TWI819444B - Robots and robot control methods - Google Patents
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
- B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
- B25J15/0206—Gripping heads and other end effectors servo-actuated comprising articulated grippers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1602—Programme controls characterised by the control system, structure, architecture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1602—Programme controls characterised by the control system, structure, architecture
- B25J9/161—Hardware, e.g. neural networks, fuzzy logic, interfaces, processor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
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- Evolutionary Computation (AREA)
- Fuzzy Systems (AREA)
- Mathematical Physics (AREA)
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Abstract
本發明提供一種機器人以及機器人的控制方法，能夠更適當地探測滾珠螺桿的螺桿軸的旋轉異常。所述機器人包括：滾珠螺桿，具有螺桿軸以及螺母構件；馬達，用於使螺桿軸旋轉；動力傳遞機構，將馬達的動力傳遞至螺桿軸；編碼器，探測馬達的旋轉；以及探測機構，具有被固定於螺桿軸的被探測構件與對被探測構件進行探測的感測器，對螺桿軸的旋轉進行探測。輸入編碼器的輸出信號與探測機構的感測器的輸出信號的控制部基於編碼器的輸出信號與探測機構的感測器的輸出信號，來探測螺桿軸是否產生了旋轉異常。The present invention provides a robot and a robot control method that can more appropriately detect abnormal rotation of a screw shaft of a ball screw. The robot includes: a ball screw having a screw shaft and a nut member; a motor for rotating the screw shaft; a power transmission mechanism for transmitting the power of the motor to the screw shaft; an encoder for detecting the rotation of the motor; and a detection mechanism having The rotation of the screw shaft is detected by a member to be detected fixed to the screw shaft and a sensor that detects the member to be detected. The control unit that inputs the output signal of the encoder and the output signal of the sensor of the detection mechanism detects whether rotation abnormality has occurred in the screw shaft based on the output signal of the encoder and the output signal of the sensor of the detection mechanism.
Description
本發明是有關於一種工業機器人等的機器人。而且，本發明是有關於一種工業機器人等的機器人的控制方法。 The present invention relates to a robot such as an industrial robot. Furthermore, the present invention relates to a method of controlling a robot such as an industrial robot.
以往，已知有對玻璃基板等的基板進行搬送的水平多關節型的工業機器人(例如參照專利文獻1)。專利文獻1所記載的工業機器人包括：手，供搭載基板；臂，在前端側可轉動地連結手；本體部，支撐臂；以及底座，可沿水平方向移動地支撐本體部。本體部包括：臂支架，支撐臂的基端側並且可升降；支撐框架，可升降地支撐臂支架；基台，構成本體部的下端部分，並且相對於底座可水平移動；以及回轉框架，固定支撐框架的下端並且相對於基台可轉動。 Conventionally, a horizontally articulated industrial robot that transports a substrate such as a glass substrate is known (for example, see Patent Document 1). The industrial robot described in Patent Document 1 includes a hand for mounting a substrate, an arm that is rotatably connected to the hand at the front end side, a main body that supports the arm, and a base that supports the main body movably in the horizontal direction. The body part includes: an arm bracket that supports the base end side of the arm and can be raised and lowered; a support frame that can lift and lower the arm bracket; a base that constitutes the lower end part of the body part and is horizontally movable relative to the base; and a rotating frame that is fixed The lower end of the support frame is rotatable relative to the base.
而且，專利文獻1所記載的工業機器人包括升降機構，所述升降機構使臂支架與手及臂一起升降。升降機構例如包括滾珠螺桿、用於使滾珠螺桿的螺桿軸旋轉的馬達、以及將馬達的動力傳遞至滾珠螺桿的動力傳遞機構。馬達為伺服馬達。升降機構包括對馬達的旋轉進行探測的編碼器，馬達基於編碼器的輸出信號而受到控制。動力傳遞機構例如包括減速機。在滾珠螺桿的螺母構件，安裝有臂支架。 Moreover, the industrial robot described in Patent Document 1 includes a lifting mechanism that raises and lowers the arm bracket together with the hand and the arm. The lifting mechanism includes, for example, a ball screw, a motor for rotating the screw shaft of the ball screw, and a power transmission mechanism that transmits the power of the motor to the ball screw. The motor is a servo motor. The lifting mechanism includes an encoder that detects the rotation of the motor, and the motor is controlled based on the output signal of the encoder. The power transmission mechanism includes, for example, a speed reducer. An arm bracket is attached to the nut member of the ball screw.
另外，為了提高工業機器人的安全性，專利文獻1所記載的工業機器人包括使滾珠螺桿的螺桿軸停止的制動器。所述制動器例如是無激磁作動型的電磁制動器，使螺桿軸直接停止。專利文獻1所記載的工業機器人中，當基於編碼器的輸出信號而探測到馬達的旋轉異常時，推測為滾珠螺桿的螺桿軸產生了旋轉異常，因此當基於編碼器的輸出信號而探測到馬達的旋轉異常時，使制動器作動而使滾珠螺桿的螺桿軸緊急停止。 In addition, in order to improve the safety of the industrial robot, the industrial robot described in Patent Document 1 includes a brake that stops the screw shaft of the ball screw. The brake is, for example, a non-excited electromagnetic brake, which directly stops the screw shaft. In the industrial robot described in Patent Document 1, when abnormal rotation of the motor is detected based on the output signal of the encoder, it is presumed that abnormal rotation of the screw shaft of the ball screw has occurred. Therefore, when abnormal rotation of the motor is detected based on the output signal of the encoder. When the rotation of the ball screw is abnormal, the brake is actuated to make the screw shaft of the ball screw come to an emergency stop.
專利文獻1：日本專利特開2017-24096號公報 Patent Document 1: Japanese Patent Application Publication No. 2017-24096
在專利文獻1所記載的工業機器人的情況下，例如可能產生下述事態，即：一旦動力傳遞機構產生異常，則儘管馬達仍正常旋轉，但滾珠螺桿的螺桿軸未正常旋轉。而且，在所述工業機器人的情況下，例如也可能產生下述事態，即：一旦動力傳遞機構產生異常而不再於馬達與滾珠螺桿之間進行動力的傳遞，則儘管馬達已停止，但滾珠螺桿的螺桿軸仍在旋轉。 In the case of the industrial robot described in Patent Document 1, for example, if an abnormality occurs in the power transmission mechanism, the screw shaft of the ball screw may not rotate normally although the motor still rotates normally. Furthermore, in the case of the industrial robot, for example, a situation may arise in which an abnormality occurs in the power transmission mechanism and power is no longer transmitted between the motor and the ball screw. Even though the motor has stopped, the ball screw The screw shaft of the screw is still rotating.
但是，專利文獻1所記載的工業機器人中，在產生了此種事態時，無法基於對馬達的旋轉進行探測的編碼器的輸出信號來探測滾珠螺桿的螺桿軸的旋轉異常。因此，所述工業機器人中，有可能產生下述事態，即：儘管滾珠螺桿的螺桿軸未正常旋轉， 但無法使滾珠螺桿的螺桿軸緊急停止。 However, in the industrial robot described in Patent Document 1, when such a situation occurs, it is impossible to detect abnormal rotation of the screw shaft of the ball screw based on the output signal of the encoder that detects the rotation of the motor. Therefore, in the industrial robot described above, a situation may occur in which the screw shaft of the ball screw does not rotate normally. However, the screw shaft of the ball screw cannot be brought to an emergency stop.
因此，本發明的課題在於提供一種機器人，在包括滾珠螺桿以及用於使滾珠螺桿的螺桿軸旋轉的馬達的機器人中，能夠更適當地探測滾珠螺桿的螺桿軸的旋轉異常。而且，本發明的課題在於提供一種機器人的控制方法，在包括滾珠螺桿以及用於使滾珠螺桿的螺桿軸旋轉的馬達的機器人中，能夠更適當地探測滾珠螺桿的螺桿軸的旋轉異常。 Therefore, an object of the present invention is to provide a robot including a ball screw and a motor for rotating the screw shaft of the ball screw, which can more appropriately detect abnormal rotation of the screw shaft of the ball screw. Furthermore, an object of the present invention is to provide a robot control method that can more appropriately detect abnormal rotation of the screw shaft of the ball screw in a robot including a ball screw and a motor for rotating the screw shaft of the ball screw.
為了解決所述課題，本發明的機器人包括：滾珠螺桿，具有螺桿軸以及沿著螺桿軸移動的螺母構件；馬達，用於使螺桿軸旋轉；動力傳遞機構，將馬達的動力傳遞至螺桿軸；編碼器，探測馬達的旋轉；探測機構，具有被固定於螺桿軸的被探測構件以及對被探測構件進行探測的感測器，對螺桿軸的旋轉進行探測；以及控制部，輸入編碼器的輸出信號與感測器的輸出信號，控制部基於編碼器的輸出信號與感測器的輸出信號，來探測螺桿軸是否產生了旋轉異常。 In order to solve the above problems, a robot of the present invention includes: a ball screw having a screw shaft and a nut member that moves along the screw shaft; a motor for rotating the screw shaft; and a power transmission mechanism for transmitting the power of the motor to the screw shaft; an encoder that detects the rotation of the motor; a detection mechanism that has a detected member fixed to the screw shaft and a sensor that detects the detected member and detects the rotation of the screw shaft; and a control unit that inputs the output of the encoder The signal and the output signal of the sensor, the control unit detects whether rotation abnormality of the screw shaft occurs based on the output signal of the encoder and the output signal of the sensor.
而且，為了解決所述課題，本發明的機器人的控制方法中，所述機器人包括：滾珠螺桿，具有螺桿軸以及沿著螺桿軸移動的螺母構件；馬達，用於使螺桿軸旋轉；動力傳遞機構，將馬達的動力傳遞至螺桿軸；編碼器，探測馬達的旋轉；以及探測機構，具有被固定於螺桿軸的被探測構件以及對被探測構件進行探測的感測器，對螺桿軸的旋轉進行探測，其中，所述機器人的控 制方法基於編碼器的輸出信號與感測器的輸出信號，來探測螺桿軸是否產生了旋轉異常。 Furthermore, in order to solve the above problems, in the robot control method of the present invention, the robot includes: a ball screw having a screw shaft and a nut member that moves along the screw shaft; a motor for rotating the screw shaft; and a power transmission mechanism. , transmits the power of the motor to the screw shaft; the encoder detects the rotation of the motor; and the detection mechanism has a detected component fixed on the screw shaft and a sensor that detects the detected component, and detects the rotation of the screw shaft. Detection, in which the control of the robot The control method is based on the output signal of the encoder and the output signal of the sensor to detect whether the screw shaft has abnormal rotation.
本發明中，機器人包括探測機構，所述探測機構具有被固定於滾珠螺桿的螺桿軸的被探測構件與對被探測構件進行探測的感測器，對螺桿軸的旋轉進行探測。而且，本發明中，基於對馬達的旋轉進行探測的編碼器的輸出信號與感測器的輸出信號，來探測螺桿軸是否產生了旋轉異常。因此，本發明中，例如即便產生了動力傳遞機構產生異常而儘管馬達正常旋轉但螺桿軸未正常旋轉的事態、或者儘管馬達已停止但螺桿軸仍在旋轉的事態，仍能夠基於編碼器的輸出信號與感測器的輸出信號來探測螺桿軸的旋轉異常。因此，本發明中，能夠更適當地探測螺桿軸的旋轉異常。 In the present invention, the robot includes a detection mechanism that has a detected member fixed to the screw shaft of the ball screw and a sensor that detects the detected member, and detects the rotation of the screw shaft. Furthermore, in the present invention, whether rotation abnormality occurs in the screw shaft is detected based on the output signal of the encoder and the output signal of the sensor that detect the rotation of the motor. Therefore, in the present invention, for example, even if there is an abnormality in the power transmission mechanism and the motor rotates normally but the screw shaft does not rotate normally, or even if the motor stops but the screw shaft continues to rotate, it is still possible to use the output of the encoder. The signal and the output signal of the sensor are used to detect abnormal rotation of the screw shaft. Therefore, in the present invention, abnormal rotation of the screw shaft can be detected more appropriately.
本發明中，優選的是，機器人包括使螺桿軸停止的制動器，控制部在探測到螺桿軸產生了旋轉異常時，使制動器作動。若像這樣構成，則在滾珠螺桿的螺桿軸未正常旋轉時，能夠使螺桿軸緊急停止。因此，能夠提高機器人的安全性。 In the present invention, it is preferable that the robot includes a brake for stopping the screw shaft, and that the control unit activates the brake when detecting abnormal rotation of the screw shaft. With this configuration, when the screw shaft of the ball screw does not rotate normally, the screw shaft can be stopped in an emergency. Therefore, the safety of the robot can be improved.
本發明中，機器人例如包括：手，供搭載搬送對象物；臂，在前端側能夠轉動地連結手；以及升降機構，使手以及臂升降，升降機構包括滾珠螺桿、馬達、動力傳遞機構、編碼器、探測機構、以及制動器，螺桿軸的軸方向與上下方向一致，手以及臂被安裝於螺母構件。此時，在滾珠螺桿的螺桿軸未正常旋轉時，能夠使螺桿軸緊急停止而防止搭載於手上的搬送物件物、手以及 臂的掉落。 In the present invention, the robot includes, for example, a hand for mounting and transporting the object; an arm that is rotatably connected to the hand at the front end; and a lifting mechanism that raises and lowers the hand and the arm. The lifting mechanism includes a ball screw, a motor, a power transmission mechanism, and a code. The axial direction of the screw shaft is consistent with the up and down direction, and the hand and arm are attached to the nut member. At this time, when the screw shaft of the ball screw does not rotate normally, the screw shaft can be stopped in an emergency to prevent the conveyed object, hand, and The arm falls.
本發明中，優選的是，機器人包括兩個制動器，控制部在探測到螺桿軸產生了旋轉異常時，使兩個制動器作動，並且使兩個制動器的作動開始時機錯開。若像這樣構成，則即便兩個制動器中的其中一個制動器發生了故障，也能夠藉由另一個制動器來使螺桿軸緊急停止。而且，若像這樣構成，則由於使兩個制動器的作動開始時機錯開，因此能夠防止兩個制動器帶來的急劇的制動力作用於螺桿軸。 In the present invention, it is preferable that the robot includes two brakes, and when the control unit detects abnormal rotation of the screw shaft, it actuates the two brakes and staggers the timing of starting the actuation of the two brakes. With this structure, even if one of the two brakes fails, the screw shaft can be stopped urgently by the other brake. Furthermore, with this configuration, since the timing of starting the actuation of the two brakes is shifted, it is possible to prevent a sudden braking force from the two brakes from acting on the screw shaft.
本發明中，機器人例如包括兩個制動器，兩個制動器在螺桿軸的軸方向上重合。此時，儘管機器人包括兩個制動器，但仍能夠緊湊地配置兩個制動器。 In the present invention, the robot includes, for example, two brakes, and the two brakes overlap in the axial direction of the screw shaft. At this time, although the robot includes two brakes, the two brakes can be configured compactly.
如上所述，本發明中，在包括滾珠螺桿與用於使滾珠螺桿的螺桿軸旋轉的馬達的機器人中，能夠更適當地探測滾珠螺桿的螺桿軸的旋轉異常。 As described above, in the present invention, in the robot including the ball screw and the motor for rotating the screw shaft of the ball screw, rotation abnormality of the screw shaft of the ball screw can be detected more appropriately.
100:電子裝置 100: Electronic devices
1:機器人 1:Robot
2:基板(玻璃基板、搬送對象物) 2: Substrate (glass substrate, object to be transported)
3:手 3:Hand
4:臂 4: arm
5:本體部 5: Ontology part
6:底座構件 6: Base component
7:臂支架 7:Arm bracket
8:支撐框架 8:Supporting frame
9:基台 9:Abutment
10:回轉框架 10:Rotation frame
12:第一臂部 12:First arm
13:第二臂部 13:Second arm
15:第一支撐框架 15:First support frame
16:第二支撐框架 16: Second support frame
17:升降機構 17:Lifting mechanism
20:螺桿軸 20:Screw shaft
21:螺母構件 21: Nut component
22:滾珠螺桿 22: Ball screw
23:馬達 23: Motor
24:動力傳遞機構 24:Power transmission mechanism
25、26:制動器 25, 26: brake
27:編碼器 27:Encoder
28:探測機構 28:Detection mechanism
31、32:皮帶輪 31, 32: Pulley
33:皮帶 33:Belt
35:被探測構件 35: Detected component
35a:被固定部 35a: Fixed part
35b:遮光部 35b:Light shielding part
36:感測器 36: Sensor
40:控制部 40:Control Department
圖1是本發明的實施方式的機器人的平面圖。 FIG. 1 is a plan view of the robot according to the embodiment of the present invention.
圖2是圖1所示的機器人的側面圖。 FIG. 2 is a side view of the robot shown in FIG. 1 .
圖3是用於說明使圖2所示的手以及臂升降的升降機構的結構的圖。 FIG. 3 is a diagram for explaining the structure of a lifting mechanism that lifts and lowers the hand and arm shown in FIG. 2 .
圖4的(A)是圖3的E部的放大圖，圖4的(B)是從圖4 的(A)的F-F方向表示探測機構的底視圖。 (A) of FIG. 4 is an enlarged view of part E of FIG. 3 , and (B) of FIG. 4 is an enlarged view of part E of FIG. 4 The F-F direction of (A) represents the bottom view of the detection mechanism.
圖5是表示與圖1所示的機器人的控制部電連接的升降機構的結構的框圖。 FIG. 5 is a block diagram showing the structure of a lifting mechanism electrically connected to the control unit of the robot shown in FIG. 1 .
以下，一邊參照附圖，一邊說明本發明的實施方式。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(機器人的整體結構) (The overall structure of the robot)
圖1是本發明的實施方式的機器人1的平面圖。圖2是圖1所示的機器人1的側面圖。 FIG. 1 is a plan view of the robot 1 according to the embodiment of the present invention. FIG. 2 is a side view of the robot 1 shown in FIG. 1 .
本形態的機器人1是對作為搬送對象物的液晶顯示器的玻璃基板2(以下稱作“基板2”)進行搬送的水平多關節型的工業機器人。機器人1包括：兩個手3，供搭載基板2；兩條臂4，在前端側可轉動地分別連結兩個手3；本體部5，支撐兩條臂4；以及底座構件6，可沿水平方向移動地支撐本體部5。本體部5包括：臂支架7，支撐臂4的基端側並且可升降；支撐框架8，可升降地支撐臂支架7；基台9，構成本體部5的下端部分並且相對於底座構件6可水平移動；以及回轉框架10，固定支撐框架8的下端並且相對於基台9可轉動。 The robot 1 of this form is a horizontally articulated industrial robot that transports a glass substrate 2 of a liquid crystal display (hereinafter referred to as "substrate 2") as a transport object. The robot 1 includes: two hands 3 for carrying the substrate 2; two arms 4 that are rotatably connected to the two hands 3 at the front end side; a body part 5 that supports the two arms 4; and a base member 6 that can be moved horizontally The main body 5 is supported so as to be movable in the direction. The body part 5 includes: an arm bracket 7 that supports the base end side of the arm 4 and can lift; a support frame 8 that can lift and lower the arm bracket 7; and a base 9 that constitutes the lower end portion of the body part 5 and can be moved relative to the base member 6 Horizontal movement; and a rotating frame 10, which fixes the lower end of the support frame 8 and is rotatable relative to the base 9.
臂4包含第一臂部12與第二臂部13這兩個臂部。第一臂部12的基端側可轉動地連結於臂支架7。第二臂部13的基端側可轉動地連結於第一臂部12的前端側。手3可轉動地連結於第二臂部13的前端側。臂4可朝水平方向伸縮，以使手3在朝向固定方向的狀態下大致直線地移動。機器人1包括驅動臂4的臂驅動 機構。 The arm 4 includes two arm parts: a first arm part 12 and a second arm part 13 . The base end side of the first arm portion 12 is rotatably connected to the arm bracket 7 . The base end side of the second arm portion 13 is rotatably connected to the front end side of the first arm portion 12 . The hand 3 is rotatably connected to the front end side of the second arm 13 . The arm 4 can extend and contract in the horizontal direction so that the hand 3 can move substantially linearly while facing a fixed direction. Robot 1 includes an arm drive that drives arm 4 institution.
支撐框架8經由臂支架7來可升降地保持手3以及臂4。支撐框架8包括：柱狀的第一支撐框架15，可升降地保持臂支架7；以及柱狀的第二支撐框架16，可升降地保持第一支撐框架15。機器人1包括沿上下方向引導第一支撐框架15的引導機構、以及朝上下方向引導臂支架7的引導機構。而且，機器人1包括升降機構17(參照圖3)，所述升降機構17使臂支架7相對於第一支撐框架15而升降，並且使第一支撐框架15相對於第二支撐框架16而升降。即，機器人1包括使手3以及臂4升降的升降機構17。關於升降機構17的具體結構將後述。 The support frame 8 holds the hand 3 and the arm 4 via the arm bracket 7 so that the hand 3 and the arm 4 can be raised and lowered. The support frame 8 includes: a columnar first support frame 15 that holds the arm bracket 7 in a liftable manner; and a columnar second support frame 16 that holds the first support frame 15 in a liftable manner. The robot 1 includes a guide mechanism that guides the first support frame 15 in the up-and-down direction, and a guide mechanism that guides the arm bracket 7 in the up-and-down direction. Furthermore, the robot 1 includes a lifting mechanism 17 (see FIG. 3 ) that raises and lowers the arm bracket 7 relative to the first support frame 15 and raises and lowers the first support frame 15 relative to the second support frame 16 . That is, the robot 1 includes the lifting mechanism 17 for lifting the hand 3 and the arm 4 . The specific structure of the lifting mechanism 17 will be described later.
回轉框架10形成為上下方向的厚度薄的扁平的大致長方體狀。而且，回轉框架10形成為細長的大致長方體狀。第二支撐框架16的下端部被固定於回轉框架10的前端側的上表面。回轉框架10的基端側以可進行將上下方向作為轉動軸方向的轉動的方式而支撐於基台9。 The revolving frame 10 is formed in a flat, substantially rectangular parallelepiped shape that is thin in the vertical direction. Furthermore, the revolving frame 10 is formed in an elongated substantially rectangular parallelepiped shape. The lower end of the second support frame 16 is fixed to the upper surface of the front end side of the revolving frame 10 . The proximal end side of the revolving frame 10 is supported on the base 9 so as to be rotatable with the up-down direction as the rotation axis direction.
回轉框架10較基台9配置於上側。機器人1包括使回轉框架10相對於基台9而轉動的轉動機構。而且，機器人1包括使基台9相對於底座構件6而水平移動的水平移動機構、以及朝水平方向引導基台9的引導機構。 The revolving frame 10 is arranged above the base 9 . The robot 1 includes a rotation mechanism that rotates the revolving frame 10 relative to the base 9 . Furthermore, the robot 1 includes a horizontal movement mechanism that moves the base 9 horizontally relative to the base member 6 and a guide mechanism that guides the base 9 in the horizontal direction.
(升降機構的結構) (Structure of lifting mechanism)
圖3是用於說明使圖2所示的手3以及臂4升降的升降機構17的結構的圖。圖4的(A)是圖3的E部的放大圖，圖4的(B) 是從圖4的(A)的F-F方向表示探測機構28的底視圖。 FIG. 3 is a diagram for explaining the structure of the lifting mechanism 17 that raises and lowers the hand 3 and the arm 4 shown in FIG. 2 . (A) of FIG. 4 is an enlarged view of part E of FIG. 3 , and (B) of FIG. 4 This is a bottom view showing the detection mechanism 28 from the direction F-F in FIG. 4(A) .
升降機構17包括：滾珠螺桿22，具有螺桿軸20與沿著螺桿軸20移動的螺母構件21；馬達23，用於使螺桿軸20旋轉；以及動力傳遞機構24，將馬達23的動力傳遞至螺桿軸20。而且，升降機構17包括使螺桿軸20停止的制動器25、制動器26。本形態的升降機構17包括兩個制動器25、26。進而，升降機構17包括：編碼器27，對馬達23的旋轉進行探測；以及探測機構28，對螺桿軸20的旋轉進行探測。 The lifting mechanism 17 includes: a ball screw 22 having a screw shaft 20 and a nut member 21 moving along the screw shaft 20; a motor 23 for rotating the screw shaft 20; and a power transmission mechanism 24 for transmitting the power of the motor 23 to the screw. Axis 20. Furthermore, the lifting mechanism 17 includes brakes 25 and 26 for stopping the screw shaft 20 . The lifting mechanism 17 of this form includes two brakes 25 and 26. Furthermore, the lifting mechanism 17 includes an encoder 27 for detecting the rotation of the motor 23 and a detection mechanism 28 for detecting the rotation of the screw shaft 20 .
螺桿軸20是以螺桿軸20的軸方向與上下方向一致的方式而配置。即，螺桿軸20的軸方向與上下方向一致。螺桿軸20可將上下方向作為旋轉軸方向而旋轉。螺母構件21卡合於螺桿軸20。 The screw shaft 20 is arranged so that the axial direction of the screw shaft 20 coincides with the up-down direction. That is, the axial direction of the screw shaft 20 coincides with the up-down direction. The screw shaft 20 is rotatable using the up-down direction as the rotation axis direction. The nut member 21 is engaged with the screw shaft 20 .
螺母構件21沿著螺桿軸20而朝上下方向移動。臂支架7或第一支撐框架15被固定於螺母構件21。即，手3以及臂4經由臂支架7或者經由第一支撐框架15及臂支架7而安裝於螺母構件21。 The nut member 21 moves in the up and down direction along the screw shaft 20 . The arm bracket 7 or the first support frame 15 is fixed to the nut member 21 . That is, the hand 3 and the arm 4 are attached to the nut member 21 via the arm bracket 7 or via the first support frame 15 and the arm bracket 7 .
馬達23為伺服馬達。馬達23基於編碼器27的輸出信號而受到控制。動力傳遞機構24包括：皮帶輪31，被固定於馬達23的輸出軸；皮帶輪32，被固定於螺桿軸20的下端側部分；以及皮帶33，架設於皮帶輪31與皮帶輪32。編碼器27包括被固定於馬達23的旋轉軸的被探測構件、以及對被探測構件進行探測的感測器。 Motor 23 is a servo motor. The motor 23 is controlled based on the output signal of the encoder 27 . The power transmission mechanism 24 includes a pulley 31 fixed to the output shaft of the motor 23 , a pulley 32 fixed to the lower end portion of the screw shaft 20 , and a belt 33 installed between the pulleys 31 and 32 . The encoder 27 includes a detected member fixed to the rotation shaft of the motor 23 and a sensor that detects the detected member.
制動器25與制動器26是同結構且同形狀的電磁制動器。具體而言，制動器25、制動器26為無激磁作動型的電磁制動器。制動器25、制動器26包括被固定於螺桿軸20的旋轉板、夾著旋轉板而配置的制動板及電樞(armature)、朝向旋轉板對電樞施力的彈簧構件、以及用於驅動電樞的線圈，使螺桿軸20直接停止。兩個制動器25、26在螺桿軸20的軸方向上重合。本形態中，制動器25與制動器26在上下方向上對稱地配置。而且，兩個制動器25、26被配置在皮帶輪32的下側。 The brake 25 and the brake 26 are electromagnetic brakes with the same structure and shape. Specifically, the brakes 25 and 26 are non-excitation actuation type electromagnetic brakes. The brakes 25 and 26 include a rotating plate fixed to the screw shaft 20, a braking plate and an armature arranged across the rotating plate, a spring member urging the armature toward the rotating plate, and a drive armature. The coil causes the screw shaft 20 to stop directly. The two stoppers 25 and 26 overlap in the axial direction of the screw shaft 20 . In this form, the brake 25 and the brake 26 are arranged symmetrically in the up-down direction. Furthermore, the two brakes 25 and 26 are arranged on the lower side of the pulley 32 .
探測機構28包括被固定於螺桿軸20的被探測構件35、以及對被探測構件35進行探測的感測器36，直接探測螺桿軸20的旋轉。感測器36例如是包括發光元件、以及與發光元件相向配置的受光元件的透射型的光學式感測器。被探測構件35是藉由將薄鋼板彎折成規定形狀而形成。被探測構件35被固定於螺桿軸20的下端面。 The detection mechanism 28 includes a detected member 35 fixed to the screw shaft 20 and a sensor 36 that detects the detected member 35, and directly detects the rotation of the screw shaft 20. The sensor 36 is, for example, a transmission-type optical sensor including a light-emitting element and a light-receiving element arranged to face the light-emitting element. The detected member 35 is formed by bending a thin steel plate into a predetermined shape. The detected member 35 is fixed to the lower end surface of the screw shaft 20 .
被探測構件35包括被固定於螺桿軸20的下端面的被固定部35a、以及遮擋感測器36的發光元件與受光元件之間的遮光部35b。本形態的被探測構件35包括相對於螺桿軸20的軸心而以180°間距配置的兩個遮光部35b。另外，被探測構件35所具有的遮光部35b的數量也可為三個以上。例如，被探測構件35也可包括相對於螺桿軸20的軸心而以90°間距配置的四個遮光部35b。而且，遮光部35b也可形成為圓板狀。此時，在遮光部35b的周方向上，以固定的間距而形成有在上下方向上貫穿遮光部35b的 多個狹縫孔。 The detected member 35 includes a fixed portion 35 a fixed to the lower end surface of the screw shaft 20 , and a light shielding portion 35 b that blocks between the light-emitting element and the light-receiving element of the sensor 36 . The detected member 35 of this form includes two light shielding portions 35b arranged at an interval of 180° with respect to the axis center of the screw shaft 20 . In addition, the number of light shielding portions 35b provided in the detected member 35 may be three or more. For example, the detected member 35 may include four light shielding portions 35 b arranged at intervals of 90° with respect to the axis center of the screw shaft 20 . Furthermore, the light shielding part 35b may be formed in a disk shape. At this time, in the circumferential direction of the light shielding part 35b, there are formed at fixed pitches penetrating the light shielding part 35b in the up and down direction. Multiple slit holes.
(螺桿軸的緊急停止動作) (Emergency stop action of screw shaft)
圖5是表示與圖1所示的機器人1的控制部40電連接的升降機構17的結構的框圖。 FIG. 5 is a block diagram showing the structure of the lifting mechanism 17 electrically connected to the control unit 40 of the robot 1 shown in FIG. 1 .
馬達23以及制動器25、制動器26電連接於機器人1的控制部40。具體而言，馬達23的驅動用線圈以及制動器25、制動器26的線圈電連接於控制部40。而且，編碼器27(具體而言，為編碼器27的感測器)以及感測器36電連接於控制部40。對於控制部40，輸入編碼器27的輸出信號(具體而言，為編碼器27的感測器的輸出信號)與感測器36的輸出信號。 The motor 23 and the brakes 25 and 26 are electrically connected to the control unit 40 of the robot 1 . Specifically, the driving coil of the motor 23 and the coils of the brakes 25 and 26 are electrically connected to the control unit 40 . Furthermore, the encoder 27 (specifically, the sensor of the encoder 27 ) and the sensor 36 are electrically connected to the control unit 40 . The control unit 40 receives an output signal of the encoder 27 (specifically, an output signal of the sensor of the encoder 27 ) and an output signal of the sensor 36 .
控制部40基於編碼器27的輸出信號與感測器36的輸出信號，來探測螺桿軸20是否產生了旋轉異常。具體而言，控制部40例如在儘管未輸入有編碼器27的輸出信號但輸入有感測器36的輸出信號的情況、或者儘管輸入有編碼器27的輸出信號但未輸入有感測器36的輸出信號的情況下，判斷為螺桿軸20產生了旋轉異常。 The control unit 40 detects whether rotation abnormality occurs in the screw shaft 20 based on the output signal of the encoder 27 and the output signal of the sensor 36 . Specifically, for example, the control unit 40 is configured when the output signal of the sensor 36 is input although the output signal of the encoder 27 is not input, or when the output signal of the encoder 27 is input but the sensor 36 is not input. In the case of an output signal, it is determined that a rotation abnormality has occurred in the screw shaft 20.
而且，控制部40例如在基於編碼器27的輸出信號而算出的螺桿軸20的旋轉速度、與基於感測器36的輸出信號而算出的螺桿軸20的旋轉速度產生了規定值以上的差異的情況(即，馬達23的旋轉速度與螺桿軸20的旋轉速度的關係未處於固定的關係，馬達23的旋轉速度與螺桿軸20的旋轉速度未同步的情況)下，判斷為螺桿軸20產生了旋轉異常。 Furthermore, the control unit 40 , for example, when the rotational speed of the screw shaft 20 calculated based on the output signal of the encoder 27 and the rotational speed of the screw shaft 20 calculated based on the output signal of the sensor 36 are different by a predetermined value or more. In this case (that is, the relationship between the rotation speed of the motor 23 and the rotation speed of the screw shaft 20 is not in a fixed relationship, and the rotation speed of the motor 23 and the rotation speed of the screw shaft 20 are not synchronized), it is determined that the screw shaft 20 has a problem. Abnormal rotation.
而且，控制部40在探測到螺桿軸20產生了旋轉異常時，使兩個制動器25、26作動而使螺桿軸20緊急停止。此時，控制部40使兩個制動器25、26的作動開始時機錯開。即，控制部40使電壓向制動器25的線圈的施加開始時機與電壓向制動器26的線圈的施加開始時機錯開。 When the control unit 40 detects a rotation abnormality in the screw shaft 20 , the control unit 40 actuates the two brakes 25 and 26 to make an emergency stop of the screw shaft 20 . At this time, the control unit 40 shifts the actuation start timings of the two brakes 25 and 26 . That is, the control unit 40 staggers the timing of starting the application of voltage to the coil of the brake 25 and the timing of starting the application of voltage to the coil of the brake 26 .
(本形態的主要效果) (Main effect of this form)
如以上所說明的那樣，本形態的機器人1包括對螺桿軸20的旋轉進行探測的探測機構28，探測機構28包括被固定於螺桿軸20的被探測構件35、以及對被探測構件35進行探測的感測器36。而且，本形態中，控制部40基於編碼器27的輸出信號與感測器36的輸出信號，來探測螺桿軸20是否產生了旋轉異常。 As described above, the robot 1 of this form includes the detection mechanism 28 that detects the rotation of the screw shaft 20 . The detection mechanism 28 includes the detected member 35 fixed to the screw shaft 20 , and detects the detected member 35 . Sensor 36. Furthermore, in this form, the control unit 40 detects whether rotation abnormality occurs in the screw shaft 20 based on the output signal of the encoder 27 and the output signal of the sensor 36 .
因此，本形態中，例如即便產生了動力傳遞機構24產生異常而儘管馬達23正常旋轉但螺桿軸20未正常旋轉的事態、或者儘管馬達23已停止但螺桿軸20仍在旋轉的事態，也能夠基於編碼器27的輸出信號與感測器36的輸出信號來探測螺桿軸20的旋轉異常。因此，本形態中，能夠更適當地探測螺桿軸20的旋轉異常。 Therefore, in this embodiment, for example, even if an abnormality occurs in the power transmission mechanism 24 and the screw shaft 20 does not rotate normally even though the motor 23 rotates normally, or even if the screw shaft 20 continues to rotate even though the motor 23 has stopped, it is possible. Rotation abnormalities of the screw shaft 20 are detected based on the output signal of the encoder 27 and the output signal of the sensor 36 . Therefore, in this aspect, rotation abnormality of the screw shaft 20 can be detected more appropriately.
本形態中，控制部40在探測到螺桿軸20產生了旋轉異常時，使制動器25、制動器26作動而使螺桿軸20緊急停止。因此，本形態中，能夠防止螺桿軸20產生了旋轉異常時的基板2、手3以及臂4的掉落，其結果，能夠提高機器人1的安全性。而且，本形態中，升降機構17包括兩個制動器25、26，因此，例如 即便制動器25發生了故障，也能夠藉由制動器26來使螺桿軸20緊急停止。 In this form, when the control part 40 detects that rotation abnormality occurs in the screw shaft 20, it actuates the brake 25 and the brake 26, and makes an emergency stop of the screw shaft 20. Therefore, in this embodiment, it is possible to prevent the base plate 2 , the hand 3 and the arm 4 from falling when abnormal rotation occurs in the screw shaft 20 . As a result, the safety of the robot 1 can be improved. Furthermore, in this form, the lifting mechanism 17 includes two brakes 25 and 26. Therefore, for example, Even if the brake 25 fails, the screw shaft 20 can be stopped urgently by the brake 26 .
本形態中，控制部40在使兩個制動器25、26作動時，使兩個制動器25、26的作動開始時機錯開。因此，本形態中，能夠防止兩個制動器25、26的急劇的制動力作用於螺桿軸20。而且，本形態中，兩個制動器25、26在螺桿軸20的軸方向上重合，因此即便升降機構17包括兩個制動器25、26，也能夠緊湊地配置兩個制動器25、26。 In this form, when actuating the two brakes 25 and 26 , the control unit 40 staggers the timing of starting the actuation of the two brakes 25 and 26 . Therefore, in this embodiment, it is possible to prevent the sudden braking force of the two brakes 25 and 26 from acting on the screw shaft 20 . Furthermore, in this form, the two brakes 25 and 26 overlap in the axial direction of the screw shaft 20. Therefore, even if the lifting mechanism 17 includes the two brakes 25 and 26, the two brakes 25 and 26 can be arranged compactly.
(其他實施方式) (Other embodiments)
所述的形態是本發明的較佳形態的一例，但並不限定於此，可在不變更本發明的主旨的範圍內進行各種變形實施。 The above-described embodiment is an example of a preferred embodiment of the present invention, but it is not limited thereto, and various modifications can be made without changing the gist of the present invention.
所述的形態中，支撐框架8也可包含一個柱狀的框架。此時，升降機構17使臂支架7相對於支撐框架8而升降。而且，所述的形態中，機器人1也可各別地包括使臂支架7相對於第一支撐框架15而升降的升降機構、以及使第一支撐框架15相對於第二支撐框架16而升降的升降機構。此時，兩個升降機構是與升降機構17同樣地構成。 In the described form, the support frame 8 may also include a columnar frame. At this time, the lifting mechanism 17 raises and lowers the arm bracket 7 relative to the support frame 8 . Furthermore, in the above-described form, the robot 1 may separately include a lifting mechanism for lifting the arm bracket 7 relative to the first support frame 15 and a mechanism for lifting the first support frame 15 relative to the second support frame 16 . Lifting mechanism. At this time, the two lifting mechanisms are configured similarly to the lifting mechanism 17 .
所述的形態中，控制部40探測到螺桿軸20產生了旋轉異常時的、兩個制動器25、26的作動開始時機也可為同時。而且，所述的形態中，升降機構17所包括的制動器的數量也可為一個。進而，所述的形態中，動力傳遞機構24也可包括減速機，還可包括齒輪系。而且，動力傳遞機構24也可為馬達23的輸出軸、以 及被安裝於螺桿軸20而將馬達23的輸出軸與螺桿軸20相連的聯軸器。而且，所述的形態中，感測器36也可為反射型的光學式感測器，還可為接近感測器等的光學式以外的感測器。 In the above-mentioned form, when the control unit 40 detects a rotation abnormality in the screw shaft 20, the timing of starting the actuation of the two brakes 25 and 26 may be simultaneous. Furthermore, in the above-mentioned form, the number of brakes included in the lifting mechanism 17 may be one. Furthermore, in the above-described form, the power transmission mechanism 24 may include a speed reducer or a gear train. Moreover, the power transmission mechanism 24 may also be the output shaft of the motor 23, or and a coupling attached to the screw shaft 20 to connect the output shaft of the motor 23 with the screw shaft 20 . Furthermore, in the above-described embodiment, the sensor 36 may be a reflective optical sensor, or may be a sensor other than an optical sensor such as a proximity sensor.
所述的形態中，機器人1也可包括以可進行手3朝向水平方向的直線移動的方式來保持手3的手保持部。此時，機器人1包括使手3相對於手保持部而朝水平方向直線移動的水平驅動機構。水平驅動機構與升降機構17同樣，包括：滾珠螺桿22，具有螺桿軸20以及螺母構件21；馬達23，用於使螺桿軸20旋轉；動力傳遞機構24，將馬達23的動力傳遞至螺桿軸20；編碼器27，對馬達23的旋轉進行探測；以及探測機構28，對螺桿軸20的旋轉進行探測。螺桿軸20是以螺桿軸20的軸方向與水平方向一致的方式而配置，手3被安裝於螺母構件21。另外，所述水平驅動機構既可包括制動器25、制動器26，也可不包括制動器25、制動器26。 In the above-mentioned aspect, the robot 1 may include a hand holding part that holds the hand 3 so that the hand 3 can move linearly in the horizontal direction. At this time, the robot 1 includes a horizontal drive mechanism that linearly moves the hand 3 in the horizontal direction relative to the hand holder. The horizontal drive mechanism is the same as the lifting mechanism 17 and includes: a ball screw 22 having a screw shaft 20 and a nut member 21; a motor 23 for rotating the screw shaft 20; and a power transmission mechanism 24 for transmitting the power of the motor 23 to the screw shaft 20. ; Encoder 27, detects the rotation of the motor 23; and detection mechanism 28, detects the rotation of the screw shaft 20. The screw shaft 20 is arranged so that the axial direction of the screw shaft 20 coincides with the horizontal direction, and the hand 3 is attached to the nut member 21 . In addition, the horizontal driving mechanism may include brakes 25 and 26 , or may not include brakes 25 and 26 .
所述的形態中，本體部5可朝水平方向移動，但本體部5也可被固定。而且，所述的形態中，臂4也可包含三個以上的臂部。進而，所述的形態中，機器人1也可為對基板2以外的搬送對象物進行搬送的機器人。而且，適用本發明的機器人也可為工業機器人以外的機器人。 In the above-described form, the main body 5 can move in the horizontal direction, but the main body 5 can also be fixed. Furthermore, in the above-mentioned form, the arm 4 may include three or more arm parts. Furthermore, in the above-described aspect, the robot 1 may be a robot that transports objects to be transported other than the substrate 2 . Furthermore, the robot to which the present invention is applied may be a robot other than an industrial robot.
17:升降機構 17:Lifting mechanism
20:螺桿軸 20:Screw shaft
21:螺母構件 21: Nut component
22:滾珠螺桿 22: Ball screw
23:馬達 23: Motor
24:動力傳遞機構 24:Power transmission mechanism
25、26:制動器 25, 26: brake
27:編碼器 27:Encoder
28:探測機構 28:Detection mechanism
31、32:皮帶輪 31, 32: Pulley
33:皮帶 33:Belt
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| JP2020218960A JP2022104003A (en) | 2020-12-28 | 2020-12-28 | Robot and control method of robot |
| JP2020-218960 | 2020-12-28 |
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| TW202224887A TW202224887A (en) | 2022-07-01 |
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| TW201026460A (en) * | 2008-08-26 | 2010-07-16 | Nidec Sankyo Corp | Industrial robot |
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| JPH10249787A (en) * | 1997-03-11 | 1998-09-22 | Shibaura Eng Works Co Ltd | Industrial robot |
| KR101870163B1 (en) | 2011-12-19 | 2018-06-26 | 엘지디스플레이 주식회사 | Apparatus for Transferring Substrate |
| JP5926782B2 (en) * | 2014-09-19 | 2016-05-25 | Dmg森精機株式会社 | Machine tool and brake check method |
| JP2017024096A (en) | 2015-07-17 | 2017-02-02 | 日本電産サンキョー株式会社 | Industrial robot and control method for industrial robot |
| CN110561397A (en) * | 2018-06-05 | 2019-12-13 | 日本电产三协（浙江）有限公司 | Industrial robot |
| JP7199953B2 (en) * | 2018-12-18 | 2023-01-06 | 日本電産サンキョー株式会社 | Abnormality detection method in belt drive mechanism and robot |
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