1331079 九、發明說明： ―、【發明所屬之技術領域】 行 明係關於在印刷電路基板之製造中，將薄膜狀樹脂層堆 =的基板上的—種真空疊層裝置及利用此真空疊層裝 更詳言之，係有關—種真空疊層裝置及疊層方法， 後一萬次以上，薄膜狀樹脂層之追隨性亦佳，疊層後 的树脂之龍性優異，且有助於逐步建立(Build-up)施工法之施 二、【先前技術】 電路子夕產品之小型化、高性能化，而促進了印刷 ㈣"^反之"^度化、夕層化。於此一印刷電路基板的多層化中， ，行銅』=====予 刻，支禮膜之情形則係將Si予 (BuHd-upUt成而形成電路的方法，即所謂逐步建立 膨脹’夾住基板Μ薄膜接 千面力…裔所加熱的可撓性片 構仏之裝置的情形，僅於—大氣麗下使可撓性片麵的 6 1331079 發生微型以足’欲使基板與薄膜之間不 使可彡St 咖物，參__ ••在 可將基板與薄膜更強力加壓（以下，有 加屋豐層），可於精細圖案之基 (例如’參照專利文獻2) 士生砸工隙而能夠密貼 ίί^ΪΪ 2日本公開專利第平5·80號公報 專利文獻2】曰本公開專利S 2001-252936號公報 三、【發明内容】 璧解決之枯彳軒問雜 讀她於在—A氣壓下使可撓性片膨脹之情形，該專利 生片之耐久性將成為問題，可撓性片重複使ΐϊΐί 品成本增加之虞。另外，生產性降低與消耗 加壓力i人化之發展而要求增大對於可撓性片之 署承％更強之加塵力的可撓性片，並尋求—種疊層裝 亦ί於高?下即使重複使用-萬次以上，薄膜狀樹 月曰層之追Μ±^ ’且疊層後之樹脂密雜亦常保。 亦即，於制之疊層錢，可撓性片係如第 & 用按壓構件9，隔著缝層18而絲於 又 有财久性之問題存在。 1讀5 _造，故仍 解決問題之#術丰段 河撓性片4之間所形成的空間 ^之d料減轉成真空鹤，此時 之氧岔性，將密封構件14配置於下部平板6之2同工間邛7 接著，依各步驟順序，說明真空疊層步驟。 首先，實施抽真空之步驟。於第丨岡拉丄 麗機等，將薄膜狀樹脂層2暫時貼於^ ==自動切， 體，再將該被疊層體載置於可撓性片4 =材1之被璺層 氣筒15而使下部平板6上升，藉由 =啟動油壓或 14,使上部平板5得以密貼而形成片3而夾住密封構件 室内而從開口部13進行減屢。真空< 狀^宜於20秒以内形成»以下之真空 处抽真空開始起2〇秒鐘 1、工狀心更為理心。 下之時，於且右ru^m 1部7之屋力無法達到2〇〇Pa以 空隙，晶厗:二有.凸“的基材1與薄膜狀樹脂層2之間將殘留大型 ;^宜層叙鐵樹脂層2便無法達成與基材i之== 的古ir/吏如此之真空狀態得以實現的方法，可列兴：骆六旦士 办—幫浦予以數台並排後 二二士 空之容量大的桶样， ㈣万法，利用預先抽成向真 空室内之介咼真空度的方法；預先儘量減少真 的壓力ί;ΐί!ί種;=射器等而降低真空幫浦排氣倒' 於進行減4 ’也同時進行空隙部8之抽真空。 之溫度加熱至4'0=5t，^=可撓性片3、下側可撓性片4 如此之溫度若低於4。。「ίί為7Q〜135°c。不適當之情形如下： 狀樹脂層2，造魏=法於具有凹凸的基材1巾充填薄臈· 致薄膜狀樹脂層鱗大型^I若超過1蚊將導 之溫度的控制方法並叙;^之;?性降低而發生大型空隙。如此 部平板6的平面力诚;二，内藏於上部平板5與下 …、斋電熱同或条氣管等進行調整。 1331079 性片ίΐ ’ ΐ由空間部7與空隙部8之勤差，進行使上側可捷 使财邮的絲1與賴⑽脂層2予以 壓下如整’具體而言’最好於進行空間部7之減 撓性片’藉由如此之壓力差，上側可 義材1 卩7之方向膨脹，壓制薄膜狀樹脂層2而進行 基材1與4酿樹脂層2之f壓。 接著’進行提高空隙部8之壓力的層壓增壓步驟。 力使縮空氣導入空隙部8而提繼，進-步強 於予以膨服’強力緊壓基材1與薄膜狀樹脂層2。 =將步驟，層屋將變得確實，薄膜狀樹脂層2 7之ϊίίί壓^1壓步驟之後，使用開口部12、13，解除空間部 向隙部8之加壓狀態而回到常壓，使下部平板6 下移動，結束基材1與薄膜狀樹脂層2之疊層。 妖性ΐίΐΐί驟，所用之可撓性片3與4，其材質卫業上使用耐 橡膠或砍橡膠，而於本發明如此之可撓性片 、上為具有該特徵的可撓性片。 因\可撓性片3含有纖維層17，藉由含有如此之 杆六a r而忐夠提鬲可撓性片3之耐久性，即使於高溫下重複進 月’也能夠抑制可撓性片3之拉伸變形，發揮薄膜狀樹 17 ^羽於基材1之極佳的追隨性或密貼性之效果。不含纖維層 伸始可驗片’若於高溫下重複加壓層壓，可撓性片將容易 發生馳’發生鬆弛之位置形成敝，位於此處之被 宜θ體未破充分壓制而造成薄膜狀樹脂層2之密貼性不佳。 附加於可撓性片3之纖維層17，並無特別之限定，較宜 化子，維或玻璃纖維織成布狀之物，再將其設置於可撓性片3 、面或裏面而予以一體化，或是堆疊於可撓性片3之表面等。 1331079 於本發明之疊層方法所用之具有凹凸的基材i，並益特別之限 定’較宜為已施行銅等之圖案的印刷基板n ς; 組裝疊層之多疊層基板。 吧』乂馬用於 於本，明之疊層方法所用之薄臈狀樹脂層2較宜由 =要膜）或是_所構成的。如此之樹脂組成物， 性並 田14 + 1 将別之限制尤以絕緣材料更為有 Ξ樹可列舉:主要由環氧樹脂而成的熱硬化 乙稀性不飽和化合物、光聚合開起始 如此之支撐膜（隔離膜），可列舉：聚對 ，烯薄膜、聚丙烯薄膜、聚乙烯醇_、 i此之f膜狀樹脂層2的市售品’並無特別之限定，例如， y列舉一日本日立化成工業公司製之「βΓ系列」、「b as 日、Shfipley公司製之「M_QSIT-95㈣列」、 「Plobelec n Pr〇PyC〇at 系、列」、咖 Special 公司製之 Z]firm ^^^FValux ^.J, Ink ^*1； fm1331079 IX. Description of the invention: ―, the technical field to which the invention pertains is a vacuum lamination device on a substrate in which a film-like resin layer is stacked in the manufacture of a printed circuit board, and a vacuum lamination using the same More specifically, it is related to a vacuum lamination device and lamination method. After more than 10,000 times, the follow-up property of the film-like resin layer is also good, and the resin after lamination is excellent in the dragon's property and contributes to the gradual improvement. Build-up construction method 2, [prior technology] Circuit sub-products are miniaturized and high-performance, which promotes printing (4) "^ vice versa" In the multilayering of a printed circuit board, the copper is "=====", and the case of the film is Si (BuHd-upUt is formed into a circuit, that is, the so-called stepwise expansion) In the case of a device that clamps the substrate and the film is connected to the flexible sheet structure, the flexible sheet surface is made to be micro-sized to make the substrate and the film.不 咖 咖 咖 咖 , , 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板砸 砸 ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ ΪΪ 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 2001 Reading her to expand the flexible sheet under the pressure of -A, the durability of the patented green sheet will become a problem, and the flexible sheet will repeatedly increase the cost of the product. In addition, the productivity is reduced and the pressure is increased. The development of i humanization requires an increase in the number of flexible films. Dust-powered flexible sheet, and seeks for a kind of laminated device. Even if it is used repeatedly, even if it is repeatedly used - 10,000 times or more, the film-like tree layer is traced to ±^ ' and the resin after lamination is also dense. In other words, in the case of the laminated money, the flexible sheet is like the & pressing member 9, and there is a problem of long-lasting quality through the seam layer 18. 1 read 5 _, therefore The space formed by the #术丰段河Flexible sheet 4 is still reduced to a vacuum crane. At this time, the sealing member 14 is disposed in the lower chamber 6 of the same chamber.邛7 Next, the vacuum lamination step will be described in the order of the steps. First, the vacuuming step is carried out. The film-like resin layer 2 is temporarily attached to the ^^=auto-cut body in the 丨 丄 丄 丄 机 machine. Then, the laminated body is placed on the flexible sheet 4 = the layered material cylinder 15 of the material 1 to raise the lower flat plate 6, and the upper flat plate 5 is adhered to form a sheet by pressing the hydraulic pressure or 14 3, while clamping the inside of the sealing member and reducing it from the opening portion 13. The vacuum is preferably formed within 20 seconds. 1. The work heart is more sympathetic. Under the time, the right ru^m 1 part of the house can not reach 2〇〇Pa with voids, crystal 厗: two. convex “substrate 1 and film There will be a large residue between the resin layers 2; the layer of the iron resin layer 2 can not be achieved with the vacuum state of the ancient ir/吏 of the substrate i == can be realized: Luo Liudan Shi-- Pu will be given several barrels of large capacity after the second and second empty, (4) Wanfa, using the method of pre-extracting the vacuum into the vacuum chamber; pre-emptively reduce the true pressure ί; ΐί! The lowering of the vacuum pump venting by the ejector or the like is performed to reduce the vacuum of the gap portion 8 at the same time. The temperature is heated to 4'0=5t, ^= the flexible sheet 3, and the lower flexible sheet 4 is such that the temperature is lower than 4. . "ίί is 7Q~135°c. The case of inappropriateness is as follows: Resin layer 2, 造魏= method for the substrate with irregularities 1 towel filling thin 臈 · film-like resin layer scale large ^I if more than 1 mosquito will The control method of the temperature is also described; ^; the large gap occurs when the ?? is reduced. The plane of the plate 6 is such that the upper plate 5 and the lower plate 5, the electric heating or the gas pipe are adjusted. 1331079 Sex film ΐ ΐ ΐ ΐ ΐ ΐ 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间 空间The deghosting sheet of the space portion 7 is expanded by the pressure difference in the direction of the upper sapphire material 1 卩7, and the film-like resin layer 2 is pressed to press the pressure of the base material 1 and the 4 resin layer 2. A lamination pressurization step of increasing the pressure of the void portion 8 is performed. The force is introduced into the void portion 8 to advance, and the step is stronger than the expansion. The material 1 and the film-like resin layer 2 are strongly pressed. In the step, the layer house will become sure, and after the film-like resin layer 27 is pressed, the opening portions 12 and 13 are used to release The space portion is returned to the normal pressure in the pressurized state of the gap portion 8, and the lower flat plate 6 is moved downward to terminate the lamination of the base material 1 and the film-like resin layer 2. The flexible sheet 3 and the used flexible sheet 3 are used. 4, the material of the industry uses rubber-resistant or chopped rubber, and in the flexible sheet of the present invention, is a flexible sheet having the feature. The flexible sheet 3 contains the fibrous layer 17, by The durability of the flexible sheet 3 is improved by the rod 6 ar, and the stretching deformation of the flexible sheet 3 can be suppressed even if the moon is repeated at a high temperature, and the film-like tree 17 can be used as a base. The excellent followability or adhesion effect of the material 1. The fiber-free layer can be tested at the beginning of the test. If the pressure lamination is repeated at a high temperature, the flexible sheet will be prone to a position where the relaxation occurs. It is preferable that the θ body is not sufficiently broken and the adhesion of the film-like resin layer 2 is poor. The fiber layer 17 added to the flexible sheet 3 is not particularly limited, and is preferably a smear. The woven or glass fiber is woven into a cloth-like object, and then placed on the flexible sheet 3, the surface or the inside to be integrated. Or stacked on the surface of the flexible sheet 3. etc. 1331079 The substrate i having irregularities used in the lamination method of the present invention is particularly limited to a printed substrate n which is preferably a pattern in which copper or the like has been applied. Assembling a laminated multi-layer substrate. The hummer is used in the present invention, and the thin resin layer 2 used in the lamination method is preferably composed of a film or a film. , Shouhetian 14 + 1 will be more limited, especially insulating materials, there are more eucalyptus trees: thermosetting ethylenically unsaturated compounds mainly made of epoxy resin, photopolymerization to start such a support film ( The separator is not particularly limited as long as it is a commercially available product of the film-like resin layer 2, such as a poly-ply, an olefin film, a polypropylene film, or a polyvinyl alcohol _, i. For example, y exemplifies a Japanese Hitachi Chemical Co., Ltd. "βΓ series" manufactured by Industrial Co., Ltd., "b as day, "M_QSIT-95 (four) column" by Shfipley Co., Ltd., "Plobelec n Pr〇PyC〇at system, column", and Z]firm ^^^FValux by Special Company ^.J, Ink ^*1; fm
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rPCC ，乱體化子么司製之「CBR系列」、「c 1331079 2. 層壓壓制步驟 -面連續進行空間部7之抽真空，—面將空 到常壓’=側可撓性片3向空間部7側 ， 層體予以緊壓。 里肘皙時豐 3. 層壓增壓步驟 再者，將G. 5MPa之壓縮空氣導人空隙部8而進行 緊壓。之後’打開開口部12、13，使空 =之 大氣麼，結束基材i與薄膜狀樹脂層2之疊層。I㈠形成一 一到的疊層體，_得不到薄膜狀樹脂層2對於美材】 之岔，y為止’重複進行該步驟’依如下之標準 ‘。 ◎:即使重複進行2_次以上，密貼追隨性良好/ 〇.重複進行10000〜低於20000次，密貼追隨性不 △ .·重，進行5000〜低於10000二欠，密貼追隨性不佳。 二.重複進行低於5000次，密貼追隨性不佳。 係彻5G倍顯微鏡，進行薄膜狀樹 月曰滑2對於具有凹凸的基材丨之追隨性的_認，完全 充填於具有凹凸的基材1之凹部的情形欺為良好，、益法 狀樹脂層2充填於具有凹凸的基材1之凹部的情‘ 實施例2 =3圖所示，除了從實施例丨使狀上侧可撓性片3 曰層19，並將第！樹脂層16之厚度由—變更為— 進仃相同於實施例1之方式的評估。 比較例1 ，了從實施例1使用之上側可撓性片3省略纖維層17之 運仃相同於實施例1之方式的評估。 比較例2 谁〜，了從實施例2使用之上側可撓性片3省略纖維層17 硬仃相同於實施例1之方式的評估。 16 1331079 [表l] 將實施例與比較例之評估結果顯示於表irPCC, "CBR series", "c 1331079 2. Lamination pressing step - continuous vacuuming of the space portion 7 - surface will be empty to normal pressure" = side flexible sheet 3 On the side of the space portion 7, the layer body is pressed. The lining of the elbow is increased. 3. The lamination pressurization step is performed, and the compressed air of G. 5 MPa is introduced into the gap portion 8 to be pressed. Then, the opening portion 12 is opened. (13), the atmosphere of the air = the atmosphere, the lamination of the substrate i and the film-like resin layer 2 is completed. I (1) forms a laminate of one to one, _ can not obtain the film-like resin layer 2 for the US material, y 'Repeat this step' according to the following criteria. ◎: Even if it is repeated 2 times or more, the adherence of the adhesive is good / 〇. Repeatedly 10,000 to less than 20,000 times, the adherence of the adhesive is not △. , 5000 ~ less than 10000 owe, poor follow-up is not good. 2. Repeated less than 5000 times, poor adherence is not good. Complete the 5G microscope, film-like tree skating 2 for bumps The followability of the substrate 丨, the case of completely filling the concave portion of the substrate 1 having irregularities, is good, and benefits The resin layer 2 is filled in the concave portion of the substrate 1 having irregularities. As shown in the embodiment 2 = 3, except that the upper flexible sheet 3 is formed from the embodiment, and the ? resin is used. The thickness of the layer 16 was changed from - to - the evaluation in the same manner as in Example 1. Comparative Example 1, the operation of omitting the fiber layer 17 using the upper flexible sheet 3 from Example 1 was the same as in Example 1. Evaluation of the method. Comparative Example 2 Whoever used the upper flexible sheet 3 from Example 2 to omit the evaluation of the fiber layer 17 in the same manner as in Example 1. 16 1331079 [Table 1] The evaluation results of the comparative examples are shown in Table i.
【發明之效果】 空疊層|置及_它之疊層方法，該直 成疊ϋ[Α]之;♦、，設，堆疊薄膜狀樹脂層2而形 6之可撓性片4之間，如夾住㈣$=^了撓㈣3與下部平板 樹脂層2,抬起下部平板置具有凹凸的基材1與薄膜狀 之後，於上部平板;的雜部7抽成真空狀態 入空議縮空氣而使可撓性片3 J二：成㊁ ;性進行基材1與薄膜狀樹脂層2之緊;及i;: 為.可撓性片3具有纖維層17，薄膜狀植 二特斂[Effects of the Invention] The lamination method of the empty lamination|position and the _ it is a stacking method; ♦, and, between the flexible sheets 4 which are formed by stacking the film-like resin layer 2 and forming 6 For example, if the (4) $=^ is scratched (4) 3 and the lower flat resin layer 2, the lower substrate is raised with the uneven substrate 1 and the film is formed, and then the upper portion of the flat plate 7 is evacuated into a vacuum state. Air, the flexible sheet 3 J: two; the substrate 1 and the film-like resin layer 2 are tight; and i;: the flexible sheet 3 has a fiber layer 17, the film-like plant
= 性佳，疊層體之表面平滑“異Ίΐ對S 密貼“異^^基材之追隨性、 (Mld-UP)施叫非為了製造多層電路基板之逐步建立 五、【圖式簡單說明】 第1圖係顯示為了實施本發明所使用之真空疊祕置之一態 17= good, the surface of the laminate is smooth. "Issue vs. S-stick". Follow-up of the substrate. (Mld-UP) is not established for the purpose of manufacturing a multilayer circuit board. Figure 1 shows the vacuum stack used to implement the invention.