TWI830502B - A fixture that automatically measures the flow rate of the mask carrier - Google Patents

A fixture that automatically measures the flow rate of the mask carrier Download PDF

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TWI830502B
TWI830502B TW111143876A TW111143876A TWI830502B TW I830502 B TWI830502 B TW I830502B TW 111143876 A TW111143876 A TW 111143876A TW 111143876 A TW111143876 A TW 111143876A TW I830502 B TWI830502 B TW I830502B
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flow
fixture
flow rate
module
capacitor
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TW111143876A
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TW202422220A (en
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文晋鴻
金照欽
林耿良
王安邦
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家碩科技股份有限公司
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Abstract

一種自動量測光罩載具之流量的治具，包含：一治具本體、一流量偵測模組、一無線通訊模組、一電容及一無線充電接收模組，治具本體具有一儲存空間、連通儲存空間的至少一進氣孔及至少一出氣孔，流量偵測模組包括一流量計及一訊號連接於流量計的流量顯示器，流量計設置於儲存空間中，無線通訊模組訊號連接流量計，電容電性連接流量偵測模組及無線通訊模組，無線充電接收模組設置於治具本體的底部並電性連接電容。本發明的自動量測光罩載具之流量的治具解決了氣體流量在不可視的情況下難以察覺流量意常的問題。A fixture that automatically measures the flow rate of a mask carrier, including: a fixture body, a flow detection module, a wireless communication module, a capacitor and a wireless charging receiving module. The fixture body has a storage space, at least one air inlet and at least one air outlet connected to the storage space. The flow detection module includes a flow meter and a flow display signal connected to the flow meter. The flow meter is arranged in the storage space. The wireless communication module signal Connect the flow meter, the capacitor is electrically connected to the flow detection module and the wireless communication module, and the wireless charging receiving module is set at the bottom of the fixture body and electrically connected to the capacitor. The fixture for automatically measuring the flow rate of a reticle carrier of the present invention solves the problem that it is difficult to detect abnormal gas flow rate when the gas flow rate is invisible.

Description

自動量測光罩載具之流量的治具A fixture for automatically measuring the flow rate of a mask carrier

本發明係關於一種偵測流量的治具，更特別的是關於一種自動量測光罩載具之流量的治具。The present invention relates to a fixture for detecting flow, and more particularly, to a fixture for automatically measuring the flow of a mask carrier.

在半導體領域的先進微影製程中，特別是EUV（極紫外光）微影製程，對製程環境的潔淨度要求極高。若有塵粒（particle）汙染光罩，則會造成微影製程的缺陷。為達到潔淨度與保護光罩的需求，一般使用光罩盒以阻攔外界的塵粒。因此光罩盒本身的潔淨度便很重要。一般的清潔做法是導入潔淨的氣體（壓縮乾燥氣體或氮氣）灌入光罩盒中，以掃除其中的塵粒。In the advanced lithography process in the semiconductor field, especially the EUV (extreme ultraviolet light) lithography process, the cleanliness of the process environment is extremely high. If particles contaminate the photomask, it will cause defects in the lithography process. In order to meet the requirements of cleanliness and protection of the photomask, a photomask box is generally used to block external dust particles. Therefore, the cleanliness of the mask box itself is very important. The general cleaning method is to introduce clean gas (compressed dry gas or nitrogen) into the mask box to remove dust particles.

然而，若所注入的氣體太高或太低則可能會導致光罩、光罩盒變質或受損。為避免所供給的氣體流量異常，光罩盒來源端的氣體會盡可能穩定流量。即便如此，偶爾仍會發生流量異常的情況，而氣體流量在不可視的情況下難以察覺。However, if the injected gas is too high or too low, the mask and mask box may deteriorate or be damaged. In order to avoid abnormal flow of supplied gas, the gas flow at the source end of the mask box will be as stable as possible. Even so, flow abnormalities occasionally occur, and gas flow is difficult to detect without visual inspection.

因此，為解決習知光罩載具的種種問題，本發明提出一種自動量測光罩載具之流量的治具。Therefore, in order to solve various problems of conventional reticle carriers, the present invention proposes a fixture for automatically measuring the flow rate of reticle carriers.

為達上述目的及其他目的，本發明提出一種自動量測光罩載具之流量的治具，其包含：一治具本體，具有一儲存空間、連通該儲存空間的至少一進氣孔及至少一出氣孔；一流量偵測模組，包括一流量計及一訊號連接於該流量計的流量顯示器，該流量計設置於該儲存空間中；一無線通訊模組，訊號連接該流量計；一電容，電性連接該流量偵測模組及該無線通訊模組；以及一無線充電接收模組，設置於該治具本體的底部並電性連接該電容。In order to achieve the above objects and other objects, the present invention proposes a fixture for automatically measuring the flow rate of a mask carrier, which includes: a fixture body having a storage space, at least one air inlet connected to the storage space, and at least an air outlet; a flow detection module, including a flow meter and a flow display signal connected to the flow meter, the flow meter is arranged in the storage space; a wireless communication module, the signal connected to the flow meter; A capacitor is electrically connected to the flow detection module and the wireless communication module; and a wireless charging receiving module is provided at the bottom of the fixture body and is electrically connected to the capacitor.

於本發明之一實施例中，更包括一電量顯示器，電性連接該電容。In one embodiment of the present invention, a power indicator is further included, electrically connected to the capacitor.

於本發明之一實施例中，更包括一無線充電發射模組，無線地電性連接該無線充電接收模組。In one embodiment of the present invention, a wireless charging transmitting module is further included, wirelessly and electrically connected to the wireless charging receiving module.

於本發明之一實施例中，該流量偵測模組更包括一啟動開關，訊號連接該流量計。In one embodiment of the present invention, the flow detection module further includes a start switch, and the signal is connected to the flow meter.

於本發明之一實施例中，該無線通訊模組為藍牙通訊模組。In one embodiment of the present invention, the wireless communication module is a Bluetooth communication module.

於本發明之一實施例中，該治具本體設有一有線充電界面。In one embodiment of the present invention, the fixture body is provided with a wired charging interface.

於本發明之一實施例中，該治具本體的頂部設有一提把。In one embodiment of the present invention, a carrying handle is provided on the top of the jig body.

藉此，本發明的自動量測光罩載具之流量的治具可事先發現氣體流量異常的情況，並透流量偵測模組來精準檢測氣體供應來源所供給的氣體，並藉由無線通訊模組等元件來傳輸、記錄數值，可定期檢查氣體供應來源及並記錄其數據，得知氣體供應來源的情況進而判斷分析及提前預防，降低氣體供應來源發生供給異常，減少光罩載具或光罩變質、受損的風險。In this way, the fixture for automatically measuring the flow rate of the mask carrier of the present invention can detect abnormal gas flow in advance, and accurately detect the gas supplied by the gas supply source through the flow detection module, and through wireless communication Modules and other components are used to transmit and record values. The gas supply source can be checked regularly and its data can be recorded. The situation of the gas supply source can be known and then judged, analyzed and prevented in advance. This can reduce supply abnormalities in the gas supply source and reduce the risk of mask carriers or Risk of photomask deterioration and damage.

為充分瞭解本發明，茲藉由下述具體之實施例，並配合所附之圖式，對本發明做一詳細說明。本領域技術人員可由本說明書所公開的內容瞭解本發明的目的、特徵及功效。須注意的是，本發明可透過其他不同的具體實施例加以施行或應用，本說明書中的各項細節亦可基於不同觀點與應用，在不悖離本發明的精神下進行各種修飾與變更。以下的實施方式將進一步詳細說明本發明的相關技術內容，但所公開的內容並非用以限制本發明的申請專利範圍。說明如後：In order to fully understand the present invention, the present invention is described in detail through the following specific embodiments and the accompanying drawings. Those skilled in the art can understand the purpose, features and effects of the present invention from the contents disclosed in this specification. It should be noted that the present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the patentable scope of the present invention. The description is as follows:

如圖1至圖4所示，本發明實施例之自動量測光罩載具之流量的治具100，其包含：一治具本體1、一流量偵測模組2、一無線通訊模組3、一電容4及一無線充電接收模組5。As shown in Figures 1 to 4, a fixture 100 for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention includes: a fixture body 1, a flow detection module 2, and a wireless communication module 3. A capacitor 4 and a wireless charging receiving module 5.

治具本體1具有一儲存空間S、連通儲存空間S的至少一進氣孔11及至少一出氣孔12，本實施例中為二進氣孔11及二出氣孔12。這些進氣孔11及出氣孔12貫穿治具本體1的底面。治具本體1的具體形狀可比照光罩載具的形狀，在本實施例中，治具本體1大至呈矩形盒體，並且治具本體1的頂部設有一提把14，方便以抓握的方式移動治具本體1。The jig body 1 has a storage space S, at least one air inlet 11 and at least one air outlet 12 communicating with the storage space S. In this embodiment, there are two air inlets 11 and two air outlets 12 . These air inlet holes 11 and air outlet holes 12 penetrate through the bottom surface of the jig body 1 . The specific shape of the jig body 1 can be compared with the shape of the photomask carrier. In this embodiment, the jig body 1 is as large as a rectangular box, and a handle 14 is provided on the top of the jig body 1 for easy gripping. Method to move the jig body 1.

流量偵測模組2包括一流量計21及一訊號連接於流量計21的流量顯示器22，流量計21設置於儲存空間S中。流量計21例如為測量液體、氣體等流體用的流量感測器，例如為熱質型流量計、膜片型流量計或超音波型流量計等等，且本發明不限於此。流量顯示器22例如為液晶顯示器，接收流量計21測得的流量訊號並予以顯示。流量顯示器22較佳地設置於治具本體1的外表面。The flow detection module 2 includes a flow meter 21 and a flow display 22 whose signal is connected to the flow meter 21. The flow meter 21 is arranged in the storage space S. The flow meter 21 is, for example, a flow sensor for measuring fluids such as liquids and gases, such as a thermal mass flow meter, a diaphragm flow meter, an ultrasonic flow meter, etc., and the invention is not limited thereto. The flow display 22 is, for example, a liquid crystal display, which receives the flow signal measured by the flow meter 21 and displays it. The flow indicator 22 is preferably provided on the outer surface of the fixture body 1 .

無線通訊模組3訊號連接流量計21。無線通訊模組3接收流量計21測得的流量訊號並傳送至外部機構。無線通訊模組3例如為藍牙通訊模組，以藍牙無線傳輸的方式將流量訊號傳送至遠端的電腦、手機等終端裝置。The signal of the wireless communication module 3 is connected to the flow meter 21 . The wireless communication module 3 receives the flow signal measured by the flow meter 21 and transmits it to an external organization. The wireless communication module 3 is, for example, a Bluetooth communication module, which transmits traffic signals to remote terminal devices such as computers and mobile phones through Bluetooth wireless transmission.

電容4電性連接流量偵測模組2及無線通訊模組3，用以供應流量偵測模組2及無線通訊模組3所需的電能。電容4例如為可反覆充電的電池。無線通訊模組3同樣也可以將電容4的電量傳送至外部機構。The capacitor 4 is electrically connected to the flow detection module 2 and the wireless communication module 3, and is used to supply the electric energy required by the flow detection module 2 and the wireless communication module 3. The capacitor 4 is, for example, a rechargeable battery. The wireless communication module 3 can also transmit the power of the capacitor 4 to an external mechanism.

無線充電接收模組5設置於治具本體1的底部並電性連接電容4。在對電容4充電時，無線充電接收模組5與一無線充電發射模組7近距離相對，以磁感應或磁共振的方式進行能量傳輸。無線充電發射模組7設有發射端線圈，而無線充電接收模組5設有接受端線圈，兩個線圈以磁場耦合（磁感應）或諧振（磁共振）進行能量傳輸。然而本發明不限於此。The wireless charging receiving module 5 is disposed at the bottom of the jig body 1 and is electrically connected to the capacitor 4 . When charging the capacitor 4, the wireless charging receiving module 5 is relatively close to a wireless charging transmitting module 7, and energy is transmitted by magnetic induction or magnetic resonance. The wireless charging transmitting module 7 is provided with a transmitting end coil, and the wireless charging receiving module 5 is provided with a receiving end coil. The two coils transmit energy through magnetic field coupling (magnetic induction) or resonance (magnetic resonance). However, the present invention is not limited to this.

綜上所述，藉由本發明的自動量測光罩載具之流量的治具100，可事先發現氣體流量異常的情況，並透流量偵測模組2來精準檢測氣體供應來源所供給的氣體，並藉由無線通訊模組3等元件來傳輸、記錄數值，可定期檢查氣體供應來源及並記錄其數據，得知氣體供應來源的情況進而判斷分析及提前預防，降低氣體供應來源發生供給異常，減少光罩載具或光罩變質、受損的風險。In summary, through the jig 100 for automatically measuring the flow rate of a mask carrier of the present invention, abnormal gas flow conditions can be discovered in advance, and the gas supplied by the gas supply source can be accurately detected through the flow detection module 2 , and transmit and record values through wireless communication module 3 and other components, the gas supply source can be checked regularly and its data can be recorded, the status of the gas supply source can be known, and the status of the gas supply source can be judged, analyzed and prevented in advance, thereby reducing supply abnormalities in the gas supply source. , Reduce the risk of deterioration and damage to the photomask carrier or photomask.

進一步地，自動量測光罩載具之流量的治具100更包括一電量顯示器6，電性連接電容4。電量顯示器6例如為液晶顯示器，依據電容4所剩的電量並予以顯示。電量顯示器6較佳地設置於治具本體1的外表面。Furthermore, the fixture 100 for automatically measuring the flow rate of the mask carrier further includes a power indicator 6 electrically connected to the capacitor 4 . The power display 6 is, for example, a liquid crystal display, and displays the remaining power of the capacitor 4 . The power indicator 6 is preferably arranged on the outer surface of the fixture body 1 .

進一步地，如圖2所示，自動量測光罩載具之流量的治具100更包括前述的無線充電發射模組7，無線地電性連接無線充電接收模組5。無線充電發射模組7可設置於一充氣盤面P（連通於氣體供應來源）上，充氣盤面P上設有複數個吹氣嘴P1，分別對進氣孔11吹氣、或接收出氣孔12的排氣。當自動量測光罩載具之流量的治具100裝載於充氣盤面P時，氣體供應來源透過充氣盤面P對治具本體1的儲存空間S貫入氣體，同時無線充電發射模組7近距離相對無線充電接收模組5，使無線充電接收模組5有效率地利用電磁感應的原理而對電容4充電。Further, as shown in FIG. 2 , the jig 100 for automatically measuring the flow rate of the mask carrier further includes the aforementioned wireless charging transmitting module 7 and is wirelessly and electrically connected to the wireless charging receiving module 5 . The wireless charging transmitting module 7 can be installed on an inflatable panel P (connected to a gas supply source). The inflatable panel P is provided with a plurality of air blowing nozzles P1 to blow air into the air inlet 11 or receive air from the air outlet 12 respectively. Exhaust. When the fixture 100 that automatically measures the flow rate of the mask carrier is loaded on the inflatable disk P, the gas supply source penetrates the gas through the inflatable disk P into the storage space S of the fixture body 1, and at the same time, the wireless charging transmitting module 7 faces each other at a close distance The wireless charging receiving module 5 enables the wireless charging receiving module 5 to efficiently charge the capacitor 4 using the principle of electromagnetic induction.

進一步地，流量偵測模組2更包括一啟動開關23，訊號連接流量計21。啟動開關23可以為機械式的觸發開關，以開啟/關閉流量計21，也可以是電動式的或其他類型的開關。啟動開關23也可進一步連動於流量顯示器22，以開啟/關閉流量顯示器22。Furthermore, the flow detection module 2 further includes a start switch 23 whose signal is connected to the flow meter 21 . The start switch 23 can be a mechanical trigger switch to turn on/off the flow meter 21, or it can be an electric or other type of switch. The start switch 23 can also be further linked to the flow indicator 22 to turn on/off the flow indicator 22 .

進一步地，治具本體1更設有一有線充電界面13，有線充電界面13例如為通用串行匯流排（Universal Serial Bus，USB）界面，或常規的有線電力傳輸介面。電容4透過有線充電界面13而可有線地連接至一充電源，以作為輔助用充電方式。Furthermore, the fixture body 1 is further provided with a wired charging interface 13. The wired charging interface 13 is, for example, a Universal Serial Bus (USB) interface or a conventional wired power transmission interface. The capacitor 4 can be wired to a charging source through the wired charging interface 13 as an auxiliary charging method.

本發明在上文中已以實施例揭露，然熟習本項技術者應理解的是，該實施例僅用於描繪本發明，而不應解讀為限制本發明之範圍。應注意的是，舉凡與該實施例等效之變化與置換，均應設為涵蓋於本發明之範疇內。因此，本發明之保護範圍當以申請專利範圍所界定者為準。The present invention has been disclosed in the above embodiments. However, those skilled in the art should understand that the embodiments are only used to illustrate the present invention and should not be interpreted as limiting the scope of the present invention. It should be noted that any changes and substitutions that are equivalent to this embodiment should be considered to be within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope of the patent application.

100:自動量測光罩載具之流量的治具 1:治具本體 11:進氣孔 12:出氣孔 13:有線充電界面 14:提把 2:流量偵測模組 21:流量計 22:流量顯示器 23:啟動開關 3:無線通訊模組 4:電容 5:無線充電接收模組 6:電量顯示器 7:無線充電發射模組 P:充氣盤面 P1:吹氣嘴 S:儲存空間100: A fixture that automatically measures the flow rate of the mask carrier 1: Fixture body 11: Air intake hole 12: Air outlet 13:Wired charging interface 14: handle 2: Traffic detection module 21:Flowmeter 22:Flow monitor 23: Start switch 3: Wireless communication module 4: Capacitor 5: Wireless charging receiving module 6:Battery indicator 7: Wireless charging transmitter module P: Inflatable disk P1: Air blower S: storage space

圖1係為根據本發明實施例之自動量測光罩載具之流量的治具之立體示意圖。 圖2係為根據本發明實施例之自動量測光罩載具之流量的治具之另一視角立體示意圖。 圖3係為根據本發明實施例之自動量測光罩載具之流量的治具之剖面圖。 圖4係為根據本發明實施例之自動量測光罩載具之流量的治具之方塊示意圖。 FIG. 1 is a schematic three-dimensional view of a fixture for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention. FIG. 2 is a schematic perspective view of a fixture for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention. FIG. 3 is a cross-sectional view of a fixture for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention. FIG. 4 is a block diagram of a fixture for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention.

100:自動量測光罩載具之流量的治具 100: A fixture that automatically measures the flow rate of the mask carrier

1:治具本體 1: Fixture body

13:有線充電界面 13:Wired charging interface

14:提把 14: handle

22:流量顯示器 22:Flow monitor

23:啟動開關 23: Start switch

3:無線通訊模組 3: Wireless communication module

6:電量顯示器 6:Battery indicator

Claims (7)

一種自動量測光罩載具之流量的治具，其包含： 一治具本體，具有一儲存空間、連通該儲存空間的至少一進氣孔及至少一出氣孔； 一流量偵測模組，包括一流量計及一訊號連接於該流量計的流量顯示器，該流量計設置於該儲存空間中； 一無線通訊模組，訊號連接該流量計； 一電容，電性連接該流量偵測模組及該無線通訊模組；以及 一無線充電接收模組，設置於該治具本體的底部並電性連接該電容。 A fixture for automatically measuring the flow rate of a mask carrier, which includes: A jig body having a storage space, at least one air inlet and at least one air outlet connected to the storage space; A flow detection module includes a flow meter and a flow display signal connected to the flow meter, and the flow meter is arranged in the storage space; A wireless communication module, the signal is connected to the flow meter; a capacitor electrically connected to the flow detection module and the wireless communication module; and A wireless charging receiving module is disposed at the bottom of the fixture body and electrically connected to the capacitor. 如請求項1所述之自動量測光罩載具之流量的治具，更包括一電量顯示器，電性連接該電容。The fixture for automatically measuring the flow rate of a mask carrier as described in claim 1 further includes a power indicator electrically connected to the capacitor. 如請求項1所述之自動量測光罩載具之流量的治具，更包括一無線充電發射模組，無線地電性連接該無線充電接收模組。The fixture for automatically measuring the flow rate of a photomask carrier as described in claim 1 further includes a wireless charging transmitting module that is wirelessly and electrically connected to the wireless charging receiving module. 如請求項1所述之自動量測光罩載具之流量的治具，其中該流量偵測模組更包括一啟動開關，訊號連接該流量計。As claimed in claim 1, the fixture for automatically measuring the flow rate of a mask carrier, wherein the flow detection module further includes a start switch, and the signal is connected to the flow meter. 如請求項1所述之自動量測光罩載具之流量的治具，其中該無線通訊模組為藍牙通訊模組。The fixture for automatically measuring the flow rate of a mask carrier as described in claim 1, wherein the wireless communication module is a Bluetooth communication module. 如請求項1所述之自動量測光罩載具之流量的治具，其中該治具本體設有一有線充電界面。The fixture for automatically measuring the flow rate of a photomask carrier as described in claim 1, wherein the fixture body is provided with a wired charging interface. 如請求項1所述之自動量測光罩載具之流量的治具，其中該治具本體的頂部設有一提把。The jig for automatically measuring the flow rate of a mask carrier as described in claim 1, wherein the top of the jig body is provided with a handle.
TW111143876A 2022-11-17 2022-11-17 A fixture that automatically measures the flow rate of the mask carrier TWI830502B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6645702B1 (en) * 2000-05-01 2003-11-11 Advanced Micro Devices, Inc. Treat resist surface to prevent pattern collapse
WO2006028188A1 (en) * 2004-09-10 2006-03-16 Nikon Corporation Stage apparatus and exposure apparatus
TW201724325A (en) * 2015-10-05 2017-07-01 布魯克斯Ｃｃｓ有限公司 Method and system for forming a clean environment for semiconductor substrates with low humidity level
TWM570303U (en) * 2018-09-04 2018-11-21 中勤實業股份有限公司 Intelligent pallet
TW202215149A (en) * 2020-09-30 2022-04-16 家登精密工業股份有限公司 Substrate storage apparatus provided with storage environment detection
TWM640851U (en) * 2022-11-17 2023-05-11 家碩科技股份有限公司 Fixture of automatically measuring flow of photomask carrier

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6645702B1 (en) * 2000-05-01 2003-11-11 Advanced Micro Devices, Inc. Treat resist surface to prevent pattern collapse
WO2006028188A1 (en) * 2004-09-10 2006-03-16 Nikon Corporation Stage apparatus and exposure apparatus
TW201724325A (en) * 2015-10-05 2017-07-01 布魯克斯Ｃｃｓ有限公司 Method and system for forming a clean environment for semiconductor substrates with low humidity level
TWM570303U (en) * 2018-09-04 2018-11-21 中勤實業股份有限公司 Intelligent pallet
TW202215149A (en) * 2020-09-30 2022-04-16 家登精密工業股份有限公司 Substrate storage apparatus provided with storage environment detection
TWM640851U (en) * 2022-11-17 2023-05-11 家碩科技股份有限公司 Fixture of automatically measuring flow of photomask carrier

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