TWI801807B - 真直度計測系統、位移感測器校正方法及真直度計測方法 - Google Patents

真直度計測系統、位移感測器校正方法及真直度計測方法 Download PDF

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Publication number
TWI801807B
TWI801807B TW110104689A TW110104689A TWI801807B TW I801807 B TWI801807 B TW I801807B TW 110104689 A TW110104689 A TW 110104689A TW 110104689 A TW110104689 A TW 110104689A TW I801807 B TWI801807 B TW I801807B
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TW
Taiwan
Prior art keywords
aforementioned
displacement sensors
sensing unit
reference plane
displacement
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TW110104689A
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English (en)
Chinese (zh)
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TW202136714A (zh
Inventor
市原浩一
高娜
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日商住友重機械工業股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
    • G01B21/24—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
TW110104689A 2020-03-26 2021-02-08 真直度計測系統、位移感測器校正方法及真直度計測方法 TWI801807B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-056729 2020-03-26
JP2020056729A JP7296334B2 (ja) 2020-03-26 2020-03-26 真直度計測システム、変位センサ校正方法、及び真直度計測方法

Publications (2)

Publication Number Publication Date
TW202136714A TW202136714A (zh) 2021-10-01
TWI801807B true TWI801807B (zh) 2023-05-11

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TW110104689A TWI801807B (zh) 2020-03-26 2021-02-08 真直度計測系統、位移感測器校正方法及真直度計測方法

Country Status (4)

Country Link
JP (1) JP7296334B2 (ja)
KR (1) KR20210120826A (ja)
CN (1) CN113446980B (ja)
TW (1) TWI801807B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113819875A (zh) * 2021-10-26 2021-12-21 中国建筑第八工程局有限公司 玻璃幕墙的弯曲度检测装置及其检测方法
CN114509040A (zh) * 2022-01-21 2022-05-17 上海工程技术大学 一种车轮周不圆度的测量方法及测量机构

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200944749A (en) * 2008-04-21 2009-11-01 Jing-Heng Chen Vertical reflective type moire measurement structure for measuring the surface curvature of an object
TW201423034A (zh) * 2012-12-07 2014-06-16 Univ Nat Formosa 垂直度與平行度檢測系統及其檢測方法
TW201432218A (zh) * 2012-12-19 2014-08-16 Basf Se 用於光學偵測至少一物件之偵測器
TW201820376A (zh) * 2016-10-27 2018-06-01 漢民微測科技股份有限公司 用於判定及校準載台位置的系統及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4705792B2 (ja) * 2005-03-17 2011-06-22 株式会社ミツトヨ 軸間角度補正方法
JP5030699B2 (ja) * 2007-07-27 2012-09-19 Ｊｆｅスチール株式会社 厚さ計測装置の調整方法及びその装置
JP2009063541A (ja) * 2007-09-10 2009-03-26 Sumitomo Heavy Ind Ltd 幾何学量計測方法及び幾何学量計測装置
JP5100613B2 (ja) * 2008-10-29 2012-12-19 住友重機械工業株式会社 真直度測定方法及び真直度測定装置
JP2012083275A (ja) * 2010-10-14 2012-04-26 Okamoto Machine Tool Works Ltd 被加工物の真直度校正方法
JP5260703B2 (ja) * 2011-06-10 2013-08-14 パナソニック株式会社 ３次元測定方法
JP2014137274A (ja) * 2013-01-16 2014-07-28 Sumitomo Heavy Ind Ltd 幾何学量取得装置及び幾何学量取得方法
JP6199205B2 (ja) * 2014-03-05 2017-09-20 住友重機械工業株式会社 真直形状測定方法及び真直形状測定装置
CN105937886B (zh) * 2015-03-04 2020-01-10 住友重机械工业株式会社 形状测量装置、加工装置及形状测量装置的校正方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200944749A (en) * 2008-04-21 2009-11-01 Jing-Heng Chen Vertical reflective type moire measurement structure for measuring the surface curvature of an object
TW201423034A (zh) * 2012-12-07 2014-06-16 Univ Nat Formosa 垂直度與平行度檢測系統及其檢測方法
TW201432218A (zh) * 2012-12-19 2014-08-16 Basf Se 用於光學偵測至少一物件之偵測器
TW201820376A (zh) * 2016-10-27 2018-06-01 漢民微測科技股份有限公司 用於判定及校準載台位置的系統及方法

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Publication number Publication date
JP7296334B2 (ja) 2023-06-22
JP2021156714A (ja) 2021-10-07
CN113446980B (zh) 2023-05-30
KR20210120826A (ko) 2021-10-07
TW202136714A (zh) 2021-10-01
CN113446980A (zh) 2021-09-28

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