TWI674326B - Copper zirconium alloy heat dissipation element and method of manufacturing copper zirconium alloy housing - Google Patents

Copper zirconium alloy heat dissipation element and method of manufacturing copper zirconium alloy housing Download PDF

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TWI674326B
TWI674326B TW107141058A TW107141058A TWI674326B TW I674326 B TWI674326 B TW I674326B TW 107141058 A TW107141058 A TW 107141058A TW 107141058 A TW107141058 A TW 107141058A TW I674326 B TWI674326 B TW I674326B
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copper
zirconium
zirconium alloy
powder
heat
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TW202020172A (en
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許嘉政
朱旭山
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財團法人工業技術研究院
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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • B22F3/14—Both compacting and sintering simultaneously
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24—After-treatment of workpieces or articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0425—Copper-based alloys
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039—Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24—After-treatment of workpieces or articles
    • B22F2003/248—Thermal after-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • B22F2009/041—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by mechanical alloying, e.g. blending, milling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • B22F2009/043—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by ball milling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
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  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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Abstract

一種銅鋯合金散熱元件，包括一銅鋯合金殼體以及設於銅鋯合金殼體內壁的一毛細結構層，所述銅鋯合金殼體包括含有15-20原子百分比的鋯之奈米銅鋯析出物。本發明還提供銅鋯合金散熱元件的製造方法，包括混合銅粉與鋯粉，經球磨後進行真空熱壓再施以滾壓處理，而製得銅鋯合金殼體。所述銅鋯合金散熱元件之殼體具有高抗拉強度、高延展性及導熱性，當散熱元件小型化時仍不造成元件破損、變形或扭曲，同時沒有喪失散熱的功效。A copper-zirconium alloy heat dissipation element includes a copper-zirconium alloy shell and a capillary structure layer provided on an inner wall of the copper-zirconium alloy shell. The copper-zirconium alloy shell includes nano-copper zirconium containing 15-20 atomic percent zirconium. Precipitates. The invention also provides a method for manufacturing a copper-zirconium alloy heat-dissipating component, which comprises mixing copper powder and zirconium powder, vacuum hot pressing after ball milling, and applying rolling treatment to obtain a copper-zirconium alloy shell. The shell of the copper-zirconium alloy heat-dissipating element has high tensile strength, high ductility, and thermal conductivity. When the heat-dissipating element is miniaturized, the element is not damaged, deformed or distorted, and the heat dissipation effect is not lost.

Description

銅鋯合金散熱元件及銅鋯合金殼體的製造方法Copper-zirconium alloy heat dissipation element and manufacturing method of copper-zirconium alloy shell

本發明係關於一種銅鋯合金散熱元件及銅鋯合金殼體的製造方法。The invention relates to a copper-zirconium alloy heat dissipation element and a method for manufacturing a copper-zirconium alloy shell.

因應全球通訊技術的快速發展，由於運算晶片能力的大幅提升，許多功能性的電子產品如隨身聽、電子辭典等已被行動裝置如智慧型手機或平板電腦所取代。為配合消費者對於輕薄短小的產品需求，行動裝置產品的散熱技術，一直是產業界面臨的難題。例如在5G高速傳輸之微型基地台及高速手持裝置之內部熱量極需超薄散熱元件，當散熱元件的厚度變小時會因壓力差的變化在結構脆弱處易造成破裂或變型。In response to the rapid development of global communications technology and the significant increase in computing chip capabilities, many functional electronic products such as walkmans and electronic dictionaries have been replaced by mobile devices such as smartphones or tablets. In order to meet consumer demand for light, thin and short products, the heat dissipation technology of mobile device products has always been a problem facing the industry. For example, the internal heat of 5G high-speed micro base stations and high-speed handheld devices requires ultra-thin heat dissipation elements. When the thickness of the heat dissipation elements becomes smaller, the structure may be easily broken or deformed due to changes in pressure difference.

習知以純銅為材料的散熱元件例如薄型或超薄熱管，因為強度不足，在彎折處極易破裂或變型，阻礙蒸氣通道；若熱管運作時受大氣壓力壓扁，或因內部壓力過大而會導致爆管。It is known that heat dissipation components made of pure copper such as thin or ultra-thin heat pipes, because of insufficient strength, are easily broken or deformed at the bends, hindering the vapor passage; if the heat pipe is compressed by atmospheric pressure during operation, or due to excessive internal pressure, Will cause tube burst.

因此，開發一超薄且具有高熱傳導能力同時具有高機械強度的散熱元件，乃是現階段相關技術領域的重要課題。Therefore, the development of an ultra-thin heat-dissipating element with high heat conduction capacity and high mechanical strength is an important issue in the related technical field at this stage.

本發明提供一種銅鋯合金散熱元件，特別是薄型散熱元件，具有高強度的機械特性同時維持其高導熱性質。The invention provides a copper-zirconium alloy heat dissipation element, particularly a thin heat dissipation element, which has high strength mechanical characteristics while maintaining its high thermal conductivity.

本發明另提供一種銅鋯合金殼體的製造方法，能製做出具有高強度的機械特性同時具有高導熱性質的銅鋯合金殼體。The invention also provides a method for manufacturing a copper-zirconium alloy shell, which can manufacture a copper-zirconium alloy shell with high mechanical strength and high thermal conductivity.

本發明提出一種銅鋯合金散熱元件，包括一銅鋯合金殼體、一設於銅鋯合金殼體內壁的毛細結構層，其中，該銅鋯合金殼體包括含有15-20原子百分比（at%）的鋯之奈米銅鋯析出物。The invention provides a copper-zirconium alloy heat dissipation element, which includes a copper-zirconium alloy casing and a capillary structure layer provided on an inner wall of the copper-zirconium alloy casing. The copper-zirconium alloy casing includes 15-20 atomic percent (at%) ) Zirconium nano-copper zirconium precipitates.

在本發明的一實施例中，上述銅鋯合金殼體中鋯的添加量大於0.5wt%且小於5.0wt%。In an embodiment of the present invention, the added amount of zirconium in the copper-zirconium alloy shell is greater than 0.5 wt% and less than 5.0 wt%.

本發明另一實施例提出一種銅鋯合金殼體的製造方法，包括混合銅粉與鋯粉並球磨至少20小時，以形成合金化粉末；對合金化的粉末進行真空熱壓，以形成一塊材，接著對該塊材進行熱處理及時效處理，再對該塊材進行滾壓處理。Another embodiment of the present invention provides a method for manufacturing a copper-zirconium alloy shell, which comprises mixing copper powder and zirconium powder and ball milling for at least 20 hours to form an alloyed powder; vacuum-pressing the alloyed powder to form a piece of material , Followed by heat treatment and aging treatment of the block, and then rolling treatment of the block.

為讓本發明的上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.

圖1是依照本發明的一實施例的一種銅鋯合金散熱元件的剖面示意圖。在圖1中，本實施例提出一種銅鋯合金散熱元件100，包括：一銅鋯合金殼體102以及一毛細結構層104，其設於銅鋯合金殼體102的內壁102a，其中銅鋯合金殼體102含有奈米銅鋯析出物，且該銅鋯析出物含有15 at%-20 at%的鋯；換句話說，該銅鋯析出物含有80 at%-85 at%的銅。在一實施例中，銅鋯合金殼體102中鋯的添加量例如大於0.5wt%且小於5.0wt%，且所謂的「添加量」是指製作銅鋯合金殼體102時的添加物的重量百分比。FIG. 1 is a schematic cross-sectional view of a copper-zirconium alloy heat sink according to an embodiment of the present invention. In FIG. 1, this embodiment proposes a copper-zirconium alloy heat dissipation element 100 including a copper-zirconium alloy casing 102 and a capillary structure layer 104 provided on an inner wall 102 a of the copper-zirconium alloy casing 102, wherein copper-zirconium alloy The alloy shell 102 contains nano copper zirconium precipitates, and the copper zirconium precipitates contain 15 at% -20 at% zirconium; in other words, the copper zirconium precipitates contain 80 at% -85 at% copper. In one embodiment, the amount of zirconium added to the copper-zirconium alloy shell 102 is, for example, greater than 0.5 wt% and less than 5.0 wt%, and the so-called "added amount" refers to the weight of the additive when the copper-zirconium alloy shell 102 is manufactured. percentage.

在本發明一實施例中，銅鋯合金散熱元件100的厚度T1≦0.4mm。而且，銅鋯合金散熱元件100若是如圖1所示為管狀結構，則厚度T1是指其截面的短軸長度。In an embodiment of the present invention, the thickness T1 of the copper-zirconium alloy heat dissipation element 100 is ≦ 0.4 mm. In addition, if the copper-zirconium alloy heat-dissipating element 100 has a tubular structure as shown in FIG. 1, the thickness T1 refers to the short-axis length of its cross section.

在本發明一實施例中，銅鋯合金殼體102的厚度T2≦0.1mm。In an embodiment of the present invention, the thickness T2 of the copper-zirconium alloy casing 102 is ≦ 0.1 mm.

圖2是依照本發明的另一實施例的一種銅鋯合金殼體的製造流程步驟圖，且可製作出上一實施例的銅鋯合金殼體102。FIG. 2 is a flowchart of a manufacturing process of a copper-zirconium alloy casing according to another embodiment of the present invention, and the copper-zirconium alloy casing 102 of the previous embodiment can be manufactured.

請參照圖2，本實施例的方法，包括先進行步驟S200，混合銅粉與鋯粉並球磨至少20小時，其中該鋯粉的粒徑例如小於銅粉的粒徑，該鋯粉的添加量例如大於0.5wt%且小於5.0wt%，並可於氬氣氣氛中進經球磨使鋯熱擴散至銅中，並固溶形成合金化粉末。Please refer to FIG. 2. The method of this embodiment includes first performing step S200, mixing copper powder and zirconium powder and ball milling for at least 20 hours, wherein the particle diameter of the zirconium powder is smaller than the particle diameter of copper powder, and the amount of zirconium powder added For example, it is greater than 0.5% by weight and less than 5.0% by weight, and can be ball-milled in an argon atmosphere to thermally diffuse zirconium into copper, and solid solution to form alloyed powder.

然後，進行步驟S202，對上述合金化粉末進行真空熱壓成形，以形成一塊材。在本實施例中，真空熱壓成形的製程參數例如：以溫度930℃-960℃，壓力30MPa進行真空熱壓燒結2-4小時，而使合金化粉末成形為塊材。Then, step S202 is performed to perform vacuum hot pressing on the alloyed powder to form a single piece. In this embodiment, the process parameters of vacuum hot-press forming are, for example, vacuum hot-press sintering at a temperature of 930 ° C-960 ° C and a pressure of 30 MPa for 2-4 hours, so that the alloyed powder is formed into a block.

而後，再進行步驟S204，對該塊材進行熱處理和時效處理，其中熱處理的溫度例如930℃-960℃，時間例如1-2小時，接著可先進行水冷，再以例如450℃-550℃的溫度進行時效處理。之後，可選擇持溫2-4小時後空冷。Then, step S204 is performed to perform heat treatment and aging treatment on the block. The temperature of the heat treatment is, for example, 930 ° C to 960 ° C, and the time is, for example, 1-2 hours. Then, the water cooling may be performed first, and then the Aging treatment at temperature. After that, you can choose to air-cool after holding the temperature for 2-4 hours.

然後，進行步驟S206，對該塊材進行滾壓處理。滾壓處理後可得到一薄片材，此薄片材可作為形成熱管或其他的散熱元件用之殼體結構。Then, step S206 is performed to perform a rolling process on the block. After the rolling process, a thin sheet can be obtained, and the thin sheet can be used as a shell structure for forming a heat pipe or other heat dissipation elements.

如果要製作如圖1所示的銅鋯合金散熱元件，可在步驟S206之後，取上述滾壓處理後之薄片材，先製成例如一管狀或其他形狀之殼體，再以此殼體為基材製作毛細結構層。該毛細結構層的製作方式包含但不限於下列幾種：1.粉體隨機燒結在殼體內壁；2.銅網或銅線燒結在殼體內壁；3.殼體結構之內側加工溝槽；或4.殼體結構之內側進行蝕刻。If a copper-zirconium alloy heat-dissipating component as shown in FIG. 1 is to be manufactured, after step S206, the sheet material after the above rolling process is taken, and firstly made into a tubular or other shape casing, for example. The substrate is made of a capillary structure layer. The manufacturing method of the capillary structure layer includes but is not limited to the following: 1. The powder is randomly sintered on the inner wall of the shell; 2. The copper mesh or copper wire is sintered on the inner wall of the shell; 3. The groove is processed inside the shell structure; Or 4. The inside of the shell structure is etched.

為了讓本揭露之上述和其他目的、特徵、和優點能更明顯易懂，下文特舉數實施例及比較實施例，作詳細說明如下：In order to make the above and other objects, features, and advantages of this disclosure more comprehensible, several examples and comparative examples are given below for detailed description as follows:

＜實施例＞<Example>

＜金屬粉末球磨＞＜ Metal Powder Ball Milling ＞

實施例1Example 1

將97克粒徑大小為100 mesh、純度為99.5 %的銅粉與3克粒徑大小為325 mesh、純度為99.9 %的鋯粉在手套箱中放入球磨罐中，在氬氣氣氛中以轉速350 rpm、20分鐘正反轉的方式進行球磨10小時，其結果得到Cu-3wt%Zr樣品1，以能量散射X射線光譜 (EDS，場效發射式掃瞄電子顯微鏡JEOL， FE-SEM)進行成份分析如表1。經電子顯微鏡觀察粒徑變化的情形，並做X光繞射(XRD)分析，鋯(Zr) 已開始擴散固溶至銅(Cu)表面，但仍有鋯未與銅反應。97 grams of copper powder with a particle size of 100 mesh and a purity of 99.5% and 3 grams of zirconium powder with a particle size of 325 mesh and a purity of 99.9% were placed in a glove box in a glove box, in an argon atmosphere. Ball milling was performed at 350 rpm for 20 minutes in a forward and reverse direction for 20 minutes. As a result, Cu-3wt% Zr sample 1 was obtained. Energy scattering X-ray spectroscopy (EDS, field emission scanning electron microscope JEOL, FE-SEM) The composition analysis is shown in Table 1. Observe the change of particle diameter by electron microscope and do X-ray diffraction (XRD) analysis. Zirconium (Zr) has begun to dissolve and dissolve on the surface of copper (Cu), but zirconium has not reacted with copper.

實施例2Example 2

與實施例1相同，不同的是球磨的時間為20小時，其結果得到Cu-3wt%Zr樣品2，以EDS進行成份分析如表1。經電子顯微鏡觀察粒徑變化的情形，並做X光繞射(XRD)分析，可知尚有微量鋯(Zr)未與銅(Cu)固溶。It is the same as Example 1, except that the ball milling time is 20 hours. As a result, Cu-3wt% Zr sample 2 is obtained. The composition analysis by EDS is shown in Table 1. Observe the change of particle size by electron microscope, and do X-ray diffraction (XRD) analysis, it can be seen that there is still a small amount of zirconium (Zr) not dissolved with copper (Cu).

實施例3Example 3

與實施例1相同，不同的是球磨的時間為30小時，其結果得到Cu-3wt%Zr樣品3，以EDS進行成份分析如表1。經電子顯微鏡觀察粒徑變化的情形，並做X光繞射(XRD)分析可觀察出鋯(Zr)與銅(Cu)已經固溶，另外已並無鋯殘留。It is the same as Example 1, except that the milling time is 30 hours. As a result, Cu-3wt% Zr sample 3 is obtained. Table 1 shows the composition analysis by EDS. Observe the change of particle size by electron microscope and do X-ray diffraction (XRD) analysis. It can be seen that zirconium (Zr) and copper (Cu) have solid-solved, and no zirconium remains.

表1 Cu-3wt. %Zr 球磨時間(hours) Cu wt. % Zr wt. % 樣品1 10 99.7 0.3 樣品2 20 99.5 0.5 樣品3 30 99.3 0.7 Table 1 Cu-3wt.% Zr Milling time (hours) Cu wt.% Zr wt.% Sample 1 10 99.7 0.3 Sample 2 20 99.5 0.5 Sample 3 30 99.3 0.7

如表1所示，銅粉與鋯粉經球磨後，隨著球磨的時間增加，鋯擴散至銅表面的含量也隨之增加，也就是說，鋯含量擴散至銅中之趨勢，隨著球磨時間的增加而增加。As shown in Table 1, after the ball milling of copper powder and zirconium powder, as the ball milling time increases, the content of zirconium diffusion to the copper surface also increases, that is, the tendency of the zirconium content to diffuse into the copper increases with the ball milling. Increase with time.

此外，依據SEM的結果分析球磨時間與晶粒的關係可知，球磨時間愈長，粒徑變小，且均勻度增加，例如在球磨後之10小時粒徑尺寸有大有小不均勻，隨著球磨時間愈長粒徑隨之慢慢變小，且其粒徑趨於均勻，至少球磨30小時，粒徑在500-600微米。In addition, according to the results of SEM analysis of the relationship between the ball milling time and the crystal grains, it can be seen that the longer the ball milling time, the smaller the particle size, and the uniformity increases. The longer the ball milling time, the smaller the particle size becomes, and the particle diameter tends to be uniform. At least 30 hours of ball milling, the particle diameter is 500-600 microns.

實施例4Example 4

將99.85克粒徑大小為100 mesh、純度為99.5 %的銅粉與0.15克粒徑大小為325 mesh、純度為99.9 %的鋯粉在手套箱中放入球磨罐中，在氬氣氣氛中以轉速350 rpm、20分鐘正反轉的方式進行球磨30小時，其結果得到Cu-0.15wt%Zr樣品4，經電子顯微鏡觀察並做X光繞射(XRD)分析，並無鋯存在，表示鋯已固溶於銅中。99.85 grams of copper powder with a particle size of 100 mesh and a purity of 99.5% and 0.15 grams of zirconium powder with a particle size of 325 mesh and a purity of 99.9% were placed in a ball mill jar in a glove box, and placed in an argon atmosphere. Ball milling was performed at 350 rpm for 20 minutes in a forward and reverse direction for 20 minutes. As a result, Cu-0.15wt% Zr sample 4 was obtained. It was observed by an electron microscope and analyzed by X-ray diffraction (XRD). Zirconium was not present, indicating zirconium Has been dissolved in copper.

實施例5Example 5

將99.5克粒徑大小為100 mesh、純度為99.5 %的銅粉與0.5克粒徑大小為325 mesh、純度為99.9 %的鋯粉在手套箱中放入球磨罐中，在氬氣氣氛中以轉速350 rpm、20分鐘正反轉的方式進行球磨30小時，其結果得到Cu-0.5wt%Zr樣品5，經電子顯微鏡觀察並做X光繞射(XRD)分析，並無鋯存在，表示鋯已固溶於銅中。99.5 grams of copper powder with a particle size of 100 mesh and a purity of 99.5% and 0.5 grams of zirconium powder with a particle size of 325 mesh and a purity of 99.9% were placed in a glove box in a glove box, in an argon atmosphere. Ball milling was performed at 350 rpm for 20 minutes in a forward and reverse direction for 20 hours. As a result, Cu-0.5wt% Zr sample 5 was obtained. The sample was observed by an electron microscope and analyzed by X-ray diffraction (XRD). Zirconium was not present, indicating zirconium Has been dissolved in copper.

實施例6Example 6

將95克粒徑大小為100 mesh、純度為99.5 %的銅粉與5克粒徑大小為325 mesh、純度為99.9 %的鋯粉在手套箱中放入球磨罐中，在氬氣氣氛中以轉速350 rpm、20分鐘正反轉的方式進行球磨30小時，其結果得到Cu-5wt%Zr樣品6, 經X光繞射(XRD)分析，得知仍有鋯殘留，代表鋯固溶於銅中有含量的限制，並不會隨著鋯添加量增加而無限制的增加其固溶含量。95 grams of copper powder with a particle size of 100 mesh and a purity of 99.5% and 5 grams of zirconium powder with a particle size of 325 mesh and a purity of 99.9% were placed in a glove box in a glove box, Ball milling was performed at a speed of 350 rpm for 20 minutes in a forward and reverse direction for 30 hours. As a result, Cu-5wt% Zr sample 6 was obtained. After X-ray diffraction (XRD) analysis, it was found that zirconium remained, indicating that zirconium was solid-soluble in copper There is a limit in the content, and it will not increase its solid solution content without limit as the amount of zirconium is increased.

實施例7Example 7

將99.2克粒徑大小為100 mesh、純度為99.5 %的銅粉與0.8克粒徑大小為325 mesh、純度為99.9 %的鋯粉在手套箱中放入球磨罐中，在氬氣氣氛中以轉速350 rpm、20分鐘正反轉的方式進行球磨30小時，其結果得到Cu-0.8wt%Zr樣品7。經以X光繞射(XRD)分析可觀察出鋯(Zr)與銅(Cu)已經固溶。99.2 grams of copper powder with a particle size of 100 mesh and a purity of 99.5% and 0.8 grams of zirconium powder with a particle size of 325 mesh and a purity of 99.9% were placed in a glove box in a glove box, and placed in an argon atmosphere. Ball milling was performed at a rotation speed of 350 rpm for 20 minutes in a positive and negative direction for 30 hours. As a result, Cu-0.8wt% Zr sample 7 was obtained. X-ray diffraction (XRD) analysis showed that zirconium (Zr) and copper (Cu) had been dissolved.

實施例8Example 8

將98.3克粒徑大小為100 mesh、純度為99.5 %的銅粉與1.7克粒徑大小為325 mesh、純度為99.9 %的鋯粉在手套箱中放入球磨罐中，在氬氣氣氛中以轉速350 rpm、20分鐘正反轉的方式進行球磨30小時，其結果得到Cu-1.7wt%Zr樣品8。經以X光繞射(XRD)分析可觀察出鋯(Zr)與銅(Cu)已經固溶。。98.3 g of copper powder with a particle size of 100 mesh and a purity of 99.5% and 1.7 g of zirconium powder with a particle size of 325 mesh and a purity of 99.9% were placed in a glove box in a glove box, Ball milling was performed for 30 hours at a rotation speed of 350 rpm and a 20-minute forward / reverse direction. As a result, Cu-1.7wt% Zr sample 8 was obtained. X-ray diffraction (XRD) analysis showed that zirconium (Zr) and copper (Cu) had been dissolved. .

＜真空粉末熱壓及銅鋯析出物分析＞＜ Vacuum powder hot pressing and copper-zirconium precipitate analysis ＞

實施例9Example 9

以鎢鋼模具對樣品1以950 ℃，30 MPa的壓力進行真空熱壓4小時及熱處理和時效處理，得到樣品9。將樣品9的奈米析出物進行EDS成份分析，得到Cu 80.98at%，Zr 19.02at%。Sample 1 was subjected to vacuum hot pressing with a tungsten steel mold at a pressure of 950 ° C. and 30 MPa for 4 hours, and heat treatment and aging treatment to obtain Sample 9. The nanometer precipitate of Sample 9 was analyzed by EDS, and Cu was 80.98at% and Zr was 19.02at%.

實施例10Example 10

以鎢鋼模具對樣品2以950 ℃，30 MPa 的壓力進行真空熱壓4小時及熱處理和時效處理，得到樣品10。將樣品10的奈米析出物進行EDS成份分析，得到Cu 83.37at%，Zr 16.63at%。Sample 2 was subjected to vacuum hot pressing with a tungsten steel mold at a pressure of 950 ° C. and 30 MPa for 4 hours, and heat treatment and aging treatment to obtain sample 10. The nanometer precipitates of sample 10 were analyzed by EDS, and Cu 83.37at% and Zr 16.63at% were obtained.

實施例11Example 11

以鎢鋼模具對樣品3以950 ℃，30 MPa 的壓力進行真空熱壓4小時及熱處理和時效處理，得到樣品11。將樣品11的奈米析出物進行EDS成份分析，得到Cu 82.73at%，Zr 17.27at%。Sample 3 was subjected to vacuum hot pressing with a tungsten steel mold at a pressure of 950 ° C. and 30 MPa for 4 hours, and heat treatment and aging treatment to obtain Sample 11. The nanometer precipitates of sample 11 were analyzed by EDS to obtain 82.73at% Cu and 17.27at% Zr.

實施例12Example 12

以鎢鋼模具對樣品4以950 ℃，30 MPa 的壓力進行真空熱壓4小時及熱處理和時效處理，得到樣品12。藉由SEM微結構分析，鋯已固溶在銅中，但並沒有析出奈米析出物。Sample 4 was subjected to vacuum hot pressing with a tungsten steel mold at a pressure of 950 ° C. and 30 MPa for 4 hours, and heat treatment and aging treatment to obtain Sample 12. By SEM microstructure analysis, zirconium has been dissolved in copper, but no nano precipitates have been precipitated.

實施例13Example 13

以鎢鋼模具對樣品5以950 ℃，30 MPa 的壓力進行真空熱壓4小時及熱處理和時效處理，得到樣品13。將樣品13的奈米析出物進行EDS成份分析，得到Cu 84.02 at%，Zr 15.98 at%。Sample 5 was subjected to vacuum hot pressing with a tungsten steel mold at a pressure of 950 ° C and a pressure of 30 MPa for 4 hours and heat treatment and aging treatment to obtain sample 13. The nanometer precipitate of sample 13 was analyzed by EDS, and Cu 84.02 at% and Zr 15.98 at% were obtained.

實施例14Example 14

以鎢鋼模具對樣品6以950 ℃，30 MPa 的壓力進行真空熱壓4小時及熱處理和時效處理，得到樣品14。由電子顯微鏡和EDS分析結果得知，不容易均勻分佈析出奈米粒子，且鋯集中在特定的局部區域，成份的均均度不佳。Sample 6 was subjected to vacuum hot pressing with a tungsten steel mold at a pressure of 950 ° C and 30 MPa for 4 hours, and heat treatment and aging treatment to obtain sample 14. According to the results of electron microscope and EDS analysis, it is not easy to uniformly distribute and precipitate nano particles, and zirconium is concentrated in a specific local area, and the uniformity of components is not good.

實施例15Example 15

以鎢鋼模具對樣品7以950 ℃，30 MPa 的壓力進行真空熱壓4小時及熱處理和時效處理，得到樣品15，並且可見銅鋯奈米析出物。Sample 7 was subjected to vacuum hot pressing at 950 ° C. and 30 MPa for 4 hours with a tungsten steel mold, and heat treatment and aging treatment were performed to obtain sample 15 with visible copper-zirconium nanometer precipitates.

實施例16Example 16

以鎢鋼模具對樣品8以950 ℃，30 MPa 的壓力進行真空熱壓4小時及熱處理和時效處理，得到樣品16，並且可見銅鋯奈米析出物。Sample 8 was subjected to vacuum hot pressing with a tungsten steel mold at a pressure of 950 ° C. and 30 MPa for 4 hours and heat treatment and aging treatment. Sample 16 was obtained, and copper zirconium nano precipitates were visible.

比較例1Comparative Example 1

將97克粒徑大小為100 mesh、純度為99.5 %的銅粉與3克粒徑大小為325 mesh、純度為99.9 %的鋯粉混合後，以鎢鋼模具在950 ℃，30 MPa 的壓力下進行真空熱壓4小時及熱處理和時效處理，得到比較樣品1。將比較樣品1的奈米析出物進行EDS成份分析，得到Cu 80.76at%，Zr 19.24at%。對此未經球磨之比較樣品1試片進行EDS成份分析，可知有嚴重之成份分佈不均之問題，且奈米析出物集中於局部地區。After mixing 97 grams of copper powder with a particle size of 100 mesh and a purity of 99.5% and 3 grams of zirconium powder with a particle size of 325 mesh and a purity of 99.9%, use a tungsten steel mold at a pressure of 950 ℃ and a pressure of 30 MPa The vacuum hot pressing was performed for 4 hours, and the heat treatment and aging treatment were performed to obtain Comparative Sample 1. The nanometer precipitates of Comparative Sample 1 were analyzed by EDS to obtain Cu 80.76at% and Zr 19.24at%. EDS component analysis of this unsampled comparative sample 1 test piece shows that there is a serious problem of uneven composition distribution, and nanometer precipitates are concentrated in local areas.

＜成份均勻度實驗＞＜ Composition uniformity experiment ＞

成份均勻度實驗係於直徑約3公分的熱壓後，熱處理及時效處理後的樣品上取四邊及中央各一點進行EDS成份分析，經由在不同位置銅、鋯含量的分布以確認金屬含量在整體樣品的均勻度。The composition uniformity experiment was performed after hot pressing with a diameter of about 3 cm. After heat treatment and aging treatment, samples were taken from the four sides and the center to analyze the EDS composition. The distribution of copper and zirconium content in different positions was used to confirm the overall metal content. Sample uniformity.

實施例17Example 17

取樣品9進行EDS成份分析做均勻度實驗，結果請見表2，銅鋯成份在樣品中的均勻度不佳。Take sample 9 for EDS component analysis for uniformity experiments. The results are shown in Table 2. The uniformity of the copper and zirconium components in the sample is not good.

表2 取樣位置編號 Cu wt.% Zr wt.% 1 96.37 3.63 2 93.40 6.60 3 89.67 10.34 4 94.43 5.57 5 92.87 7.13 Table 2 Sampling position number Cu wt.% Zr wt.% 1 96.37 3.63 2 93.40 6.60 3 89.67 10.34 4 94.43 5.57 5 92.87 7.13

實施例18Example 18

取樣品10進行EDS成份分析做均勻度實驗，結果請見表3，銅鋯成份在樣品中的成份分布均勻。Take sample 10 for EDS composition analysis for uniformity experiments. The results are shown in Table 3. The distribution of copper and zirconium components in the sample is uniform.

表3 取樣位置編號 Cu wt.% Zr wt.% 1 97.44 2.56 2 97.50 2.50 3 96.76 3.24 4 96.87 3.13 5 97.20 2.80 table 3 Sampling position number Cu wt.% Zr wt.% 1 97.44 2.56 2 97.50 2.50 3 96.76 3.24 4 96.87 3.13 5 97.20 2.80

實施例19Example 19

取樣品11進行EDS成份分析做均勻度實驗，結果請見表4，銅鋯成份在樣品中的成份分布均勻。Take sample 11 for EDS component analysis for uniformity experiments. The results are shown in Table 4. The distribution of copper and zirconium components in the sample is uniform.

表4 取樣位置編號 Cu wt.% Zr wt.% 1 97.40 2.60 2 97.82 2.18 3 96.48 3.52 4 96.80 3.20 5 97.45 2.54 Table 4 Sampling position number Cu wt.% Zr wt.% 1 97.40 2.60 2 97.82 2.18 3 96.48 3.52 4 96.80 3.20 5 97.45 2.54

比較例2Comparative Example 2

取比較樣品1進行EDS成份分析做均勻度實驗，結果請見表5，銅鋯成份在樣品中的成份分布不均勻。Take comparative sample 1 for EDS composition analysis for uniformity experiments. The results are shown in Table 5. The distribution of the copper and zirconium components in the sample was uneven.

表5 取樣位置編號 Cu wt.% Zr wt.% 1 99.43 0.57 2 93.80 6.20 3 97.12 2.87 4 95.82 4.17 5 95.65 4.34 table 5 Sampling position number Cu wt.% Zr wt.% 1 99.43 0.57 2 93.80 6.20 3 97.12 2.87 4 95.82 4.17 5 95.65 4.34

請參考表2~表5，依據本發明以上之實施例結果，未經過球磨熱壓後熱處理及時效處理後的樣品，其均勻度遠低於經過球磨後的樣品。而當球磨時間小於20小時，經熱壓後熱處理及時效處理後也會存在有成份不均勻的問題。Please refer to Tables 2 to 5. According to the results of the above embodiments of the present invention, the uniformity of the samples that have not undergone ball mill hot-pressing heat treatment and aging treatment is much lower than that of the samples after ball milling. And when the ball milling time is less than 20 hours, there will also be a problem of uneven composition after heat pressing and heat treatment and aging treatment.

＜物性及機械性質測量＞＜ Measurement of physical and mechanical properties ＞

抗拉強度係由5頓靜態材料試驗機(英士特Instron公司製造)所測。The tensile strength was measured by a 5-ton static material tester (manufactured by Instron Corporation).

實施例20Example 20

取樣品9-11及比較樣品1進行電導率、硬度以及抗拉強度的測試，結果如表6。經球磨20小時以後並經熱壓熱處理及時效處理的樣品可得到高的抗拉強度及硬度。Samples 9-11 and comparative sample 1 were tested for electrical conductivity, hardness, and tensile strength. The results are shown in Table 6. After 20 hours of ball milling and hot pressing and aging treatment, the samples can obtain high tensile strength and hardness.

表6 比較樣品1 樣品9 樣品10 樣品11 球磨時間(hrs) 物理性質 0 10 20 30 電導率(104 s/cm) 2.9 9.7 11.0 11.8 硬度(HV) 64 114 131 144 抗拉強度(N/mm2) X 370 415 465 Table 6 Comparative Sample 1 Sample 9 Sample 10 Sample 11 Ball Milling Time (hrs) Physical Properties 0 10 20 30 Conductivity (10 4 s / cm) 2.9 9.7 11.0 11.8 Hardness (HV) 64 114 131 144 Tensile strength (N / mm 2 ) X 370 415 465

實施例21Example 21

取樣品11-13與樣品15-16進行熱傳導係數、硬度及抗拉強度的量測，結果如表7。隨著鋯含量之添加，因奈米析出物之析出量增加，合金材料之抗拉強度及硬度也隨之提高，此並未降低熱傳導的功能，其熱傳導係數仍在產業應用範圍之內。Take samples 11-13 and samples 15-16 to measure the thermal conductivity, hardness and tensile strength. The results are shown in Table 7. With the addition of zirconium content, due to the increase in the amount of precipitated nanometer precipitates, the tensile strength and hardness of the alloy materials also increase. This does not reduce the function of heat conduction, and its thermal conductivity coefficient is still within the industrial application range.

表7 Table 7

＜滾壓實驗＞＜ Rolling test ＞

實施例22Example 22

取樣品11進行滾壓得到片材的厚度為0.09 mm。Sample 11 was taken and rolled to obtain a sheet thickness of 0.09 mm.

實施例23Example 23

取樣品15進行滾壓得到片材的厚度為0.05 mm。Sample 15 was taken and rolled to obtain a sheet thickness of 0.05 mm.

由滾壓實驗及表7的結果可以了解，本發明之銅鋯合金散熱元件可以在厚度極小的情況下不但能有好的散熱效果，其抗拉強度亦有顯著的提高。It can be understood from the rolling test and the results in Table 7 that the copper-zirconium alloy heat-dissipating element of the present invention can not only have a good heat-dissipating effect, but also its tensile strength can be significantly improved in the case of extremely small thickness.

綜上所述，依據本發明所提出的銅鋯合金散熱元件的製造方法所得到的銅鋯合金，其硬度高，同時具有高導熱性、高抗拉強度與高延展性，利於加工作為散熱元件，當散熱元件小型化時仍不造成元件破損、變形或扭曲同時依然仍具良好的散熱功效。In summary, the copper-zirconium alloy obtained according to the method for manufacturing a copper-zirconium alloy heat-dissipating element proposed by the present invention has high hardness, high thermal conductivity, high tensile strength, and high ductility, which is favorable for processing as a heat-dissipating element. When the heat dissipation component is miniaturized, the component is not damaged, deformed or distorted while still having a good heat dissipation effect.

雖然本發明已以實施例揭露如上，然其並非用以限定本揭露，任何所屬技術領域中具有通常知識者，在不脫離本揭露的精神和範圍內，當可作些許的更動與潤飾，故本揭露的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above by way of example, it is not intended to limit the present disclosure. Any person with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present disclosure. The scope of protection of this disclosure shall be determined by the scope of the attached patent application.

100‧‧‧銅鋯合金散熱元件100‧‧‧ copper zirconium alloy heat dissipation element

102‧‧‧銅鋯合金殼體102‧‧‧copper zirconium alloy shell

102a‧‧‧內壁102a‧‧‧inner wall

104‧‧‧毛細結構層104‧‧‧ Capillary Structure Layer

S200、S202、S204、S206‧‧‧步驟S200, S202, S204, S206 ‧‧‧ steps

T1‧‧‧銅鋯合金散熱元件的厚度T1‧‧‧thickness of copper zirconium alloy heat sink

T2‧‧‧銅鋯合金殼體的厚度T2‧‧‧thickness of copper zirconium alloy shell

圖1是依照本發明的一實施例的一種銅鋯合金散熱元件的剖面示意圖。 圖2是依照本發明的另一實施例的一種銅鋯合金殼體的製造流程步驟圖。FIG. 1 is a schematic cross-sectional view of a copper-zirconium alloy heat sink according to an embodiment of the present invention. FIG. 2 is a manufacturing process step diagram of a copper-zirconium alloy shell according to another embodiment of the present invention.

Claims (8)

一種銅鋯合金散熱元件，包括：一銅鋯合金殼體；以及一毛細結構層，設於該銅鋯合金殼體的內壁，其中，該銅鋯合金殼體含有奈米銅鋯析出物，其析出物含有15-20原子百分比的鋯。 A copper-zirconium alloy heat dissipation element includes: a copper-zirconium alloy casing; and a capillary structure layer provided on an inner wall of the copper-zirconium alloy casing, wherein the copper-zirconium alloy casing contains nano-copper-zirconium precipitates, The precipitate contains 15-20 atomic percent zirconium. 如申請專利範圍第1項所述的銅鋯合金散熱元件，其中，該銅鋯合金殼體中鋯的添加量大於0.5wt%且小於5.0wt%。 The copper-zirconium alloy heat-dissipating element according to item 1 of the scope of the patent application, wherein the added amount of zirconium in the copper-zirconium alloy shell is greater than 0.5 wt% and less than 5.0 wt%. 如申請專利範圍第1項所述的銅鋯合金散熱元件，其中，該銅鋯合金散熱元件的厚度≦0.4mm。 The copper-zirconium alloy heat-dissipating element according to item 1 of the patent application scope, wherein the thickness of the copper-zirconium alloy heat-dissipating element is ≦ 0.4 mm. 如申請專利範圍第1-3項中任一項所述的銅鋯合金散熱元件，其中該銅鋯合金殼體之厚度≦0.1mm。 The copper-zirconium alloy heat-dissipating element according to any one of claims 1 to 3, wherein the thickness of the copper-zirconium alloy shell is ≦ 0.1 mm. 一種銅鋯合金殼體的製造方法，包括：混合銅粉與鋯粉並於氬氣氣氛中進行球磨至少20小時，以形成合金化粉末，其中該鋯粉的粒徑小於該銅粉的粒徑；對該合金化粉末進行真空熱壓成形，以形成一塊材；對該塊材進行熱處理和時效處理；及對該塊材進行滾壓處理。 A method for manufacturing a copper-zirconium alloy shell, comprising: mixing copper powder and zirconium powder and ball milling in an argon atmosphere for at least 20 hours to form an alloyed powder, wherein the particle diameter of the zirconium powder is smaller than the particle diameter of the copper powder. Performing vacuum hot-press forming on the alloyed powder to form a block; heat-treating and aging the block; and rolling-pressing the block. 如申請專利範圍第5項所述之製造方法，其中，該球磨的時間至少30小時。 The manufacturing method according to item 5 of the scope of patent application, wherein the ball milling time is at least 30 hours. 如申請專利範圍第5項所述之製造方法，其中該滾壓處理後該塊材之厚度≦0.1mm。 The manufacturing method according to item 5 of the scope of patent application, wherein the thickness of the block material after the rolling treatment is ≦ 0.1 mm. 如申請專利範圍第5項所述之製造方法，其中以該銅粉與該鋯粉的總重量計，該鋯粉的添加量大於0.5wt%且小於5.0wt%。The manufacturing method according to item 5 of the scope of the patent application, wherein the added amount of the zirconium powder is greater than 0.5 wt% and less than 5.0 wt% based on the total weight of the copper powder and the zirconium powder.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102575319A (en) * 2009-10-28 2012-07-11 住友轻金属工业株式会社 Copper alloy seamless pipe
CN106661671A (en) * 2015-05-22 2017-05-10 日本碍子株式会社 Copper alloy manufacturing method and copper alloy

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059033A (en) * 1983-09-13 1985-04-05 Sumitomo Light Metal Ind Ltd Material of pipe for heat pipe
JPH02104626A (en) * 1988-10-12 1990-04-17 Ishikawajima Harima Heavy Ind Co Ltd Manufacture of cu base alloy electronic material
JPH0711363A (en) * 1993-06-29 1995-01-13 Toshiba Corp High strength and high conductivity copper alloy member and its production
JP2002168576A (en) * 2000-12-06 2002-06-14 Showa Denko Kk Heat exchanging tube and its manufacturing method
JP2005133185A (en) * 2003-10-31 2005-05-26 Nippon Mining & Metals Co Ltd Deposition type copper alloy heat treatment method, deposition type copper alloy, and raw material thereof
JP2005314806A (en) * 2004-03-29 2005-11-10 Nano Gijutsu Kenkyusho:Kk Powder of nano crystalline copper metal and nano crystalline copper alloy having high hardness and high electric conductivity, bulk material of nano crystalline copper or copper alloy having high hardness, high strength, high electric conductivity and high toughness, and production method thereof
US20100294475A1 (en) * 2009-05-22 2010-11-25 General Electric Company High performance heat transfer device, methods of manufacture thereof and articles comprising the same
JP5451217B2 (en) * 2009-07-01 2014-03-26 株式会社Ｕａｃｊ Manufacturing method of internally grooved tube
CN103080347A (en) * 2010-08-27 2013-05-01 古河电气工业株式会社 Copper alloy sheet and method for producing same
CN104769140B (en) * 2012-11-01 2016-11-23 日本碍子株式会社 Copper alloy and manufacture method thereof
JP5380621B1 (en) * 2013-03-25 2014-01-08 Ｊｘ日鉱日石金属株式会社 Copper alloy sheet with excellent conductivity and stress relaxation properties
JP6230341B2 (en) * 2013-09-03 2017-11-15 Ｊｘ金属株式会社 Copper alloy sheet with excellent stress relaxation properties
JP5632063B1 (en) * 2013-11-19 2014-11-26 Jx日鉱日石金属株式会社 Copper alloy plate, high-current electronic component and heat dissipation electronic component including the same
JP6207539B2 (en) * 2015-02-04 2017-10-04 Ｊｘ金属株式会社 Copper alloy strip, and electronic component for high current and heat dissipation provided with the same
JP6065059B2 (en) * 2015-06-12 2017-01-25 三菱マテリアル株式会社 Copper porous body, copper porous composite member, method for producing copper porous body, and method for producing copper porous composite member

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102575319A (en) * 2009-10-28 2012-07-11 住友轻金属工业株式会社 Copper alloy seamless pipe
CN106661671A (en) * 2015-05-22 2017-05-10 日本碍子株式会社 Copper alloy manufacturing method and copper alloy

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