TWI640409B - Micro resistance inspection device and inspection method thereof - Google Patents
Micro resistance inspection device and inspection method thereof Download PDFInfo
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- TWI640409B TWI640409B TW106125959A TW106125959A TWI640409B TW I640409 B TWI640409 B TW I640409B TW 106125959 A TW106125959 A TW 106125959A TW 106125959 A TW106125959 A TW 106125959A TW I640409 B TWI640409 B TW I640409B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
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- G01R1/06—Measuring leads; Measuring probes
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Abstract
一種微型電阻檢測裝置及檢測方法，該檢測裝置包含一基座、一機械手臂、一檢測座、一驅動機構、一探針座組及數個顯微影像裝置。該機械手臂裝設於該基座上。該檢測座連接該機械手臂，並可受該機械手臂驅動產生位移。該探針座組裝設於該檢測座底部，並包括兩相對設置的探針座及設在該兩探針座上的一對探針，至少一探針座連接該驅動機構，並受該驅動機構控制而改變該兩探針座之間距。該數個顯微影像裝置用以辨識一待測的微型電阻載板的微型電阻的相對位置及印刷偏移角度，使該機械手臂據以調整該對探針的檢測位置。 A miniature resistance detection device and a detection method. The detection device includes a base, a robot arm, a detection base, a driving mechanism, a probe base group, and several microscopic imaging devices. The robot arm is mounted on the base. The detection base is connected to the robot arm and can be driven to generate displacement by the robot arm. The probe base is assembled and arranged on the bottom of the detection base, and includes two opposite probe bases and a pair of probes arranged on the two probe bases. At least one probe base is connected to the driving mechanism and is driven by the driving mechanism. The mechanism controls to change the distance between the two probe bases. The plurality of microscopic imaging devices are used to identify the relative position and the printing offset angle of the micro-resistance of a micro-resistance carrier board to be measured, so that the robot arm adjusts the detection position of the pair of probes accordingly.
Description
本發明是關於一種檢測裝置，特別是關於一種微型電阻檢測裝置及檢測方法。 The invention relates to a detection device, in particular to a miniature resistance detection device and a detection method.
隨著科技進步，輕薄短小及多功能的電子產品，如智慧型手機、平板電腦、射頻收發模組、微型硬碟、記憶卡等，其電路板皆需要使用微型電阻來實現高密度組裝的目標。 With the advancement of technology, thin, short, and multifunctional electronic products, such as smart phones, tablets, RF transceiver modules, micro hard disks, memory cards, etc., need to use micro-resistors to achieve the goal of high-density assembly. .
微型電阻的尺寸視需求而有所不同，例如0201型微型電阻，其尺寸為0.6mm×0.3mm，屬於尺寸較大的微型電阻，適合需要小型厚膜晶片電阻的應用；01005型微型電阻，其尺寸為0.4mm×0.2mm，其端電極寬度僅0.05mm，適合需要極小型厚膜晶片電阻的應用；0075微型電阻，其尺寸為0.3mm×0.15mm，較01005微型電阻又更減少44%的面積，更適合需要極小型厚膜晶片電阻的應用。 The size of micro-resistors varies according to requirements. For example, 0201 type micro-resistors, whose size is 0.6mm × 0.3mm, belongs to larger size micro-resistors, which are suitable for applications that require small thick film chip resistors. 01005 micro-resistors, which The size is 0.4mm × 0.2mm, and the width of the terminal electrode is only 0.05mm, which is suitable for applications that require ultra-thin thick-film chip resistors. The 0075 miniature resistor has a size of 0.3mm × 0.15mm, which is 44% less than the 01005 miniature resistor. The area is more suitable for applications that require extremely small thick-film chip resistors.
在現有技術中，通常會通過印刷技術形成多個微型電阻(如數百個以上)於一基板構成一微型電阻載板，再利用雷射畫線將微型電阻載板以折條、折粒形式分離成單個微型電阻。因應品管需求，製造商需要先對微型電阻載板上的微型電阻進行電阻 值檢測。然而，以習用技術針對0201型電阻的檢測為例，需要藉由CCD輔助品管人員肉眼檢測電阻值。惟，該習用技術檢測方法，其檢測結果誤差值大，且無法精準接觸到電阻位置，導致檢測良率及效率皆不佳；且檢測設備的探針僅適用於檢測單一尺寸的微型電阻，若欲檢測其他尺寸的微型電阻，就必須一再通過手動調整探針位置才能進行檢測，費時費力。 In the prior art, a plurality of micro-resistors (such as hundreds or more) are usually formed by a printing technique to form a micro-resistance carrier board on a substrate, and then the micro-resistance carrier board is folded into a strip or a chip form by using a laser line. Separated into a single miniature resistor. To meet the needs of quality control, manufacturers need to first resistor the miniature resistor on the miniature resistor carrier board. Value detection. However, taking conventional technology for the detection of 0201 type resistors as an example, it is necessary to use a CCD to assist the quality control personnel to detect the resistance value with the naked eye. However, the conventional technology detection method has a large error value in the detection result and cannot accurately contact the resistance position, resulting in poor detection yield and efficiency; and the probe of the detection device is only suitable for detecting a single-size miniature resistor. If you want to test other sizes of micro-resistors, you must repeatedly adjust the position of the probe manually to perform the test, which is time-consuming and labor-intensive.
故，有必要提供一種微型電阻檢測裝置及檢測方法，以解決習用技術所存在的問題。 Therefore, it is necessary to provide a micro-resistance detection device and detection method to solve the problems existing in conventional technology.
本發明之目的在於提供一種微型電阻檢測裝置，能夠提升探針接觸電阻之端電極的精確程度，減少微型電阻之量測誤差，並可自動配合不同尺寸的微型電阻進行檢測，提高檢測良率與效率。 The purpose of the present invention is to provide a micro-resistance detection device, which can improve the accuracy of the terminal electrode of the probe contact resistance, reduce the measurement error of the micro-resistance, and can automatically cooperate with micro-resistors of different sizes for detection, improving the detection yield and effectiveness.
本發明之另一目的在於提供一種微型電阻檢測方法，能夠在自動化地進行電阻檢測時，提供旋轉校正，提升探針接觸電阻之端電極的精確程度，減少微型電阻之量測誤差，提高檢測良率與效率。 Another object of the present invention is to provide a micro-resistance detection method, which can provide rotation correction during automatic resistance detection, improve the accuracy of the electrode at the end of the probe contact resistance, reduce the measurement error of the micro-resistance, and improve the detection quality. Rate and efficiency.
為達成前述目的，本發明提供之微型電阻檢測裝置，包含：一基座；一機械手臂，裝設於該基座上；一檢測座，連接該機械手臂，並可受該機械手臂驅動產生位移；一驅動機構，裝設於該檢測座底部；一探針座組，裝設於該檢測座底部，並包括兩相對設置的探針座及一對探針，其中至少一探針座連接該驅 動機構，並受該驅動機構控制進行直線運動而改變該兩探針座之間距；該對探針分別設在該兩探針座上而彼此相對；以及數個顯微影像裝置，用以辨識一待測的微型電阻載板上的微型電阻的相對位置及印刷偏移角度，使該機械手臂據以調整該對探針的檢測位置。 In order to achieve the foregoing object, the micro-resistance detection device provided by the present invention includes: a base; a robot arm mounted on the base; a detection base connected to the robot arm and capable of being driven by the robot arm to generate displacement A drive mechanism installed at the bottom of the detection base; a probe base group installed at the bottom of the detection base, and comprising two oppositely disposed probe bases and a pair of probes, at least one of which is connected to the probe base drive The moving mechanism is controlled by the driving mechanism to perform linear motion to change the distance between the two probe bases; the pair of probes are respectively disposed on the two probe bases and face each other; and several microscopic imaging devices are used for identification The relative position of the micro-resistor on the micro-resistance carrier board to be measured and the printing offset angle make the robotic arm adjust the detection position of the pair of probes accordingly.
在本發明一實施例中，該數個顯微影像裝置包含：一第一顯微影像裝置，裝設於該檢測座，其拍攝角度與該第二馬達之轉軸平行；一第二顯微影像裝置，裝設於該檢測座，其拍攝角度與該第二馬達之轉軸共軸；及一第三顯微影像裝置，裝設於該檢測座，其拍攝角度與該第二馬達之轉軸成一角度。 In an embodiment of the present invention, the plurality of microscopic imaging devices include: a first microscopic imaging device installed on the detection base, and a shooting angle thereof is parallel to a rotation axis of the second motor; a second microscopic image A device mounted on the detection base, the shooting angle of which is coaxial with the rotation axis of the second motor; and a third microscopic imaging device, mounted on the detection base, whose shooting angle is at an angle with the rotation axis of the second motor .
在本發明一實施例中，該驅動機構由至少一步進馬達組成；該探針座組的至少一探針座係連接該驅動機構的轉軸，並可通過該驅動機構的轉軸旋轉而沿著該轉軸呈直線運動而改變該兩探針座之間距。 In an embodiment of the present invention, the driving mechanism is composed of at least one stepping motor; at least one probe seat of the probe seat group is connected to the rotating shaft of the driving mechanism, and can be rotated along the rotating shaft of the driving mechanism through the rotating shaft of the driving mechanism. The rotating shaft moves linearly to change the distance between the two probe bases.
在本發明一實施例中，該機械手臂兩端分別設有一第一馬達及一第二馬達，該機械手臂以該第一馬達之轉軸為軸心相對於該基座旋轉；該檢測座係連接該第二馬達，並以該第二馬達之轉軸為軸心相對於該機械手臂旋轉。 In an embodiment of the present invention, a first motor and a second motor are respectively provided at both ends of the robot arm, and the robot arm rotates with respect to the base around an axis of rotation of the first motor; the detection base is connected to The second motor rotates relative to the robot arm with a rotation axis of the second motor as an axis.
在本發明一實施例中，該第一顯微影像裝置設有一環型光源；該第二顯微影像裝置，其拍攝中心與該對探針之對稱中心相同；該第三顯微影像裝置，其拍攝中心與該對探針之對稱中心相同。 In an embodiment of the present invention, the first microscopic imaging device is provided with a ring-shaped light source; the second microscopic imaging device has the same shooting center as the symmetrical center of the pair of probes; and the third microscopic imaging device, Its shooting center is the same as the symmetrical center of the pair of probes.
在本發明一實施例中，該第三顯微影像裝置，其拍攝角度與該第二馬達之轉軸成45度。 In an embodiment of the present invention, a photographing angle of the third microscopic imaging device is 45 degrees with a rotation axis of the second motor.
在本發明一實施例中，該微型電阻檢測裝置另包含一乘載座，具一方形凹陷，用以乘載微型電阻。 In an embodiment of the present invention, the micro-resistance detection device further includes a multi-loading seat with a square recess for multi-loading the micro-resistance.
在本發明一實施例中，該乘載座設有數個真空吸孔，該數個真空吸孔所圍繞出之方型面積，小於該方形凹陷之面積。 In an embodiment of the present invention, the loading seat is provided with a plurality of vacuum suction holes, and a square area surrounded by the plurality of vacuum suction holes is smaller than an area of the square depression.
本發明還提供一種微型電阻檢測方法，包含下列步驟：S1：辨識一微型電阻載板上至少三點位置的微型電阻；S2：依據該至少三點位置的微型電阻的相對位置計算出全部微型電阻的相對位置及印刷偏移角度；S3：依據全部微型電阻的相對位置及印刷偏移角度調整一對探針的檢測位置，使該對探針偏移來配合該印刷偏移角度；S4：依據全部微型電阻的相對位置，驅動該對探針下壓選擇性接觸其中一微型電阻的端電極，以檢測其電阻值；S5：在未能檢測到電阻值的情況下，進一步辨識當前待測之微型電阻的位置，並依據辨識結果校正該對探針的檢測位置；S6：持續步驟S4，直到一定數量的微型電阻檢測完畢後，完成該微型電阻載板的微型電阻檢測。 The invention also provides a micro-resistance detection method, comprising the following steps: S1: identifying micro-resistors at at least three points on a micro-resistance carrier board; S2: calculating all micro-resistors according to the relative positions of the micro-resistors at at least three points Relative position and printing offset angle; S3: adjust the detection position of a pair of probes according to the relative positions and printing offset angles of all micro-resistors, so that the pair of probes are offset to match the printing offset angle; S4: basis The relative positions of all micro-resistors drive the pair of probes to selectively contact the terminal electrodes of one of the micro-resistors in order to detect the resistance value; S5: If the resistance value is not detected, further identify the current to be measured The positions of the micro-resistors are corrected according to the identification results; S6: Step S4 is continued until the micro-resistance detection of the micro-resistance carrier board is completed after a certain number of micro-resistors are detected.
在本發明一實施例中，該至少三點位置的微型電阻為位在該微型電阻載板三個角落位置的微型電阻。 In an embodiment of the present invention, the micro-resistors at the at least three points are micro-resistors at three corner positions of the micro-resistance carrier board.
由上述可知，本發明之微型電阻檢測裝置及檢測方法可辨識出微型電阻的相對位置或因印刷誤差導致的旋轉角度， 進而調整對探針的相對水平或垂直位置，以提升微型電阻檢測之自動化及準確度。 From the above, it can be known that the micro-resistance detection device and detection method of the present invention can identify the relative position of the micro-resistance or the rotation angle caused by printing errors. Then adjust the relative horizontal or vertical position of the probe to improve the automation and accuracy of micro-resistance detection.
1‧‧‧基座 1‧‧‧ base
2‧‧‧機械手臂 2‧‧‧ robotic arm
21‧‧‧第一馬達 21‧‧‧First Motor
22‧‧‧第二馬達 22‧‧‧Second motor
23‧‧‧驅動機構 23‧‧‧Drive mechanism
3‧‧‧檢測座 3‧‧‧Test Block
4‧‧‧探針座組 4‧‧‧ Probe Block Set
40‧‧‧探針座 40‧‧‧ Probe Block
41‧‧‧探針 41‧‧‧ Probe
51‧‧‧第一顯微影像裝置 51‧‧‧The first microscopic imaging device
52‧‧‧第二顯微影像裝置 52‧‧‧Second Microscopic Imaging Device
53‧‧‧第三顯微影像裝置 53‧‧‧Third Microscopic Imaging Device
6‧‧‧環型光源 6‧‧‧ ring light source
7‧‧‧乘載座 7‧‧‧carriage
71‧‧‧方形凹陷 71‧‧‧square depression
72‧‧‧真空吸孔 72‧‧‧Vacuum suction hole
9‧‧‧微型電阻載板 9‧‧‧ miniature resistance carrier board
90‧‧‧基板 90‧‧‧ substrate
91‧‧‧微型電阻 91‧‧‧Miniature resistor
S1~S6‧‧‧步驟 Steps S1 ~ S6‧‧‧‧
第1圖是本發明一較佳實施例之微型電阻檢測裝置的第一角度立體圖。 FIG. 1 is a first perspective view of a micro-resistance detection device according to a preferred embodiment of the present invention.
第2圖是本發明一較佳實施例之微型電阻檢測裝置的第二角度立體圖。 FIG. 2 is a second perspective view of a micro-resistance detection device according to a preferred embodiment of the present invention.
第3圖是本發明一較佳實施例之微型電阻檢測裝置的局部放大立體圖。 FIG. 3 is a partially enlarged perspective view of a micro-resistance detection device according to a preferred embodiment of the present invention.
第4圖是本發明一較佳實施例之微型電阻檢測裝置的局部放大立體圖。 FIG. 4 is a partially enlarged perspective view of a micro-resistance detection device according to a preferred embodiment of the present invention.
第5圖是本發明一較佳實施例之微型電阻檢測方法的步驟流程圖。 FIG. 5 is a flowchart of steps of a micro-resistance detection method according to a preferred embodiment of the present invention.
請參照第1圖、第2圖、第3圖及第4圖所示，係繪示本發明一較佳實施例之微型電阻檢測裝置。該微型電阻檢測裝置主要包含一基座1、一機械手臂2、一檢測座3、至少一驅動機構23、一探針座組4及數個顯微影像裝置(51、52、53)，可用於檢測一微型電阻載板9上的微型電阻。如第4圖所示，該微型電阻載板9包含一基板90及印刷設於在基板90上的多個微型電阻91，該多個微型電阻91排列成矩陣。 Please refer to FIG. 1, FIG. 2, FIG. 3, and FIG. 4, which illustrate a micro-resistance detection device according to a preferred embodiment of the present invention. The miniature resistance detection device mainly includes a base 1, a robot arm 2, a detection base 3, at least a driving mechanism 23, a probe base group 4, and several microscopic imaging devices (51, 52, 53). For detecting a micro-resistor on a micro-resistance carrier board 9. As shown in FIG. 4, the micro-resistance carrier board 9 includes a substrate 90 and a plurality of micro-resistors 91 printed on the substrate 90. The micro-resistors 91 are arranged in a matrix.
如第1圖及第2圖所示，該機械手臂2裝設於該基座1 上，在本實施例中，該機械手臂2兩端分別設有一第一馬達21及一第二馬達22，該機械手臂2可以該第一馬達21之轉軸為軸心相對於該基座1旋轉，例如順時針或逆時針旋轉。 As shown in Figures 1 and 2, the robot arm 2 is mounted on the base 1 Above, in this embodiment, a first motor 21 and a second motor 22 are respectively provided at both ends of the robot arm 2, and the robot arm 2 can rotate relative to the base 1 by using the rotation axis of the first motor 21 as an axis. , Such as clockwise or counterclockwise.
該檢測座3係連接該機械手臂2，並可受該機械手臂2驅動產生位移。在本實施例中，該檢測座3係連接該機械手臂2的第二馬達22，即該機械手臂2旋轉軸端之另一端，並可以該第二馬達22之轉軸為軸心相對於該機械手臂2旋轉。通過該機械手臂2的第一馬達21及第二馬達22的驅動，該檢測座3即可產生垂直及水平位移。 The detection base 3 is connected to the robot arm 2 and can be driven by the robot arm 2 to generate displacement. In this embodiment, the detection base 3 is connected to the second motor 22 of the robot arm 2, that is, the other end of the rotation axis end of the robot arm 2, and the rotation axis of the second motor 22 may be the axis relative to the machine. Arm 2 rotates. By driving the first motor 21 and the second motor 22 of the robot arm 2, the detection base 3 can generate vertical and horizontal displacements.
該驅動機構23係裝設於該檢測座3底部，在本實施例中，該驅動機構23可由至少一步進馬達與滑台組成，其定位的重複精度例如是在10微米以下。 The driving mechanism 23 is installed at the bottom of the detection base 3. In this embodiment, the driving mechanism 23 may be composed of at least one stepping motor and a slide table, and the repeatability of its positioning is, for example, less than 10 microns.
該探針座組4係裝設於該檢測座3的底部，並包括兩相對設置的探針座40及一對探針41，其中至少一探針座40連接該驅動機構23，並受該驅動機構23控制進行直線運動而改變該兩探針座40之間距。該對探針41分別設在該兩探針座40上而彼此相對。該對探針41之間距，較佳可設定為欲檢測之微型電阻90之長度。該對探針41用以分別接觸該微型電阻90的兩端電極，以檢測其電阻值。在一實施例中，該驅動機構23可包含兩個步進馬達，分別連接該兩相對設置的探針座40，使得該兩探針座40皆可受該驅動機構23控制進行直線運動而改變其相對距離，以因應不同尺寸的微型電阻。 The probe base group 4 is installed at the bottom of the detection base 3, and includes two oppositely arranged probe bases 40 and a pair of probes 41. At least one probe base 40 is connected to the driving mechanism 23 and is subject to the The driving mechanism 23 controls the linear movement to change the distance between the two probe bases 40. The pair of probes 41 are respectively disposed on the two probe bases 40 and face each other. The distance between the pair of probes 41 is preferably set to the length of the micro-resistance 90 to be detected. The pair of probes 41 are respectively used to contact the two electrodes of the micro-resistor 90 to detect the resistance value. In an embodiment, the driving mechanism 23 may include two stepping motors, which are respectively connected to the two oppositely arranged probe holders 40, so that both of the probe holders 40 can be controlled by the driving mechanism 23 to perform a linear movement and change. The relative distance is to correspond to the miniature resistors of different sizes.
該數個顯微影像裝置(51、52、53)包含一第一顯微影像裝置51、一第二顯微影像裝置52及一第三顯微影像裝置53。該數個顯微影像裝置(51、52、53)可透過具有例如感光耦合元件(CCD)的攝像鏡頭來實現。 The plurality of microscopic imaging devices (51, 52, 53) include a first microscopic imaging device 51, a second microscopic imaging device 52, and a third microscopic imaging device 53. The plurality of microscopic imaging devices (51, 52, 53) can be realized through an imaging lens having, for example, a photosensitive coupling element (CCD).
該第一顯微影像裝置51裝設於該檢測座3，其拍攝角度與該第二馬達22之轉軸平行。透過該第一顯微影像裝置51辨識該微型電阻載板9的至少三個角落的微型電阻91，本發明實施例之微型電阻檢測裝置可以判斷出該些印刷於基板90上的所有微型電阻91的相對位置及印刷偏移角度，進而控制該機械手臂2調整該探針座組4的方位，使該對探針41得以對準該微型電阻載板9上待測的微型電阻91的兩端電極。該第一顯微影像裝置51另可設有一環型光源6，以加強第一顯微影像裝置51之辨識能力。 The first microscopic imaging device 51 is mounted on the detection base 3, and its shooting angle is parallel to the rotation axis of the second motor 22. The micro-resistances 91 of at least three corners of the micro-resistance carrier 9 are identified through the first micro-imaging device 51. The micro-resistance detection device of the embodiment of the present invention can determine all the micro-resistances 91 printed on the substrate 90. Relative position and printing offset angle, and then control the robot arm 2 to adjust the orientation of the probe holder group 4 so that the pair of probes 41 can be aligned with the two ends of the micro-resistance 91 to be measured on the micro-resistance carrier 9. electrode. The first microscopic imaging device 51 may be further provided with a ring-shaped light source 6 to enhance the identification capability of the first microscopic imaging device 51.
該第二顯微影像裝置52裝設於該檢測座3，其拍攝角度與該第二馬達22之轉軸共軸，可用以輔助辨識該對探針41之水平相對位置，提供該機械手臂2據以微調該對探針41的水平相對位置。該第二顯微影像裝置52之拍攝中心，可與該對探針41之對稱中心相同，用以加強第二顯微影像裝置之辨識準確度。 The second microscopic imaging device 52 is mounted on the detection base 3, and its shooting angle is coaxial with the rotation axis of the second motor 22, which can be used to help identify the horizontal relative position of the pair of probes 41 and provide the robot arm 2 data To finely adjust the horizontal relative positions of the pair of probes 41. The photographing center of the second microscopic imaging device 52 may be the same as the symmetrical center of the pair of probes 41 to enhance the recognition accuracy of the second microscopic imaging device.
該第三顯微影像裝置53裝設於該檢測座3，其拍攝角度與該第二馬達22之轉軸成一角度，可用以輔助辨識該對探針41之垂直相對位置，提供該機械手臂2據以微調該對探針41之垂直相對位置。該第三顯微影像裝置53之拍攝中心可與該對探針41之對稱中心相同，用以加強第三顯微影像裝置之辨識準確。較佳地， 該第三顯微影像裝置53之拍攝角度與該第二馬達22之轉軸成45度。 The third microscopic imaging device 53 is mounted on the detection base 3, and its shooting angle is at an angle with the rotation axis of the second motor 22, which can be used to assist in identifying the vertical relative position of the pair of probes 41 and provide the robot arm 2 data To finely adjust the vertical relative positions of the pair of probes 41. The photographing center of the third microscopic imaging device 53 may be the same as the symmetrical center of the pair of probes 41 to enhance the identification accuracy of the third microscopic imaging device. Preferably, The shooting angle of the third microscopic imaging device 53 is 45 degrees with the rotation axis of the second motor 22.
在本實施方式中，該微型電阻檢測裝置另包含一乘載座7，具一方形凹陷71，用以乘載該微型電阻載板9。該乘載座7可設有數個真空吸孔72，該些真空吸孔72可通過在下方設置吸引裝置來吸走空氣，以形成吸引力來吸附住所乘載之微型電阻載板9，加強微型電阻載板9之穩定度。較佳地，該數個真空吸孔72所圍繞出之方型面積，小於該方形凹陷71之面積。藉此，本發明實施例之微型電阻檢測裝置可以能夠同時適用不同尺寸的微型電阻載板9之電阻值檢測。該方形凹陷71之面積可選擇與較大尺寸的微型電阻載板之面積相同。該數個真空吸孔72所圍繞出之方型面積，可選擇較小尺寸的微型電阻載板之面積相同。 In the present embodiment, the micro-resistance detection device further includes a multi-carrier base 7 with a square recess 71 for carrying the micro-resistance carrier plate 9. The carrier 7 can be provided with a plurality of vacuum suction holes 72. The vacuum suction holes 72 can suck air by setting a suction device below to form an attractive force to attract the miniature resistance carrier plate 9 to be carried, and strengthen the micro The stability of the resistance carrier 9. Preferably, the area of the square shape surrounded by the vacuum suction holes 72 is smaller than the area of the square depression 71. Therefore, the micro-resistance detection device of the embodiment of the present invention can be applied to the resistance value detection of micro-resistance carrier plates 9 of different sizes at the same time. The area of the square recess 71 can be selected to be the same as that of the micro-resistance carrier board with a larger size. The area of the rectangular shape surrounded by the plurality of vacuum suction holes 72 may be the same as the area of the micro-resistance carrier board with a smaller size.
進行檢測時，一待測的微型電阻載板9係放置於乘載座7上，接著通過該數個顯微影像裝置(51、52、53)辨識判斷出微型電阻載板9的微型電阻91的相對位置及印刷偏移角度，該機械手臂2與該驅動機構23接著依據辨識結果調整該對探針41的位置，以配合微型電阻9的偏移角度；接著，該機械手臂2便依照所判斷出微型電阻載板9上微型電阻91的相對位置，驅動該對探針41逐次下壓接觸微型電阻91的端電極，以進行電阻值的檢測。若驅動該對探針41下壓後未能測得任何電阻值，則進一步控制該第三顯微影像裝置53對微型電阻91的相對位置進行第二次辨識，進而據以校正該對探針41的位置。藉此，本發明之微型電阻檢測裝置將可有 效地提升微型電阻檢測之準確度。 During the test, a micro-resistance carrier board 9 to be tested is placed on the carrier 7, and then the micro-resistance carrier 9 of the micro-resistance carrier board 9 is identified through the microscopic imaging devices (51, 52, 53). Relative position and printing offset angle, the robot arm 2 and the driving mechanism 23 then adjust the positions of the pair of probes 41 according to the recognition result to match the offset angle of the micro-resistor 9; The relative position of the micro-resistance 91 on the micro-resistance carrier 9 is determined, and the pair of probes 41 are driven to successively press down the terminal electrodes of the micro-resistance 91 to detect the resistance value. If no resistance value is measured after the pair of probes 41 is driven down, the third micro-imaging device 53 is further controlled to perform a second identification of the relative position of the micro-resistor 91, and then the pair of probes is calibrated accordingly. 41's location. With this, the micro-resistance detection device of the present invention will have Effectively improve the accuracy of micro-resistance detection.
請參考第5圖所示，本發明還提供一種微型電阻檢測方法，係通過上述的微型電阻檢測裝置實現，其包括下列步驟： Please refer to FIG. 5, the present invention also provides a micro-resistance detection method, which is implemented by the aforementioned micro-resistance detection device, which includes the following steps:
S1：辨識一微型電阻載板上至少三點位置的微型電阻；較佳地，該至少三點位置的微型電阻為位在三個角落位置的微型電阻。該辨識手段由該微型電阻檢測裝置的數個顯微影像裝置(51、52、53)執行之。 S1: identify the micro-resistors at at least three points on a micro-resistance carrier; preferably, the micro-resistors at the three-point positions are micro-resistors at three corner positions. The identification means is executed by a plurality of microscopic imaging devices (51, 52, 53) of the miniature resistance detection device.
S2：依據該至少三點位置的微型電阻的相對位置計算出全部微型電阻的相對位置及印刷偏移角度。 S2: Calculate the relative positions of all micro-resistors and the printing offset angle based on the relative positions of the micro-resistors at the at least three points.
S3：依據全部微型電阻的相對位置及印刷偏移角度調整一對探針的位置，使該對探針偏移來配合該印刷偏移角度。 S3: Adjust the position of a pair of probes according to the relative positions of all micro-resistors and the printing offset angle, and offset the pair of probes to match the printing offset angle.
S4：依據全部微型電阻的相對位置，驅動該對探針下壓選擇性接觸其中一微型電阻的端電極，以檢測其電阻值。 S4: According to the relative positions of all the micro-resistors, the pair of probes are driven to selectively contact the terminal electrodes of one of the micro-resistors in order to detect the resistance value.
S5：在未能檢測到電阻值的情況下，進一步辨識當前待測之微型電阻的位置，並依據辨識結果校正該對探針的檢測位置。具體而言，該微型電阻檢測裝置係控制該第三顯微影像裝置53對待測之微型電阻91的相對位置進行第二次影像辨識，以對該對探針的檢測位置進行二次校正。 S5: In the case that the resistance value cannot be detected, further identify the position of the micro-resistor to be measured, and correct the detection position of the pair of probes according to the identification result. Specifically, the micro-resistance detection device controls the third micro-imaging device 53 to perform a second image identification of the relative position of the micro-resistance 91 to be measured, so as to perform a secondary correction on the detection position of the pair of probes.
S6：持續步驟S4，直到一定數量的微型電阻檢測完畢後，完成該微型電阻載板的微型電阻檢測。 S6: Continue to step S4. After a certain number of micro-resistors are tested, the micro-resistance detection of the micro-resistance carrier board is completed.
綜上所述，本發明之微型電阻檢測裝置及檢測方法可辨識出微型電阻的相對位置或因印刷誤差導致的偏移角度，進 而調整對探針的相對水平或垂直位置，以提升微型電阻檢測之自動化及準確度。並且，該檢測方法可在探針未能檢測到電阻值時，可通過第二次影像辨識來進行探針檢測位置的二次校正。再者，該微型電阻檢測裝置可通過該連接探針座的驅動機構自動調整探針的間距，使得探針能夠配合檢測不同尺寸的微型電阻，大幅增加該微型電阻檢測裝置的應用範圍。 In summary, the micro-resistance detection device and detection method of the present invention can identify the relative position of the micro-resistance or the offset angle caused by printing errors. And adjust the relative horizontal or vertical position of the probe to improve the automation and accuracy of micro-resistance detection. In addition, the detection method can perform a secondary correction of the detection position of the probe through the second image recognition when the probe fails to detect the resistance value. In addition, the micro-resistance detection device can automatically adjust the distance between the probes through the driving mechanism connected to the probe base, so that the probe can cooperate to detect micro-resistors of different sizes, greatly increasing the application range of the micro-resistance detection device.
雖然本發明已以較佳實施例揭露，然其並非用以限制本發明，任何熟習此項技藝之人士，在不脫離本發明之精神和範圍內，當可作各種更動與修飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. The scope of protection shall be determined by the scope of the attached patent application.
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