TWI644873B - Scoring wheel and scoring device - Google Patents
Scoring wheel and scoring device Download PDFInfo
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- TWI644873B TWI644873B TW104102510A TW104102510A TWI644873B TW I644873 B TWI644873 B TW I644873B TW 104102510 A TW104102510 A TW 104102510A TW 104102510 A TW104102510 A TW 104102510A TW I644873 B TWI644873 B TW I644873B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/07—Cutting armoured, multi-layered, coated or laminated, glass products
- C03B33/072—Armoured glass, i.e. comprising reinforcement
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
- C03B33/105—Details of cutting or scoring means, e.g. tips
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
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Abstract
本發明提供一種能夠對脆性材料基板藉由「外切」方法以低負載確實地形成刻劃線之刀輪及刻劃裝置。 The invention provides a scoring wheel and a scoring device capable of reliably forming a scribe line with a low load by a "outcut" method on a brittle material substrate.
具備有由成為刃前端之圓形稜線21、與從該稜線連續之左右斜面22a、22b構成之刃前端區域20的刀輪A，其由左右斜面22a、22b形成之刃前端角度α為125°以上之鈍角，刃前端區域20之寬度L1，以與預定之刻劃線之寬度相等或者為其以下之值即10μm~30μm形成。 The cutter wheel A is provided with a circular edge line 21 serving as a cutting edge and a cutting edge front region 20 formed by the horizontal left and right inclined surfaces 22a and 22b. The cutting edge front angle α formed by the left and right inclined surfaces 22a and 22b is 125 °. In the above obtuse angle, the width L1 of the blade tip region 20 is formed to be equal to or smaller than the width of the predetermined scribe line, that is, 10 μm to 30 μm.
Description
本發明係關於一種用於對脆性材料基板、尤其是對包含強化玻璃之玻璃基板進行刻劃之刀輪及刻劃裝置。此處，所謂的「強化玻璃」，係以藉由在製造步驟中的離子交換之化學性處理，而在玻璃板之表面層(從表面起深度為5μm~50μm左右)形成壓縮應力殘留之壓縮應力層，且在玻璃板內部殘留伸張應力的方式所製造出的玻璃。 The invention relates to a cutter wheel and a scoring device for scoring a brittle material substrate, especially a glass substrate containing tempered glass. Here, the so-called "strengthened glass" is a compression of residual compressive stress formed on the surface layer of the glass plate (the depth from the surface is about 5 μm to 50 μm) by chemical treatment of ion exchange in the manufacturing process. A glass produced by a method in which a stress layer and a tensile stress remain in the glass plate.
強化玻璃之特徵，具有因壓縮應力層的影響而對於外力難以破裂之性質，相反地，一旦在玻璃板表面產生龜裂並進展至殘留伸張應力存在之玻璃板內部，則於當下反而有使龜裂變得容易加深浸透的性質。 The characteristics of strengthened glass have the property that it is difficult to be broken by external forces due to the influence of the compressive stress layer. On the contrary, once cracks occur on the surface of the glass plate and progress to the inside of the glass plate where residual tensile stress is present, it will actually make the turtle Cracking becomes easy to deepen the nature of penetration.
一般而言，以刀輪分斷玻璃板之方法，係由首先利用刀輪(亦稱刻劃輪)在玻璃板表面形成有限深度的刻劃線(肋痕)之步驟、及其後藉由從玻璃板之背側沿刻劃線以裂斷桿或裂斷滾筒進行按壓而裂斷之步驟構成(參照專利文獻1及專利文獻2)。 Generally speaking, the method of cutting a glass plate by a cutter wheel is a step of first forming a scribe line (rib mark) of limited depth on the surface of the glass plate with a cutter wheel (also known as a scribe wheel), and thereafter by The step of scoring by pressing a rupture lever or a rupture roller along the scribe line from the back side of the glass plate constitutes a step of breaking (see Patent Documents 1 and 2).
在以刀輪刻劃玻璃板之方法中，存在有「外切」與「內切」，且外切與內切之刻劃方法可根據玻璃板之種類或厚度、用途，而選擇性地分開使用(參照專利文獻2)。 In the method of scoring a glass plate with a knife wheel, there are "outside cut" and "inside cut", and the method of scoring outside and inside can be selectively separated according to the type, thickness, and use of the glass plate Used (see Patent Document 2).
專利文獻1：日本特許第3074143號公報 Patent Document 1: Japanese Patent No. 3074143
專利文獻2：日本特開2009-208237號公報 Patent Document 2: Japanese Patent Application Laid-Open No. 2009-208237
前者之「外切」，如圖7(a)所示，係以如下之方式進行刻劃 之方法：將刀輪K之最下端以下降至較玻璃板M表面(上面)稍微下方的狀態下，設定在玻璃板M之單側端部之外側位置(刻劃開始位置)。然後，使刀輪K從設定位置水平移動，與玻璃板M端部碰撞而形成初始痕，進一步地一邊以既定之刻劃壓按壓、一邊水平移動。 The "cut-out" of the former, as shown in Figure 7 (a), is scored as follows Method: Set the position below the lower end of the cutter wheel K slightly below the surface (upper surface) of the glass plate M, and set it at a position outside the one-side end of the glass plate M (the scribe starting position). Then, the cutter wheel K is moved horizontally from the set position to collide with the end of the glass plate M to form an initial mark, and further moved horizontally while pressing and pressing with a predetermined score.
在上述之外切手段(方法)中，刀輪K之刃前端在玻璃板M 端部之刻入(侵入)佳，能夠容易形成初始痕，並且由於已加工之刻劃線到達至玻璃板M之端部，因此在接下來的步驟中之裂斷能夠容易且正確地進行。 In the above-mentioned cutting method (method), the tip of the blade of the cutter wheel K is on the glass plate M The end portion is well engraved (intruded), and an initial mark can be easily formed. Since the processed scribe line reaches the end portion of the glass plate M, the fracture in the next step can be easily and accurately performed.
然而，在強化玻璃板之情形，因其表面層之殘留應力的影響而對於使刃前端侵入玻璃板端部需要較強的按壓負載，尤其是在如圖8所示般之已將端面R進行倒角處理之基板，由於刃前端容易滑動，因此必須設定更強的按壓負載，使在基板端部之碰撞時之衝擊變大。因此，有時會有在強化玻璃板之端部產生缺欠，從玻璃板端部破斷且不規則之龜裂先行等情況。此外，亦在刀輪側因與強化玻璃板端部有較強的碰撞而容易產生刃前端之磨耗或刃損傷等，使得使用壽命變短。 However, in the case of a strengthened glass plate, due to the residual stress of the surface layer, a strong pressing load is required for the edge of the blade to penetrate the end of the glass plate, especially when the end surface R has been processed as shown in FIG. 8. For the chamfered substrate, since the tip of the blade is easy to slide, it is necessary to set a stronger pressing load, so that the impact at the end of the substrate becomes larger. For this reason, there may be cases where a defect is generated at the end of the strengthened glass sheet, the glass sheet is broken from the end of the glass sheet, and irregular cracks may advance. In addition, due to the strong collision with the end of the tempered glass plate on the cutter wheel side, it is easy to cause abrasion of the cutting edge or damage to the cutting edge, which shortens the service life.
後者之「內切」，如圖7(b)所示，係以如下之方式進行刻劃之方法：在從玻璃板M之端緣起2mm~10mm左右內側(刻劃開始位置)使刀輪K從上方下降並以既定之刻劃壓抵接於玻璃板M，一邊按壓一邊使刀輪K水平移動。 The "incision" of the latter, as shown in Fig. 7 (b), is a method of scoring in such a way that the cutter wheel K is placed on the inner side (starting position of scoring) of 2 to 10 mm from the edge of the glass plate M It descends from above and abuts against the glass plate M with a predetermined scribe, and moves the cutter wheel K horizontally while pressing.
在上述之內切手段中，由於刀輪K並不會有與玻璃板M端部碰撞般的情形，因此不會有在玻璃板M端部產生缺欠的情況。此外，關 於刃前端之耗損亦相較於外切的情形能夠獲得抑制。 In the above-mentioned incision method, since the cutter wheel K does not collide with the end portion of the glass plate M, there is no possibility that a defect is generated at the end portion of the glass plate M. In addition, off The wear at the tip of the blade can also be suppressed compared to the circumcision.
然而，在強化玻璃板之情形，在使刃前端往下按壓並抵接於玻璃板表面時，刃前端往玻璃板表面層之侵入非常地不佳，因此，有時會有因滑動產生而使刻劃加工變困難的情形。此外，有時會存在如以下等的不佳情況：為了使刃前端侵入而若以較強之按壓負載進行刻劃，則因強化玻璃板內部之殘留伸張應力的影響而導致一次性破斷而完全分斷，若將刃前端之前端角度設為較小，則使得不規則之龜裂產生於刃前端之行進方向前方的先行情況容易產生。 However, in the case of a strengthened glass plate, when the front edge of the blade is pressed down and abuts against the surface of the glass plate, the penetration of the front edge of the blade into the surface layer of the glass plate is very poor. Therefore, it may be caused by sliding. Scribe processing becomes difficult. In addition, there are cases where there is a disadvantage such that if the scribe is performed with a strong pressing load in order to penetrate the blade tip, a one-time break due to the influence of the residual tensile stress inside the strengthened glass plate may cause Completely breaking, if the angle of the front end of the cutting edge is set to be small, it is easy to cause an advance situation in which an irregular crack is generated in front of the direction of travel of the cutting edge.
如此般，對強化玻璃板之刻劃加工，與對習知所使用之碳酸 鈉玻璃板等之刻劃加工不同，即使是藉由「外切」，或即使是藉由「內切」，均難以良好地形成刻劃線。該傾向，在玻璃板表面之壓縮應力層較厚且殘留應力較大之玻璃板、或如保護液晶表面之覆蓋玻璃等般呈曲線狀對4個角落進行刻劃的情形更明顯地出現。 In this way, the scribing of tempered glass plates and the carbonic acid used in conventional methods The scoring processing of soda glass plates and the like is different, and it is difficult to form the scribe line well even by "outward cutting" or even "inward cutting". This tendency is more pronounced when the four corners are marked in a curved shape such as a glass plate with a thick compressive stress layer on the surface of the glass plate and a large residual stress, or a cover glass that protects the liquid crystal surface.
因此，本發明之目的在於提供一種即使是對加工困難之強化 玻璃製之玻璃板，亦能夠藉由「外切」之手段以低負載並確實地形成刻劃線之刀輪及刻劃裝置。 It is therefore an object of the present invention to provide a reinforcement even for processing difficulties A glass plate made of glass can also form a scoring wheel and scoring device with a low load by means of "outside cutting".
為了達成上述目的，在本發明中提出了如以下般之技術性手 段。亦即，本發明之刀輪，係具備由成為刃前端之圓形稜線、與從該稜線連續之左右斜面構成之刃前端區域；其成為如下之構成：由該左右斜面形成之刃前端角度為125°以上之鈍角；該刃前端區域之寬度，與預定之刻劃線之寬度相等或者為其以下之值，並為10μm~30μm。 In order to achieve the above purpose, the following technical measures are proposed in the present invention segment. That is, the cutter wheel of the present invention is provided with a blade front end region composed of a circular edge line that becomes the front end of the blade and a left and right inclined surface continuous from the edge line. It has the following configuration: The front end angle of the blade formed by the left and right inclined surface is An obtuse angle of more than 125 °; the width of the front end region of the blade is equal to or less than the width of a predetermined scribe line, and is 10 μm to 30 μm.
本發明之刀輪，係安裝在被組入於刻劃裝置之刻劃頭之保持 具，且於對在平台上所載置之強化玻璃板以「外切」之手段進行刻劃時使用。其具有以下之效果：在該刻劃時，由於已將刃前端區域之寬度設成為與預定之刻劃線之寬度相等或者為其以下之值並為10μm~30μm之細窄寬度，因此在外切之步驟中，在刃前端騎上強化玻璃板之端部時，藉由刃前端施加集中負載而藉此即使是低負載亦能夠有效率地形成初始痕，且能夠使接著進行的刻劃線加工以較習知的刀輪更低之負載形成。此外，刃前端區域之寬度即使較小，由於刃前端角度為125°以上之鈍角，因此(龜裂)先行難以產生，此外能夠維持刻劃所必需的刃前端強度，並能夠抑制刃損傷等。 The cutter wheel of the present invention is installed on the holder of the scoring head which is incorporated in the scoring device. It is used when scoring the strengthened glass plate placed on the platform by "outer cutting". It has the following effect: at the time of the scribe, the width of the front edge region of the blade has been set to be equal to the width of the predetermined scribe line or a value below it and a narrow width of 10 μm to 30 μm, so it is cut outside In this step, when the front end of the blade rides on the end of the tempered glass plate, a concentrated load is applied to the front end of the blade, so that the initial mark can be efficiently formed even at a low load, and the subsequent scribe process can be performed. It is formed with a lower load than the conventional cutter wheel. In addition, even if the width of the blade tip region is small, since the blade tip angle is an obtuse angle of 125 ° or more, (cracking) is hardly generated in advance, and the blade tip strength necessary for scoring can be maintained, and blade damage can be suppressed.
在上述發明中，較佳為設成如下之構成：該刀輪以可放電加 工之材料形成，且刀輪之左右寬度形成為較該刃前端區域之寬度大，連結該刀輪左右側面與該稜線的左右之傾斜面之一部分，藉由放電加工切除而藉此形成該刃前端區域。 In the above invention, it is preferable to provide a structure in which the cutter wheel is The cutting tool is made of material, and the left and right width of the cutter wheel is formed to be larger than the width of the front end region of the blade. Front-end area.
藉此，僅將放電加工之治具電極按壓於左右之傾斜面，而能夠容易且精密地加工寬度狹窄且細微之刃前端區域，並且由於藉由放電加工切除之凹部，並非接觸於刻劃時應加工之玻璃板而進行刻劃的部分，因此無需精加工研磨等之後置處理，而能夠以原狀態作為製品使用。此外，寬度狹窄之刃前端區域，與已將左右寬度設成較刃前端區域寬之刀輪之本體部分連接而受到支承，因此能夠保持刻劃所必需之強度，且能夠抑制刻劃中之破損。 Thereby, only by pressing the jig electrode of the electric discharge machining on the left and right inclined surfaces, it is possible to easily and accurately process the narrow and fine edge area of the blade, and the recessed portion removed by the electric discharge machining is not in contact with the scribe The part to be scribed should be processed glass plate, so there is no need for post-processing such as finishing grinding, but it can be used as a product in its original state. In addition, the narrow front edge of the blade is connected to and supported by the body of the cutter wheel whose left and right widths are set wider than the front edge of the blade, so it can maintain the strength necessary for scoring and suppress damage during scoring. .
A‧‧‧刀輪 A‧‧‧ knife wheel
L1‧‧‧刃前端區域之寬度 L1‧‧‧Width of front edge area
L2‧‧‧刀輪之寬度 L2‧‧‧Width of knife wheel
W‧‧‧強化玻璃 W‧‧‧Tempered glass
α‧‧‧刃前端角度 α‧‧‧ blade front angle
1‧‧‧平台 1‧‧‧ platform
10‧‧‧刻劃頭 10‧‧‧ Scribble head
11‧‧‧保持具 11‧‧‧ holder
20‧‧‧刃前端區域 20‧‧‧Blade front area
21‧‧‧刃前端稜線 21‧‧‧Front edge edge
22a、22b‧‧‧左右斜面 22a, 22b
23‧‧‧凹部 23‧‧‧ recess
圖1，係表示本發明之刻劃裝置之概略性的前視圖。 FIG. 1 is a schematic front view showing the scoring device of the present invention.
圖2，係表示本發明之刀輪的前視圖。 Fig. 2 is a front view showing a cutter wheel of the present invention.
圖3，係表示圖2之刀輪之刃前端區域的放大剖面圖。 FIG. 3 is an enlarged cross-sectional view showing a front end region of a blade of the cutter wheel of FIG. 2.
圖4，係表示刀輪騎上強化玻璃之端部之狀態的放大剖面圖。 Fig. 4 is an enlarged cross-sectional view showing a state in which the cutter wheel rides on the end portion of the tempered glass.
圖5，係表示刃前端加工前之刀輪的前視圖。 Fig. 5 is a front view showing a cutter wheel before machining of a cutting edge.
圖6，係對刀輪以形雕放電加工實施凹部時的說明圖。 FIG. 6 is an explanatory diagram when a concave portion is formed by performing electric discharge machining on a cutter wheel.
圖7，係表示外切與內切之手段的說明圖。 FIG. 7 is an explanatory diagram showing the means of incision and incision.
圖8，係表示應加工之強化玻璃之端部的立體圖。 FIG. 8 is a perspective view showing an end portion of tempered glass to be processed.
以下，針對本發明之刀輪及使用該刀輪之刻劃裝置，根據圖式詳細地進行說明。 Hereinafter, the cutter wheel of the present invention and the scoring device using the cutter wheel will be described in detail with reference to the drawings.
圖1係表示本發明之刻劃裝置，其具備有載置並保持脆性材料基板W之平台1。作為脆性材料基板，可例舉如玻璃基板、或由低溫燒成陶瓷或高溫燒成陶瓷等構成之陶瓷基板、矽基板、化合物半導體基板、藍寶石基板、石英基板等。在本實施例中，使用強化玻璃板作為脆性材料基板。平台1，成為可沿水平之軌條2於Y方向(圖1之前後方向)移動，由藉由馬達(未圖示)旋轉之螺桿軸3驅動。進一步地，平台1成為可藉由內藏馬達之旋轉驅動部4而於水平面內旋動。 FIG. 1 shows a scoring device according to the present invention, which includes a stage 1 on which a fragile material substrate W is placed and held. Examples of the brittle material substrate include glass substrates, ceramic substrates composed of low-temperature fired ceramics or high-temperature fired ceramics, silicon substrates, compound semiconductor substrates, sapphire substrates, and quartz substrates. In this embodiment, a tempered glass plate is used as the brittle material substrate. The platform 1 is movable along the horizontal rail 2 in the Y direction (forward and backward directions in FIG. 1) and is driven by a screw shaft 3 rotated by a motor (not shown). Further, the platform 1 can be rotated in a horizontal plane by a rotation driving portion 4 with a built-in motor.
具備有夾著平台1設置的兩側之支承柱5、5、及於X方向水平延伸之樑(橫樑)6的橋架7，以跨越平台1上之方式設置。在樑6，設置有於X方向水平延伸之導引件9，在該導引件9安裝刻劃頭10以使該刻劃頭10成為可藉由馬達8而於X方向移動。 A bridge 7 including support columns 5 and 5 provided on both sides of the platform 1 and a beam (transverse beam) 6 extending horizontally in the X direction is provided so as to straddle the platform 1. A guide 9 extending horizontally in the X direction is provided on the beam 6. A scoring head 10 is mounted on the guide 9 so that the scoring head 10 can be moved in the X direction by a motor 8.
在刻劃頭10之下部，設置有保持具11，該保持具11保持 刀輪A，該刀輪A對載置於平台1上之強化玻璃W表面進行刻劃加工。保持具11，形成為可藉由流體汽缸12而與刀輪A一起升降。 A holder 11 is provided below the scoring head 10, and the holder 11 holds A cutter wheel A for scoring a surface of a tempered glass W mounted on the platform 1. The holder 11 is formed so as to be able to be raised and lowered together with the cutter wheel A by the fluid cylinder 12.
圖2係表示本發明之刀輪A的前視圖。圖3係其刃前端區域之放大剖面圖。 Fig. 2 is a front view showing a cutter wheel A of the present invention. Fig. 3 is an enlarged cross-sectional view of the front end region of the blade.
刀輪A，由工具特性佳之硬質材料作成，且在周面具備有刃前端區域20。刃前端區域20，藉由成為刃前端之圓形稜線21、及從該刃前端稜線21連續之左右斜面22a、22b而形成。左右斜面22a、22b之傾斜端與凹部23之邊緣連接。凹部23，如圖3所示，以鑿入延長左右斜面22a、22b而成之假想傾斜面24a、24b之方式形成，藉此使刃前端區域20之左右寬度L1變細。 The cutter wheel A is made of a hard material having excellent tool characteristics, and has a cutting edge region 20 on the peripheral surface. The blade tip region 20 is formed by a circular ridge line 21 that becomes the blade tip and left and right inclined surfaces 22 a and 22 b that are continuous from the blade tip ridge 21. The inclined ends of the left and right inclined surfaces 22 a and 22 b are connected to the edges of the recessed portion 23. As shown in FIG. 3, the recessed portion 23 is formed by digging into hypothetical inclined surfaces 24 a and 24 b formed by extending the left and right inclined surfaces 22 a and 22 b, thereby narrowing the left and right width L1 of the blade tip region 20.
該刃前端20之左右寬度L1以與被加工之刻劃線之預定寬度相等或者其以下之附近值設定，形成為10μm~30μm、較佳為10μm~20μm之範圍內。此處，刻劃線之預定寬度由刃前端稜線之角度α、與刃前端區域20之一部分侵入於基板之深度計算而求出。例如，在刃前端角度為140°、刃前端之侵入深度為3μm時，預定之刻劃線之寬度約為16μm，在刃前端角度為150°、刃前端之侵入深度為3μm時之刻劃線預定寬度約為22μm。刃前端區域20之寬度L1，較佳為設定成與該刻劃線之預定寬度相同、或較其小之值。但是，在刃前端區域20之寬度L1小於10μm的情形時，則難以保持突出之刃前端區域20之強度。 The left and right width L1 of the cutting edge tip 20 is set to a value equal to or less than a predetermined width of the scribe line to be processed, and is formed in a range of 10 μm to 30 μm, preferably 10 μm to 20 μm. Here, the predetermined width of the score line is calculated from the angle α of the edge line of the blade tip and the depth that a part of the blade tip region 20 penetrates into the substrate. For example, when the blade tip angle is 140 ° and the penetration depth of the blade tip is 3 μm, the width of the predetermined scribe line is about 16 μm, and when the blade tip angle is 150 ° and the penetration depth of the blade tip is 3 μm, the scribe line is scribed. The predetermined width is about 22 μm. The width L1 of the blade tip region 20 is preferably set to be the same as or smaller than the predetermined width of the scribe line. However, when the width L1 of the blade tip region 20 is less than 10 μm, it is difficult to maintain the strength of the protruding blade tip region 20.
此外，刀輪A之直徑以約0.5mm~6.0mm、較佳為1.0mm~3.0mm之尺寸形成，厚度L2以約0.4mm~1.2mm之尺寸形成，藉由刃前端區域20之左右斜面22a、22b而形成之刃前端稜線之角度α，以125°以上之鈍角、較佳為 140°~160°形成。此外，凹部23之深度為從假想傾斜面24a、24b起1.0μm~30.0μm、較佳為3.0μm~10.0μm。 In addition, the diameter of the cutter wheel A is formed in a size of about 0.5 mm to 6.0 mm, preferably 1.0 mm to 3.0 mm, and the thickness L2 is formed in a size of about 0.4 mm to 1.2 mm. And 22b, the angle α of the edge of the edge of the edge of the blade is an obtuse angle of 125 ° or more, preferably 140 ° ~ 160 °. The depth of the recessed portion 23 is 1.0 μm to 30.0 μm, preferably 3.0 μm to 10.0 μm, from the virtual inclined surfaces 24 a and 24 b.
在本實施例中，將刀輪A之直徑設為2.5mm、厚度L2設為0.65mm、刃前端角度α設為150°、刃前端區域20之寬度L1設為15μm。此外，刃前端之侵入深度一般為1.0μm~5.0μm、較佳為1.0μm~3.0μm。 In this embodiment, the diameter of the cutter wheel A is set to 2.5 mm, the thickness L2 is set to 0.65 mm, the blade tip angle α is set to 150 °, and the width L1 of the blade tip region 20 is set to 15 μm. In addition, the penetration depth of the blade tip is generally 1.0 μm to 5.0 μm, and preferably 1.0 μm to 3.0 μm.
上述之刀輪A，例如可以如以下般之加工方法而容易製作。 The cutter wheel A described above can be easily manufactured by, for example, the following processing method.
如圖5所示，以可放電加工之硬質材料，例如超硬合金或燒結鑽石、具有導電性之單結晶鑽石或多結晶鑽石，製作具備有圓形之刃前端稜線21’及與其相連結之左右之傾斜面25、25的刀輪B。在該情形，將由左右之傾斜面25、25所形成之刃前端角度α，設成與成為製品之刀輪A之刃前端角度相同。如此般之刀輪B，若刃前端角度α與成為製品之刀輪A之刃前端角度相同，則亦可維持不變地利用一般的刻劃用刀輪。此外，作為刀輪B，亦可使用在刃前端稜線21’部分設有溝槽之刀輪。 As shown in FIG. 5, using a hard material capable of electrical discharge machining, such as cemented carbide or sintered diamond, conductive single crystal diamond or polycrystalline diamond, a round edge 21 'with a sharp edge at the front end and a connection therewith are produced. Cutter wheels B of the left and right inclined surfaces 25, 25. In this case, the blade tip angle α formed by the left and right inclined surfaces 25 and 25 is set to be the same as the blade tip angle of the cutter wheel A which is a product. In such a cutter wheel B, if the blade tip angle α is the same as the blade tip angle of the cutter wheel A to be a product, a general scoring cutter wheel can also be used unchanged. In addition, as the cutter wheel B, a cutter wheel having a groove on the edge 21 'of the cutting edge can also be used.
保留該刀輪B之刃前端稜線21’附近之前端部分(成為圖2之刃前端區域20的部分)，並藉由將連續於前端部分之左右之傾斜面25、25之一部分以放電加工切除而形成凹部23(參照圖3)。 The front end portion near the front edge 21 'of the cutting edge of the cutter wheel B (the portion that becomes the front end area 20 of the cutting edge of FIG. 2) is retained, and one of the inclined surfaces 25, 25 continuous to the left and right of the front end portion is removed by electric discharge machining. A recessed portion 23 is formed (see FIG. 3).
藉此，能夠藉由對在圖5所示之刀輪B進行追加加工而形成本發明之刀輪A。 Thereby, the cutter wheel A of the present invention can be formed by performing additional processing on the cutter wheel B shown in FIG. 5.
此處，對刀輪B以形雕放電加工來加工凹部23之方法之一例表示於圖6。 Here, an example of a method for machining the concave portion 23 by the contour discharge machining of the cutter wheel B is shown in FIG. 6.
在該方法中，在刀輪B之軸孔26嵌入旋轉軸(未圖示)，藉由一邊使刀輪B旋轉，一邊將具備具有應切除之部分之顛倒形狀之母模27的治具電極 28，對進行旋轉之刀輪B之左右之傾斜面25、25同時地或交互地按壓而以1.0μm~30.0μm之深度切除傾斜面25之一部分。藉此，製作形成有凹部23之刀輪A，該凹部23係連續於刀輪B之刃前端稜線21’之左右之傾斜面25、25的一部分陷入，且使刃前端區域20之寬度L1(參照圖3)變狹窄。 In this method, a rotating shaft (not shown) is fitted into the shaft hole 26 of the cutter wheel B, and a jig electrode provided with a female mold 27 having an inverted shape of a portion to be cut off is rotated while the cutter wheel B is rotated. 28. The inclined surfaces 25, 25 on the left and right of the rotating cutter wheel B are simultaneously or alternately pressed to cut out a part of the inclined surface 25 at a depth of 1.0 μm to 30.0 μm. As a result, a cutter wheel A is formed with a recessed portion 23, which is part of the inclined surfaces 25, 25 which are continuous to the left and right edges 21 of the blade edge of the cutter wheel B, and the width L1 of the blade tip region 20 ( (Refer to FIG. 3).
在使用上述之刀輪A進行刻劃加工的情形時，將該刀輪A 安裝於刻劃頭10之保持具11。然後，在使平台1移動而進行強化玻璃W之定位後，使刀輪A下降，並利用上述之「外切」方法對強化玻璃W進行刻劃加工。 When using the above-mentioned cutter wheel A for scoring, the cutter wheel A The holder 11 is attached to the scoring head 10. Then, after the stage 1 is moved to position the tempered glass W, the cutter wheel A is lowered, and the tempered glass W is subjected to a scoring process by using the above-mentioned "outward cutting" method.
本發明者們，在將刀輪A之按壓負載以設成與習知的玻璃 板之刻劃負載相同地以0.14MPa之低負載進行了外切方法之強化玻璃W之刻劃實驗的結果，完成了在不產生缺欠或不規則破斷的情況下形成作為初始痕為充分深度之溝槽。 The inventors have set the pressing load of the cutter wheel A to a conventional glass The scoring load of the plate was also the result of the scoring experiment of tempered glass W which was cut-out method at a low load of 0.14 MPa, and it was completed to form a sufficient depth as the initial mark without defects or irregular breaks. Of the trench.
圖4係從上述實驗值推測刀輪A騎上強化玻璃W端部時之狀態的放大剖面圖。若將刃前端稜線21往玻璃板W之侵入深度L3設為3μm，則刃前端侵入之部分的寬度，由刃前端角度150°進行計算而為小於刃前端區域20之寬度L1及刻劃預定寬度之22μm的約15μm。如此般，即使是低負載亦能形成有效之初始痕，被認為係由於在較細地加工而成之刃前端區域20的部分集中負載之故。在形成該初始痕後，接著藉由使刀輪A一邊以上述按壓負載按壓、一邊行進，而能夠在強化玻璃W以刃前端區域20之寬度L1效率佳地形成刻劃線。 FIG. 4 is an enlarged sectional view of the state when the cutter wheel A rides on the end portion of the tempered glass W from the above experimental values. If the penetration depth L3 of the blade front edge line 21 into the glass plate W is set to 3 μm, the width of the portion where the blade front penetrates is calculated from the blade front angle 150 ° and is smaller than the width L1 of the blade front area 20 and the predetermined scribe width It is about 15 μm at 22 μm. In this way, it is considered that an effective initial mark can be formed even at a low load, and it is considered that the load is concentrated in a part of the blade front end region 20 which is finely processed. After the initial mark is formed, the scribe line A can then be efficiently formed with the width L1 of the edge region 20 of the blade by pressing the cutter wheel A while pressing with the above-mentioned pressing load.
此外，在本實施例中，由於寬度狹窄之刃前端區域20，係形成為與左右寬度設成較刃前端區域20寬之刀輪A之本體部分連接，因此能夠保持刻 劃所必需之強度，且能夠抑制刻劃中之破損。 In addition, in this embodiment, since the narrow blade front end region 20 is formed to be connected to the main body portion of the cutter wheel A whose left and right widths are set wider than the blade front region 20, it is possible to maintain the engraving. The strength necessary for the scratch, and it can suppress the damage in the scratch.
如上述般，本發明之刀輪A，由於將刃前端區域20之寬度L1，設成與預定之刻劃線之寬度相等或其以下之值、並為10μm~30μm之細窄寬度，因此在以外切方法使刃前端騎上強化玻璃W之端部時，由刃前端施以集中負載而即使是低負載亦能夠有效率地形成初始痕，並且能夠相較於習知的刀輪以低負載形成接著進行之刻劃線之加工。此外，即使刃前端區域20之寬度L1較小，由於刃前端角度為125°以上之鈍角，因此(龜裂)先行難以產生，且能夠維持刻劃所必需之刃前端強度並能夠抑制刃損傷等。 As described above, the cutter wheel A of the present invention sets the width L1 of the blade tip region 20 to a value equal to or less than the width of a predetermined scribe line and a narrow width of 10 μm to 30 μm. When the cutting edge is mounted on the edge of the tempered glass W by the cutting method, a concentrated load can be applied from the cutting edge to form an initial mark even at a low load, and the load can be lower than that of a conventional cutter wheel. A subsequent scribe process is formed. In addition, even if the width L1 of the blade tip region 20 is small, since the blade tip angle is an obtuse angle of 125 ° or more, it is difficult to generate (crack) in advance, and the blade tip strength necessary for scoring can be maintained, and blade damage can be suppressed. .
以上，雖已針對本發明之代表性的實施例進行了說明，但本發明並不特定於上述之實施形態，可在達成其目的、不脫離申請專利範圍之範圍內適當地進行修改、變更。 Although the representative embodiments of the present invention have been described above, the present invention is not specific to the above-mentioned embodiments, and can be appropriately modified and changed within the scope of achieving its purpose without departing from the scope of patent application.
本發明適用於對脆性材料基板進行刻劃線加工時所使用之刀輪及刻劃裝置。 The invention is suitable for a cutter wheel and a scoring device used when scribe processing of a brittle material substrate.
Claims (3)
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| JP2014090087A JP6332618B2 (en) | 2014-04-24 | 2014-04-24 | Scribing cutter wheel and scribing device |
| JPJP2014-090087 | 2014-04-24 |
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| TW201540682A TW201540682A (en) | 2015-11-01 |
| TWI644873B true TWI644873B (en) | 2018-12-21 |
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| KR (1) | KR20150123150A (en) |
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| JP2017119364A (en) * | 2015-12-28 | 2017-07-06 | 三星ダイヤモンド工業株式会社 | Scribing device and scribing method |
| JP6722917B2 (en) * | 2016-04-26 | 2020-07-15 | 三星ダイヤモンド工業株式会社 | Scribe head unit |
| JP2018015945A (en) * | 2016-07-26 | 2018-02-01 | 三星ダイヤモンド工業株式会社 | Diamond tool and scribe method thereof |
| KR20190024682A (en) * | 2017-08-31 | 2019-03-08 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | Scribing wheel, method of manufacturing the same, scribing method and holder unit |
| JP7206829B2 (en) * | 2018-11-15 | 2023-01-18 | 日本電気硝子株式会社 | METHOD FOR MANUFACTURING PLATE MEMBER AND LAMINATE |
| JP2021006374A (en) * | 2019-06-28 | 2021-01-21 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
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| TW201339114A (en) * | 2012-03-30 | 2013-10-01 | Mitsuboshi Diamond Ind Co Ltd | Groove processing tool and groove processing method and groove processing device of thin film solar cell using the same |
| JP2013220554A (en) * | 2012-04-13 | 2013-10-28 | Mitsuboshi Diamond Industrial Co Ltd | Scribing wheel and method of manufacturing the same |
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| JP4063951B2 (en) * | 1997-11-07 | 2008-03-19 | 株式会社ベルデックス | Scribing cutter, manufacturing method thereof, and scribing apparatus |
| US7401537B1 (en) * | 2004-03-23 | 2008-07-22 | David Krauter | Cutter insert gum modification method and apparatus |
| JP2010126382A (en) * | 2008-11-26 | 2010-06-10 | Joyo Kogaku Kk | Cutter wheel for cutting glass |
| JP5438422B2 (en) * | 2009-07-31 | 2014-03-12 | 三星ダイヤモンド工業株式会社 | Method and apparatus for processing brittle material substrate |
| JP5276547B2 (en) * | 2009-07-31 | 2013-08-28 | 三星ダイヤモンド工業株式会社 | Cutter wheel |
| JP5409726B2 (en) * | 2011-08-30 | 2014-02-05 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
| JP6077799B2 (en) * | 2012-08-31 | 2017-02-08 | 三星ダイヤモンド工業株式会社 | Cutter wheel and manufacturing method thereof |
| CN104175406B (en) * | 2013-05-24 | 2017-09-15 | 三星钻石工业股份有限公司 | Break bar and its manufacture method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201339114A (en) * | 2012-03-30 | 2013-10-01 | Mitsuboshi Diamond Ind Co Ltd | Groove processing tool and groove processing method and groove processing device of thin film solar cell using the same |
| JP2013220554A (en) * | 2012-04-13 | 2013-10-28 | Mitsuboshi Diamond Industrial Co Ltd | Scribing wheel and method of manufacturing the same |
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| JP6332618B2 (en) | 2018-05-30 |
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| TW201540682A (en) | 2015-11-01 |
| JP2015209342A (en) | 2015-11-24 |
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