TW202417984A - A fixture for measuring the temperature and humidity of the mask carrier - Google Patents
A fixture for measuring the temperature and humidity of the mask carrier Download PDFInfo
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- 238000001514 detection method Methods 0.000 claims abstract description 20
- 239000003990 capacitor Substances 0.000 claims abstract description 10
- 239000007789 gas Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 230000004913 activation Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
一種量測光罩載具之溫濕度的治具，包含：一治具本體、一偵測模組、一無線通訊模組及一電容，治具本體具有一儲存空間、連通儲存空間的至少一進氣孔及至少一出氣孔，偵測模組包括一溫度計及一濕度計溫度計及濕度計設置於儲存空間中，無線通訊模組訊號連接溫度計及濕度計，電容電性連接偵測模組及無線通訊模組。本發明的量測光罩載具之溫濕度的治具用於掌握光罩載具內部的溫溼度及其變化。A jig for measuring the temperature and humidity of a mask carrier comprises: a jig body, a detection module, a wireless communication module and a capacitor. The jig body has a storage space, at least one air inlet and at least one air outlet connected to the storage space. The detection module comprises a thermometer and a hygrometer. The thermometer and the hygrometer are arranged in the storage space. The wireless communication module is connected to the thermometer and the hygrometer by signal, and the capacitor is electrically connected to the detection module and the wireless communication module. The jig for measuring the temperature and humidity of a mask carrier of the present invention is used to grasp the temperature and humidity and their changes inside the mask carrier.
Description
本發明係關於一種偵測溫濕度的治具，更特別的是關於一種量測光罩載具之溫濕度的治具。The present invention relates to a fixture for detecting temperature and humidity, and more particularly to a fixture for measuring the temperature and humidity of a mask carrier.
在半導體領域的先進微影製程中，特別是EUV（極紫外光）微影製程，對製程環境的潔淨度要求極高。若有塵粒（particle）汙染光罩，則會造成微影製程的缺陷。為達到潔淨度與保護光罩的需求，一般使用光罩載具以阻攔外界的塵粒。而為了保持光罩載具本身的乾燥，一般的做法是導入乾燥的氣體（壓縮乾燥氣體或氮氣）灌入光罩載具中。In the advanced lithography process in the semiconductor field, especially EUV (extreme ultraviolet) lithography process, the cleanliness of the process environment is extremely high. If particles contaminate the mask, it will cause defects in the lithography process. In order to achieve the cleanliness and protection of the mask, a mask carrier is generally used to block external dust. In order to keep the mask carrier dry, the general practice is to introduce dry gas (compressed dry gas or nitrogen) into the mask carrier.
然而，灌入氣體時需要知道光罩載具內部此時的溫溼度及其變化，才能精準地即時掌握光罩載具內部的狀況。However, when injecting gas, it is necessary to know the temperature and humidity inside the mask carrier and their changes at that time in order to accurately grasp the situation inside the mask carrier in real time.
因此，為解決習知光罩載具的種種問題，本發明提出一種量測光罩載具之溫濕度的治具。Therefore, in order to solve various problems of conventional mask carriers, the present invention provides a fixture for measuring the temperature and humidity of a mask carrier.
為達上述目的及其他目的，本發明提出一種量測光罩載具之溫濕度的治具，其包含：一治具本體，具有一儲存空間、連通該儲存空間的至少一進氣孔及至少一出氣孔；一偵測模組，包括一溫度計及一濕度計，該溫度計及該濕度計設置於該儲存空間中；一無線通訊模組，訊號連接該溫度計及該濕度計；以及一電容，電性連接該偵測模組及該無線通訊模組。To achieve the above-mentioned and other purposes, the present invention proposes a fixture for measuring the temperature and humidity of a mask carrier, which comprises: a fixture body having a storage space, at least one air inlet and at least one air outlet connected to the storage space; a detection module including a thermometer and a hygrometer, the thermometer and the hygrometer being arranged in the storage space; a wireless communication module, signal-connecting the thermometer and the hygrometer; and a capacitor, electrically connecting the detection module and the wireless communication module.
於本發明之一實施例中，該偵測模組更包括一流量計及一顯示器，該流量計設置於該儲存空間中並訊號連接於該顯示器。In one embodiment of the present invention, the detection module further includes a flow meter and a display, and the flow meter is disposed in the storage space and is signal-connected to the display.
於本發明之一實施例中，該偵測模組更包括一啟動開關，訊號連接該溫度計及該濕度計。In one embodiment of the present invention, the detection module further includes an activation switch, the signal of which is connected to the thermometer and the hygrometer.
於本發明之一實施例中，該無線通訊模組為藍牙通訊模組。In one embodiment of the present invention, the wireless communication module is a Bluetooth communication module.
於本發明之一實施例中，該治具本體設有一有線充電界面。In one embodiment of the present invention, the fixture body is provided with a wired charging interface.
於本發明之一實施例中，該治具本體的頂部設有一提把。In one embodiment of the present invention, a handle is provided on the top of the fixture body.
於本發明之一實施例中，更包括一配重塊，設置於該儲存空間中。In one embodiment of the present invention, a counterweight block is further included, which is disposed in the storage space.
藉此，本發明的量測光罩載具之溫濕度的治具可透過偵測模組來精準測量乾燥氣體灌入光罩載具時光罩載具內部的溫濕度變化，並藉由無線通訊模組等元件來傳輸、記錄數值，可定期檢查氣體供應來源及並記錄其數據，得知氣體供應來源的情況進而判斷分析及提前預防，降低光罩載具內部發生溫濕度異常的可能，減少光罩載具或光罩變質、受損的風險。Thus, the jig for measuring the temperature and humidity of the mask carrier of the present invention can accurately measure the temperature and humidity changes inside the mask carrier when dry gas is poured into the mask carrier through the detection module, and transmit and record the values through components such as wireless communication modules. The gas supply source can be checked regularly and its data can be recorded. The condition of the gas supply source can be known to make judgments, analyses and preventive measures in advance, thereby reducing the possibility of abnormal temperature and humidity inside the mask carrier and reducing the risk of deterioration and damage of the mask carrier or the mask.
為充分瞭解本發明，茲藉由下述具體之實施例，並配合所附之圖式，對本發明做一詳細說明。本領域技術人員可由本說明書所公開的內容瞭解本發明的目的、特徵及功效。須注意的是，本發明可透過其他不同的具體實施例加以施行或應用，本說明書中的各項細節亦可基於不同觀點與應用，在不悖離本發明的精神下進行各種修飾與變更。以下的實施方式將進一步詳細說明本發明的相關技術內容，但所公開的內容並非用以限制本發明的申請專利範圍。說明如後：In order to fully understand the present invention, the present invention is described in detail through the following specific embodiments and the attached drawings. Technical personnel in this field can understand the purpose, features and effects of the present invention from the contents disclosed in this specification. It should be noted that the present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. The following implementation method will further explain the relevant technical content of the present invention in detail, but the disclosed content is not used to limit the scope of the patent application of the present invention. The description is as follows:
如圖1至圖3所示，本發明實施例之量測光罩載具之溫濕度的治具100，其包含：一治具本體1、一偵測模組2、一無線通訊模組3及一電容4。As shown in FIG. 1 to FIG. 3 , a
治具本體1具有一儲存空間S、連通儲存空間S的至少一進氣孔11及至少一出氣孔12，本實施例中為二進氣孔11及二出氣孔12。這些進氣孔11及出氣孔12貫穿治具本體1的底面。治具本體1的具體形狀可比照光罩載具的形狀，在本實施例中，治具本體1大致呈矩形盒體，並且治具本體1的頂部設有一提把14，方便以抓握的方式移動治具本體1。The fixture body 1 has a storage space S, at least one
偵測模組2包括一溫度計21及一濕度計22溫度計21及濕度計22設置於儲存空間S中。溫度計21例如為熱敏電阻溫度計、熱電偶溫度計、紅外線溫度計等常規的測量溫度的裝置；濕度計22例如為電容式、電阻式、導熱型等常規的測量濕度的裝置，且本發明不限於此。溫度計21及濕度計22還可結合成一體的溫濕度計（如圖2），或也可以分成二個構件。The
無線通訊模組3訊號連接溫度計21及濕度計22。無線通訊模組3接收溫度計21及濕度計22測得的溫濕度資訊並傳送至外部機構。無線通訊模組3例如為藍牙通訊模組，以藍牙無線傳輸的方式將溫濕度資訊傳送至遠端的電腦、手機等終端裝置。The
電容4電性連接偵測模組2及無線通訊模組3，用以供應偵測模組2及無線通訊模組3所需的電能。電容4例如為可反覆充電的電池。無線通訊模組3同樣也可以將電容4的電量資訊傳送至外部機構。The
綜上所述，藉由本發明的量測光罩載具之溫濕度的治具100，可透過偵測模組2來精準測量乾燥氣體灌入光罩載具時光罩載具內部的溫濕度變化，並藉由無線通訊模組3等元件來傳輸、記錄數值，可定期檢查氣體供應來源及並記錄其數據，得知氣體供應來源的情況進而判斷分析及提前預防，降低光罩載具內部發生溫濕度異常的可能，減少光罩載具或光罩變質、受損的風險。In summary, by using the
進一步地，在本實施例中，如圖2所示，偵測模組2更包括一流量計23及一顯示器24，流量計23設置於儲存空間S中並訊號連接於顯示器24。流量計23例如為測量液體、氣體等流體用的流量感測器，例如為熱質型流量計、膜片型流量計或超音波型流量計等等，且本發明不限於此。顯示器24例如為液晶顯示器，較佳地設置於治具本體1的外表面。顯示器24接收流量計23測得的流量訊號並予以顯示。Furthermore, in this embodiment, as shown in FIG. 2 , the
進一步地，在本實施例中，如圖1所示，偵測模組2更包括一啟動開關25，訊號連接溫度計21及濕度計22。啟動開關25可以為機械式的觸發開關，以開啟/關閉溫度計21及濕度計22，也可以是電動式的或其他類型的開關。啟動開關25也可進一步連動於顯示器24，以開啟/關閉顯示器24。Furthermore, in this embodiment, as shown in FIG. 1 , the
進一步地，在本實施例中，如圖1所示，治具本體1更設有一有線充電界面13，有線充電界面13例如為通用串行匯流排（Universal Serial Bus，USB）界面，或常規的有線電力傳輸介面。電容4透過有線充電界面13而可有線地連接至一充電源，以作為輔助用充電方式。Furthermore, in this embodiment, as shown in FIG. 1 , the fixture body 1 is further provided with a
進一步地，在本實施例中，如圖2所示，本發明的量測光罩載具之溫濕度的治具100更包括一配重塊5，設置於儲存空間S中。配重塊5可平衡治具本體1的載重，並模擬光罩載具承載光罩時的重量。Furthermore, in this embodiment, as shown in FIG2 , the
本發明在上文中已以實施例揭露，然熟習本項技術者應理解的是，該實施例僅用於描繪本發明，而不應解讀為限制本發明之範圍。應注意的是，舉凡與該實施例等效之變化與置換，均應設為涵蓋於本發明之範疇內。因此，本發明之保護範圍當以申請專利範圍所界定者為準。The present invention has been disclosed in the above by way of an embodiment, but those skilled in the art should understand that the embodiment is only used to describe the present invention and should not be interpreted as limiting the scope of the present invention. It should be noted that all changes and substitutions equivalent to the embodiment should be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to that defined by the scope of the patent application.
100:量測光罩載具之溫濕度的治具 1:治具本體 11:進氣孔 12:出氣孔 13:有線充電界面 14:提把 2:偵測模組 21:溫度計 22:濕度計 23:流量計 24:顯示器 25:啟動開關 3:無線通訊模組 4:電容 5:配重塊 S:儲存空間 100: A fixture for measuring the temperature and humidity of a mask carrier 1: Fixture body 11: Air inlet 12: Air outlet 13: Wired charging interface 14: Handle 2: Detection module 21: Thermometer 22: Humidity meter 23: Flow meter 24: Display 25: Start switch 3: Wireless communication module 4: Capacitor 5: Counterweight S: Storage space
圖1係為根據本發明實施例之量測光罩載具之溫濕度的治具之立體示意圖。 圖2係為根據本發明實施例之量測光罩載具之溫濕度的治具之剖面圖。 圖3係為根據本發明實施例之量測光罩載具之溫濕度的治具之方塊示意圖。 FIG. 1 is a three-dimensional schematic diagram of a jig for measuring the temperature and humidity of a mask carrier according to an embodiment of the present invention. FIG. 2 is a cross-sectional diagram of a jig for measuring the temperature and humidity of a mask carrier according to an embodiment of the present invention. FIG. 3 is a block schematic diagram of a jig for measuring the temperature and humidity of a mask carrier according to an embodiment of the present invention.
100:量測光罩載具之溫濕度的治具 100: A fixture for measuring the temperature and humidity of the mask carrier
1:治具本體 1: Fixture body
13:有線充電界面 13: Wired charging interface
14:提把 14: Handle
24:顯示器 24: Display
25:啟動開關 25: Start switch
3:無線通訊模組 3: Wireless communication module
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111139769A TWI830449B (en) | 2022-10-20 | 2022-10-20 | A fixture for measuring the temperature and humidity of the mask carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111139769A TWI830449B (en) | 2022-10-20 | 2022-10-20 | A fixture for measuring the temperature and humidity of the mask carrier |
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| Publication Number | Publication Date |
|---|---|
| TWI830449B TWI830449B (en) | 2024-01-21 |
| TW202417984A true TW202417984A (en) | 2024-05-01 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5674314B2 (en) * | 2007-02-28 | 2015-02-25 | インテグリス・インコーポレーテッド | Reticle SMIF pod or substrate container and purge method thereof |
| TWM324286U (en) * | 2007-07-20 | 2007-12-21 | Li-Wei Liao | Structure of gas filled cabinet for photomask |
| TWI579215B (en) * | 2016-10-07 | 2017-04-21 | 家登精密工業股份有限公司 | Vertical Fixing Transmission Box and Transmission Method Using the Same |
| US10345716B2 (en) * | 2017-11-24 | 2019-07-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Metrology method in reticle transportation |
| CN215933541U (en) * | 2021-09-14 | 2022-03-01 | 弥费实业(上海)有限公司 | Intelligent clean cache device |
| TWM639219U (en) * | 2022-10-20 | 2023-04-01 | 家登自動化股份有限公司 | Fixture for measuring temperature and humidity of photomask carrier |
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