順利 咬合，而會有造成搬送障礙之虞。因此以往並無法使爐的 後段部分的驅動單元的I件搬送速度如預想般降低。 【先前技術文獻】 【專利文獻】 【專利文獻1】日本特開平10__78290號公報 【新型内容】 (創作所欲解決之課題） 因此本創作之目的在解決上述習知技術的問題點，提 供一種不會導致因鏈條***所造成的搬送障礙，而可防止 爐的後段部分令爐内匣鉢排位偏差的輥道窯。 (用以解決課題的手段） 為解決上述課題所研創之本創作之報道熏係朝爐長方 向被分割為複數驅動單元的輥道窯，其特徵在於： 各驅動單元係包括：藉由利用馬達予以旋轉的驅動轴 來使各輥輪旋轉的驅動機構， 而且，在溫度下降的爐的後段部分，後側的驅動單元 的工件搬送逮度被設定為與其前側的驅動單元的工件搬送 速度為同等以下。 ，較佳為爐的後段部分中（後側的驅動單元的_ 件搬送速度/其前側的驅動單元的工件搬送速度）的值;5 又疋為0· 95至1_ 〇〇的範圍。此外，在較佳的實施形態中 輥輪為搬送匣钵者。 M440287 (創作效果） 本創作之輥道窯係使用藉由驅動轴來使各輥輪旋轉的 驅動機構，因此即使在藉由由前側的驅動單元所被送出的 匿鋅來按壓後側的驅動單元上的匣鉢的情形下，亦不會有 如習知技術般發生鏈條***的情形。因此，在溫度下降的 爐的後段部分’可將每個驅動單元的工件搬送速度設定為 後側的驅動單元的工件搬送速度與其前側的驅動單元的工 φ 件搬送速度為同等以下。結果，即使在伴隨著溫度降下而 發生匣鉢收縮的情形下，亦會消除在匣鉢間發生間隙的情 形，而可防止爐内匣鉢排位偏差。如上所示之本創作之效 果在溫度降下區為複數區時尤其明顯。此外，爐的後段部 分中（後側的驅動單元的工件搬送速度/其前側的驅動單 元的工件搬送速度）的值在0.95至1〇〇的範圍時尤其具 有效果。 【實施方式】 以下說明本創作之實施形態。 第3圖係顯示本創作之輙指穿 輥道窯的驅動單元ϋ的圖。在 該實施形態中，一個驅動單元u 干L υ的長度為约5m，盥以往同 樣地以一定間距配置有多數輥鲶 輪2。將同一構造的驅動單 元ϋ串聯連接複數個而構成如塗 ’圖所示之輥道窯。各驅 動單元U係包括馬達3，屬於间_β 、—驅動單元U的輥輪2# 全部以同-速度予以旋轉驅動叛鴇“乐In most cases, the workpiece is conveyed on the wand in a state of being filled in (4). However, in order to prevent the in-furnace (four) from being displaced in the front and rear directions, the transfer is performed in a state in which the direction is not closely spaced. should. The reason for the deviation of the E 锗 in the furnace is various such as the dimensional accuracy of the roller and the mounting accuracy of the driving device. If it is a heating furnace, the influence of the expansion/contraction of the enthalpy accompanying the temperature change is large. That is, since the temperature is gradually lowered after passing through the highest temperature region, heat shrinkage is inevitably caused, and a tendency to be spaced apart from each other is formed in the rear portion of the furnace. In order to avoid the deviation of the furnace in the furnace, the workpiece conveyance speed of the drive unit in the rear section of the furnace is also reduced. However, when the workpiece conveyance speed of the drive unit on the rear side (downstream side) is lowered, The result of the driving unit on the rear side of the driving unit that is sent by the driving unit on the front side (upstream side) is shown by the &钵, so that the wheel of the driving unit on the rear side is excessively proportional to the speed. Rotate. As a result, the key bar is transmitted at a higher speed than the set speed, and there is a case where the chain on the downstream side is bulged in a mountain shape on its support rail. If the fortune 40287 is formed as shown above, the chain and the sprocket of each roller cannot be smoothly engaged, and there is a possibility of causing a barrier to transport. Therefore, in the past, it has not been possible to reduce the conveying speed of the one member of the drive unit in the rear portion of the furnace as expected. [Prior Art] [Patent Document 1] Japanese Patent Laid-Open No. Hei 10__78290 [New Content] (Problems to be solved by the author) Therefore, the purpose of the present invention is to solve the above problems of the prior art and to provide a It will lead to obstacles caused by chain bulging, and it can prevent the roller kiln in the rear part of the furnace from deviating the position of the furnace. (Means for Solving the Problem) The report of the present invention, which was developed to solve the above problems, is a roller kiln that is divided into a plurality of drive units in the direction of the furnace, and is characterized in that each drive unit includes: by using a motor The drive mechanism that rotates the drive shaft to rotate the respective rollers, and the workpiece conveyance speed of the drive unit on the rear side in the rear portion of the furnace where the temperature is lowered is set to be equal to the workpiece conveyance speed of the drive unit on the front side. the following. Preferably, it is a value in the rear portion of the furnace (the conveying speed of the driving unit of the rear side/the workpiece conveying speed of the driving unit on the front side thereof); and 5 is a range of 0·95 to 1_〇〇. Further, in a preferred embodiment, the roller is a transporter. M440287 (Creation effect) The roller kiln of the present invention uses a drive mechanism that rotates each roller by a drive shaft, so that the drive unit on the rear side is pressed even by zinc which is sent out by the drive unit on the front side. In the case of the embarrassing situation, there will be no situation in which the chain is raised like a conventional technique. Therefore, the workpiece conveyance speed of each drive unit can be set to be equal to or lower than the workpiece conveyance speed of the drive unit on the rear side in the rear portion of the furnace in which the temperature is lowered. As a result, even in the case where the enthalpy shrinkage occurs with the temperature drop, the occurrence of the gap between the turns is eliminated, and the deviation of the enthalpy in the furnace can be prevented. The effect of the creation shown above is particularly evident when the temperature drop zone is a complex zone. Further, the value in the rear portion of the furnace (the workpiece conveyance speed of the rear drive unit/the workpiece conveyance speed of the front side drive unit) is particularly effective in the range of 0.95 to 1 Torr. [Embodiment] Hereinafter, an embodiment of the present creation will be described. Figure 3 is a diagram showing the drive unit 穿 of the kiln passing through the roller kiln. In this embodiment, the length of one drive unit u dry L 为 is about 5 m, and a plurality of roll wheels 2 are arranged at a constant pitch in the same manner. A plurality of driving units of the same configuration are connected in series to form a roller kiln as shown in the figure. Each of the driving units U includes a motor 3, and the roller 2# belonging to the intermediate_β and the driving unit U is all rotated at the same speed to drive the rebellion.
溫強 SiC 親輪2係以形成為离 度優異的SlC製為佳，尤其以 琅為间 化成為含浸有Si的Si_ 5 製為佳。 如前所述，習知的輥道窯的輥輪2 一般係以鏈條驅 I疋本創作之輥道窯、係使用藉由驅動軸所致之驅動機 構。在該實施形態中，如第4圖與第5圖所示，在各報輪 2的端部係被固定有螺旋齒輪4。而且如第4圖所示，在各 報輪2的職齒輪4的下側位置，係藉由轴承6來支持遍 °動單元U的王長而延伸的驅動軸5。在該驅動軸5係 设有與各輥輪2的螺旋齒輪4相咬合的螺旋齒輪？。其中， 二旋齒輪4 7倍、具有如第6圖所示在1正交的2軸間傳達 父齒輪。但是’由驅動轴5對各棍輪2 的驅動力的傳達手段並不-定限定為螺旋齒輪4。 在〜驅動轴5係被固定有鍵齒8，透過鍵條9而與原 動軸10相連結。該原動軸1〇係與馬達3、減速機】i、轉 矩限制$ 12相連結，以所被設定的速度進行旋轉。結果， 同-驅動單元U内的所有輥輪2係以同一速度進行旋轉， 假設輥輪2上的！E鉢被按壓時’亦不會有如習知技術般發 生鍵條***的情形。其中，轉矩限制器12係'若在驅動系統 發生任何障礙時，發揮保護機器的功能者。 如第7圖所示，將同一構造的驅動單元^串聯連接複 數個而構成輥道寞。如前所述’在溫度下降的爐的後段部 分發生轉的收縮。在第7圖的上部顯示爐内的溫度。在 第7圖的實施形態中’串聯連接5個驅動單元^而構成全 長―的，道E ’第】個驅動單元u與升溫區相對應第 2個驅動單元u與高溫保 T j 一 弟3個以後的驅動 單元u與降溫區相對應。 在本創作中，在溫度下降的爐的後段部分中係設定為 後側的驅動單元ϋ的工件搬送速度與其前侧的驅動單元U 的工件搬送速度為同等以下。具體而言，例如若將第！個 與第2個驅動單元ϋ的工件搬送速度設為100%時，可將第 3 :驅動單元°’的工件搬送速度設定為99. 7%，將第4個驅 °° 一 ϋ的工件搬送速度設定為99.將第5個驅動單 70 ϋ的工件搬送速度設定為99. 0%。 、若如上所示將降溫區的工件搬送速度設定為依序低 、、卩使S鉢在降溫區發生收縮，亦藉由由前側的驅動單 元u所被送出的E鉢來按壓後側的驅動單元u上的昆鉢， 因此變得不會有在£銖間發生間隙的情形，而可防止爐内 匿鉢排位偏差。為了獲得該效果，爐的後段部分中（後側 的驅動單S U的工件搬送速度/其前側的驅動單元u的工 件搬送速度比）的值以設定為位於0.95至1()(較佳為095 至U99)的範圍為佳。若該值超過1〇，無法獲得防止爐 内匠鉢排位偏差的效果，相反地’若未達Ο,，則會過於 強力按壓後侧的E銖’反而會有㈣發生蛇行之虞之故。 上述工件搬送速度的設定例僅為—例，以按照加熱溫 度、驅動單元U的個數等來適當設定為佳。其中，理論上， 工件搬送速度應係藉由輥輪周速來決定，較輪周速應两係藉 由輥輪旋轉速度來決定。但是，實際上，在親輪？的直徑 係有不均的情形，因此會有工件搬送部分的輥輪徑因耗損 而減少的情形。此外’由於亦會有輕輪本身呈彎曲的情形， 7 M440287 因此應一面確認實際的工件搬送狀況 元ϋ的工件搬送速度比。 一面設定各驅動單 如以上說明所示，本創作之輥道窯係 ***所造成的搬送障礙，而可確實地防止 的爐内匣鉢排位偏差。 不會導致因鏈條 爐的後段部分中 其中’以上說明係針對使料銖的情形來進行 在被稱為承載板的陶-是基座上載置工件來進行加熱 下’亦同樣地適用本創作β ，但是 的情形 【圖式簡單說明】 第1圖係習知的鏈條驅動式驅動翠元的說明圖。 第2圖係顯示習知的鏈條驅動式驅動單元的 丨Ρ分放大圖。 點的 第3圖係本創作之辕道寞的驅動單元的說明圖。 第4圖係本創作之觀道寞的驅動單元的放大圖。 $ 5圖係本創作之輥道窯的驅動單元的平面圖。 第6圖係螺旋齒輪的斜視圖。 第7圖係本創作之輥道寞的全體圖。 【主要元件符號說明】 U :驅動單元； 3 :馬達； 5 :驅動軸； 螺旋齒輪； 輥輪； 螺旋齒輪； 轴承； 鏈齒； M440287 9 :鏈條； 10 : 11 :減速機； 12 : 原動轴； 轉矩限制器。The temperature-strength SiC co-wheel 2 is preferably formed into a SlC system excellent in the degree of separation, and in particular, Si is preferably impregnated with Si. As mentioned above, the roller 2 of the conventional roller kiln is generally driven by a chain drive, which uses a drive mechanism driven by a drive shaft. In this embodiment, as shown in Figs. 4 and 5, the helical gear 4 is fixed to the end of each of the reporter wheels 2. Further, as shown in Fig. 4, at the lower position of the crown gear 4 of each of the register wheels 2, the drive shaft 5 extending by the king length of the oscillating unit U is supported by the bearing 6. The drive shaft 5 is provided with a helical gear that meshes with the helical gear 4 of each roller 2? . Among them, the two-rotor gear is seven times larger, and the parent gear is transmitted between the two orthogonal axes as shown in Fig. 6. However, the means for transmitting the driving force of the respective pulleys 2 by the drive shaft 5 is not limited to the helical gear 4. The key shaft 8 is fixed to the drive shaft 5, and is coupled to the primary shaft 10 via the key strip 9. The motive shaft 1 is coupled to the motor 3, the speed reducer i, and the torque limit of $12, and is rotated at the set speed. As a result, all of the rollers 2 in the same-drive unit U are rotated at the same speed, assuming that on the roller 2! When E钵 is pressed, there is no case where the key bar is raised as in the conventional technique. Among them, the torque limiter 12 is a function that protects the machine if any obstacle occurs in the drive system. As shown in Fig. 7, the drive units of the same configuration are connected in series to form a roller table. As described above, the shrinkage of the rotation occurs in the rear portion of the furnace where the temperature is lowered. The temperature in the furnace is shown in the upper part of Fig. 7. In the embodiment of Fig. 7, 'the five drive units are connected in series to form the full length ―, the first drive unit u corresponding to the temperature rise zone and the second drive unit u and the high temperature protection T j The subsequent drive unit u corresponds to the cooling zone. In the present creation, in the rear portion of the furnace in which the temperature is lowered, the workpiece transport speed set to the rear drive unit ϋ is equal to or lower than the workpiece transport speed of the drive unit U on the front side. Specifically, for example, if you will! When the workpiece transport speed of the second drive unit 设为 is set to 100%, the workpiece transport speed of the third drive unit °' can be set to 99.7%, and the fourth workpiece can be transported by one. The speed is set to 99. The workpiece transport speed of the fifth drive unit 70 ϋ is set to 99. 0%. When the workpiece conveyance speed in the cooling zone is set to be lower as described above, and S is contracted in the temperature reduction zone, the drive on the rear side is also pressed by the E钵 sent from the drive unit u on the front side. The block on the unit u, so that there will be no gap between the turns, and it can prevent the deviation of the position in the furnace. In order to obtain this effect, the value of the workpiece conveyance speed of the rear side drive unit SU/the front side drive unit u of the drive unit u in the rear stage portion of the furnace is set to be 0.95 to 1 () (preferably 095). The range to U99) is better. If the value exceeds 1 〇, the effect of preventing the deviation of the arranging position in the furnace cannot be obtained. On the contrary, if the 未 is not reached, the E 铢 ' on the rear side will be pressed too strongly, and (4) the snaking will occur. The setting example of the workpiece conveyance speed is merely an example, and it is preferable to appropriately set it according to the heating temperature, the number of the drive units U, and the like. Among them, in theory, the workpiece conveying speed should be determined by the peripheral speed of the roller, and the speed of the wheel should be determined by the rotation speed of the roller. But, actually, in the pro-wheel? Since the diameter of the workpiece is uneven, there is a case where the roller diameter of the workpiece conveying portion is reduced due to wear. In addition, since the light wheel itself is bent, 7 M440287 should confirm the workpiece transfer speed ratio of the actual workpiece conveyance condition. Setting the drive sheets on one side As shown in the above description, the roller kiln of this creation is a barrier to conveyance caused by the bulging, and the deviation of the enthalpy in the furnace can be surely prevented. This does not result in the fact that in the rear part of the chain furnace, the above description is for the case of the material to be carried out. In the case of the ceramic called the carrier plate, the workpiece is placed on the base for heating. However, the situation [simplified description of the drawing] Fig. 1 is an explanatory diagram of a conventional chain-driven driving Tsui. Fig. 2 is a magnified view showing a conventional chain drive type drive unit. The third figure of the point is an explanatory diagram of the drive unit of the present 辕. Figure 4 is an enlarged view of the drive unit of the present view. The $5 image is a plan view of the drive unit of the roller kiln of the present creation. Figure 6 is a perspective view of a helical gear. Figure 7 is a general view of the roller table of this creation. [Main component symbol description] U : Drive unit; 3: Motor; 5: Drive shaft; Helical gear; Roller; Helical gear; Bearing; Sprocket; M440287 9: Chain; 10: 11: Reducer; ; Torque limiter.