TWM257008U - A chip overturning mechanism - Google Patents

Description

M257008 勾、創作說明 【新 本創 所形成翻 式動力源 之夾具作 下而同步 提供該產 拆除作所 揮產業利 【先 按， 球機之間 有鑄模樹 -8 0度 置於晶片 理。 (1) 型所屬 作係有 轉室内 之承置 側向之 帶動治 業製程 需規格 用之精 前技術 以往既 ，主要 脂表層 角之位 承盤上 之技術領域】 關一種晶片翻 之治具，主要 座上，同時配 夾持定位，I 具進行1 8 〇 若採用不同規 之更換，以達 間化與經濟效 ] 知晶片翻轉機 係為將經過雷 上之晶片，藉 置轉動，使得 轉機構 係採活 合治具 之利用 度角之 格之晶 提升該 益者。 構是設 射刻印 由動力 晶片具 以利下一植球機佈 ，尤其針對位居機構 動式組設於銜結旋轉 ^對應直線式動力源 旋轉式動力源的驅使 翻轉工作；藉此，為 片承盤，祇需將治具 製程之作業效率及号务 置在雷射刻印機與植 機刻印產品名稱在具 源啟動驅使帶動軸作 有樹脂表層朝上並平 置錫球之製程進行處 ^而，上述習知之晶片翻轉機構，係已經將夾持晶片 承I之翻轉治具固定設置於動力源之帶動軸上，故該晶片 承盤的形狀及規格也已經被限制，相對其所欲放置定位之 亦僅有單一規格來使用；由於隨著半導體產業之技術 提昇，所需使用之晶片規格不一，因此業者必須準備多台 各设置不同規格之翻轉治具來對應所需晶片承盤之晶片翻 轉機構來儲放預備，方能隨時因應不同規格之晶片的翻轉 作業’如此，相對其晶片製程設備之資源成本及所需檢測M257008 Hook, creation instructions [Newly created by the flip-type power source of the fixture and synchronized to provide the industry to dismantle the work of the industrial benefits [first press, there is a mold tree between the ball machine-80 degrees placed on the wafer. (1) The model belongs to the pre-precision technology used in the transfer chamber to drive the manufacturing process to the required specifications. In the past, the technical field on the main surface of the surface of the main surface of the fat surface was related to a wafer turning fixture. On the main seat, it is also equipped with clamping and positioning. If it is replaced with a different rule, it can be used to achieve interoperability and economic efficiency.] It is known that the wafer turning machine is to turn the wafer on the thunder, and use the rotation to make the rotation. The mechanism is to use the angle of the grid to enhance the beneficiary. The structure is set to shoot and engraved by the power chip to facilitate the next ball planting machine cloth, especially for the positioning mechanism of the dynamic type set at the joint rotation ^ corresponding to the linear power source rotary power source to drive the flip work; thereby, for For film support, you only need to set the operating efficiency and number of the jig manufacturing process on the laser marking machine and the planting machine to print the product name. When the source is started, the drive shaft drives the resin to face up and the solder ball is placed flat. ^ Moreover, the conventional wafer turning mechanism described above has fixed the turning jig holding the wafer carrier I on the driving shaft of the power source, so the shape and specifications of the wafer carrier have also been limited, compared to their desire There is only a single specification for placement and positioning; as the semiconductor industry technology improves, the specifications of the wafers used are different, so the industry must prepare multiple flip fixtures with different specifications to correspond to the required wafer support. The wafer flip mechanism is used to store and prepare, so that it can respond to the flip operation of wafers of different specifications at any time.

第6頁 M257008Page 6 M257008

且對該產業利用及進 校準之作業時間也無可避免的增加 步性有極大不利之處。 今，本創作者有鑑上述 端之問題極需解決下，乃一 豐富之專業知識及多年之實 思及多番試驗，終精心研出 技術問世。 習知晶片翻轉機構存有上述弊 if孜不倦之精神，並藉由其 f經驗所輔佐，且歷經多方巧 創作務期以最新型之結構 【新型 本創作 轉室，而於 主動軸及被 配合一治具 放置之凹陷 洛’為拖置 翻轉室的另 與治具所設 夾具之非夾 態，以令欲 動力源脫離 而順勢將治 動力源驅使 供該晶片翻 離之配置設 而作拆組更 内容】 為提供一種 翻轉室的相 動軸，且主 組立其間， 區域，且於 以數呈擺設 外對應兩侧 置之夾具相 持端，使夾 翻轉作業之 夾具之非夾 具上之晶片 帶動治具作 轉機構之治 計，使之該 換，以達產 晶片翻轉機 應兩側分別 動軸及被動 該治具上、 緊鄰承置座 相反且具彈 設置有直線 對應，以供 具之夾持端 晶片承盤嵌 持端，使夾 承盤予以牢 1 8 0度角 具與旋轉動 治具可隨晶 製設備的成 構，該機構 樞設有具旋 轴各連設有 下層具有為 之兩側各形 性體之夾具 動力源，此 當直線動力 形成朝外傾 置於治具上 具之夾持端 靠定位，最 之翻轉工作 力源之作用 片承盤所需 本資源、空 内形成有翻 轉動力源之 承置座，為 供晶片承盤 成數凹設段 ，復於機構 直線動力源 源施力壓置 斜之張開狀 ，接續直線 受彈性回位 後啟動旋轉 ;據此，提 端形成可分 之規格不同 間更節省為It also has an unavoidable increase in the operation time of the industry's utilization and calibration, which has great disadvantages. Today, the creator has learned the above-mentioned problems and needs to solve them. It is a wealth of professional knowledge, many years of practical experience and many experiments. Finally, he has carefully developed the technology. The conventional wafer turning mechanism has the above-mentioned disadvantages, and is complemented by its f experience, and has experienced the most creative structure with the latest structure [new type of creative transfer room, and the active axis and the The depression Luo with a jig placed is a non-clamped state for dragging the flip chamber and the fixture set by the jig, so that the power source is to be disengaged and the ruled power source is driven to the configuration for the chip to be turned off. More content for disassembling] In order to provide a phase-shift axis of the turning chamber, and the main assembly stands in between, the area, and the holding ends of the fixtures on the two sides on the opposite sides, so that the wafers on the fixtures of the turning operation are not clamped. Drive the jig as the mechanism of the turning mechanism, so that it should be replaced, so that the wafer turning machine should be moved on both sides and passive on the jig, on the opposite side of the holder, and a straight line is provided for the jig. The clamping end of the wafer holder is held at the clamping end, so that the clamp holder can be fixed at 180 degrees, and the rotating jig can follow the structure of the crystal equipment. The mechanism is pivoted with a rotating shaft and each lower layer is connected with the lower layer. Has both sides The power source of the fixture body, when the linear power is formed, the clamping end of the fixture is tilted outwards, and the clamping end of the fixture is positioned. The power source support seat is a recessed section for the wafer support plate, which is in the shape of an opening that is slanted by the force of the linear power source of the mechanism. After the straight line is elastically returned, it starts to rotate. Save more between different specifications

第7頁 f M257008 1 四、創作說明（3) 目的。 本創作晶片翻轉機構，係將為放置晶片承盤之治具與 銜接旋轉式動力源之承置座〔即習知技術所述之帶動軸〕 形成分離設計，使之欲進行翻轉工作使用時，即將治具與 連接動力源樞軸之承置座作結合組成，且同時配合治具所 設置之夾具的夾持内徑亦可針對不同規格的晶片承盤作牢 靠之側向定位；若當晶片翻轉製程有需不同規格之晶片承 盤的變更時，則僅需將該晶片翻轉機構内之翻轉治具予以 分解，再行對翻轉治具所需搭組之晶片承盤的規格作更換 ;藉由上述，可令該產業製程技術上，無需要再花費高成你 本及儲放極佔空間之多台翻轉機構的設備資源，如此不僅 可節省該產業之成本及空間，而且更能加快該製程之更換 及校準時間，充分發揮該機台特性之實質效益，進而提升 該產業技術利用之經濟效益。 【實施方式】 為使本創作所使用之技術手段、創作特徵、達成目的 及功效易於明白了解，茲配合圖式及圖號詳細說明如下： 首先，請一併參閱第一圖〜第五圖所示，本創作晶片 翻轉機構（1 )係於内部形成有翻轉室（1 1 )，而於翻 轉室（1 1 )的相應兩側分別樞設有具旋轉式動力源（2 U )〔如驅動馬達〕之主動軸（111)及被動軸（112 )，且主動軸（111)及被動軸（112)各連設有承 置座（12)，該承置座（12)具有水平段（121) ，此水平段（1 2 1 )為配合一呈框狀之治具（3 )組置Page 7 f M257008 1 IV. Creative Instructions (3) Purpose. This creative wafer turning mechanism is to form a separate design for the fixture on which the wafer tray is placed and the mounting seat connected to the rotary power source (that is, the driving shaft described in the conventional technology), so that when it is intended to be used for turning work, That is, the jig is combined with the mounting seat connected to the power source pivot, and at the same time, the clamping inner diameter of the jig set by the jig can also be used to firmly position the wafer support of different specifications in the lateral direction; if the wafer When the flipping process needs to change the wafer support of different specifications, it is only necessary to disassemble the flip jig in the wafer flipping mechanism, and then change the specifications of the wafer support required for the flip jig. From the above, the technology of the industrial process can be saved, and there is no need to spend more on equipment costs and equipment resources of multiple flipping mechanisms that occupy a lot of space. This can not only save the cost and space of the industry, but also speed up the process. The replacement and calibration time of the process can give full play to the substantial benefits of the characteristics of the machine, thereby improving the economic benefits of the industrial technology utilization. [Embodiment] In order to make the technical means, creative features, purpose and effect of this creation easy to understand, the detailed description with drawings and numbers is as follows: First, please refer to the first to fifth drawings together It is shown that the creative wafer turning mechanism (1) is formed with a turning chamber (1 1) inside, and a rotary power source (2 U) is pivoted on the corresponding two sides of the turning chamber (1 1) [such as a drive The motor] has a driving shaft (111) and a passive shaft (112), and each of the driving shaft (111) and the passive shaft (112) is provided with a bearing seat (12). The bearing seat (12) has a horizontal section (121). ), This horizontal section (1 2 1) is set with a frame-shaped jig (3)

第8頁 M257008 四、創作說明（4) 其上；該治具（3 )上、下層具有為供晶片承盤放置之凹 陷區域（3 1 )，且該治具（3 )於緊鄰承置座（1 2 ) 之兩侧各形成數凹設段落（3 2 )，為樞置定位以數呈L 形且擺設相反之夾具（3 3 )，此夾具（3 3 )形成有水 平向之夾持端（331)、垂直向之非夾持端（332) ，其垂直向之非夾持端（3 3 2 )與凹設段落（3 2 )之 間具有一定間距，為令彈性體（3 4 )相互頂撐其間；復 於機構（1 )翻轉室（1 1 )的另外對應兩側設置有直線 式動力源（4 )〔如氣壓缸〕，此直線動力源（4 )與治 具（3 )所設置之夾具（3 3 )呈相對應。 再者，如第五圖〜第七圖所示對本創作晶片翻轉機構 (1 )在實施晶片翻轉工作之作業流程，即是先將經雷射 刻印機完成刻印後的晶片放置定位於晶片承盤（5 )上， 並由輸送設備將晶片承盤（5)送至翻轉機構（1 )之翻 轉室（1 1 )的下方位置執行偵測定位，續令直線式動力 源（4 )作前進頂推夾具（3 3 )之非夾持端（3 3 2 ) ，使夾具（3 3 )之夾持端（3 3 1 )形成朝外傾斜之張 開狀態，此時位居翻轉室（1 1 )的下方的頂昇設備即將 晶片承盤（5 )頂昇，並順勢將晶片承盤（5 )朝治具（ 3 )下層凹陷區域（3 1 )嵌置其間，且經偵測器感知定 位而發出訊號通知直線式動力源（4 )作後退脫離對夾具 (3 3 )之非夾持端（3 3 2 )抵觸，使夾具（3 3 )之 夾持端（3 3 1 )受彈性體（3 4 )頂撐回復夾持狀態， 而順勢將治具（3 )上之晶片承盤（5 )予以牢靠夾持定Page 8 M257008 IV. Creation instructions (4) above; the fixture (3) has recessed areas (3 1) on the upper and lower layers for wafer trays, and the fixture (3) is next to the mounting seat A number of recessed paragraphs (3 2) are formed on both sides of (1 2), which are pivotally positioned to form L-shaped numbers and oppositely arranged clamps (3 3). This clamp (3 3) is formed with horizontal clamping. End (331), vertical non-clamping end (332), there is a certain distance between the vertical non-clamping end (3 3 2) and the recessed paragraph (3 2), so that the elastic body (3 4 ) Supporting each other in between; a linear power source (4) [such as a pneumatic cylinder] is provided on the other corresponding sides of the reversing chamber (1 1) of the mechanism (1), and the linear power source (4) and the fixture (3) ) The fixtures (3 3) are set to correspond. In addition, as shown in Figures 5 to 7, when the wafer reversing mechanism (1) of the author is performing the wafer reversing work flow, the wafer that has been marked by the laser marking machine is first placed and positioned on the wafer tray. (5), and the wafer carrier (5) is sent to the lower position of the turning chamber (1 1) of the turning mechanism (1) by the conveying equipment to perform detection and positioning, and the linear power source (4) is continued to advance Push the non-clamping end (3 3 2) of the clamp (3 3) to make the clamping end (3 3 1) of the clamp (3 3) form an open state inclined outward, at this time it is located in the turning chamber (1 1 The lifting device below) is to lift the wafer support plate (5), and insert the wafer support plate (5) towards the recessed area (3 1) of the lower layer of the fixture (3), and locate it by the detector. A signal is sent to notify the linear power source (4) to retract and disengage from the non-clamping end (3 3 2) of the clamp (3 3), so that the clamping end (3 3 1) of the clamp (3 3) is subject to the elastic body. (3 4) The top support returns to the clamping state, and the wafer holder (5) on the fixture (3) is clamped firmly

第9頁 M257008 四、創作說明（5) 位，此時頂昇 驅使連動治具 當上述治 升设備作上升 力源（4 )作 ’使爽具（ 張開狀態，此 置，並由頂昇 承盤（5 )作 藉 晶片承 之承置 之設計 銜接旋 且同時 亦可針 因此， 的變更 12) (3 ) 此’不 放空間 機構進 至下一 由上述 盤（5 座（1 ，使之 轉式動 配合治 訝所需 對該晶 時，則 組設之 所需搭 僅可避 ，而且 步性之 機構（ 銜接旋 所述之 用時， 座（1 夾具（ 5 )作 同規格 機構（ 解，再 )的規 設備之 及校準 升該產 則啟動旋轉氣 符勒力源（2 ) 角之翻轉工作。 〇度角之翻轉工作時，頂 預備承接位，嗲 Μ直線式動 3)之非夾持端（3 3 2 3 3 1 )形成朝外傾斜之 )離開治具（3 )夾持位 盤（5 )，且順勢將晶片 由輸送設備帶引晶片承盤 設備作下 (3 )作 具（3 ) 至晶片承 前進頂推 3 3 )之 時，晶片 設備承接 下降回位 製程。 ，本創作 )之治具 2 )〔即 欲進行翻 力源（2 具（3 ) 規格的晶 片翻轉製 僅需將該 治具（3 組之晶片 免增加花 亦加快該 實質效益 降回位， 1 8 0度 完成1 8 盤下方之 夾具（3 夾持端（ 承盤（5 該晶片承 ，最後則 晶片翻轉 (3 )與 習知技術 轉工作使 )之承置 所設置之 片承盤（ 程有需不 晶片翻轉 )予以拆 承盤（5 費該製程 製程作業 ，進而提 1 )在利 轉式動力 帶動軸〕 即將治具 2 )作結 3 3 )的 牢靠之側 之晶片承 1 )内與 行對翻轉 格作更換 資源成本 時間，充 業技術利 用為放置 源（2 ) 形成分離 (3 )與 合組成， 夾持内徑 向定位。 盤（5 ) 承置座（ 用之治具 處理，如 及佔用健 分發揮該 用價值之Page 9 M257008 4. Creation instructions (5). At this time, the jacking drives the linked fixture as the source of the lifting force (4) as the 'make cooler' (open state, this set, and by the top The lifting tray (5) is designed to be connected by the wafer bearing and can also be pinned at the same time. Therefore, the change 12) (3) This' holding space mechanism moves to the next tray (5 seats (1, When it is necessary to make the rotating movement to cope with the crystal, the required assembly can only be avoided, and the step mechanism (the connection (1 fixture (5) for the use described in the connection), the same specifications The regulation and calibration of the mechanism (solution, re) and the calibration of the product will start the turning operation of the rotary air force source (2) angle. When the turning operation of the 0 degree angle, the top preparation receiving position, the linear motion 3 ) Of the non-clamping end (3 3 2 3 3 1) forming an outwardly inclined) leave the jig (3) holding the disc (5), and the wafer is guided by the conveyor equipment to the wafer holding equipment ( 3) When the tooling (3) is performed until the wafer bearing is pushed forward 3 3), the wafer equipment undertakes the descending and returning process. Work) 2) [That is, if you want to flip the power source (2 (3) size wafers, you only need to make the fixture (3 sets of wafers without additional flowers will also speed up the return of the actual benefits, 1 8 0 degrees to complete the mounting of the clamp under the 8 plate (3 clamping end (receiving plate (5 the wafer bearing, and finally the wafer flip (3) and the conventional technology transfer work)) Need to do not flip the chip) to disassemble the tray (5 charges for the manufacturing process of the process, and then mention 1) in the profit-turning power drive shaft] will soon be the fixture 2) the knot 3 3) on the solid side of the wafer holder 1) and The replacement grid is used to replace the resource cost and time. The filling technology uses the source (2) to form the separation (3) and the combined composition, and the radial positioning inside the clamp. The disc (5) the holder (using the jig treatment, Such as the use of points to play the value of the use

第10頁 M257008 四、創作說明（6) 經濟效益。 綜上所述，本創作實施例確能達到所預期之使用功效 ，又其所揭露之具體構造，不僅未曾見諸於同類產品中， 亦未曾公開於申請前，誠已完全符合專利法之規定與要求 ，爰依法提出新型專利之申請，懇請惠予審查，並賜准專 利，則實感德便。Page 10 M257008 IV. Creative Instructions (6) Economic Benefits. To sum up, this creative embodiment can indeed achieve the expected use effect, and the specific structure disclosed has not only been seen in similar products, nor has it been disclosed before the application. It has fully complied with the provisions of the Patent Law. In accordance with the law, the application for a new type of patent was submitted in accordance with the law, and I begged to examine it and grant the patent.

第11頁 M257008 圖式簡單說明 【圖式簡單說明】 第一圖：本創作翻轉機構之外觀圖 第二圖：本創作翻轉機構之外觀示意圖 第三圖：本創作翻轉機構之側視剖面圖 第四圖：本創作翻轉機構之仰視示意圖 第五圖：本創作翻轉機構之前視剖面圖 第六圖：本創作翻轉機構之治具未作動圖 第七圖：本創作翻轉機構之治具已作動圖 〔參照圖號〕 (1 ) (111) (12)(2 ) ( 3 3 2 ) (4 ) 機構 主動轴 承置座 旋轉式動力源 凹陷區域 夾具 非夾持端 直線式動力源Page 11 M257008 Brief description of the drawings [Simplified illustration of the drawings] The first picture: the appearance of the creative flip mechanism The second picture: the schematic diagram of the creative flip mechanism The third figure: the side sectional view of the creative flip mechanism Figure 4: Bottom view of the creative flip mechanism. Figure 5: Sectional view of the creative flip mechanism. Figure 6: The fixture of the creative flip mechanism is not in action. Figure 7: The fixture of the creative flip mechanism is in action. [Refer to the drawing number] (1) (111) (12) (2) (3 3 2) (4) Mechanism active bearing seat rotary power source recessed area clamp non-clamping end linear power source

(112) (12 1) (3 ) (32) (331 (34) 翻轉室 被動軸 水平段 治具 凹設段落 夾持端 彈性體 晶片承盤(112) (12 1) (3) (32) (331 (34) Rolling chamber Passive shaft Horizontal section Fixture Recessed section Clamping end Elastomer Wafer plate

II

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Claims (1)

M257008M257008 五、申請專利範圍 1 · 一種晶片翻轉機構，該機構於内部形 ，而於翻轉室的相應兩側分別樞設有具旋轉式 動軸及被動軸，且主動轴及被動軸各連設有承 置座為配合一為供放置晶片承盤之治具組設其 提供該治具可隨晶片承盤所需之規格不同而作 2 ·如申請專利範圍第1項所述之晶片翻轉機 中，該承置座具有水平段，此水平段為配合治具組’其 。 ，、、、、置其上V. Scope of patent application1. A wafer turning mechanism, which is internally shaped, and has a rotating movable shaft and a passive shaft pivoted on the two sides of the turning chamber, respectively, and the active shaft and the passive shaft are each provided with a bearing. The seat is matched with a jig assembly for placing a wafer tray. The fixture can be provided according to the specifications of the wafer tray. 2 · As in the wafer turning machine described in item 1 of the scope of patent application, The receiving seat has a horizontal section, and the horizontal section is a cooperating fixture group. ,,,,, on it 3 · —種晶片翻轉機構，該機構於内部形成有翻轉^ ，而於翻轉室的相應兩側分別樞設有具旋轉式動力源之至 動軸及被動軸，且主動軸及被動轴之間組設有一為供放置 晶片承盤之治具，該治具相鄰主動軸及被動軸之兩側各形 成凹設段落，為樞置定位以呈擺設相反之夾具，此夾具开^ 成有夾持端、非夾持端，其非夾持端與凹設段落之間具有 一定間距，為令彈性體相互頂撐其間；復配合翻轉室對應 夾具的兩側設置有直線式動力源，此直線式動力源與治具 所設置之夾具呈相對應；據此，提供該夾具受直線式動力 源之作動下，而達成所需張開及夾合之精簡化設置者。3 · —A kind of wafer turning mechanism, the mechanism is formed with a turning ^ inside, and the two sides of the turning chamber are respectively provided with a driving shaft and a passive shaft with a rotary power source, and a group between the active shaft and the passive shaft There is a jig for placing the wafer carrier. The jig has two recessed sections on both sides adjacent to the active and passive axes. The jig is pivotally positioned to display the opposite jig. The jig is opened to form a clamp. End, non-clamping end, there is a certain distance between the non-clamping end and the recessed paragraph, in order to make the elastic bodies support each other between them; a linear power source is provided on both sides of the corresponding fixture of the complex cooperation turnover room, and this linear type The power source corresponds to the fixture set by the jig; accordingly, the fixture is provided by the linear power source to achieve the simplified setting of the required opening and clamping. 第13頁Page 13