1354108 九、發明說明 【發明所屬之技術領域】 本發明是有關使用在檢查被檢查基板之情形下的基板 檢查用治具，更詳細是有關具有減低基板檢查用治具的接 觸子（terminal)與基板檢查用治具的電極部之接觸電阻的 基板檢查用治具的電極構造的基板檢查用治具。 再者，本發明並不限於印刷配線基板，例如可應用於 撓性基板、多層配線基板、液晶顯示器或電漿顯示器用的 電極板、以及半導體封裝用的封裝基板或薄膜載體等各種 基板的電性配線檢査，在本說明書中，該等各種配線基板 統稱爲「基板」。 【先前技術】 以往，由於設置在電路基板上的配線圖案，有必要正 確對搭載在該電路基板的1C等的半導體或電阻器等的電 氣、電子零件傳達電信號（electric signal)，因此對於在 液晶面板或電漿顯示面板形成有配線圖案的電路配線基 板，或形成在半導體晶圓等之基板的配線圖案，測定設置 在檢查對象的配線圖案的檢查點間的電阻値，來判定其良 或不良。 對此種判定檢查實施檢查配線圖案之斷線及短路的檢 查方法。在此種導通或短路的檢查中，分別讓測定端子一 個個抵接於設置在檢查對象的配線圖案之兩處的檢查點， 對該測定端子間流入既定電位的測定用電流，藉此測定該 m -4- 1354108 測定端子間的電壓値，比較該電壓値與事先預定的臨限 値，藉此進行良或不良的判定。 但是在以此種方法所使用的基板檢查用治具中，將一 個個分別抵接於配線圖案之兩處的檢查點的測定端子，共 用於測定用電流之供給與電壓之測定的情形下，具有測定 端子與檢查點之間的接觸電阻，使測定電壓受影響，且電 阻値的測定精度下降，檢查結果之可靠性下降的缺點。 特別是隨著近年來，增進設置在電路基板上之配線圖 案的微細化，配線圖案的電阻値變小，上述之接觸電阻波 及該測定値的影響，造成極大的問題。 爲了解決接觸電阻的問題，提案一種如日本專利文獻 1所揭示的接觸子。該接觸子具有對測定對象的電極可略 垂直接觸的略直線狀之接觸部，且以沿著該接觸部之長度 方向延伸的一部分具有與該接觸部之其他部分不同的熱膨 脹係數的材料所構成。因藉由此種構成，接觸部成爲雙金 屬，所以在既定的環境溫度下，使接觸部略垂直的接觸到 測定對象的電極，在該狀態下，進行超速傳動（overdrive) 的話，該接觸部會因由該測定對象之電極傳遞的環境溫度 之熱度，朝向以熱膨脹係數小的素材所構成的部分彎曲。 [專利文獻1]日本特開2005-345 1 29號公報 【發明內容】 [發明欲解決之課題] 但是使用專利文獻1所記載的接觸子，也只能對電極 ί S3 -5- 1354108 部垂直的接觸，若由接觸穩定性的觀點來考量’當然不具 有足夠的接觸穩定性，且不具有接觸電阻値低的連接。 又，基板檢查用治具，其使用次數亦爲數萬次〜數十 萬次。因此，使用時在基板檢查用接觸子破損或磨耗的情 形下，必須迅速且簡便的更換。 本發明是有鑑於此種實情的發明，提供一種維修性 優，並且具有減低基板檢查用治具的接觸子與基板檢查用 治具的電極部之接觸電阻的電極構造的基板檢查用治具。 [用以解決課題之手段] 提供一種如申請專利範圍第1項所記載的基板檢查用 治具，係爲用來檢查被檢查基板的電性特性，得以在基板 檢査裝置本體與設置在該被檢査基板之配線圖案的複數個 基板被檢查點之間電性導通的基板檢查用治具，其特徵 爲：前述基板檢査用治具係具有：在兩端具有達到電性導 通的端部，一方的端部具有被壓接在前述基板被檢查點之 —的導電性，並且除了該端部以外，在周緣具有絕緣部的 棒狀的複數個接觸子、和具有保持前述複數個接觸子，並 且具有將該接觸子之一方的端部引導到前述檢查點的第一 導孔的第一導板、以及具有將該接觸子之他方的端部引導 到前述基板檢查裝置之電極部的第二導孔的第二導板的接 觸子保持體、和具備與前述接觸子之各個接觸子的他方的 端部面對面而配置，並且連接至前述基板檢查裝置的連接 電極部的連接電極體，前述第一導孔是形成具有小於前述 I S3 -6- 1354108 ' 接觸子之絕緣部之直徑的孔徑，前述第二導孔是形成具有 大於前述接觸子的絕緣部之直徑的孔徑，前述第一導板與 . 前述第二導板，具有：爲了能拆裝前述接觸子，整合與前 • 述第一導孔對應的前述第二導孔的整合狀態、和爲了保持 前述接觸子，由前述整合狀態，將前述第二導板朝該第二 導板的平面方向移動的保持狀態，連接前述接觸子之前述 他方的端部與前述連接電極體之際，各個前述他方的端部 φ 附近的側周面至少一部，與對面於此的前述連接電極部的 一部分接觸，藉此成爲電性的導通狀態。 - 如申請專利範圍第2項所記載的發明，提供一種如申 請專利範圍第1項所記載的基板檢查用治具，其特徵爲： 前述連接電極部具有在內部收容面對於此的前述接觸子之 前述他方之端部的構造，且前述接觸子與前述連接電極部 的導通狀態，係因至少該接觸子之他方的端部與該連接電 極部的內部側表面的接觸所導通。 # 如申請專利範圍第3項所記載的發明，係提供一種如 申請專利範圍第1項或第2項所記載的基板檢查用治具， 其特徵爲：前述連接電極部，係爲能遊動嵌合面對於該等 的前述接觸子之前述他方的端部的至少一部分的筒形狀。 如申請專利範圍第4項所記載的發明，係如申請專利 範圍第1項所記載的基板檢查用治具，其特徵爲：前述接 觸子的絕緣部與前述他方之端部的邊界，係配置在比第二 導孔更內側。 如申請專利範圍第5項所記載的發明，係提供一種如 i S1 -7- 1354108 申請專利範圍第1項所記載的基板檢查用治具，其特徵 爲：前述接觸子保持體，係具備在前述接觸子的他方接觸 到前述連接電極部之使用時，以該接觸子爲突出的方式， 朝向該接觸子的長軸方向滑動的保護部。 [發明效果] 藉由如申請專利範圍第1項所記載的發明，因爲使用 第一導板與第二導板，形成具有可拆脫接觸子的整合狀態 與可保持接觸子的保持狀態，所以在進行接觸子更換的情 形下，藉由讓第一導板與第二導板成爲整合狀態，就能輕 易的更換。 又，提供一種因爲連接接觸子群之他方的端部與連接 電極部之際，接觸子之他方的端部附近的側周面的至少一 部分，是與面對於此的連接電極部的一部分接觸，藉此成 爲電性導通狀態，所以能減低接觸子與連接電極部的接觸 電阻値，並且不管使用次數具有穩定的接觸電阻値的基板 檢查用治具》 藉由如申請專利範圍第2項所記載的發明，提供一種 因爲接觸子與連接電極部的導通狀態，是因至少使接觸子 之他方的端部與連接電極部的內部側表面的接觸所導通， 所以能擴大接觸子與連接電極部的接觸面積，且能更減低 接觸電阻値，並且不管使用次數具有穩定的接觸電阻値的 基板檢查用治具。 藉由如申請專利範圍第3項所記載的發明，因爲接觸 [S1 -8- 1354108 電極部爲能遊動嵌合接觸子的形狀，所以接觸子輸出/輸 入到連接電極部之際，能防止施加過剩的負擔。 又’因爲連接電極部形成筒狀，所以能均勻的製作接 觸子所接觸的接觸面積。 藉由如申請專利範圍第4項所記載的發明，在第一導 板與第二導板爲整合狀態的情形下，接觸子的絕緣部與他 方的端部的邊界，會抵接卡合於形成第二導孔之側面的第 二導孔，防止接觸子的掉落或錯開。 藉由如申請專利範圍第5項所記載的發明，因爲接觸 子保持體具有保護接觸子的保護部，所以接觸子在使用 時、未使用時能有效保護接觸子，且能延長接觸子的使用 壽命的基板檢查用治具。 【實施方式】 [用以實施發明的最佳形態] • 說明用以實施本發明的最佳形態。 第1圖是表示使用有關本發明的基板檢查用治具之情 形下的槪略構造。在該第1圖中，係表示複數個接觸子 101、多針狀保持該等接觸子101的保持體102、具有支 承該保持體102並且與接觸子101接觸而導通的連接電極 部的連接電極體103、處理被檢測出的電信號（electric signal)的檢查信號處理部的104、以及連接檢查用接觸子 101與檢查信號處理部104的線纜（wire cable)105。接觸 子101是接觸於形成在被檢查基板之配線圖案的各檢查點 [S] -9 - 1354108 的端子，連接電極體103是進行接觸子101與檢查信號處 理部1 04的間距變換而電性連接。 連接電極體103係在保持體102之配置側具有與接觸 子101電性接觸的連接電極部106»本發明係想辨法創作 該連接電極部106，藉此提供一種能減低與接觸子101的 連接電阻値，並且具有穩定性的連接電阻値。 有關本發明之一實施形態的基板檢查用治具1，係具 有接觸子2、接觸子保持體3、以及連接電極體4(參照第 2圖）。再者，連接電極體4係如上述與檢查信號處理部 104連接，但在該第2圖省略。又，在該第2圖中，係表 示基板檢査用治具的檢查頭11與連接電極體4爲非連接 的狀態。 接觸子2具有可撓性及導電性，形成針狀或長條狀等 的棒狀。該接觸子2，係一方壓接於被檢查基板的檢查 點，他方與後述的連接電極部接觸。因此，接觸子2可將 來自檢査信號處理部104的電信號發送到檢查點，並且將 來自檢查點的電信號發送至檢查信號處理部104。 由於該接觸子2具有可撓性，因此在形成於後述之接 觸子保持體3之內部的空間，形成對接觸子2之長軸方向 朝直角方向撓曲（buckling)。因此，使用該接觸子2的情 形下，受到來自被檢查基板之檢査點或連接電極部的荷重 而撓曲，因該撓曲而對各接觸部產生押壓力。 接觸子2只要形成如上述的形狀就未特別限定，但也 可形成如第3圖所示的一實施形態。 [S3 -10- 1354108 該第3圖所示的接觸子2，如第3圖（a)所示，形成兩 前端爲尖細形狀的細長棒狀構件21。尖細形狀可爲如第3 圖（a)所示的尖銳形狀，也可爲球形狀。 該棒狀構件21，雖可列舉不锈鋼、鈹銅（BeCu)或鎢 (W) ’但未特別限定，只要是導電物質既可。 雖然該棒狀構件21以均勻的荷重施加於接觸後述之 連接電極部的接觸面積之方式，形成圓筒或圓柱狀爲宜， 但未特別限定。 棒狀構件21的長度或粗度並未特別限定，配合形成 在被檢查基板的配線圖案的間距或被檢查基板的大小而適 當設定。 在第3圖（b)表示在筒狀構件22收容棒狀構件21的 狀態。該筒狀構件22具有可撓性及導電性。棒狀構件2 1 是被***該筒狀構件22。在第3圖（b)中，係筒狀構件22 之一方的前端之一端22a與他方的前端之他端22b相比的 情形下，設定成自一端2 2a突出的棒狀構件21的長度比 自他端22b突出的棒狀構件21的長度還長。 如上述的情形下，一端22a是接觸到連接電極部，他 端22b是接觸到被檢査基板的檢查點。像這樣藉由改變配 置的長度，就能加大棒狀構件21與連接電極部接觸的接 觸面積’且由於自他端22b突出棒狀構件21的長度設定 的較短，因此接觸子接觸到凸起（Bump)等的檢查點時，筒 狀構件22可達到防止棒狀構件貫入檢查點所需要以上的 制動性效果，並且能對球狀凸起等之檢查點形成穩定的接1354108 IX. EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a jig for substrate inspection in the case of inspecting a substrate to be inspected, and more particularly to a terminal having a jig for reducing substrate inspection and The jig for the substrate inspection of the electrode structure of the jig for the substrate inspection of the electrode for the substrate inspection jig. Further, the present invention is not limited to a printed wiring board, and can be applied to, for example, a flexible substrate, a multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, and a substrate for a semiconductor package or a film carrier. In the present specification, the various wiring boards are collectively referred to as "substrate". [Prior Art] In the related art, it is necessary to accurately transmit an electric signal to electrical and electronic components such as semiconductors or resistors mounted on the circuit board such as 1C, because of the wiring pattern provided on the circuit board. A circuit wiring board in which a wiring pattern is formed on a liquid crystal panel or a plasma display panel, or a wiring pattern formed on a substrate such as a semiconductor wafer, and the resistance 値 between the inspection points of the wiring pattern to be inspected is measured to determine the good or bad. This method of checking and checking the disconnection and short-circuit of the inspection wiring pattern is performed. In the inspection of the conduction or the short-circuit, the measurement terminals are respectively brought into contact with the inspection points provided at the two wiring patterns to be inspected, and the measurement current flows into the predetermined potential between the measurement terminals, thereby measuring the current. m -4- 1354108 Measure the voltage 端子 between the terminals and compare the voltage 値 with a predetermined threshold 値 to make a good or bad determination. However, in the jig for inspection of the substrate used in the method, the measurement terminals of the inspection points that are respectively in contact with the two of the wiring patterns are collectively used for the measurement of the supply of the current and the measurement of the voltage. The contact resistance between the measurement terminal and the inspection point is such that the measurement voltage is affected, the measurement accuracy of the resistance 下降 is lowered, and the reliability of the inspection result is lowered. In particular, in recent years, the wiring pattern provided on the circuit board has been made finer, and the resistance 値 of the wiring pattern has become smaller, and the above-mentioned contact resistance wave and the influence of the measurement flaw cause a great problem. In order to solve the problem of contact resistance, a contact as disclosed in Japanese Patent Laid-Open No. 1 is proposed. The contact has a substantially linear contact portion that can slightly contact the electrode of the measurement target, and is formed of a material having a thermal expansion coefficient different from a portion of the contact portion extending in a longitudinal direction of the contact portion. . According to this configuration, since the contact portion is made of a bimetal, the contact portion is slightly perpendicularly contacted to the electrode to be measured at a predetermined ambient temperature, and in the state where overdrive is performed, the contact portion is overdrived. The portion of the material having a small thermal expansion coefficient is bent by the heat of the ambient temperature transmitted from the electrode of the measurement target. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2005-345 No. 29-29 SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] However, the contact person described in Patent Document 1 can only be used for the electrode ί S3 -5 - 1354108 The contact, if considered from the viewpoint of contact stability, of course does not have sufficient contact stability and does not have a connection with a low contact resistance. Further, the number of uses for the substrate inspection jig is tens of thousands to hundreds of thousands of times. Therefore, in the case of damage or wear of the substrate inspection contact during use, it is necessary to replace it quickly and easily. In view of the above-described circumstances, the present invention provides a substrate inspection jig having an electrode structure which is excellent in maintainability and which has a contact resistance between a contact of a substrate inspection jig and an electrode portion of a substrate inspection jig. [Means for Solving the Problem] A substrate inspection jig according to the first aspect of the invention is provided for inspecting the electrical characteristics of the substrate to be inspected, and is provided on the substrate inspection device body and the device. A jig for inspecting a plurality of substrates on which a wiring pattern of a substrate is electrically connected between the inspection points, wherein the substrate inspection jig has an end portion that is electrically conductive at both ends, and one of the electrodes The end portion has electrical conductivity that is crimped to the inspection point of the substrate, and in addition to the end portion, a plurality of rod-shaped contacts having an insulating portion at the periphery, and having the plurality of contacts held therein, and a first guide having a first guide hole for guiding one end of the contact to the inspection point, and a second guide having an end portion for guiding the other end of the contact to the electrode portion of the substrate inspection device a contact holder of the second guide of the hole, and a side surface provided with the other contact of the contact of the contact, and is connected to the substrate inspection device Connecting the electrode body of the electrode portion, the first via hole is formed to have a diameter smaller than the diameter of the insulating portion of the I S3 -6 - 1354108 ' contact, and the second via hole is formed to have an insulating portion larger than the contact portion The diameter of the aperture, the first guide plate and the second guide plate have a state in which the second guide hole corresponding to the first guide hole is integrated in order to be able to attach and detach the contact, and Holding the contact member, in the state of being integrated, in a state in which the second guide plate is moved in the planar direction of the second guide plate, and connecting the other end portion of the contact member to the connecting electrode body, each of the foregoing At least one of the side peripheral surfaces near the end portion φ of the other side is in contact with a part of the connecting electrode portion opposed to the other side, thereby being electrically connected. The invention according to claim 2, wherein the connection electrode portion has the contact member facing the inside of the substrate inspection tool according to the first aspect of the invention. In the structure of the other end portion, the conductive state of the contact portion and the connection electrode portion is conducted by at least the contact of the other end portion of the contact portion with the inner side surface of the connection electrode portion. The invention according to claim 3, wherein the connecting electrode portion is configured to be capable of being embedded in a substrate. The cylindrical shape of the at least a portion of the aforementioned other end of the aforementioned contact. The invention according to claim 4, wherein the substrate for inspection of the substrate according to the first aspect of the invention is characterized in that: the boundary between the insulating portion of the contact and the end portion of the other side is arranged It is more inside than the second guide hole. The invention of the substrate inspection according to the first aspect of the invention, wherein the contact holder is provided in the substrate inspection tool according to claim 1 of the invention. When the other side of the contact is in contact with the connection electrode portion, the protective portion that slides toward the longitudinal direction of the contact is protruded so that the contact protrudes. According to the invention of the first aspect of the invention, since the first guide plate and the second guide plate are used, the integrated state with the detachable contact and the held state in which the contact can be held are formed. In the case where the contact sub-replacement is performed, the first guide plate and the second guide plate can be easily replaced by being integrated. Further, it is provided that at least a part of the side peripheral surface in the vicinity of the other end portion of the contact portion is in contact with a part of the connecting electrode portion facing the other end when the other end portion of the contact subgroup is connected and the electrode portion is connected, In this way, the contact resistance 値 of the contact and the connection electrode portion can be reduced, and the substrate inspection jig having a stable contact resistance 不管 regardless of the number of uses can be described in the second item of the patent application. According to the invention, since the contact state between the contact member and the connection electrode portion is at least the contact between the other end portion of the contact portion and the inner side surface of the connection electrode portion, the contact portion and the connection electrode portion can be enlarged. A substrate inspection jig that has a contact area and can further reduce the contact resistance 値 and has a stable contact resistance 不管 regardless of the number of uses. According to the invention of the third aspect of the invention, since the contact portion [S1 -8 - 1354108 is in the shape of a movable contact contact, the contact output can be prevented from being applied when the contact is output/inputted to the connection electrode portion. The burden of excess. Further, since the connecting electrode portion is formed in a cylindrical shape, the contact area in contact with the contact can be uniformly formed. According to the invention as recited in claim 4, in the case where the first guide and the second guide are in an integrated state, the boundary between the insulating portion of the contact and the other end is abutted and engaged. Forming a second guiding hole on the side of the second guiding hole to prevent the contactor from falling or staggering. According to the invention as recited in claim 5, since the contact holder has a protective portion for protecting the contact, the contact can effectively protect the contact when used, when not in use, and can prolong the use of the contact. Fixture for substrate inspection of life. [Embodiment] [Best Mode for Carrying Out the Invention] The best mode for carrying out the invention will be described. Fig. 1 is a schematic view showing a schematic structure in a case where the jig for substrate inspection according to the present invention is used. In the first drawing, a plurality of contact elements 101, a holding body 102 that holds the contact elements 101 in a multi-needle shape, and a connection electrode having a connection electrode portion that supports the holder 102 and is in contact with the contact person 101 are connected. The body 103, the inspection signal processing unit 104 that processes the detected electric signal, and the wire cable 105 that connects the inspection contact 101 to the inspection signal processing unit 104. The contact unit 101 is a terminal that contacts each of the inspection points [S] -9 - 1354108 of the wiring pattern formed on the substrate to be inspected, and the connection electrode body 103 performs the pitch conversion of the contact sub-101 and the inspection signal processing unit 104. connection. The connection electrode body 103 has a connection electrode portion 106 electrically contacting the contact member 101 on the arrangement side of the holder 102. The present invention contemplates the connection electrode portion 106, thereby providing a reduction in contact with the contact member 101. Connect the resistor 値 and have a stable connection resistance 値. The jig for substrate inspection according to an embodiment of the present invention includes a contact 2, a contact holder 3, and a connection electrode body 4 (see Fig. 2). Further, the connection electrode body 4 is connected to the inspection signal processing unit 104 as described above, but is omitted in the second drawing. In the second drawing, the inspection head 11 of the substrate inspection jig and the connection electrode body 4 are in a non-connected state. The contact 2 has flexibility and conductivity, and forms a rod shape such as a needle shape or a strip shape. The contact 2 is pressed against the inspection point of the substrate to be inspected, and is in contact with a connection electrode portion to be described later. Therefore, the contact 2 can transmit an electric signal from the inspection signal processing section 104 to the inspection point, and transmit an electric signal from the inspection point to the inspection signal processing section 104. Since the contact 2 has flexibility, the space formed inside the contact holder 3 to be described later is buckling in the direction perpendicular to the longitudinal direction of the contact 2 . Therefore, in the case where the contact 2 is used, it is deflected by the load from the inspection point or the connection electrode portion of the substrate to be inspected, and the contact portion is subjected to the pressing force due to the deflection. The contact 2 is not particularly limited as long as it has the above-described shape, but an embodiment as shown in Fig. 3 may be formed. [S3 -10- 1354108 The contact 2 shown in Fig. 3 is formed as an elongated rod-shaped member 21 having a tapered shape at both ends as shown in Fig. 3(a). The tapered shape may be a sharp shape as shown in Fig. 3(a) or a spherical shape. The rod-shaped member 21 may be stainless steel, beryllium copper (BeCu) or tungsten (W)', but is not particularly limited as long as it is a conductive material. The rod-shaped member 21 is preferably formed into a cylindrical shape or a cylindrical shape so as to be applied to a contact area of a connecting electrode portion to be described later with a uniform load, but is not particularly limited. The length or thickness of the rod-shaped member 21 is not particularly limited, and is appropriately set in accordance with the pitch of the wiring pattern formed on the substrate to be inspected or the size of the substrate to be inspected. Fig. 3(b) shows a state in which the rod-shaped member 21 is housed in the tubular member 22. The tubular member 22 has flexibility and electrical conductivity. The rod member 2 1 is inserted into the cylindrical member 22. In Fig. 3(b), in the case where the one end 22a of one of the tubular members 22 is compared with the other end 22b of the other end, the length ratio of the rod member 21 protruding from the one end 22a is set. The length of the rod member 21 protruding from the other end 22b is also long. In the above case, the one end 22a is in contact with the connection electrode portion, and the other end 22b is a check point that contacts the substrate to be inspected. By changing the length of the arrangement as described above, the contact area of the rod-shaped member 21 in contact with the connection electrode portion can be increased, and since the length of the rod-shaped member 21 is set from the other end 22b, the contact is contacted to the convex portion. When the inspection point of Bump or the like is performed, the tubular member 22 can achieve the above-described braking effect required to prevent the rod-shaped member from penetrating into the inspection point, and can form a stable connection with the inspection point of the spherical projection or the like.
[SI -11 - 1354108 觸。且又’不依賴棒狀構件21之前端形狀的加工性，可 藉由棒狀構件21與筒狀構件22對檢查點的接觸。 再者’該他端22b側的棒狀構件21的突出量，如上 述，可設定的比一端22a短’同時也可設定成貫入如上述 說明之檢查點的量（長度）。 該筒狀構件22可在內部收容棒狀構件21，且只要是 能與棒狀構件2 1成爲導通狀態的大小就不特別限定。 筒狀構件22與棒狀構件21係互相電性連接。因此， 在棒狀構件21***至筒狀構件22的狀態（第3圖（b)所示 的狀態）’藉由對整體施行電鍍金或無電鏟金所形成。 其他方法，藉由在筒狀構件22內部設置複數個突狀 部（圖未示）’具有筒狀構件22按壓棒狀構件21的嵌合構 造’藉此接觸而電性導通。 第3圖（c)是棒狀構件21與筒狀構件22 —體化，在 筒狀構件22的表周面設有絕緣部23。形成該絕緣部23 的位置’如第3圖（c)所示，形成在觸點座2之一方端與 他方端以外的位置。又，藉由該絕緣部23與筒狀構件22 形成的段差24，是在後述之接觸子保持體3配置接觸子2 之際作爲卡止部使用。 該絕緣部23是在接觸子2撓曲之際，與鄰接的接觸 子2接觸亦會防止短路。 雖然該絕緣部23可採用聚胺酯，但未特別限定。 在上述說明中，雖爲說明使用棒狀構件21、筒狀構 件22以及絕緣部23，構成接觸子2的情形，但也可使用 Γ S1 -12- 1354108 以棒狀構件21與絕緣部23所形成的接觸子，接觸子的構 造不限於該等。 再者，在本說明書中，雖然收容於連接電極部41的 接觸子2的一部分以符號2A說明，但該接觸子2的收容 部2A，係爲未形成絕緣部23之接觸子2的一端。例如， 由接觸子2的前端至段差24的接觸子2的部分（長度L的 部分）。雖然該部分L不必全部收容在連接電極部，但儘 量將多的部分收容爲宜。 雖然該部分的長度L，是根據收容在連接電極部的長 度做適當設定，但爲了形成具有足夠穩定性的接觸狀態 (導通狀態），也以2〜5mm左右爲宜。 接觸子2的該部相當於他方的端部，該部分的側周面 的至少一部分與連接電極部41連接。 接觸子保持體3是保持以複數個接觸子2所形成的複 數個接觸子2(接觸子群）。該接觸子保持體3是如第2圖 所示，用以保持複數個接觸子2，具有第一導板31與第 二導板32。 第2圖所示的接觸子保持體3，是在紙面內側配置有 第一導板31，在紙面前側配置有第二導板32，第一導板 31是將.接觸子2的前端引導至檢查點，第二導板32是將 接觸子2的他端引導至連接電極體4。 第一導板31具有用以將既定的接觸子2往既定檢查 點引導的第一導孔33。該第一導孔33係形成大於接觸子 2的棒狀構件21或筒狀構件22的外徑，小於絕緣部23[SI -11 - 1354108 Touch. Further, irrespective of the workability of the shape of the front end of the rod-shaped member 21, the contact of the rod-shaped member 21 with the tubular member 22 against the inspection point can be achieved. Further, the amount of protrusion of the rod-shaped member 21 on the side of the other end 22b can be set shorter than the one end 22a as described above, and the amount (length) of the inspection point as described above can be set. The tubular member 22 can accommodate the rod-shaped member 21 therein, and is not particularly limited as long as it can be in a conductive state with the rod-shaped member 21. The tubular member 22 and the rod member 21 are electrically connected to each other. Therefore, the state in which the rod-shaped member 21 is inserted into the tubular member 22 (the state shown in Fig. 3(b)) is formed by applying gold plating or electroless gold to the whole. In another method, a plurality of projecting portions (not shown) are provided inside the tubular member 22, and the fitting structure of the tubular member 22 pressing the rod-shaped member 21 is electrically connected by the contact. In Fig. 3(c), the rod-shaped member 21 is formed integrally with the tubular member 22, and an insulating portion 23 is provided on the surface of the cylindrical member 22. As shown in Fig. 3(c), the position where the insulating portion 23 is formed is formed at a position other than the one end of the contact holder 2 and the other end. In addition, the step 24 formed by the insulating portion 23 and the tubular member 22 is used as a locking portion when the contact sub-holder 3 is disposed in the contact member 2 to be described later. The insulating portion 23 prevents short-circuiting when it comes into contact with the adjacent contact 2 when the contact member 2 is deflected. Although the insulating portion 23 may be a polyurethane, it is not particularly limited. In the above description, the case where the contact member 2 is configured by using the rod-shaped member 21, the tubular member 22, and the insulating portion 23 is described. However, the rod member 21 and the insulating portion 23 may be used as the Γ S1 -12-1354108. The contact formed, the configuration of the contact is not limited to these. In the present specification, a part of the contact 2 accommodated in the connection electrode portion 41 is denoted by reference numeral 2A, but the accommodation portion 2A of the contact 2 is one end of the contact 2 where the insulating portion 23 is not formed. For example, from the front end of the contact 2 to the portion of the contact 2 of the step 24 (the portion of the length L). Although it is not necessary for the portion L to be entirely accommodated in the connection electrode portion, it is preferable to accommodate a large portion as much as possible. Although the length L of the portion is appropriately set in accordance with the length of the connection electrode portion, it is preferably about 2 to 5 mm in order to form a contact state (conduction state) having sufficient stability. This portion of the contact 2 corresponds to the other end portion, and at least a part of the side peripheral surface of the portion is connected to the connection electrode portion 41. The contact holder 3 is a plurality of contacts 2 (contact subgroups) formed by a plurality of contacts 2. The contact holder 3 is as shown in Fig. 2 for holding a plurality of contacts 2 having a first guide 31 and a second guide 32. The contact holder 3 shown in Fig. 2 has a first guide 31 disposed on the inner side of the paper, and a second guide 32 disposed on the front side of the paper. The first guide 31 guides the front end of the contact 2 to At the checkpoint, the second guide 32 guides the other end of the contact 2 to the connecting electrode body 4. The first guide plate 31 has a first guide hole 33 for guiding a predetermined contact 2 to a predetermined inspection point. The first guide hole 33 is formed to be larger than the outer diameter of the rod member 21 or the tubular member 22 of the contact member 2, which is smaller than the insulating portion 23.
[SI -13- 1354108 的直徑。藉由形成這樣，防止接觸子2自第一導板31的 第一導孔3 3拔出。 第二導板32具有用以將既定的接觸子2往既定連接 電極部引導的第二導孔34。該第二導孔32係形成大於接 觸子2的棒狀構件21或筒狀構件22的外徑，更小於絕緣 部23的直徑。藉由形成這樣，就能將接觸子2從該第二 導孔32***到該接觸子保持部3。 因此，在拔出/***接觸子2的情形下，例如將第二 導板32側向上配置，第一導板31向下配置，自第二導板 32的第二導孔34進行接觸子2的拔出/***。 第一導板31與第二導板32是透過支柱35a具有既定 間隔而配置。因此，藉由支柱35a在第一導板31與第二 導板3 2之間形成空間，可讓接觸子2在該空間內撓曲。 藉由該支柱35a的空間之長度，根據使用者被適當設 定。 再者，在第2圖之圖中，表示以符號35b所示的支 柱。該支柱35b係用以把持後述之第二導板32的三個板 構件。 在第2圖中，藉由三片板構件形成第一導板31。該 等板構件係作爲用以形成第一導孔3 3的板構件、和形成 用以固定在支柱35a之螺孔的板構件而設置。該等板構件 的數量，未特別限定，只要至少具有上述的功能既可’可 爲一片或兩片，也可爲三片以上。 第3圖是第一導板31與接觸子2的部分剖面放大 [S1 -14- 1354108 • 圖。 如該第3圖所示，第一導板31係使用三片的外側板 構件3 1 1、中側板構件3 1 2以及內側板構件3 1 3所形成。 又，第一導孔3 3係具有外側板構件3 3 1的外側導孔 3 3 1、中側板構件3 1 2的中側導孔3 3 2以及內側板構件 3 3 2的內側導孔3 3 3所形成。 外側板構件311，係配置在最靠近被檢查的基板，且 φ 中側板構件3 1 2與內側板構件3 1 3按此順序配置》 第一導孔3 3的孔徑，係形成大於接觸子2的棒狀構 • 件21或筒狀構件22的寬度（直徑），小於絕緣部23的直 . 徑。因此’僅接觸子2的前端導通部，配置成突出外側板 構件3 1 1。 再者，在第4圖中，內側板構件3 1 3的第一內側導孔 3 3 3的第一小徑內側導孔3 3 3 b，形成具有如上述大小的孔 徑。 # 在第3圖中’雖然在形成第一引導部31的各板構 件’分別形成大徑導孔與小徑導孔，但位在外側板構件 3 1 1之外側的導孔是形成作爲第—小徑導孔3 3 i &，且配置 在最內的導孔爲具有如上述機能的導孔（第—小徑導孔 33b) » 再者’接觸子2的導電部與絕緣部的邊界2b，是配 置在比第一導孔3 3更內側。 第_導孔3 3，係如第4圖所示，自外側依小徑導孔 3 3 1 a、大徑導孔3 3 1 b、大徑導孔3 3 2 a、小徑導孔3 3 2 b、[SI -13 - 1354108 diameter. By forming in this way, the contact 2 is prevented from being pulled out from the first guide hole 33 of the first guide 31. The second guide plate 32 has a second guide hole 34 for guiding a predetermined contact 2 to a predetermined connection electrode portion. The second guide hole 32 is formed to be larger than the outer diameter of the rod member 21 or the tubular member 22 of the contact 2, and smaller than the diameter of the insulating portion 23. By forming in this way, the contact 2 can be inserted from the second pilot hole 32 into the contact holder 3 . Therefore, in the case of pulling out/inserting the contact 2, for example, the second guide 32 is disposed sideways, the first guide 31 is disposed downward, and the contact 2 is made from the second guide 34 of the second guide 32. Pull out / insert. The first guide plate 31 and the second guide plate 32 are disposed at a predetermined interval through the support post 35a. Therefore, by forming a space between the first guide 31 and the second guide 32 by the support 35a, the contact 2 can be flexed in the space. The length of the space of the pillar 35a is appropriately set according to the user. Further, in the diagram of Fig. 2, the column indicated by reference numeral 35b is shown. The support 35b is for holding three plate members of the second guide 32 to be described later. In Fig. 2, the first guide 31 is formed by three plate members. The plate members are provided as a plate member for forming the first pilot hole 33 and a plate member for forming a screw hole for fixing to the column 35a. The number of the plate members is not particularly limited as long as it has at least the above functions, and may be one piece or two pieces or three or more pieces. Fig. 3 is an enlarged partial cross-sectional view of the first guide 31 and the contact 2 [S1 - 14 - 1354108 • Fig. As shown in Fig. 3, the first guide plate 31 is formed using three outer side plate members 31, 1 and a middle side plate member 31p and an inner side plate member 31. Further, the first guide hole 33 has an outer guide hole 313 of the outer plate member 313, a middle guide hole 323 of the middle plate member 312, and an inner guide hole 3 of the inner plate member 323. 3 3 formed. The outer plate member 311 is disposed closest to the substrate to be inspected, and the φ middle side plate member 312 and the inner side plate member 313 are disposed in this order. The aperture of the first guide hole 33 is formed larger than the contact 2 The width (diameter) of the rod-like member 21 or the tubular member 22 is smaller than the diameter of the insulating portion 23. Therefore, only the front end conduction portion of the contact member 2 is disposed so as to protrude from the outer side plate member 31. Further, in Fig. 4, the first small-diameter inner guide hole 3 3 3 b of the first inner guide hole 333 of the inner side plate member 3 1 3 is formed to have a diameter as described above. # In FIG. 3, 'although the large-diameter guide hole and the small-diameter guide hole are formed in each of the plate members forming the first guide portion 31, the guide holes located on the outer side of the outer plate member 31 1 are formed as the first a small-diameter guide hole 3 3 i & and the innermost guide hole is a guide hole having the above function (the first-diameter guide hole 33b) » Further, the conductive portion and the insulating portion of the contact 2 The boundary 2b is disposed inside the first guide hole 33. The first through hole 3 3 is as shown in Fig. 4, the small diameter guide hole 3 3 1 a from the outer side, the large diameter guide hole 3 3 1 b, the large diameter guide hole 3 3 2 a, and the small diameter guide hole 3 3 2 b,
[SI -15- 1354108 * · · " 大徑導孔333a、小徑導孔333b的順序配置。 再者’雖然該順序未受限制，但必須精度良好的抵接 在基板的檢查點，且考慮接觸子接觸到板構件，防止接觸 子磨損爲宜。 又’在第2圖中’第二導板32係藉由三片板構成形 成。該等板構件係作爲用以形成第二導孔34的板構件、 和形成用以固定在支柱35a之螺孔的板構件而設置。該等 φ 板構件的數量’未特別限定，只要至少具有上述的功能既 可，可爲一片或兩片，也可爲三片以上。 . 於第5圖表示第二導板32與接觸子2之位置關係的 . 槪略放大剖面圖。 在該第5圖中，第二導板32係具有內側導板321、 中側導板3 22以及外側導板3 23。 第二導板3 2係具有內側導板3 2 1、中側導板3 22以 及外側導板323。內側導板321，係形成包含複數個接觸 φ 子2全部的孔341，該內側導板321，係應用於用來保持 與第一導板31連接的支柱35。 中側導板322係形成比內側導板32 1稍微朝向板構件 的平面方向滑動。該中側導板3 22具有小徑導孔3 42a與 大徑導板3 42b。 外側導板3 23設有將接觸子2之端部引導至連接電極 部的導孔。 第二導孔34的孔徑係具有大於接觸子2之絕緣部23 的孔徑。因此，可經由該第二導孔34來拔出/***接觸子 [S3 -16- 2 > 2 >1354108 接觸子2之他方的端部的棒狀構件21與絕緣部23的 邊界2b，是配置在比第二導孔34更內側爲宜。該邊界2b 是配置在比第二導孔34更內側，藉此後述的第二導板32 在滑移時，會卡合在該第二導孔34的第二導板32的表 面。因此，接觸孔2被固持。 在第5圖中係表示接觸子2的邊界2b存在於外側導 板343的大徑導孔343a的情形，且卡合在小徑導孔343b 與大徑導孔343 a的段差部。在第5圖中，雖然導孔因設 置大小不同的孔而產生段差，接觸子2的邊界2b配置成 卡合，但未必要設置段差部。 第二導板3 2 ’係如上述’以複數個板構件所形成， 並且該等板構件是配置成對接觸子2分別朝直角方向（在 第2圖左右方向）錯開既定長度量。 像這樣藉由緩緩錯開來配置複數個板構件，使第二導 孔34形成傾斜。因此，如上述，卡合於形成在第二導板 3 2的第二導孔3 4。 且又，接觸子2保持在接觸子保持體3之際，接觸子 2會輕輕撓曲，與板構件產生接觸電阻，使接觸子2保具 穩定性。 在第5圖中，內側導板3 4 1，係不會對第一導板3 1 朝平面方向移動的被固定。中側導板3 42係稍微朝第二導 板3 2的平面方向滑動。進而，外側導板3 4 3，係比中側 導板342更稍微的朝該平面方向滑動。總之，外側導板[SI -15- 1354108 * · · " The arrangement of the large-diameter guide hole 333a and the small-diameter guide hole 333b. Further, although the order is not limited, it is necessary to abut against the inspection point of the substrate with high precision, and it is preferable to prevent contact of the contact member from contact with the plate member. Further, in Fig. 2, the second guide 32 is formed by three plates. The plate members are provided as a plate member for forming the second pilot hole 34, and a plate member for forming a screw hole for fixing to the column 35a. The number of the φ plate members is not particularly limited, and may be one or two sheets or three or more sheets as long as it has at least the above functions. Fig. 5 is a schematic enlarged cross-sectional view showing the positional relationship between the second guide 32 and the contact 2. In the fifth drawing, the second guide 32 has an inner guide 321 , a middle guide 322 , and an outer guide 323 . The second guide plate 3 2 has an inner guide 3 1 1 , a middle guide 3 22 and an outer guide 323. The inner guide 321 is formed with a hole 341 including a plurality of contact φ 2, and the inner guide 321 is applied to the stay 35 for holding the first guide 31. The middle side guide 322 is formed to slide slightly toward the planar direction of the plate member than the inner guide 32 1 . The middle side guide plate 32 has a small diameter guide hole 3 42a and a large diameter guide plate 3 42b. The outer guide 3 23 is provided with a guide hole for guiding the end of the contact 2 to the connection electrode portion. The aperture of the second pilot hole 34 has an aperture larger than that of the insulator 23 of the contact 2. Therefore, the boundary between the rod member 21 and the insulating portion 23 of the other end of the contact portion [S3 - 16-2 > 2 > 1354108 can be extracted/inserted via the second pilot hole 34, It is preferably disposed inside the second guide hole 34. The boundary 2b is disposed on the inner side of the second guide hole 34, and the second guide 32, which will be described later, is engaged with the surface of the second guide 32 of the second guide hole 34 when slipping. Therefore, the contact hole 2 is held. In Fig. 5, the boundary 2b of the contact 2 is present in the large-diameter guide hole 343a of the outer guide 343, and is engaged with the stepped portion of the small-diameter guide hole 343b and the large-diameter guide hole 343a. In Fig. 5, although the guide holes are formed by the holes having different sizes, the boundary 2b of the contact 2 is arranged to be engaged, but the step portion is not necessarily provided. The second guide plate 3 2 ' is formed by a plurality of plate members as described above, and the plate members are arranged to be shifted by a predetermined length in the direction perpendicular to the contact 2 (in the left-right direction of Fig. 2). As described above, the plurality of plate members are arranged by being slowly staggered, so that the second guide holes 34 are inclined. Therefore, as described above, the second guide hole 34 formed in the second guide 32 is engaged. Further, when the contact 2 is held at the contact holding body 3, the contact 2 is gently deflected to generate contact resistance with the plate member, so that the contact 2 is stable. In Fig. 5, the inner guide 314 is fixed so as not to move the first guide 3 1 in the planar direction. The middle side guide 3 42 is slightly slid toward the planar direction of the second guide 32. Further, the outer guide 343 is slid slightly in the planar direction than the middle guide 342. In short, the outer guide
i SI -17- 1354108 343，係比中側導板342滑動的更大。 第二導板32，係具備在接觸子2的連接電極部側， 以在接觸子2接觸到連接電極部的使用時，使接觸子2突 出的方式，朝接觸子2的長軸方向滑動的保護部36。 該保護部36，係如第2圖所示，配置在第二導板32 的連接電極部側，並且以朝接觸子2的長軸方向滑動的方 式，設有彈簧機構3 7。 該保護部36，係以既定厚度的板構件所形成，在基 板檢査用治具之未使用時，用以保護接觸子2的前端部 (接觸到連接電極部的部分）。 例如，在第6圖中，表示該保護部的動作，第6圖（a) 係表示基板檢查用治具之未使用時的狀態，第6圖（b)係 表示基板檢查用治具之使用時的狀態。 在第6圖（a)係表示基板檢査用治具的接觸子2與接 觸保持體3未連接到連接電極體4的狀態，接觸至接觸子 2的連接電極部的端部，係藉由保護部36被保護。再 者’雖然在圖面中，係表示收容在保護部36之內部的狀 態’但接觸子2的前端也可稍微的突出保護部36。 再者，保護部36係具備與第二導板32或第二導板 32之外側板構件同量的滑動機構。因此，第二導孔34與 保護部36的孔，於平面觀看，配置在同一位置。 第ό圖（b)係表示基板檢査用治具的接觸子2與接觸 子保持體3連接在連接電極體4的狀態。再者，在該第6 圖（b)係省略連接電極體4。在該狀態下，保護部36會滑 [S] -18- 1354108 動’接觸子2爲突出的狀態，該突出的接觸子2會接觸到 連接電極部。 此情形下，保護部36，係抵接於第二導板32的下 端’並且因彈簧機構37的彈簧成爲推彈狀態。又，雖然 保護部36會往第6圖（a)所示的位置返回，但在第6圖（b) 的狀態下’連接電極體4與保護部36、保護部36與第二 導板3 2，分別爲抵接的狀態。 再者’在第2圖中，設有兩個進行接觸子保持體3與 後述的連接電極體4之定位的突狀部38。 連接電極體4係支承接觸子保持體3，並且具備將接 觸子2的一部分收容在內部的連接電極部41。 該連接電極部41’爲了將接觸子2收容在內部，因 此形成自連接電極體4的表面朝向連接電極體4內部延伸 的孔洞形狀。連接電極部41，是形成像這樣朝連接電極 體4之內部延伸的孔洞形狀，藉此就能確實的將接觸子2 的一部分收容在連接電極部41內部。此時，接觸子2的 一部分’係在連接電極部41之內部側表面形成電極部， 藉此就能讓接觸子2的一部分與內部側表面接觸。 連接電極部41係連接到導線42。該導線42，係如上 述連接到檢查信號處理部。 連接電極部41，係以能遊動嵌合接觸子2的形狀爲 宜。連接電極部41能遊動嵌合接觸子2，藉此將接觸子2 收容到連接電極部41內部，或者在自連接電極部41除去 接觸子2的情形下’能減低接觸子2與連接電極部41的 [S1 -19- 1354108 摩擦阻力，且能簡單的拔取。 連接電極部41，係在其內部收容接觸子2的一部 分，以連接電極部41的內部側表面作爲電極部。因此， 連接電極部41可形成導電性的筒狀。 此情形下，筒狀的連接電極部41，係將接觸子2收 容在內部，並且形成以筒狀的內部側表面作爲電極部的功 能。 再者，該連接電極部41，係將筒（pipe)配置成與連接 電極體4的表面成爲齊面。藉由配置成這樣，連接電極體 4的表面成爲齊面，第二導板32或保護部36抵接在連接 電極體4的情形下，可配置成對連接電極體4表面形成直 角，接觸子2在使用時被壓接，撓曲時，無論對哪個接觸 子2都能負荷均勻的荷重。 因爲連接電極部41，係配合使用時或未使用時，讓 接觸子2進出連接電極部41內，所以爲了使其確實的接 觸連接電極部41，接觸子2的長度方向與連接電極部41 的長度方向配置或形成交叉（相對性的交叉）爲宜。 該具體上的範例，例如將連接電極部41對接觸子2 的長軸形成傾斜或彎曲。 藉由像這樣形成連接電極部41，接觸子2被收容在 連接電極部41內部之際，會邊摩擦邊收容至連接電極部 41的內側表面，就能確立接觸子2是與連接電極部41確 實接觸的狀態。特別是藉由構成這樣，就能破壞形成在內 側表面之電極部或接觸子2之表面的氧化膜。 [S3 -20- 1354108 第7圖是表τκ連接電極部的一實施形態。第7圖（a) 所示的連接電極部41，係平行的沿著連接電極體4的厚 度方向所形成。即使是此種情形，如上述，接觸子2以傾 斜配置之際’接觸子2會邊摩擦邊接觸到連接電極部41 的內部側表面。 第7圖（b)係表示連接電極部41是形成對連接電極體 4的表面以一定角度傾斜的情形。此情形下，接觸子2略 直角方向收容在連接電極體4的表面，也會邊摩擦邊接觸 連接觸電極部41的內部側表面。 第7圖（c)係表示連接電極部41形成倒〈字狀的情 形。此情形下’接觸子2與第7圖（c)同樣的邊摩擦邊接 觸被收容在內部，並且因爲連接電極部41以〈字狀的頂 點部形成逆向的傾斜，所以接觸子2會在該頂點部確實的 與內部側表面接觸。 第7圖（d)係表示連接電極部41形成彎曲的情形。此 情形下’接觸子2被收容之際，會一面沿著該連接電極部 41的內部側表面彎曲、一面摩擦接觸表面。進而，此情 形下’由於有關接觸子2的荷重比第7圖（c)更低，因此 接觸子2很容易進行拔出、***。 該等第7圖所示的連接電極部41的形狀，不限於該 等，可設定成連接電極部41的收容方向相對於接觸子2 的出入方向形成交叉。藉由像這樣形成連接電極部41， 接觸子2會確實的接觸到連接電極部41的內側表面，並 且因爲在被收容之際，會邊摩擦邊收容在內部側表面，所i SI -17- 1354108 343 is larger than the middle side guide 342. The second guide plate 32 is provided on the side of the connection electrode portion of the contact 2, and slides toward the longitudinal direction of the contact 2 so that the contact 2 protrudes when the contact 2 comes into contact with the connection electrode. Protection unit 36. As shown in Fig. 2, the protection portion 36 is disposed on the side of the connection electrode portion of the second guide 32, and is provided with a spring mechanism 37 so as to slide in the longitudinal direction of the contact member 2. The protective portion 36 is formed of a plate member having a predetermined thickness, and protects the front end portion of the contact member 2 (the portion that contacts the connection electrode portion) when the jig for inspection of the substrate is not used. For example, Fig. 6 shows the operation of the protective portion, Fig. 6(a) shows the state when the substrate inspection jig is not in use, and Fig. 6(b) shows the use of the substrate inspection jig. The state of the time. Fig. 6(a) shows a state in which the contact 2 of the substrate inspection jig and the contact holder 3 are not connected to the connection electrode body 4, and the end portion of the connection electrode portion of the contact 2 is protected by the protection. Part 36 is protected. Further, in the drawing, the state of being housed inside the protective portion 36 is shown, but the front end of the contact 2 can slightly protrude from the protective portion 36. Further, the protecting portion 36 is provided with a sliding mechanism of the same amount as the outer side plate member of the second guide 32 or the second guide 32. Therefore, the second guide hole 34 and the hole of the protection portion 36 are disposed at the same position as viewed in plan. The figure (b) shows a state in which the contact 2 of the jig for substrate inspection and the contact holder 3 are connected to the electrode assembly 4. Further, in the sixth drawing (b), the connection electrode body 4 is omitted. In this state, the protecting portion 36 slides [S] -18 - 1354108 and the contact member 2 is in a protruding state, and the protruding contact 2 contacts the connecting electrode portion. In this case, the protecting portion 36 abuts against the lower end ' of the second guide 32 and is spring-loaded by the spring of the spring mechanism 37. Further, although the protection portion 36 returns to the position shown in Fig. 6(a), in the state of Fig. 6(b), the connection electrode body 4 and the protection portion 36, the protection portion 36, and the second guide 3 are connected. 2, respectively, the state of the abutment. Further, in Fig. 2, two projecting portions 38 for positioning the contact sub-holding body 3 and the connecting electrode body 4 to be described later are provided. The connection electrode body 4 supports the contact sub-holding body 3, and has a connection electrode portion 41 that houses a part of the contact 2 inside. In order to accommodate the contact 2 in the connection electrode portion 41', a shape of a hole extending from the surface of the connection electrode body 4 toward the inside of the connection electrode body 4 is formed. The connection electrode portion 41 has a hole shape extending toward the inside of the connection electrode body 4, whereby a part of the contact piece 2 can be reliably accommodated inside the connection electrode portion 41. At this time, a part of the contact member 2 forms an electrode portion on the inner side surface of the connection electrode portion 41, whereby a part of the contact 2 can be brought into contact with the inner side surface. The connection electrode portion 41 is connected to the wire 42. The wire 42 is connected to the inspection signal processing unit as described above. It is preferable that the electrode portion 41 is connected to the shape in which the fitting contact member 2 can be moved. The connection electrode portion 41 can swim the fitting contact 2, whereby the contact 2 is housed inside the connection electrode portion 41, or in the case where the contact member 2 is removed from the connection electrode portion 41, the contact 2 and the connection electrode can be reduced. 41 [S1 -19- 1354108 friction resistance, and can be easily extracted. The connection electrode portion 41 accommodates a portion of the contact member 2 therein to connect the inner side surface of the electrode portion 41 as an electrode portion. Therefore, the connection electrode portion 41 can be formed into a conductive cylindrical shape. In this case, the cylindrical connecting electrode portion 41 accommodates the contact member 2 inside, and forms a function of the cylindrical inner side surface as the electrode portion. Further, in the connection electrode portion 41, a pipe is disposed so as to be flush with the surface of the connection electrode body 4. By arranging such that the surface of the connection electrode body 4 is flush, and the second guide 32 or the protection portion 36 abuts on the connection electrode body 4, it can be arranged to form a right angle to the surface of the connection electrode body 4, the contact 2 It is crimped at the time of use, and when it is flexed, it can load a uniform load regardless of which contact 2 is used. Since the contact electrode 2 is brought into and out of the connection electrode portion 41 when the electrode portion 41 is connected or used, the length direction of the contact 2 and the connection electrode portion 41 are made to connect the electrode portion 41 with a positive contact. It is preferable to arrange in the longitudinal direction or form an intersection (reciprocal intersection). This specific example, for example, causes the connecting electrode portion 41 to be inclined or curved to the long axis of the contact 2 . When the contact electrode portion 41 is formed in this manner, the contact member 2 is housed in the inside of the connection electrode portion 41, and is accommodated on the inner surface of the connection electrode portion 41 while being rubbed, whereby the contact portion 2 and the connection electrode portion 41 can be established. The state of contact. In particular, by constituting this, the oxide film formed on the electrode portion of the inner surface or the surface of the contact 2 can be broken. [S3 -20- 1354108 Fig. 7 is an embodiment of the table τκ connection electrode portion. The connection electrode portion 41 shown in Fig. 7(a) is formed in parallel along the thickness direction of the connection electrode body 4. Even in such a case, as described above, when the contact 2 is disposed in an inclined position, the contact 2 will contact the inner side surface of the connection electrode portion 41 while being rubbed. Fig. 7(b) shows a case where the connection electrode portion 41 is formed to be inclined at a certain angle with respect to the surface of the connection electrode body 4. In this case, the contact member 2 is housed on the surface of the connection electrode body 4 in a direction perpendicular to the right direction, and is also in contact with the inner side surface of the contact electrode portion 41 while being rubbed. Fig. 7(c) shows a case where the connection electrode portion 41 is formed in an inverted shape. In this case, the contact fringe 2 is accommodated in the same side as the rubbing side contact of Fig. 7 (c), and since the connecting electrode portion 41 is reversely inclined at the apex portion of the shape, the contact 2 will be in the The apex portion is surely in contact with the inner side surface. Fig. 7(d) shows a case where the connection electrode portion 41 is bent. In this case, when the contact member 2 is housed, the contact surface 2 is bent along the inner side surface of the connection electrode portion 41 to rub the contact surface. Further, in this case, since the load on the contact 2 is lower than that in Fig. 7(c), the contact 2 can be easily pulled out and inserted. The shape of the connection electrode portion 41 shown in Fig. 7 is not limited to this, and the storage direction of the connection electrode portion 41 may be set to intersect with the direction in which the contact member 2 enters and exits. By forming the connection electrode portion 41 in this way, the contact member 2 surely contacts the inner side surface of the connection electrode portion 41, and is accommodated on the inner side surface while being rubbed while being housed.
[SI -21 - 1354108 以接觸電阻値低，並且接觸電阻値之穩定性高的接觸 與連接電極部41就能連接。 又，其他具體上的範例，如第8圖所示，將收容 接電極部41內部的接觸子2的前端2A，對接觸子2 軸形成彎曲。 藉由像這樣彎曲形成接觸子2的前端2A，在接 2的前端2A被收容到連接電極部41之際，會邊摩擦 觸連接電極部41的內側表面。 在該第8圖所示的接觸子2，係自接觸子2的中 起，接觸子2的前端2A彎曲成具有寬度W。該寬度 係形成大致與連接電極部41的內徑相同的程度爲宜 由該寬度W形成大致與連接電極部41的內徑相同， 確實的接觸到內側表面，並且能縮小彎曲的量（寬度） 第9圖是表示使用有關本發明之基板檢查用治具 態。 在該第9圖中，複數個接觸子2的收容部2A， 容在連接電極部41內部。雖然並未表示在第9圖中 在接觸子2的收容部2A是彎曲形狀，或接觸子2是 成傾斜的情形下，在連接電極部4 1內收容接觸子 際，會邊摩擦邊接觸內部側表面被收容。再者，第 中，爲了方便，接觸子2是位在連接電極部41的 央。 若將接觸子2收容到連接電極部41，使接觸子 體3或連接電極體4相對性的移動，藉此讓接觸子2 子2 在連 的長 觸子 邊接 心軸 W， 。藉 就能 〇 的狀 被收 ，但 配置 2之 9圖 略中 保持 的收 [S] -22- 1354108 容部2A確實的壓接在連接電極部4i的內部側表面爲 宜。 藉由使接觸子保持體3與連接電極體4，對接觸子2 的長軸朝直角方向移動，而表現確實的接觸到連接電極部 41的內部側表面。像這樣，藉由使接觸子保持體3及/或 連接電極體4’對接觸子2的出入方向傾斜，就能讓接觸 子2的收容部2A，更穩定的接觸到連接電極部41的內部 側表面。 第10圖是表示連接電極體所具有的滑動部的一實施 例。在該第10圖所示的滑動部，係連接電極部4具有三 片的第一板構件43、第二板構件44以及第三板構件45。 以貫通該等三片之板構件的方式，形成連接電極部41。 第一板構件43與第三板構件45爲固定構件，第二板構件 44爲滑動的機構。因此’如第1〇圖（b)所示，第二板構件 44，會滑動並從側面押壓連接電極部41，而且連接電極 部4 1爲彎曲形狀’會從側面押壓而接觸到接觸子2的收 容部2A。 雖然在該第10圖所示的連接電極體4中，係使用三 片的板構件做說明’但不限於三片，甚至也可使用複數個 板構件來形成滑動部。 再者，在第10圖中，爲了方便，接觸子2是呈現對 連接電極部41的孔方向，在略平行的位置。 第11圖是表示連接電極部之電極端子的槪略構成 圖。 [S3 -23- 1354108 第1 1圖（a)所示的連接電極部41的電極端子，係以 符號421與符號422標示。該電極端子421、422，係分 另！1以導線所形成，各導線被連接在基板檢查裝置本體。因 此’自連接電極部41起設有兩個端子，能進行四端子測 定。 藉由使用該構造，電極側的接觸電阻會成爲極小及/ 或穩定的値。因此，若只考慮檢查點側的接觸電阻，就可 得到大致與直接將兩個端子接觸到檢查點情形相同的測定 結果。 第11圖（b)所示的連接電極部41的電極端子42，是 藉由一條導線形成。 在該電極端子42，三叉形狀之導電素材的一端，是 電性連接在連接電極部41，剩子的端子作爲兩個電極端 子42 1、422，並與基板檢查裝置本體電性連接。 在使用此種構造的情形下，藉由電阻値只檢測出連接 電極部41至三叉部的距離d部份，來修正該電阻値，藉 此就能進行精確的測定。 如第11圖所示，自連接電極部41起設置兩個電極端 子，藉此就能進行四端子測定。此情形下，通常雖是對被 檢査點使用兩個電極端子進行四端子測定，但因爲只要是 本發明的電極構造（連接電極部構造），接觸子2與連接電 極部的接觸電阻極小或穩定，所以能進行穩定的四端子測 定。 有關本發明之基板檢查用治具之構造的說明。 [S3 -24 - 1354108 其次，說明在本發明之基板檢查用治具安裝接觸子2 的情形。 第12圖是表示安裝接觸子之情形的過程^ 首先，以整合的方式配置第一導孔33與第二導孔 34。此時，保護部36係抵接在第二導板32。 在第12圖之實施形態所示的情形下，以一排配置在 垂直方向的方式來配置第一導孔33與第二導孔34(第12 圖（a))。 此情形下，第二導板32被配置在上側，第一導板31 被配置在下側。雖然該配置位置未特別限定，但爲了不讓 接觸子2自第一導孔22脫落，因此配置成這樣爲宜。 其次，從第二導孔34***接觸子2(參照第12圖 ⑻）。 此情形下，如上述，因爲第一導孔33是形成小於接 觸孔2的絕緣部2 3的直徑，所以接觸子2不會脫落。 若***接觸子2，會讓第二導板32與保護部36同時 滑動。 此時，接觸子2的絕緣部23會卡合在第二導板32的 第二導孔34(參照第5圖）。 總之，接觸子2會因第二導板32與保護部36滑動形 成彎曲，由於接觸子2是可撓性，因此形成第一導孔33 的第一導板31的側部會與形成第二導孔34旳第二導板 32的側部（表面部）卡合。 此時，滑動的量，如上述，第二導板32的外側板構 [S1 -25- 1354108 件滑動的較大。 其次’使保護部36突出第二導孔32(參照第12圖 ⑷）。 藉由使保護部36突出，讓接觸子2的端部受到保 護。 如此一來’就能安裝接觸子2，取下的情形，係進行 該逆向的順序。 其次’說明有關本發明之基板檢查用治具的一實施 例。 第13圖是表示本發明所實施的基板檢查用治具的— 實施例。 該一實施例所示的接觸子2，以鎢爲素材，形成長度 30mm、直徑90μηα的棒狀構件21，以收容部2A的長度爲 2mm的方式形成絕緣部23。 又，連接電極部41是內徑95μιη、外徑125μπι之導 電性的管’在該管的內側表面進行鏟金處理。 在該第13圖所示的一實施例，連接電極體4是以第 一板狀部43、第二板狀部44'第三板狀部、以及第四板 狀部所形成’並且具有使第二板狀部44橫向移動的滑動 部47。該第一板狀部43與第三板狀部45係爲固定的構 件，第四板狀部46係使用作爲基板檢査用治具1’的底 座。 連接電極部41是形成貫通第一至第三板狀部。 滑動部47可讓第二板狀部44左右移動。該滑動部 [S] -26- 1354108 47具有左右一對的螺釘機構，可藉由調整左右的螺釘， 來調整第二板狀部44的位置。 再者’在該第13圖（a)中，在第二導板32與保護部 3 6之間形成空間，爲未使用時的狀態。 第13圖（b)係表示使用基板檢查用治具Γ的狀態。 此時，第二導板32與保護部36會抵接，並且接觸子2的 收容部2A被收容到連接電極部41»而且，該接觸子2的 收容部2A’爲邊摩擦邊接觸連接電極部41之內側表面的 狀態，就能確立導通狀態。 又，在該基板檢查用治具1’ ，在左右具有滑動部 47，接觸子2的收容部2A被收容到連接電極部41之 後，藉由調整螺釘，使連接電極體4的第二板狀部44橫 向移動。此時’連接電極部41的第二板狀部44，會配合 第二板狀部44的移動’成爲彎曲狀態，連接電極部41的 內側表面會與接觸子2壓接。 在該一實施例中，接觸子2也會傾斜，保持在接觸子 保持體3，更因連接電極體4具有滑動部47，所以接觸子 2會邊摩擦邊收容在連接電極部41的內部表面，並且能 穩定接觸，確立導通狀態。 【圖式簡單說明】 第1圖是表示使用有關本發明的基板檢查用治具之情 形下的槪略構造。 第2圖是表示有關本發明的基板檢查用治具的槪略構[SI -21 - 1354108 The contact with the connection electrode portion 41 can be connected with a contact resistance which is low in contact resistance and high in contact resistance. Further, as another specific example, as shown in Fig. 8, the distal end 2A of the contact member 2 housed inside the electrode portion 41 is bent toward the contact shaft 2 axis. When the distal end 2A of the contact 2 is bent as described above, when the distal end 2A of the contact 2 is housed in the connection electrode portion 41, the inner surface of the connection electrode portion 41 is frictionally contacted. In the contact 2 shown in Fig. 8, from the middle of the contact 2, the front end 2A of the contact 2 is bent to have a width W. The width is formed to be substantially the same as the inner diameter of the connection electrode portion 41. It is preferable that the width W is formed to be substantially the same as the inner diameter of the connection electrode portion 41, and the contact with the inner surface is surely performed, and the amount of bending (width) can be reduced. Fig. 9 is a view showing the state of the jig for inspection using the substrate of the present invention. In the ninth diagram, the accommodating portion 2A of the plurality of contacts 2 is housed inside the connecting electrode portion 41. Although it is not shown in FIG. 9 that the accommodating portion 2A of the contact 2 is curved or the contact 2 is inclined, the contact portion is accommodated in the connecting electrode portion 41, and the inside is rubbed while contacting. The side surface is housed. Further, in the middle, for the sake of convenience, the contact 2 is located at the center of the connection electrode portion 41. When the contact 2 is housed in the connection electrode portion 41, the contact body 3 or the connection electrode body 4 is relatively moved, whereby the contact 2 2 is connected to the mandrel W at the long contact side of the connection. It is possible to receive the 〇 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 By bringing the contact holding body 3 and the connecting electrode body 4, the long axis of the contact 2 is moved in the right-angle direction, and the positive side contact with the inner side surface of the connecting electrode portion 41 is exhibited. By tilting the contact holder 3 and/or the connection electrode body 4' to the direction in which the contact 2 is moved, the accommodating portion 2A of the contact 2 can be more stably brought into contact with the inside of the connection electrode portion 41. Side surface. Fig. 10 is a view showing an embodiment of a sliding portion which is connected to the electrode body. In the sliding portion shown in Fig. 10, the connection electrode portion 4 has three sheets of the first plate member 43, the second plate member 44, and the third plate member 45. The connection electrode portion 41 is formed so as to penetrate the three plate members. The first plate member 43 and the third plate member 45 are fixed members, and the second plate member 44 is a sliding mechanism. Therefore, as shown in Fig. 1(b), the second plate member 44 slides and presses the connecting electrode portion 41 from the side, and the connecting electrode portion 41 has a curved shape, which is pressed from the side to contact. The accommodating portion 2A of the child 2. In the connection electrode body 4 shown in Fig. 10, three plate members are used for explanation, but not limited to three pieces, and even a plurality of plate members may be used to form the sliding portion. Further, in Fig. 10, for the sake of convenience, the contact 2 is in a direction slightly parallel to the direction of the hole connecting the electrode portions 41. Fig. 11 is a schematic block diagram showing the electrode terminals of the connection electrode portions. [S3 -23- 1354108 The electrode terminals of the connection electrode portion 41 shown in Fig. 1 (a) are denoted by reference numeral 421 and reference numeral 422. The electrode terminals 421, 422 are divided into another! 1 is formed by wires, and each wire is connected to the body of the substrate inspection device. Therefore, since the two terminals are provided from the connection electrode portion 41, four-terminal measurement can be performed. By using this configuration, the contact resistance on the electrode side becomes extremely small and/or stable. Therefore, if only the contact resistance at the checkpoint side is considered, the measurement result which is substantially the same as the case where the two terminals are directly brought into contact with the checkpoint can be obtained. The electrode terminal 42 of the connection electrode portion 41 shown in Fig. 11(b) is formed by one wire. At the electrode terminal 42, one end of the trigeminal conductive material is electrically connected to the connection electrode portion 41, and the remaining terminals are used as the two electrode terminals 42 1 and 422, and are electrically connected to the substrate inspection device body. In the case of using such a configuration, the resistance 値 is corrected by detecting only the portion d of the connecting electrode portion 41 to the trifurcation portion by the resistor 値, whereby accurate measurement can be performed. As shown in Fig. 11, two electrode terminals are provided from the connection electrode portion 41, whereby the four-terminal measurement can be performed. In this case, although the four-terminal measurement is performed using two electrode terminals at the inspection point, the contact resistance between the contactor 2 and the connection electrode portion is extremely small or stable as long as the electrode structure (connection electrode portion structure) of the present invention is used. Therefore, stable four-terminal measurement can be performed. Description of the structure of the jig for substrate inspection of the present invention. [S3 - 24 - 1354108] Next, the case where the contact 2 is attached to the jig for substrate inspection of the present invention will be described. Fig. 12 is a view showing a state in which a contact is mounted. First, the first pilot hole 33 and the second pilot hole 34 are disposed in an integrated manner. At this time, the protection portion 36 abuts against the second guide 32. In the case shown in the embodiment of Fig. 12, the first pilot hole 33 and the second pilot hole 34 are arranged in a row in the vertical direction (Fig. 12(a)). In this case, the second guide 32 is disposed on the upper side, and the first guide 31 is disposed on the lower side. Although the arrangement position is not particularly limited, it is preferable to arrange the contact member 2 so as not to fall off from the first guide hole 22. Next, the contact 2 is inserted from the second pilot hole 34 (refer to Fig. 12 (8)). In this case, as described above, since the first pilot hole 33 is formed smaller than the diameter of the insulating portion 23 of the contact hole 2, the contact 2 does not fall off. If the contact 2 is inserted, the second guide 32 and the protection portion 36 are simultaneously slid. At this time, the insulating portion 23 of the contact 2 is engaged with the second guide hole 34 of the second guide 32 (refer to Fig. 5). In short, the contact 2 is bent by the second guide 32 and the protection portion 36. Since the contact 2 is flexible, the side of the first guide 31 forming the first guide hole 33 and the second portion are formed. The guide holes 34 are engaged with the side portions (surface portions) of the second guide 32. At this time, the amount of sliding, as described above, the outer plate structure of the second guide plate 32 [S1 - 25 - 1354108 pieces slide larger. Next, the protective portion 36 is protruded from the second guide hole 32 (refer to Fig. 12 (4)). The end of the contact 2 is protected by projecting the protection portion 36. In this way, the contact 2 can be installed, and in the case of removal, the reverse order is performed. Next, an embodiment of the jig for substrate inspection according to the present invention will be described. Fig. 13 is a view showing an embodiment of a jig for substrate inspection which is carried out by the present invention. In the contact 2 shown in the above embodiment, a rod-shaped member 21 having a length of 30 mm and a diameter of 90 μηα was formed using tungsten as a material, and the insulating portion 23 was formed so that the length of the accommodating portion 2A was 2 mm. Further, the connection electrode portion 41 is a tube having an inner diameter of 95 μm and an outer diameter of 125 μm, and is subjected to a gold-cut treatment on the inner surface of the tube. In the embodiment shown in Fig. 13, the connection electrode body 4 is formed by the first plate-like portion 43, the second plate-like portion 44', the third plate-like portion, and the fourth plate-like portion. The sliding portion 47 in which the second plate portion 44 moves laterally. The first plate-like portion 43 and the third plate-like portion 45 are fixed members, and the fourth plate-like portion 46 is used as a base for the substrate inspection jig 1'. The connection electrode portion 41 is formed to penetrate through the first to third plate portions. The sliding portion 47 allows the second plate portion 44 to move left and right. The sliding portion [S] -26 - 1354108 47 has a pair of left and right screw mechanisms, and the position of the second plate portion 44 can be adjusted by adjusting the left and right screws. Further, in Fig. 13(a), a space is formed between the second guide 32 and the protection portion 36, and the state is not used. Fig. 13(b) shows a state in which the jig for the substrate inspection is used. At this time, the second guide 32 and the protection portion 36 abut, and the receiving portion 2A of the contact 2 is received in the connection electrode portion 41», and the receiving portion 2A' of the contact 2 contacts the connection electrode while rubbing. The state of the inner surface of the portion 41 can establish the conduction state. Further, in the jig for inspection of the substrate 1', the sliding portion 47 is provided on the left and right, and after the accommodating portion 2A of the contact 2 is housed in the connection electrode portion 41, the second plate of the electrode assembly 4 is connected by adjusting the screw. The portion 44 moves laterally. At this time, the second plate-like portion 44 of the connection electrode portion 41 is bent in a state where the movement of the second plate-like portion 44 is made, and the inner surface of the connection electrode portion 41 is pressed against the contact portion 2. In this embodiment, the contact 2 is also inclined to be held in the contact holder 3, and since the connection electrode body 4 has the sliding portion 47, the contact 2 is accommodated on the inner surface of the connection electrode portion 41 while being rubbed. , and can maintain contact and establish the conduction state. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a schematic structure in a case where a jig for substrate inspection according to the present invention is used. Fig. 2 is a view showing the outline of the jig for substrate inspection according to the present invention;
i SI -27- 1354108 造，表示接觸子、接觸子保持體、以及連接電極體的位置 構造。 第3圖是表示接觸子的一實施形態。（a)是表示棒狀 構件，（b)是表示棒狀構件與筒狀構件，（c)是表示棒狀構 件、筒狀構件、以及絕緣部。 第4圖是表示有關本發明的基板檢查用治具的檢查點 側之構造的槪略剖面圖。 第5圖是表示有關本發明的基板檢查用治具的連接電 極側之構造的槪略剖面圖。 第6圖是表示使用有關本發明之基板檢查用治具的狀 態。 第 7圖（a)〜（d)是分別表示連接電極部的一實施形 態。 第8圖是表示接觸子的其他實施形態》 第9圖是表示有關本發明之基板檢査用治具爲使用狀 態的槪略構造圖。 第10圖是表示有關本發明的接觸子與連接電極部的 其他實施形態。 第11圖是表示有關本發明的接觸子與接觸子保持體 的另一其他實施形態。 第12圖是表示用以安裝有關本發明之基板檢查用治 具的接觸子的過程。 第13圖是表示本發明所實施的基板檢査用治具的一 實施例。 [S] -28- 1354108 【主要元件符號說明】 1 =基板檢查用治具 1 ’ ：基板檢查用治具（其他的實施形態） 2 :接觸子（terminal) 2A :收容部 3 :接觸子保持體 31 :第一導板 32 :第二導板 4 :連接電極體 4 1 :連接電極部 42 :電極端子i SI -27- 1354108 Manufactured to indicate the position of the contact, the contact holder, and the position of the connected electrode body. Fig. 3 is a view showing an embodiment of a contact. (a) is a rod-shaped member, (b) is a rod-shaped member and a cylindrical member, and (c) is a rod-shaped member, a tubular member, and an insulating portion. Fig. 4 is a schematic cross-sectional view showing the structure of the inspection point side of the jig for substrate inspection according to the present invention. Fig. 5 is a schematic cross-sectional view showing the structure of the connection electrode side of the jig for substrate inspection according to the present invention. Fig. 6 is a view showing a state in which the jig for substrate inspection according to the present invention is used. Fig. 7 (a) to (d) are views showing an embodiment of the connection electrode portion, respectively. Fig. 8 is a view showing another embodiment of the contact member. Fig. 9 is a schematic structural view showing the state in which the substrate inspection jig according to the present invention is in use. Fig. 10 is a view showing another embodiment of the contact and connection electrode portions of the present invention. Fig. 11 is a view showing still another embodiment of the contact and contact holder according to the present invention. Fig. 12 is a view showing a process for attaching a contact for the substrate inspection tool of the present invention. Fig. 13 is a view showing an embodiment of a jig for substrate inspection which is carried out by the present invention. [S] -28- 1354108 [Description of main component symbols] 1 = Fixture for substrate inspection 1 ' : Fixture for substrate inspection (other embodiment) 2 : Contact terminal 2A : Housing 3 : Contact holder retention Body 31: first guide plate 32: second guide plate 4: connection electrode body 4 1 : connection electrode portion 42: electrode terminal