CN109324229A - Micro resistor detection device and detection method - Google Patents
Micro resistor detection device and detection method Download PDFInfo
- Publication number
- CN109324229A CN109324229A CN201810457783.4A CN201810457783A CN109324229A CN 109324229 A CN109324229 A CN 109324229A CN 201810457783 A CN201810457783 A CN 201810457783A CN 109324229 A CN109324229 A CN 109324229A
- Authority
- CN
- China
- Prior art keywords
- miniature
- probe
- resistance
- micro
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 72
- 239000000523 sample Substances 0.000 claims abstract description 83
- 238000003384 imaging method Methods 0.000 claims abstract description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 238000007639 printing Methods 0.000 claims abstract description 18
- 238000006073 displacement reaction Methods 0.000 claims abstract description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 230000008859 change Effects 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 description 5
- 238000012937 correction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
A micro-resistance detection device and a detection method are provided, the detection device comprises a base, a mechanical arm, a detection seat, a driving mechanism, a probe seat group and a plurality of micro-imaging devices. The mechanical arm is arranged on the base. The detecting seat is connected with the mechanical arm and can be driven by the mechanical arm to generate displacement. The probe seat is assembled at the bottom of the detection seat and comprises two oppositely arranged probe seats and a pair of probes arranged on the two probe seats, and at least one probe seat is connected with the driving mechanism and is controlled by the driving mechanism to change the distance between the two probe seats. The plurality of microscopic imaging devices are used for identifying the relative position and the printing offset angle of the micro resistor of a micro resistor carrier plate to be detected, so that the mechanical arm can adjust the detection position of the pair of probes according to the relative position and the printing offset angle.
Description
Technical field
The present invention relates to a kind of detection devices, especially with regard to a kind of miniature resistor detecting device and detection method.
Background technique
With scientific and technological progress, light and short and multi-functional electronic product, such as smart phone, tablet computer, radio-frequency receiving-transmitting
Module, miniature hard disk drive, memory card etc., circuit board all need to realize the mesh of High Density Packaging using miniature resistance
Mark.
The size view demand of miniature resistance and different, such as the miniature resistance of 0201 type, having a size of 0.6mm ×
0.3mm belongs to larger-size miniature resistance, is suitble to need the application of small-sized thick film chip resistance；The miniature resistance of 01005 type,
Having a size of 0.4mm × 0.2mm, termination electrode width only 0.05mm is suitble to need the application of minimal type thick film chip resistance for it；
0075 miniature resistance more reduces by 44% area again compared with 01005 miniature resistance, is more suitable for needing having a size of 0.3mm × 0.15mm
Want the application of minimal type thick film chip resistance.
In the prior art, it will usually which multiple miniature resistance (such as hundreds of more than) are formed in a substrate by printing technology
A miniature resistance support plate is constituted, recycles laser line-drawing to be separated into miniature resistance support plate with folding bar, folding particle shape formula single miniature
Resistance.In response to quality control requirements, manufacturer needs first to carry out resistance value detection to the miniature resistance on miniature resistance support plate.So
And by taking detection of the known technology for 0201 type resistance as an example, it needs via CCD quality of assistance controllers naked eyes detection resistance
Value.But the prior art detection method, testing result error amount is big, and can not precisely touch resistance position, causes to examine
It surveys yield and efficiency is all bad；And the probe of detection device is only applicable to the miniature resistance of detection single size, if being intended to detect it
The miniature resistance of his size just must can be carried out detection by manually adjusting probe location just again and again, time-consuming and laborious.
Therefore, it is necessary to a kind of miniature resistor detecting device and detection method be provided, to solve present in the prior art
Problem.
Summary of the invention
Purpose of the present invention is to provide a kind of miniature resistor detecting devices, are able to ascend the termination electrode of contact resistance of probe
Levels of precision, reduce the error in measurement of miniature resistance, and various sizes of miniature resistance can be cooperated to be detected automatically, improve
Detect yield and efficiency.
Another object of the present invention is to provide a kind of miniature resistor detection methods, can automatically carry out resistance inspection
When survey, rotation correction is provided, promotes the levels of precision of the termination electrode of contact resistance of probe, reduces the error in measurement of miniature resistance,
Improve detection yield and efficiency.
To achieve the aforementioned purpose, the miniature resistor detecting device of present invention offer includes: a pedestal；One mechanical arm, dress
On the pedestal；One detection seat connects the mechanical arm, and can be driven by the mechanical arm and generate displacement；One driving mechanism,
It is installed in the detection seat bottom；One probe base group is installed in the detection seat bottom, and the probe base being oppositely arranged including two and one
To probe, a wherein at least probe base connects the driving mechanism, and is moved along a straight line by the driving mechanisms control and change this
The spacing of two probe bases；This is respectively provided on two probe base probe and relative to each other；And multiple micro-imaging devices, it uses
To recognize relative position and the printing deviation angle of the miniature resistance on a miniature resistance support plate to be measured, make the mechanical arm evidence
To adjust the detection position to probe.
In an embodiment of the present invention, multiple micro-imaging device includes: one first micro-imaging device is installed in this
Seat is detected, shooting angle is parallel with the shaft of second motor；One second micro-imaging device is installed in the detection seat,
Shooting angle is coaxial with the shaft of second motor；And a third micro-imaging device, it is installed in the detection seat, shooting angle
It is at an angle with the shaft of second motor.
In an embodiment of the present invention, which is made of an at least stepper motor；At least the one of the probe base group
Probe base connects the shaft of the driving mechanism, and can be rotated by the shaft of the driving mechanism and linearly be moved along the shaft
And change the spacing of two probe base.
In an embodiment of the present invention, which is respectively equipped with one first motor and one second motor, the machine
Tool arm is rotated using the shaft of first motor as axle center relative to the pedestal；The detection seat connects second motor, and with this
The shaft of second motor is that axle center is rotated relative to the mechanical arm.
In an embodiment of the present invention, which is equipped with a ring-shaped light source；Second micro-imaging dress
It sets, shooting center is identical as the symmetrical centre to probe；The third micro-imaging device, shoot center and this to probe
Symmetrical centre it is identical.
In an embodiment of the present invention, the third micro-imaging device, the shaft of shooting angle and second motor at
45 degree.
In an embodiment of the present invention, which additionally comprises a bearing seat, has a rectangular recess, to
Bearing micro resistance.
In an embodiment of the present invention, which is equipped with multiple vacuum sucking holes, and multiple vacuum sucking holes surround out it
Square area is less than the area of the rectangular recess.
The present invention also provides a kind of miniature resistor detection methods, comprise the steps of S1: on one miniature resistance support plate of identification
The miniature resistance of at least 3 positions；S2: the relative position of the miniature resistance according at least 3 positions calculates all micro-
The relative position of type resistance and printing deviation angle；S3: according to all relative positions of miniature resistance and printing deviation angle tune
The detection position of whole a pair of probe, makes this to probe offset to cooperate the printing deviation angle；S4: according to all miniature resistance
Relative position drives this to push the termination electrode of a selective exposure wherein miniature resistance to probe, to detect its resistance value；S5:
In the case where failing to detect resistance value, the position of current miniature resistance to be measured is further recognized, and according to identification result
Correct the detection position to probe；S6: continuation steps S4, after a certain number of miniature resistance detections, completing should
The miniature resistance detection of miniature resistance support plate.
In an embodiment of the present invention, the miniature resistance of at least 3 positions is position at three angles of miniature resistance support plate
The miniature resistance that dropping place is set.
It can be seen from the above, the miniature resistor detecting device and detection method of the present invention can be identified the opposite position of miniature resistance
It sets or because rotating angle caused by printing error, and then adjusts the relative level to probe or upright position, to promote micro electric
Hinder the automation and accuracy of detection.
Detailed description of the invention
Fig. 1 is the first angle perspective view of the miniature resistor detecting device of a preferred embodiment of the present invention.
Fig. 2 is the second angle perspective view of the miniature resistor detecting device of a preferred embodiment of the present invention.
Fig. 3 is the enlarged partial isometric view of the miniature resistor detecting device of a preferred embodiment of the present invention.
Fig. 4 is the enlarged partial isometric view of the miniature resistor detecting device of a preferred embodiment of the present invention.
Fig. 5 is the step flow chart of the miniature resistor detection method of a preferred embodiment of the present invention.
Symbol description
Pedestal 1
Mechanical arm 2
First motor 21
Second motor 22
Driving mechanism 23
Detect seat 3
Probe base group 4
Probe base 40
Probe 41
First micro-imaging device 51
Second micro-imaging device 52
Third micro-imaging device 53
Ring-shaped light source 6
Bearing seat 7
Rectangular recess 71
Vacuum sucking holes 72
Miniature resistance support plate 9
Substrate 90
Miniature resistance 91
Step S1~S6.
Specific embodiment
It please refers to shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 4, which show the miniature resistance detection of a preferred embodiment of the present invention dresses
It sets.The miniature resistor detecting device mainly include a pedestal 1, a mechanical arm 2, one detection seat 3, an at least driving mechanism 23,
One probe base group 4 and multiple micro-imaging devices (51,52,53), can be used for detecting the micro electric on a miniature resistance support plate 9
Resistance.As shown in figure 4, the miniature resistance support plate 9 includes that a substrate 90 and printing are set to multiple miniature resistance 91 on substrate 90,
Multiple miniature resistance 91 is arranged in matrix.
As shown in Figures 1 and 2, which is installed on the pedestal 1, in the present embodiment, 2 liang of the mechanical arm
End is respectively equipped with one first motor 21 and one second motor 22, the mechanical arm 2 can the shaft of first motor 21 be axle center
It is rotated relative to the pedestal 1, such as clockwise or counterclockwise.
The detection seat 3 connects the mechanical arm 2, and can be driven by the mechanical arm 2 and generate displacement.In the present embodiment,
The detection seat 3 connects the second motor 22 of the mechanical arm 2, the i.e. other end of the mechanical arm 2 rotation shaft end, and can this
The shaft of two motor 22 is that axle center is rotated relative to the mechanical arm 2.Pass through the first motor 21 of the mechanical arm 2 and the second horse
Up to 22 driving, which can produce vertical and horizontal displacement.
The driving mechanism 23 is installed in 3 bottom of detection seat, and in the present embodiment, which can be by an at least step
It is formed into motor and slide unit, the repeatable accuracy of positioning is, for example, at 10 microns or less.
4 system of probe base group is installed in the bottom of the detection seat 3, and the probe base 40 being oppositely arranged including two and a pair of of spy
Needle 41, wherein at least a probe base 40 connect the driving mechanism 23, and are moved along a straight line and changed by the driving mechanism 23 control
Become the spacing of two probe base 40.This is respectively provided on two probe base 40 probe 41 and relative to each other.This to probe 41 it
Spacing preferably may be set to the length of miniature resistance 90 for being intended to detect.This is to probe 41 to contact the miniature resistance 90 respectively
Two end electrodes, to detect its resistance value.In one embodiment, which may include two stepper motors, connect respectively
Connect two probe base 40 being oppositely arranged so that two probe base 40 all can by the driving mechanism 23 control be moved along a straight line and
Change its relative distance, in response to various sizes of miniature resistance.
Multiple micro-imaging device (51,52,53) includes one first micro-imaging device 51, one second micro-imaging dress
Set 52 and a third micro-imaging device 53.Multiple micro-imaging device (51,52,53), which can pass through, has for example photosensitive coupling
The pick-up lens of element (CCD) is realized.
The first micro-imaging device 51 is installed in the detection seat 3, and shooting angle and the shaft of second motor 22 are flat
Row.The miniature resistance 91 at least three corners of the miniature resistance support plate 9, this hair are recognized through the first micro-imaging device 51
The miniature resistor detecting device of bright embodiment may determine that the opposite of all miniature resistance 91 that those are printed on substrate 90
Position and printing deviation angle, and then the orientation that the mechanical arm 2 adjusts the probe base group 4 is controlled, enable this to probe 41
It is directed at the two end electrodes of miniature resistance 91 to be measured on the miniature resistance support plate 9.The first micro-imaging device 51 can be separately equipped with
One ring-shaped light source 6, to reinforce the identification capability of the first micro-imaging device 51.
The second micro-imaging device 52 is installed in the detection seat 3, and shooting angle and the shaft of second motor 22 are total
Axis can be used to the auxiliary identification horizontal relative position to probe 41, provide the mechanical arm 2 and finely tune this accordingly to probe 41
Horizontal relative position.The shooting center of the second micro-imaging device 52, can be identical as the symmetrical centre to probe 41, to
Reinforce the identification precision of the second micro-imaging device.
The third micro-imaging device 53 is installed in the detection seat 3, the shaft of shooting angle and second motor 22 at
One angle can be used to the auxiliary identification vertically opposite position to probe 41, provide the mechanical arm 2 and finely tune this accordingly to probe
41 vertically opposite position.The shooting center of the third micro-imaging device 53 can be identical as the symmetrical centre to probe 41,
Identification to reinforce third micro-imaging device is accurate.Preferably, the shooting angle of the third micro-imaging device 53 with should
The shaft of second motor 22 is at 45 degree.
In the present embodiment, which additionally comprises a bearing seat 7, has a rectangular recess 71, to
Carry the miniature resistance support plate 9.The bearing seat 7 can be equipped with multiple vacuum sucking holes 72, those vacuum sucking holes 72 can be by lower section
Suction device is set to siphon away air, adsorbs the miniature resistance support plate 9 of residence carrying to form attraction, reinforces miniature resistance
The stability of support plate 9.Preferably, the square area that multiple vacuum sucking holes 72 surround out, is less than the face of the rectangular recess 71
Product.The miniature resistor detecting device of the embodiment of the present invention can be applicable in simultaneously various sizes of miniature resistance support plate 9 as a result,
Resistance value detection.The area of the rectangular recess 71 may be selected identical as the area of miniature resistance support plate of larger size.This is more
The square area that a vacuum sucking holes 72 surround out, the area that the miniature resistance support plate of smaller size may be selected are identical.
When being detected, a miniature resistance support plate 9 to be measured is placed on bearing seat 7, then passes through multiple micro- shadow
Relative position and the printing deviation angle of the miniature resistance 91 of miniature resistance support plate 9 are judged in picture device (51,52,53) identification,
The mechanical arm 2 and the driving mechanism 23 then adjust the position to probe 41 according to identification result, to cooperate miniature resistance 9
Deviation angle；Then, the mechanical arm 2 is just according to the relative position of miniature resistance 91 on judged miniature resistance support plate 9,
This is driven gradually to descend the termination electrode of press contacts micro electric resistance 91 to probe 41, to carry out the detection of resistance value.If driving this to spy
Needle 41 fails to measure any resistance value after pushing, then further controls the third micro-imaging device 53 to the phase of miniature resistance 91
Second is carried out to position to recognize, and then corrects the position to probe 41 accordingly.The miniature resistance detection dress of the present invention as a result,
Set the accuracy that can effectively promote miniature resistance detection.
It please refers to shown in Fig. 5, the present invention also provides a kind of miniature resistor detection methods, pass through above-mentioned miniature resistance detection
Device is realized comprising the following steps:
S1: the miniature resistance of at least 3 positions on one miniature resistance support plate of identification；Preferably, at least 3 positions
Miniature resistance is the miniature resistance positioned at three corner locations.The identification means are by the multiple micro- of the miniature resistor detecting device
Device for image (51,52,53) executes it.
S2: the relative position of the miniature resistance according at least 3 positions calculates the relative position of all miniature resistance
And printing deviation angle.
S3: the position of a pair of of probe is adjusted according to all relative positions of miniature resistance and printing deviation angle, keeps this right
Probe offset cooperates the printing deviation angle.
S4: according to the relative position of all miniature resistance, this is driven to push a selective exposure wherein micro electric to probe
The termination electrode of resistance, to detect its resistance value.
S5: in the case where failing to detect resistance value, the position of the further current miniature resistance to be measured of identification, and according to
The detection position to probe is corrected according to identification result.Specifically, the miniature resistor detecting device controls the micro- shadow of the third
As device 53 carries out second of image identification to the relative position of miniature resistance 91 to be measured, to the detection position to probe
Carry out secondary correction.
S6: continuation steps S4, after a certain number of miniature resistance detections, complete the micro- of the miniature resistance support plate
Type resistance detection.
In conclusion the miniature resistor detecting device and detection method of the present invention can be identified the relative position of miniature resistance
Or because of deviation angle caused by printing error, and then the relative level to probe or upright position are adjusted, to promote miniature resistance
The automation and accuracy of detection.Also, the detection method can pass through second of shadow when probe fails to detect resistance value
The secondary correction of probe in detecting position is carried out as identification.Furthermore the miniature resistor detecting device can pass through the linking probe seat
Driving mechanism adjust automatically probe spacing, enable the probe to cooperation and detect various sizes of miniature resistance, be significantly increased
The application range of the miniature resistor detecting device.
Although the present invention is disclosed with preferred embodiment, so it is not intended to limiting the invention, any to be familiar with this skill
Personage, without departing from the spirit and scope of the invention, when various changes and modification, therefore the protection scope of the present invention can be made
After view subject to attached as defined in claim.
Claims (10)
1. a kind of miniature resistor detecting device, includes:
One pedestal；
One mechanical arm is installed on the pedestal；
One detection seat connects the mechanical arm, and can be driven by the mechanical arm and generate displacement；
One driving mechanism is installed in the detection seat bottom；
One probe base group is installed in the detection seat bottom, and the probe base and a pair of of probe being oppositely arranged including two, wherein at least
One probe base connects the driving mechanism, and is moved along a straight line and changed the spacing of two probe base by the driving mechanisms control；
This is respectively provided on two probe base probe and relative to each other；And
Multiple micro-imaging devices, to recognize relative position and the printing of the miniature resistance on a miniature resistance support plate to be measured
Deviation angle, the detection position for making the mechanical arm adjust this accordingly to probe.
2. miniature resistor detecting device as described in claim 1, which is characterized in that the multiple micro-imaging device includes:
One first micro-imaging device, is installed in the detection seat, and shooting angle is parallel with the shaft of second motor；
One second micro-imaging device, is installed in the detection seat, and shooting angle is coaxial with the shaft of second motor；And
One third micro-imaging device, is installed in the detection seat, and shooting angle and the shaft of second motor are at an angle.
3. miniature resistor detecting device as described in claim 1, which is characterized in that the driving mechanism is by an at least stepper motor
Composition；An at least probe base for the probe base group connects the shaft of the driving mechanism, and can be revolved by the shaft of the driving mechanism
Then the spacing of two probe base is linearly moved and changed along the shaft.
4. miniature resistor detecting device as described in claim 1, which is characterized in that the mechanical arm both ends are respectively equipped with one the
One motor and one second motor, the mechanical arm are rotated using the shaft of first motor as axle center relative to the pedestal；The detection
Seat connects second motor, and rotates using the shaft of second motor as axle center relative to the mechanical arm.
5. miniature resistor detecting device as claimed in claim 2, which is characterized in that the first micro-imaging device is equipped with a ring
Type light source；The second micro-imaging device, shooting center are identical as the symmetrical centre to probe；Third micro-imaging dress
It sets, shooting center is identical as the symmetrical centre to probe.
6. miniature resistor detecting device as claimed in claim 2, which is characterized in that the third micro-imaging device, shooting
Angle and the shaft of second motor are at 45 degree.
7. miniature resistor detecting device as described in claim 1, which is characterized in that also include a bearing seat, tool one is rectangular recessed
It falls into, to bearing micro resistance.
8. miniature resistor detecting device as described in claim 1, which is characterized in that the bearing seat is equipped with multiple vacuum sucking holes,
The square area that multiple vacuum sucking holes surround out is less than the area of the rectangular recess.
9. a kind of miniature resistor detection method, comprises the steps of
S1: the miniature resistance of at least 3 positions on one miniature resistance support plate of identification；
S2: the relative position of the miniature resistance according at least 3 positions calculates all relative position of miniature resistance and print
Brush deviation angle；
S3: the detection position of a pair of of probe is adjusted according to all relative positions of miniature resistance and printing deviation angle, keeps this right
Probe offset cooperates the printing deviation angle；
S4: according to the relative position of all miniature resistance, this is driven to push a selective exposure wherein miniature resistance to probe
Termination electrode, to detect its resistance value；
S5: in the case where failing to detect resistance value, the position of current miniature resistance to be measured is further recognized, and foundation is distinguished
Know the calibration of the output results detection position to probe；
S6: continuation steps S4, after a certain number of miniature resistance detections, complete the micro electric of the miniature resistance support plate
Resistance detection.
10. miniature resistor detection method as claimed in claim 9, which is characterized in that the miniature resistance of at least 3 positions
For positioned at the miniature resistance of three corner locations of miniature resistance support plate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106125959A TWI640409B (en) | 2017-08-01 | 2017-08-01 | Micro resistance inspection device and inspection method thereof |
| TW106125959 | 2017-08-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109324229A true CN109324229A (en) | 2019-02-12 |
| CN109324229B CN109324229B (en) | 2020-09-29 |
Family
ID=65034093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810457783.4A Active CN109324229B (en) | 2017-08-01 | 2018-05-14 | Micro resistor detection device and detection method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109324229B (en) |
| TW (1) | TWI640409B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI697658B (en) * | 2019-03-05 | 2020-07-01 | 漢民科技股份有限公司 | Complex inspection system of image |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101424870A (en) * | 2007-10-31 | 2009-05-06 | 鸿富锦精密工业（深圳）有限公司 | Lens seat testing device and method |
| CN102768013A (en) * | 2011-05-06 | 2012-11-07 | 姚福来 | Alignment method and device for pressing and touching circuit detection point of substrate by probe |
| TW201247374A (en) * | 2011-05-18 | 2012-12-01 | Hon Hai Prec Ind Co Ltd | Robot arm and detection device having same |
| CN103278691A (en) * | 2013-05-24 | 2013-09-04 | 中利腾晖光伏科技有限公司 | Resistance measuring device of solar cell |
| JP2013228288A (en) * | 2012-04-26 | 2013-11-07 | Hioki Ee Corp | Measuring apparatus |
| CN205301431U (en) * | 2015-11-25 | 2016-06-08 | 亿和精密工业（苏州）有限公司 | Little resistance measurement equipment |
| CN205353203U (en) * | 2015-11-02 | 2016-06-29 | 天津卡锐智科技发展有限公司 | Miniature resistance automatic testing of cell -phone machine |
| TW201723514A (en) * | 2011-07-26 | 2017-07-01 | 精工愛普生股份有限公司 | Electronic component carrying device and electronic component examination device |
-
2017
- 2017-08-01 TW TW106125959A patent/TWI640409B/en active
-
2018
- 2018-05-14 CN CN201810457783.4A patent/CN109324229B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101424870A (en) * | 2007-10-31 | 2009-05-06 | 鸿富锦精密工业（深圳）有限公司 | Lens seat testing device and method |
| CN102768013A (en) * | 2011-05-06 | 2012-11-07 | 姚福来 | Alignment method and device for pressing and touching circuit detection point of substrate by probe |
| TW201247374A (en) * | 2011-05-18 | 2012-12-01 | Hon Hai Prec Ind Co Ltd | Robot arm and detection device having same |
| TW201723514A (en) * | 2011-07-26 | 2017-07-01 | 精工愛普生股份有限公司 | Electronic component carrying device and electronic component examination device |
| JP2013228288A (en) * | 2012-04-26 | 2013-11-07 | Hioki Ee Corp | Measuring apparatus |
| CN103278691A (en) * | 2013-05-24 | 2013-09-04 | 中利腾晖光伏科技有限公司 | Resistance measuring device of solar cell |
| CN205353203U (en) * | 2015-11-02 | 2016-06-29 | 天津卡锐智科技发展有限公司 | Miniature resistance automatic testing of cell -phone machine |
| CN205301431U (en) * | 2015-11-25 | 2016-06-08 | 亿和精密工业（苏州）有限公司 | Little resistance measurement equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI697658B (en) * | 2019-03-05 | 2020-07-01 | 漢民科技股份有限公司 | Complex inspection system of image |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201910081A (en) | 2019-03-16 |
| TWI640409B (en) | 2018-11-11 |
| CN109324229B (en) | 2020-09-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107771024B (en) | Apparatus and method for transferring electronic device | |
| TWI512875B (en) | System and method for adjusting the position and orientation of a feed arm associated with a wafer handling robot | |
| TWI548878B (en) | Probe device | |
| JP2019526796A (en) | Offline vision support method and apparatus for vision alignment of integrated circuit devices | |
| CN111742399B (en) | Contact precision assurance method, contact precision assurance mechanism, and inspection apparatus | |
| KR20060059786A (en) | Probe card, method of inspecting semiconductor device using probe card, and semiconductor apparatus inspected with the method | |
| WO2007148422A1 (en) | Calibration method employed in electronic component test system | |
| US10297043B2 (en) | Detector for detecting position of IC device and method for the same | |
| KR20170065499A (en) | Electrical test system with vision-guided alignment | |
| JP2017193147A (en) | Transfer device for electronic device and transfer method for electronic device | |
| CN104965167A (en) | Automatic circuit board detection device | |
| TWI787250B (en) | Carriers for electronic component testing devices | |
| CN114441942A (en) | Flying probe testing method, system, equipment and storage medium for PCB | |
| CN109324229A (en) | Micro resistor detection device and detection method | |
| CN113670193B (en) | Determining precision of assembly machine by using test element multiple times | |
| TW201443458A (en) | Alignment support device and alignment support method for probe devices | |
| KR101209556B1 (en) | Automated contact alignment tool | |
| ES2359241T3 (en) | PROCEDURE AND DEVICE FOR ALIGNING SUBSTRATE AND PRINT TEMPLATE IN A WELDING PASTE PRINTING PROCESS. | |
| JP2021166228A (en) | Inspection device and control method of inspection device | |
| KR20090023268A (en) | Conductive ball mounting apparatus | |
| CN110954807A (en) | Electronic component conveying device and electronic component inspection device | |
| CN110783224B (en) | Assembling component carriers using offset information between structural features formed on opposite sides of a reference component | |
| JPH04280445A (en) | Probing device and probe card | |
| JP2017044472A (en) | Measurement device for camera and measurement method | |
| TWI449119B (en) | Circuit board placement method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |