TWI354094B - - Google Patents
Download PDFInfo
- Publication number
- TWI354094B TWI354094B TW094115584A TW94115584A TWI354094B TW I354094 B TWI354094 B TW I354094B TW 094115584 A TW094115584 A TW 094115584A TW 94115584 A TW94115584 A TW 94115584A TW I354094 B TWI354094 B TW I354094B
- Authority
- TW
- Taiwan
- Prior art keywords
- measurement
- measured
- objects
- head
- axis
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mathematical Physics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004301769A JP4431479B2 (ja) | 2004-10-15 | 2004-10-15 | 2次元座標測定機 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200612078A TW200612078A (en) | 2006-04-16 |
TWI354094B true TWI354094B (ko) | 2011-12-11 |
Family
ID=36381582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094115584A TW200612078A (en) | 2004-10-15 | 2005-05-13 | Two-dimensional coordinate measuring apparatus |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4431479B2 (ko) |
KR (1) | KR101234954B1 (ko) |
CN (1) | CN100498215C (ko) |
TW (1) | TW200612078A (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101480327B1 (ko) | 2013-07-31 | 2015-01-08 | 한국해양과학기술원 | 해양 주상 시추 코어 시료 광학 촬영 자동화 시스템 및 촬영 방법 |
CN107560832A (zh) * | 2017-09-06 | 2018-01-09 | 长春国科精密光学技术有限公司 | 测量***及测量数字电影放映机光学参数的方法 |
CN109115129A (zh) * | 2018-11-12 | 2019-01-01 | 江西丝安本精密制版有限公司 | 一种网版拉网角度测试装置及其使用方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004044966A1 (ja) | 2002-11-13 | 2004-05-27 | Sumitomo Heavy Industries, Ltd. | 近接露光における位置合わせ方法と位置合わせ装置 |
JP4084653B2 (ja) | 2002-12-26 | 2008-04-30 | 株式会社ブイ・テクノロジー | 二次元測定機 |
-
2004
- 2004-10-15 JP JP2004301769A patent/JP4431479B2/ja not_active Expired - Fee Related
-
2005
- 2005-05-06 KR KR1020050037799A patent/KR101234954B1/ko active IP Right Grant
- 2005-05-13 TW TW094115584A patent/TW200612078A/zh not_active IP Right Cessation
- 2005-06-28 CN CNB2005100791776A patent/CN100498215C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN100498215C (zh) | 2009-06-10 |
CN1760634A (zh) | 2006-04-19 |
KR101234954B1 (ko) | 2013-02-19 |
TW200612078A (en) | 2006-04-16 |
JP2006112961A (ja) | 2006-04-27 |
JP4431479B2 (ja) | 2010-03-17 |
KR20060047748A (ko) | 2006-05-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI614143B (zh) | 位置檢測裝置、基板製造裝置、位置檢測方法及基板的製造方法 | |
US8203604B2 (en) | Calibration plate and calibration method | |
KR20090004636A (ko) | 기판 외관 검사 장치 | |
EP1605228A2 (en) | Stage apparatus and vision measuring apparatus | |
TW200302345A (en) | Substrate inspection device | |
KR102039372B1 (ko) | 노광 묘화 장치, 프로그램을 기록한 기록 매체, 및 노광 묘화 방법 | |
JP5907110B2 (ja) | スクリーン印刷方法及びスクリーン印刷装置 | |
JP2010510519A (ja) | ガラスシートの歪を測定するためのゲージ | |
JP2008300394A (ja) | 基板接合装置および基板接合方法 | |
TWI354094B (ko) | ||
KR101622473B1 (ko) | 레이저 가공기 | |
CN104458462B (zh) | 硬度试验机 | |
TWI638237B (zh) | Drawing device and drawing method | |
JP6464021B2 (ja) | 測定装置 | |
KR20150120215A (ko) | 렌즈 틸트 보정 장치 및 렌즈 틸트 보정 방법 | |
JP3217602U (ja) | 対物ミクロメータおよび硬さ試験機 | |
KR102003468B1 (ko) | 기판 갭 유지 장치 | |
JP5646288B2 (ja) | スクリーンマスクの観察装置および印刷装置 | |
CN217931723U (zh) | 针卡标定装置 | |
JP2014003312A (ja) | 基板接合装置および基板接合方法 | |
JP2008286796A (ja) | 光学検査装置 | |
JP3878977B2 (ja) | 平面表示装置の品位検査装置 | |
CN116165840A (zh) | 掩模检查*** | |
AU2006291872A1 (en) | Device for determining the relative position of two substantially flat elements | |
JP2007292683A (ja) | 試料測定装置および試料測定装置の試料台調節方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |