TWI708637B - Spray structure and chemical source supply system - Google Patents

Spray structure and chemical source supply system Download PDF

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TWI708637B
TWI708637B TW108125859A TW108125859A TWI708637B TW I708637 B TWI708637 B TW I708637B TW 108125859 A TW108125859 A TW 108125859A TW 108125859 A TW108125859 A TW 108125859A TW I708637 B TWI708637 B TW I708637B
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spray structure
porous base
sieve plate
fixing frame
porous
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TW108125859A
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TW202035027A (en
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王卓
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大陸商瀋陽拓荊科技有限公司
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一種噴淋結構，其包含：多孔性基體篩板，其係用以使來自化學源的氣流均勻分布；及固定架，其係用來支撐前述多孔性基體篩板。A spray structure comprising: a porous base sieve plate, which is used to evenly distribute the air flow from a chemical source; and a fixing frame, which is used to support the aforementioned porous base sieve plate.

Description

噴淋結構及化學源供給系統Spray structure and chemical source supply system

本發明係關於一種噴淋結構，特別是關於應用於化學源供給系統的噴淋結構。 The present invention relates to a spray structure, in particular to a spray structure applied to a chemical source supply system.

隨著工藝的進展以及各段製程的需要，多會在反應設備中供給各種氣體。在氣相反應裝置中，已知反應氣體均勻性會對成品的均勻度表現、良率等產生重大的影響。為此，領域中對於氣體供應的均勻性多有所要求。 With the progress of the process and the needs of each stage of the process, various gases are often supplied in the reaction equipment. In a gas-phase reactor, it is known that the uniformity of the reaction gas will have a significant impact on the uniformity performance and yield of the finished product. For this reason, there are many requirements for the uniformity of gas supply in the field.

以往，在氣體供應至反應設備的反應腔時，多會利用噴淋結構來讓氣體均勻地送至反應腔內。過往的噴淋結構中，係由噴淋頭(top plate)、擋板(baffle plate)、噴淋板(face plate)及支撐結構所構成，其中噴淋頭發揮混器的功能，而擋板則是調降壓力，調節壓力的均勻性。噴淋板則係用來運輸氣體使用，而支撐結構則是用來支撐噴淋頭、擋板以及噴淋板。然過往的噴淋結構中，不僅結構複雜，拆裝手續繁複，對於設備的維護著實構成相當程度的負擔。也因此期待能有相對簡化的結構，來達到優於過往噴淋結構之功效。 In the past, when gas is supplied to the reaction chamber of the reaction device, a spray structure is often used to uniformly deliver the gas into the reaction chamber. In the past sprinkler structure, the sprinkler head (top plate), baffle plate (baffle plate), spray plate (face plate) and support structure constituted, among which the sprinkler head performs the function of the mixer, and the baffle plate It is to reduce the pressure and adjust the uniformity of the pressure. The spray plate is used to transport gas, and the support structure is used to support the spray head, baffle and spray plate. However, in the past spray structure, not only the structure is complicated, the disassembly and assembly procedures are complicated, but also the maintenance of the equipment constitutes a considerable burden. Therefore, it is expected that a relatively simplified structure can be achieved to achieve an effect superior to the previous spray structure.

本發明提供一種噴淋結構，其包含：多孔性基體篩板，其係用以使來自化學源的氣流均勻分布；及固定架，其係用來支撐前述多孔性基體篩板。 The present invention provides a spray structure, which comprises: a porous base sieve plate, which is used to uniformly distribute the air flow from a chemical source; and a fixing frame, which is used to support the aforementioned porous base sieve plate.

較佳地，前述多孔性基體篩板的孔隙率係在1%~25%之間。前述多孔性基體篩板的上表面，呈現中高周圍低的山丘形體。前述多孔性基體篩板的上表面係具有起伏之形貌。前述多孔性基體篩板的上表面係具有導流槽。前述固 定架係具有一內支撐部，其係用來支撐前述多孔性基體篩板。前述固定架係具有一內支撐部，其係用來支撐前述多孔性基體篩板，並具有多個通孔。前述固定架係具有一內支撐部，係用來支撐前述多孔性基體篩板，並具有多個支撐橋。 Preferably, the porosity of the aforementioned porous matrix sieve is between 1% and 25%. The upper surface of the aforementioned porous base sieve plate presents a hilly shape with a medium height and a low periphery. The upper surface of the aforementioned porous matrix sieve has an undulating morphology. The upper surface of the porous base sieve has a flow guide groove. The aforementioned solid The fixed frame is provided with an inner support part, which is used to support the aforementioned porous base sieve plate. The fixing frame has an inner support part, which is used to support the porous base sieve plate, and has a plurality of through holes. The fixing frame has an inner support part for supporting the porous base sieve plate and has a plurality of support bridges.

本發明另提供一種化學源供給系統，其包含：化學源，其係供給化學氣體；前述噴淋結構；及供給管路，其係一端連通於前述化學源，另一端連通至前述噴淋結構之前述多孔性基體篩板。 The present invention also provides a chemical source supply system, which includes: a chemical source, which supplies chemical gas; the aforementioned spray structure; and a supply pipeline, one end of which is connected to the aforementioned chemical source, and the other end is connected to the aforementioned spray structure The aforementioned porous matrix sieve.

藉由如上所述的噴淋結構，即可以多孔性基體篩板，直接取代過往噴淋結構中所需要的噴淋頭、擋板以及噴淋板，並同時達成相同的效果。進而降低在維修時的複雜性，同時改善氣流的均勻程度。 With the spray structure as described above, the porous matrix sieve can directly replace the spray head, baffle and spray plate required in the previous spray structure, and achieve the same effect at the same time. This reduces the complexity during maintenance and improves the uniformity of air flow.

10:噴淋結構 10: Spray structure

11、21、31:多孔性基體篩板 11, 21, 31: porous matrix sieve

12、22、32:固定架 12, 22, 32: fixed frame

111、211、311:圓環部 111, 211, 311: ring part

112、212、312:圓盤部 112, 212, 312: Disc part

119、219、319:上表面 119, 219, 319: upper surface

121:外固定部 121: External Fixation

122、222、322:內支撐部 122, 222, 322: inner support part

123:突耳 123: lug

129:中空部 129: Hollow part

218:孔洞 218: Hole

318:導流槽 318: Diversion Trough

224:多孔底板 224: Porous bottom plate

324:支撐橋 324: Support Bridge

S:空間 S: Space

第一圖係本發明的噴淋結構的外觀立體圖。 The first figure is a perspective view of the appearance of the spray structure of the present invention.

第二圖係本發明的噴淋結構的外觀分解圖。 The second figure is an exploded view of the appearance of the spray structure of the present invention.

第三A圖係本發明的噴淋結構中多孔性基體篩板的第一態樣之外觀立體圖。 The third Fig. A is a perspective view of the appearance of the first aspect of the porous substrate sieve in the spray structure of the present invention.

第三B圖係本發明的噴淋結構中多孔性基體篩板的第二態樣之外觀立體圖。 The third figure B is a perspective view of the second aspect of the porous base sieve in the spray structure of the present invention.

第三C圖係本發明的噴淋結構中多孔性基體篩板的第三態樣之外觀立體圖。 The third figure C is a perspective view of the third aspect of the porous substrate sieve in the spray structure of the present invention.

第四A圖係本發明的噴淋結構中固定架的第一態樣之外觀立體圖。 The fourth figure A is a perspective view of the appearance of the first aspect of the fixing frame in the spray structure of the present invention.

第四B圖係本發明的噴淋結構中固定架的第二態樣之外觀立體圖。 The fourth figure B is an external perspective view of the second aspect of the fixing frame in the spray structure of the present invention.

第四C圖係本發明的噴淋結構中固定架的第三態樣之外觀立體圖。 The fourth figure C is a perspective view of the third aspect of the fixing frame in the spray structure of the present invention.

本發明所稱「噴淋結構」，係指用來改善氣體供給之均勻性的構件組。本發明所稱「多孔性基體篩板」，係指由具有孔隙的材質所製成之構件，而達到篩流氣體之效果。「多孔性基體篩板」中孔隙所佔之體積比例約為1%~25%。「多孔性基體篩板」的材質，具體可以是由不會與所供應的化學氣體發生反應之多孔金屬、多孔陶瓷、高分子材料、或複合材料所構成，且隨著所供應之氣體種類不同，可以設計成是一種耗材、或者是非耗材，具體可由粉末成型、等靜壓成型注塑注射、3D列印、雷射燒結等方式製作而成。本發明所稱「固定架」，係指可機械性地固定多孔性基體篩板之結構，宜由強度佳的材質所構成。 The "spray structure" in the present invention refers to a group of components used to improve the uniformity of gas supply. The "porous matrix sieve" as used in the present invention refers to a member made of a material with pores to achieve the effect of sieving gas. The volume ratio of pores in "porous matrix sieve" is about 1%~25%. The material of the "porous matrix sieve" can be made of porous metal, porous ceramics, polymer materials, or composite materials that will not react with the supplied chemical gas, and varies with the type of gas supplied , It can be designed as a consumable or non-consumable, specifically it can be made by powder molding, isostatic molding, injection, 3D printing, laser sintering, etc. The "fixing frame" referred to in the present invention refers to a structure that can mechanically fix the porous base sieve plate, and is preferably composed of a material with good strength.

請參閱第一圖，係本發明的噴淋結構10之外觀立體圖。如圖所示，噴淋結構10係由多孔性基體篩板11及固定架12所構成。其中，多孔性基體篩板11疊搭於固定架12往內側徑向上延伸的內支撐部122上(請參第二圖)。 Please refer to the first figure, which is a perspective view of the appearance of the spray structure 10 of the present invention. As shown in the figure, the spray structure 10 is composed of a porous base screen 11 and a fixing frame 12. Wherein, the porous base sieve plate 11 is stacked on the inner support portion 122 of the fixing frame 12 extending radially inwardly (please refer to the second figure).

請參閱第二圖，係本發明的噴淋結構10之外觀分解圖。如圖所示，噴淋結構10中的多孔性基體篩板11係由陶瓷多孔性基材一體成形成圓環部111及圓盤部112而構成。其中圓盤部112係位於圓環部111的下方，且圓盤部112的外徑係大於圓環部111的內徑，藉此以圓盤部112的上表面119密封圓環部111的下開口，而與圓環部111共同形成一上端開口之空間S。固定架12係由一剛性材質一體成形成環狀結構，具有外固定部121與內支撐部122。其中外固定部121具有往徑向外側延伸的突耳123，使得固定架12可被固定於反應裝置腔室的內側上壁(圖未示)。內支撐部122之內徑與係小於多孔性基體篩板11圓環部111的外徑， 使得圓環部111得以疊搭於內支撐部122上。而多孔性基體篩板11圓盤部112外徑係略小於內支撐部122的內徑。當多孔性基體篩板11的圓環部111疊搭於固定架12的內支撐部122時，圓環部111得以嵌入內支撐部122所形成的中空部129。 Please refer to the second figure, which is an exploded view of the appearance of the spray structure 10 of the present invention. As shown in the figure, the porous base sieve 11 in the shower structure 10 is composed of a ceramic porous base material integrally forming an annular portion 111 and a disc portion 112. The disc portion 112 is located below the ring portion 111, and the outer diameter of the disc portion 112 is greater than the inner diameter of the ring portion 111, whereby the upper surface 119 of the disc portion 112 seals the lower portion of the ring portion 111 Open, and together with the ring portion 111 form a space S with an open upper end. The fixing frame 12 is integrally formed of a rigid material to form a ring structure, and has an outer fixing portion 121 and an inner supporting portion 122. The outer fixing portion 121 has a lug 123 extending radially outward, so that the fixing frame 12 can be fixed to the inner upper wall of the reaction device chamber (not shown). The inner diameter of the inner support portion 122 is smaller than the outer diameter of the annular portion 111 of the porous base sieve 11, This allows the ring portion 111 to overlap the inner support portion 122. The outer diameter of the disc portion 112 of the porous base sieve 11 is slightly smaller than the inner diameter of the inner support portion 122. When the ring portion 111 of the porous base screen 11 overlaps the inner support portion 122 of the fixing frame 12, the ring portion 111 can be inserted into the hollow portion 129 formed by the inner support portion 122.

使用時本發明之噴淋結構10時，先利用固定架12的突耳123，將固定架12固定於反應裝置的腔室上壁(圖未示)，使得多孔性基體篩板11的圓環部111與腔室上壁接合，而將空間S密封。此時，反應裝置的化學源供給系統，係透過一端連接至供給化學氣體的化學源(圖未示)，另一端連通於空間S之供給管路而與多孔性基體篩板11連通。此際，來自化學源供給系統的化學氣體被供給至空間S後，透過多孔性基體篩板11的多孔性材質，使得氣流降壓，並且改善了在多孔性基體篩板11徑向上化學氣體的壓力和流量分布情形，增強了化學氣體供應的均勻性。另外，透過多孔性基體篩板11孔隙率與孔徑的調節，可進一步增進化學氣體的純度，而透過調控多孔性基體篩板11的厚度，可以調節從多孔性基體篩板11的孔隙擴散出之氣流與氣壓分布情形，藉此達到噴淋的效果。由於此噴淋結構10大幅簡化了機械構成，增加拆裝的便利性，因而可大幅縮短維護的時間，因而增進效率。 When using the spray structure 10 of the present invention, first use the lugs 123 of the fixing frame 12 to fix the fixing frame 12 to the upper wall of the chamber of the reaction device (not shown), so that the ring of the porous substrate sieve 11 The portion 111 is joined with the upper wall of the chamber to seal the space S. At this time, the chemical source supply system of the reaction device communicates with the porous substrate sieve 11 by connecting one end to a chemical source (not shown) for supplying chemical gas, and the other end to the supply pipe of the space S. At this time, after the chemical gas from the chemical source supply system is supplied to the space S, it penetrates the porous material of the porous base sieve 11 to reduce the pressure of the air flow and improve the chemical gas flow in the radial direction of the porous base sieve 11 The pressure and flow distribution conditions enhance the uniformity of chemical gas supply. In addition, by adjusting the porosity and pore size of the porous matrix sieve 11, the purity of chemical gas can be further improved, and by adjusting the thickness of the porous matrix sieve 11, the diffusion from the pores of the porous matrix sieve 11 can be adjusted. The distribution of airflow and air pressure to achieve the spray effect. Since the spray structure 10 greatly simplifies the mechanical structure and increases the convenience of disassembly and assembly, the maintenance time can be greatly shortened, thereby improving efficiency.

請參閱第三A~三C圖，其係本發明的噴淋結構中多孔性基體篩板(11、21、31)的三種態樣之外觀立體圖。三種態樣之多孔性基體篩板(11、21、31)差異在於圓盤部(112、212、312)上表面之形貌。第三A圖所示之圓盤部112上表面119係呈現平面狀。第三B圖所示之圓盤部212上表面219係呈現圓心向上***的山丘狀，而於不同的徑向位置上設有圓周環繞之孔洞218。第三C圖所示之圓盤部312上表面319亦呈現圓心向上***的山丘狀，而於山坡部分形成輻射擴散狀的導流槽318。藉由多孔性基體篩板(11、21、31)圓盤部(112、212、 312)上表面(119、219、319)之形貌之調整，可調節化學氣體在徑向上氣壓與氣流的分布狀態，且可隨著需要或者氣體的種類差異，來調整所需之形貌。 Please refer to Figures A to C, which are three-dimensional appearance views of the porous substrate sieve plates (11, 21, 31) in the spray structure of the present invention. The difference between the three types of porous matrix sieve plates (11, 21, 31) lies in the morphology of the upper surface of the disc portion (112, 212, 312). The upper surface 119 of the disc portion 112 shown in FIG. 3A is flat. The upper surface 219 of the disc portion 212 shown in the third figure B is in the shape of a hill with the center of the circle bulging upward, and there are circumferential holes 218 at different radial positions. The upper surface 319 of the disc portion 312 shown in FIG. 3C is also in the shape of a hill with the center bulging upward, and a diversion groove 318 with a radial diffusion shape is formed on the hillside. By the porous matrix sieve plate (11, 21, 31) disc part (112, 212, 312) To adjust the topography of the upper surface (119, 219, 319), the gas pressure and gas distribution in the radial direction can be adjusted, and the required topography can be adjusted according to needs or gas types.

請參閱第四A~四C圖，其係本發明的噴淋結構中固定架(12、22、32)的三種態樣之外觀立體圖。三種態樣之固定架(12、22、32)差異在於內支撐部(122、222、322)之形貌。第四A圖所示之內支撐部122係為圓環狀，而可接抵於多孔性基體篩板(11、21、31)的圓盤部(112、212、312)。第四B圖所示之內支撐部222除了與第四A圖相同的圓環狀外，還具有一具有多個通孔的多孔底板224，而可接抵於多孔性基體篩板(11、21、31)圓盤部(112、212、312)的下表面。第四C圖所示之內支撐部322除了與第四A圖相同的圓環狀外，還具有一多點連結之支撐橋324，可接抵於多孔性基體篩板(11、21、31)圓盤部(112、212、312)的下表面。藉由不同的固定架(12、22、32)設計，可進一步隨著需要或者氣體的種類差異，來調整氣流的供給方式，達到更均勻地氣流控制。 Please refer to Figures 4A to 4C, which are three-dimensional appearance views of the fixing frame (12, 22, 32) in the spray structure of the present invention. The difference between the three types of fixing frames (12, 22, 32) lies in the shape of the inner support portion (122, 222, 322). The inner support portion 122 shown in Fig. 4A is annular, and can abut against the disc portions (112, 212, 312) of the porous base sieve plate (11, 21, 31). The inner support portion 222 shown in the fourth figure B, in addition to the same ring shape as the fourth figure A, also has a porous bottom plate 224 with a plurality of through holes, and can abut against the porous base sieve plate (11, 21, 31) The lower surface of the disc portion (112, 212, 312). The inner support part 322 shown in the fourth figure C, in addition to the same ring shape as the fourth figure A, also has a multi-point connecting support bridge 324, which can abut on the porous base sieve plate (11, 21, 31 ) The lower surface of the disc portion (112, 212, 312). With different design of the fixing frame (12, 22, 32), the air supply mode can be adjusted according to the needs or the difference of the gas type to achieve more uniform air flow control.

至此，本發明之噴淋結構的較佳實施例，已經由上述說明以及圖式加以說明。在本說明書中所揭露的所有特徵都可能與其他手段結合，本說明書中所揭露的每一個特徵都可能選擇性的以相同、相等或相似目的特徵所取代，因此，除了特別顯著的特徵之外，所有的本說明書所揭露的特徵僅是相等或相似特徵中的一個例子。經過本發明較佳實施例之描述後，熟悉此一技術領域人員應可瞭解到，本發明實為一新穎、進步且具產業實用性之發明，深具發展價值。本發明得由熟悉技藝之人任施匠思而為諸般修飾(例如固定架或多孔性基體篩板的形貌或者結合方式)，然不脫如附申請範圍所欲保護者。 So far, the preferred embodiment of the spray structure of the present invention has been described by the above description and drawings. All the features disclosed in this specification may be combined with other means, and each feature disclosed in this specification may be selectively replaced with the same, equal or similar purpose feature, therefore, in addition to the distinctive features All the features disclosed in this specification are only an example of equivalent or similar features. After the description of the preferred embodiments of the present invention, those familiar with this technical field should understand that the present invention is indeed a novel, advanced and industrially applicable invention, which has deep development value. The present invention can be modified in various ways (such as the shape or combination of the fixing frame or the porous matrix sieve plate) by those who are familiar with the art, but it does not deviate from the scope of the attached application.

10         噴淋結構 11         多孔性基體篩板 12         固定架 10 Spray structure 11 Porous matrix sieve plate 12 Fixed frame

Claims (7)

一種噴淋結構，其包含：多孔性基體篩板，其係用以使來自化學源的氣流均勻分布；及固定架，其係用來支撐前述多孔性基體篩板，其中前述多孔性基體篩板的上表面，呈現中高周圍低的山丘形體。 A spray structure comprising: a porous base sieve plate, which is used to uniformly distribute the air flow from a chemical source; and a fixing frame, which is used to support the aforementioned porous base sieve plate, wherein the aforementioned porous base sieve plate The upper surface of the building is in the shape of hills with medium height and low surroundings. 如申請專利範圍第1項所述之噴淋結構，其中前述多孔性基體篩板的孔隙率係在1%~25%之間。 For the spray structure described in item 1 of the scope of the patent application, the porosity of the aforementioned porous matrix sieve is between 1% and 25%. 如申請專利範圍第1項所述之噴淋結構，其中前述多孔性基體篩板的上表面係具有導流槽。 The spray structure described in the first item of the scope of patent application, wherein the upper surface of the porous base sieve plate has a diversion groove. 如申請專利範圍第1項所述之噴淋結構，其中前述固定架係具有一內支撐部，其係用來支撐前述多孔性基體篩板。 According to the spray structure described in item 1 of the scope of the patent application, the fixing frame has an inner support portion for supporting the porous base sieve plate. 如申請專利範圍第1項所述之噴淋結構，其中前述固定架係具有一內支撐部，其係用來支撐前述多孔性基體篩板，並具有多個通孔。 According to the spray structure described in item 1 of the scope of the patent application, the fixing frame has an inner support portion, which is used to support the porous base sieve plate, and has a plurality of through holes. 如申請專利範圍第1項所述之噴淋結構，其中前述固定架係具有一內支撐部，係用來支撐前述多孔性基體篩板，並具有多個支撐橋。 As for the spray structure described in item 1 of the scope of the patent application, the fixing frame has an inner support portion for supporting the porous base sieve plate and has a plurality of support bridges. 一種化學源供給系統，其包含：化學源，其係供給化學氣體；如申請專利範圍第1項至第6項中任一項所述之噴淋結構；及供給管路，其係一端連通於前述化學源，另一端連通至前述噴淋結構之前述多孔性基體篩板；藉由前述多孔性基體篩板，使得前述化學氣體得以均勻地由前述噴淋結構噴出。 A chemical source supply system, comprising: a chemical source, which supplies chemical gas; the spray structure as described in any one of items 1 to 6 in the scope of the patent application; and a supply pipeline, one end of which is connected to The other end of the chemical source is connected to the porous base sieve plate of the spray structure; the porous base sieve plate allows the chemical gas to be evenly sprayed from the spray structure.
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