TWI559974B - Method for removing dissolved oxygen from alcohol, alcohol supply device, and cleaning liquid supply device - Google Patents
Method for removing dissolved oxygen from alcohol, alcohol supply device, and cleaning liquid supply deviceInfo
- Publication number
- TWI559974B TWI559974B TW102106068A TW102106068A TWI559974B TW I559974 B TWI559974 B TW I559974B TW 102106068 A TW102106068 A TW 102106068A TW 102106068 A TW102106068 A TW 102106068A TW I559974 B TWI559974 B TW I559974B
- Authority
- TW
- Taiwan
- Prior art keywords
- alcohol
- supply device
- cleaning liquid
- dissolved oxygen
- removing dissolved
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
- C07C29/74—Separation; Purification; Use of additives, e.g. for stabilisation
- C07C29/88—Separation; Purification; Use of additives, e.g. for stabilisation by treatment giving rise to a chemical modification of at least one compound
- C07C29/90—Separation; Purification; Use of additives, e.g. for stabilisation by treatment giving rise to a chemical modification of at least one compound using hydrogen only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/87338—Flow passage with bypass
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Catalysts (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012037379A JP5871652B2 (ja) | 2012-02-23 | 2012-02-23 | アルコール中の溶存酸素除去方法、アルコール供給装置並びに洗浄液供給装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201347842A TW201347842A (zh) | 2013-12-01 |
TWI559974B true TWI559974B (en) | 2016-12-01 |
Family
ID=49005518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102106068A TWI559974B (en) | 2012-02-23 | 2013-02-21 | Method for removing dissolved oxygen from alcohol, alcohol supply device, and cleaning liquid supply device |
Country Status (7)
Country | Link |
---|---|
US (1) | US9217540B2 (zh) |
JP (1) | JP5871652B2 (zh) |
KR (1) | KR101606774B1 (zh) |
CN (1) | CN104136406B (zh) |
SG (1) | SG11201405128TA (zh) |
TW (1) | TWI559974B (zh) |
WO (1) | WO2013125328A1 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6543925B2 (ja) * | 2014-12-17 | 2019-07-17 | 栗田工業株式会社 | 超純水製造装置の運転方法 |
JP6535949B2 (ja) * | 2015-03-24 | 2019-07-03 | 国立大学法人山口大学 | 第二級アルコールの保管方法および充填体 |
JP6497587B2 (ja) * | 2015-08-18 | 2019-04-10 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6670206B2 (ja) * | 2016-08-24 | 2020-03-18 | オルガノ株式会社 | 超純水製造装置 |
WO2018135408A1 (ja) * | 2017-01-23 | 2018-07-26 | 株式会社トクヤマ | イソプロピルアルコール組成物及びイソプロピルアルコールの製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102355952A (zh) * | 2009-03-18 | 2012-02-15 | 奥加诺株式会社 | 铂族金属负载催化剂、过氧化氢分解处理水的制造方法、溶解氧除去处理水的制造方法、以及电子部件的洗涤方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1642494A1 (de) | 1967-10-12 | 1972-02-17 | Maerkische Steinkohlengewerksc | Verfahren und Vorrichtung zum Entfernen von in Wasser geloestem Sauerstoff,insbesondere im Zuge der Speisewasseraufbereitung |
GB2149391B (en) | 1983-11-10 | 1987-10-07 | Westinghouse Electric Corp | Method for removing dissolved oxygen from aqueous media |
DE4003694A1 (de) | 1990-02-07 | 1991-08-08 | Linde Ag | Verfahren und vorrichtung zur entfernung von wasserstoff aus wasserkreislaeufen |
JPH04107923A (ja) * | 1990-08-29 | 1992-04-09 | Fujitsu Ltd | 半導体基板の洗浄方法 |
JPH04149001A (ja) * | 1990-10-11 | 1992-05-22 | Sanyo Electric Co Ltd | 水素吸蔵合金の反応容器への充填方法 |
JPH0596283A (ja) * | 1991-10-03 | 1993-04-20 | Japan Organo Co Ltd | 溶存酸素除去装置 |
JPH08172068A (ja) * | 1994-12-19 | 1996-07-02 | Fujitsu Ltd | 半導体基板の洗浄方法及び半導体装置の製造方法 |
DE10005770A1 (de) | 2000-02-10 | 2001-08-16 | Bayer Ag | Verfahren zur Entfernung von gelöstem Sauerstoff aus Phenol |
JP2004105797A (ja) | 2002-09-13 | 2004-04-08 | Mitsubishi Rayon Co Ltd | 薬液の脱気方法 |
DE102004017983A1 (de) * | 2004-04-14 | 2005-11-03 | Degussa Ag | Katalytische Entfernung von gelöstem Sauerstoff aus organischen Flüssigkeiten |
PL2114790T3 (pl) | 2007-01-24 | 2014-02-28 | Colormatrix Holdings Inc | Pochłanianie tlenu |
JP2009260020A (ja) * | 2008-04-16 | 2009-11-05 | Kurita Water Ind Ltd | 電子材料用洗浄水、電子材料の洗浄方法及びガス溶解水の供給システム |
DE102008063895B3 (de) * | 2008-12-19 | 2010-06-10 | Gkss-Forschungszentrum Geesthacht Gmbh | Verfahren zur Aktivierung oder Regeneration eines Wasserstoffspeichermaterials |
JP5231300B2 (ja) | 2009-03-18 | 2013-07-10 | オルガノ株式会社 | 白金族金属担持触媒、過酸化水素の分解処理水の製造方法、溶存酸素の除去処理水の製造方法及び電子部品の洗浄方法 |
JP5342463B2 (ja) * | 2010-01-08 | 2013-11-13 | オルガノ株式会社 | 溶存水素濃度測定装置及び溶存水素濃度の測定方法 |
-
2012
- 2012-02-23 JP JP2012037379A patent/JP5871652B2/ja active Active
-
2013
- 2013-02-01 WO PCT/JP2013/052339 patent/WO2013125328A1/ja active Application Filing
- 2013-02-01 US US14/380,148 patent/US9217540B2/en active Active
- 2013-02-01 KR KR1020147020274A patent/KR101606774B1/ko active IP Right Grant
- 2013-02-01 CN CN201380010704.0A patent/CN104136406B/zh active Active
- 2013-02-01 SG SG11201405128TA patent/SG11201405128TA/en unknown
- 2013-02-21 TW TW102106068A patent/TWI559974B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102355952A (zh) * | 2009-03-18 | 2012-02-15 | 奥加诺株式会社 | 铂族金属负载催化剂、过氧化氢分解处理水的制造方法、溶解氧除去处理水的制造方法、以及电子部件的洗涤方法 |
Also Published As
Publication number | Publication date |
---|---|
SG11201405128TA (en) | 2014-11-27 |
KR101606774B1 (ko) | 2016-03-28 |
KR20140103349A (ko) | 2014-08-26 |
CN104136406B (zh) | 2016-10-19 |
WO2013125328A1 (ja) | 2013-08-29 |
JP2013173678A (ja) | 2013-09-05 |
JP5871652B2 (ja) | 2016-03-01 |
US9217540B2 (en) | 2015-12-22 |
TW201347842A (zh) | 2013-12-01 |
CN104136406A (zh) | 2014-11-05 |
US20150013798A1 (en) | 2015-01-15 |
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