TWI457576B - Substrate inspection jig, jig base unit and substrate inspection apparatus - Google Patents
Substrate inspection jig, jig base unit and substrate inspection apparatus Download PDFInfo
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- TWI457576B TWI457576B TW101141210A TW101141210A TWI457576B TW I457576 B TWI457576 B TW I457576B TW 101141210 A TW101141210 A TW 101141210A TW 101141210 A TW101141210 A TW 101141210A TW I457576 B TWI457576 B TW I457576B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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Description
本發明係關於安裝在基板檢查裝置上、並用於與設置在被檢查基板上的佈線圖案的電氣特性有關的檢查中的基板檢查夾具及其相關技術。The present invention relates to a substrate inspection jig and related art which are mounted on a substrate inspection apparatus and used for inspection relating to electrical characteristics of a wiring pattern provided on the substrate to be inspected.
就現有的基板檢查夾具而言，有下述基板檢查夾具，即：將設置在電極單元上的電極部的構成設為與探針的配置方式不同的多種檢查頭對應的通用的構成，能夠與作為檢查物件的被檢查基板的佈線圖案等構成對應地更換檢查頭。In the conventional substrate inspection jig, there is a substrate inspection jig in which the configuration of the electrode portion provided on the electrode unit is a general configuration corresponding to a plurality of types of inspection heads different from the arrangement of the probes, and The inspection head is replaced by a wiring pattern or the like of the substrate to be inspected as the inspection object.
此外，在使用了上述現有的基板檢查夾具的基板檢查裝置中，對基板檢查夾具的電極單元的電極部和檢查處理部之間的電連接關係進行切換的連接切換單元被配置在基板檢查裝置主體中的基板檢查夾具的電極單元的下側(或上側)。In the substrate inspection device using the above-described conventional substrate inspection jig, the connection switching unit that switches the electrical connection relationship between the electrode portion of the electrode unit of the substrate inspection jig and the inspection processing portion is disposed in the substrate inspection device main body. The lower side (or upper side) of the electrode unit of the substrate inspection jig.
另外，就與具有通用的電極部的構成的基板檢查夾具相關的先前技術文獻而言，舉例有專利文獻1。Further, Patent Document 1 is exemplified in the prior art document relating to a substrate inspection jig having a configuration of a common electrode portion.
專利文獻Patent literature
專利文獻1：日本特許第2598482號公報Patent Document 1: Japanese Patent No. 2958482
然而，由於在上述現有的基板檢查夾具中，未設想到電極單元的更換，所以在要設置探針的配設間距等不同的檢查頭的情況下，需要更換整個基板檢查夾具。因此，伴隨著變更作為檢查物件的被檢查基板的構成(例如，佈線圖案的配設間距等)而來的變更基板檢查夾具的構成的負擔大。However, in the conventional substrate inspection jig described above, replacement of the electrode unit is not assumed. Therefore, in the case where an inspection head having different arrangement pitches of probes or the like is to be provided, it is necessary to replace the entire substrate inspection jig. Therefore, the burden of changing the configuration of the substrate inspection jig is large as the configuration of the substrate to be inspected (for example, the arrangement pitch of the wiring patterns) of the inspection object is changed.
此外，如上所述，在將連接切換單元配置在基板檢查裝置主體中的基板檢查夾具的電極單元的下側(或上側)的構成中，基板檢查裝置中的基板檢查夾具之配置有電極單元的部分及其周邊的構成變得複雜化，存在難以進行基板檢查夾具的更換等問題。Further, as described above, in the configuration in which the connection switching unit is disposed on the lower side (or the upper side) of the electrode unit of the substrate inspection jig in the substrate inspection apparatus main body, the substrate inspection jig in the substrate inspection apparatus is provided with the electrode unit The configuration of the portion and its periphery is complicated, and there is a problem that it is difficult to replace the substrate inspection jig.
此外，在基板檢查裝置主體中的基板檢查夾具的、配置有電極單元的部分的下側(或上側)，配置有進行基板檢查夾具的位置調節的位置調節機構的情況較多。因此，在如上述的構成中，存在連接切換單元成為障礙而難以確保位置調節機構的設置空間的情況。Further, in the lower side (or the upper side) of the portion of the substrate inspection jig in the substrate inspection device main body where the electrode unit is disposed, a position adjustment mechanism for adjusting the position of the substrate inspection jig is often disposed. Therefore, in the configuration as described above, there is a case where the connection switching means becomes an obstacle and it is difficult to secure the installation space of the position adjustment mechanism.
因此，本發明要解決的第1問題是提供一種基板檢查夾具及其相關技術，其能夠減輕伴隨著變更作為檢查物件的被檢查基板的構成而來的變更基板檢查夾具的構成的負擔。Therefore, the first problem to be solved by the present invention is to provide a substrate inspection jig and a related art thereof, which can reduce the burden of changing the configuration of the substrate inspection jig in accordance with the configuration of the substrate to be inspected as the inspection object.
因此，本發明要解決的第2問題是提供一種基板檢查裝置，其能夠容易地進行基板檢查夾具和電極單元的更換，並容易地確保基板檢查夾具的位置調節機構的設置空間。Therefore, the second problem to be solved by the present invention is to provide a substrate inspection apparatus capable of easily replacing a substrate inspection jig and an electrode unit, and easily securing an installation space of a position adjustment mechanism of the substrate inspection jig.
為了解決上述問題，第1態樣是一種基板檢查夾具，該基板檢查夾具安裝於基板檢查裝置，並用於與設置在被檢查基板上的佈線圖案的電氣特性相關的檢查中，其特徵在於，包括：夾具主體；電極單元，其具有配設 為大致矩陣狀的多個電極部，並於前述夾具主體上安裝成可以更換；以及檢查頭，其具有多個探針和固持前述多個探針的探針固持構件，並於前述電極單元或前述夾具主體上安裝成可以更換，使得前述各個探針的後端部與前述電極單元的任一個前述電極部電連接；且前述檢查頭的前述探針，配置成其前端部與作為檢查對象的前述被檢查基板的前述佈線圖案上所設定的檢查點對應，前述電極單元的前述電極部以比前述檢查頭的前述探針的配設間距小的配設間距配設為大致矩陣狀，以使其能夠對應於前述探針的配置方式不同的多種前述檢查頭。In order to solve the above problem, the first aspect is a substrate inspection jig which is mounted on a substrate inspection device and is used for inspection relating to electrical characteristics of a wiring pattern provided on the substrate to be inspected, and is characterized in that it includes : fixture body; electrode unit, which has an arrangement a plurality of electrode portions in a substantially matrix shape, and mounted on the jig body to be replaceable; and an inspection head having a plurality of probes and a probe holding member holding the plurality of probes, and the electrode unit or The clip body is mounted to be replaceable such that a rear end portion of each of the probes is electrically connected to any one of the electrode portions of the electrode unit; and the probe of the inspection head is disposed at a front end portion thereof and an object to be inspected Corresponding to the inspection point set on the wiring pattern of the substrate to be inspected, the electrode portion of the electrode unit is arranged in a substantially matrix shape at an arrangement pitch smaller than a pitch of the probe of the inspection head. It can correspond to a plurality of the aforementioned inspection heads in which the aforementioned probes are arranged in a different manner.
此外，第2態樣是在第1態樣之基板檢查夾具中，前述電極單元包括：絕緣性的電極基座構件，其具有形成於與前述檢查頭的對向面的多個電極孔；電極頭部，其具有導電性的大致棒狀形態，並配置在前述電極基座構件的前述電極孔內而構成前述電極部；導電螺旋彈簧構件，其具有導電性並具有大致螺旋彈簧狀的形態，並***於前述電極孔內，其伸縮方向的一側端部與前述電極頭部的後端側抵接；以及中繼連接構件，其具有導電性，且其前端部***於前述電極孔內而抵接於前述導電螺旋彈簧構件的前述伸縮方向的另一側端部。Further, in a second aspect of the invention, in the substrate inspection jig of the first aspect, the electrode unit includes: an insulating electrode base member having a plurality of electrode holes formed on a surface opposite to the inspection head; and an electrode a head having a substantially rod-like shape that is electrically conductive and disposed in the electrode hole of the electrode base member to constitute the electrode portion, and a conductive coil spring member having conductivity and having a substantially spiral spring shape. And inserted into the electrode hole, one end portion of the expansion and contraction direction abuts against the rear end side of the electrode head portion; and a relay connection member having conductivity, and a front end portion thereof is inserted into the electrode hole The other end portion of the aforementioned direction of expansion and contraction of the conductive coil spring member is abutted.
此外，第3態樣是在第2態樣之基板檢查夾具中，在前述電極基座構件的前述電極孔內設置有抵接部，前述抵接部與前述電極頭部的一部分抵接而阻擋前述電極頭部向前述檢查頭側的位移，前述導電螺旋彈簧構件在前述電極孔內沿伸縮方向被壓縮的狀態下插裝在前述電極頭部和前述中繼連接構件之間。Further, in the third aspect, in the substrate inspection jig of the second aspect, the electrode hole of the electrode base member is provided with an abutting portion, and the abutting portion abuts against a part of the electrode tip to block The displacement of the electrode head toward the inspection head side is inserted between the electrode head and the relay connection member in a state where the conductive coil spring member is compressed in the expansion and contraction direction in the electrode hole.
此外，第4態樣是在第3態樣之基板檢查夾具中，前述電極單元的前述電極頭部的朝向前述探針的後端部側的前端部，在沒有前述檢查頭的前述探針抵接的狀態下，配置在實質上與前述電極基座構件的與前述檢查頭的對向面對齊的位置上。Further, in the fourth aspect, in the substrate inspection jig of the third aspect, the tip end portion of the electrode head of the electrode unit facing the rear end side of the probe is not attached to the probe of the inspection head. In the connected state, it is disposed substantially at a position aligned with the opposing surface of the electrode base member and the inspection head.
此外，第5態樣是在第3態樣之基板檢查夾具中，前述電極單元的前 述電極頭部的朝向前述探針的後端部側的前端部，在沒有前述檢查頭的前述探針抵接的狀態下，配置於相對於前述電極基座構件與前述檢查頭的對向面向著與前述檢查頭背離的方向後退為凹狀的位置。Further, the fifth aspect is in the substrate inspection jig of the third aspect, the front of the electrode unit a distal end portion of the electrode tip facing the rear end portion side of the probe is disposed in an opposing direction with respect to the electrode base member and the inspection head in a state where the probe of the inspection head is not in contact with each other A position that is retracted into a concave shape in a direction away from the aforementioned inspection head.
此外，第6態樣是在第1態樣之基板檢查夾具中，在前述電極單元上設置有前述電極部的前述配設間距不同的多個電極形成區域。Further, in the sixth aspect of the invention, in the substrate inspection jig of the first aspect, the electrode unit is provided with a plurality of electrode formation regions having different arrangement pitches of the electrode portions.
此外，第7態樣是在第1態樣之基板檢查夾具中，前述電極單元的前述電極部的朝向前述探針的前述後端部側的前端部具有其中央部凹陷為大致凹狀的凹陷形狀。According to a seventh aspect of the invention, in the substrate inspection jig according to the first aspect, the front end portion of the electrode portion of the electrode unit facing the rear end portion of the probe has a concave portion whose central portion is recessed into a substantially concave shape. shape.
此外，第8態樣是在第1態樣之基板檢查夾具中，前述電極單元的前述電極部的朝向前述探針的前述後端部側的前端部的周緣部形成有向前述探針的前述後端部側突出的多個突起。In the eighth aspect of the invention, in the substrate inspection jig of the first aspect, the peripheral portion of the electrode portion of the electrode unit facing the distal end portion of the probe is formed with the aforementioned probe A plurality of protrusions protruding from the rear end side.
此外，第9態樣是在第1態樣之基板檢查夾具中，前述檢查頭的前述探針的前述前端部從前述探針固持構件的朝向前述被檢查基板側的前端側的端面突出，前述檢查頭的前述探針的前述後端部從前述探針固持構件的朝向前述電極單元側的後端側的端面突出。In the ninth aspect of the invention, in the substrate inspection jig according to the first aspect, the distal end portion of the probe of the inspection head protrudes from an end surface of the probe holding member toward the distal end side of the inspection substrate side. The rear end portion of the probe of the inspection head protrudes from an end surface of the probe holding member toward the rear end side of the electrode unit side.
此外，第10態樣是一種檢查裝置，其具備第1態樣之基板檢查夾具和安裝有前述基板檢查夾具的檢查裝置主體，前述檢查裝置主體包括：檢查處理部，其經由前述基板檢查夾具來檢查前述被檢查基板的前述佈線圖案的電氣特性；以及連接切換單元，其配置於前述基板檢查裝置主體上的、從與前述基板檢查裝置主體上安裝的前述基板檢查夾具的前述電極單元在上下方向上相對向的區域離開的位置上，並切換前述基板檢查夾具的前述電極部和前述檢查處理部之間的電連接關係。Further, a tenth aspect is an inspection apparatus including a substrate inspection jig of a first aspect and an inspection apparatus main body to which the substrate inspection jig is attached, wherein the inspection apparatus main body includes an inspection processing unit that passes through the substrate inspection jig Inspecting electrical characteristics of the wiring pattern of the substrate to be inspected, and a connection switching unit disposed on the substrate inspection device main body in the vertical direction from the electrode unit of the substrate inspection jig mounted on the substrate inspection device main body The position where the upper opposing region is separated, and the electrical connection relationship between the electrode portion of the substrate inspection jig and the inspection processing portion is switched.
此外，第11態樣是一種夾具底座單元，該夾具底座單元與具備多個探針的檢查頭一起安裝於基板檢查裝置，並用於與設置在被檢查基板上的佈 線圖案的電氣特性相關的檢查中，其特徵在於，包括：夾具主體；以及電極單元，其具有配設為大致矩陣狀的多個電極部，並於前述夾具主體上安裝成可以更換；且隨著前述檢查頭於前述電極單元或前述夾具主體上安裝成可以更換，前述檢查頭的前述探針的後端部與前述電極單元的任一個前述電極部電接觸，前述電極單元的前述電極部以比前述檢查頭的前述探針的配設間距小的配設間距配設為大致矩陣狀，以使其能夠對應於前述探針的配置方式不同的多種前述檢查頭。Further, the eleventh aspect is a jig base unit that is mounted on a substrate inspection device together with an inspection head having a plurality of probes, and is used for a cloth disposed on the substrate to be inspected The inspection relating to electrical characteristics of the line pattern includes: a jig body; and an electrode unit having a plurality of electrode portions arranged in a substantially matrix shape, and being mounted on the jig body to be replaceable; The inspection head is mounted to be replaceable on the electrode unit or the jig body, and a rear end portion of the probe of the inspection head is in electrical contact with any one of the electrode portions of the electrode unit, and the electrode portion of the electrode unit is The arrangement pitches smaller than the arrangement pitch of the probes of the inspection head are arranged in a substantially matrix shape so as to be compatible with a plurality of types of the inspection heads in which the probes are arranged differently.
根據上述第1至第9態樣之基板檢查夾具，由於電極單元能夠更換，所以即使在要設置探針的配設間距等不同的檢查頭的情況下，也無需更換整個基板檢查夾具，藉由更換電極單元即可應對。因此，能夠減輕伴隨著變更作為檢查物件的被檢查基板的構成(例如，佈線圖案的配設間距等)而來的變更基板檢查夾具的構成的負擔。According to the substrate inspection jig according to the first to ninth aspects, since the electrode unit can be replaced, even when an inspection head having different arrangement pitches of the probes or the like is to be provided, it is not necessary to replace the entire substrate inspection jig by It is possible to replace the electrode unit. Therefore, it is possible to reduce the burden of changing the configuration of the substrate inspection jig in accordance with the configuration (for example, the arrangement pitch of the wiring patterns) of the substrate to be inspected as the inspection object.
根據上述第2態樣之基板檢查夾具，在安裝有檢查頭且探針的後端部與電極頭部電接觸時，利用導電螺旋彈簧構件的作用力，將電極頭部彈性推壓而接觸於探針的後端部，因此能夠使探針和電極頭部的電接觸狀態穩定。According to the substrate inspection jig of the second aspect, when the inspection head is attached and the rear end portion of the probe is in electrical contact with the electrode tip, the electrode head is elastically pressed and brought into contact by the urging force of the conductive coil spring member. The rear end portion of the probe can stabilize the electrical contact state of the probe and the electrode tip.
根據上述第3態樣之基板檢查夾具，在未安裝檢查頭且電極頭部等待與探針抵接的狀態下，利用在被壓縮的狀態下***的導電螺旋彈簧構件的作用力，電極頭部被彈性地推壓到電極孔內的上限位置。因此，能夠正確地定位等待狀態下的電極頭部的前端部的位置，由此，在安裝檢查頭時，能夠使探針的後端部與電極頭部可靠地電接觸。According to the substrate inspection jig of the third aspect, the electrode head is used by the urging force of the conductive coil spring member inserted in the compressed state in a state where the inspection head is not attached and the electrode head is abutted against the probe. It is elastically pushed to the upper limit position in the electrode hole. Therefore, the position of the tip end portion of the electrode head in the waiting state can be accurately positioned, whereby the rear end portion of the probe can be reliably electrically contacted with the electrode head when the inspection head is attached.
根據上述第4態樣之基板檢查夾具，電極單元的電極頭部的朝向探針的後端部側的前端部，在沒有與檢查頭的探針抵接的狀態下，配置在實質上與電極基座構件的與檢查頭的對向面對齊的位置上。因此，利用隨著探針的後端部與電極頭部抵接而產生的推壓力，電極頭部的前端部相對於電 極基座構件的上述對向面，向著與檢查頭背離的方向稍微後退為凹狀，由此，能夠防止探針的後端部從電極頭部的前端部的位置偏離，能夠使探針和電極頭部之間的抵接狀態穩定。According to the substrate inspection jig of the fourth aspect, the tip end portion of the electrode head of the electrode unit facing the rear end side of the probe is disposed substantially in the state of being in contact with the probe of the inspection head. The position of the base member aligned with the opposing face of the inspection head. Therefore, the tip end portion of the electrode head is opposite to the electric power by the pressing force generated when the rear end portion of the probe abuts against the electrode head. The opposing surface of the pole base member is slightly recessed in a direction away from the inspection head, thereby preventing the position of the rear end portion of the probe from being displaced from the tip end portion of the electrode head, and enabling the probe and The abutment state between the electrode tips is stable.
根據上述第5態樣之基板檢查夾具，電極單元的電極頭部的朝向探針的後端部側的前端部，在沒有與檢查頭的探針抵接的狀態下，被配置於相對於前述電極基座構件的與檢查頭的對向面而向著與前述檢查頭背離的方向後退為凹狀的位置。因此，不僅在探針的後端部與電極頭部抵接後，而且在抵接時，也能夠使探針的後端部位置不偏離地與電極頭部的上端部可靠地接觸，且能夠使探針和電極頭部之間的抵接狀態穩定。According to the substrate inspection jig of the fifth aspect, the tip end portion of the electrode head of the electrode unit facing the rear end side of the probe is disposed in the state opposite to the probe of the inspection head. The electrode base member retreats to a position facing away from the inspection head in a direction opposite to the inspection head. Therefore, not only after the rear end portion of the probe abuts against the electrode head but also at the time of abutment, the position of the rear end portion of the probe can be reliably contacted with the upper end portion of the electrode head without deviation, and The abutment state between the probe and the electrode tip is stabilized.
根據上述第6態樣之基板檢查夾具，由於在電極單元上設置有電極部的配設間距不同的多個電極形成區域，所以還能夠應對檢查頭的探針的配設間距有一部分不同的情況。其結果，即使對於具有佈線圖案的配設間距等不同的多個區域的被檢查基板，也能夠使用一個基板檢查夾具來一起檢查。According to the substrate inspection jig of the sixth aspect, since the electrode unit is provided with a plurality of electrode formation regions having different arrangement pitches of the electrode portions, it is possible to cope with a case where the arrangement pitch of the probes of the inspection head is partially different. . As a result, the substrate to be inspected having a plurality of regions having different arrangement pitches of the wiring patterns can be inspected together using one substrate inspection jig.
根據上述第7態樣之基板檢查夾具，電極單元的電極部的朝向探針的後端部側的前端部的中央部具有凹陷為大致凹狀的凹陷形狀，因此，探針的後端部嵌入到電極部的前端部的凹陷處內並與電極部電接觸，所以能夠使探針和電極部之間的電接觸狀態穩定。According to the substrate inspection jig of the seventh aspect, the central portion of the electrode portion of the electrode unit facing the distal end portion of the probe has a concave shape that is recessed in a substantially concave shape. Therefore, the rear end portion of the probe is embedded. Since the electrode portion is electrically contacted in the recessed portion of the tip end portion of the electrode portion, the electrical contact state between the probe and the electrode portion can be stabilized.
根據上述第8態樣之基板檢查夾具，電極單元的電極部的朝向前述探針的後端部側的前端部的周緣部形成有向探針的後端部側突出的多個突起。因此，探針的後端部嵌入到電極部的前端部的周緣部上所設置的多個突起的內側而與電極部電接觸，所以能夠使探針和電極部之間的電接觸狀態穩定。According to the substrate inspection jig of the eighth aspect, the peripheral portion of the electrode portion of the electrode unit that faces the distal end portion of the probe is formed with a plurality of protrusions that protrude toward the rear end side of the probe. Therefore, since the rear end portion of the probe is fitted into the inner side of the plurality of protrusions provided on the peripheral edge portion of the tip end portion of the electrode portion and is in electrical contact with the electrode portion, the electrical contact state between the probe and the electrode portion can be stabilized.
根據上述第10態樣之基板檢查裝置，連接切換單元配置於基板檢查裝置主體上的、從與安裝在基板檢查裝置主體上的基板檢查夾具的電極單元 在上下方向上相對向的區域離開的位置。因此，能夠簡化基板檢查裝置中配置有基板檢查夾具的電極單元的部分和其周邊的構成，使基板檢查夾具和電極單元的更換作業等變得容易。此外，也能夠容易地確保基板檢查夾具的位置調節機構的設置空間。According to the substrate inspection apparatus of the tenth aspect, the connection switching unit is disposed on the substrate inspection apparatus main body and is connected to the electrode unit of the substrate inspection jig mounted on the substrate inspection apparatus main body. A position where the opposing area in the up and down direction is separated. Therefore, it is possible to simplify the configuration of the electrode unit in which the substrate inspection jig is disposed in the substrate inspection device and the configuration of the periphery thereof, and it is easy to replace the substrate inspection jig and the electrode unit. Further, it is also possible to easily ensure the installation space of the position adjustment mechanism of the substrate inspection jig.
根據上述第11態樣之夾具底座單元，由於電極單元能夠更換，所以即使在要設置探針的配設間距等不同的檢查頭的情況下，也無需更換整個基板檢查夾具，而是藉由更換電極單元即可應對。因此，能夠減輕伴隨著作為檢查物件的被檢查基板的構成(例如，佈線圖案的配設間距等)變更而來的基板檢查夾具的構成變更的負擔。According to the above-described eleventh aspect of the jig base unit, since the electrode unit can be replaced, even if an inspection head having a different arrangement pitch of the probes is to be provided, it is not necessary to replace the entire substrate inspection jig, but by replacing The electrode unit can handle it. Therefore, it is possible to reduce the burden of changing the configuration of the substrate inspection jig due to the change in the configuration of the substrate to be inspected (for example, the arrangement pitch of the wiring pattern).
1‧‧‧基板檢查裝置1‧‧‧Substrate inspection device
2‧‧‧基板檢查夾具2‧‧‧Substrate inspection fixture
3‧‧‧檢查裝置主體3‧‧‧Checking device body
31‧‧‧檢查處理部31‧‧‧Check and Processing Department
32‧‧‧連接切換單元32‧‧‧Connection switching unit
321‧‧‧連接器部321‧‧‧Connector Department
6‧‧‧夾具主體6‧‧‧Clamp body
61‧‧‧基座構件61‧‧‧Base member
61a‧‧‧貫穿窗部61a‧‧‧through the window
61b‧‧‧安裝部61b‧‧‧Installation Department
62‧‧‧連接器62‧‧‧Connector
7‧‧‧電極單元7‧‧‧Electrode unit
71‧‧‧電極基座構件71‧‧‧Electrode base member
711‧‧‧電極孔711‧‧‧electrode hole
711a‧‧‧頭側端部711a‧‧‧ head side
711b‧‧‧底部側端部711b‧‧‧ bottom side end
711c‧‧‧中間部711c‧‧‧Intermediate
711d‧‧‧台階部711d‧‧‧Steps
712‧‧‧對向面712‧‧‧ opposite
712a、712b‧‧‧電極形成區域712a, 712b‧‧‧ electrode formation area
72‧‧‧電極頭部72‧‧‧electrode head
721‧‧‧前端側小徑部721‧‧‧ front side small diameter section
722‧‧‧中間大徑部722‧‧‧Intermediate Large Diameter Department
723‧‧‧後端側小徑部723‧‧‧Back side small diameter section
724‧‧‧臺階部724‧‧‧Steps
725‧‧‧前端部725‧‧‧ front end
726‧‧‧凹陷726‧‧‧ dent
727‧‧‧突起727‧‧ ‧ prominence
73‧‧‧導電螺旋彈簧構件73‧‧‧Conducting coil spring components
74‧‧‧中繼連接構件74‧‧‧Relay connection members
741‧‧‧導線741‧‧‧ wire
742‧‧‧彈簧抵接部742‧‧‧Spring abutment
8‧‧‧檢查頭8‧‧‧Check head
81‧‧‧探針81‧‧‧Probe
81a‧‧‧前端部81a‧‧‧ front end
81b‧‧‧後端部81b‧‧‧ back end
82‧‧‧探針固持構件82‧‧‧Probe holding member
821‧‧‧前端側固持構件821‧‧‧ front end retaining member
821a‧‧‧端面821a‧‧‧ end face
822‧‧‧後端側固持構件822‧‧‧ Rear end retaining member
822a‧‧‧端面822a‧‧‧ end face
823‧‧‧連接構件823‧‧‧Connecting members
9‧‧‧夾具底座單元9‧‧‧Clamp base unit
圖1是局部顯示使用本發明的一實施方式之基板檢查夾具的基板檢查裝置的構成。Fig. 1 is a view showing a configuration of a substrate inspecting apparatus using a substrate inspecting jig according to an embodiment of the present invention.
圖2是放大顯示圖1的基板檢查夾具的剖視圖的局部構成。2 is a partial view showing a cross-sectional view of the substrate inspection jig of FIG. 1 in an enlarged manner.
圖3是顯示檢查頭的構成的剖視圖。Fig. 3 is a cross-sectional view showing the configuration of an inspection head.
圖4是放大顯示電極單元的電極頭部及其周邊構成的剖視圖。4 is a cross-sectional view showing an enlarged configuration of an electrode head portion of an electrode unit and its periphery.
圖5是顯示圖4的構成的變形例。Fig. 5 is a modification showing the configuration of Fig. 4;
圖6是示意性顯示與電極單元的電極孔及電極頭部等的配置方式相關的變形例的概要平面圖。FIG. 6 is a schematic plan view schematically showing a modification related to the arrangement of the electrode holes and the electrode tips of the electrode unit.
圖7是顯示與電極單元所具備的電極頭部的前端部的構成相關的第一變形例的剖視圖。FIG. 7 is a cross-sectional view showing a first modification relating to the configuration of the tip end portion of the electrode head included in the electrode unit.
圖8(a)、(b)分別是顯示與電極單元所具備的電極頭部的前端部的構成相關的第二變形例的剖視圖和平面圖。(a) and (b) of FIG. 8 are a cross-sectional view and a plan view showing a second modification relating to the configuration of the tip end portion of the electrode head provided in the electrode unit.
參照圖1至圖5，對於應用本發明的一個實施方式之基板檢查夾具的基板檢查裝置進行說明。A substrate inspection device to which a substrate inspection jig according to an embodiment of the present invention is applied will be described with reference to Figs. 1 to 5 .
如圖1所示，該基板檢查裝置1具備基板檢查夾具2和安裝該基板檢查夾具2的檢查裝置主體3，並用於與未圖示的被檢查基板上所設置的佈線圖案的電氣特性相關的檢查中。就具體的檢查而言，舉例有例如佈線圖案的導通檢查及佈線圖案之間的絕緣檢查等。As shown in FIG. 1, the substrate inspection device 1 includes a substrate inspection jig 2 and an inspection device main body 3 to which the substrate inspection jig 2 is attached, and is used for electrical characteristics of a wiring pattern provided on a substrate to be inspected (not shown). checking. For the specific inspection, for example, a conduction inspection of a wiring pattern and an insulation inspection between wiring patterns are exemplified.
如圖1所示，基板檢查夾具2具備夾具主體6、電極單元7和檢查頭8。另外，有時也將夾具主體6和電極單元7合起來稱作夾具底座單元9。As shown in FIG. 1, the substrate inspection jig 2 includes a jig main body 6, an electrode unit 7, and an inspection head 8. Further, the jig main body 6 and the electrode unit 7 are sometimes collectively referred to as a jig base unit 9.
夾具主體6是構成基板檢查夾具2的基座部分的構件，如圖1所示，具備大致板狀的基座構件61和安裝在該基座構件61的貫穿窗部61a上的連接器62。貫穿窗部61a和連接器62配置於基座構件61的在基座構件61的延伸設置方向即橫向上從安裝有電極單元7的安裝部61b離開的位置。這樣構成的夾具主體6可拆裝地安裝在檢查裝置主體3的未圖示的夾具安裝部上。在用於固定夾具主體6和檢查裝置主體3的固定結構中，使用例如通過簡單的單鍵(one touch)操作等就能夠固定和解除固定的結構、或者使用螺釘固定等。The jig main body 6 is a member constituting a base portion of the substrate inspection jig 2, and as shown in FIG. 1, includes a substantially plate-shaped base member 61 and a connector 62 attached to the through-hole portion 61a of the base member 61. The through-hole portion 61a and the connector 62 are disposed at a position of the base member 61 that is apart from the mounting portion 61b on which the electrode unit 7 is mounted in the extending direction of the base member 61, that is, in the lateral direction. The jig main body 6 configured as above is detachably attached to a jig attachment portion (not shown) of the inspection apparatus main body 3. In the fixing structure for fixing the jig main body 6 and the inspection apparatus main body 3, a fixed structure can be fixed and released, for example, by a simple one touch operation, or a screw fixing or the like can be used.
如圖1和圖2所示，電極單元7具備電極基座構件71、由該電極基座構件71固持的多組電極頭部72、導電螺旋彈簧構件73和中繼連接構件74而構成。其中，電極頭部72相當於本發明之電極部。As shown in FIGS. 1 and 2, the electrode unit 7 includes an electrode base member 71, a plurality of sets of electrode heads 72 held by the electrode base member 71, a conductive coil spring member 73, and a relay connecting member 74. Among them, the electrode head 72 corresponds to the electrode portion of the present invention.
如圖2所示，電極基座構件71是將具有絕緣性的多個板狀構件重疊而構成的，並形成有多個電極孔711，該多個電極孔711中***且固持有電極頭部72、導電螺旋彈簧構件73和中繼連接構件74。電極孔711沿基板檢查夾具2的軸向即上下方向貫穿電極基座構件71，作為其檢查頭8側的頭側端部711a和與檢查頭8側相反一側的底部側端部711b的部分的內徑縮減而窄於其中間部711c的內徑。此外，電極孔711的頭側端部711a在電極基座構件71的與檢查頭8的對向面712開口。另外，作為變形例，電極基座構件71也可以由一個板狀體構成。As shown in FIG. 2, the electrode base member 71 is formed by laminating a plurality of insulating plate members, and is formed with a plurality of electrode holes 711 into which the electrode holders are inserted and held. The portion 72, the conductive coil spring member 73, and the relay connecting member 74. The electrode hole 711 penetrates the electrode base member 71 in the vertical direction in the axial direction of the substrate inspection jig 2, and serves as a portion of the head side end portion 711a on the inspection head 8 side and a bottom side end portion 711b on the side opposite to the inspection head 8 side. The inner diameter is reduced to be narrower than the inner diameter of the intermediate portion 711c. Further, the head end portion 711a of the electrode hole 711 is opened at the opposing surface 712 of the electrode base member 71 and the inspection head 8. Further, as a modification, the electrode base member 71 may be constituted by one plate-like body.
電極頭部72具有導電性(例如金屬製)的大致棒狀的形狀，並具有前端側小徑部721、中間大徑部722和後端側小徑部723。中間大徑部722的外徑大於前端側小徑部721和後端側小徑部723的外徑，並小於電極基座構件71的電極孔711的中間部711c的內徑，而且大於頭側端部711a的內徑。此外，前端側小徑部721的外徑小於電極孔711的頭側端部711a的內徑。The electrode head portion 72 has a substantially rod-shaped shape of conductivity (for example, made of metal), and has a distal end side small diameter portion 721, a middle large diameter portion 722, and a rear end side small diameter portion 723. The outer diameter of the intermediate large diameter portion 722 is larger than the outer diameters of the distal end side small diameter portion 721 and the rear end side small diameter portion 723, and smaller than the inner diameter of the intermediate portion 711c of the electrode hole 711 of the electrode base member 71, and larger than the head side. The inner diameter of the end portion 711a. Further, the outer diameter of the distal end side small diameter portion 721 is smaller than the inner diameter of the head side end portion 711a of the electrode hole 711.
這樣的電極頭部72通過將前端側小徑部721從底部側***到電極孔711的頭側端部711a內而***於電極孔711內，並利用後述的導電螺旋彈簧構件73的作用力而固持於被彈性地推壓至檢查頭8側的狀態。在該狀態下，如圖4所示，通過使電極頭部72的前端側小徑部721和中間大徑部722之間的臺階部724抵接於電極孔711內的頭側端部711a和中間部711c之間的臺階部711d(相當於本發明之抵接部)，阻擋了電極頭部72向檢查頭8側的位移。The electrode head portion 72 is inserted into the electrode hole 711 by inserting the distal end side small diameter portion 721 from the bottom side into the head end portion 711a of the electrode hole 711, and is biased by a biasing force of the conductive coil spring member 73 to be described later. It is held in a state of being elastically pressed to the side of the inspection head 8. In this state, as shown in FIG. 4, the step portion 724 between the distal end side small diameter portion 721 of the electrode head portion 72 and the intermediate large diameter portion 722 is brought into contact with the head side end portion 711a in the electrode hole 711 and The step portion 711d (corresponding to the abutting portion of the present invention) between the intermediate portions 711c blocks the displacement of the electrode head portion 72 toward the inspection head 8 side.
此時，如圖4所示，電極頭部72的朝向檢查頭8側的前端部(在圖4的例中為前端面)725被設定為位於實質上與電極基座構件71的與檢查頭8的對向面712對齊為同一平面的位置。或者，就該圖4所示構成的變形例而言，如圖5所示，也可以將電極頭部72的前端部(在圖4的例中，前端面)725設定成位於相對於電極基座構件71的對向面712而向著與檢查頭8背離的方向後退為凹狀的位置上。At this time, as shown in FIG. 4, the tip end portion (the front end surface in the example of FIG. 4) 725 of the electrode head portion 72 facing the inspection head 8 side is set to be substantially in contact with the electrode base member 71 and the inspection head. The opposing faces 712 of 8 are aligned to the same plane position. Alternatively, in the modification of the configuration shown in FIG. 4, as shown in FIG. 5, the tip end portion (the front end surface in the example of FIG. 4) 725 of the electrode head portion 72 may be set to be located relative to the electrode base. The opposing surface 712 of the seat member 71 is retracted into a concave position in a direction away from the inspection head 8.
導電螺旋彈簧構件73具有由導電材料(例如金屬)形成的大致螺旋彈簧狀的形狀，並且在電極孔711內沿其伸縮方向被壓縮的狀態下，插裝於電極頭部72和後述的中繼連接構件74之間。導電螺旋彈簧構件73的伸縮方向的一側端部抵接於電極頭部72的後端側，另一側端部抵接於中繼連接構件74的前端部，由此，電極頭部72和中繼連接構件74經由導電螺旋彈簧構件73電連接。另外，在本實施方式中，導電螺旋彈簧構件73的上述一側端部在外嵌於電極頭部72的後端側小徑部723上的狀態下，抵接於後 端側小徑部723和中間大徑722之間的臺階部，並將電極頭部72向檢查頭8側推壓。The conductive coil spring member 73 has a substantially spiral spring shape formed of a conductive material (for example, metal), and is inserted into the electrode head 72 and a relay to be described later in a state where the electrode hole 711 is compressed in the expansion and contraction direction thereof. Between the connecting members 74. One end portion of the conductive coil spring member 73 in the expansion and contraction direction abuts on the rear end side of the electrode head portion 72, and the other end portion abuts against the front end portion of the relay connection member 74, whereby the electrode head portion 72 and The relay connection members 74 are electrically connected via the conductive coil spring members 73. Further, in the present embodiment, the one end portion of the conductive coil spring member 73 abuts on the rear end side small-diameter portion 723 of the electrode head portion 72, and is in contact with the rear side. The step portion between the end small-diameter portion 723 and the intermediate large diameter 722 pushes the electrode head portion 72 toward the inspection head 8 side.
中繼連接構件74具有導電性，並將電極頭部72與後述的連接切換單元32電連接。中繼連接構件74的前端部從底部側端部711b***到電極孔711內，並經由導電螺旋彈簧構件73與電極頭部72電連接。The relay connection member 74 has electrical conductivity, and electrically connects the electrode head 72 to a connection switching unit 32 which will be described later. The front end portion of the relay connecting member 74 is inserted into the electrode hole 711 from the bottom side end portion 711b, and is electrically connected to the electrode head portion 72 via the conductive coil spring member 73.
就中繼連接構件74的具體構成而言，構成為具備例如導電性的導線741和與該導線741的前端接合並具有導電性的彈簧抵接部742。導線741的線徑設定為小於電極孔711的底部側端部711b的內徑。彈簧抵接部742的外徑設定為大於導線741的線徑及電極孔711的底部側端部711b的內徑且小於中間部711c的內徑。因此，在電極孔711內，彈簧抵接部742與底部側端部711b的檢查頭8側的開口部卡合，由此中繼連接構件74的***於電極孔711內的部分被阻擋在電極孔711中。從電極孔711引出的導線741與連接器62電連接。另外，導線741宜藉由樹脂等的絕緣材料覆蓋導體芯部的周圍。此外，導線741可以是從電極孔711到連接器62的直連導線，也可以在中途與其他中繼導線電連接，並經由該中繼導線與連接器62電連接。此外，就彈簧抵接部742而言，可以使用例如焊錫球等金屬製的球。The specific configuration of the relay connecting member 74 is configured to include, for example, a conductive wire 741 and a spring abutting portion 742 that is joined to the tip end of the wire 741 and has conductivity. The wire diameter of the wire 741 is set to be smaller than the inner diameter of the bottom side end portion 711b of the electrode hole 711. The outer diameter of the spring abutting portion 742 is set to be larger than the wire diameter of the wire 741 and the inner diameter of the bottom side end portion 711b of the electrode hole 711 and smaller than the inner diameter of the intermediate portion 711c. Therefore, in the electrode hole 711, the spring abutment portion 742 is engaged with the opening portion on the inspection head 8 side of the bottom side end portion 711b, whereby the portion of the relay connection member 74 inserted into the electrode hole 711 is blocked at the electrode. Hole 711. The wire 741 drawn from the electrode hole 711 is electrically connected to the connector 62. Further, the wire 741 is preferably covered with a surrounding material of the conductor core by an insulating material such as resin. Further, the wire 741 may be a straight wire from the electrode hole 711 to the connector 62, or may be electrically connected to other relay wires in the middle, and electrically connected to the connector 62 via the relay wire. Further, as the spring abutting portion 742, a metal ball such as a solder ball can be used.
該電極單元7的電極孔711和電極頭部72以比檢查頭8的探針81的配設間距小的配設間距配設為大致矩陣狀，以使其能夠對應於探針81的配置方式不同的後述的多種檢查頭8。隨著檢查頭8安裝在電極單元7上，檢查頭8的探針81的後端部81b與電極單元7的配設為大致矩陣狀的任一個電極頭部72電連接。The electrode hole 711 and the electrode head portion 72 of the electrode unit 7 are arranged in a substantially matrix shape at an arrangement pitch smaller than the arrangement pitch of the probes 81 of the inspection head 8 so as to correspond to the arrangement of the probes 81. A plurality of different inspection heads 8 to be described later. As the inspection head 8 is attached to the electrode unit 7, the rear end portion 81b of the probe 81 of the inspection head 8 is electrically connected to any one of the electrode heads 72 of the electrode unit 7 arranged in a substantially matrix shape.
此時，電極頭部72通過伴隨著與探針81抵接而來的來自探針81的推壓力，而變為克服導電性螺旋彈簧構件73的作用力而被稍微壓入至電極孔711的內側的狀態。隨之，電極頭部72的前端部725變為相對於電極基座構件71的對向面712而向著與檢查頭8背離的方向稍微後退為凹狀的狀態，由此，防止探針81的後端部81a從電極頭部72的前端部725的位置 偏離，使探針81和電極頭部72之間的抵接狀態穩定。At this time, the electrode head portion 72 is slightly pressed into the electrode hole 711 by the urging force of the conductive coil spring member 73 by the urging force from the probe 81 accompanying the contact with the probe 81. The state of the inside. As a result, the tip end portion 725 of the electrode head portion 72 is slightly recessed toward the direction facing the inspection head 8 with respect to the opposing surface 712 of the electrode base member 71, thereby preventing the probe 81 from being removed. The position of the rear end portion 81a from the front end portion 725 of the electrode head portion 72 The deviation causes the abutment state between the probe 81 and the electrode head 72 to be stabilized.
這樣的電極單元7在夾具主體6的基座構件61的安裝部61b上安裝成可以更換。在用於固定電極單元7和夾具主體6的基座構件61的固定構造中，可以使用藉由例如簡單的單鍵操作等就能夠固定和解除固定的構造、或者使用螺栓固定等。Such an electrode unit 7 is mounted on the mounting portion 61b of the base member 61 of the jig body 6 so as to be replaceable. In the fixing structure for fixing the base member 61 of the electrode unit 7 and the jig main body 6, a structure that can be fixed and released by, for example, a simple one-button operation or the like, or a bolt fixing or the like can be used.
如圖3所示，檢查頭8具備具有導電性且具有大致細長針狀形態的多個探針81、和固持前述多個探針81的探針固持構件82而構成。探針固持構件82具備位於作為檢查對象的未圖示的被檢查基板側的前端側固持構件821、配置在電極單元7側的後端側固持構件822、以及連接並固定前端側固持構件821和後端側固持構件822的連接構件823。前端側固持構件821和後端側固持構件822在上下方向上隔開間隔的狀態下通過連接構件823而被連接。此外，在前端側固持構件821和後端側固持構件822上形成有能夠***並固持探針81的多個固持孔，探針81的前端側插穿並固持在前端側固持構件821的固持孔中，探針81的後端側插穿並固持在後端側固持構件822的固持孔中。As shown in FIG. 3, the inspection head 8 is configured to include a plurality of probes 81 having conductivity and having a substantially elongated needle shape, and a probe holding member 82 for holding the plurality of probes 81. The probe holding member 82 includes a distal end side holding member 821 on the inspection substrate side (not shown) to be inspected, a rear end side holding member 822 disposed on the electrode unit 7 side, and a front end side holding member 821 connected and fixed. The connecting member 823 of the rear end side holding member 822. The front end side holding member 821 and the rear end side holding member 822 are connected by the connecting member 823 in a state of being spaced apart in the vertical direction. Further, a plurality of holding holes capable of inserting and holding the probe 81 are formed on the front end side holding member 821 and the rear end side holding member 822, and the front end side of the probe 81 is inserted and held by the holding hole of the front end side holding member 821 The rear end side of the probe 81 is inserted and held in the holding hole of the rear end side holding member 822.
在該探針81的固持狀態下，探針81的前端部81a和後端部81b分別從前端側固持構件821的朝向被檢查基板側的前端側的端面821a、和後端側固持構件822的朝向電極單元7側的後端側的端面822a突出。探針81的前端部81a與設置在作為檢查對象的被檢查基板的佈線圖案上的檢查點電接觸，後端部81b與電極單元7的電極頭部72電接觸。In the holding state of the probe 81, the distal end portion 81a and the rear end portion 81b of the probe 81 are respectively oriented from the distal end side end surface 821a of the distal end side holding member 821 toward the inspection substrate side, and the rear end side holding member 822. The end surface 822a on the rear end side toward the electrode unit 7 side protrudes. The distal end portion 81a of the probe 81 is in electrical contact with a check point provided on the wiring pattern of the substrate to be inspected to be inspected, and the rear end portion 81b is in electrical contact with the electrode head portion 72 of the electrode unit 7.
另外，在圖3的圖示例中，前端側固持構件821和後端側固持構件822是分別重疊了具有絕緣性的多個板狀構件而構成的，但也可以由單一的板狀構件構成。Further, in the illustrated example of FIG. 3, the front end side holding member 821 and the rear end side holding member 822 are each formed by superposing a plurality of insulating plate members, but they may be composed of a single plate member. .
這樣的檢查頭8在電極單元7上安裝成可以更換。在用於固定檢查頭8和電極單元7的固定構造中，可以使用例如通過簡單的單鍵操作等就能夠 固定和解除固定的構造、或者使用螺釘固定等。作為變形例，也可以不將檢查頭8安裝在電極單元7上，而將檢查頭8直接安裝在夾具主體6的基座構件61的安裝部61b上。Such an inspection head 8 is mounted on the electrode unit 7 so as to be replaceable. In the fixing configuration for fixing the inspection head 8 and the electrode unit 7, it is possible to use, for example, a simple one-button operation or the like. Fix and unfix the structure, or use screws to fix it. As a modification, the inspection head 8 may be directly attached to the attachment portion 61b of the base member 61 of the clamp body 6 without attaching the inspection head 8 to the electrode unit 7.
檢查頭8的探針81被配置成使其前端部81a與作為檢查對象的被檢查基板的佈線圖案上所設定的檢查點相對應。即，針對每種作為檢查對象的被檢查基板，準備有多種檢查頭8，並隨著變更作為檢查對象的被檢查基板的種類而適當地更換檢查頭8。The probe 81 of the inspection head 8 is disposed such that its distal end portion 81a corresponds to a checkpoint set on the wiring pattern of the substrate to be inspected to be inspected. In other words, a plurality of types of inspection heads 8 are prepared for each of the substrates to be inspected, and the inspection head 8 is appropriately replaced in accordance with the type of the substrate to be inspected to be inspected.
與此相對，將電極單元7的電極孔711和電極頭部722等的構成設定為，使其能夠與探針81的配置方式不同的多種檢查頭8相對應的方式。因此，在變更了作為檢查對象的被檢查基板的種類時，如果檢查頭8的探針81的配置方式的變更程度在電極單元7的可對應範圍(例如，探針81的配設間距沒有大幅變更的情況等)內，則只需更換檢查頭8，而不用更換電極單元7。On the other hand, the configuration of the electrode hole 711 and the electrode head portion 722 of the electrode unit 7 is set so as to correspond to the plurality of types of the inspection heads 8 different from the arrangement of the probes 81. Therefore, when the type of the substrate to be inspected to be inspected is changed, the degree of change in the arrangement of the probes 81 of the inspection head 8 is within the range of the electrode unit 7 (for example, the arrangement pitch of the probes 81 is not significantly increased) In the case of a change, etc., it is only necessary to replace the inspection head 8 without replacing the electrode unit 7.
此外，由於本實施方式之電極單元7能夠容易地更換，所以假設即使伴隨著變更被檢查基板的種類而來的檢查頭8的探針81的配置方式的變更程度在電極單元7的可對應範圍外(例如，探針81的配設間距發生大幅變更的情況等)，也只需更換電極單元7，而不用更換夾具主體6。In addition, since the electrode unit 7 of the present embodiment can be easily replaced, it is assumed that the degree of change in the arrangement of the probes 81 of the inspection head 8 due to the change in the type of the substrate to be inspected is within the range of the electrode unit 7 In addition (for example, when the arrangement pitch of the probe 81 is largely changed), it is only necessary to replace the electrode unit 7 without replacing the jig body 6.
接下來，對檢查裝置主體3的構成進行說明。如圖1所示，檢查裝置主體3具備檢查處理部31和連接切換單元32。檢查處理部31經由基板檢查夾具2來檢查被檢查基板的佈線圖案的電氣特性。Next, the configuration of the inspection apparatus main body 3 will be described. As shown in FIG. 1, the inspection apparatus main body 3 is provided with the inspection processing unit 31 and the connection switching unit 32. The inspection processing unit 31 checks the electrical characteristics of the wiring pattern of the substrate to be inspected via the substrate inspection jig 2 .
連接切換單元32具備多個開關元件(例如，半導體開關元件)而構成，並插裝在對基板檢查夾具2的電極頭部72和檢查處理部31之間進行電連接的佈線中，由此來切換電極頭部72和檢查處理部31的電連接關係。The connection switching unit 32 is configured by including a plurality of switching elements (for example, semiconductor switching elements), and is inserted into a wiring that electrically connects between the electrode head 72 of the substrate inspection jig 2 and the inspection processing unit 31. The electrical connection relationship between the electrode head portion 72 and the inspection processing portion 31 is switched.
這樣的連接切換單元32被配置於檢查裝置主體3上的、在橫向上從與 檢查裝置主體3上安裝的基板檢查夾具2的電極單元7在上下方向上相對向的區域離開的位置。在本實施方式中，連接切換單元32配置在基板檢查夾具2的夾具主體6的基座構件61的與電極單元7相反的一側。另外，在連接切換單元32的朝向基板檢查夾具2側的面上設置有連接器部321。藉由將該連接器部321連接到連接器62上，連接切換單元32經由連接器62和包含導線741的中繼連接構件74而與電極頭部72電連接。即，在本實施方式中，關於電極頭部72和連接切換單元32之間的電連接，首先在夾具主體6的基座構件61的電極單元7側，在電極頭部72和連接器62之間經由導電螺旋彈簧構件73等並利用導線741來進行。接著，該導線741和連接切換單元32經由連接器62電連接，該連接切換單元32配置在基座構件61的與電極單元7相反的一側。Such a connection switching unit 32 is disposed on the inspection apparatus main body 3 in the lateral direction from The position where the electrode unit 7 of the substrate inspection jig 2 mounted on the apparatus main body 3 is separated from the opposing area in the vertical direction is inspected. In the present embodiment, the connection switching unit 32 is disposed on the side of the base member 61 of the jig main body 6 of the substrate inspection jig 2 opposite to the electrode unit 7. Further, a connector portion 321 is provided on a surface of the connection switching unit 32 facing the substrate inspection jig 2 side. By connecting the connector portion 321 to the connector 62, the connection switching unit 32 is electrically connected to the electrode head 72 via the connector 62 and the relay connection member 74 including the wire 741. That is, in the present embodiment, regarding the electrical connection between the electrode head 72 and the connection switching unit 32, first on the electrode unit 7 side of the base member 61 of the jig body 6, at the electrode head 72 and the connector 62 This is performed by the conductive coil spring member 73 or the like and by the wire 741. Next, the wire 741 and the connection switching unit 32 are electrically connected via a connector 62 which is disposed on the opposite side of the base member 61 from the electrode unit 7.
在這樣的由基板檢查裝置1進行的檢查中，首先基板檢查夾具2的各個探針81的前端部81a與被檢查基板的佈線圖案的各個檢查點電連接。利用連接切換單元32，在探針81的後端部81b所電接觸的電極頭部72之中，與成為檢查物件的佈線圖案的組合相對應的電極頭部72選擇性地與檢查處理部31電連接。檢查處理部31的檢查用的電力經由前述選擇出的電極頭部72和探針81而向檢查物件的佈線圖案供給。隨之，從檢查物件的佈線圖案中，經由探針81和前述選擇出的電極頭部72並利用檢查處理部31檢測出用於進行與導通性或絕緣性等相關的檢查的信號，並根據該檢測結果，判斷檢查物件的佈線圖案的導通性或絕緣性等是否良好。當針對一個佈線圖案的組合的檢查結束時，進行關於下一個佈線圖案的組合的檢查。In the inspection by the substrate inspection apparatus 1 as described above, first, the distal end portion 81a of each probe 81 of the substrate inspection jig 2 is electrically connected to each inspection point of the wiring pattern of the substrate to be inspected. The electrode head portion 72 corresponding to the combination of the wiring patterns serving as the inspection object is selectively connected to the inspection processing portion 31 among the electrode head portions 72 electrically contacted by the rear end portion 81b of the probe 81 by the connection switching unit 32. Electrical connection. The electric power for inspection by the inspection processing unit 31 is supplied to the wiring pattern of the inspection object via the selected electrode head 72 and the probe 81. Then, from the wiring pattern of the inspection object, the inspection processing unit 31 detects a signal for performing inspection relating to conductivity, insulation, and the like via the probe 81 and the selected electrode head 72, and As a result of the detection, it is judged whether or not the conductivity, insulation, and the like of the wiring pattern of the inspection object are good. When the inspection for the combination of one wiring pattern is ended, the inspection regarding the combination of the next wiring pattern is performed.
如上所述，根據本實施方式之基板檢查夾具2和使用該夾具的基板檢查裝置1，由於能夠更換電極單元7，因此即使在要設置探針81的配設間距等不同的檢查頭8的情況下，也無需更換整個基板檢查夾具2，而是通過更換電極單元7就能夠應對。因此，能夠減輕伴隨著變更作為檢查物件的被檢查基板的構成(例如，佈線圖案的配設間距等)而來的變更基板檢查夾具2的構成的負擔。As described above, according to the substrate inspection jig 2 of the present embodiment and the substrate inspection device 1 using the jig, since the electrode unit 7 can be replaced, even when the inspection head 8 having different arrangement pitches of the probes 81 is to be provided, Next, it is not necessary to replace the entire substrate inspection jig 2, but it can be handled by replacing the electrode unit 7. Therefore, it is possible to reduce the burden of changing the configuration of the substrate inspection jig 2 in accordance with the configuration (for example, the arrangement pitch of the wiring patterns) of the substrate to be inspected as the inspection object.
此外，在檢查頭8安裝在電極單元7上、且探針81的後端部81b與電極頭部72電接觸時，利用導電螺旋彈簧構件73的作用力，將電極頭部72彈性推壓而接觸於探針81的後端部81b，因此能夠使探針81和電極頭部72的電接觸狀態穩定。Further, when the inspection head 8 is mounted on the electrode unit 7, and the rear end portion 81b of the probe 81 is in electrical contact with the electrode head portion 72, the electrode head portion 72 is elastically pressed by the urging force of the conductive coil spring member 73. Since it contacts the rear end part 81b of the probe 81, the electrical contact state of the probe 81 and the electrode head 72 can be stabilized.
此外，在未安裝有檢查頭8且電極頭部72等待與探針81抵接的狀態下，利用在壓縮狀態下被***的導電螺旋彈簧構件73的作用力，將電極頭部72彈性地推壓到電極孔711內的上限位置。因此，能夠正確定位等待狀態下的電極頭部72的前端部725的位置，由此，在安裝檢查頭8時，能夠使探針81的後端部81b與電極頭部72可靠地電接觸。Further, in a state where the inspection head 8 is not attached and the electrode head 72 waits for the probe 81 to abut, the electrode head 72 is elastically pushed by the urging force of the conductive coil spring member 73 inserted in the compressed state. The upper limit position in the electrode hole 711 is pressed. Therefore, the position of the distal end portion 725 of the electrode head portion 72 in the waiting state can be accurately positioned, whereby the rear end portion 81b of the probe 81 can be reliably electrically contacted with the electrode head portion 72 when the inspection head 8 is attached.
此外，如圖4所示，電極頭部72的前端部725在等待與檢查頭8的探針81抵接的狀態下，被配置在與電極基座構件71的對向面712實質上對齊的位置上。因此，利用探針81的後端部81b與電極頭部72抵接的推壓力，電極頭部72的前端部725相對於電極基座構件71的對向面712，向著與檢查頭8背離的方向稍微後退為凹狀，由此，能夠防止探針81的後端部81b從電極頭部72的前端部725位置偏離，能夠使探針81和電極頭部72之間的抵接狀態穩定。Further, as shown in FIG. 4, the distal end portion 725 of the electrode head portion 72 is disposed substantially aligned with the opposing surface 712 of the electrode base member 71 while waiting to abut against the probe 81 of the inspection head 8. Location. Therefore, the tip end portion 725 of the electrode head portion 72 faces away from the inspection head 8 with respect to the opposing surface 712 of the electrode base member 71 by the pressing force at which the rear end portion 81b of the probe 81 abuts against the electrode head portion 72. The direction is slightly retracted to a concave shape, whereby the rear end portion 81b of the probe 81 can be prevented from being displaced from the distal end portion 725 of the electrode head portion 72, and the contact state between the probe 81 and the electrode head portion 72 can be stabilized.
此外，在圖5所示的變形例之構成中，電極頭部72的前端部725在等待與探針81抵接的狀態下，被配置在相對於電極基座構件71的對向面712而向著與檢查頭8背離的方向後退為凹狀的位置上。因此，不僅在探針81的後端部81b與電極頭部72抵接後，而且在抵接時，也能夠使探針81的後端部81b不偏離位置地與電極頭部72的上端部725可靠地抵接，能夠使探針81和電極頭部72之間的抵接狀態更穩定。Further, in the configuration of the modification shown in FIG. 5, the distal end portion 725 of the electrode head portion 72 is disposed on the opposing surface 712 of the electrode base member 71 while waiting for contact with the probe 81. It is retracted to a concave position in a direction away from the inspection head 8. Therefore, not only after the rear end portion 81b of the probe 81 comes into contact with the electrode head portion 72 but also at the time of abutment, the rear end portion 81b of the probe 81 can be positioned at the upper end portion of the electrode head portion 72 without being displaced. The 725 reliably abuts, and the abutment state between the probe 81 and the electrode head 72 can be made more stable.
根據本實施方式之基板檢查裝置1，如圖1所示，連接切換單元32被配置於檢查裝置主體3上的、在橫向上從與檢查裝置主體3上安裝的基板檢查夾具2的電極單元7在上下方向上相對向的區域離開的位置。因此，能夠簡化基板檢查裝置1中配置基板檢查夾具2的電極單元7的部分及其 周邊的構成，使基板檢查夾具2和電極單元7的更換作業等變得容易。此外，也能夠容易地確保基板檢查夾具2的未圖示的位置調節機構的設置空間。According to the substrate inspection apparatus 1 of the present embodiment, as shown in FIG. 1, the connection switching unit 32 is disposed on the inspection apparatus main body 3, and is electrically connected from the electrode unit 7 of the substrate inspection jig 2 mounted on the inspection apparatus main body 3 in the lateral direction. A position where the opposing area in the up and down direction is separated. Therefore, it is possible to simplify the portion of the substrate inspection device 1 in which the electrode unit 7 of the substrate inspection jig 2 is disposed and The peripheral configuration facilitates replacement work of the substrate inspection jig 2 and the electrode unit 7. Further, the installation space of the position adjustment mechanism (not shown) of the substrate inspection jig 2 can be easily ensured.
以下，對上述實施方式之構成的變形例進行說明。在上述實施方式之電極單元7中，設想在對向面712的大致整個面上以相等的配設間距來設置電極單元7的電極基座構件71的對向面712上所設置的電極孔711和電極頭部72等。作為與這一點相關的變形例，如圖6所示，也可以在對向面712上設置電極孔711和電極頭部72等的配設間距不同的多個電極形成區域712a、712b。由此，也能夠應對檢查頭8的探針81的配設間距部分不同的情況，即使針對具有佈線圖案的配設間距等不同的多個區域的被檢查基板，也能夠使用一個基板檢查夾具2一起檢查。Hereinafter, a modification of the configuration of the above embodiment will be described. In the electrode unit 7 of the above-described embodiment, it is assumed that the electrode holes 711 provided on the opposing faces 712 of the electrode base member 71 of the electrode unit 7 are disposed at substantially equal intervals on substantially the entire surface of the opposing surface 712. And the electrode head 72 and the like. As a modification related to this point, as shown in FIG. 6, a plurality of electrode formation regions 712a and 712b having different arrangement pitches such as the electrode hole 711 and the electrode tip 72 may be provided on the opposite surface 712. In this case, it is possible to cope with the case where the arrangement pitch of the probes 81 of the inspection head 8 is different, and it is possible to use one substrate inspection jig 2 for the substrate to be inspected having a plurality of regions having different arrangement pitches of the wiring patterns. Check together.
此外，作為與電極頭部72的前端部725的構成相關的變形例，舉例如有圖7所示的構成和圖8(a)、圖8(b)所示的構成。在圖7所示的構成中，電極頭部72的前端部725具有其中央部凹陷為大致凹狀的凹陷形狀。根據該圖7的構成，由於探針81的後端部81b嵌入到電極部72的前端部725的凹陷726內並與電極頭部72電接觸，所以能夠使探針81和電極頭部72之間的電接觸狀態穩定。Further, as a modification relating to the configuration of the distal end portion 725 of the electrode head portion 72, for example, the configuration shown in FIG. 7 and the configuration shown in FIGS. 8(a) and 8(b) are exemplified. In the configuration shown in Fig. 7, the distal end portion 725 of the electrode head portion 72 has a concave shape in which the central portion thereof is recessed in a substantially concave shape. According to the configuration of Fig. 7, since the rear end portion 81b of the probe 81 is fitted into the recess 726 of the tip end portion 725 of the electrode portion 72 and is in electrical contact with the electrode head portion 72, the probe 81 and the electrode head portion 72 can be made. The electrical contact state is stable.
此外，在圖8(a)和圖8(b)所示的構成中，在電極頭部72的前端部725的周緣部上，形成有向探針81的後端部81b側突出的多個突起727。因此，探針81的後端部81b嵌入到電極頭部72的前端部725的周緣部上所設置的多個突起727的內側而與電極頭部72電接觸，所以能夠使探針81和電極頭部72之間的電接觸狀態穩定。Further, in the configuration shown in FIGS. 8(a) and 8(b), a plurality of protruding portions on the side of the rear end portion 81b of the probe 81 are formed on the peripheral edge portion of the distal end portion 725 of the electrode head portion 72. Protrusion 727. Therefore, the rear end portion 81b of the probe 81 is fitted into the inner side of the plurality of protrusions 727 provided on the peripheral edge portion of the tip end portion 725 of the electrode head portion 72 to be in electrical contact with the electrode head portion 72, so that the probe 81 and the electrode can be made. The electrical contact state between the heads 72 is stable.
1‧‧‧基板檢查裝置1‧‧‧Substrate inspection device
2‧‧‧基板檢查夾具2‧‧‧Substrate inspection fixture
3‧‧‧檢查裝置主體3‧‧‧Checking device body
31‧‧‧檢查處理部31‧‧‧Check and Processing Department
32‧‧‧連接切換單元32‧‧‧Connection switching unit
321‧‧‧連接器部321‧‧‧Connector Department
6‧‧‧夾具主體6‧‧‧Clamp body
61‧‧‧基座構件61‧‧‧Base member
61a‧‧‧貫穿窗部61a‧‧‧through the window
61b‧‧‧安裝部61b‧‧‧Installation Department
62‧‧‧連接器62‧‧‧Connector
7‧‧‧電極單元7‧‧‧Electrode unit
74‧‧‧中繼連接構件74‧‧‧Relay connection members
741‧‧‧導線741‧‧‧ wire
8‧‧‧檢查頭8‧‧‧Check head
9‧‧‧夾具底座單元9‧‧‧Clamp base unit
Claims (11)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011243527A JP2013100994A (en) | 2011-11-07 | 2011-11-07 | Substrate inspection jig, jig base unit and substrate inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201341814A TW201341814A (en) | 2013-10-16 |
| TWI457576B true TWI457576B (en) | 2014-10-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101141210A TWI457576B (en) | 2011-11-07 | 2012-11-06 | Substrate inspection jig, jig base unit and substrate inspection apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2013100994A (en) |
| KR (1) | KR101388989B1 (en) |
| CN (1) | CN103091516A (en) |
| TW (1) | TWI457576B (en) |
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| JP7101457B2 (en) * | 2017-04-13 | 2022-07-15 | 株式会社日本マイクロニクス | Electrical connection device |
| JP2019045232A (en) * | 2017-08-31 | 2019-03-22 | セイコーエプソン株式会社 | Electronic component conveyance device and electronic component inspection device |
| TW202033967A (en) * | 2018-12-21 | 2020-09-16 | 日商友華股份有限公司 | Supporter for jig for inspection, supporter, and jig for inspection |
| JP7453891B2 (en) * | 2020-10-06 | 2024-03-21 | 日本航空電子工業株式会社 | Electrical component inspection equipment |
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| TW505792B (en) * | 2000-09-13 | 2002-10-11 | Nidec Read Corp | Inspection jig for inspecting substrates, and substrate inspection device having such inspection jig |
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| JP2000035455A (en) * | 1998-07-16 | 2000-02-02 | Kenwood Corp | Current carrying inspection device |
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| CN2760560Y (en) * | 2004-12-16 | 2006-02-22 | 陈涛 | Switching spring for wiring board test |
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| CN201319056Y (en) * | 2008-09-23 | 2009-09-30 | 陈涛 | Universal switching device and universal fixture used for special testing machine for testing circuit board |
| CN101923104A (en) * | 2010-05-13 | 2010-12-22 | 王云阶 | General adapter of electron and circuit board detection device |
| CN102043111B (en) * | 2010-11-16 | 2013-03-13 | 陈涛 | Microneedle jig and combination jig |
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2011
- 2011-11-07 JP JP2011243527A patent/JP2013100994A/en active Pending
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2012
- 2012-11-02 KR KR1020120123393A patent/KR101388989B1/en not_active IP Right Cessation
- 2012-11-05 CN CN2012104363927A patent/CN103091516A/en active Pending
- 2012-11-06 TW TW101141210A patent/TWI457576B/en not_active IP Right Cessation
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|---|---|---|---|---|
| TW505792B (en) * | 2000-09-13 | 2002-10-11 | Nidec Read Corp | Inspection jig for inspecting substrates, and substrate inspection device having such inspection jig |
| CN1985180A (en) * | 2004-07-15 | 2007-06-20 | Jsr株式会社 | Device and method for inspection of circuit board |
| TW200728725A (en) * | 2005-10-31 | 2007-08-01 | Nhk Spring Co Ltd | Method for manufacturing a conductive contacter holder, and the conductive contacter holder |
| CN101071140A (en) * | 2006-05-12 | 2007-11-14 | 日本电产丽德株式会社 | Probe, testing head having a plurality of probes, and circuit board tester having the testing head |
| TW200804820A (en) * | 2006-05-30 | 2008-01-16 | Nidec Read Corp | Substrate inspection jig |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130050239A (en) | 2013-05-15 |
| JP2013100994A (en) | 2013-05-23 |
| TW201341814A (en) | 2013-10-16 |
| CN103091516A (en) | 2013-05-08 |
| KR101388989B1 (en) | 2014-04-24 |
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