TWI845897B - 具有接觸插塞的半導體裝置 - Google Patents

具有接觸插塞的半導體裝置 Download PDF

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Publication number
TWI845897B
TWI845897B TW111106041A TW111106041A TWI845897B TW I845897 B TWI845897 B TW I845897B TW 111106041 A TW111106041 A TW 111106041A TW 111106041 A TW111106041 A TW 111106041A TW I845897 B TWI845897 B TW I845897B
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TW
Taiwan
Prior art keywords
semiconductor devices
contact plugs
plugs
contact
semiconductor
Prior art date
Application number
TW111106041A
Other languages
English (en)
Other versions
TW202249257A (zh
Inventor
崔祐榮
吳周城
黃有商
Original Assignee
南韓商三星電子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020210076645A external-priority patent/KR20220167542A/ko
Application filed by 南韓商三星電子股份有限公司 filed Critical 南韓商三星電子股份有限公司
Publication of TW202249257A publication Critical patent/TW202249257A/zh
Application granted granted Critical
Publication of TWI845897B publication Critical patent/TWI845897B/zh

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TW111106041A 2021-06-14 2022-02-18 具有接觸插塞的半導體裝置 TWI845897B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020210076645A KR20220167542A (ko) 2021-06-14 2021-06-14 콘택 플러그를 갖는 반도체 소자
KR10-2021-0076645 2021-06-14

Publications (2)

Publication Number Publication Date
TW202249257A TW202249257A (zh) 2022-12-16
TWI845897B true TWI845897B (zh) 2024-06-21

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110117718A1 (en) 2009-11-19 2011-05-19 Elpida Memory, Inc. Method of forming semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110117718A1 (en) 2009-11-19 2011-05-19 Elpida Memory, Inc. Method of forming semiconductor device

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