1342952 並利用若干定位銷44穿置三者，形成初步之固定結構，同 時該定位銷4 4亦具有將探針頭4與線路空間轉換板2同時固 定的作用，再利用若干固定元件45 (如：螺絲、鉚釘）， 將三者做一確實的固定，而若干探針（411、421 )係為裝 設於上板41及下板43之容置槽（412、422)中，依照探針 的數量多寡，亦可僅裝置於上板41或下板42之容置槽 (412、422 );當然間隔板43亦對設探針（411、421)位 置設置一剖溝431，以供探針（411、421)容置於其中。 藉由上述圖二至圖七之揭露，即可瞭解本發明主要的 技術手段為藉由一主電路板、一垂直探針頭、線路空間轉 換板及上、下熱平衡板所構成之結構，其中該線路空間轉 換板的設計，採取導電墊及銲墊分離而不重疊的空間配 置，且適用於印刷電路板所慣用增層法來製作，以作為主 電路板與垂直式探針頭之探針電性導通介面，其優點為可 利用細導線做為線路空間轉換板及主電路板之電性連接元 件，以形成一不同結構之垂直式探針卡，如此便可達成成 本較低、製作速度較快，且亦可探測奈米級的裸晶的探針 設備。本發明應用於半導體的測試製程中具有極大的商 機，故提出專利申請以尋求專利權之保護。 综上所述，本發明之結構特徵及各實施例皆已詳細揭 示，而可充分顯示出本發明案在目的及功效上均深富實施 之進步性，極具產業之利用價值，且為目前市面上前所未 見之運用，依專利法之精神所述，本發明案完全符合發明 專利之要件。 唯以上所述者，僅為本發明之較佳實施例而已，當不能 r: s一 1342952 以之限定本發明所實施之範圍，即大凡依本發明申請專利 範圍所作之均等變化與修飾，皆應仍屬於本發明專利涵蓋 之範圍内，謹請 貴審查委員明鑑，並析惠准，是所至 禱。 【圖式簡單說明】 圖一 A係為習知陶瓷探針卡之線路空間轉換板結構的俯視 圖； 圖一B係為習知陶瓷探針卡之線路空間轉換板結構的剖面 側視圖； 圖一C係為習知陶瓷探針卡之線路空間轉換板結構的仰視 圖， 圖二係為本發明垂直式探針卡之立體外觀結構分解示意 圖； 圖三係為本發明垂直式探針卡組立後之剖面侧視結構示意 圖； 圖四A係為本發明線路空間轉換板之俯視結構示意圖； 圖四B係為本發明線路空間轉換板之剖面側視結構示意圖； 圖四C係為本發明線路空間轉換板之仰視結構示意圖； 圖五A係為本發明線路空間轉換板利用細銅線銲接於主電 路板之示意圖； 圖五B係為本發明線路空間轉換板利用球閘陣列封裝方式 銲接於主電路板之示意圖； 圖五C係為本發明線路空間轉換板利用支撐板及若干彈簧 針方式電性連接於主電路板之示意圖； <：s 1342952 圖六係為本發明探針頭之立體外觀結構分解示意圖； 圖七係為本發明探針頭組立於線路空間轉換板之結構示意 圖。 【主要元件符號說明】 1〜線路空間轉換板 11〜銲墊 12〜針墊 2〜線路空間轉換板 21〜辉塾 22〜針墊 23〜導電墊 3〜主電路板 31〜鲜塾 4〜探針頭 41 - '"上板 411〜 探針 412〜 容置槽 42- -下板 421〜 探針 422〜 容置槽 43〜間隔板 431〜 剖溝 44、 -定位銷 45、 -固定元件 1342952 5〜第一熱平衡板 6〜第二熱平衡板 7〜支撐板 71〜彈簧針1342952 and using a plurality of positioning pins 44 to wear the three to form a preliminary fixed structure, and the positioning pin 44 also has the function of fixing the probe head 4 and the line space conversion plate 2 at the same time, and then using a plurality of fixing elements 45 (such as : screws, rivets), the three are fixed, and a plurality of probes (411, 421) are installed in the receiving grooves (412, 422) of the upper plate 41 and the lower plate 43 according to the probe. The number of the slabs (412, 422) can be only applied to the upper plate 41 or the lower plate 42; of course, the partition plate 43 is also provided with a groove 431 for the position of the probes (411, 421) for exploration. The needles (411, 421) are accommodated therein. With the disclosure of FIG. 2 to FIG. 7 above, it can be understood that the main technical means of the present invention is a structure composed of a main circuit board, a vertical probe head, a line space conversion board, and upper and lower heat balance boards, wherein The design of the line space conversion board adopts a space arrangement in which the conductive pads and the pads are separated without overlapping, and is suitable for the conventional layering method of the printed circuit board, and is used as a probe of the main circuit board and the vertical probe head. The electrical conduction interface has the advantage that the thin wire can be used as the electrical connection component of the line space conversion board and the main circuit board to form a vertical probe card of different structure, so that the cost can be reduced and the production speed can be achieved. Faster, and can also detect nano-scale bare-crystal probe devices. The invention has great business opportunities in the testing process for semiconductors, so patent applications are filed to seek protection of patent rights. In summary, the structural features and embodiments of the present invention have been disclosed in detail, and can fully demonstrate that the present invention has deep progress in the purpose and efficacy of the present invention, and has great industrial value, and is currently The unprecedented use in the market, according to the spirit of the patent law, the invention is fully in line with the requirements of the invention patent. The above is only the preferred embodiment of the present invention, and when r: s - 1342952 is not limited to the scope of the present invention, that is, the equal variation and modification of the scope of the patent application of the present invention are It should still fall within the scope covered by the patent of the present invention. I would like to ask your review committee to explain it and analyze it. It is the prayer. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a plan view showing the structure of a line space conversion board of a conventional ceramic probe card; FIG. 1B is a cross-sectional side view showing the structure of a line space conversion board of a conventional ceramic probe card; C is a bottom view of the structure of the line space conversion board of the conventional ceramic probe card, and FIG. 2 is a schematic exploded view of the vertical appearance structure of the vertical probe card of the present invention; FIG. 3 is a vertical probe card set of the present invention. FIG. 4A is a schematic plan view of a line space conversion board of the present invention; FIG. 4B is a schematic side view of a line space conversion board of the present invention; FIG. 4C is a line space of the present invention. FIG. 5A is a schematic view showing the line space conversion board of the present invention welded to the main circuit board by using a thin copper wire; FIG. 5B is a line space conversion board of the present invention, which is welded to the main by a ball gate array package. Schematic diagram of the circuit board; Figure 5C is a schematic diagram of the line space conversion board of the present invention electrically connected to the main circuit board by using a support plate and a plurality of pogo pins; <:s 1 342952 Figure 6 is a schematic exploded view of the stereoscopic appearance of the probe head of the present invention; Figure 7 is a schematic view of the structure of the probe head of the present invention standing on the line space conversion board. [Main component symbol description] 1 to line space conversion board 11 to pad 12 to pin pad 2 to line space conversion board 21 to 塾 22 to pin pad 23 to conductive pad 3 to main circuit board 31 to fresh 塾 4 ~ Needle 41 - '" upper plate 411~ probe 412~ accommodating groove 42--lower plate 421~ probe 422~ accommodating groove 43~ spacer plate 431~ grooving groove 44, - locating pin 45, - fixing element 1342952 5~first heat balance plate 6~second heat balance plate 7~support plate 71~spring pin