TWI565977B - Polarizer unit, jig for adjusting, lamp replacement stage and irradiation apparatus - Google Patents

Polarizer unit, jig for adjusting, lamp replacement stage and irradiation apparatus Download PDF

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TWI565977B
TWI565977B TW102113937A TW102113937A TWI565977B TW I565977 B TWI565977 B TW I565977B TW 102113937 A TW102113937 A TW 102113937A TW 102113937 A TW102113937 A TW 102113937A TW I565977 B TWI565977 B TW I565977B
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unit
lamp
polarizing element
light
straight tube
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TW102113937A
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Chinese (zh)
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TW201350934A (en
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今井誠
淺見英一
川鍋保文
石飛裕和
大野正之
齋藤行正
山本勝
島村洋行
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岩崎電氣股份有限公司
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Priority claimed from JP2012096449A external-priority patent/JP5541312B2/en
Priority claimed from JP2012100014A external-priority patent/JP2013228533A/en
Priority claimed from JP2012221205A external-priority patent/JP5573910B2/en
Priority claimed from JP2012225628A external-priority patent/JP5533974B2/en
Application filed by 岩崎電氣股份有限公司 filed Critical 岩崎電氣股份有限公司
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G02B27/285—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining comprising arrays of elements, e.g. microprisms
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528—Polarisers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336—Illuminating devices
    • G02F1/133602—Direct backlight
    • G02F1/133604—Direct backlight with lamps
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13363—Birefringent elements, e.g. for optical compensation
    • G02F1/133634—Birefringent elements, e.g. for optical compensation the refractive index Nz perpendicular to the element surface being different from in-plane refractive indices Nx and Ny, e.g. biaxial or with normal optical axis
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528—Polarisers
    • G02F1/133548—Wire-grid polarisers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polarising Elements (AREA)
  • Liquid Crystal (AREA)

Description

偏光元件單元、調整用治具、燈管交換台及照射裝置 Polarizing element unit, adjustment jig, lamp exchange station, and irradiation device

本發明係關於一種並列設有複數個線柵偏光元件之偏光元件單元、用以調整該偏光元件單元所具備之線柵偏光元件之各者之線柵之方向的調整用治具、包括偏光元件單元之照射裝置、及用於照射裝置之燈管交換台。 The present invention relates to a polarizing element unit in which a plurality of wire grid polarizing elements are arranged in parallel, and an adjusting jig for adjusting a direction of a wire grid of each of the wire grid polarizing elements of the polarizing element unit, including a polarizing element The unit illumination device and the lamp exchange station for the illumination device.

先前，已知藉由對配向膜或配向層(以下將該等稱為「光配向膜」)照射偏光光束而配向之稱為光配向之技術，該光配向廣泛應用於液晶顯示面板之液晶顯示元件所具備之液晶配向膜之配向等。 Conventionally, it has been known to align an alignment film or an alignment layer (hereinafter referred to as "optical alignment film") with a polarized light beam, which is called a photo-alignment technique, which is widely used for liquid crystal display of a liquid crystal display panel. The alignment of the liquid crystal alignment film provided in the device.

用於光配向之照射裝置一般包括光源及偏光元件而構成，尤其係近年來亦提出有如下照射裝置，即，為實現帶狀之較長之光配向膜之光配向，而使光源為棒狀燈管，並且沿該棒狀燈管之長軸方向排列有複數個線柵偏光元件(例如參照專利文獻1)。 The illuminating device for light alignment generally comprises a light source and a polarizing element. In particular, in recent years, an illuminating device has been proposed, that is, in order to realize light alignment of a strip-shaped long light aligning film, the light source is rod-shaped. In the lamp tube, a plurality of wire grid polarizing elements are arranged along the long axis direction of the rod-shaped lamp tube (see, for example, Patent Document 1).

線柵偏光元件係於同一平面內相互平行地並列排列多條導體之金屬線而成者，且作為若使偏光光束入射則使平行於金屬線之偏光反射、使垂直於金屬線之偏光光束透射的偏光濾光器而發揮功能。於排列使用複數個此種線柵偏光元件之情形時，為使各線柵偏光元件間之偏光軸之方向一致，必需使各線柵偏光元件之金屬線之方向一致。 The wire grid polarizing element is formed by arranging a plurality of metal wires of a plurality of conductors in parallel in parallel in the same plane, and if the polarized light beam is incident, the polarized light parallel to the metal line is reflected, and the polarized light beam perpendicular to the metal line is transmitted. The polarizing filter functions. In the case where a plurality of such wire grid polarizing elements are arranged, in order to make the directions of the polarization axes between the wire grid polarizing elements coincide, it is necessary to make the directions of the metal wires of the respective wire grid polarizing elements uniform.

因此，提出有於將複數個線柵偏光元件安裝並排列於框架中之構成中，藉由可繞光軸(光之透射軸方向)旋轉地安裝各線柵偏光元件，而可調整線柵偏光元件之各金屬線之方向(即偏光軸)(例如參照專利文獻2)。 Therefore, in a configuration in which a plurality of wire grid polarizing elements are mounted and arranged in a frame, the wire grid polarizing elements can be adjusted by rotatably mounting the wire grid polarizing elements around the optical axis (the transmission axis direction of the light). The direction of each of the metal wires (i.e., the polarization axis) (see, for example, Patent Document 2).

專利文獻2中，作為線柵偏光元件之調整機構，揭示有 如下機構。即，其係藉由將線柵偏光元件之外周之側面之複數個部位自與線柵偏光元件之平面平行之方向螺固於框架，且適當地推拉該等螺釘，而使線柵偏光元件於該線柵偏光元件之平面內旋轉的機構。具體而言，以1點推壓並支持線柵偏光元件之相對向之2邊之側面之一側面，2個螺釘以2點推壓並支持另一側面。根據該機構，藉由推拉支持線柵偏光元件之另一側面的2個螺釘之各者，而使線柵偏光元件以支持上述一側面之1個螺釘為支點於平面內旋轉，從而調整線柵偏光元件之金屬線之方向。 Patent Document 2 discloses that as an adjustment mechanism of a wire grid polarizing element, The following institutions. That is, the wire grid polarizing element is made by screwing a plurality of portions of the side surface of the outer circumference of the wire grid polarizing element to the frame in a direction parallel to the plane of the wire grid polarizing element, and appropriately pushing and pulling the screws. A mechanism for rotating the in-plane of the wire grid polarizing element. Specifically, one side of the side faces of the opposite sides of the wire grid polarizing element is pressed and supported by one point, and the two screws are pressed at two points and support the other side. According to this mechanism, by pushing and pulling each of the two screws supporting the other side of the wire grid polarizing element, the wire grid polarizing element is rotated in a plane with one screw supporting the one side as a fulcrum, thereby adjusting the wire grid The direction of the metal line of the polarizing element.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1] 日本專利特開2004-163881號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-163881

[專利文獻2] 日本專利特開2006-126464號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2006-126464

然而，於上述專利文獻2之技術中，由於以線柵偏光元件之側面之1點為支點進行旋轉以進行調整，故而由於線柵之旋轉因於該側面中設為支點之位置而改變等，而難以準確地調整複數個線柵偏光元件之各者。 However, in the technique of the above-mentioned Patent Document 2, since the rotation is performed by using one point of the side surface of the wire grid polarizing element as a fulcrum, the rotation of the wire grid is changed due to the position of the fulcrum on the side surface, and the like. It is difficult to accurately adjust each of a plurality of wire grid polarizing elements.

本發明係鑒於上述情況而完成者，其目的在於提供一種可準確地調整複數個線柵偏光元件之各者之偏光元件單元、調整用治具、包括該偏光元件單元之照射裝置、及照射裝置之燈管交換台。 The present invention has been made in view of the above circumstances, and an object thereof is to provide a polarizing element unit, an adjustment jig, an irradiation device including the polarizing element unit, and an irradiation device capable of accurately adjusting each of a plurality of wire grid polarizing elements. Lamp exchange station.

該說明書包括2012年4月20日申請之日本專利申請案特願2012-096449、2012年4月25日申請之日本專利申請案特願2012-100014、2012年10月3日申請之日本專利申請案特願2012-221205、及2012年10月11日申請之日本專利申請案特願2012-225628之全部內容。 Japanese Patent Application No. 2012-096449, filed on Apr. 20, 2012, and Japanese Patent Application No. 2012-100014, filed on Apr. 25, 2012, filed on October 3, 2012 The entire contents of Japanese Patent Application No. 2012-225628, filed on Sep. 11, 2012.

為達成上述目的，本發明之偏光元件單元具備：複數個線柵偏光元件，其使光線產生偏光；及框架，其並列地配置上述線柵偏光元件；且該偏光元件單元之特徵在於：上述框架包括對每一上述線柵偏光元件規定安裝位置之安裝部，且於該安裝部以上述線柵偏光元件之平面之中心為軸心可轉動地設置上述線柵偏光元件。 In order to achieve the above object, a polarizing element unit of the present invention includes: a plurality of wire grid polarizing elements that polarize light; and a frame in which the wire grid polarizing elements are arranged side by side; and the polarizing element unit is characterized by: the frame The mounting portion includes a mounting portion that defines a mounting position for each of the wire grid polarizing elements, and the wire grid polarizing element is rotatably disposed at an axis of the mounting portion at a center of a plane of the wire grid polarizing element.

又，本發明之特徵在於：於上述偏光元件單元中，於上述安裝部設有引導上述線柵偏光元件之轉動的引導部。 Further, according to the present invention, in the polarizing element unit, a guide portion that guides rotation of the wire grid polarizing element is provided in the mounting portion.

又，本發明之特徵在於：於上述偏光元件單元中，上述線柵偏光元件係於將n設為折射率、將k設為衰減係數之情形時，利用成為k+(3/4)×n>3、且k>0.5之材料來形成金屬線部。 Further, according to the present invention, in the polarizing element unit, when the n-gate polarizing element is a case where n is a refractive index and k is an attenuation coefficient, k□(3/4)×n> is used. 3. The material of k>0.5 is used to form the metal line portion.

又，本發明之特徵在於：於上述偏光元件單元中，上述線柵偏光元件具備有相對於上述平面而呈垂直地延伸之凸條(rib)，沿平行於上述平面之方向推拉上述凸條，而可以使上述線柵偏光元件產生轉動。 Further, according to the present invention, in the polarizing element unit, the wire grid polarizing element includes a rib extending perpendicularly with respect to the plane, and the rib is pushed and pulled in a direction parallel to the plane. The wire grid polarizing element can be rotated.

又，本發明之調整用治具調整上述偏光元件單元所具備 之上述線柵偏光元件之各者之轉動，且其特徵在於：設有供上述線柵偏光元件之上述凸條寬鬆貫穿之寬鬆貫穿孔，一方面使上述凸條貫穿上述寬鬆貫穿孔，一方面以覆蓋上述線柵偏光元件之方式與上述框架產生卡合，且具備：調整手段，其將貫穿上述寬鬆貫穿孔中之上述凸條沿平行於上述平面之方向進行推拉，來調整上述線柵偏光元件之轉動。 Moreover, the adjustment jig of the present invention is provided with the above-mentioned polarizing element unit The rotation of each of the wire grid polarizing elements is characterized in that: a loose through hole for loosely penetrating the ridge of the wire grid polarizing element is provided, and the rib is penetrated through the loose through hole on the one hand And engaging the frame so as to cover the wire grid polarizing element, and further comprising: adjusting means for adjusting the wire grid polarized light by pushing and pulling the ridge extending through the loose through hole in a direction parallel to the plane The rotation of the component.

又，本發明之調整用治具調整上述偏光元件單元所具備之上述線柵偏光元件之各者之轉動，且其特徵在於包括：卡合部，其以覆蓋配置於上述安裝部之上述線柵偏光元件之方式與上述框架產生卡合；及引導部，其引導上述線柵偏光元件之轉動；且可以一方面利用上述引導部引導上述線柵偏光元件之轉動一方面進行調整。 Moreover, the adjustment jig of the present invention adjusts the rotation of each of the wire grid polarizing elements included in the polarizing element unit, and includes an engaging portion that covers the wire grid disposed on the mounting portion The polarizing element is engaged with the frame; and the guiding portion guides the rotation of the wire grid polarizing element; and on the one hand, the guiding portion is used to guide the rotation of the wire grid polarizing element to perform adjustment.

又，本發明之特徵在於：於上述任一項之偏光元件單元中，將遮蔽光線之遮光區域沿鄰接之線柵偏光元件之邊界部加以設置，並且遍及上述線柵偏光元件之排列方向，而於與該排列方向正交之方向，以在上述線柵偏光元件中之上述遮光區域、與未經上述遮光區域所遮蔽之非遮光區域之長度之比率成為相等之方式設有上述遮光區域。 Further, the present invention is characterized in that, in the polarizing element unit of any one of the above, a light shielding region for shielding light is disposed along a boundary portion of the adjacent wire grid polarizing elements, and is arranged in a direction in which the wire grid polarizing elements are arranged, and The light-shielding region is provided in a direction orthogonal to the array direction so that the ratio of the light-shielding region in the wire-gate polarizing element to the length of the non-light-shielding region that is not shielded by the light-shielding region is equal.

又，本發明之特徵在於：於上述偏光元件單元中，上述線柵偏光元件之各者係以將使上述線柵偏光元件轉動而可以來調整金屬線之方向之調整用間隙設置於上述邊界部之方式加以排列，並且同時該偏光元件單元包括：遮光板，其覆蓋上述線柵偏光元件之各者之邊界部，而形成上述遮光區域。 Further, in the above-described polarizing element unit, each of the wire grid polarizing elements is provided at the boundary portion by adjusting a gap for adjusting a direction of the metal wire by rotating the wire grid polarizing element. The arrangement is performed in such a manner that the polarizing element unit includes a light shielding plate covering a boundary portion of each of the wire grid polarizing elements to form the light shielding region.

又，本發明之特徵在於：於上述偏光元件單元中，將上述線柵偏光元件形成為三角形，使其交替地上下反轉而橫向並列地排 列上述線柵偏光元件，或將上述線柵偏光元件形成為具有相對於上述排列方向呈傾斜之邊之四邊形，並以使該邊彼此對齊之方式橫向並列地排列上述線柵偏光元件。 Further, according to the present invention, in the polarizing element unit, the wire grid polarizing element is formed in a triangular shape so as to be alternately vertically inverted and laterally arranged side by side. The wire grid polarizing element is arranged, or the wire grid polarizing element is formed in a quadrangular shape having sides inclined with respect to the arrangement direction, and the wire grid polarizing elements are arranged side by side in such a manner that the sides are aligned with each other.

又，本發明提供一種照射裝置，其特徵在於具備照射器，該照射器於框體內部內置有：上述任一項之偏光元件單元；直管型燈管，其相對於上述偏光元件單元之排列沿大致呈正交之方向延伸；及反射鏡單元，其沿上述直管型燈管之管軸方向延伸，且具備具有使上述直管型燈管所發出之光線產生反射之反射面的玻璃製之反射鏡；且上述反射鏡單元具有：通風板，其沿上述直管型燈管之管軸延伸；及一對上述反射鏡，其設置於該通風板之兩旁；且於上述通風板之長度方向之大致中央安裝有支持上述直管型燈管之支持部。 Moreover, the present invention provides an illuminating device comprising: an illuminator having a polarizing element unit of any one of the above; a straight tube type lamp arranged relative to the polarizing element unit; And extending in a direction substantially orthogonal to each other; and a mirror unit extending in a tube axis direction of the straight tube type lamp and having a glass surface having a reflecting surface for reflecting light emitted by the straight tube type tube The mirror unit has: a ventilating plate extending along a tube axis of the straight tube type lamp; and a pair of the mirrors disposed on both sides of the venting plate; and the length of the ventilating plate A support portion for supporting the above-described straight tube type lamp is mounted substantially at the center of the direction.

又，本發明之特徵在於：於上述照射裝置中，上述支持部係由一對支持體所形成，該一對支持體具有：軸，其自上述通風板之上述大致中央延伸至上述直管型燈管之側面；及支持片，其被上述軸所貫穿且支持上述直管型燈管；且上述支持體係隔著上述直管型燈管而配置於相互對向之位置。 Further, in the above-described irradiation device, the support portion is formed by a pair of supports having a shaft extending from the substantially center of the ventilating plate to the straight tube type a side surface of the lamp tube; and a support piece penetrating the shaft and supporting the straight tube type lamp tube; and the support system is disposed at a position opposite to each other across the straight tube type lamp tube.

又，本發明之特徵在於：於上述照射裝置中，上述支持片係設置為可繞上述軸旋轉。 Further, according to the invention, in the above illumination device, the support sheet is provided to be rotatable about the axis.

又，本發明之特徵在於：於上述照射裝置中，上述支持體係沿著上述直管型燈管之管軸方向而配置於相互錯開之位置。 Further, according to the invention, in the irradiation device, the support system is disposed at a position shifted from each other along a tube axis direction of the straight tube type lamp.

又，本發明之燈管交換台係用於照射裝置，該照射裝置具備：上述任一項之偏光元件單元；及直管型燈管，其相對於上述偏光元件單元之排列沿大致呈正交之方向延伸；且內置沿上述直管型燈管之管軸延伸且於內部收納有上述直管型燈管之燈管單元，自端面沿 上述管軸之方向可以拉出上述燈管單元而進行交換；且該燈管交換台之特徵在於具備：導軌，其配置於上述端面之外側，一方面支持自上述端面拉出之燈管單元一方面進行引導；及搖動單元，其以上述導軌之延伸方向與上述燈管單元之管軸之方向為一致之方式將上述導軌可搖動地加以保持。 Further, the lamp tube exchange station of the present invention is used for an irradiation device comprising: the polarizing element unit of any one of the above; and a straight tube type lamp which is substantially orthogonal to the arrangement of the polarizing element unit a direction extending; and a lamp unit extending along the tube axis of the straight tube type lamp and having the straight tube type lamp inside therein The lamp tube unit can be pulled out to exchange the lamp unit; and the lamp tube exchange station is characterized in that: a guide rail is disposed on the outer side of the end surface, and on the one hand, the lamp unit is pulled out from the end surface And guiding the rocking unit, wherein the rail is slidably held in such a manner that the extending direction of the rail is consistent with the direction of the tube axis of the lamp unit.

又，本發明之特徵在於：上述燈管交換台具備：反轉單元，其使藉由反射鏡加以覆蓋之上述直管型燈管之上側之上述燈管單元上下反轉。 Further, according to the present invention, the lamp exchange unit includes: an inverting unit that vertically reverses the lamp unit on the upper side of the straight tube type lamp covered by the mirror.

又，本發明之特徵在於：於上述燈管交換台中，具備如下對準標記，其卡合於設置在上述照射裝置所放置的設置面之既定位置之定位導引，而將上述導軌對上述照射裝置之框體之側面進行定位。 Further, the present invention is characterized in that the lamp exchange table includes an alignment mark that is engaged with a positioning guide provided at a predetermined position of an installation surface on which the irradiation device is placed, and the guide rail is irradiated Positioning on the side of the frame of the device.

根據本發明，於線柵偏光元件之各者之安裝部，使其以線柵偏光元件之平面之中心為軸心轉動，而調整該線柵偏光元件之金屬線之方向。藉此，於線柵偏光元件之各者之間，線柵偏光元件之調整量與金屬線之方向之轉動角度之關係始終維持固定，而可準確地調整複數個線柵偏光元件之各者。 According to the invention, the mounting portion of each of the wire grid polarizing elements is rotated about the center of the plane of the wire grid polarizing element to adjust the direction of the metal wires of the wire grid polarizing element. Thereby, the relationship between the adjustment amount of the wire grid polarizing element and the rotation angle of the direction of the metal wire is always fixed between each of the wire grid polarizing elements, and each of the plurality of wire grid polarizing elements can be accurately adjusted.

1‧‧‧光配向裝置 1‧‧‧Light alignment device

2‧‧‧光配向對象物 2‧‧‧Light alignment object

3、505‧‧‧工件平台 3, 505‧‧‧ workpiece platform

4‧‧‧平板 4‧‧‧ tablet

5‧‧‧照射器收容箱 5‧‧‧ illuminator storage box

6、520、690‧‧‧照射器 6, 520, 690‧‧‧ illuminators

7‧‧‧燈管 7‧‧‧Light tube

8‧‧‧反射鏡 8‧‧‧Mirror

10、100、210、300、400‧‧‧偏光元件單元 10, 100, 210, 300, 400‧‧‧ polarizing element unit

12、112、212、312‧‧‧單位偏光元件單元 12, 112, 212, 312‧‧‧ unit polarizing element unit

12A‧‧‧上端 12A‧‧‧Upper

12B‧‧‧下端 12B‧‧‧Bottom

14、114、214‧‧‧框架 14, 114, 214‧‧‧ framework

14A‧‧‧上緣框架 14A‧‧‧Upper border framework

14B‧‧‧下緣框架 14B‧‧‧Bottom border framework

16、216、816‧‧‧線柵偏光元件 16,216,816‧‧‧ wire grid polarizing elements

16A‧‧‧線柵偏光元件之端部 16A‧‧‧End of wire grid polarizing element

16B‧‧‧線柵偏光元件之側緣 16B‧‧‧ side edge of wire grid polarizing element

18、218、318‧‧‧支持框架 18, 218, 318 ‧ ‧ support framework

19、609a‧‧‧螺釘 19, 609a‧‧‧ screws

20、63‧‧‧開口 20, 63‧‧‧ openings

22‧‧‧開口之端部 22‧‧‧End of the opening

22A‧‧‧肩部 22A‧‧‧Shoulder

24‧‧‧支持部 24‧‧‧Support Department

25‧‧‧邊 25‧‧‧ side

29‧‧‧螺孔 29‧‧‧ screw holes

30A‧‧‧上端卡合部 30A‧‧‧Upper engagement

30B‧‧‧下端卡合部 30B‧‧‧Bottom engagement

31‧‧‧安裝部 31‧‧‧Installation Department

32‧‧‧螺孔(安裝部) 32‧‧‧ Screw hole (mounting part)

36‧‧‧凸條 36‧‧ ‧ ribs

38‧‧‧定位凹部 38‧‧‧ positioning recess

50‧‧‧導銷 50‧‧ ‧ sales guide

60、160‧‧‧調整用治具 60,160‧‧‧Adjustment fixture

62、531、624、684‧‧‧框體 62, 531, 624, 684‧‧‧ frames

62A‧‧‧框體之上端 62A‧‧‧above the upper end of the frame

62B‧‧‧框體之下端 62B‧‧‧Bottom of the frame

64A、64B‧‧‧測微計(調整手段) 64A, 64B‧‧‧ micrometer (adjustment means)

65‧‧‧刻度 65‧‧‧scale

66‧‧‧寬鬆貫穿孔 66‧‧‧Loose through hole

67‧‧‧螺固用開口 67‧‧‧Spiral opening

68‧‧‧凸部 68‧‧‧ convex

70‧‧‧孔部 70‧‧‧ Hole Department

75、812‧‧‧間隙 75, 812 ‧ ‧ gap

76‧‧‧調整區域 76‧‧‧Adjustment area

120、220‧‧‧開口 120, 220‧‧‧ openings

125‧‧‧側邊 125‧‧‧ side

128、328‧‧‧邊界部 128, 328‧‧‧ borders

129、229、329‧‧‧遮光體 129, 229, 329‧‧ ‧ sunscreen

215‧‧‧矩形區域 215‧‧‧Rectangular area

215A‧‧‧一端 215A‧‧‧End

215B‧‧‧另一端 215B‧‧‧The other end

225‧‧‧支持框架之側邊 225‧‧‧Support side of the frame

226‧‧‧底邊 226‧‧‧Bottom

228‧‧‧邊界部 228‧‧‧Borders Department

230、330‧‧‧遮光區域 230, 330‧‧‧ shading area

240‧‧‧頂點 240‧‧‧ vertex

242‧‧‧角 242‧‧‧ corner

226A‧‧‧外緣 226A‧‧‧ outer edge

250‧‧‧調整用遮光板 250‧‧‧Adjusting visor

280‧‧‧遮光板 280‧‧ ‧ visor

325‧‧‧邊 325‧‧‧ side

501‧‧‧照射裝置 501‧‧‧ illumination device

507、681‧‧‧直管型燈管 507, 681‧‧‧ straight tube type tube

507a、507b‧‧‧直管型燈管之側面 507a, 507b‧‧‧ side of straight tube type tube

508、683‧‧‧反射鏡 508, 683‧‧ ‧ mirror

508a、508b‧‧‧鏡(反射面) 508a, 508b‧‧ ‧ mirror (reflecting surface)

510‧‧‧殼體 510‧‧‧Shell

511‧‧‧換氣導管 511‧‧‧ ventilation catheter

521、710‧‧‧通氣口 521, 710‧‧ vents

530、680‧‧‧燈管單元 530, 680‧‧‧ lamp unit

532‧‧‧上表面面板 532‧‧‧Upper surface panel

532a‧‧‧通氣孔 532a‧‧‧Ventinel

533‧‧‧側面面板 533‧‧‧Side panel

533a、532b、671、688、689‧‧‧滾輪 533a, 532b, 671, 688, 689‧‧‧ wheels

534‧‧‧端面面板 534‧‧‧End panel

534a‧‧‧手柄 534a‧‧‧handle

535‧‧‧通風板 535‧‧‧ ventilation panels

535a‧‧‧通風孔 535a‧‧‧ventilation holes

536a、536b‧‧‧第1保持體 536a, 536b‧‧‧1st holder

536c、538c‧‧‧溝 536c, 538c‧‧ ‧ ditch

537a、537b‧‧‧固定具 537a, 537b‧‧‧ fixtures

538a、538b‧‧‧第2保持體 538a, 538b‧‧‧2nd holder

540‧‧‧支持部 540‧‧‧Support Department

541、541a、541b‧‧‧支持體 541, 541a, 541b‧‧‧ support

542‧‧‧支持片 542‧‧‧Support tablets

542a‧‧‧對向面 542a‧‧‧ opposite

543‧‧‧軸 543‧‧‧Axis

545、682‧‧‧照射開口 545, 682‧‧‧ illumination opening

580‧‧‧反射鏡單元 580‧‧‧Mirror unit

601‧‧‧燈管交換台 601‧‧‧Light tube exchange

602‧‧‧台階 602‧‧‧ steps

603‧‧‧設置面 603‧‧‧Setting surface

605‧‧‧作業者 605‧‧‧ Operators

606‧‧‧支架 606‧‧‧ bracket

607‧‧‧腳輪 607‧‧‧ casters

607a、635、679‧‧‧止動部 607a, 635, 679‧‧‧ Stopping Department

608‧‧‧載置台 608‧‧‧mounting table

609‧‧‧定位導引 609‧‧‧ Positioning guide

609b‧‧‧卡合溝 609b‧‧‧Kap

610‧‧‧燈管交換部 610‧‧‧Light Exchange Department

611‧‧‧導軌 611‧‧‧rail

620‧‧‧搖動單元 620‧‧‧ shaking unit

621‧‧‧中心對準單元 621‧‧‧Center Alignment Unit

621A‧‧‧上板 621A‧‧‧Upper board

621B‧‧‧下板 621B‧‧‧ Lower board

622‧‧‧支持體 622‧‧‧Support

623‧‧‧連結板 623‧‧‧Link board

624a‧‧‧梁體 624a‧‧‧ beam

624b‧‧‧端板 624b‧‧‧End board

625‧‧‧保持部 625‧‧‧ Keeping Department

630‧‧‧反轉單元 630‧‧‧Reversal unit

631‧‧‧升降用手柄 631‧‧‧ Lifting handle

632‧‧‧升降機構 632‧‧‧ Lifting mechanism

633‧‧‧托架部 633‧‧‧ bracket section

634‧‧‧定位構件 634‧‧‧ Positioning members

636‧‧‧座部 636‧‧‧

637‧‧‧軸承 637‧‧‧ bearing

637a‧‧‧銷孔 637a‧‧ pin hole

638‧‧‧升降器 638‧‧‧ Lifter

639‧‧‧銷 639‧‧ sales

640‧‧‧升降單元 640‧‧‧ Lifting unit

641‧‧‧底部 641‧‧‧ bottom

642‧‧‧頂部 642‧‧‧ top

650‧‧‧台車部 650‧‧‧Train Department

660‧‧‧對準標記 660‧‧‧ alignment mark

661‧‧‧托架之前端 661‧‧‧The front end of the bracket

662‧‧‧卡合體 662‧‧‧卡合体

663‧‧‧螺栓 663‧‧‧ bolt

670‧‧‧濾光器單元 670‧‧‧Filter unit

675‧‧‧寬度調整單元 675‧‧‧Width adjustment unit

676‧‧‧螺釘軸 676‧‧‧ Screw shaft

677‧‧‧滑動螺帽 677‧‧‧Sliding nut

678‧‧‧寬度調整用手柄 678‧‧‧Width adjustment handle

685‧‧‧旋轉軸 685‧‧‧Rotary axis

692‧‧‧軌道 692‧‧‧ Track

700‧‧‧照射裝置 700‧‧‧Irrigation device

701‧‧‧端面 701‧‧‧ end face

704‧‧‧照射器設置架台 704‧‧‧ illuminator setting stand

710A‧‧‧送風筒 710A‧‧‧Air duct

710B‧‧‧排氣筒 710B‧‧‧Exhaust

810‧‧‧繞射光柵層 810‧‧‧Diffraction grating layer

811‧‧‧金屬線部 811‧‧‧Metal wire department

840‧‧‧基板 840‧‧‧Substrate

A、Ax‧‧‧金屬線之方向 A, Ax‧‧‧ direction of the metal wire

B‧‧‧排列方向 B‧‧‧Orientation

Bx‧‧‧排列方向 Bx‧‧‧Orientation

C‧‧‧線柵偏光元件之平面之中心 C‧‧‧Center of the plane of the wire grid polarizing element

Cx‧‧‧搬送方向(與排列方向正交之方向) Cx‧‧‧Transport direction (direction orthogonal to the direction of arrangement)

Cz‧‧‧箭頭 Cz‧‧ arrow

D‧‧‧圓 D‧‧‧ Round

E‧‧‧平行於平面之方向 E‧‧‧ parallel to the plane

Fy‧‧‧設置面 Fy‧‧‧Setting surface

Gy‧‧‧間隙 Gy‧‧‧ gap

Kx‧‧‧有效照射寬度 Kx‧‧‧ effective illumination width

Nx‧‧‧長度 Nx‧‧‧ length

Qx1、Qx2、Qx3‧‧‧線 Qx1, Qx2, Qx3‧‧‧ lines

S‧‧‧面 S‧‧‧ face

W、Wx、α‧‧‧寬度 W, Wx, α‧‧‧Width

x、y、z‧‧‧方向 x, y, z‧‧ direction

X‧‧‧直線移動方向 X‧‧‧Direct movement direction

Xz‧‧‧管軸 Xz‧‧‧ tube axis

αx、θx‧‧‧角度 Αx, θx‧‧‧ angle

δx‧‧‧調整區域 Δx‧‧‧adjusted area

Λ‧‧‧繞射光柵週期 Λ‧‧‧Diffraction grating period

Λ812、Λ811‧‧‧寬度 Λ812, Λ811‧‧‧Width

圖1係具備本發明之第1實施形態之偏光元件單元之照射裝置之示意圖。 Fig. 1 is a schematic view showing an irradiation apparatus including a polarizing element unit according to a first embodiment of the present invention.

圖2係表示偏光元件單元之構成之圖，(A)係平面圖，(B)係側剖面視圖。 Fig. 2 is a view showing the configuration of a polarizing element unit, (A) is a plan view, and (B) is a side cross-sectional view.

圖3係表示單位偏光元件單元之構成之圖，(A)係平面圖，(B)係側 視圖。 Fig. 3 is a view showing the configuration of a unit polarizing element unit, (A) is a plan view, and (B) is a side view.

圖4係表示偏光元件單元所具備之框架之構成之圖，(A)係平面圖，(B)係側剖面視圖。 4 is a view showing a configuration of a frame provided in a polarizing element unit, (A) is a plan view, and (B) is a side cross-sectional view.

圖5係表示調整用治具之構成之圖，(A)係平面圖，(B)係側剖面視圖，(C)係自測微計側觀察之側視圖。 Fig. 5 is a view showing the configuration of the jig for adjustment, (A) is a plan view, (B) is a side cross-sectional view, and (C) is a side view as viewed from the micrometer side.

圖6係表示於偏光元件單元中安裝有調整用治具之樣態之圖，(A)係平面圖，(B)係側剖面視圖，(C)係自測微計側觀察之側視圖。 Fig. 6 is a view showing a state in which an adjustment jig is attached to a polarizing element unit, (A) is a plan view, (B) is a side cross-sectional view, and (C) is a side view seen from the micrometer side.

圖7係表示本發明之第1實施形態之變化例之偏光元件單元之構成之平面圖。 Fig. 7 is a plan view showing the configuration of a polarizing element unit according to a modification of the first embodiment of the present invention.

圖8係表示調整用治具之構成之圖，(A)係平面圖，(B)係側剖面視圖。 Fig. 8 is a view showing the configuration of the jig for adjustment, (A) is a plan view, and (B) is a side cross-sectional view.

圖9係本發明之第2實施形態之偏光元件單元之說明圖，(A)係表示偏光元件單元之概略構成之平面圖，(B)係表示穿過偏光元件單元而照射之累積光量之圖。 FIG. 9 is an explanatory view of a polarizing element unit according to a second embodiment of the present invention, wherein (A) is a plan view showing a schematic configuration of a polarizing element unit, and (B) is a view showing a cumulative amount of light irradiated through the polarizing element unit.

圖10係表示單位偏光元件單元之概略構成之平面圖。 Fig. 10 is a plan view showing a schematic configuration of a unit polarizing element unit.

圖11係偏光元件單元中之鄰接之2個單位偏光元件單元之放大圖。 Fig. 11 is an enlarged view of two adjacent unit polarizing element units in the polarizing element unit.

圖12係本發明之第2實施形態之變化例之偏光元件單元之說明圖，(A)係表示偏光元件單元之概略構成之平面圖，(B)係表示穿過偏光元件單元而照射之累積光量之圖。 Fig. 12 is an explanatory view of a polarizing element unit according to a variation of the second embodiment of the present invention, wherein (A) is a plan view showing a schematic configuration of a polarizing element unit, and (B) is a cumulative amount of light irradiated through the polarizing element unit. Picture.

圖13係表示本發明之第2實施形態之變化例之偏光元件單元之構成之圖。 Fig. 13 is a view showing the configuration of a polarizing element unit according to a modification of the second embodiment of the present invention.

圖14係表示本變化例之遮光板之圖。 Fig. 14 is a view showing a light shielding plate of the present modification.

圖15係本發明之第3實施形態之照射裝置之正面透視圖。 Figure 15 is a front perspective view of an irradiation apparatus according to a third embodiment of the present invention.

圖16係表示燈管單元之圖，(A)係前視圖，(B)係平面圖，(C)係側視圖。 Fig. 16 is a view showing a lamp unit, (A) is a front view, (B) is a plan view, and (C) is a side view.

圖17係表示燈管單元之內部構成之剖面圖。 Figure 17 is a cross-sectional view showing the internal structure of the lamp unit.

圖18係表示燈管單元內部構成之平面圖。 Figure 18 is a plan view showing the internal structure of the lamp unit.

圖19係表示支持部之構成之燈管單元之剖面圖。 Fig. 19 is a cross-sectional view showing the lamp unit of the configuration of the support portion.

圖20係表示本發明之第4實施形態之燈管交換台及照射裝置之前視圖。 Fig. 20 is a front elevational view showing a lamp exchange and an irradiation apparatus according to a fourth embodiment of the present invention.

圖21係燈管交換台之側視圖。 Figure 21 is a side view of a lamp exchange.

圖22係表示定位導引及對準標記之構成之圖，(A)係表示使對準標記卡合於定位導引之前之狀態之立體圖，(B)係表示使對準標記卡合於定位導引之狀態之立體圖。 Figure 22 is a view showing the configuration of the positioning guide and the alignment mark, (A) showing a state in which the alignment mark is engaged before the positioning guide, and (B) showing the alignment mark being engaged in the positioning. A perspective view of the state of the guide.

圖23係表示照射器及燈管單元之構成之圖，(A)係側面透視圖，(B)係部分放大圖。 Fig. 23 is a view showing the configuration of an illuminator and a lamp unit, (A) is a side perspective view, and (B) is a partially enlarged view.

圖24係模式性地表示自照射器拉出燈管單元之狀態之圖，(A)係表示自照射器拉出燈管單元之狀態之示意圖，(B)係表示將燈管單元載置於燈管交換台並拉出之狀態之示意圖，(C)係表示將燈管單元自照射器完全拉出且燈管單元載置於燈管交換台之狀態之示意圖，(D)係表示燈管單元及燈管交換台之構成之部分放大圖。 Fig. 24 is a view schematically showing a state in which the lamp unit is pulled out from the illuminator, (A) is a schematic view showing a state in which the lamp unit is pulled out from the illuminator, and (B) is a view showing a state in which the lamp unit is placed. (C) is a schematic diagram showing a state in which the lamp tube unit is completely pulled out from the illuminator and the lamp unit is placed on the lamp exchange table, and (D) is a lamp tube. A partial enlarged view of the structure of the unit and the lamp exchange.

圖25係表示燈管交換台之構成之立體圖。 Fig. 25 is a perspective view showing the configuration of a lamp exchange.

圖26係表示搖動單元之動作之立體圖。 Fig. 26 is a perspective view showing the operation of the rocking unit.

圖27係表示反轉單元之動作之圖，(A)係表示利用升降器使燈管單元上升之狀態之立體圖，(B)係表示使燈管單元反轉之狀態之立體圖，(C)係表示燈管單元之固定機構之部分放大圖。 Fig. 27 is a view showing the operation of the reversing unit, wherein (A) is a perspective view showing a state in which the lamp unit is raised by the lifter, and (B) is a perspective view showing a state in which the lamp unit is reversed, and (C) is a perspective view. A partial enlarged view of the fixing mechanism of the lamp unit.

圖28係模式性地表示使用燈管交換台將濾光器自照射器拉出之狀 態之圖，(A)係表示將濾光器自照射器拉出之狀態之示意圖，(B)係表示將濾光器載置於燈管交換台並拉出之狀態之示意圖，(C)係表示將濾光器自照射器完全拉出且濾光器載置於燈管交換台之狀態之示意圖，(D)係表示濾光器及燈管交換台之構成之部分放大圖。 Figure 28 is a schematic diagram showing the use of a lamp exchange to pull the filter out of the illuminator. (A) is a schematic diagram showing a state in which the filter is pulled out from the illuminator, and (B) is a schematic diagram showing a state in which the filter is placed on the lamp exchange and pulled out, (C) It is a schematic diagram showing a state in which the filter is completely pulled out from the illuminator and the filter is placed on the lamp exchange table, and (D) is a partially enlarged view showing the configuration of the filter and the lamp exchange.

圖29係表示寬度調整單元之構成之圖，(A)係表示將燈管單元載置於導軌時之寬度調整單元之構成之部分剖面圖，(B)係將濾光器載置於導軌時之寬度調整單元之構成之部分剖面圖。 Figure 29 is a view showing the configuration of the width adjusting unit, wherein (A) is a partial cross-sectional view showing the configuration of the width adjusting unit when the lamp unit is placed on the guide rail, and (B) is when the filter is placed on the guide rail. A partial cross-sectional view of the configuration of the width adjustment unit.

圖30係模式性地表示本發明之第5實施形態之線柵偏光元件之構成之圖，(A)係剖面圖，(B)係平面圖。 Fig. 30 is a view schematically showing the configuration of a wire grid polarizing element according to a fifth embodiment of the present invention, wherein (A) is a cross-sectional view and (B) is a plan view.

以下，參照圖式對本發明之實施形態進行說明。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[第1實施形態] [First Embodiment]

圖1係具備本實施形態之偏光元件單元10之光配向裝置1之示意圖。 Fig. 1 is a schematic view of a light alignment device 1 including a polarizing element unit 10 of the present embodiment.

光配向裝置1係對光配向對象物2照射偏光光束而進行光配向之裝置。於圖1中，工件平台3為矩形板狀之平台，且於上表面載置光配向對象物2。光配向對象物2例如為液晶面板等薄板狀之面板體，且包含作為光配向對象之光配向膜。平板4為支持工件平台3且謀求防振之平台，內設有使工件平台3直線移動之直線移動機構(未圖示)，藉由該直線移動機構，而使工件平台3沿直線移動方向X於平板4之面上往返移動。照射器收容箱5係藉由固定於平板4而於平板4之上方位置橫架於平板4之寬度方向(與直線移動機構之直線移動方向X垂直之方向)之箱體。照射器6內置於照射器收容箱5，且向平板4照射偏光光束。 The optical alignment device 1 is a device that irradiates a light beam to the light-aligning object 2 to perform optical alignment. In FIG. 1, the workpiece stage 3 is a rectangular plate-shaped platform, and the light-aligning object 2 is placed on the upper surface. The light-aligning object 2 is, for example, a thin plate-shaped panel body such as a liquid crystal panel, and includes a light alignment film as a light alignment target. The flat plate 4 is a platform that supports the workpiece platform 3 and is anti-vibration, and has a linear moving mechanism (not shown) for linearly moving the workpiece platform 3, and the linear motion mechanism causes the workpiece platform 3 to move in a linear direction X. Move back and forth on the face of the tablet 4. The illuminator accommodating case 5 is a case which is fixed to the flat plate 4 at a position above the flat plate 4 in a width direction of the flat plate 4 (a direction perpendicular to the linear movement direction X of the linear movement mechanism). The illuminator 6 is built in the illuminator storage box 5, and irradiates the flat plate 4 with a polarized light beam.

照射器6具備燈管7、反射鏡8及偏光元件單元10，且使偏光光束聚集並照射至藉由直線移動機構而於正下方移動之光配向對象物2之面S。 The illuminator 6 includes a bulb 7, a mirror 8, and a polarizing element unit 10, and converges the polarized light beam to illuminate the surface S of the object 2 that is directly moved downward by the linear movement mechanism.

具體而言，燈管7係至少以與光配向對象物2之寬度相比為同等以上之量延伸之直管型(棒狀)紫外線燈管。反射鏡8係剖面為橢圓形且沿燈管7之長度方向延伸之柱狀凹面反射鏡，且對光配向對象物2照射反射光。 Specifically, the bulb 7 is a straight tube type (rod-shaped) ultraviolet lamp tube that extends at least equal to the width of the light-aligning object 2 . The mirror 8 is a columnar concave mirror having an elliptical cross section and extending in the longitudinal direction of the bulb 7, and irradiates the light-aligning object 2 with reflected light.

偏光元件單元10配置於反射鏡8與光配向對象物2之間，且使照射至光配向對象物2之光偏光。藉由該偏光光束照射至光配向對象物2之光配向膜，而根據偏光光束之偏光軸方向將該光配向膜配向。 The polarizing element unit 10 is disposed between the mirror 8 and the light-aligning object 2, and polarizes the light that is incident on the light-aligning object 2. The polarized light beam is irradiated onto the light alignment film of the light-aligning object 2, and the light alignment film is aligned according to the polarization axis direction of the polarized light beam.

圖2係表示偏光元件單元10之構成之圖，圖2(A)係平面圖，圖2(B)係側剖面視圖。 Fig. 2 is a view showing the configuration of the polarizing element unit 10, Fig. 2(A) is a plan view, and Fig. 2(B) is a side cross-sectional view.

如該等圖所示，偏光元件單元10具備複數個單位偏光元件單元12、及將該等單位偏光元件單元12橫向並列地排列成一排之框架14，至少排列有橫越反射鏡8之長度方向之長度之量的單位偏光元件單元12。框架14作為各單位偏光元件單元12之支持體而發揮功能，並且以規定各安裝位置之方式構成，而防止各單位偏光元件單元12之排列方向之位置偏移。再者，於下文對該構成進行詳細敍述。 As shown in the figures, the polarizing element unit 10 includes a plurality of unit polarizing element units 12, and a frame 14 in which the unit polarizing element units 12 are arranged side by side in a row, at least arranged in a longitudinal direction across the mirror 8. The unit polarizing element unit 12 of the length. The frame 14 functions as a support for each unit of the polarizing element unit 12, and is configured to define the respective mounting positions, thereby preventing the positional shift of the arrangement direction of each unit of the polarizing element unit 12. Further, the configuration will be described in detail below.

圖3係表示單位偏光元件單元12之構成之圖，圖3(A)係平面圖，圖3(B)係側剖面視圖。 Fig. 3 is a view showing the configuration of the unit polarizing element unit 12, Fig. 3(A) is a plan view, and Fig. 3(B) is a side cross-sectional view.

單位偏光元件單元12具備線柵偏光元件16、及支持該線柵偏光元件16之支持框架18。 The unit polarized element unit 12 includes a wire grid polarizing element 16 and a support frame 18 that supports the wire grid polarizing element 16 .

支持框架18係於金屬板之面內具有大致矩形之開口20之框體，且具備將線柵偏光元件16之端部16A夾入至夾著開口20之上下之端 部22之各者加以支持的支持部24。又，支持框架18之於開口20之左右兩側之邊25(即，於上下之端部22間延伸之邊25)之寬度W以於照射區不易產生因寬度W所致之映影之方式形成為窄幅。 The support frame 18 is a frame having a substantially rectangular opening 20 in the plane of the metal plate, and is provided with the end portion 16A of the wire grid polarizing element 16 sandwiched between the upper end of the opening 20 The support unit 24 is supported by each of the units 22. Moreover, the width W of the support frame 18 on the left and right sides 25 of the opening 20 (i.e., the side 25 extending between the upper and lower end portions 22) is such that the illumination area is less likely to be reflected by the width W. Formed into a narrow range.

線柵偏光元件16係具有封閉支持框架18之開口20之大小的大致矩形狀之板材，作為將上下之端部16A連結之兩側之緣部的一對側緣16B以成為與金屬線之方向A大致平行之方式形成。 The wire grid polarizing element 16 has a substantially rectangular plate material that closes the opening 20 of the support frame 18, and serves as a pair of side edges 16B which are the edges of the both sides connecting the upper and lower end portions 16A. A is formed in a substantially parallel manner.

於偏光元件單元10中，藉由使各線柵偏光元件16之側緣16B彼此靠近且橫向並列地排列該構成之複數個單位偏光元件單元12，而於金屬線之方向A與和排列之方向B(圖2)大致正交之方向一致之狀態下得到排列。 In the polarizing element unit 10, the plurality of unit polarizing element units 12 are arranged in such a manner that the side edges 16B of the respective wire grid polarizing elements 16 are adjacent to each other and laterally juxtaposed, and the direction A and the direction B of the metal lines are aligned. (Fig. 2) Arrangement is obtained in a state in which the directions orthogonal to each other are uniform.

圖4係表示偏光元件單元10所具備之框架14之構成之圖，圖4(A)係平面圖，圖4(B)係側剖面視圖。 4 is a view showing a configuration of a frame 14 provided in the polarizing element unit 10, and FIG. 4(A) is a plan view and FIG. 4(B) is a side cross-sectional view.

如該等圖所示，框架14形成為矩形之框形狀，單位偏光元件單元12並列地排列於該框中。即，框架14具備形成上下之緣部之上緣框架14A及下緣框架14B，上述單位偏光元件單元12之上下之端部22卡合於該等上緣框架14A及下緣框架14B而得到支持。 As shown in the figures, the frame 14 is formed in a rectangular frame shape, and the unit polarizing element units 12 are arranged side by side in the frame. In other words, the frame 14 includes an upper edge portion 14A and a lower edge frame 14B, and the upper end portion 22 of the unit polarizing element unit 12 is supported by the upper edge frame 14A and the lower edge frame 14B. .

更詳細地進行敍述，於上緣框架14A之面內，形成有按照單位偏光元件單元12之上端12A(圖3(A))側之端部22之外形而設有凹處之上端卡合部30A，同樣地，於下緣框架14B之面內，亦形成有按照單位偏光元件單元12之下端12B(圖3(A))側之端部22之外形而設有凹處之下端卡合部30B。而且，藉由該等一對上端卡合部30A及下端卡合部30B，而構成規定上述單位偏光元件單元12之安裝位置之安裝部31。於框架14中，沿長度方向以單位偏光元件單元12之量設有安裝部31，藉此，僅將單位偏光元件單元12嵌入至各安裝部31，便將各者簡單地 配置於既定之所決定之位置。 More specifically, in the surface of the upper edge frame 14A, the end portion 22 on the side of the upper end 12A (Fig. 3(A)) of the unit polarizing element unit 12 is formed and the upper end engaging portion is provided. In the same manner, in the plane of the lower edge frame 14B, the end portion 22 on the side of the lower end 12B (Fig. 3(A)) of the unit polarizing element unit 12 is formed, and the lower end engaging portion is provided. 30B. Further, the pair of upper end engaging portions 30A and the lower end engaging portions 30B constitute the mounting portion 31 that defines the mounting position of the unit polarizing element unit 12. In the frame 14, the mounting portion 31 is provided in the longitudinal direction by the unit polarizing element unit 12, whereby only the unit polarizing element unit 12 is embedded in each mounting portion 31, and each is simply Configured at the location determined by the established.

於框架14之上述上端卡合部30A及下端卡合部30B，適當地設有螺固單位偏光元件單元12之螺孔32，藉由使螺釘19(圖2(A))穿過單位偏光元件單元12之上端12A及下端12B之各者之端部22之螺孔29(圖3(A))且螺固於框架14，而將單位偏光元件單元12固定配置於框架14。再者，單位偏光元件單元12之螺孔29以容許該單位偏光元件單元12之既定量之下述轉動之方式形成為橫長形狀。 The upper end engaging portion 30A and the lower end engaging portion 30B of the frame 14 are appropriately provided with screw holes 32 of the screw unit polarizing element unit 12, and the screw 19 (Fig. 2(A)) is passed through the unit polarizing element. The screw holes 29 (Fig. 3(A)) of the end portions 22 of the upper end 12A and the lower end 12B of the unit 12 are screwed to the frame 14, and the unit polarizing element unit 12 is fixedly disposed to the frame 14. Further, the screw hole 29 of the unit polarizing element unit 12 is formed in a horizontally long shape so as to allow the predetermined amount of rotation of the unit polarizing element unit 12 to be described below.

於偏光元件單元10中，若於各單位偏光元件單元12之間，線柵偏光元件16之金屬線之方向A不一致，則未能使光配向對象物2之配向方向與所需方向一致，而招致產品品質之降低。 In the polarizing element unit 10, if the direction A of the metal wires of the wire-gate polarizing element 16 does not match between the unit-polarized element units 12, the alignment direction of the light-aligning object 2 does not match the desired direction. Incurring a reduction in product quality.

因此，於該偏光元件單元10中設有以下機構，以調整安裝於框架14中之各單位偏光元件單元12之金屬線之方向A。 Therefore, the polarizing element unit 10 is provided with a mechanism for adjusting the direction A of the metal wires of the unit polarizing element units 12 mounted in the frame 14.

即，單位偏光元件單元12之上端12A之端部22及下端12B之端部22之外形形成為圓弧狀，並且以卡合於該等端部22之圓弧形狀之方式，於框架14之安裝部31，亦將上端卡合部30A及下端卡合部30B形成為圓弧狀，藉此，作為引導單位偏光元件單元12於面內之轉動之引導部而發揮功能。 That is, the end portion 22 of the upper end 12A of the unit polarizing element unit 12 and the end portion 22 of the lower end 12B are formed in an arc shape, and are engaged with the arc shape of the end portions 22 in the frame 14 The mounting portion 31 also has an upper end engaging portion 30A and a lower end engaging portion 30B formed in an arc shape, thereby functioning as a guiding portion for guiding the unit polarizing element unit 12 to rotate in the plane.

具體而言，如上述圖3(A)所示，單位偏光元件單元12之端部22之圓弧形狀與以單位偏光元件單元12所支持之線柵偏光元件16之平面(光透射面)之中心(更準確而言為開口20之中心)C為中心之圓D之圓周之一部分一致。即，單位偏光元件單元12轉動時係以線柵偏光元件16之平面之中心C為軸心進行轉動，藉此，單位偏光元件單元12之轉動角度、與線柵偏光元件16之金屬線之方向A之轉動角度始終一致。 Specifically, as shown in FIG. 3(A) above, the arc shape of the end portion 22 of the unit polarizing element unit 12 and the plane (light transmitting surface) of the wire grid polarizing element 16 supported by the unit polarizing element unit 12 are The center (more precisely, the center of the opening 20) C is centered on one of the circumferences of the circle D. That is, when the unit polarizing element unit 12 rotates, the center C of the plane of the wire grid polarizing element 16 is rotated as an axis, whereby the rotation angle of the unit polarizing element unit 12 and the direction of the metal line of the wire grid polarizing element 16 The rotation angle of A is always the same.

單位偏光元件單元12於下端12B側之端部22具備與線柵偏光元件16之平面垂直地立設之凸條36，藉由沿平行於線柵偏光元件16之平面之方向推拉該凸條36，而可簡單地進行單位偏光元件單元12之轉動操作。 The end portion 22 of the unit polarizing element unit 12 on the lower end 12B side is provided with a rib 36 standing perpendicularly to the plane of the wire grid polarizing element 16, and the rib 36 is pushed and pulled in a direction parallel to the plane of the wire grid polarizing element 16. The rotation operation of the unit polarizing element unit 12 can be simply performed.

如上述般，於該偏光元件單元10中，由於安裝部31引導單位偏光元件單元12之轉動，故而於使單位偏光元件單元12卡合於安裝部31之狀態下，僅使該單位偏光元件單元12轉動，便可簡單地調整單位偏光元件單元12所支持之線柵偏光元件16之金屬線之方向A。 As described above, in the polarizing element unit 10, since the mounting portion 31 guides the rotation of the unit polarizing element unit 12, only the unit polarizing element unit is caused in a state where the unit polarizing element unit 12 is engaged with the mounting portion 31. By turning 12, the direction A of the metal wire of the wire grid polarizing element 16 supported by the unit polarizing element unit 12 can be simply adjusted.

又，由於單位偏光元件單元12以線柵偏光元件16之平面之中心C為軸心轉動，故而該單位偏光元件單元12之轉動角度、與線柵偏光元件16之金屬線之方向A之轉動角度始終一致，因此，可簡單且準確地調整單位偏光元件單元12之金屬線之方向A，調整作業變得非常容易。 Further, since the unit polarizing element unit 12 is rotated about the center C of the plane of the wire grid polarizing element 16, the rotation angle of the unit polarizing element unit 12 and the rotation angle of the direction A of the metal line of the wire grid polarizing element 16 are obtained. Consistently, the direction A of the metal line of the unit polarizing element unit 12 can be adjusted simply and accurately, and the adjustment work becomes very easy.

而且，單位偏光元件單元12轉動時之端部22必定位於上述圖3(A)所示之圓D之範圍內。即，於單位偏光元件單元12之轉動之軸心於各單位偏光元件單元12之間不一致之情形時，端部22之範圍於各者中產生偏差，因此，為不妨礙各單位偏光元件單元12之轉動，必需使相鄰之單位偏光元件單元12彼此之間隙75(圖6(A)參照)之寬度α較大。若如上述般間隙75變大，則線柵偏光元件16中之不受偏光控制之區域會擴大。 Further, the end portion 22 when the unit polarizing element unit 12 is rotated must be positioned within the range of the circle D shown in Fig. 3(A) above. In other words, when the axis of the rotation of the unit polarizing element unit 12 does not coincide with each unit polarizing element unit 12, the range of the end portion 22 varies in each of the units, and therefore, the unit polarizing element unit 12 is not hindered. In the rotation, it is necessary to make the width α of the gap 75 (refer to FIG. 6(A)) of the adjacent unit polarizing element units 12 larger. When the gap 75 becomes larger as described above, the area of the wire grid polarizing element 16 that is not controlled by the polarization is enlarged.

相對於此，於本實施形態中，如上所述，由於單位偏光元件單元12轉動時之端部22必定位於上述圖3(A)所示之圓D之範圍內，故而將各間隙75抑制為最小。 On the other hand, in the present embodiment, as described above, since the end portion 22 when the unit polarizing element unit 12 rotates is necessarily positioned within the range of the circle D shown in FIG. 3(A), the gaps 75 are suppressed to The smallest.

尤其係如上述圖3(A)所示，單位偏光元件單元12之上下之端部22 分別藉由兩側之肩部22A自邊25以角度δ向內側傾斜，而成為切去肩部22A後之形狀。藉由切去肩部22A，而如圖6(A)所示，於鄰接之單位偏光元件單元12之端部22彼此之間，形成較間隙75之寬度α廣之轉動用之調整區域76。如上述般，由於使間隙75之寬度α減小，且設置較大之調整區域76，故而使單位偏光元件單元12彼此之間較窄，而抑制不受偏光控制之光之產生，且充分確保單位偏光元件單元12之金屬線之方向A之調整量。 In particular, as shown in FIG. 3(A) above, the upper end portion 22 of the unit polarizing element unit 12 is provided. The shoulder portions 22A on both sides are inclined inward from the side 25 at an angle δ, and the shape is cut away from the shoulder portion 22A. By cutting the shoulder portion 22A, as shown in Fig. 6(A), between the end portions 22 of the adjacent unit polarizing element units 12, an adjustment region 76 for rotation having a wider width a than the gap 75 is formed. As described above, since the width α of the gap 75 is reduced and the large adjustment region 76 is provided, the unit polarization element units 12 are narrowed from each other, and generation of light that is not controlled by polarization is sufficiently ensured. The amount of adjustment of the direction A of the metal line of the unit polarizing element unit 12.

其次，對高精度且簡單地調整偏光元件單元10所具備之單位偏光元件單元12之各者之轉動的調整用治具60進行說明。 Next, the jig 60 for adjustment for adjusting the rotation of each of the unit polarizing element units 12 included in the polarizing element unit 10 with high precision and simpleness will be described.

圖5係表示調整用治具60之構成之圖，圖5(A)係平面圖，圖5(B)係側剖面視圖，圖5(C)係自測微計64A、64B之側觀察之側視圖。又，圖6係表示於偏光元件單元10中安裝有調整用治具60之樣態之圖，圖6(A)係平面圖，圖6(B)係側剖面視圖，圖6(C)係自測微計64、64B之側觀察之側視圖。 Fig. 5 is a view showing a configuration of the jig 60 for adjustment, Fig. 5(A) is a plan view, Fig. 5(B) is a side cross-sectional view, and Fig. 5(C) is a side viewed from the side of the micrometers 64A and 64B. view. 6 is a view showing a state in which the adjustment jig 60 is attached to the polarizing element unit 10. FIG. 6(A) is a plan view, FIG. 6(B) is a side cross-sectional view, and FIG. 6(C) is a view. Side view of the side of the micrometer 64, 64B.

調整用治具60具備矩形框狀之框體62、及配設於該框體62之上端62A及下端62B中之下端62B之作為調整手段的一對測微計64A、64B。 The adjustment jig 60 includes a frame 62 having a rectangular frame shape, and a pair of micrometers 64A and 64B disposed as adjustment means disposed at the lower end 62B of the upper end 62A and the lower end 62B of the frame 62.

框體62具有與單位偏光元件單元12之開口20為大致同一尺寸之形狀、或較開口20廣之開口63，且如圖6(B)所示，以將定位配置於框架14之安裝部31的單位偏光元件單元12夾於中間之方式安裝於框架14。 The frame 62 has a shape that is substantially the same size as the opening 20 of the unit polarizing element unit 12 or an opening 63 that is wider than the opening 20, and is disposed at the mounting portion 31 of the frame 14 as shown in FIG. 6(B). The unit polarizing element unit 12 is attached to the frame 14 in a sandwiched manner.

即，如圖5(A)所示，於調整用治具60之框體62之四角，設有與設置於框架14之安裝部31之四角之基準定位凹部38(參照圖4(A))嵌合之凸部68，藉由該等定位凹部38與凸部68之卡合，而如圖6(A)所 示，將調整用治具60之框體62定位於框架14之既定位置，如圖6(B)所示，於該框架14與調整用治具60之間夾入單位偏光元件單元12。 That is, as shown in FIG. 5(A), at the four corners of the frame body 62 of the jig 60 for adjustment, the reference positioning recesses 38 are provided at the four corners of the mounting portion 31 of the frame 14 (see FIG. 4(A)). The fitting convex portion 68 is engaged with the convex portion 68 by the positioning concave portion 38, as shown in Fig. 6(A). The frame 62 of the adjustment jig 60 is positioned at a predetermined position of the frame 14, and as shown in FIG. 6(B), the unit polarizing element unit 12 is sandwiched between the frame 14 and the adjustment jig 60.

於調整用治具60之框體62中，如圖5(A)所示，設有供單位偏光元件單元12之凸條36寬鬆貫穿之寬鬆貫穿孔66，隔著該寬鬆貫穿孔66而設有上述一對測微計64A、64B。 As shown in FIG. 5(A), the frame 62 of the jig 60 for adjustment is provided with a loose through hole 66 through which the ridges 36 of the unit polarizing element unit 12 are loosely inserted, and is disposed via the loose through hole 66. There is a pair of micrometers 64A, 64B described above.

因此，若將調整用治具60安裝至框架14，則如圖6(A)及圖6(C)所示，單位偏光元件單元12之凸條36自寬鬆貫穿孔66突出，且配設於一對測微計64A、64B之間。測微計64A、64B伴隨使用者之操作而沿平行於線柵偏光元件16之平面之方向E進退，藉由使凸條36於寬鬆貫穿孔66之滑動範圍內移動，而使單位偏光元件單元12以線柵偏光元件16之中心C為軸心轉動，從而調整金屬線之方向A。 Therefore, when the adjustment jig 60 is attached to the frame 14, as shown in FIGS. 6(A) and 6(C), the ridges 36 of the unit polarizing element unit 12 protrude from the loose through hole 66, and are disposed on A pair of micrometers 64A, 64B. The micrometers 64A, 64B advance and retreat in a direction E parallel to the plane of the wire grid polarizing element 16 with the operation of the user, and the unit polarizing element unit is moved by moving the rib 36 within the sliding range of the loose through hole 66. 12 is rotated about the center C of the wire grid polarizing element 16 to adjust the direction A of the metal wire.

於各測微計64A、64B上設有表示凸條36之推拉量之刻度65，從而令作業者可把握進行調整時之推拉量。於本實施形態中，由於推拉量(調整量)、與單位偏光元件單元12之轉動角度及線柵偏光元件16之金屬線之方向A之轉動角度成正比，故而可自該推拉量把握金屬線之方向A之轉動角度。 A scale 65 indicating the amount of push and pull of the ridges 36 is provided on each of the micrometers 64A and 64B, so that the operator can grasp the amount of push and pull when performing the adjustment. In the present embodiment, since the push-pull amount (adjustment amount) is proportional to the rotation angle of the unit polarizing element unit 12 and the direction A of the metal wire of the wire grid polarizing element 16, the wire can be grasped from the push-pull amount. The angle of rotation of direction A.

於調整用治具60之框體62中，如圖5(A)所示，設有使將單位偏光元件單元12之上端12A及下端12B螺固於框架14之螺釘19露出且***緊固該螺釘19之工具的螺釘緊固用開口67。再者，本實施形態中係將使下端12B側之螺釘19露出之螺固用開口67與上述寬鬆貫穿孔66連結而形成。 In the frame 62 of the jig 60 for adjustment, as shown in FIG. 5(A), a screw 19 for screwing the upper end 12A and the lower end 12B of the unit polarizing element unit 12 to the frame 14 is exposed and inserted and fastened. The screw fastening opening 67 of the tool of the screw 19. In the present embodiment, the screwing opening 67 for exposing the screw 19 on the lower end 12B side is connected to the loose through hole 66.

如上述般，因於調整用治具60中設有使單位偏光元件單元12之螺釘19露出之螺固用開口67，故而藉由利用調整用治具60對單位偏光元件單元12進行轉動調整後，使工具穿入至螺釘緊固用開口67以 緊固螺釘19，將該單位偏光元件單元12固定於框架14，而未產生旋轉偏差便將單位偏光元件單元12固定於框架14。於調整單位偏光元件單元12後，自框架14卸除調整用治具60，以供排列於該框架14中之其他單位偏光元件單元12之調整。 As described above, since the adjusting fixture 60 is provided with the screwing opening 67 for exposing the screw 19 of the unit polarizing element unit 12, the unit polarizing element unit 12 is rotated and adjusted by the adjusting jig 60. , the tool is threaded into the screw fastening opening 67 to The unitary polarizing element unit 12 is fastened to the frame 14 by fastening the screw 19, and the unit polarizing element unit 12 is fixed to the frame 14 without causing a rotational deviation. After the unit polarizing element unit 12 is adjusted, the adjustment jig 60 is removed from the frame 14 for adjustment of the other unit polarizing element units 12 arranged in the frame 14.

如以上所說明般，根據本實施形態，構成為利用設置於框架14中之各安裝部31，以線柵偏光元件16之平面之中心C為軸心，使包含該線柵偏光元件16之單位偏光元件單元12轉動而進行調整。藉此，由於可使相對於單位偏光元件單元12之調整量的金屬線之方向A之轉動角度始終相等，故而可簡單且準確地調整單位偏光元件單元12之金屬線之方向A，調整作業變得非常容易。又，單位偏光元件單元12轉動時之端部22必定位於上述圖3(A)所示之圓D之範圍內，藉由以圓D之直徑之間隔配置各單位偏光元件單元12，而將各間隙抑制為最小。 As described above, according to the present embodiment, each of the mounting portions 31 provided in the frame 14 is configured such that the center C of the plane of the wire grid polarizing element 16 is the axis and the unit including the wire grid polarizing element 16 is included. The polarizing element unit 12 is rotated to be adjusted. Thereby, since the rotation angle of the direction A of the metal wire with respect to the adjustment amount of the unit polarizing element unit 12 is always equal, the direction A of the metal wire of the unit polarizing element unit 12 can be easily and accurately adjusted, and the adjustment operation becomes changed. It is very easy. Further, the end portion 22 when the unit polarizing element unit 12 is rotated must be positioned within the range of the circle D shown in FIG. 3(A), and each unit polarizing element unit 12 is disposed at intervals of the diameter of the circle D, and each unit The gap suppression is minimal.

又，根據本實施形態，構成為於支持線柵偏光元件16之單位偏光元件單元12之各者中，設置與線柵偏光元件16之平面垂直地延伸之凸條36，沿平行於平面之方向推拉該凸條36，而使線柵偏光元件16可轉動。 Further, according to the present embodiment, each of the unit polarizing element units 12 supporting the wire grid polarizing element 16 is provided with a ridge 36 extending perpendicularly to the plane of the wire grid polarizing element 16 in a direction parallel to the plane. The rib 36 is pushed and pulled to rotate the wire grid polarizing element 16.

根據該構成，由於凸條36之推拉量、與伴隨其之線柵偏光元件16之轉動角度及金屬線之方向A之轉動角度成正比，故而可藉由將推拉量設為調整量進行管理，而準確地管理金屬線之方向A之調整量。 According to this configuration, since the amount of push and pull of the ridges 36 is proportional to the angle of rotation of the wire grid polarizing element 16 and the direction of rotation of the wire A, the amount of push and pull can be managed as an adjustment amount. The amount of adjustment of the direction A of the metal wire is accurately managed.

尤其係根據本實施形態，構成如下調整用治具60，其具備沿平行於線柵偏光元件16之平面之方向推拉凸條36而調整該線柵偏光元件16之金屬線之方向A之作為調整手段的測微計64A、64B。 In particular, according to the present embodiment, the jig 60 for adjustment is provided, which is provided with an adjustment of the direction A of the metal wire of the wire grid polarizing element 16 by pushing and pulling the ridge 36 in a direction parallel to the plane of the wire grid polarizing element 16. Means of micrometers 64A, 64B.

藉此，凸條36之推拉操作變得容易，又，可利用測微計64A、64B 進行微調整。 Thereby, the push-pull operation of the ridges 36 becomes easy, and the micrometers 64A, 64B can be utilized. Make minor adjustments.

進而，藉由設置於測微計64A、64B之刻度65，可準確地管理調整量。 Further, by being provided on the scale 65 of the micrometers 64A, 64B, the amount of adjustment can be accurately managed.

再者，第1實施形態僅為例示本發明之一態樣者，於未脫離本發明之主旨之範圍內可任意地進行變化及應用。 In addition, the first embodiment is merely illustrative of one aspect of the present invention, and can be arbitrarily changed and applied without departing from the spirit and scope of the invention.

例如於第1實施形態中，例示了安裝部31引導單位偏光元件單元12之轉動之構成。然而，並不限於此，亦可設為調整用治具引導單位偏光元件單元12之轉動之構成。 For example, in the first embodiment, the configuration in which the mounting portion 31 guides the rotation of the unit polarizing element unit 12 is exemplified. However, the present invention is not limited thereto, and the adjustment jig may be used to guide the rotation of the unit polarizing element unit 12.

圖7係表示本變化例之偏光元件單元100之構成之平面圖。又，圖8係表示調整用治具160之構成之圖，圖8(A)係平面圖，圖8(B)係側剖面視圖。再者，於該等圖中，對實施形態中所說明之構件標註同一符號，並省略其說明。 Fig. 7 is a plan view showing the configuration of the polarizing element unit 100 of the present modification. FIG. 8 is a view showing a configuration of the jig 160 for adjustment, and FIG. 8(A) is a plan view and FIG. 8(B) is a side cross-sectional view. In the drawings, the same reference numerals are given to members described in the embodiments, and the description thereof is omitted.

如圖7所示，偏光元件單元100具備複數個單位偏光元件單元112。於偏光元件單元100所具備之框架114中，設有螺固各單位偏光元件單元112之螺孔32，該螺孔32作為對每一單位偏光元件單元112規定安裝位置之安裝部而發揮功能。 As shown in FIG. 7, the polarizing element unit 100 includes a plurality of unit polarizing element units 112. In the frame 114 provided in the polarizing element unit 100, a screw hole 32 for screwing each unit of the polarizing element unit 112 is provided, and the screw hole 32 functions as an attaching portion that defines a mounting position for each unit polarizing element unit 112.

又，於該框架114中，對每一單位偏光元件單元112之安裝位置，均於該單位偏光元件單元112之對角位置設有與調整用治具160卡合以進行定位之定位凹部38。 Further, in the frame 114, a positioning recess 38 for engaging with the adjustment jig 160 for positioning is provided at a position opposite to the unit polarizing element unit 112 at a position where each unit of the polarizing element unit 112 is mounted.

另一方面，於調整用治具160中，對應於框架114之定位凹部38而於框體62之背面側設有凸部68，藉由該等定位凹部38與凸部68之卡合構造，而將調整用治具160定位於框架114之既定位置，從而成為於調整用治具160與框架114之間夾入有上述單位偏光元件單元112之狀態。 On the other hand, in the adjustment jig 160, the convex portion 68 is provided on the back side of the frame 62 corresponding to the positioning concave portion 38 of the frame 114, and the positioning structure of the positioning concave portion 38 and the convex portion 68 is configured. The adjustment jig 160 is positioned at a predetermined position of the frame 114, and the unit polarizing element unit 112 is interposed between the adjustment jig 160 and the frame 114.

該單位偏光元件單元112之上端12A及下端12B之端部22與上述實施形態中所說明之單位偏光元件單元12相同而為形成以線柵偏光元件16之中心C中心之圓D之圓周之一部分的圓弧狀。另一方面，於調整用治具160之背面，如圖8(A)所示，於沿該圓D之圓弧之位置設有複數個導銷50。即，若使調整用治具160卡合於框架114，則各導銷50抵接於單位偏光元件單元112之上端12A側之端部22之圓弧狀之外周。藉此，若操作測微計64A、64B，則單位偏光元件單元112一面受沿圓D之圓弧配置之各導銷50引導一面轉動。再者，於圖7中，符號70係以承受導銷50之前端之方式設置於框架114中之孔部70。 The end portion 22 of the upper end 12A and the lower end 12B of the unit polarizing element unit 112 is the same as the unit polarizing element unit 12 described in the above embodiment, and is formed as a part of the circumference of the circle D centered at the center C of the wire grid polarizing element 16. Arc shape. On the other hand, on the back surface of the jig 160 for adjustment, as shown in FIG. 8(A), a plurality of guide pins 50 are provided at positions along the arc of the circle D. In other words, when the adjustment jig 160 is engaged with the frame 114, each of the guide pins 50 abuts on the outer circumference of the arcuate end portion 22 of the unit polarizing element unit 112 on the upper end 12A side. As a result, when the micrometers 64A and 64B are operated, the unit polarizing element unit 112 is rotated while being guided by the respective guide pins 50 arranged along the circular arc of the circle D. Further, in Fig. 7, reference numeral 70 is provided in the hole portion 70 in the frame 114 so as to receive the front end of the guide pin 50.

[第2實施形態] [Second Embodiment]

其次，對本發明之第2實施形態進行說明。 Next, a second embodiment of the present invention will be described.

於排列使用線柵偏光元件16之情形時，因於線柵偏光元件16之各邊界部，偏光光束弱於其他部位，故而於光配向膜之光配向中產生不均。 In the case where the wire grid polarizing element 16 is arranged, the polarized light beam is weaker than the other portions due to the boundary portions of the wire grid polarizing element 16, and unevenness occurs in the light alignment of the photoalignment film.

因此，先前，為改善該光配向之不均，提出有如下技術，即，藉由於光配向膜之搬送方向配置多排配置為排狀之線柵偏光元件之排列，並且於各排列之間，以線柵偏光元件之邊界部於搬送方向不重合之方式，使線柵偏光元件之位置錯開進行配置，而抑制偏光光束對光配向膜之照射不均(例如日本專利特開2006-126464號公報)。 Therefore, in order to improve the unevenness of the light alignment, a technique has been proposed in which a plurality of rows of wire grid polarizing elements arranged in a row are arranged in a direction in which the light alignment film is transported, and between the arrays, The position of the wire grid polarizing element is shifted so that the boundary portion of the wire grid polarizing element does not overlap in the transport direction, and the uneven irradiation of the light beam to the optical alignment film is suppressed (for example, Japanese Patent Laid-Open Publication No. 2006-126464) ).

然而，於該習知技術中，由於必需具備多排線柵偏光元件，故而必需對各排均等地照射光，因此，有裝置複雜化、且成本變得非常高等問題。 However, in this prior art, since it is necessary to provide a plurality of rows of wire grid polarizing elements, it is necessary to uniformly illuminate the respective rows. Therefore, there is a problem that the device is complicated and the cost is extremely high.

於本發明之第2實施形態中，對可抑制因線柵偏光元件間之邊界 而產生之不均的偏光元件單元進行說明。 According to the second embodiment of the present invention, it is possible to suppress the boundary between the wire grid polarizing elements The uneven polarizing element unit is described.

圖9係偏光元件單元210之說明圖，圖9(A)係表示偏光元件單元210之概略構成之平面圖，圖9(B)係表示穿過偏光元件單元210而照射之累積光量之圖。 9 is an explanatory view of the polarizing element unit 210, FIG. 9(A) is a plan view showing a schematic configuration of the polarizing element unit 210, and FIG. 9(B) is a view showing the amount of accumulated light irradiated through the polarizing element unit 210.

如圖9(A)所示，偏光元件單元210具備複數個單位偏光元件單元212、及將該等單位偏光元件單元212橫向並列地排列成一排之框架214。該偏光元件單元210為對經反射鏡8(圖1)配光控制後之光進行偏光控制，而至少以遍及較反射鏡8之長度方向之長度Lx長之Mx之量之數量排列有單位偏光元件單元212之群。框架214係橫向並列地連接配置各單位偏光元件單元212之板狀之框體。於光配向裝置1(圖1)中，以於該偏光元件單元210之下方通過之方式搬送光配向對象物2。如圖9(B)所示，於光配向對象物2在偏光元件單元210之下方通過之期間照射之累積光量係於遍及至少反射鏡8之長度方向之長度Lx的任一部位均固定。 As shown in FIG. 9(A), the polarizing element unit 210 includes a plurality of unit polarizing element units 212 and a frame 214 in which the unit polarizing element units 212 are arranged side by side in a row. The polarizing element unit 210 performs polarization control on the light after the light distribution control by the mirror 8 (FIG. 1), and at least the unit polarized light is arranged in an amount of Mx longer than the length Lx of the longitudinal direction of the mirror 8. A group of component units 212. The frame 214 is connected to the frame-like frame in which the unit polarizing element units 212 are arranged side by side in the lateral direction. In the optical alignment device 1 (FIG. 1), the optical alignment object 2 is transported so as to pass under the polarizing element unit 210. As shown in FIG. 9(B), the cumulative amount of light that is irradiated while the light-aligning object 2 passes under the polarizing element unit 210 is fixed at any portion of the length Lx of at least the longitudinal direction of the mirror 8.

圖10係表示單位偏光元件單元212之概略構成之平面圖。 FIG. 10 is a plan view showing a schematic configuration of the unit polarizing element unit 212.

單位偏光元件單元212具備線柵偏光元件216、及支持該線柵偏光元件216之支持框架218，於平面視圖中形成為大致正三角形。於偏光元件單元210之框架214中，如上述圖9(A)所示，藉由使該單位偏光元件單元212交替上下反轉地進行排列，而於遍及上述長度Mx之四邊形區域215內鋪滿線柵偏光元件216。 The unit polarizing element unit 212 includes a wire grid polarizing element 216 and a support frame 218 that supports the wire grid polarizing element 216, and is formed in a substantially equilateral triangle in plan view. In the frame 214 of the polarizing element unit 210, as shown in FIG. 9(A) above, the unit polarizing element unit 212 is alternately arranged upside down, and is spread over the quadrangular region 215 over the length Mx. Wire grid polarizing element 216.

對單位偏光元件單元212之各部進行詳細敍述，支持框架218係於平面視圖為正三角形且具有遮光性之金屬板之面內具有大致正三角形之開口220的框體，以封閉該開口220之方式設有線柵偏光元件 216。該支持框架218之3邊中之其他單位偏光元件單元212所連之側邊225遮蔽光而成為光輸出之降低之要因，因此，其寬度VVx形成得儘量窄。再者，剩餘之1邊、即、底邊226只要為可支持於偏光元件單元210之框架214中之寬度，便可為任意寬度，並非必需為與側邊225相同之寬度。 Each part of the unit polarizing element unit 212 will be described in detail. The supporting frame 218 is a frame having a substantially equilateral triangular opening 220 in a plane having an equilateral triangle in plan view and having a light-shielding metal plate to close the opening 220. Wire grid polarizing element 216. The side 225 to which the other unit polarizing element unit 212 of the three sides of the support frame 218 is connected shields light and causes a decrease in light output. Therefore, the width VVx is formed to be as narrow as possible. Furthermore, the remaining one side, that is, the bottom side 226 may have any width as long as it can support the width of the frame 214 of the polarizing element unit 210, and is not necessarily the same width as the side 225.

又，如圖9(A)所示，光透過線柵偏光元件216之區域之寬度(與單位偏光元件單元212之排列方向B正交之方向(搬送方向Cx)之長度)等於支持框架218之開口220之寬度，以下，將該寬度稱為有效照射寬度Kx。 Further, as shown in FIG. 9(A), the width of the region of the light transmitted through the wire grid polarizing element 216 (the length of the direction orthogonal to the arrangement direction B of the unit polarizing element unit 212 (the transport direction Cx)) is equal to that of the support frame 218. The width of the opening 220, hereinafter, is referred to as the effective irradiation width Kx.

線柵偏光元件216係具有封閉支持框架218之開口220之大小的大致正三角形之板材，且以金屬線之方向Ax大致垂直於底邊226之方式設置於支持框架218。藉由將線柵偏光元件216設為正三角形，而於線柵偏光元件之製造步驟中，可使藉由切割而自晶圓切出之線柵偏光元件之數量較多，而可減少浪費。 The wire grid polarizing element 216 is a substantially equilateral triangular plate having a size that closes the opening 220 of the support frame 218, and is disposed on the support frame 218 such that the direction Ax of the metal wire is substantially perpendicular to the bottom edge 226. By forming the wire grid polarizing element 216 as an equilateral triangle, in the manufacturing process of the wire grid polarizing element, the number of wire grid polarizing elements cut out from the wafer by dicing can be increased, and waste can be reduced.

於偏光元件單元210之框架214中，如上述圖9(A)所示，一面使該構成之單位偏光元件單元212交替地上下反轉一面使側邊225彼此接觸而排列成一排，藉此，形成鋪滿有線柵偏光元件216之上述四邊形區域215。各單位偏光元件單元212之側邊225位於該四邊形區域215中，各側邊225於四邊形區域215中形成遮光區域230。 In the frame 214 of the polarizing element unit 210, as shown in FIG. 9(A) above, the unit polarizing element unit 212 having the configuration is alternately turned upside down and the side edges 225 are brought into contact with each other to be arranged in a row. The above-described quadrangular region 215 which is covered with the wire grid polarizing element 216 is formed. Side 225 of each unit of polarizing element unit 212 is located in the quadrilateral region 215, and each side 225 forms a light blocking region 230 in the quadrilateral region 215.

由於該遮光區域230沿鄰接之單位偏光元件單元212彼此之邊界部228延伸而遮蔽光，故而經過鄰接之線柵偏光元件216間之光、即、不受偏光控制之光由遮光區域230遮蔽，僅自偏光元件單元210之四邊形區域215輸出通過線柵偏光元件216而受到偏光控制之光。 Since the light shielding regions 230 extend along the boundary portions 228 of the adjacent unit polarizing element units 212 to shield the light, the light passing between the adjacent wire grid polarizing elements 216, that is, the light not controlled by the polarization, is shielded by the light shielding region 230. Light that is subjected to polarization control through the wire grid polarizing element 216 is output only from the quadrangular region 215 of the polarizing element unit 210.

此處，由於上述遮光區域230位於四邊形區域215中， 故而於照射區中，於對應於遮光區域230之位置產生偏光光束變弱之部位。因此，於搬送光配向對象物2使其通過照射區之情形時，若未實施任何對策，則於光配向對象物2中，於通過偏光光束較弱之部位的部位、與除此以外之部位，在光配向之程度上產生不均，而招致製造品質之降低。 Here, since the light shielding region 230 is located in the quadrangular region 215, Therefore, in the irradiation region, a portion where the polarized light beam is weak is generated at a position corresponding to the light-shielding region 230. Therefore, in the case where the light-aligning object 2 is passed through the irradiation region, if no countermeasure is taken, the portion of the light-aligning object 2 that passes through the portion where the polarized light beam is weak and the other portions are not used. In the degree of light distribution, unevenness occurs, resulting in a decrease in manufacturing quality.

因此，於本實施形態中，以如下方式防止光配光之不均。 Therefore, in the present embodiment, unevenness in light distribution is prevented as follows.

即，將遮光區域230設為固定寬度之線狀，且構成為於沿四邊形區域215之排列方向Bx之一端215A與另一端215B之間之任一點，沿搬送方向Cx之遮光區域230、與非遮光區域(即，光通過線柵偏光元件216之區域)之長度之比率均相等。 That is, the light-shielding region 230 is formed in a linear shape of a fixed width, and is configured to be located at any point between the one end 215A and the other end 215B of the arrangement direction Bx of the quadrangular region 215, and the light-shielding region 230 in the transport direction Cx. The ratio of the lengths of the light-shielding regions (i.e., the regions of light passing through the wire grid polarizing element 216) are all equal.

具體而言，於本實施形態中，如上述圖9(A)所示，將鄰接之單位偏光元件單元212之支持框架218之側邊225彼此連接而構成遮光體229，藉由利用該遮光體229形成遮光區域230，而使遮光區域230為寬度Wx之2倍之線狀，自四邊形區域215之一端215A遍及另一端215B而使遮光區域230為呈三角波形狀(亦可為正弦波形狀)延伸之形狀。藉此，如圖9(B)所示，於遍及四邊形區域215之排列方向Bx之各點，於與四邊形區域215之高度相當之有效照射寬度Kx中，沿搬送方向Cx之遮光區域230與非遮光區域之長度之比率相等，因此，於光配向對象物2通過之期間照射之累積光量亦於遍及排列方向Bx之各點相等，而防止於光配向之程度上產生不均。 Specifically, in the present embodiment, as shown in FIG. 9(A), the side edges 225 of the support frames 218 of the adjacent unit polarizing element units 212 are connected to each other to constitute a light blocking body 229, by using the light blocking body. 229 is formed in the light-shielding region 230, and the light-shielding region 230 is linear in shape of twice the width Wx, and the light-shielding region 230 is extended in a triangular wave shape (which may also be a sine wave shape) from one end 215A of the quadrangular region 215 to the other end 215B. The shape. Thereby, as shown in FIG. 9(B), in each of the arrangement direction Bx of the quadrangular region 215, in the effective irradiation width Kx corresponding to the height of the quadrangular region 215, the light-shielding region 230 in the transport direction Cx is different from Since the ratio of the lengths of the light-shielding regions is equal, the cumulative amount of light irradiated during the passage of the light-aligning object 2 is also equal to each point in the arrangement direction Bx, thereby preventing unevenness in the degree of light alignment.

再者，於本實施形態中，如圖11所示，若設為開口120為無遮光部分之正三角形之形狀，則使單位偏光元件單元212之2個側邊225所成之頂點240、與相鄰之單位偏光元件單元212之底邊226之外緣226A一致，因此，於有效照射寬度Kx之範圍內，自頂點240 起於沿搬送方向Cx之線Qx1上，不存在遮光區域230，該線Qx1上之累積光量高於其他部位。又，頂點240、與相鄰之支持框架218之開口220之角242之間之範圍Rx亦同樣地，於有效照射寬度Kx之範圍內，沿搬送方向Cx之線Qx2上之遮光區域230小於其他部位。因此，自各支持框架218之頂點240於範圍Rx之區間，設有使搬送方向Cx上之遮光區域230之比例與其他部位之線Qx3處之比例一致的調整用遮光板250。再者，沿搬送方向Cx之遮光區域230之長度Nx因於將角242之角度設為αx時，Nx=2×Wx/cosαx，故而頂點240處之調整用遮光板250沿搬送方向Cx之長度亦成為2×Wx/cosαx。 Further, in the present embodiment, as shown in FIG. 11, when the opening 120 is in the shape of an equilateral triangle having no light shielding portion, the apex 240 formed by the two side edges 225 of the unit polarizing element unit 212 and The outer edge 226A of the bottom edge 226 of the adjacent unit polarizing element unit 212 is identical, and therefore, within the range of the effective illumination width Kx, from the vertex 240 From the line Qx1 along the transport direction Cx, there is no light-shielding region 230, and the accumulated light amount on the line Qx1 is higher than other portions. Further, similarly to the range Rx between the apex 240 and the corner 242 of the opening 220 of the adjacent support frame 218, the light-shielding region 230 on the line Qx2 in the transport direction Cx is smaller than the other in the effective irradiation width Kx. Part. Therefore, from the apex 240 of each support frame 218 in the range of the range Rx, the adjustment visor 250 for matching the ratio of the light-shielding region 230 in the transport direction Cx to the line Qx3 of the other portion is provided. Further, the length Nx of the light-shielding region 230 in the transport direction Cx is Nx=2×Wx/cosαx when the angle of the angle 242 is αx, so the length of the adjustment mask 250 at the vertex 240 along the transport direction Cx It also becomes 2×Wx/cosαx.

如以上所說明般，根據本實施形態，由於沿線柵偏光元件216之邊界部228設有遮光區域230，故而可防止未受偏光控制之光照射至光配向對象物2。 As described above, according to the present embodiment, since the light-shielding region 230 is provided along the boundary portion 228 of the wire grid polarizing element 216, it is possible to prevent light that is not subjected to the polarization control from being irradiated to the light-aligning object 2.

而且，構成為遍及線柵偏光元件216之排列方向Bx，而於與線柵偏光元件216之排列方向Bx正交之搬送方向Cx，以遮光區域230、與非遮光之非遮光區域之長度之比率相等之方式設置遮光區域230。藉此，於排列方向Bx之各點，遮光區域230之長度Nx相對於有效照射寬度Kx所占之比例固定，沿搬送方向Cx之累積光量相等，因此，可抑制光配向對象物2之光配向之不均。 Further, the ratio is set to the arrangement direction Bx of the wire grid polarizing element 216, and the ratio of the length of the light-shielding region 230 to the non-light-shielding non-light-shielding region in the transport direction Cx orthogonal to the arrangement direction Bx of the wire grid polarizing element 216 The light blocking area 230 is provided in an equal manner. Thereby, at each point of the arrangement direction Bx, the ratio of the length Nx of the light-shielding region 230 to the effective irradiation width Kx is fixed, and the amount of accumulated light in the transport direction Cx is equal, so that the light alignment of the light-aligning object 2 can be suppressed. Uneven.

再者，該第2實施形態僅為例示本發明之一樣態者，於未脫離本發明之主旨之範圍可任意地進行變化及應用。 In addition, the second embodiment is merely illustrative of the present invention, and can be arbitrarily changed and applied without departing from the scope of the invention.

例如於第2實施形態中，例示了使線柵偏光元件216為三角形之情形，但並不限於此，亦可設為矩形狀。即，如圖12所示，將矩形之線柵偏光元件216嵌入至大致矩形之支持框架318，而構成單位偏光元件單元312，且將單位偏光元件單元312橫向並列地排列於框 架214中，而構成偏光元件單元300。 For example, in the second embodiment, the case where the wire grid polarizing element 216 is triangular is exemplified, but the present invention is not limited thereto, and may be formed in a rectangular shape. That is, as shown in FIG. 12, the rectangular wire grid polarizing element 216 is embedded in the substantially rectangular support frame 318 to constitute the unit polarizing element unit 312, and the unit polarizing element unit 312 is arranged side by side in the frame. In the holder 214, the polarizing element unit 300 is formed.

此時，各單位偏光元件單元312之支持框架318之左右兩側之邊325相對於排列方向Bx以既定角度(圖示例中為60度)傾斜，以邊325彼此接觸之方式排列各單位偏光元件單元312，而形成四邊形區域215，又，藉由邊325彼此，而於線柵偏光元件216彼此之邊界部328，利用具有相互接觸之2條邊325之遮光體329形成遮光區域330。於該偏光元件單元300中，遍及排列方向Bx，而於搬送方向Cx，以遮光區域330與非遮光區域之長度之比率相等之方式設置遮光區域330。藉此，於排列方向Bx之各點，沿搬送方向Cx之累積光量相等，因此，可抑制光配向對象物2之光配向之不均。 At this time, the sides 325 of the left and right sides of the support frame 318 of each unit of the polarizing element unit 312 are inclined at a predetermined angle (60 degrees in the illustrated example) with respect to the arrangement direction Bx, and the unit polarizations are arranged in such a manner that the sides 325 are in contact with each other. The element unit 312 forms a quadrangular region 215, and the light-shielding region 330 is formed by the light-shielding body 329 having the two sides 325 which are in contact with each other by the side 325 and the boundary portion 328 between the wire-gate polarizing elements 216. In the polarizing element unit 300, the light-shielding region 330 is provided in the transport direction Cx so that the ratio of the lengths of the light-shielding region 330 and the non-light-shielding region is equal to each other in the transport direction Cx. Thereby, the accumulated light amount in the transport direction Cx is equal at each point of the arrangement direction Bx, and therefore unevenness in the light alignment of the light-aligning object 2 can be suppressed.

再者，於該等第2實施形態及變化例中，例示了橫向並列地排列同一形狀之線柵偏光元件216(單位偏光元件單元212、312)之構成，但並不限於此。即，只要遍及排列方向Bx，而於搬送方向Cx，以遮光區域與非遮光區域之長度之比率相等之方式設置遮光區域，亦可橫向並列地排列形狀不同者。 In the second embodiment and the modified example, the configuration of the wire grid polarizing elements 216 (unit polarizing element units 212 and 312) having the same shape in the lateral direction is exemplified, but the present invention is not limited thereto. In other words, as long as the light-shielding region is provided so as to be equal to the ratio of the lengths of the light-shielding region and the non-light-shielding region in the transport direction Cx in the arrangement direction Bx, the shapes may be arranged side by side in the lateral direction.

第2實施形態中係利用支持框架218之側邊225形成沿邊界部228延伸之遮光區域230，但並不限於此，亦可將形成遮光區域230之構件設置為不與單位偏光元件單元212一體之獨立個體。 In the second embodiment, the light-shielding region 230 extending along the boundary portion 228 is formed by the side 225 of the support frame 218. However, the present invention is not limited thereto, and the member forming the light-shielding region 230 may be disposed not to be integrated with the unit polarizing element unit 212. Independent individual.

詳細地進行敍述，於線柵偏光元件216中，有因個體差等而導致金屬線之方向A未相對於外形成為固定之方向而產生偏移之情況。即，於上述實施形態中，如上述圖10所示，雖將線柵偏光元件216設為正三角形，且以金屬線之方向Ax大致垂直於底邊226之方式設置於支持框架218中，但實際上，例如，如圖13所示，有線柵偏光元件216之金屬線之方向Ax相對於底邊226之垂線Hx以角度θx(θ之值因各線 柵偏光元件216而異)傾斜之情形。 As described in detail, in the wire grid polarizing element 216, the direction A of the metal wire is not shifted with respect to the direction in which the outer shape is fixed due to individual difference or the like. That is, in the above-described embodiment, as shown in FIG. 10 described above, the wire grid polarizing element 216 is an equilateral triangle, and is disposed in the support frame 218 such that the direction Ax of the metal wire is substantially perpendicular to the bottom side 226. Actually, for example, as shown in FIG. 13, the direction Ax of the metal line of the wired gate polarizing element 216 is at an angle θx with respect to the perpendicular line Hx of the bottom side 226 (the value of θ is due to each line) The case where the gate polarizing element 216 differs depending on the tilt.

因此，可藉由設為於橫向並列地排列於框架214中之複數個單位偏光元件單元212之各者之間之邊界部228設置既定寬度之間隙作為調整區域δx的構成，而使各單位偏光元件單元212於調整區域δx之範圍內個別地旋轉，從而調整線柵偏光元件216之金屬線之方向Ax。 Therefore, a gap of a predetermined width can be set as a configuration of the adjustment region δx by the boundary portion 228 between the plurality of unit polarizing element units 212 arranged in the frame 214 in the lateral direction, and each unit can be polarized. The element unit 212 is individually rotated within the range of the adjustment area δx, thereby adjusting the direction Ax of the metal line of the wire grid polarizing element 216.

然而，若設置調整區域δx，則於邊界部228產生間隙，光會自該間隙透出。因此，可藉由設為如下構成，即，以圖14所示之方式形成與上述圖9所示之遮光區域230相當之形狀之遮光板280，將該遮光板280橫向並列地排列於框架214中，且以覆蓋調整金屬線之方向Ax之各單位偏光元件單元212之方式安裝於框架214，而封閉邊界部228之間隙，且無論各單位偏光元件單元212之調整量如何，均使遮光區域與非遮光區域之比率始終固定。 However, if the adjustment area δx is provided, a gap is generated in the boundary portion 228, and light is transmitted from the gap. Therefore, the light shielding plate 280 having a shape corresponding to the light shielding region 230 shown in FIG. 9 can be formed as shown in FIG. 14, and the light shielding plate 280 can be arranged side by side in the frame 214 in the lateral direction. And attached to the frame 214 so as to cover the unit polarizing element unit 212 of the direction Ax of the adjustment metal wire, and the gap between the boundary portions 228 is closed, and the light shielding area is made regardless of the adjustment amount of each unit polarizing element unit 212. The ratio to the non-shielding area is always fixed.

再者，當然，單位偏光元件單元212之側邊225之寬度Wx根據調整區域δx之寬度而變窄。 Further, of course, the width Wx of the side 225 of the unit polarizing element unit 212 is narrowed in accordance with the width of the adjustment area δx.

[第3實施形態] [Third embodiment]

對本發明之第3實施形態之照射裝置進行說明。 An irradiation apparatus according to a third embodiment of the present invention will be described.

如於第1實施形態中所說明般，一般而言，用於光配向之照射裝置係將長條之直管型紫外線燈管(第1實施形態中為燈管7)用於光源，以實現寬幅之帶狀之光配向膜之光配向。該長條之直管型紫外線燈管通常為於以石英玻璃管為材料且經加工而成之發光管內部封入有水銀或金屬鹵化物之高壓放電燈管。於此種放電燈管中，因點燈時之熱而導致發光管軟化，有產生燈管因自重而以燈管中央部為頂點沿長度方 向彎曲且向下下垂的下垂熱變形之可能性。 As described in the first embodiment, in general, an apparatus for aligning light is used for a long straight tube type ultraviolet lamp (light tube 7 in the first embodiment) for use in a light source. A wide strip of light is aligned with the light of the alignment film. The long straight tube type ultraviolet lamp tube is usually a high pressure discharge lamp tube in which a mercury glass or a metal halide is sealed inside a light-emitting tube made of a quartz glass tube. In such a discharge lamp tube, the light-emitting tube is softened due to the heat during lighting, and the lamp tube is caused by its own weight, and the center portion of the tube is the apex along the length. The possibility of sag thermal deformation to the curved and downward sag.

因此，已知如下技術，即，為防止點燈時之燈管之下垂熱變形，而利用發光管支持體，以自與發光管之管軸正交之方向進行夾持之方式，於發光管之中央部之外周上進行支持，以防止發光管中央部之下垂熱變形(例如日本專利特開2009-160545號公報) Therefore, a technique is known in which a light-emitting tube support body is used to prevent the thermal deformation of the tube under the lighting, and the light-emitting tube support body is clamped in a direction orthogonal to the tube axis of the light-emitting tube. Support is provided on the periphery of the central portion to prevent thermal deformation of the central portion of the arc tube (for example, Japanese Patent Laid-Open Publication No. 2009-160545)

於用於光配向之照射裝置中，具備沿燈管之長度方向延伸且對光配向對象物照射反射光之柱狀凹面反射鏡。於日本專利特開2009-160545號公報所記載之照射裝置中，反射鏡為鋁合金製，但於使用在若進行開孔等則容易破碎之玻璃之表面蒸鍍鋁或銀等金屬而形成的反射鏡之情形時，未考慮支持發光管以防止點燈時之燈管之下垂熱變形之構成。 In the irradiation apparatus for optical alignment, a columnar concave mirror extending in the longitudinal direction of the tube and irradiating the object to the light-aligning object is provided. In the irradiation device described in Japanese Laid-Open Patent Publication No. 2009-160545, the mirror is made of an aluminum alloy, but is formed by vapor-depositing a metal such as aluminum or silver on the surface of the glass which is easily broken by opening or the like. In the case of a mirror, the configuration of supporting the arc tube to prevent thermal deformation of the tube under the lighting is not considered.

於本實施形態中，對具備於使用玻璃製之反射鏡之情形時可支持燈管之構成的照射裝置進行說明。 In the present embodiment, an irradiation device that can support the configuration of the lamp tube when the glass mirror is used will be described.

圖15係表示本實施形態之照射裝置501之構成之正面透視圖。 Fig. 15 is a front perspective view showing the configuration of the irradiation device 501 of the present embodiment.

照射裝置501例如與第1實施形態同樣地，為對帶狀之光配向對象物之光配向膜照射光而進行光配向的光配向裝置，雖省略圖示，但具備第1實施形態中所說明之偏光元件單元10。 In the same manner as in the first embodiment, the illuminating device 501 is a light aligning device that illuminates the light aligning film of the light-aligning object of the strip-shaped light and performs light aligning, for example, although not shown, the first embodiment is described. The polarizing element unit 10.

又，本實施形態之照射裝置501於載置於設置面Fy之殼體510內具備設置於照射器設置架台504之照射器520、及載置光配向對象物之工件平台505。 Further, the irradiation device 501 of the present embodiment includes an illuminator 520 provided on the illuminator mounting stand 504 and a workpiece stage 505 on which the light aligning object is placed in the casing 510 placed on the installation surface Fy.

照射器520具備作為光源之直管型燈管507，於本實施形態中，對載置於配置於照射器520之正下方之工件平台505的光照射對象物向下照射光。再者，照射裝置501亦可為除可選擇向下照射 以外亦可任意選擇橫向照射或向上照射等照射方向之構成。再者，於本實施形態中，所謂上下係基於對載置於配置於照射器520之正下方之工件平台505的光照射對象物向下照射光之情形時之構成者。 The illuminator 520 includes a straight tube type lamp 507 as a light source. In the present embodiment, the light-irradiated object placed on the workpiece stage 505 disposed directly under the illuminator 520 is irradiated with light downward. Furthermore, the illumination device 501 can also be selected for downward illumination. The configuration of the irradiation direction such as lateral irradiation or upward irradiation may be arbitrarily selected. In the present embodiment, the upper and lower sides are based on the case where the light-irradiated object placed on the workpiece stage 505 disposed directly under the illuminator 520 is irradiated with light downward.

直管型燈管507為放電燈管，且係使用至少以與光配向對象物之寬度相比為同等以上之量延伸的長條之直管型(棒狀)之紫外線燈管。詳細內容於下文敍述，直管型燈管507係與以沿直管型燈管507之長度方向且圍繞直管型燈管507之方式設置之反射鏡單元580一體地安裝於燈管單元530中，燈管單元530裝卸自如地收容於照射器520中。 The straight tube type lamp 507 is a discharge tube, and is a long straight tube type (rod-shaped) ultraviolet lamp tube that extends at least equal to the width of the light-aligning object. As will be described in detail below, the straight tube type lamp 507 is integrally mounted in the lamp unit 530 with a mirror unit 580 disposed in the longitudinal direction of the straight tube type lamp 507 and surrounding the straight tube type lamp tube 507. The lamp unit 530 is detachably housed in the illuminator 520.

於照射器520中設有換氣用之通氣口521。於通氣口521連接有連通至殼體510之外部之換氣導管511。於通氣口521之內側設有未圖示之送風機。藉由該送風機，而使冷卻風於照射器520內流動，從而直接對直管型燈管507及其周邊進行空氣冷卻。 A vent 521 for ventilation is provided in the illuminator 520. A ventilation duct 511 that communicates with the outside of the housing 510 is connected to the vent 521. A blower (not shown) is provided inside the vent 521. The cooling fan flows through the illuminator 520 by the blower, thereby directly cooling the straight tube type lamp 507 and its periphery.

圖16係表示燈管單元530之圖，圖17係燈管單元530之剖面圖。如圖16、圖17所示，燈管單元530於下表面開口之箱形之框體531內收納直管型燈管507及反射鏡單元580，且裝卸自如地收容於照射器520內。 16 is a view showing the lamp unit 530, and FIG. 17 is a cross-sectional view of the lamp unit 530. As shown in FIG. 16 and FIG. 17, the lamp unit 530 accommodates the straight tube type lamp 507 and the mirror unit 580 in a box-shaped frame 531 whose lower surface is opened, and is detachably housed in the illuminator 520.

框體531包含不鏽鋼等具有剛性之金屬製材料。框體531包括上表面面板532、一對側面面板533及一對端面面板534，且具備於下方開口之照射開口545。 The frame 531 includes a rigid metal material such as stainless steel. The housing 531 includes an upper surface panel 532, a pair of side panels 533, and a pair of end surface panels 534, and is provided with an illumination opening 545 that is open at the lower side.

於框體531之上表面面板532，沿長度方向呈線狀地排成2排而設有複數個用以於框體531內對直管型燈管507及其周邊進行空氣冷卻之空氣流通的通氣孔532a。 The upper surface panel 532 of the frame 531 is linearly arranged in two rows along the longitudinal direction, and a plurality of air circulated for air cooling of the straight tube type lamp 507 and its periphery in the frame body 531 are provided. Vent 532a.

於框體531之一對側面面板533，沿上緣設有複數個滾輪533a。於照射器520內，設有於對照射器520裝卸燈管單元530時 供框體531之滾輪533a滑動且引導燈管單元530之導軌(未圖示)。燈管單元530構成為使滾輪533a於設置於照射器520內之導軌上滑動，且可自照射裝置501之一端面(前表面)之開口沿長度方向拉出放入。又，於框體531之上表面面板，設有沿設置於照射器520內之導軌之側面滑動之滾輪532b。又，於框體531之一對端面面板534，安裝有拉出放入燈管單元時使用之手柄534a。 One side of the frame 531 is opposite to the side panel 533, and a plurality of rollers 533a are provided along the upper edge. In the illuminator 520, when the lamp unit 530 is attached to and detached from the illuminator 520 The roller 533a of the frame 531 slides and guides the guide rail (not shown) of the lamp unit 530. The lamp unit 530 is configured to slide the roller 533a on a guide rail provided in the illuminator 520, and can be pulled out from the opening of one end surface (front surface) of the irradiation device 501 in the longitudinal direction. Further, on the upper surface panel of the frame 531, a roller 532b that slides along the side surface of the guide rail provided in the illuminator 520 is provided. Further, a handle 534a for pulling out the lamp unit is attached to one end face panel 534 of the casing 531.

雖省略圖示，但於框體531之內部，具備支持直管型燈管507之管端支持部、及對直管型燈管507供給電能之電源供給機構。直管型燈管507係兩端部由管端支持部支持，收容於框體531內，並且由電源供給機構供給電能而發光。 Although not shown in the drawings, inside the casing 531, a pipe end support portion for supporting the straight tube type lamp 507 and a power supply mechanism for supplying electric power to the straight tube type lamp tube 507 are provided. The straight tube type lamp 507 is supported by the tube end support portion at both end portions, and is housed in the housing 531, and is supplied with electric energy by the power supply mechanism to emit light.

直管型燈管507例如係全長為3m左右之長條之高輸出直管型燈管。直管型燈管507係於包含石英玻璃等具有高耐熱性及透光性之材料的發光管之內部封入有水銀或金屬鹵化物之高壓放電燈管。於直管型燈管507點燈時，直管型燈管507之管壁之溫度成為800℃~900℃左右之高溫。 The straight tube type lamp 507 is, for example, a long output straight tube type lamp having a total length of about 3 m. The straight tube type lamp 507 is a high pressure discharge lamp tube in which mercury or a metal halide is sealed inside an arc tube including a material having high heat resistance and light transmissivity such as quartz glass. When the straight tube type lamp 507 is turned on, the temperature of the tube wall of the straight tube type lamp 507 becomes a high temperature of about 800 ° C to 900 ° C.

反射鏡單元580包括反射鏡508、通風板535、以及於通風板535與框體531之側面面板533之間保持反射鏡508的第1保持體536a、536b及第2保持體538a、538b。 The mirror unit 580 includes a mirror 508, a ventilating plate 535, and first holding bodies 536a and 536b and second holding bodies 538a and 538b that hold the mirror 508 between the ventilating plate 535 and the side surface panel 533 of the casing 531.

反射鏡508係剖面為橢圓形且沿直管型燈管507之長度方向延伸之柱狀凹面反射鏡，使直管型燈管507之光聚集而自照射開口545照射至光配向對象物。如圖17、圖18所示，反射鏡508係將彎曲成弓狀之多片板狀之小片鏡(反射面)508a、508b組合成剖面橢圓形狀而構成。各鏡508a、508b係使具有反射性之覆膜附著形成於玻璃之凹面側表面而被賦予反射性。各鏡508a、508b架設並固定於安裝在設置於直管型 燈管507之管軸正上方之通風板535的第1保持體536a、536b、與安裝在框體531之側面面板533的第2保持體538a、538b之間。 The mirror 508 is a columnar concave mirror having an elliptical cross section and extending in the longitudinal direction of the straight tube type lamp 507, so that the light of the straight tube type lamp 507 is concentrated and irradiated from the irradiation opening 545 to the light-aligning object. As shown in FIGS. 17 and 18, the mirror 508 is configured by combining a plurality of plate-shaped small mirrors (reflecting surfaces) 508a and 508b which are curved in a bow shape into a cross-sectional elliptical shape. Each of the mirrors 508a and 508b is formed such that a reflective film is adhered to the concave side surface of the glass to impart reflectivity. Each of the mirrors 508a, 508b is erected and fixed to be mounted on a straight tube type The first holding bodies 536a and 536b of the ventilating plate 535 directly above the tube axis of the bulb 507 are interposed between the second holding bodies 538a and 538b attached to the side surface panel 533 of the housing 531.

使來自直管型燈管507之一側面507a之光反射之鏡508a、與使來自直管型燈管507之另一側面507b之光反射之鏡508b分別如圖18所示沿燈管單元530之長度方向連結有複數個，而構成一對凹面反射鏡508、508之一者及另一者。又，鏡508a與鏡508b沿燈管單元530之長度方向配置於相互錯開之位置。根據該構成，藉由將鏡508a、508b沿燈管單元530之長度方向分割且形成為複數個小片，可於裝卸反射鏡508等作業上使操作容易，並且可降低製造成本。又，由於將鏡508a與鏡508b沿燈管單元530之長度方向配置於相互錯開之位置，故而可減小對照射至鄰接之鏡508a、508a與鏡508b、508b之接合線的反射光之光路之影響。 A mirror 508a for reflecting light from one side 507a of the straight tube type lamp 507 and a mirror 508b for reflecting light from the other side surface 507b of the straight tube type lamp 507 are respectively along the tube unit 530 as shown in FIG. One of the pair of concave mirrors 508, 508 and the other are connected in plurality in the longitudinal direction. Further, the mirror 508a and the mirror 508b are disposed at positions shifted from each other along the longitudinal direction of the bulb unit 530. According to this configuration, by dividing the mirrors 508a and 508b along the longitudinal direction of the bulb unit 530 and forming a plurality of small pieces, it is possible to facilitate the operation of attaching and detaching the mirror 508 and the like, and it is possible to reduce the manufacturing cost. Further, since the mirror 508a and the mirror 508b are disposed at positions shifted from each other along the longitudinal direction of the bulb unit 530, the optical path of the reflected light irradiated to the bonding wires of the adjacent mirrors 508a and 508a and the mirrors 508b and 508b can be reduced. The impact.

如圖17、圖18所示，通風板535設置於直管型燈管507之正上方，且沿直管型燈管507之管軸延伸。雖省略圖示，但通風板535之兩端例如由螺釘等緊固用具固定於框體531之端面面板534。通風板535係形成為剖面為四邊形之管狀之通風板，且上下貫穿之複數個通風孔535a相互以既定間隔沿燈管單元530之長度方向設有複數個。各通風孔535a可形成為長孔形狀。 As shown in FIGS. 17 and 18, the ventilating plate 535 is disposed directly above the straight tube type lamp 507 and extends along the tube axis of the straight tube type lamp tube 507. Although not shown in the drawings, both ends of the ventilating plate 535 are fixed to the end surface panel 534 of the frame 531 by a fastening tool such as a screw. The ventilating plate 535 is formed as a tubular ventilating plate having a quadrangular cross section, and a plurality of venting holes 535a penetrating the upper and lower sides are provided at a predetermined interval along the longitudinal direction of the bulb unit 530. Each of the ventilation holes 535a may be formed in an elongated hole shape.

第1保持體536a、536b分別固定於通風板535之兩側面，且沿直管型燈管507之管軸延伸。於第1保持體536a、536b之側面形成有***鏡508a、508b之上端部的溝536c。 The first holding bodies 536a and 536b are respectively fixed to both side faces of the ventilating plate 535 and extend along the tube axis of the straight tube type lamp tube 507. Grooves 536c that are inserted into the upper end portions of the mirrors 508a and 508b are formed on the side surfaces of the first holding bodies 536a and 536b.

第2保持體538a、538b分別支持於沿燈管單元530之長度方向安裝於框體531之側面面板533之照射開口545附近的固定具537a、537b。第2保持體538a、538b相互隔開既定間隔而安裝於與 鄰接之鏡508a、508a及鏡508b、508b之接合線對應之位置。於各第2保持體538a、538b之上表面，形成有***鄰接之鏡508a、508a及鏡508b、508b之下端部的溝538c。 The second holding bodies 538a and 538b are respectively supported by the fixtures 537a and 537b attached to the vicinity of the irradiation opening 545 of the side surface panel 533 of the housing 531 along the longitudinal direction of the bulb unit 530. The second holding bodies 538a and 538b are attached to each other at a predetermined interval. The positions of the bonding wires of the adjacent mirrors 508a, 508a and the mirrors 508b, 508b correspond to each other. On the upper surface of each of the second holding bodies 538a and 538b, a groove 538c into which the adjacent mirrors 508a and 508a and the lower ends of the mirrors 508b and 508b are inserted is formed.

根據上述構成，反射鏡508可藉由將各鏡508a、508b之上端部***至形成於第1保持體536a、536b之側面之溝536c，並且將鄰接之鏡508a、508a及鏡508b、508b之接合線配置於與第2保持體538a、538b對應之位置，將鄰接之鏡508a、508a及鏡508b、508b之下端部***至第2保持體538a、538b之溝538c，而容易地組裝。 According to the above configuration, the mirror 508 can insert the upper end portions of the respective mirrors 508a and 508b into the grooves 536c formed on the side faces of the first holding bodies 536a and 536b, and the adjacent mirrors 508a and 508a and the mirrors 508b and 508b. The bonding wires are disposed at positions corresponding to the second holders 538a and 538b, and the lower ends of the adjacent mirrors 508a and 508a and the mirrors 508b and 508b are inserted into the grooves 538c of the second holders 538a and 538b, and are easily assembled.

如圖17所示，於反射鏡單元580中，於燈管單元530之長度方向之大致中央支持直管型燈管507的支持部540固定安裝於通風板535。支持部540係為防止直管型燈管507因自重或熱所致之下垂而設置。 As shown in FIG. 17, in the mirror unit 580, the support portion 540 that supports the straight tube type lamp 507 is fixedly attached to the ventilating plate 535 at substantially the center in the longitudinal direction of the bulb unit 530. The support portion 540 is provided to prevent the straight tube type lamp 507 from sagging due to its own weight or heat.

支持部540包括一對支持體541(以下稱為支持體541a、541b)。各支持體541a、541b包括形成為大致Z字形狀之軸543、及繞軸543旋轉自如地安裝於軸543上之支持片542。各支持體541a、541b使軸543之一端部543a上下地貫穿至通風板535，且利用螺帽543b等緊固用具而懸掛於通風板535。 The support portion 540 includes a pair of support bodies 541 (hereinafter referred to as supports 541a, 541b). Each of the support bodies 541a and 541b includes a shaft 543 formed in a substantially zigzag shape, and a support piece 542 rotatably attached to the shaft 543 around the shaft 543. Each of the support bodies 541a and 541b allows one end portion 543a of the shaft 543 to pass through the ventilating plate 535 up and down, and is suspended from the ventilating plate 535 by a fastening tool such as a nut 543b.

軸543亦可構成為包含具有剛性之金屬製材料，且於一端部543a，外周面攻有與螺帽543b對應之螺紋。又，軸543由具有高耐熱性及高導熱性且不會因直管型燈管507點燈時之熱而與支持片542具有反應性之金屬或合金形成。作為軸543之材料，例如可使用鎳合金。軸543係以一端部543a於直管型燈管507之管軸Xy之正上方貫穿通風板535之方式配設。根據該構成，可使構成反射鏡508之鏡508a、508b之上端延伸至直管型燈管507之上方，且可使直管型燈管 507之光高效地照射至光照射對象物。 The shaft 543 may be configured to include a metal material having rigidity, and may have a thread corresponding to the nut 543b at the one end portion 543a. Further, the shaft 543 is formed of a metal or an alloy having high heat resistance and high thermal conductivity and which is not reactive with the support piece 542 due to heat when the straight tube type lamp 507 is turned on. As the material of the shaft 543, for example, a nickel alloy can be used. The shaft 543 is disposed such that the one end portion 543a penetrates the louver 535 directly above the tube axis Xy of the straight tube type lamp 507. According to this configuration, the upper ends of the mirrors 508a, 508b constituting the mirror 508 can be extended above the straight tube type lamp 507, and the straight tube type tube can be made. The light of 507 is efficiently irradiated to the object to be irradiated with light.

支持片542例如亦可構成為包括壁厚之板狀構件，雖省略圖示，但具有供軸543貫穿之貫穿孔且繞軸543旋轉。支持片542與直管型燈管507之發光管同樣地，包含石英玻璃等具有高耐熱性且不會因直管型燈管507點燈時之熱而與直管型燈管507具有反應性之材料。根據該構成，可減小直管型燈管507與支持片542之間之溫度差。較為理想的是支持片542之高度大於直管型燈管507之半徑ry，且較為理想的是支持片542之下緣延伸至直管型燈管507之下端附近。根據該構成，可利用支持片542以上抬之方式支持直管型燈管507，而防止因直管型燈管507之自重或熱所導致之下垂。 The support piece 542 may be configured, for example, as a plate-shaped member having a thick thickness. Although not shown, the support piece 542 has a through hole through which the shaft 543 is inserted and rotates around the shaft 543. Similarly to the arc tube of the straight tube type lamp 507, the support piece 542 has high heat resistance such as quartz glass and is not reactive with the straight tube type lamp 507 due to heat when the straight tube type lamp 507 is turned on. Material. According to this configuration, the temperature difference between the straight tube type lamp 507 and the support piece 542 can be reduced. Preferably, the height of the support piece 542 is greater than the radius ry of the straight tube type lamp 507, and it is preferable that the lower edge of the support piece 542 extends to the vicinity of the lower end of the straight tube type lamp tube 507. According to this configuration, the straight tube type lamp 507 can be supported by the support piece 542 being lifted up, and the sagging can be prevented from being caused by the weight or heat of the straight tube type lamp 507.

支持片542之與直管型燈管507對向之對向面542a切成沿直管型燈管507之圓周之凹面形狀。再者，構成為支持片542之對向面542a之曲率形成得較直管型燈管507之圓周之曲率小，且於對向面542a與直管型燈管507之周面之間形成間隙Gy。根據該構成，可利用該間隙G吸收因直管型燈管507之熱膨脹所致之變化、或直管型燈管507及其他構成零件之應變。 The opposing piece 542a of the support piece 542 and the straight tube type lamp 507 are cut into a concave shape along the circumference of the straight tube type lamp 507. Further, the curvature of the opposite surface 542a of the support piece 542 is formed to be smaller than the curvature of the circumference of the straight tube type lamp 507, and a gap is formed between the opposite surface 542a and the circumferential surface of the straight tube type lamp 507. Gy. According to this configuration, the gap G can be used to absorb the change due to the thermal expansion of the straight tube type lamp 507 or the strain of the straight tube type bulb 507 and other components.

如圖19所示，支持片542可繞軸543旋轉。支持片542可為可繞軸543旋轉360°之構成，或亦可為僅可旋轉90°之構成。於交換直管型燈管507時等，可藉由於自燈管單元530裝卸直管型燈管507時，使支持片542旋轉例如90°，而使支持片542自直管型燈管507之裝卸路徑退離。藉此，不卸除支持部540或支持片542便可進行直管型燈管507之裝卸。 As shown in FIG. 19, the support piece 542 is rotatable about the axis 543. The support piece 542 may be configured to be rotatable by 360° about the axis 543, or may be configured to be rotated only by 90°. When the straight tube type lamp 507 is exchanged, the support piece 542 can be rotated by, for example, 90° when the straight tube type lamp 507 is attached or detached from the lamp unit 530, and the support piece 542 is made from the straight tube type lamp 507. The loading and unloading path is retired. Thereby, the straight tube type lamp 507 can be attached and detached without removing the support portion 540 or the support piece 542.

如圖18所示，各支持體541a、541b安裝於通風板535之鄰接之通風孔535a間。又，支持體541a、541b沿直管型燈管507 之管軸Xy方向配置於相互錯開之位置。根據該構成，支持體541a、541b於朝與直管型燈管507之管軸Xy平行之面的投影圖上，不會成為隔著直管型燈管507而對向之位置關係。藉此，可防止於燈管單元530之照射面上，來自直管型燈管507之照射光之光路被支持體541a、541b遮擋之影響集中於1個部位。再者，各支持體541a、541b間之距離可設為於直管型燈管507之任一部位均不會因自重或熱而產生向下下垂之變化的任意距離。 As shown in FIG. 18, each of the support bodies 541a and 541b is attached between the adjacent vent holes 535a of the ventilating plate 535. Moreover, the support bodies 541a, 541b are along the straight tube type lamp 507 The tube axis Xy direction is disposed at positions shifted from each other. According to this configuration, the projections of the support bodies 541a and 541b on the surface parallel to the tube axis Xy of the straight tube type lamp 507 do not have a positional relationship with respect to the straight tube type lamp tube 507. Thereby, it is possible to prevent the light path of the light from the straight tube type lamp 507 from being blocked by the support bodies 541a and 541b on the irradiation surface of the bulb unit 530 from being concentrated on one portion. Further, the distance between the support bodies 541a and 541b can be set to any distance that does not cause any downward change due to self-weight or heat in any part of the straight tube type lamp 507.

說明對直管型燈管507及其周邊進行空氣冷卻之空氣之流動，藉由設置於照射器520之通氣口521之內側的未圖示之送風機之驅動，而如圖17所示，經由照射開口545將冷卻風取入至燈管單元530之內部。圖17中之箭頭Ay係表示燈管單元530之內部之冷卻風之流動之圖，自照射開口545取入之冷卻風對直管型燈管507及其周邊進行冷卻，經過通風板535之通風孔535a、設置於框體531之上表面面板532中之通氣孔532a，藉由換氣導管511而排出至照射裝置501之殼體510外部。再者，由於直管型燈管507由支持部540支持，故而可抑制因框體531內部之冷卻風之流動而導致之直管型燈管507之振動。 The flow of air which is air-cooled to the straight tube type lamp 507 and its periphery is described as being driven by a blower (not shown) provided inside the vent port 521 of the illuminator 520, as shown in FIG. The opening 545 takes the cooling air into the interior of the lamp unit 530. The arrow Ay in Fig. 17 is a diagram showing the flow of the cooling air inside the lamp unit 530, and the cooling air taken in from the irradiation opening 545 cools the straight tube type lamp 507 and its periphery, and is ventilated through the ventilating plate 535. The hole 535a and the vent hole 532a provided in the upper surface panel 532 of the frame 531 are discharged to the outside of the casing 510 of the irradiation device 501 by the ventilation duct 511. Further, since the straight tube type lamp 507 is supported by the support portion 540, the vibration of the straight tube type bulb 507 due to the flow of the cooling air inside the casing 531 can be suppressed.

如以上所說明般，根據第3實施形態，具備燈管單元530，該燈管單元530於框體531之內部內置有：直管型燈管507；及反射鏡單元580，其沿直管型燈管507之管軸Xy方向延伸，且具備具有使直管型燈管507發出之光反射之反射面508a、508b的玻璃製之反射鏡508；且反射鏡單元580具有沿直管型燈管507之管軸Xy延伸之通風板535、及設置於該通風板535之兩旁之一對上述反射鏡508、508，且於通風板535之長度方向之大致中央安裝有支持直管型燈管 507之支持部540。藉此，可一面使用玻璃製之反射鏡508，一面將支持直管型燈管507之支持部540安裝於反射鏡單元580，而可防止直管型燈管507因自重或熱而下垂。 As described above, according to the third embodiment, the lamp unit 530 includes a straight tube type lamp 507 and a mirror unit 580 which is formed along the straight tube type. The tube 507 extends in the tube axis Xy direction, and is provided with a glass mirror 508 having reflective surfaces 508a and 508b for reflecting light emitted from the straight tube type lamp 507; and the mirror unit 580 has a straight tube type lamp a ventilating plate 535 extending from the tube axis Xy of the 507, and one of the mirrors 508 and 508 disposed on both sides of the ventilating plate 535, and supporting the straight tube type lamp at a substantially central portion of the longitudinal direction of the ventilating plate 535 507 support unit 540. Thereby, the support portion 540 supporting the straight tube type lamp 507 can be attached to the mirror unit 580 while using the glass mirror 508, and the straight tube type bulb 507 can be prevented from sagging due to its own weight or heat.

又，支持部540包括一對支持體541，該一對支持體541具有自該通風板535之長度方向之大致中央延伸至直管型燈管507之側面507a、507b的軸543、及軸543貫穿且支持直管型燈管507之支持片542，支持體541隔著直管型燈管507而配置於相互對向之位置。藉此，由於使軸543自通風板535之中央延伸至直管型燈管507之側面507a、507b，故而可使構成反射鏡508之鏡508a、508b之上端延伸至直管型燈管507之上方，而可使直管型燈管507之光有效率地照射至光照射對象物。 Further, the support portion 540 includes a pair of support bodies 541 having a shaft 543 extending from a substantially central portion of the longitudinal direction of the louver 535 to the side faces 507a and 507b of the straight tube type lamp 507, and a shaft 543 The support piece 542 that penetrates and supports the straight tube type lamp 507, and the support body 541 are disposed at positions facing each other across the straight tube type lamp tube 507. Thereby, since the shaft 543 extends from the center of the ventilating plate 535 to the side faces 507a, 507b of the straight tube type lamp 507, the upper ends of the mirrors 508a, 508b constituting the mirror 508 can be extended to the straight tube type lamp 507. Above, the light of the straight tube type lamp 507 can be efficiently irradiated to the light-irradiated object.

又，支持片542設置成可繞軸543旋轉。藉此，於自燈管單元530裝卸交換直管型燈管507時等之直管型燈管507時，不卸除支持體541或支持片542，僅使其旋轉例如90°，便可使支持片542自直管型燈管507之裝卸路徑退離，而可容易地進行直管型燈管507之裝卸。 Further, the support piece 542 is provided to be rotatable about the axis 543. Therefore, when the straight tube type lamp 507 such as when the straight tube type lamp 507 is exchanged from the lamp unit 530, the support body 541 or the support piece 542 is not removed, and only the rotation of the support piece 541 or the support piece 542 is performed, for example, by 90°. The support piece 542 is retracted from the loading and unloading path of the straight tube type lamp 507, and the straight tube type lamp tube 507 can be easily attached and detached.

又，支持體541沿直管型燈管507之管軸Xy方向配置於相互錯開之位置。藉此，可防止於燈管單元530之照射面上，來自直管型燈管507之照射光之光路被支持體541a、541b遮擋之影響集中於1個部位。 Further, the support members 541 are disposed at positions shifted from each other along the tube axis Xy direction of the straight tube type bulb 507. Thereby, it is possible to prevent the light path of the light from the straight tube type lamp 507 from being blocked by the support bodies 541a and 541b on the irradiation surface of the bulb unit 530 from being concentrated on one portion.

[第4實施形態] [Fourth embodiment]

其次，對本發明之第4實施形態進行說明。 Next, a fourth embodiment of the present invention will be described.

於該第4實施形態中，對在交換第1實施形態~第3實施形態中 說明之光配向裝置、照射裝置之長條之直管型紫外線燈管時的燈管交換台進行說明。 In the fourth embodiment, the first embodiment to the third embodiment are exchanged. A description will be given of a lamp exchange station in the case of a straight-line type ultraviolet lamp in which the light-aligning device and the irradiation device are long.

一般而言，於光配向裝置或照射裝置等中，長條之直管型紫外線燈管沿燈管之管軸方向延伸，且與對光配向對象物照射反射光之柱狀凹面反射鏡一併收納於框體內。而且，於該框體內具備直管型紫外線燈管及反射鏡之燈管單元構成為可自紫外線照射裝置之端面拉出，以進行燈管交換等維護(例如參照日本專利特開平06-096610號公報)。 In general, in a light alignment device or an irradiation device, a long straight tube type ultraviolet lamp tube extends in the tube axis direction of the lamp tube, and is combined with a columnar concave mirror that illuminates the light-aligning object with reflected light. Stored in the frame. Further, the lamp unit including the straight tube type ultraviolet lamp and the mirror in the frame is configured to be pulled out from the end surface of the ultraviolet irradiation device to perform maintenance such as lamp exchange (for example, refer to Japanese Patent Laid-Open No. 06-096610 Bulletin).

然而，於將內置有長條之直管型燈管之燈管單元拉出至照射裝置之外部時，必需由多名作業者一面支持燈管單元一面將其拉出，作業性不佳。 However, when the lamp unit in which the long straight tube type lamp is incorporated is pulled out to the outside of the irradiation device, it is necessary for a plurality of operators to support the lamp unit while pulling it out, which is inferior in workability.

因此，於本發明之第4實施形態中，對可有效率地交換直管型燈管之燈管交換台進行說明。 Therefore, in the fourth embodiment of the present invention, a lamp exchange station that can efficiently exchange straight tube type lamps will be described.

圖20係將本發明之第4實施形態之燈管交換台601之構成與利用該燈管交換台601交換直管型燈管681之照射裝置700一併表示之圖。 FIG. 20 is a view showing the configuration of the lamp exchange 601 according to the fourth embodiment of the present invention together with the irradiation device 700 for exchanging the straight tube type lamp 681 by the lamp exchange 601.

照射裝置700例如係作為用於液晶配向膜之配向之紫外線照射裝置的光配向裝置，雖省略圖示，但與第1實施形態同樣地內置有偏光元件單元10。 The illuminating device 700 is, for example, an optical aligning device that is used as an ultraviolet ray irradiation device for aligning a liquid crystal alignment film. Although not shown, the polarizing element unit 10 is incorporated in the same manner as in the first embodiment.

又，本實施形態之照射裝置700具備照射器設置架台704、及載置光照射對象物之工件平台(未圖示)。照射器設置架台704橫架於與設有照射裝置700之設置面603相隔既定距離之上方位置，且內置有照射器690。照射器690收容有自照射裝置700之一端面701拉出且裝卸自如地為照射器690所具備的燈管單元680。 Further, the irradiation apparatus 700 of the present embodiment includes an illuminator installation stand 704 and a workpiece stage (not shown) on which the light-irradiated object is placed. The illuminator installation stand 704 is horizontally positioned above a predetermined distance from the installation surface 603 on which the irradiation device 700 is provided, and has an illuminator 690 built therein. The illuminator 690 houses a lamp unit 680 that is detachably attached to one end surface 701 of the irradiation device 700 and is detachably provided to the illuminator 690.

燈管單元680沿作為光源的直管型燈管681之管軸Xz延伸，於內部包括該直管型燈管681及反射鏡683，且向正下方照射由反射鏡683聚集之偏光光束(參照圖27(B))。直管型燈管681為放電燈，且其係使用至少以與光配向對象物之寬度相比為同等以上之量延伸的直管型(棒狀)紫外線燈管。反射鏡683係剖面為橢圓形且沿直管型燈管681之管軸Xz延伸之柱狀凹面反射鏡，於設置於照射器690內之狀態下，覆蓋直管型燈管681之上側，聚集直管型燈管681之光，而向配置於照射器690之正下方之光配向對象物照射。燈管單元680內置於照射裝置700內，且設置成可自該照射裝置700之一端面701沿直管型燈管681之管軸Xz方向與燈管單元680一體地拉出以進行交換。 The lamp unit 680 extends along the tube axis Xz of the straight tube type lamp 681 as a light source, and includes the straight tube type lamp 681 and the mirror 683 therein, and directly illuminates the polarized light beam collected by the mirror 683 (refer to Figure 27 (B)). The straight tube type lamp 681 is a discharge lamp, and is a straight tube type (rod-shaped) ultraviolet lamp tube that extends at least equal to or larger than the width of the light-aligning object. The mirror 683 is a columnar concave mirror having an elliptical cross section and extending along the tube axis Xz of the straight tube type lamp 681, and is disposed on the upper side of the straight tube type lamp 681 in a state of being disposed in the illuminator 690. The light of the straight tube type lamp 681 is irradiated to the light distribution object disposed directly under the illuminator 690. The lamp unit 680 is built in the irradiation device 700, and is provided to be integrally pulled out from the end surface 701 of the irradiation device 700 along the tube axis Xz direction of the straight tube type lamp 681 for exchange.

燈管交換台601包括燈管交換部610及台車部650。燈管交換部610之詳細內容於下文敍述，其具備當自照射裝置700之照射器690拉出燈管單元680時支持燈管單元680且沿拉出方向進行引導的導軌611。 The lamp exchange 601 includes a lamp exchange unit 610 and a carriage unit 650. The details of the lamp exchange unit 610 are described below, and include a guide rail 611 that supports the lamp unit 680 and guides it in the pull-out direction when the lamp unit 680 is pulled out from the illuminator 690 of the irradiation device 700.

燈管交換部610固定於台車部650，且構成為可與台車部650一體地移動。於台車部650之底面安裝有複數個腳輪607。台車部650構成為可藉由該等腳輪607而移動。根據該構成，例如當於交換直管型燈管681時等自照射裝置700拉出燈管單元680時，可視需要而對照射裝置700設置燈管交換台601。藉此，於存在多台照射裝置700之情形時，亦可利用一台燈管交換台601進行多台照射裝置700之直管型燈管681之交換等維護。 The lamp exchange unit 610 is fixed to the carriage unit 650 and is configured to be movable integrally with the carriage unit 650. A plurality of casters 607 are mounted on the bottom surface of the trolley portion 650. The truck portion 650 is configured to be movable by the casters 607. According to this configuration, for example, when the lamp unit 680 is pulled out from the irradiation device 700 when the straight tube type lamp 681 is exchanged, the lamp exchange table 601 is provided to the irradiation device 700 as needed. Thereby, when a plurality of irradiation apparatuses 700 are present, maintenance of the exchange of the straight tube type lamps 681 of the plurality of irradiation apparatuses 700 can be performed by one tube exchange table 601.

圖21係燈管交換台601之側視圖。於台車部650，具備作業者605用以進行直管型燈管681之交換等作業之支架606。作業者605可藉由暫設之台階602登上至該支架606而進行作業。又，於台車 部650，一體地設有載置燈管交換部610之載置台608。 Figure 21 is a side view of the lamp exchange 601. The bogie portion 650 includes a bracket 606 for the operator 605 to perform an operation such as exchange of the straight tube type lamp 681. The operator 605 can perform work by boarding the bracket 606 with the temporary step 602. Again, in the trolley The portion 650 is integrally provided with a mounting table 608 on which the lamp exchange unit 610 is placed.

燈管交換部610具備固定於載置台608之升降單元640、及可搖動地支持燈管單元680之搖動單元620。 The lamp exchange unit 610 includes a lifting unit 640 fixed to the mounting table 608 and a shaking unit 620 that swayably supports the lamp unit 680.

又，於燈管交換台601，於底面附近設有使燈管交換台601之位置對準於照射裝置700之對準標記660。照射裝置700以於設置面603上不動之方式設置。於照射裝置700之一端面701附近之設置面603上，如圖20及圖22所示，利用螺釘609a固定有定位導引609。定位導引609藉由使燈管交換台601之對準標記660之位置對準於該定位導引609，而預先固定於可將燈管交換台601相對於照射裝置700定位之位置。 Further, in the lamp exchange 601, an alignment mark 660 for aligning the position of the lamp exchange table 601 with the irradiation device 700 is provided in the vicinity of the bottom surface. The illuminating device 700 is disposed so as not to move on the setting surface 603. On the installation surface 603 near the end surface 701 of the irradiation device 700, as shown in Figs. 20 and 22, the positioning guide 609 is fixed by a screw 609a. The positioning guide 609 is fixed in advance to a position at which the lamp exchange table 601 can be positioned relative to the illumination device 700 by aligning the position of the alignment mark 660 of the lamp exchange 601 with the alignment guide 609.

詳細地進行敍述，如圖22(A)所示，安裝於燈管交換台601之對準標記660係於大致L字狀之托架之前端661，利用螺栓663固定有由橡膠等緩衝材料形成為壁厚之圓盤狀的卡合體662。定位導引609具備對準標記660之卡合體662所卡合之卡合溝609b。於交換照射裝置700之直管型燈管681時，利用腳輪607使燈管交換台601移動至照射裝置700之附近，如圖22(B)所示，使對準標記660之卡合體662卡合於固定於設置面603上的定位導引609之卡合溝609b。藉此，將燈管交換台601相對於照射裝置700定位。根據該構成，可將燈管交換台601相對於照射裝置700準確且容易地定位。可於將燈管交換台601相對於照射裝置700定位後，利用止動器607a使腳輪607固定。 As described in detail in Fig. 22(A), the alignment mark 660 attached to the lamp exchange 601 is attached to the front end 661 of the substantially L-shaped bracket, and is fixed by a cushioning material such as rubber by a bolt 663. It is a disc-shaped engaging body 662 having a thick wall. The positioning guide 609 includes an engagement groove 609b to which the engaging body 662 of the alignment mark 660 is engaged. When the straight tube type lamp 681 of the irradiation device 700 is exchanged, the lamp tube exchange table 601 is moved to the vicinity of the irradiation device 700 by the casters 607, and as shown in Fig. 22(B), the engaging body 662 of the alignment mark 660 is made. The engaging groove 609b of the positioning guide 609 fixed to the setting surface 603 is engaged. Thereby, the lamp exchange station 601 is positioned relative to the illumination device 700. According to this configuration, the lamp exchange table 601 can be accurately and easily positioned with respect to the irradiation device 700. After the lamp exchange table 601 is positioned relative to the irradiation device 700, the caster 607 can be fixed by the stopper 607a.

如圖23(A)所示，燈管單元680係於框體684內收納直管型燈管681，且收容於照射器690內。於照射器690中設有換氣用之通氣口710。於通氣口710，雖省略圖示，但連接有連通至照射裝置700之外部之換氣導管。通氣口710具有送風筒710A及排氣筒710B。藉 由設置於照射裝置700外之未圖示之送風機，而經由送風筒710A將冷卻風導入至照射器690內，從而直接對直管型燈管681及其周邊進行空氣冷卻。空氣冷卻後之冷卻風經由排氣筒710B而排出至照射裝置700外。 As shown in FIG. 23(A), the lamp unit 680 houses the straight tube type lamp 681 in the housing 684, and is housed in the illuminator 690. A vent 710 for ventilation is provided in the illuminator 690. Although the ventilation port 710 is not shown, a ventilation duct that communicates with the outside of the irradiation device 700 is connected. The vent 710 has a blower cylinder 710A and an exhaust cylinder 710B. borrow The cooling fan (not shown) provided outside the irradiation device 700 introduces cooling air into the illuminator 690 via the air blowing cylinder 710A, thereby directly cooling the straight tube type lamp 681 and its periphery. The cooling air after the air cooling is discharged to the outside of the irradiation device 700 via the exhaust cylinder 710B.

如圖23(B)所示，框體684具備沿一對側面之上緣設置之複數個滾輪688、及設置於上表面之滾輪689。於照射器690內，設有於對照射器690裝卸燈管單元680時供滾輪688、689滑動之4條軌道692。燈管單元680使設置於框體684之側面之滾輪688於上下平行地並列設置之一對軌道692間滑動，並且使設置於框體684之上表面之滾輪689沿上方之軌道692之側面滑動，而裝卸自如地為照射器690所具備。 As shown in Fig. 23(B), the frame 684 includes a plurality of rollers 688 provided along the upper edges of the pair of side faces, and a roller 689 provided on the upper surface. In the illuminator 690, four rails 692 for sliding the rollers 688, 689 when the lamp unit 680 is attached or detached to the illuminator 690 are provided. The lamp unit 680 slides the roller 688 disposed on the side of the frame 684 in parallel along the upper and lower sides, and slides the roller 689 disposed on the upper surface of the frame 684 along the side of the upper track 692. The illuminator 690 is detachably mounted.

又，於燈管單元680中，於框體684之兩端面設置旋轉軸685，於將燈管單元680拉出或放入至照射裝置700時，作業者605握住該旋轉軸685進行拉出。 Further, in the lamp unit 680, a rotating shaft 685 is provided on both end faces of the frame 684, and when the lamp unit 680 is pulled out or placed in the irradiation device 700, the operator 605 holds the rotating shaft 685 to pull it out. .

圖24係模式性地表示自照射器690拉出燈管單元680之狀態之圖。再者，於圖24中，為簡化說明，未圖示照射裝置700之照射器設置架台704及燈管交換台601之台車部650。 Fig. 24 is a view schematically showing a state in which the lamp unit 680 is pulled out from the illuminator 690. In addition, in FIG. 24, in order to simplify description, the illuminator installation stand 704 of the irradiation apparatus 700 and the board|substrate part 650 of the lamp-exchange-composition 601 are not shown.

如圖24(A)所示，燈管單元680構成為可自照射器690之一端面(前表面)之開口沿直管型燈管681之管軸Xz拉出。於燈管交換台601之燈管交換部610，支持自照射器690拉出之燈管單元680且沿拉出方向進行引導的一對導軌611、611安裝於搖動單元620。 As shown in Fig. 24(A), the bulb unit 680 is configured to be pulled out from the tube axis Xz of the straight tube type lamp 681 from the opening of one end surface (front surface) of the illuminator 690. The lamp exchange unit 610 of the lamp exchange 601 is attached to the oscillating unit 620 by a pair of guide rails 611 and 611 that support the lamp unit 680 pulled out from the illuminator 690 and are guided in the pull-out direction.

如圖24(B)所示，自照射器690拉出之燈管單元680由燈管交換部610之導軌611、611支持。如圖24(D)所示，燈管單元680係設置於框體684之側面之滾輪688載置於導軌611上，並且藉由作 業者605握住旋轉軸685拉出燈管單元680，而使滾輪688於導軌611上滑動。藉此，燈管單元680支持於導軌611並且得到引導，而如圖24(C)所示，被自照射器690拉出。根據該構成，作業者605握住旋轉軸685拉出燈管單元680，利用導軌611進行支持並進行引導，而可簡單地自照射裝置700卸除燈管單元680。 As shown in Fig. 24(B), the lamp unit 680 pulled out from the illuminator 690 is supported by the guide rails 611, 611 of the lamp exchange unit 610. As shown in FIG. 24(D), the lamp unit 680 is disposed on the side of the frame 684, and the roller 688 is placed on the guide rail 611, and The operator 605 pulls the lamp unit 680 while holding the rotating shaft 685, and causes the roller 688 to slide on the guide rail 611. Thereby, the lamp unit 680 is supported by the guide rail 611 and guided, and as shown in FIG. 24(C), is pulled out from the illuminator 690. According to this configuration, the operator 605 pulls the lamp unit 680 by holding the rotating shaft 685, supports and guides the guide rail 611, and can easily remove the lamp unit 680 from the irradiation device 700.

如圖25所示，燈管交換部610具備導軌611使其可藉由升降單元640而升降，並且可藉由搖動單元620而搖動。又，燈管交換部610具備使燈管單元680反轉之反轉單元630。又，詳細內容於下文敍述，燈管交換部610具備調整導軌611之寬度的寬度調整單元675。 As shown in FIG. 25, the lamp exchange unit 610 is provided with a guide rail 611 so as to be movable up and down by the elevation unit 640, and can be rocked by the shaking unit 620. Further, the lamp exchange unit 610 includes an inversion unit 630 that inverts the lamp unit 680. Further, the details will be described later, and the lamp exchange unit 610 includes a width adjustment unit 675 that adjusts the width of the guide rail 611.

升降單元640包括剪臂式升降機，且沿燈管交換部610之延伸方向隔開既定間隔而設有2台。2台升降單元640可為機械式，亦可為流體作動式，根據作業者605之操作，而同步作動。即，2台升降單元640構成為於升降時可使由2台升降單元640支持之搖動單元620取得水平。升降單元640係底部641載置於台車部650之載置台608(參照圖21)，且於頂部642配設有搖動單元620。 The lifting unit 640 includes a shear arm type elevator, and two units are provided at predetermined intervals along the extending direction of the lamp tube exchange portion 610. The two lifting units 640 may be mechanical or fluid-operated, and operate synchronously according to the operation of the operator 605. That is, the two lifting units 640 are configured to be able to obtain the level of the shaking unit 620 supported by the two lifting units 640 during the raising and lowering. The bottom portion 641 of the lifting unit 640 is placed on the mounting table 608 of the carriage portion 650 (see FIG. 21), and the rocking unit 620 is disposed on the top portion 642.

搖動單元620具備包括上板621A及下板621B之中心對準單元621。中心對準單元621構成為上板621A可於下板621B上自由地、例如於自下板621B之中心為半徑650mm之範圍內轉動360度。中心對準單元621之下板621B固定於升降單元640之頂部642。 The shaking unit 620 is provided with a center aligning unit 621 including an upper plate 621A and a lower plate 621B. The center alignment unit 621 is configured such that the upper plate 621A can be freely rotated 360 degrees on the lower plate 621B, for example, within a radius of 650 mm from the center of the lower plate 621B. The lower plate 621B of the center alignment unit 621 is fixed to the top 642 of the lifting unit 640.

又，搖動單元620具備支持導軌611之支持體622。支持體622包括固定於中心對準單元621之上板621A的連結板623、連結於連結板623之框體624、及安裝於框體624且保持導軌611之保持部625。框體624係藉由沿燈管交換部610之延伸方向延伸且經連結板623連結 之一對梁體624a、及設置於梁體624a之兩端部且架設於梁體624a之端板624b，而形成為大致四邊形之框狀。 Further, the swing unit 620 is provided with a support 622 that supports the guide rail 611. The support body 622 includes a coupling plate 623 fixed to the upper plate 621A of the center alignment unit 621, a frame body 624 coupled to the coupling plate 623, and a holding portion 625 attached to the frame body 624 and holding the guide rail 611. The frame 624 extends along the extending direction of the lamp exchange portion 610 and is connected via the connecting plate 623. One of the pair of beam bodies 624a and the end plates 624b provided at both end portions of the beam body 624a and spanned to the beam body 624a are formed in a substantially quadrangular frame shape.

支持體622係藉由中心對準單元621而可相對於升降單元640可搖動地得到保持，且如圖26所示，以可相對於固定於台車部650之升降單元640向圖中箭頭方向擺動之方式設置。根據該構成，於利用導軌611支持自照射器690拉出之燈管單元680且沿拉出方向進行引導時(參照圖24)，即便於內置於照射器690中之燈管單元680之管軸Xz方向、與導軌611之延伸方向存在若干偏差之情形時，亦可利用搖動單元620使燈管單元680搖動而吸收該偏差。藉此，可使導軌611之延伸方向與燈管單元680之管軸Xz之方向一致，而順利地拉出燈管單元680，從而不會與框體684內之軌道692等構件接觸而摩擦。 The support body 622 is slidably held relative to the lifting unit 640 by the center aligning unit 621, and is oscillated in the direction of the arrow with respect to the lifting unit 640 fixed to the carriage portion 650 as shown in FIG. The way it is set. According to this configuration, when the lamp unit 680 pulled out from the illuminator 690 is supported by the guide rail 611 and guided in the drawing direction (see FIG. 24), even the tube axis of the lamp unit 680 built in the illuminator 690 When there is a slight deviation between the Xz direction and the extending direction of the guide rail 611, the shaking unit 620 may be used to shake the lamp unit 680 to absorb the deviation. Thereby, the extending direction of the guide rail 611 can be made to coincide with the direction of the tube axis Xz of the bulb unit 680, and the bulb unit 680 can be smoothly pulled out so as not to come into contact with the member such as the rail 692 in the frame 684 to be rubbed.

如圖25所示，反轉單元630包括設置於搖動單元620之延伸方向之兩端部的一對升降器638、設置於一升降器638之附近之升降用手柄631、及藉由升降用手柄631之旋轉而使升降器638升降之升降機構632。升降器638藉由一對托架部633、及設置於托架部633之前端之座部636而形成為門型。座部636配設於搖動單元620之端板624b之上方，由該座部636連結之一對托架部633貫穿端板624b。又，於座部636，凹下設置承受燈管單元680之旋轉軸685的軸承637。 As shown in FIG. 25, the reversing unit 630 includes a pair of lifters 638 provided at both end portions of the extending direction of the rocking unit 620, a lifting handle 631 provided in the vicinity of a lifter 638, and a lifting handle The lifting mechanism 632 that lifts the lifter 638 by the rotation of the 631. The lifter 638 is formed in a gate shape by a pair of bracket portions 633 and a seat portion 636 provided at a front end of the bracket portion 633. The seat portion 636 is disposed above the end plate 624b of the rocking unit 620, and the pair of bracket portions 633 are connected to the end plate 624b by the seat portion 636. Further, a bearing 637 that receives the rotating shaft 685 of the lamp unit 680 is recessed in the seat portion 636.

反轉單元630係於作業者605使升降用手柄631旋轉時，升降器638上下移動。若使升降用手柄631旋轉而使升降器638上升，則如圖27(B)所示，燈管單元680之旋轉軸685樞軸支承於座部636之軸承637。而且，若使升降器638進一步上升，則燈管單元680之旋轉軸685於樞軸支承於升降器638之座部636之狀態下被上抬，自導軌611脫離，且架設於設置於導軌611之延伸方向之兩端部的一 對升降器638間而得到保持。 The reversing unit 630 moves the lifter 638 up and down when the operator 605 rotates the lift handle 631. When the lifter handle 631 is rotated to raise the lifter 638, the rotation shaft 685 of the bulb unit 680 is pivotally supported by the bearing 637 of the seat portion 636 as shown in Fig. 27(B). Moreover, if the lifter 638 is further raised, the rotating shaft 685 of the lamp unit 680 is lifted in a state of being pivotally supported by the seat portion 636 of the lifter 638, is detached from the guide rail 611, and is mounted on the guide rail 611. One of the two ends of the extending direction It is held between the lifters 638.

若使升降器638上升，則貫穿托架部633而設置於端板624b之下表面的筒狀定位構件634抵接於設置於托架部633之止動器635。作業者605可藉由使升降用手柄631旋轉，直至定位構件634抵接於止動部635，而使保持於升降器638之燈管單元680上升至既定位置。而且，如圖27(B)所示，上升至既定位置之燈管單元680可於載置於燈管交換部610之狀態下不與導軌611相干涉地繞旋轉軸685沿垂直方向反轉(上下反轉)。於使燈管單元680反轉時，將未圖示之反轉用手柄裝卸自如地安裝於兩端由軸承637樞軸支承之燈管單元680之其中一邊之旋轉軸685。而且，作業者605可藉由以手動使該反轉用手柄旋轉，而簡單地使燈管單元680反轉。 When the lifter 638 is raised, the cylindrical positioning member 634 provided on the lower surface of the end plate 624b penetrating the bracket portion 633 abuts against the stopper 635 provided in the bracket portion 633. The operator 605 can rotate the lifting handle 631 until the positioning member 634 abuts against the stopper 635, thereby raising the lamp unit 680 held by the lifter 638 to a predetermined position. Further, as shown in FIG. 27(B), the lamp unit 680 that has been raised to a predetermined position can be reversed in the vertical direction about the rotation axis 685 without interfering with the guide rail 611 in the state of being placed in the lamp exchange portion 610 ( Reverse up and down). When the lamp unit 680 is reversed, a reversing handle (not shown) is detachably attached to one of the rotating shafts 685 of one of the lamp units 680 pivotally supported by the bearings 637 at both ends. Moreover, the operator 605 can simply reverse the lamp unit 680 by manually rotating the reverse handle.

圖27(C)係自圖27(A)中之箭頭Cz方向觀察燈管單元680之部分放大圖。於燈管單元680之旋轉軸685中，如圖27(C)所示，設有***固定燈管單元680之旋轉之銷639的貫穿孔(未圖示)。又，於反轉單元630之升降器638中，於座部636之軸承637內，形成有***銷639之銷孔637a。作業者605可藉由於使兩端由軸承637樞軸支承之燈管單元680反轉後，將銷639***至旋轉軸685之貫穿孔及軸承637之銷孔637a，而以燈管單元680不旋轉之方式進行限制。 Fig. 27(C) is a partially enlarged view of the lamp unit 680 as seen from the direction of the arrow Cz in Fig. 27(A). In the rotating shaft 685 of the lamp unit 680, as shown in Fig. 27(C), a through hole (not shown) into which the rotating pin 639 of the lamp unit 680 is fixed is inserted. Further, in the lifter 638 of the reversing unit 630, a pin hole 637a into which the pin 639 is inserted is formed in the bearing 637 of the seat portion 636. The operator 605 can insert the pin 639 into the through hole of the rotating shaft 685 and the pin hole 637a of the bearing 637 by reversing the lamp unit 680 pivotally supported by the bearing 637 at both ends, and the lamp unit 680 does not The way of rotation is limited.

燈管單元680係於下表面開口之箱形之框體684內收納直管型燈管681及反射鏡683，且於收納於照射器690內之狀態下，具備於下方開口之照射開口682。框體684包含不鏽鋼等具有剛性之金屬製材料。直管型燈管681係與以沿直管型燈管681之管軸Xz且圍繞直管型燈管681之方式設置之反射鏡683一體地安裝於燈管單元680。如上述般，於將燈管單元680自照射裝置700取出至燈管交換台601上 時，燈管單元680之照射開口682於下方開口。於本實施形態中，如上所述，可容易地使燈管單元680於載置於燈管交換部610之狀態下反轉，且如圖27(B)所示，可使燈管單元680之照射開口682於上方開口。而且，可利用銷639限制於燈管交換部610上反轉之燈管單元680，而可將燈管單元680之直管型燈管681自於上方開口之照射開口682容易地卸除以進行交換。 The lamp unit 680 accommodates the straight tube type lamp 681 and the mirror 683 in a box-shaped frame 684 whose lower surface is opened, and is provided with an irradiation opening 682 that is opened at the lower side in a state of being housed in the illuminator 690. The frame 684 includes a rigid metal material such as stainless steel. The straight tube type lamp 681 is integrally attached to the bulb unit 680 with a mirror 683 provided along the tube axis Xz of the straight tube type lamp 681 and surrounding the straight tube type bulb 681. As described above, the lamp unit 680 is taken out from the irradiation device 700 to the lamp exchange station 601. At this time, the illumination opening 682 of the lamp unit 680 is open at the lower side. In the present embodiment, as described above, the lamp unit 680 can be easily reversed in a state of being placed on the lamp exchange unit 610, and as shown in FIG. 27(B), the lamp unit 680 can be The illumination opening 682 is open at the top. Moreover, the pin 639 can be restricted to the lamp unit 680 which is reversed on the lamp exchange unit 610, and the straight tube type lamp 681 of the lamp unit 680 can be easily removed from the upper opening of the illumination opening 682. exchange.

又，如圖28所示，燈管交換台601亦可較佳地用於交換安裝於照射器690內之濾光器單元670時。濾光器單元670配置於作為光源的直管型燈管681之正下方，且具備調整自燈管單元680照射之照射光之波長的光學濾光器。由於該濾光器單元670會因紫外線燈管之紫外線而導致光學濾光器劣化且穿透率降低，故而將必需與新品進行交換。濾光器單元670為沿直管型燈管681之管軸Xz方向延伸之長條形狀。如上所述，燈管交換台601之燈管交換部610之高度可由升降單元640調整。 Further, as shown in FIG. 28, the lamp exchange station 601 can also preferably be used to exchange the filter unit 670 mounted in the illuminator 690. The filter unit 670 is disposed directly under the straight tube type lamp 681 as a light source, and includes an optical filter that adjusts the wavelength of the illumination light irradiated from the lamp unit 680. Since the filter unit 670 causes the optical filter to deteriorate due to the ultraviolet rays of the ultraviolet lamp tube and the transmittance is lowered, it is necessary to exchange with the new product. The filter unit 670 has an elongated shape extending in the tube axis Xz direction of the straight tube type lamp 681. As described above, the height of the lamp exchange portion 610 of the lamp exchange 601 can be adjusted by the elevation unit 640.

於交換濾光器單元670時，首先，作業者605利用升降單元640調整燈管交換部610之高度，而使導軌611為可支持自照射器690拉出之濾光器單元670且沿拉出方向進行引導之高度。其次，如圖28(A)所示，將濾光器單元670自照射器690拉出。而且，使設置於燈管交換台601之燈管交換部610的導軌611支持自照射器690拉出之濾光器單元670，且沿拉出方向進行引導而將其拉出(參照圖28(B))。 When the filter unit 670 is exchanged, first, the operator 605 adjusts the height of the lamp exchange portion 610 by using the lifting unit 640, so that the guide rail 611 is a filter unit 670 that can support the pull out from the illuminator 690 and pulls out The height at which the direction is guided. Next, as shown in Fig. 28(A), the filter unit 670 is pulled out from the illuminator 690. Further, the guide rail 611 provided in the lamp exchange unit 610 of the lamp exchange 601 supports the filter unit 670 pulled out from the illuminator 690, and is guided in the pull-out direction to pull it out (refer to FIG. 28 (refer to FIG. 28 ( B)).

如圖29所示，燈管交換部610具備調整一對導軌611、611間之寬度之寬度調整單元675。寬度調整單元675係包括由保持部625固定於搖動單元620中之一對螺釘軸(梯形螺紋)676、可滑動地設 置於各螺釘軸676之滑動螺帽677、使螺釘軸676旋轉而使滑動螺帽677滑動之寬度調整用手柄678、及限制滑動螺帽677之滑動範圍之止動部679而構成。一對螺釘軸676、676構成為由未圖示之正時皮帶相連，且藉由寬度調整用手柄678而相互同步旋轉。若利用寬度調整用手柄678使螺釘軸676旋轉，則一對滑動螺帽677相對於燈管交換部610之中心Cz向相互遠離之方向或靠近之方向於螺釘軸676上滑動而移動。導軌611構成為固定於滑動螺帽677且與滑動螺帽677一體地移動。藉此，構成為導軌611間之寬度可由寬度調整單元675之寬度調整用手柄678調整。 As shown in FIG. 29, the lamp exchange unit 610 includes a width adjustment unit 675 that adjusts the width between the pair of guide rails 611 and 611. The width adjusting unit 675 includes a pair of screw shafts (trapezoidal threads) 676 fixed to the rocking unit 620 by the holding portion 625, and is slidably provided The sliding nut 677 of each of the screw shafts 676, the width adjusting handle 678 for rotating the screw shaft 676 to slide the sliding nut 677, and the stopper portion 679 for restricting the sliding range of the sliding nut 677 are formed. The pair of screw shafts 676 and 676 are configured to be connected by a timing belt (not shown), and are rotated in synchronization with each other by the width adjusting handle 678. When the screw shaft 676 is rotated by the width adjusting handle 678, the pair of sliding nuts 677 are slid and moved on the screw shaft 676 with respect to the center Cz of the tube exchange portion 610 in the direction away from or away from each other. The guide rail 611 is configured to be fixed to the slide nut 677 and move integrally with the slide nut 677. Thereby, the width between the guide rails 611 can be adjusted by the width adjustment handle 678 of the width adjustment unit 675.

如圖29(A)所示，若利用寬度調整用手柄678使螺釘軸676、676旋轉，且使滑動螺帽677相對於燈管交換部610之中心Cz向相互靠近之方向移動，而使滑動螺帽677碰觸至止動器679，則導軌611間之寬度設定為既定寬度。此時之導軌611間之寬度係設定為與燈管單元680之寬度對應之寬度。 As shown in Fig. 29(A), when the screw shafts 676 and 676 are rotated by the width adjusting handle 678, and the sliding nut 677 is moved toward the center Cz of the tube exchange unit 610, the sliding is performed. When the nut 677 touches the stopper 679, the width between the guide rails 611 is set to a predetermined width. The width between the guide rails 611 at this time is set to be the width corresponding to the width of the bulb unit 680.

另一方面，如圖29(B)所示，若利用寬度調整用手柄678使螺釘軸676、676旋轉，且使滑動螺帽677相對於燈管交換部610之中心Cz向相互遠離之方向移動，而使滑動螺帽677碰觸至保持部625，則導軌611間之寬度設定為既定寬度。此時之導軌611間之寬度係設定為與濾光器670之寬度對應之寬度。 On the other hand, as shown in Fig. 29(B), the screw shafts 676 and 676 are rotated by the width adjusting handle 678, and the sliding nut 677 is moved away from the center Cz of the lamp exchange unit 610. When the sliding nut 677 is touched to the holding portion 625, the width between the guide rails 611 is set to a predetermined width. The width between the guide rails 611 at this time is set to be the width corresponding to the width of the filter 670.

如上述般，燈管交換部610構成為可利用寬度調整單元675調整導軌611間之寬度，藉由適當地調整導軌611間之寬度，可用於交換燈管單元680或濾光器670時。 As described above, the lamp exchange unit 610 is configured such that the width between the guide rails 611 can be adjusted by the width adjustment unit 675, and the width between the guide rails 611 can be appropriately adjusted to exchange the lamp unit 680 or the filter 670.

如圖28(D)所示，濾光器單元670亦可為於側面具備複數個滾輪671之構成，亦可為藉由該滾輪671於導軌611上滑動而可 容易地拉出之構成。如圖28(C)所示，自照射器690完全拉出之濾光器單元670支持於導軌611，且載置於燈管交換部610上。 As shown in FIG. 28(D), the filter unit 670 may be configured to have a plurality of rollers 671 on the side, or may be slid on the guide rail 611 by the roller 671. It is easy to pull out the composition. As shown in FIG. 28(C), the filter unit 670 which is completely pulled out from the illuminator 690 is supported by the guide rail 611 and placed on the lamp exchange portion 610.

如以上所說明般，根據第4實施形態，燈管交換台601係用於照射裝置700，該照射裝置700內置有沿直管型燈管681之管軸Xz延伸且於內部收納有該直管型燈管681的燈管單元680，自端面701沿管軸Xz之方向拉出燈管單元680而可進行交換，且該燈管交換台601包括：導軌611，其配置於端面701之外側，一面支持自端面701拉出之燈管單元680一面進行引導；及搖動單元620，其以導軌611之延伸方向與燈管單元680之管軸Xy之方向一致之方式可搖動地保持導軌611。根據該構成，可利用導軌611一面支持燈管單元680一面將其自照射裝置700拉出。藉此，可由1名作業者605容易地進行燈管單元680朝照射裝置700之裝卸，而可使直管型燈管681之交換作業之效率提昇。又，可利用搖動單元620吸收導軌611相對於照射裝置700之若干偏差，而順利地對照射裝置700裝卸燈管單元680。由此，可作業效率高地將燈管單元680自照射裝置700拉出，而容易地進行直管型燈管681之交換。 As described above, according to the fourth embodiment, the lamp exchange unit 601 is used for the irradiation device 700, and the irradiation device 700 has a tube tube Xz extending along the straight tube type lamp 681 and housed therein. The lamp unit 680 of the lamp tube 681 can be exchanged from the end surface 701 in the direction of the tube axis Xz, and the lamp exchange unit 601 includes a guide rail 611 disposed on the outer side of the end surface 701. The lamp unit 680 that is pulled out from the end surface 701 is supported while being guided; and the rocking unit 620 is slidably held by the rail 611 so that the direction in which the guide rail 611 extends is aligned with the direction of the tube axis Xy of the bulb unit 680. According to this configuration, the guide rail 611 can be pulled out from the irradiation device 700 while supporting the bulb unit 680. Thereby, the one lamp 680 can be easily attached and detached to the irradiation device 700 by one operator 605, and the efficiency of the exchange operation of the straight tube type lamp 681 can be improved. Moreover, the shaking unit 620 can absorb the deviation of the guide rail 611 from the irradiation device 700, and the lamp unit 680 can be smoothly attached or detached to the irradiation device 700. Thereby, the lamp unit 680 can be efficiently pulled out from the irradiation device 700, and the straight tube type lamp 681 can be easily exchanged.

又，燈管交換台601具備使直管型燈管681之上側由反射鏡683覆蓋之燈管單元680上下反轉的反轉單元630。藉此，可於燈管交換台601上，使燈管單元680反轉，而使燈管單元680之照射開口682朝向上方，從而可自該照射開口682容易地裝卸並交換直管型燈管681。 Further, the lamp exchange table 601 includes an inversion unit 630 that vertically reverses the lamp unit 680 covered by the mirror 683 on the upper side of the straight tube type lamp 681. Thereby, the lamp unit 680 can be reversed on the lamp exchange 601, and the illumination opening 682 of the lamp unit 680 is directed upward, so that the straight tube type lamp can be easily loaded and unloaded and exchanged from the illumination opening 682. 681.

又，燈管交換台601具備如下對準標記660，即，卡合於設置於放置照射裝置700之設置面603之既定位置的定位導引609，而將導軌611相對於照射裝置700定位。藉此，於需要燈管交換台601 時，例如於交換直管型燈管681時，可相對於照射裝置700準確且容易地進行定位。由此，可提昇直管型燈管681之交換作業之作業效率。 Further, the lamp exchange table 601 is provided with an alignment mark 660 that is positioned to be positioned at a predetermined position of the installation surface 603 on which the irradiation device 700 is placed, and the guide rail 611 is positioned relative to the irradiation device 700. Thereby, the lamp exchange station 601 is required At the time, for example, when the straight tube type lamp 681 is exchanged, positioning can be accurately and easily performed with respect to the irradiation device 700. Thereby, the work efficiency of the exchange operation of the straight tube type lamp 681 can be improved.

[第5實施形態] [Fifth Embodiment]

於第1~第4實施形態中使用之偏光元件單元10如上所述包括複數個線柵偏光元件16。於光配向裝置1中，一般而言，線柵偏光元件16之性能、尤其係消光比會對光配向對象物2之品質造成影響。 The polarizing element unit 10 used in the first to fourth embodiments includes a plurality of wire grid polarizing elements 16 as described above. In the optical alignment device 1, in general, the performance of the wire grid polarizing element 16, particularly the extinction ratio, affects the quality of the optical alignment object 2.

因此，對可獲得良好之消光比之線柵偏光元件進行說明。 Therefore, a wire grid polarizing element which can obtain a good extinction ratio will be described.

圖30係模式性地表示本實施形態之線柵偏光元件816之構成之圖，圖30(A)係剖面圖，圖30(B)係平面圖。 Fig. 30 is a view schematically showing the configuration of the wire grid polarizing element 816 of the present embodiment, Fig. 30 (A) is a cross-sectional view, and Fig. 30 (B) is a plan view.

線柵偏光元件816包含繞射光柵層810及基板840。繞射光柵層810包含沿圖30(A)及圖30(B)中所示之笛卡爾座標系之y方向延伸的細長之金屬線部811。金屬線部811以形成具有週期Λ(lambda)之繞射光柵之方式排列。若組成不同，則對波長為λ1之光具有不同之光學特性。 The wire grid polarizing element 816 includes a diffraction grating layer 810 and a substrate 840. The diffraction grating layer 810 includes an elongated metal wire portion 811 extending in the y direction of the Cartesian coordinate system shown in Figs. 30(A) and 30(B). The metal wire portion 811 is arranged in such a manner as to form a diffraction grating having a period of lambda. If the composition is different, the light having the wavelength λ1 has different optical characteristics.

繞射光柵層810使與z軸平行地傳播之波長為λ1之入射光直線性地偏光。換言之，對於與z軸平行地傳播且入射至線柵偏光元件816上之波長為λ1之光，線柵偏光元件816使與向y方向平面偏光(稱為「阻止」狀態偏光)之成分之量相比，向x方向平面偏光(稱為「通過」狀態偏向)之入射光之成分之量相對較多地使光透射，將該等之比定義為消光比。 The diffraction grating layer 810 linearly polarizes the incident light having a wavelength λ1 propagating in parallel with the z-axis. In other words, for the light having a wavelength λ1 which propagates in parallel with the z-axis and is incident on the wire grid polarizing element 816, the wire grid polarizing element 816 makes a component which is polarized to the plane in the y direction (referred to as "blocking" state polarization). In contrast, the amount of the incident light that is polarized in the x-direction plane (referred to as the "passing" state) is relatively large to transmit light, and the ratio is defined as the extinction ratio.

於本實施形態之線柵偏光元件816中，λ1對應於UV(Ultraviolet，紫外線)波長(例如自約100nm至最大400nm)。 In the wire grid polarizing element 816 of the present embodiment, λ1 corresponds to a UV (Ultraviolet) wavelength (for example, from about 100 nm to a maximum of 400 nm).

此處，對繞射光柵層810之構造詳細地進行敍述，金屬 線部811沿y方向延伸，藉由分別由間隙812隔開，而形成週期性之繞射光柵。金屬線部811於x方向具有寬度Λ811，另一方面，間隙812於寬度x方向具有寬度Λ812。繞射光柵週期Λ等於Λ811+Λ812，且小於λ1，其結果，波長為λ1之光與繞射光柵層810相互作用，而未伴有光與週期性之構造相互作用時可能產生之明顯之高維遠場繞射。此處，可認為λ1為UV波長，繞射光柵層810為奈米構造化層之例。 Here, the structure of the diffraction grating layer 810 will be described in detail, metal The line portions 811 extend in the y direction and are separated by gaps 812, respectively, to form a periodic diffraction grating. The wire portion 811 has a width Λ 811 in the x direction, and the gap 812 has a width Λ 812 in the width x direction. The diffraction grating period Λ is equal to Λ 811 + Λ 812 and less than λ 1 , and as a result, the light of wavelength λ1 interacts with the diffraction grating layer 810 without being accompanied by a significant high dimensionality that may occur when the light interacts with the periodic structure. Field diffraction. Here, it is considered that λ1 is a UV wavelength, and the diffraction grating layer 810 is an example of a nanostructured layer.

金屬線部811之組成係以線柵偏光元件816具有所需之偏光特性之方式選擇。尤其係於波長λ1為UV波長之情形時，於金屬線部811之材料中，較佳為使用氧化鈰(CeO2)、銦錫氧化物(ITO，Indium Tin Oxide)、矽(Si)(例如結晶質、半結晶質、非晶質矽)、氮化矽(Si3N4)、矽化鈮(NbSi)、氮化鋁(AlN)、氮化鎢(WN)、氮化鉬(MoN)、銥(Ir)、鈦(Ti)、鉻(Cr)、鉑(Pt)、鉬(Mo)。 The composition of the metal line portion 811 is selected such that the wire grid polarizing element 816 has a desired polarization characteristic. In particular, when the wavelength λ1 is a UV wavelength, it is preferable to use cerium oxide (CeO 2 ), indium tin oxide (ITO, Indium Tin Oxide), ytterbium (Si) in the material of the metal wire portion 811 (for example). Crystalline, semi-crystalline, amorphous germanium), tantalum nitride (Si 3 N 4 ), germanium telluride (NbSi), aluminum nitride (AlN), tungsten nitride (WN), molybdenum nitride (MoN), Ir (Ir), titanium (Ti), chromium (Cr), platinum (Pt), molybdenum (Mo).

再者，金屬線部811亦可為結晶質、半結晶質及/或非晶質。又，於金屬線部811之材料為上述氧化物、氮化物、矽化物之情形時，亦可包含所謂氧化、氮化或矽化之程度為中間狀態之物質。進而，亦可為該等材料之混合體。 Further, the metal wire portion 811 may be crystalline, semi-crystalline, and/or amorphous. Further, when the material of the metal wire portion 811 is the oxide, the nitride or the germanide, the material may be an intermediate state in which the degree of oxidation, nitridation or deuteration is intermediate. Further, it may be a mixture of these materials.

此處，於將n設為折射率，將k設為衰減係數之情形時，發明者得到以下見解，即，若將成為k+(3/4)×n>3且k>0.5之材料用於金屬線部811，則對於UV波長(尤其係365nm)之入射光，線柵偏光元件816表現良好之消光比。 Here, when n is set as the refractive index and k is set as the attenuation coefficient, the inventors have obtained the following knowledge, that is, if k + (3/4) × n > 3 and k > 0.5 is used for the material The wire portion 811 exhibits a good extinction ratio for the incident light of the UV wavelength (especially 365 nm).

如上述般，於本實施形態中，因於將n設為折射率，將k設為衰減係數之情形時，將成為k+(3/4)×n>3且k>0.5之材料用於線柵偏光元件816之金屬線部811，故而可使對UV波長之消光比良好。 As described above, in the present embodiment, when n is set to the refractive index and k is set as the attenuation coefficient, a material having k + (3/4) × n > 3 and k > 0.5 is used for the line. Since the metal line portion 811 of the gate polarizing element 816 can make the extinction ratio to the UV wavelength good.

10‧‧‧偏光元件單元 10‧‧‧Polarized element unit

12‧‧‧單位偏光元件單元 12‧‧‧Unit polarizing element unit

14‧‧‧框架 14‧‧‧Frame

16‧‧‧線柵偏光元件 16‧‧‧Wire grid polarizing element

19‧‧‧螺釘 19‧‧‧ screws

36‧‧‧凸條 36‧‧ ‧ ribs

B‧‧‧排列方向 B‧‧‧Orientation

Claims (3)

一種燈管交換台，其係用於照射裝置，該照射裝置內置有沿著直管型燈管之管軸延伸而於內部收納有該直管型燈管之燈管單元，可自端面朝上述管軸之方向將上述燈管單元拉出而進行交換；該燈管交換台具備有：導軌，其係配置於上述端面之外側，一邊支持且一邊引導自上述端面被拉出之燈管單元；及搖動單元，其以使上述導軌之延伸方向與上述燈管單元之管軸之方向成為一致之方式將上述導軌可搖動地加以保持。 The invention relates to a lamp exchange device, which is used for an illumination device, which has a lamp tube unit extending along a tube axis of a straight tube type lamp tube and housing the straight tube type lamp tube therein, which can be oriented from the end face The lamp tube unit is pulled out and exchanged in the direction of the tube axis. The lamp tube exchange unit includes a guide rail that is disposed on the outer side of the end surface and supports the lamp unit that is pulled out from the end surface while supporting And a rocking unit that holds the rail in a swingable manner such that the direction in which the rail extends is aligned with the direction of the tube axis of the lamp unit. 如申請專利範圍第1項之燈管交換台，其中具備有使藉由反射鏡覆蓋上述直管型燈管上側之上述燈管單元上下反轉之反轉單元。 A lamp exchange base according to the first aspect of the invention is characterized in that the lamp unit is provided with an inversion unit that reverses the upper and lower sides of the lamp unit on the upper side of the straight tube type lamp by a mirror. 如申請專利範圍第1或2項之燈管交換台，其中具備有：對準標記，其卡合於被設置在上述照射裝置所放置的設置面之既定位置之定位導引，而將上述導軌對上述照射裝置之框體之側面進行定位。 The lamp exchange station of claim 1 or 2, wherein: the alignment mark is provided to be engaged with a positioning guide disposed at a predetermined position of the installation surface on which the illumination device is placed, and the guide rail is Positioning the side surface of the frame of the above irradiation device.
TW102113937A 2012-04-20 2013-04-19 Polarizer unit, jig for adjusting, lamp replacement stage and irradiation apparatus TWI565977B (en)

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JP2012221205A JP5573910B2 (en) 2012-10-03 2012-10-03 Irradiation device
JP2012225628A JP5533974B2 (en) 2012-10-11 2012-10-11 Lamp change stand

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CN103376563A (en) 2013-10-30
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