TWI337984B - Scribing apparatus and scribing method - Google Patents

Description

1337984 九、發明說明： 【發明所屬之技術領域】 本發明係關於在由玻璃'半導體等之脆性材料 板狀之工件上刻劃劃線之劃線裝置及劃線方法。 ' 4 【先前技術】 要切斷由脆性材料所成之薄板狀的工件時，係在 表面上事先刻劃劃線。劃線形成後，沿著劃線使 : 時，則劃線的裂紋到達工件之背面而工件被斷裂。《曲 之ί = Γ刻劃劃線之劃線方法，有在劃線頭設置可迴轉 盤珠：的刀具輪(cutterwheel)，在以刀具輪㈣在 牛之狀m下刀具輪在工件的表 翻夕古土 * 丁 w衣囬上澴動而使劃線頭移 =:2取代刀具輪而使一種稱為點鑽石刀前端呈尖 j /、&壓在工件上而刻劃劃線之方法。為了形成深的 垂直裂紋，也有在刀具輪或 之情形。 石刀#之刀具上使其振動 如圖1 〇所不，以往的劃線裂 劃線時，係包夾在工# m 受在件W上要刻劃 被ϋΜιρ h 劃線L部份之兩側而 L的部份相^^ 又，當使刀具沿著預定刻劃劃線 ⑻^ 時’則可在工件^表面刻劃垂直裂紋 固定於照專利文獻^如使包夾劃線L之兩側 專利㈠則可安定地支持工件。 【發明内容】 1:日本專㈣開平9_315832號公報 (發明所欲解決之問題） 97110933 6 1337984 但疋，如使預定在工件上刻劃劃線部份之兩側被固定在 工作台上時，則有抑制劃線時所發生之垂直裂紋成長的方 向之力（1)的向量（在工件的表面内和劃線呈正交方向的 力）之力(2)動作。因,匕’其難以使垂直裂紋成長，而餘 剩的力則會使水平裂紋成長。 本發明之目的為提供—種可使卫件表面的損傷減少且 可深入滲透之劃線裴置及方法。 (解決問題之手段） =本發明作說明。為了解決上述課題，申請 :第！項之發明，其具備有：工作台，包夹著預定刻割工 件的劃線部份之一邊側的至少一部份被固定，而使前述工 :之另-邊侧則呈在空中浮起之狀態；及，相對移動機 募’在空中子起之狀態於預定刻劃劃線部份使刀具抵 定刻劃前述劃線部份使刀具相對於前述工件作相 射移動’而在前述工件上刻劃劃線;如此所成之_ 申清專利第2項之發明，係在申請專利範 =線裝置中，其特徵為，前述刀具在抵接前述工件時項 別述刀具將前述工件，而使前述刀具在抵接側 工件的表面上發生拉伸應力。 '迷 項上]線裝置中，其特徵為，其具有可使前述 刖述工作台使前述工件之 曲手段。 < 乃惻汗起的工件彎 申請專利範圍第4 97110933 項之發明，係在申請專利範圍第3項 7 1337984 之劃線裝置中，其特徵為，前述工件彎曲手段被設在前述 工件沿著被預定刻劃前述劃線部份，而由介存於前述工件 與前述工作台之間之薄片（sheet)所構成，利用使前述工 件之前述一邊側固定於前述工作台上，而以前述薄片作為 支點使前述工件f曲。 申吻專利範圍第5項之發明，係在申請專利範圍第4項 之劃線裝置中，其特徵為，前述工件彎曲手段，由設在前 述:作台之複數個空氣通過孔所構成，而對應於前述工件 之前述一邊側的複數個空氣通過孔使前述工作台真空吸 附前述工件之一邊侧，同時，對應於前述工件之前述另一 邊側的複數個空氣通過孔則朝前述工件之前 喷出空氣而使前述工件彎曲。 側 *申請專利範圍第6項之發明，係在中請專利範圍第5項 之d線裝置中，其特徵為，前述複數個空氣通過孔具有 =空吸附前述工件之功能…朝向前述工件嘴 心：功能；而可使真空吸附前述工件之系統的複數個 m通孔之組合、以及’朝向前述工件喷出空氣 的複數個空氣流通孔之組合，作變化。 ”，、’ 之發明’係在申請專利範圍第1或 以"、求： 特徵為，前述工件之前述另-邊侧 至少一部份固定在前述工作4 件之則述一邊側的 有申範圍第8項之發明，係-種割線裝置，其具備 有.工作台’包夾著預定刻k件的劃線部份之—邊側其眷 97110933 8 {夕切微稱’在刖述工件預. 义 刀具抵接，沿著預定刻割前述二二=:部份使 前述工件作相斟玆 77使別述刀具相對於 申-糞舒 述工件上刻劃劃線。 申二專，圍第9項之發明，係在" 8項t任-項之劃線裝置中 a 回弟J至 曲線，而在前述工作台上… 為二别述劃線係閉合 刻劃前述工件之w “1件的前述—邊側之預定 定，而前述工件的前述另一邊側，即〜至^ a被固 述劃線部份之外側則未被固定。 件預定刻劃前 申請專利範圍第10 定刻劃工件的割線部 x ’ 一備有：使包夹著預 作台上，而在部份固… 述工件之另-邊側在空中浮起之二：：位(set)而使前 浮起之狀態而於預定射二t 的驟；及，在空中 刻劃前述劃線部份使;二:::::抵接，沿著預定 在广件上刻劃劃線之步驟:如…:、=移動，而 中請專利範圍第u 備有。 定，件的劃線部份 的至、備有二包夾= 作台上’而在前述 ：/榻疋在工 接觸前述工作4去/上將則述工件定位而使另一邊側 前述工件“：二於前述工作台之步驟;及，在 劃前述劃線部份使份使刀具抵接，沿著預定刻 前述工件上刻割心對於前述工件作相對移動，而在 _幻線之步驟；如此之劃線方法。 97110933 丄337984 (發明效果） 根據申請專利範圍第】項之發明， 成長所必要力的向量(在工件的表面内和气：垂直裂紋 的力量）之力，僅須解除工件之另一邊側;^正交方向 不作用。因此’垂直裂紋可容易成長，而其 亦可被抑制。X，在工作台上對工件劃線文之成長 工作台之平坦度、工件的厚度變化等外在二：如有因 的力量時’則其力量則會直接影響到工件， 予損傷之虞。但如Ιί使工件浮起在空 =件有加 量可藉工件之彎曲轡祀而妨妯_ *則其剩餘的力 品質劣化。# 掉可防止劃線後工件之 ’在工件表面所發生之 可使工件之另一邊側 ’以在工作台上所設之 根據申請專利範圍第2項之發明 拉伸應力可更使垂直裂紋成長。 根據申請專利範圍第3項之發明 自工作台在空中浮起。1337984 IX. Description of the Invention: [Technical Field] The present invention relates to a scribing device and a scribing method for scribing a line on a workpiece having a plate-shaped material such as a glass 'semiconductor or the like. ' 4 [Prior Art] When a thin plate-shaped workpiece made of a brittle material is cut, a scribe line is previously scribed on the surface. After the scribe line is formed, the scribe line is cracked to the back surface of the workpiece and the workpiece is broken. "曲之ί = the scribing method of the scribing line, there is a cutter wheel which is provided with a rotatable disc bead at the scribing head, and a cutter wheel in the workpiece table with the cutter wheel (four) in the shape of a cow夕夕古土* Ding w clothes back on the sway and make the scribe head shift =: 2 replaces the cutter wheel and makes a kind of point diamond knife tip with a tip j /, & pressed on the workpiece and scribed method. In order to form deep vertical cracks, there are also cases in the tool wheel or. The tool of the stone knife # makes its vibration as shown in Figure 1. Nothing. In the past, when the line is slashed, the tie is clamped on the work #m. It is to be scribed on the piece W. And the part of L is ^^, and when the tool is scribed along the predetermined scribe line (8) ^, then the vertical crack can be scribed on the surface of the workpiece ^ fixed in the patent document ^ such as the sides of the double-sided mark L Patent (1) can support the workpiece stably. [Description of the Invention] Japanese Patent Application Publication No. Hei 9-315832 (Problem to be Solved by the Invention) 97110933 6 1337984 However, if both sides of the scribed portion on the workpiece are fixed on the table, There is a force (2) action of a vector (a force in the direction perpendicular to the scribe line) of the force (1) in the direction in which the vertical crack growth occurs when the scribe is suppressed. Because 匕' is difficult to grow vertical cracks, and the remaining force will cause horizontal cracks to grow. SUMMARY OF THE INVENTION It is an object of the present invention to provide a scribing arrangement and method that reduces damage to the surface of the guard and allows for deep penetration. (Means for Solving the Problem) = The present invention is described. In order to solve the above problems, apply: No.! The invention is characterized in that: the workbench is provided with at least a part of the side of the side of the scribe line which is intended to cut the workpiece, and the other side of the work is floated in the air. And the relative movement of the machine in the state of the air in the state of the predetermined scoring of the portion of the line to cause the tool to delineate the portion of the line to cause the tool to move relative to the workpiece The invention of the second aspect of the invention is in the patent application of the invention, wherein the tool is a tool that abuts the workpiece when the workpiece is abutted. Further, the cutter is subjected to tensile stress on the surface of the abutting side workpiece. The 'on-line' line device is characterized in that it has a means for making the workpiece described above. The invention of the present invention is the invention of the invention of the present invention, which is characterized in that the workpiece bending means is provided along the workpiece along the scribe line device of the patent application No. 3 1 337 984. The scribe line portion is predetermined to be formed by a sheet interposed between the workpiece and the table, and the side surface of the workpiece is fixed to the table, and the sheet is used as the sheet The fulcrum causes the aforementioned workpiece to be curved. The invention of claim 5 is the scribe apparatus of claim 4, wherein the workpiece bending means is formed by a plurality of air passage holes provided in the foregoing: Corresponding to the plurality of air passage holes on the one side of the workpiece, the table is vacuum-adsorbed to one side of the workpiece, and at the same time, a plurality of air passage holes corresponding to the other side of the workpiece are ejected toward the workpiece The air bends the aforementioned workpiece. The invention of claim 6 is the d-line device of the fifth aspect of the patent application, characterized in that the plurality of air passage holes have the function of emptyly adsorbing the workpiece... toward the mouth of the workpiece. The function is a combination of a plurality of m through holes of a system for vacuum adsorbing the workpiece and a combination of a plurality of air flow holes for ejecting air to the workpiece. The invention of "," is based on the first or the application of the patent, and the feature is that at least a part of the other side of the workpiece is fixed to the side of the work described above. The invention of the eighth item is a secant device, which is provided with a slanting portion of the work table 'carrying a predetermined engraving k piece - the side 眷 97110933 8 { 切 微 微 刖 刖 刖 刖 工件 工件The pre-decision tool abuts, and cuts the aforementioned two-two along the predetermined part: the part makes the workpiece as a phase 77, so that the other tool is scored on the workpiece with respect to the Shen-Dung. The invention of the ninth item is in the "8 item t-item scribing device, a returning to the J-to-curve, and on the aforementioned workbench... for the two-character line to close and mark the workpiece w" The aforementioned one side of the one piece is predetermined, and the other side of the workpiece, that is, the to the side of the scribe line portion is not fixed. The secant section x' of the 10th fixed scribe stroke before the scheduled scribe is provided: the package is placed on the pre-stage, and the other side of the workpiece is floated in the air. Two:: set (set) to make the state of the front float and to shoot the second t; and, in the air, the aforementioned line part is made; two::::: abut, along the predetermined Steps on the scribe line: such as::, = move, and the patent scope is available. The position of the scribe line of the piece is provided with two yokes = on the table. In the foregoing: / the raft is in contact with the work 4, the workpiece is positioned to make the workpiece on the other side. : in the step of the workbench; and, in the scribe line portion, the workpiece is abutted, and the workpiece is slanted along the predetermined workpiece to move relative to the workpiece, and in the step of _ phantom line; Such a scribing method. 97110933 丄337984 (Effect of the invention) According to the invention of the scope of the patent application, the force necessary for the growth of the force (in the surface of the workpiece and the force of the gas: vertical crack) is only required to release the workpiece. The other side; ^ orthogonal direction does not work. Therefore, 'vertical cracks can easily grow, and it can be suppressed. X, the flatness of the growth table of the workpiece on the table, the thickness of the workpiece, etc. External 2: If there is a force, then its power will directly affect the workpiece, and the damage will be caused. However, if the workpiece is floated in the air, the amount of the workpiece can be increased by the bending of the workpiece. _ * The remaining force quality is degraded. # 掉 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止 防止According to the invention of claim 3, the invention floats in the air from the workbench.

根據申凊專利範圍第4項之發明 薄片作為支點其可使工件彎曲。 根據申請專利範圍第5項之發明’藉由自設在工作台之 二氣通過孔朝向工件之另一邊側喷出空氣，則可使工件彎 曲。 根據申睛專利範圍第6項之發明，藉使吸附工件之系統 的空氣流通孔之組合以及朝向工件噴出空氣之系統的空 氣流通孔之組合而作變化時，則可在一個工作台上形成複 數條劃線。 97110933 1337984 根據申請專利範圍第7項之發明，其可使工件之另一邊 側在空中浮起。 根據申請專利範圍第8項之發明，抑制為了使垂直裂紋 成長所必要力的向量（在工件的表面内和劃線呈正交方向 的力量）之力，僅須解除工件之另一邊側的固定即可使其 不作用。因此，可容易地使垂直裂紋成長，也可抑制水^ 裂紋之成長。 在工件上刻劃閉合曲線之劃線而要使工件斷裂時，為了 得到安定的剖面形&，在劃線時使垂直裂紋深人渗透為其 必須之條件。根據申請專利範圍第9項之發明，則沿著閉 合曲線之劃線可使垂直裂紋作深入的滲透。 根據申請專利範圍第10項之發明’抑制為了使垂直裂 紋成長所必要之力的向量（在工件的表面内和劃線呈正^ 方向的力量）之力，僅須解除工件之另一邊側的固定即可 使其不作用。因此，其可容易地使垂直裂紋成長，並 制水平裂紋之成長。又，在工作台上對工件劃線之方式， :有因工作：之平坦度、工件的厚度變化等外在因素而發 生餘剩的力量冑，則該力量會直接影響到卫件，而對 有加予損傷之虞。但如藉使工件在空中浮起，則並 工件之彎曲變形而放掉’因此其可防止劃後工 件之品質劣化。 & 根據申請專利範圍第U項之發明，抑制為了 紋成長所必要之力的向量（在工件的 奴 方向的力量）之力，僅須解除工件 乂 力 邊側的固定即可 97110933 1337984 使其不作用。因此，其可容易地使垂直裂紋成長，並可抑 制水平裂紋之成長。 【實施方式】 以下依照附圖說明本發明之第一實施形態的劃線裝 置:圖1表示劃線裝置之斜視圖。由玻璃、半導體等脆性 材料所成之薄板狀的工件被載置於劃線裝置之工作台1 在平坦的工作台1上開設複數個吸附孔，而可吸附載 置在工作台1之工件w。工作台i係藉設在基礎框芊2上 =多動機構的γ轴移動機構3而在水平面内之γ方 在Υ軸移動機構3之平台3a上設有對準（定位）用 轉機構4。而在此一機構4上則二= 線==:::=rr)5。長柱5延伸至劃 6可使劃線頭8在水之平 安步方y * 轴方向移動。劃線頭8祐 機構而在上下之上。劃線頭8係藉Z軸移動 度迴轉之迴轉軸藉由在水平面内360 呈算盤珠狀而在垂直面内刀具係 有鑽石之點 錯石刀。 $之刀具輪，或在前端埋入 在開始劃線時，在工作台 機構4而作工件讯之^軸；位，載*置工件说，藉Θ軸迴轉 軸移動機構3作工件$之 ，再藉χ軸移動機構6及y 了後’藉“Μ多動機構而使::座，立。工件W定位終 97Π0933 線碩8之刀具10下降，並 12 1337984 將刀具10抵接工件W的表面。對刀具 得到既定之切入量後，藉乂軸 于負何，而在 至X方向，同時，藉Y:移:ΖΓ6將劃線頭8移動 向移動時，則在使，1朝向γ方 線ϊ /士水平面内可刻劃任意之刻 、在本貝㈣態中，係在卫件面形成四角形 呈圓弧狀之閉合曲線的劃線L。 圖2表示被吸附在工作台i上之工件？的平面 表不被吸附在工作台i上之丄件^剖面圖。在工作 二m w之前’於工作台i與工件w之間被介存 片(sheet) i i。一沿著工件w預定刻劃劃線l部份則形成四 :的框狀之溥片U。又’使工件w包夾著預定被刻割 里J線L部份的一邊側（框狀之薄片u的内側）藉由真* 吸附而接觸並固^於工作台ljL。因此如圖3u)所示二 薄片内周緣變成工件¥的彎曲變形之支點而工件w 則彎曲’且工件w包夾著預定被刻劃劃線L部份的另一邊 侧（框狀之薄片π的外側）之全體則變成自工作台i在 空中浮起之狀態。預定刻劃劃線L的部份自支點12被配 置在薄片11的外側，而在預定刻劃劃線L部份之正下方 則呈中空。當使工件W固定於工作台1之狀態，工件界浮 起在空中的部份則不會被加予.彎曲力矩或負荷。 §使刀具1 〇抵接在空中浮起狀態的工件w，而在刀具 10上附加負荷時，如圖3 (B)所示，刀具1〇則壓彎工件 W而使刀纟1〇之抵接側的工件w之表面發生拉伸應力（換 言之，工件W在上方成為凸的曲面）。此時，工件w在空 97110933 13 1337984 中浮起之部份，則被賦加僅來自刀具1 0的負荷。 在此狀態下，X轴移動機構6及Υ軸移動機構3，沿著 預定刻劃劃線L部份而使刀具1 〇相對於工件w作相對移 動時，則在工件W上刻劃劃線l。在工件W之另—邊側， 抑制使垂直裂紋成長所必要的力並未作用，因此，可使垂 直裂紋容易成長。又，在玻璃的表面上所發生之拉伸應力 因為可作用於使所發生之垂直裂紋成長’因此，其可使垂 直裂紋使其更為成長至工件W内部為止。According to the invention of claim 4, the sheet is used as a fulcrum to bend the workpiece. According to the invention of claim 5, the workpiece can be bent by ejecting air toward the other side of the workpiece through the second gas passage hole provided in the table. According to the invention of claim 6, the combination of the air flow holes of the system for adsorbing the workpiece and the combination of the air flow holes of the system for ejecting the air toward the workpiece can form plural numbers on one work table. Lines. 97110933 1337984 According to the invention of claim 7, the other side of the workpiece can be floated in the air. According to the invention of claim 8 of the invention, the force of the vector (the force in the direction orthogonal to the scribe line in the surface of the workpiece) for suppressing the growth of the vertical crack is suppressed, and only the other side of the workpiece must be released. Can make it not work. Therefore, the vertical crack can be easily grown, and the growth of the water crack can be suppressed. When the workpiece is scored on the workpiece by scribe the curve of the closed curve and the workpiece is broken, it is necessary to make the vertical crack penetrate deep into the line in order to obtain a stable profile shape & According to the invention of claim 9 of the patent application, the vertical crack can be deeply penetrated by the scribe line along the closed curve. According to the invention of claim 10, the force of the vector (the force in the positive direction of the surface of the workpiece and the scribe line) for suppressing the force necessary for the vertical crack to grow is only required to fix the other side of the workpiece. Can make it not work. Therefore, it is easy to grow vertical cracks and to grow horizontal cracks. Moreover, the method of scribing the workpiece on the workbench: there is a residual force due to external factors such as the flatness of the work: the thickness of the workpiece, etc., the force directly affects the guard, and the Add damage to the cockroach. However, if the workpiece is floated in the air, the workpiece is bent and deformed, so that it can prevent the quality of the post-cut workpiece from deteriorating. & According to the invention of the U.S. patent application, the force of the vector (the force in the slave direction of the workpiece) for suppressing the force necessary for the grain growth is only required to release the side of the workpiece force to be fixed 97110933 1337984 Does not work. Therefore, it can easily grow vertical cracks and suppress the growth of horizontal cracks. [Embodiment] A scribing apparatus according to a first embodiment of the present invention will be described below with reference to the drawings: Fig. 1 is a perspective view showing a scribing apparatus. A thin plate-shaped workpiece made of a brittle material such as glass or semiconductor is placed on the table 1 of the scribing device. A plurality of adsorption holes are formed in the flat table 1, and the workpiece placed on the table 1 can be adsorbed. . The table i is provided with the γ-axis moving mechanism 3 of the multi-motion mechanism on the base frame 芊 2, and the γ-square in the horizontal plane is provided with the aligning (positioning) rotation mechanism 4 on the platform 3a of the y-axis moving mechanism 3 . On this institution 4, the second = line ==:::=rr)5. The extension of the long post 5 to the stroke 6 allows the scribing head 8 to move in the y* axis direction of the water level. The scribing head 8 is above the upper and lower sides of the mechanism. The scribing head 8 is rotated by the Z-axis. The rotary axis of the swivel is made of 360 in the horizontal plane and the diamond is in the vertical plane. The tool wheel of $, or embedded in the front end at the beginning of the scribing, is used as the workpiece axis in the table mechanism 4; the position, the * workpiece is placed, by the axis rotary axis moving mechanism 3 as the workpiece $, Then, by the axis moving mechanism 6 and y, the 'borrowing' multi-moving mechanism is used to:: seat, stand. The workpiece W is positioned at the end of 97Π0933, the tool 10 of the line 8 is lowered, and 12 1337984 the tool 10 is abutted against the workpiece W. Surface. After the tool has a predetermined cut amount, the axis is in the negative direction, and in the X direction, while Y: shift: ΖΓ6 moves the scribing head 8 to move, then, 1 is made to the γ side. The line ϊ / 士 can be scribed at any time in the horizontal plane. In the 贝 (4) state, a scribe line L with a rectangular arc-shaped closed curve is formed on the Guard surface. Figure 2 shows the adsorption on the table i. The plane table of the workpiece is not adsorbed on the table i of the table i. Before the work 2 mw, the sheet is placed between the table i and the workpiece w. ii. The scribing part 1 forms a four-framed U-shaped piece U. In addition, the workpiece w is sandwiched between the side of the J-line portion of the J-line to be cut ( The inner side of the sheet u is contacted by the true* adsorption and fixed to the table ljL. Therefore, as shown in Fig. 3u), the inner circumference of the two sheets becomes the fulcrum of the bending deformation of the workpiece ¥ and the workpiece w is bent 'and the workpiece w The other side of the other side (the outer side of the frame-shaped sheet π) on which the predetermined scribe line L is sandwiched is in a state of floating from the table i in the air. The partial stipulation of the scribe line L is predetermined. 12 is disposed on the outer side of the sheet 11, and is hollow just below the portion of the predetermined score line L. When the workpiece W is fixed to the table 1, the portion of the workpiece that floats in the air does not It is added to the bending moment or load. §After the tool 1 〇 abuts the workpiece w in the floating state in the air, and when the load is added to the tool 10, as shown in Fig. 3 (B), the tool 1 压 bends the workpiece W causes tensile stress to occur on the surface of the workpiece w on the abutting side of the blade 1 (in other words, the workpiece W becomes a convex curved surface at the top). At this time, the workpiece w is floated in the empty 97110933 13 1337984, Then, the load from the tool 10 is added. In this state, the X-axis moving mechanism 6 and the x-axis shift The mechanism 3 scribes the scribe line 1 on the workpiece W along the predetermined scribe line portion L to move the tool 1 相对 relative to the workpiece w. On the other side of the workpiece W, the suppression is vertical. The force necessary for the crack growth does not work, so that the vertical crack can be easily grown. Moreover, the tensile stress occurring on the surface of the glass can act to cause the vertical crack to occur. Therefore, it can be vertical. The crack grows to the inside of the workpiece W.

又刀具10係在薄片的上方之工件w上刻劃劃線L。當 將刀具10按壓在工件W上時，由於薄片u彎 件W之支樓，因此其可使劃線L安定。 而成為工 形成劃線L後’工件w沿著劃線L被斷裂。在此斷裂步 驟中，使工件W沿劃線L折彎，並使工件w表面的垂直裂 紋到達工件背面則丄件w被斷裂。沿著閉合曲線之劃 線L而要使工件W斷裂時，則自玻璃基板成為如拔出閉合 曲線之模具狀地斷裂。為了使丄件w容易斷裂，如在割線 步驟中，自玻璃基板的端部到達劃線L為止形成破棄線， :此亦可。當使工件W沿著劃、線L及破棄線作多次斷裂 時’則可容易地使工件W斷裂。 材：=直線乂之執跡(異謂開(斷裂)板狀的脆性 紋开^為了付* &的剖面形狀，在劃線時則使垂直裂 圓水^, 女疋條件。例如，要使玻璃斷裂成 圓弧形狀時，假如不能使垂 定蛮直裂紋形成深入滲透，則由於 斷裂時成長之垂直裂紋會直续 罝線刖進，因此，則不能追隨圓 97110933 弧形狀的劃線L。因此，形成畫mL之工件w的表面和相 反側之工件W的背面之玻璃形狀則不能成為圓弧形狀。 又，劃線時如垂直裂紋太淺，則斷裂時須要大的彎曲力情 =:裂時玻璃彼此之間會有磨擦’而會對製品部份有大 為了使垂直裂紋有高渗透性，以往僅能使用特殊的工且 或對其加予振動之方法，但普通的刀具輪則難以使垂直裂 ㈣深入滲透。然而，如藉在工件w與工作台】之間夾著 薄片11 a寺’則即使普通的刀具輪也可容易地得到深的垂 直裂紋之劃線L。又在閉合曲線上劃線時，因為亦可得到 垂直裂紋深的劃線L，因此，其可以成為對製品有最 傷之斷裂。 ' 圖4表示工作台1之其他例。此例係在工作台31上嗖 有複數個空氣通過孔32。至少在Μ著劃線l之工件°w 的-邊側之至少-部份所配置的複數個空氣通過孔，用來 真空吸附工件W之一邊側，而固定工件⑺的一邊側於工作 台31上。配置於丄件w之另__邊側的複數個线通過孔 32 ’朝向工件W之另一邊側噴出空氣，而使工件W之另-，側％曲，並使工件w之另一邊側浮起在空中。如此，如 精由真空吸附與正壓空氣喷出之組合，則即使不使用薄片 11亦可使工件w彎曲。在此例中，於刀具1〇抵接工件w 之位^ ’為了使工件w自工作台31上浮起，工件W在自 工作台31洋起之位置33，被配置於刀具1〇抵接工件w 的位置之吸附固定側（圖中之左侧）。而被配置在浮起位 97110933 15 1337984 置33與刀具ι〇抵接工件界的 t ^ ^ 罝之間的空氣通過孔32, 則朝向工件W噴出空氣。 圖5表示工作台I之另—徊甘 個八他例。在此例中，複數個 空氣流通孔42a〜42g呈有可士 岛.古 s J切換.真空吸附工件w之功 能；以及，朝工件W喰屮咖名+丄& 赁出二軋之功能。被排列成縱一行之 複數健氣流通孔42a〜42g被匯集成—個系統，而一個 系統之空氣流通孔42a〜42g複數行被設在橫方向。真空 吸附系統的行數及喷心氣“的行數可配合卫件w的 劃線L位置而變化。當使直空明丁別_ w 田1文具工及附工件W之系統的複數個 空氣流通孔42a〜42g之組合以及朝工件w噴出空氣之系 統的複數個空氣流通孔42a〜42g之組合變化，則可以吸 附工件W之一邊側’而在另一邊側則噴出空氣之狀態而完 成複數條的劃線L。亦即，在一個工作台41即可形成複 數條劃線L。又，如藉使真空吸附與正壓之空氣喷出作組 合即可自如地得到玻璃的凸形狀。 圖6表示工作台1之另一個其他例。此例並非使工件w 在工作台51上彎曲，而是使工件w自工作台51露出，而 將工件W在空中浮起之狀態。亦即，包夾著劃線L·之工件 W的另一邊側在以自工作台51露出之狀態，而使工件w 之一邊側的至少一部份固定於工作台51上。工件w則被 外伸支持在工作台51上’而刀具10在抵接工件w之位置 於空中浮起。當刀具10抵接工件W時，刀具1〇則壓彎工 件W而使刀具1 〇抵接側的工件w之表面發生拉伸應力。 圖7表示本發明之第二實施形態的劃線裝置之工作 97110933 16 1337984 此貧細形態中，工件]y令辦^ a + ·*<«· L部份夕石、惠、， 王體（包夾者預定刻劃劃線 件讲全體接觸在工作台2]上面—的作：21的上面，工 劃劃線L部份之工件w的惠面。又，其僅包夾著預定刻 而之件W的一邊側被固定在工作台21上， 邊側全體則未被固定在工 工作A 〇 1 2 1卞σ Z1上。在此例中之 σ 21 ’抑制為了使垂直梦 工件IV Mm 成長所必要力的向量（在 T w之表面内和劃線[呈正 解除工件又方向的力）之力，只要藉 紋可容易2: 定即不會作用。因此，垂直裂 工作台21上係使工成長。但是，由於在 21上之平心 slJ4之方式，因此’當因工作台 剩的力量時，其力量則會直接t素而發生餘 有損傷之虞。 1會直接衫響到工件W，而對工件w 圖8及圖9表示第-會始形 之其他例。 帛-實…之劃線震置的工作台21 如圖8所示’亦可在預定 份之下方形成溝部23。又，如二二的=線L部 之另-邊側的-部份自工作台24露出：使… “之實施形態，只要在不變更本 閉Si曰：各種變更。例如，劃線並不限於 閉合曲線，也可形成為直線狀。 Μ小丨㈣ 雖然刀具對工件係相對移 任一者固定，而僅使另一者移動。仁也可使刀具或工件之 上述實施形態雖然自工件的上 Η更刀具抵接，但也可自 97110933 17 1337984 工件的下側使刀具抵接。 在上述實施形態中，雖然使用薄片將工件彎曲，但只要 可使工件彎曲則任何手段均可。例如，也可取代以薄片之 推壓力而使用壓電致動器。 本說明書係根據2007年3月30曰在曰本申請之特願 2007-095047號。其内容全部包含在此處。 【圖式簡單說明】Further, the cutter 10 scribes the scribe line L on the workpiece w above the sheet. When the cutter 10 is pressed against the workpiece W, it can stabilize the score line L due to the branch of the sheet u-bend member W. When the workpiece is formed into the scribe line L, the workpiece w is broken along the scribe line L. In this breaking step, the workpiece W is bent along the scribe line L, and the vertical crack on the surface of the workpiece w reaches the back surface of the workpiece, and the dam member w is broken. When the workpiece W is to be broken along the line L of the closed curve, the glass substrate is broken like a mold having a closed curve. In order to easily break the element w, as in the securing step, a break line is formed from the end of the glass substrate to the scribe line L, which is also possible. When the workpiece W is broken a plurality of times along the line, the line L, and the break line, the workpiece W can be easily broken. Material: = 乂 乂 ( ( ( 异 ( ( ( ( ( ( ( ( ( ( ( ( 执 执 执 执 执 执 执 执 执 执 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了 为了When the glass is broken into a circular arc shape, if the vertical straight crack does not form a deep penetration, the vertical crack that grows during the fracture will be directly twisted and twisted, so the circular line of the shape of the arc of 97110933 cannot be followed. L. Therefore, the glass shape forming the surface of the workpiece w in which the mL is formed and the back surface of the workpiece W on the opposite side cannot be an arc shape. Further, if the vertical crack is too shallow when scribing, a large bending force is required at the time of the fracture. =: There will be friction between the glass when cracking, and there will be a large part of the product in order to make the vertical crack have high permeability. In the past, only special work or vibration can be applied, but ordinary tools It is difficult for the wheel to penetrate vertically (4). However, if the sheet 11a is sandwiched between the workpiece w and the table, even a normal tool wheel can easily obtain a deep vertical crack line L. When you scribe on the closed curve, because A scribe line L having a vertical crack depth can be obtained, so that it can be the most severe fracture to the product. ' Figure 4 shows another example of the table 1. This example has a plurality of air passage holes 32 on the table 31. At least a plurality of air passage holes disposed at least in a portion of the side of the workpiece -ww of the scribe line l for vacuum suctioning one side of the workpiece W, and fixing one side of the workpiece (7) to the table 31. A plurality of wires disposed on the other side of the member w are ejected toward the other side of the workpiece W through the hole 32', and the other side of the workpiece W is bent, and the workpiece w is another The side is floated up in the air. Thus, if the combination of vacuum suction and positive pressure air ejection is used, the workpiece w can be bent without using the sheet 11. In this example, the workpiece 1 is abutted against the workpiece w. In order to float the workpiece w from the table 31, the workpiece W is placed at the position 33 from the table 31, and is disposed on the adsorption fixed side (left side in the figure) where the tool 1 abuts the workpiece w. And is placed in the floating position 97110933 15 1337984 set 33 and the tool ι〇 abut the workpiece boundary t ^ ^ The air passing between the crucibles passes through the holes 32, and then the air is ejected toward the workpiece W. Fig. 5 shows another example of the table I. In this example, a plurality of air circulation holes 42a to 42g are provided with a Keshi Island. . The ancient s J switch. The function of vacuum absorbing the workpiece w; and the function of levying two rollings toward the workpiece W. The plurality of healthy airflow through holes 42a to 42g arranged in a row are gathered into a system in which a plurality of rows of air flow holes 42a to 42g of one system are disposed in the lateral direction. The number of rows of the vacuum adsorption system and the number of rows of the jetting gas can be changed in accordance with the position of the scribing L of the guard w.直直明丁别_w The combination of the plurality of air flow holes 42a to 42g of the system of the stationery and the workpiece W, and the combination of the plurality of air flow holes 42a to 42g of the system for discharging the air to the workpiece w are changed. A plurality of scribe lines L can be completed by adsorbing one side of the workpiece W and discharging air on the other side. That is, a plurality of lines L can be formed on one table 41. Further, the convex shape of the glass can be freely obtained by combining the vacuum adsorption with the air ejection of the positive pressure. FIG. 6 shows another example of the table 1. In this example, the workpiece w is not bent on the table 51, but the workpiece w is exposed from the table 51, and the workpiece W is floated in the air. That is, the other side of the workpiece W sandwiching the scribe line L is exposed from the table 51, and at least a part of the side of the workpiece w is fixed to the table 51. The workpiece w is supported on the table 51 while the tool 10 is floated in the air at a position abutting the workpiece w. When the cutter 10 abuts against the workpiece W, the cutter 1 bends the workpiece W to cause tensile stress on the surface of the workpiece w on the abutting side of the cutter 1 . Fig. 7 shows the operation of the scribing device according to the second embodiment of the present invention. 97110933 16 1337984 In the lean form, the workpiece]y is made to be a + · * * < «· L part of the stone, Hui, and the body (The folder holder is scheduled to scribe the line to say that the whole contact is on the workbench 2] - the top of the work piece 21, the work surface of the work part of the line L is marked with the face w. On the other hand, one side of the member W is fixed to the table 21, and the entire side is not fixed to the work A 〇 1 2 1 卞 σ Z1. In this example, σ 21 ' is suppressed in order to make the vertical dream workpiece IV The vector of the force necessary for Mm to grow (the force in the surface of T w and the line [the force that is releasing the direction of the workpiece in the direction of the workpiece), as long as the borrowing pattern can be easily 2: will not work. Therefore, the vertical split table 21 It is because of the way of the slJ4 on the 21st, so when the power left by the workbench, its power will be directly affected by the damage. The workpiece W, and the workpiece w, Fig. 8 and Fig. 9, show another example of the first-initial shape. As shown in Fig. 8, the groove portion 23 may be formed below the predetermined portion. Further, if the other side of the line L portion is exposed from the table 24, the embodiment is as follows: The change is not changed. For example, the scribe line is not limited to the closed curve, and may be formed in a straight line. Μ 丨 (4) Although the tool is fixed to the workpiece relative to any one of the workpieces, only the other is moved. In addition, the above-described embodiment of the tool or the workpiece may abut the tool from the upper jaw of the workpiece, but the tool may be abutted from the lower side of the workpiece at 97110933 17 1337984. In the above embodiment, the workpiece is bent using a sheet. However, any means can be used as long as the workpiece can be bent. For example, a piezoelectric actuator can be used instead of the pressing force of the sheet. The present specification is based on the special wish 2007-30 of 2007. No. 095047. The contents are all included here. [Simplified illustration]

圖1係本發明之第一實施形態的劃線裝置之斜視圖。 圖2係被吸附在工作台上之工件的頂視圖。 圖3係被吸附在工作台上之工件的剖面圖（圖中（八 表示吸附固定時，圖中⑴表示附加負荷時之圖）。Fig. 1 is a perspective view showing a scribing device according to a first embodiment of the present invention. Figure 2 is a top view of the workpiece being attracted to the table. Fig. 3 is a cross-sectional view of a workpiece adsorbed on a table (in the figure (eight shows the figure when the adsorption is fixed, and (1) shows the figure when the load is attached).

圖4表示本發明之第一實施形態的劃線裝置之工 的其他例之剖面圖。 D 表示本發明之第一實施形態的劃線裝置 園Fig. 4 is a cross-sectional view showing another example of the work of the scribing apparatus according to the first embodiment of the present invention. D represents the scribing device of the first embodiment of the present invention

--U 的另外一個其他例之頂視圖 圖6表示本發明之第一實施形態的劃線裝置之工 的另外一個其他例之剖面圖。 σ 圖7係本發明之第二實施形態的劃線裝置 剖面圖。 W 〇的 之工作台 之工作台 圖8表示本發明之第二實施形態的劃 的其他例之剖面圖。 ^ 圖9表示本發明之第二實施形態的則飨 的另-個其他例之剖面圖。 線襄置 圖表示以往的劃線裝置之工作台的剖面圖 97110933 18 工作台 基礎框架 Y軸移動機構 平台 (9軸迴轉機構 長柱 X軸移動機構 劃線頭 迴轉轴承 刀具 薄片 支點 溝部 空氣通過孔 浮起位置 空氣流通孔 劃線 工件 1337984 【主要元件符號說明】 1、21、22、24 工作台 31 ' 41 ' 51 2 3 3a 4 5 6 8 9 10 11 12 23 32 33 42a〜42g- Top view of another example of U. Fig. 6 is a cross-sectional view showing another example of the work of the scribing apparatus according to the first embodiment of the present invention. σ Fig. 7 is a cross-sectional view showing a scribing apparatus according to a second embodiment of the present invention. Table of the table of the W 图 Fig. 8 is a cross-sectional view showing another example of the drawing of the second embodiment of the present invention. Fig. 9 is a cross-sectional view showing another example of the second embodiment of the present invention. The line drawing shows the sectional view of the table of the conventional scribing device. 97110933. 18 The table base frame Y-axis moving mechanism platform (9-axis swivel mechanism long column X-axis moving mechanism scribing head slewing bearing tool blade fulcrum groove air passage hole Floating position air circulation hole scribing workpiece 1337984 [Main component symbol description] 1, 21, 22, 24 Table 31 ' 41 ' 51 2 3 3a 4 5 6 8 9 10 11 12 23 32 33 42a~42g

LL

W 97110933 19W 97110933 19

Claims (1)

j C年[月v日衝幻正替換:p>。v f 申請專利範^ JUN 3 0 2010 替換本 h 一種劃線裝置，其具備有·· 工作台，包央著預定刻劃工件 少一部份;/51金，n 1 尺I物之一邊側的至 狀態；及， 迓训則子起在空中之 相對移動機構，以在空中洋 份使刀1f /予起之狀恕在預定刻劃劃線部 :刀具抵接’沿著預定刻劃前 工件相對移動，而在俞十从 仍便刀具對别述 ^向在刖述工件上刻劃劃線。 2.如ΐ請專利範圍第1項割 在抵接前述工件時，C 衣置其中，前述刀具 刀且二 具將前述工件壓青，而使前述 ;、由』側之刖述工件的表面上發生拉伸應力。 • 5月專利扼圍第1或2項之劃線裝置，其中，並且 有可使前述工件蠻曲二Α 件弓曲，而自前述工作台使前述工件之前述 另側洋起的工件彎曲手段。 /申。月專利範圍第3項之劃線裝置，其中， =工件f曲手段被設在沿著預定㈣前述工件之前 ^ ^而由介存於前述工件與前述工作台間之薄片 所構成， 而藉^使月$工件之前述H則固定在前述工作台 上以別述薄片作為支點使前述工件彎曲。 L如申請專利範圍第4項之劃線裝置’其中， 前述工件蠻曲& α , 与干& ’由設在前述工作台之複數個空氣通 過孔所構成， @對應於刖&工件之前述-邊側的複數個$氣通過孔 97110933 1337984 作!·真空吸附前述工件之-邊側，同時，對應於 ::侔之”述另一邊側的複數個空氣通過孔則朝著前 "/，j 14另—邊侧噴*空氣而使前述工件彎曲。 t t凊專利範圍第5項之劃線裝置，其中， 前述複數個空氣通 ϋ功处·《 -孔，具有可切換：真空吸附前述工 .. 朝向刖述工件噴出空氣之功能； 之組合及件之系統的複數個空氣流通孔 通孔之組件喷出空氣之系統的複數個空氣流 =:專利範圍第1或2項之劃線裝置，其中， 則述劃線係閉合曲線， 而在前述工作合卜，今 前述工件之H 6月1述工件的前述一邊側之預定刻劃 月J這件之則述劃線部份的内側之至少 前述工件的前述另一邊 77 疋 線部份之外側則未被固定。疋刻“述工件的前述劃 8. 如申請專利範11第1或2項之㈣裝f，， 工件之前述另一邊側以自 /、月” 述工件之前述一邊側的至二部態，而使前 9. -種劃線裝置，其具備有 …述工作台上。 作口，包夾著預定刻劃工件的 少一部份被闳f， —、·‘ °卩知之一邊側的至 相料Γ 使另一邊側接觸但未被固定，1， 、移動機構，在預定刻劃前 刀μ接’沿著預定刻劃前述劃線部線部= 工件相對移動，而在前述工件上刻關t34刀具對前述 97120933 21 1337984 10. —種劃線方法，其具備有： 使包央者預定刻書彳工株沾查丨从 部份固定在工作台C:份之-邊側的至少〜 (set)使#作台切前述工件定位 驟，·及， 另一邊側呈在空中浮起之狀態的步 以在空中浮起之狀態在狀使 接，沿著預定刻劃前述劃線部份使刀具對前=;抵 動’而在前述工件上刻劃劃線之步驟。 子移 11. 一種劃線方法，其具備有： 使包夾著預定刻劃工件的劃線部份之一邊側的至小— 部份j在工作台上’而在前述工作台上將前述工件i位 側接觸前述卫作台但未被固定於前述工作台之 在預定刻劃前述工件之前述劃線部份使刀 預定刻劃前述劃線部份使刀具對前述工件相對移 = 前述工件上刻劃劃線之步驟。 在 97110933 22 1337984 圖 2/5 JUN 3 0 201Q 替換貢 (A)j C year [month v day rushing is replacing: p>. Vf Patent application model ^ JUN 3 0 2010 Replacement this h A scribing device with a workbench with a part of the predetermined scoring workpiece; /51 gold, one side of the n 1 foot I To the state; and, the training is to move the relative movement mechanism in the air to make the knife 1f / pre-emptive in the air to pre-scribe the scribe line: the tool abuts the workpiece along the predetermined scribe Move, and in Yu Yu, the tool is scribed on the workpiece. 2. If the first item of the patent scope is cut to abut the workpiece, the C garment is placed therein, and the cutter knife and the two workpieces are pressed against the workpiece, so that the above-mentioned; Tensile stress occurs. • The scribe line of the first or second item of the May patent, wherein there is a bending means for the workpiece which causes the aforementioned workpiece to be bent and the other side of the workpiece from the aforementioned table . / Shen. The scribing device of the third aspect of the patent, wherein the = workpiece f is formed by a sheet interposed between the workpiece and the table along the predetermined (four) workpiece, and The aforementioned H of the month $ workpiece is fixed on the aforementioned table to bend the workpiece by using a sheet as a fulcrum. L is the scribing device of claim 4, wherein the aforementioned workpieces & a, and dry & ' are formed by a plurality of air passage holes provided in the aforementioned table, @ corresponds to 刖 & The aforementioned - a plurality of sides of the side gas through the hole 97110933 1337984! · Vacuum adsorption of the side of the workpiece - while at the same time, corresponding to: "侔" said the other side of the plurality of air through the hole is toward the front &quot ; /, j 14 another - side spraying * air to bend the workpiece. tt 凊 凊 凊 第 第 第 第 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Adsorption of the above-mentioned work: a function of venting the air to the workpiece; a combination of a plurality of air flow holes of the system of the components of the system, a plurality of air streams of the system for ejecting air =: Patent No. 1 or 2 a scribing device, wherein the scribing line is a closed curve, and in the foregoing work, the predetermined scribe month of the workpiece on the side of the H-month of the workpiece At least the aforementioned workpiece On the other side, the outer side of the 77-line portion is not fixed. The engraving of the above-mentioned stroke of the workpiece is as described in the first or second item of the patent specification 11 (4), and the other side of the workpiece is And the month to the second side of the workpiece, and the first ninth type of scribing device is provided with a table on the table. The mouth is sandwiched with a small portion of the predetermined scoring workpiece. The 闳f, —,··°° know one side of the side to the side of the material Γ the other side of the contact but not fixed, 1, the moving mechanism, before the predetermined scribe, the knife is connected to the plan The line part of the line = the relative movement of the workpiece, and the cutter on the aforementioned workpiece is engraved with the tool of the above-mentioned 97120933 21 1337984 10. The method of scribing is provided with the following: The parts are fixed on the table C: at least - (set) on the side of the side to make the workpiece positioning step, and the other side is in a state of floating in the air to float in the air. In the shape of the connection, the aforementioned scribe line portion is scribed along the predetermined direction so that the cutter is facing the front =; Step of scribing the piece. Sub-shift 11. A scribing method, which is provided with: a small to the side of one side of the scribing portion of the predetermined scoring workpiece - part j on the workbench' And the scribe portion of the workpiece is inscribed on the work surface with the workpiece i-side side contacting the illuminating table but not fixed to the working table, and the scribe portion is predetermined to scribe the scribe line portion to make the knives The relative movement of the aforementioned workpiece = the step of scribing the workpiece on the aforementioned workpiece. In 97110933 22 1337984 Figure 2/5 JUN 3 0 201Q Replacement Gong (A) y-i 吸附固定 V (B)Y-i adsorption fixed V (B) 1〇 yv 吸附固定 11 1 圖1〇 yv adsorption fixed 11 1 figure 3131