TWI649281B - Scribing head and scribing device - Google Patents

Scribing head and scribing device Download PDF

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Publication number
TWI649281B
TWI649281B TW104103596A TW104103596A TWI649281B TW I649281 B TWI649281 B TW I649281B TW 104103596 A TW104103596 A TW 104103596A TW 104103596 A TW104103596 A TW 104103596A TW I649281 B TWI649281 B TW I649281B
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Taiwan
Prior art keywords
scribing
cutter wheel
head
axis
substrate
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TW104103596A
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Chinese (zh)
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TW201544472A (en
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岡島康智
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日商三星鑽石工業股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

本發明提供一種可抑制刀輪之左右搖擺而使直進性提高之劃線頭、以及使用該劃線頭之劃線裝置。 The invention provides a scribing head capable of suppressing the left-to-right swing of a cutter wheel to improve straightness, and a scribing device using the scribing head.

本發明之劃線頭10具備刀輪11,該刀輪11一面壓抵基板W表面一面移動,而於基板W表面加工劃線,且劃線頭10包括:保持器13,其於下部具有刀輪11;保持器接頭15,其係經由該保持器13之安裝軸12,而可自由旋動地支持保持器13;以及支持構件16,其將該保持器接頭15可升降地保持;且設為如下構成:安裝軸12相對於垂直之線L1向劃線頭10之行進方向後方側傾斜,並且刀輪之輪軸11a設置於相對於使安裝軸12之軸心延長所得之線L2向劃線頭10之行進方向後方側偏移之位置。 The scribing head 10 of the present invention is provided with a cutter wheel 11 which moves while pressing against the surface of the substrate W, and performs scribing on the surface of the substrate W. The scribing head 10 includes a holder 13 having a cutter at the lower portion. A wheel 11; a retainer joint 15 that supports the retainer 13 freely and rotatably via a mounting shaft 12 of the retainer 13; and a support member 16 that liftably holds the retainer joint 15; and The structure is such that the mounting shaft 12 is inclined rearward with respect to the vertical line L1 toward the direction of travel of the scribing head 10, and the wheel shaft 11a of the cutter wheel is provided so as to be drawn with respect to the line L2 obtained by extending the axis of the mounting shaft 12. A position offset from the rear side of the head 10 in the traveling direction.

Description

劃線頭及劃線裝置 Scribing head and scribing device

本發明係關於一種具備用以於玻璃等脆性材料基板之表面加工劃線(分斷用之切割槽)之刀輪(亦稱作刻劃輪)之劃線頭以及使用該劃線頭之劃線裝置。 The present invention relates to a scribing head provided with a cutter wheel (also called a scribing wheel) for processing a scribing line (cutting groove for cutting) on a surface of a substrate such as glass and a brittle material, and a scribing head using the scribing head.线 装置。 Line device.

先前以來,眾所周知有一種劃線裝置,其係於脆性材料基板(以下簡稱為「基板」)之表面,利用刀輪沿著預定劃線而加工劃線(例如參照專利文獻1、專利文獻2)。 Conventionally, a scribing device is known, which is attached to the surface of a brittle material substrate (hereinafter referred to simply as a "substrate"), and uses a cutter wheel to process the scribing along a predetermined scribing line (for example, refer to Patent Documents 1 and 2). .

通常,刀輪被保持器支持,保持器安裝於劃線頭之保持器接頭。而且,先前多使用以發揮所謂「後傾效果」之方式構成之裝置,上述「後傾效果」係於使劃線頭行進時產生作用,欲使刀輪始終返回至該行進方向之線上(例如參照專利文獻3、專利文獻4)。 Generally, the cutter wheel is supported by a holder, which is mounted on the holder joint of the scribing head. In addition, a device configured to exert a so-called "backward tilting effect" has been frequently used. The "backward tilting effect" is used to make the scribing head travel, and the cutter wheel is always returned to the line of the travel direction (for example, (See Patent Literature 3 and Patent Literature 4).

圖3係表示具有上述「後傾效果」之先前之刀輪之安裝構造之說明圖。 FIG. 3 is an explanatory diagram showing a mounting structure of a conventional cutter wheel having the "backward tilting effect" described above.

於下端保持刀輪21之保持器22經由垂直之安裝軸23而可自由旋轉地安裝於劃線頭24之保持器接頭25。刀輪21之接地點處於相對於將垂直之安裝軸23之軸心延長所得之線L3向劃線頭24之行進方向後方側偏移距離S1之位置。因此,於使劃線頭24行進時,欲使追隨之刀輪21始終返回至行進方向之線上之力矩發揮作用,可獲得刀輪之直進性。 The holder 22 holding the cutter wheel 21 at the lower end is rotatably mounted on the holder joint 25 of the scribing head 24 via a vertical mounting shaft 23. The ground point of the cutter wheel 21 is at a position offset from the line L3 obtained by extending the axis of the vertical mounting shaft 23 to the rear side of the scribing head 24 by a distance S1. Therefore, when the scribing head 24 is travelling, it is possible to make the torque of the line following the cutter wheel 21 always return to the advancing direction, and the straightness of the cutter wheel can be obtained.

[先前技術文獻] [Prior technical literature] [專利文獻] [Patent Literature]

[專利文獻1]國際公開WO2007/063979號公報 [Patent Document 1] International Publication WO2007 / 063979

[專利文獻2]日本專利特開2011-218815號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2011-218815

[專利文獻3]日本專利特開平8-217476號公報 [Patent Document 3] Japanese Patent Laid-Open No. 8-217476

[專利文獻4]日本專利特開2010-260757號公報 [Patent Document 4] Japanese Patent Laid-Open No. 2010-260757

藉由上述「後傾效果」而實現之刀輪之直進性係根據偏移量而變化。再者,亦視刀輪之移動速度而變化,但於偏移量較大之情形時,雖然直進性提高,但相對於左右振動變得較弱,會容易自沿著劃線頭之行進方向之線上向外側搖擺。 The straightness of the cutter wheel achieved by the "backward tilting effect" described above varies according to the offset. Moreover, it also changes depending on the moving speed of the cutter wheel. However, when the offset is large, although the straightness is improved, it is weaker relative to the left and right vibrations, and it is easy to move along the direction of the scribing head. Swing to the outside.

另一方面,於自行車或摩托車等之把手軸與車輪中,組裝有後傾角及被稱為軌跡(亦稱作trail)之構成。所謂後傾角,如圖4所示,係指把手軸26之旋轉軸心L5相對於垂直之線L4之傾斜角β,所謂軌跡係指車輪27之接地點P3與使把手軸26之旋轉軸心L5延長至與上述接地點P3相同之水平線所得之地點P4之間之距離T1。把手軸26之傾斜越大,軌跡(T1)變得越長,直進性穩定,但把手操作變得遲鈍。 On the other hand, a handle shaft and a wheel of a bicycle, a motorcycle, or the like are assembled with a camber angle and a structure called a track. As shown in FIG. 4, the so-called backward tilt angle refers to the inclination angle β of the rotation axis L5 of the handle shaft 26 relative to the vertical line L4. The trajectory refers to the ground point P3 of the wheel 27 and the rotation axis of the handle shaft 26 L5 is extended to a distance T1 between points P4 obtained by the same horizontal line as the above-mentioned ground point P3. The greater the inclination of the handle shaft 26, the longer the trajectory (T1) and the straightness stability, but the handle operation becomes slow.

本發明之目的在於提供一種考慮到如上所述之方面,組合上述偏移與軌跡之構成,藉此可一面抑制刀輪向左右之搖擺,一面提高直進性之劃線頭、以及使用該劃線頭之劃線裝置。 An object of the present invention is to provide a scribing head that combines the above-mentioned offset and trajectory in consideration of the aspects described above, thereby suppressing the swaying of the cutter wheel to the left and right and improving straightness, and using the scribing head. Head scribing device.

為了解決上述課題,於本發明中,採用如下技術手段。即,本發明係一種劃線頭,其具備刀輪,該刀輪一面壓抵基板表面,一面相對地移動,藉此於基板表面加工劃線,上述劃線頭包括:保持器,其於下部具有刀輪;保持器接頭,其係經由設置於該保持器之上部之安裝軸,而以可繞該安裝軸自由旋動之方式支持上述保持器;以及支持構件,其將該保持器接頭可升降地保持;且設為如下構成:上述安裝 軸係相對於垂直之線向上述劃線頭之行進方向後方側傾斜而形成,上述刀輪之輪軸係設置於相對於使上述安裝軸之軸心延長所得之線向上述劃線頭之行進方向後方側偏移之位置。 In order to solve the above problems, in the present invention, the following technical means are adopted. That is, the present invention relates to a scribing head, which is provided with a cutter wheel. The cutter wheel moves relative to one another while pressing against the surface of the substrate, thereby processing the scribing on the surface of the substrate. A cutter wheel; a holder joint supporting the holder through a mounting shaft provided on the upper part of the holder so as to be freely rotatable about the mounting shaft; and a supporting member that can hold the holder joint Hold up and down; and set up as follows: the above installation The shaft system is formed obliquely to the rear side of the running direction of the scribing head with respect to a vertical line, and the wheel shaft of the cutter wheel is provided in the running direction of the scribing head with respect to a line obtained by extending the axis of the mounting shaft. Offset position on the rear side.

而且,本發明之特徵亦在於一種劃線裝置,其構成為:具備上述劃線頭,該劃線頭保持於機框之樑,使該劃線頭之刀輪一面壓抵於載置於平台上之基板表面,一面沿著基板表面相對地移動。 Moreover, the present invention is also characterized by a scribing device, which is structured with the scribing head described above, the scribing head is held on the beam of the machine frame, and the cutter wheel of the scribing head is pressed against the load on the platform. The upper surface of the substrate is relatively moved along the surface of the substrate.

於本發明中,較佳為上述刀輪之直徑為1~3mm,上述安裝軸之軸心與垂直之線之傾斜角為10~25°,上述刀輪之輪軸與使上述安裝軸之軸心延長所得之線之偏移量為1~4mm,上述刀輪相對於基板之接地點與使上述安裝軸之軸心延長所得之線與上述基板相交之地點之軌跡量成為2~5mm。 In the present invention, preferably, the diameter of the cutter wheel is 1 to 3 mm, the inclination angle of the axis of the mounting shaft and a vertical line is 10 to 25 °, and the axis of the cutter wheel and the axis of the mounting shaft The offset of the extended line is 1 to 4 mm. The trajectory of the ground point of the cutter wheel with respect to the substrate and the point where the line obtained by extending the axis of the mounting shaft and the substrate intersect is 2 to 5 mm.

根據本發明,藉由因使保持器之安裝軸傾斜而產生之軌跡,刀輪之直進性提高,並且傾斜之安裝軸與垂直地安裝之情況相比,旋轉之自由度受到限制,故直進性穩定,可有效地抑制因振動等而導致之搖擺。 According to the present invention, the straightness of the cutter wheel is improved by the trajectory generated by tilting the mounting shaft of the holder, and the tilted mounting shaft has a limited degree of freedom of rotation compared with the case of vertical mounting, so the straightness Stable, can effectively suppress the sway caused by vibration and so on.

進而,刀輪之輪軸設置於相對於使傾斜之安裝軸之軸心延長所得之線向劃線頭之行進方向後方側偏移之位置,故而可按照該偏移量,延長軌跡量,進而可提高直進性。 Further, the wheel axis of the cutter wheel is provided at a position offset from the line obtained by extending the axis of the inclined mounting axis toward the rear side of the scribing head in the direction of travel of the scribing head, so that the trajectory amount can be extended according to the offset amount, and further Improve straightness.

而且,刻劃時對刀輪之加壓與普通兩輪車之把手軸不同,係於刀輪之刀尖中心位置,垂直地施加,故而有可容易地進行刀輪之加壓控制之效果。 Moreover, the pressure on the cutter wheel during scoring is different from that of the handlebar shaft of an ordinary two-wheeled vehicle. It is tied at the center of the cutter tip of the cutter wheel and is applied vertically, so it has the effect of easily controlling the pressure of the cutter wheel.

1‧‧‧平台 1‧‧‧ platform

2‧‧‧軌道 2‧‧‧ track

3‧‧‧螺旋軸 3‧‧‧ screw shaft

4‧‧‧旋轉驅動部 4‧‧‧Rotary drive unit

5‧‧‧支持柱 5‧‧‧ support column

6‧‧‧樑 6‧‧‧Beam

7‧‧‧機框 7‧‧‧frame

8‧‧‧導件 8‧‧‧Guide

9‧‧‧馬達 9‧‧‧ Motor

10‧‧‧劃線頭 10‧‧‧ crossed head

11‧‧‧刀輪 11‧‧‧ knife wheel

11a‧‧‧輪軸 11a‧‧‧ Wheel

12‧‧‧安裝軸 12‧‧‧Mounting shaft

13‧‧‧保持器 13‧‧‧ retainer

14‧‧‧軸承 14‧‧‧bearing

15‧‧‧保持器接頭 15‧‧‧ retainer connector

16‧‧‧支持構件 16‧‧‧ supporting components

21‧‧‧刀輪 21‧‧‧knife wheel

22‧‧‧保持器 22‧‧‧ retainer

23‧‧‧安裝軸 23‧‧‧Mounting shaft

24‧‧‧劃線頭 24‧‧‧ crossed head

25‧‧‧保持器接頭 25‧‧‧Retainer connector

26‧‧‧把手軸 26‧‧‧Handle shaft

27‧‧‧車輪 27‧‧‧ Wheel

L1‧‧‧線 L1‧‧‧line

L2‧‧‧線 L2‧‧‧line

L3‧‧‧線 L3‧‧‧line

L4‧‧‧線 L4‧‧‧line

L5‧‧‧旋轉軸心 L5‧‧‧rotation axis

P1‧‧‧接地點 P1‧‧‧ ground point

P2‧‧‧地點 P2‧‧‧Place

P3‧‧‧接地點 P3‧‧‧ grounding point

P4‧‧‧地點 P4‧‧‧Place

S‧‧‧偏移間隔 S‧‧‧ Offset interval

S1‧‧‧距離 S1‧‧‧Distance

T‧‧‧軌跡 T‧‧‧Track

T1‧‧‧距離 T1‧‧‧distance

W‧‧‧基板 W‧‧‧ substrate

X‧‧‧方向 X‧‧‧ direction

α‧‧‧傾斜角(後傾角) α‧‧‧Tilt angle (backward tilt)

β‧‧‧傾斜角 β‧‧‧ tilt angle

圖1係表示本發明之劃線裝置之一例之概略性前視圖。 FIG. 1 is a schematic front view showing an example of a scribing device of the present invention.

圖2係本發明之劃線頭之前視圖。 Fig. 2 is a front view of the scribing head of the present invention.

圖3係表示先前之劃線頭之一例之前視圖。 Fig. 3 is a front view showing an example of a prior scribing head.

圖4係普通兩輪車中之後傾角與軌跡之說明圖。 FIG. 4 is an explanatory diagram of a backward inclination angle and a trajectory in an ordinary two-wheeled vehicle.

以下,基於圖1及圖2所示之實施例,對本發明之劃線頭以及具備該劃線頭之劃線裝置之詳情進行說明。 Hereinafter, details of the scribing head and the scribing device provided with the scribing head of the present invention will be described based on the embodiments shown in FIGS. 1 and 2.

圖1係表示本發明之劃線裝置之圖,具備載置並保持基板W之平台1。於平台1之表面設置有多個空氣抽吸孔(圖示省略),與設置於外部之真空泵等空氣抽吸源(圖示省略)連通。 FIG. 1 is a view showing a scribing device according to the present invention, and includes a stage 1 on which a substrate W is placed and held. A plurality of air suction holes (not shown) are provided on the surface of the platform 1 and communicate with an air suction source (not shown) such as a vacuum pump provided outside.

又,平台1可沿水平之軌道2於Y方向(圖1之前後方向)移動,藉由利用馬達(圖示省略)而旋轉之螺旋軸3被驅動。而且,平台1係藉由內置馬達之旋轉驅動部4而可於水平面內旋動。 In addition, the platform 1 can move along the horizontal track 2 in the Y direction (forward and backward directions in FIG. 1), and is driven by a screw shaft 3 rotated by a motor (not shown). In addition, the platform 1 is capable of rotating in a horizontal plane by a rotation driving unit 4 with a built-in motor.

具備夾著平台1而設置之兩側之支持柱5、5、以及於X方向上水平地延伸之樑(橫桿)6之機框7係以橫跨於平台1上之方式設置。於樑6,設置有於X方向水平地延伸之導件8,於該導件8,安裝有可藉由馬達9而於X方向上移動之本發明之劃線頭10。 A frame 7 having support columns 5 and 5 provided on both sides of the platform 1 and a beam (cross bar) 6 extending horizontally in the X direction is provided across the platform 1. The beam 6 is provided with a guide 8 extending horizontally in the X direction. The guide 8 is provided with a scribing head 10 of the present invention that can be moved in the X direction by a motor 9.

如圖2中詳細地表示般,劃線頭10包括:保持器13,其於下部具備刀輪11,並且於上部具備安裝軸12;保持器接頭15,其以可繞安裝軸12自由旋動之方式,經由安裝軸12及軸承14而支持保持器13;以及支持構件16,其將該保持器接頭15可升降地保持。 As shown in detail in FIG. 2, the scribing head 10 includes: a holder 13 provided with a cutter wheel 11 at the lower portion and a mounting shaft 12 at the upper portion; a holder joint 15 which can freely rotate around the mounting shaft 12 In this manner, the holder 13 is supported via the mounting shaft 12 and the bearing 14; and the support member 16 holds the holder joint 15 so as to be able to be raised and lowered.

保持器接頭15可藉由設置於支持構件16之液壓缸等升降機構(圖示省略),而與保持器13一同升降。而且,安裝於保持器13之刀輪11可使用直徑為1~3mm之刀輪。 The holder joint 15 can be raised and lowered together with the holder 13 by a lifting mechanism (not shown) such as a hydraulic cylinder provided on the support member 16. The cutter wheel 11 mounted on the holder 13 may be a cutter wheel having a diameter of 1 to 3 mm.

保持器13之安裝軸12係相對於垂直之線L1向劃線頭10之行進方向(圖2之箭頭方向)之後方側傾斜角度α而形成。該傾斜角(後傾角)α較佳為設為10~25°。 The mounting shaft 12 of the holder 13 is formed with an inclination angle α to the rear side of the running direction of the scribing head 10 (the direction of the arrow in FIG. 2) with respect to the vertical line L1. The tilt angle (backward tilt angle) α is preferably set to 10 to 25 °.

又,由於安裝軸12之傾斜,於刀輪11向基板W之接地點P1與將安裝軸12之軸心延長所得之線L2與基板W相交之地點P2之間,產生軌跡 T。該軌跡T之長度較佳為設定為2~5mm。 In addition, due to the inclination of the mounting shaft 12, a trajectory occurs between the ground point P1 of the cutter wheel 11 toward the substrate W and the point P2 where the line L2 obtained by extending the axis of the mounting shaft 12 and the substrate W intersect. T. The length of the track T is preferably set to 2 to 5 mm.

進而,刀輪11之輪軸11a設置於相對於使傾斜之安裝軸12之軸心延長所得之線L2向劃線頭10之行進方向後方側偏移間隔S之位置。該偏移量、即間隔S較佳為設為1~4mm。 Further, the wheel shaft 11 a of the cutter wheel 11 is provided at a position shifted by an interval S from the line L2 obtained by extending the axis of the inclined mounting shaft 12 toward the rear side in the traveling direction of the scribe head 10. This offset, that is, the interval S, is preferably set to 1 to 4 mm.

於本實施例中,於使用直徑為2mm之刀輪,且將安裝軸12之傾斜角α設為17°,將偏移間隔S設為2.5mm時,軌跡T之長度成為2.92mm。因此,軌跡T形成為長於使安裝軸12垂直之情形時之偏移量2.5mm。 In this embodiment, when a cutter wheel with a diameter of 2 mm is used, the inclination angle α of the mounting shaft 12 is set to 17 °, and the offset interval S is set to 2.5 mm, the length of the track T becomes 2.92 mm. Therefore, the trajectory T is formed to be longer than the offset amount when the mounting shaft 12 is made perpendicular by 2.5 mm.

上述劃線裝置係一面將刀輪11壓抵於基板W之表面,一面使劃線頭10朝圖2之箭頭方向上移動,藉此於基板W之表面加工劃線。 The above-mentioned scribing device presses the cutter wheel 11 against the surface of the substrate W, and moves the scribing head 10 in the direction of the arrow in FIG. 2 to process the scribing on the surface of the substrate W.

於該加工時,藉由因使安裝軸12傾斜而產生之軌跡T,刀輪11之直進性提高,並且傾斜之安裝軸12與垂直之情況相比,旋轉之自由度受到限制,故直進性穩定,可有效地抑制因振動等而導致之搖擺。 During this processing, the straightness of the cutter wheel 11 is improved by the trajectory T generated by tilting the mounting shaft 12, and the degree of freedom of rotation is restricted compared to the case where the mounting shaft 12 is tilted, so the straightness Stable, can effectively suppress the sway caused by vibration and so on.

進而,刀輪11之輪軸11a設置於相對於使傾斜之安裝軸12之軸心延長所得之線L2向劃線頭10之行進方向後方側偏移間隔S之位置,故而可以相當於該間隔S之量,延長上述軌跡T,從而可進一步提高直進性。 Further, the wheel shaft 11a of the cutter wheel 11 is provided at a position shifted from the line L2 obtained by extending the axis of the inclined mounting shaft 12 to the rear side of the scribing head 10 by an interval S, so it may correspond to the interval S By extending the above-mentioned trajectory T, the straightness can be further improved.

而且,刻劃時對刀輪11之加壓與開頭部分所述之兩輪車之把手軸不同,於刀輪11之刀尖中心位置垂直地施加,故而可容易地進行加壓控制。 In addition, the pressure applied to the cutter wheel 11 during scoring is different from the handle shaft of the two-wheeled vehicle described in the beginning, and is applied perpendicularly to the center position of the cutter tip of the cutter wheel 11, so that the pressurization can be easily controlled.

以上,對本發明之代表性實施例進行了說明,但本發明未必僅特定於上述實施例構造,可於達成其目的,而且不脫離權利要求書之範圍內,適當進行修正、變更。 The representative embodiments of the present invention have been described above. However, the present invention is not necessarily limited to the structure of the above-mentioned embodiments, and can achieve its purpose without departing from the scope of the claims.

[工業上之可利用性] [Industrial availability]

本發明可應用於在玻璃等脆性材料基板之表面加工劃線之劃線頭以及使用該劃線頭之劃線裝置。 The invention can be applied to a scribing head for processing a scribing line on a surface of a brittle material substrate such as glass and a scribing device using the scribing head.

Claims (3)

一種劃線頭,其具備刀輪,該刀輪一面垂直地壓抵基板表面,一面相對地移動,藉此於基板表面加工劃線,上述劃線頭包括:保持器,其於下部具有刀輪;保持器接頭,其係經由設置於該保持器之上部之安裝軸,而以可繞該安裝軸自由旋動之方式,支持上述保持器;以及支持構件,其將該保持器接頭可升降地保持;且上述安裝軸係相對於垂直之線向上述劃線頭之行進方向後方側傾斜而形成,上述刀輪之輪軸設置於相對於使上述安裝軸之軸心延長所得之線向上述劃線頭之行進方向後方側偏移之位置。A scribing head is provided with a cutter wheel. The cutter wheel is vertically pressed against the surface of the substrate and moves relatively to thereby process the scribing on the surface of the substrate. The scribing head includes: a holder having a cutter wheel at the lower portion. A retainer joint supporting the retainer in a manner capable of freely rotating around the mounting axis via a mounting shaft provided on the upper portion of the retainer; and a support member that lifts and lowers the retainer joint Hold; and the mounting shaft is formed obliquely to the rear side of the direction of travel of the scribing head with respect to a vertical line, and the wheel shaft of the cutter wheel is provided to the scribing line with respect to a line obtained by extending the axis of the mounting shaft A position offset from the rear side of the head in the direction of travel. 如請求項1之劃線頭,其中上述刀輪之直徑為1~3mm,上述安裝軸之軸心與垂直之線之傾斜角為10~25°,上述刀輪之輪軸與使上述安裝軸之軸心延長所得之線之偏移量為1~4mm,上述刀輪相對於基板之接地點與使上述安裝軸之軸心延長所得之線與上述基板相交之地點之軌跡量為2~5mm。For example, the scribe head of claim 1, wherein the diameter of the cutter wheel is 1 to 3 mm, the inclination angle of the axis of the mounting shaft and the vertical line is 10 to 25 °, and the axis of the cutter wheel and the axis of the mounting shaft The offset of the line obtained by extending the axis is 1 to 4 mm, and the track of the ground point of the cutter wheel relative to the substrate and the point where the line obtained by extending the axis of the mounting axis intersects the substrate is 2 to 5 mm. 一種劃線裝置,其構成為:具備如請求項1或2之劃線頭,該劃線頭保持於機框之樑,使該劃線頭之刀輪一面垂直地壓抵於載置於平台上之基板表面,一面沿著基板表面相對地移動。A scribing device is provided with a scribing head as claimed in claim 1 or 2, the scribing head is held on a frame of the machine frame, and the cutter wheel of the scribing head is vertically pressed against the load on the platform. The upper surface of the substrate is relatively moved along the surface of the substrate.
TW104103596A 2014-05-30 2015-02-03 Scribing head and scribing device TWI649281B (en)

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