TWI322717B - Coating device - Google Patents

Coating device Download PDF

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Publication number
TWI322717B
TWI322717B TW096118479A TW96118479A TWI322717B TW I322717 B TWI322717 B TW I322717B TW 096118479 A TW096118479 A TW 096118479A TW 96118479 A TW96118479 A TW 96118479A TW I322717 B TWI322717 B TW I322717B
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TW
Taiwan
Prior art keywords
coating
gas
coated
moving direction
downstream side
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TW096118479A
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Chinese (zh)
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TW200824797A (en
Inventor
Hideyuki Sawada
Mitsuhiro Hida
Original Assignee
Chugai Ro Kogyo Kaisha Ltd
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Publication of TW200824797A publication Critical patent/TW200824797A/en
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Publication of TWI322717B publication Critical patent/TWI322717B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application

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  • Coating Apparatus (AREA)

Description

1322717 九、發明說明: [相關申請案] 本申請案係,主張基於日本專利申請案2〇〇6_ 337685 .號之優先權。 •【發明所屬之技術領域】 本發明係有關使設置有用以供給塗布液之呈裂縫狀之 流出口之塗布用模具對於被塗布物相對地移動,而使從上 ,流出口供給塗布液至被塗布物表面之塗布裝置,特別 是,具有即使在使用高黏度塗布液之情形,也能將此種高 黏度塗布液薄而平滑且平均地塗布至被塗布物表面之特徵 者。 【先前技術】 以往以來’在製造電漿顯示面板、有機電激發光 :eleCtroluminescence )顯示器面板 '液晶顯示器面板等之 時,進行於玻璃基板、樹脂薄膜、金屬荡等各種被塗布物 籲表面,經由塗布裝置塗布各種塗布液。 而且’以此種塗布裝置而言,例如,如第ι圖所示, 使用將於尖端^置有呈裂縫狀之流出D ^之塗布用模具 1〇設置於自呈板狀之被塗布物i表面隔著所需間隔之間隙 gp之位置,-面使此塗布用模具1〇相對於上述被塗布物 1移動,同時從此塗布用模具10之呈裂縫狀之流出口 η 供給塗布液2至上述被塗布W表面,於被塗布物!表面 塗布塗布液2者。 而且,近年來,正研究在如上述般進行塗布塗布液2 319276 5 丄~2717 於被塗布物1表面之時,為了使塗布液2等之成本減低, “隨著使塗布液2中含有之溶劑量減少,同時使於塗布於被 塗布物1表面之塗布液2厚度變薄之方法。 ' 在此,若如上述般使塗布液2中含有之溶劑量減少, 則此塗布液2黏度增加,而為了如此般將黏度高之塗布液 2+如上述般進行薄塗布於被塗布物i表面,若加速塗布用 模具ίο之移動速度,則供給於被塗布物丨表面之塗布液2 被塗布賴具10拖行,因此有出現塗布不均,或產生塗布 液中斷等之問題。 此外為了抑制如上述之塗布不均和塗布液中斷,在 2 ] ^布用模具10與被塗布物1表面之間隙Gp時,即如 第2圖所不般,呈現從流出口 i i至被塗布物^表面所供給 之塗布液2轉入至與塗布用模具1〇之移動方向相反側部分 之狀態被塗布至被塗布物!表面,而於被塗布物i表面所 塗布之塗布液2表面有出現凹凸不平之問題。 1此外,近年來,在從如上述之塗布用模具將塗布液塗 於由全被支承輥(backupr〇11)架設移動之網(web)組 成^被塗布物之時,如曰本專利公開2003~ 236434號公報 =不般’提出有相對於上述塗布用模具於由網組成之被塗 :物^移動方向上流側設置減壓室,經由此減壓室使從塗 能用模具至被塗布物供給塗布液之上流側部分呈現減壓狀 ’您’控制供給於被塗布物之塗布液後跟部分,而抑制塗 不均產生等者。 然而,如第3圖所示,於塗布用模具1〇之移動方向下 319276 6 U22111 游側設置減屋室3,而使此麵室3内藉調整閥h經由減 愿泵3b㈣至預定塵力,使從塗布用模具1()至被塗布物 表面供給塗布液2之下游側部分呈減壓狀態之情形,若此 .減屢室3下緣與被塗布物】表面間之間隙間隔s變大,則 外部空氣透過此間隔流人至減壓室3内,而變的盎法使供 給於,塗布物i表面塗布液2之下游侧部份適#地減麼, 特別疋,在如上述般將高黏度之塗布液2薄塗布於被塗布 物1表面時,依然有出現塗布不均等之問題。 、、另一方面,為了抑制外部空氣透過減壓室3下緣與被 ^布物1表面間之間隙流人減1室3内而使此間隙間隔s 細至非$小Βτ ’因塗布用模具^ 〇移動時之震動或被塗布物 1表面之凹凸等,此減壓室3下緣接觸被塗布物丨表面, 而有使被塗布物1表面損傷等之問題。 【發明内容】 (發明欲解決的課題) 本發明係以解決在使於尖端設置有用以供給塗布液之 呈裂縫狀之流出口之塗布用模具對於被塗布物相對地移 動而從上述流出口供給塗布液至被塗布物表面之塗布裝 置中之如上述之問題做為課題者。 換言之’在本發明中,即使在使用高黏度塗布液之情 形,也能將此高黏度塗布液薄而平滑且平均地塗布至被塗 布物表面做為課題者。 (解決課題的手段) 本發明係使在為了解決如上述之課題而提供一種塗布 319276 7 1322717 裳置’使於尖端設置有用以供給塗布液 :之f布用模具對於被塗布物相對地移動,而從上述= =布液至被塗布物表面,#中,在從上述流出口供 布液至被塗布物之位置附近設置使氣體向塗布用❹ 之移動方向下游側部分喷出之氣 嘴出裳置向塗布用模且之移動::育出褒置,且使此氣體 呷棋/、之孝夕動方向下游側傾斜喷出氣體。 在此’為了經由上述氣體啥φ姑毋 軋遐贺出裝置,而在供給塗布液 ^立置附近使氣體向塗布用模具之移動方向下游側部分轉 =噴出,將此氣置安裝於上述塗布用模具較 埋想。 此外,在上述塗布裝置中,係以將上述氣體喷出裝置 中之氣體噴出口在上述呈裂缝狀之流出口之全長中皆形成 連續之裂縫狀較為理想。 此外,在如上述般使氣體噴出裝置於塗布用模具之移 動方向下游側而使氣體從氣體噴出裝置喷出之時,使氣^ •彳之對於上述被塗布物之垂直方向向塗布用模具之移動方向 下游側傾斜10。至70。之範圍而噴出較為理想,更理想係 使其傾斜在20。至40。之範圍使氣體噴出。 " (發明的效果) 本發明之塗布裝置中’係在如上述般一面使塗布用模 具對於被塗布物相對地移動’同時從設置於塗布用模具尖 端之呈裂缝狀之流出口供給塗布液至被塗布物表面之時, 因在供給塗布液之位置附近於塗布用模具之移動方向下游 侧部分’使氣體噴出裝置向塗布用模具之移動方向不游侧 319276 8 貝出氣體’而在供給塗布液之位置附近塗布用模具之移動 -方向下游側部分中之空氣被上述氣體拖行而呈減壓狀態。 因此,變的能適當地控制於被塗布物所供給之塗布液之後 ‘跟(heel)部份同時’即使於被塗布物表面有灰塵等存在, 此灰塵等也會被上述氣體從被塗布物表面去除。 ‘ 〇 °果於已去除灰塵等之被塗布物表面能使塗布液 呈適當狀態而平均地塗布,即使在使用高黏度塗布液之情 形,也能將此種高黏度塗布液薄而平滑且均勻地塗布至被 零塗布物表面。 此外若使上述氣體噴出裝置中之氣體噴出口於塗布 用模具大端之王裂缝狀之流出口之全長中皆形成連續之裂 f狀,則經由從上述氣體喷出口使其噴出之氣體,從上述 机出口適畜地去除在供給塗布液之被塗布物表面之灰塵之 同時,在塗布用模具中之流出口之全長中塗布用模具之移 動方向下游側部分中之空氣皆平均被拖行而呈現均勻之減 φ壓狀態。 此結果,塗布液以較均勻之狀態被供給至被塗布物表 面而塗布液較均勻地被塗布至被塗布物表面,且即使在 使用咼黏度塗布液之情形,也能將此種高黏度塗布液薄而 車父平滑且均勻地塗布至被塗布物表面。 此外,在如上述般使氣體噴出裝置傾斜於塗布用模具 之移動方向下游側而使氣體從氣體噴出裝置噴出之時,比 從對於被塗布物之垂直方向喷出之情形,使其傾斜於塗布 用模具之移動方向下游側在10。至70。之範圍而使氣體 319276 9 1322717 噴出,則在供給塗布液之位置附近塗布用模具之移動方。 ^游側部分中之空氣被上述氣體適當地拖行而呈現減壓= 恐,而塗布液以適當狀態被供給至被塗布物表面。特別3, •若使其傾斜在20。14〇。之範圍而使上述氣體,則即^咸 少使其噴出之氣體量,也得到適當之減壓狀態。 本發明之此等與其他目的、優點及特徵可藉由結合下 述說明與闡明本發明之特定實施例之所附圖式而為。 【實施方式】 ^ 以下,依據附圖具體說明有關本發明之實施例之塗布 裴置。再者,有關本發明之塗布裝置係不被如下述實施例 所不者所限定,在不變更發明主旨之範圍中,即能適 更實施。 曰 即使在此實施例中之塗布裝置中,如第4圖所示般, 將於尖端設置有呈裂縫狀之流出口 u之塗布用模具1〇設 置於自呈板狀之被塗布物i表面隔著所需間隔之間隙 φ之位置。 然後,一面使此塗布用模具1〇相對於上述被塗布物i 移動’同時從此塗布用模具1〇之呈裂縫狀之流出口 ^供 給塗布液2至上述被塗布物!表面,於被塗布物工表面塗 布塗布液2。 在此,在此實施例中之塗布裝置中,係如第4圖及第 5圖所示般’在如上述般使塗布液2塗布至被塗布物ι表 面之際之塗布用模具1G之移動方向下游側,將氣體喷出裝 置沿塗布用模具10之縱向安袭,而從氣體供給泵21 319276 Ϊ522Ί\1 藉由麗力調整閥22供給高壓氣體至此氣體噴出裝置2〇。 此外’彳文此氣體噴出裴置2〇使氣體喷嘴從上述塗布用 杈具1〇之流出口 11向供給塗布液2之被塗布物1表面側 .延伸同%,將此氣體喷嘴23尖端部朝塗布用模具1 〇之移 動方向下游側折彎’且在此氣體噴嘴23尖端設置有呈裂縫 狀之氣體噴出口 23a。然後,使此氣體喷出口 2〇傾斜於塗 布用模具1〇之移動方向下游侧而使高壓氣體從此氣體喷 出裝置喷出。再者’在此氣體喷嘴23纟端之呈裂縫狀之氣 體喷出口 23a係’在上述塗布用模具1〇尖端之呈裂縫狀之 流出口 11之全長令皆形成連續之裂缝狀。 、而且,在此實施例中之塗布裝置中,在塗布塗布液2 於被塗布物1表面之時,係如上述般-面使塗布用模具1〇 相對於被塗布物1移動,同時從此塗布用模具⑺之呈裂縫 狀之抓出口 11供給塗布液2至上述被塗布物工表面。然 後如此般攸塗布液2被供給至被塗布物i表面之位置至 ,3用模具W之移動方向下游側附近,經由上述氣體喷出 裝置20從氣體喷嘴23尖端之呈裂縫狀之氣體喷出口 其傾斜於塗布用模具1Q之移動方向下游側使 屋乳體噴出。 右如此般從氣體喷嘴23 /丨、CJ & π ^ . 穴鈿之王裂縫狀之氣體喷出 傾斜於塗布用模具1G之移動方向下游側 〔二存在於被塗布物1表面之灰塵等被此高厂堅 布物1表面被去除同時,如第6圖所示般’供 〇布液2之位置至塗布用模具1〇之移動方向下游側附近 η 319276 1322717 之空氣’如上述般被所噴出之高壓氣體拖行而呈減壓狀 態’而因此能適當地控制於被塗布物1所供給之塗布液2 之後跟部分2a。 . 然後’如此般經由使於被塗布物1所供給之塗布液2 -之後跟部份2a適當地控制,即使在使用高黏度塗布液2 之情形’擴大塗布用模具1 〇尖端之呈裂縫狀之流出口 i 1 與被塗布物1表面之間隙Gp,也能進行將此種高黏度塗布 液2薄而平滑且平均地塗布至被塗布物1表面。 ® 在此,如上述般從塗布用模具10尖端之呈裂缝狀之流 出口 11供給塗布液2至被塗布物1表面,在塗布塗布液2 於被塗布物1表面之時,例如,使黏度l〇〇〇〇cps程度之高 黏度塗布液2,塗布於被塗布物】表面至1〇至3〇#m範圍 内之預定膜厚d時,在以往中,係若塗布用模具1〇尖端之 呈裂缝狀之流出口 1丨與被塗布物丨表面之間隙Gp變大, 則如刚述第2圖所示般,從流出口 j丨至被塗布物丨表面所 #供給之塗布液2呈轉人至與塗布用模具1Q之移動方向相反 侧部分之狀態,於被塗布物i表面所塗布之塗布液2表面 出見凹凸而將如上述之高黏度塗布液2薄而平均地塗布 於被塗布物1表面有困難。 相對於此’如上述實施例所示之塗布裝置般,若使私 氣體噴嘴23尖端之呈裂缝狀之氣體噴出口 23a傾斜於塗^ 動方向下游側而使高壓氣體噴出,則即使力 布才…10尖端之呈裂縫狀之流出口 面之間隙Gp相對於預定厚度d設定於⑽p/= 319276 12 ?圍不會產生塗布不均和塗布液中斷此種問題,也能 '將㈣度塗布液2薄而平滑且平均地塗布至被塗布物!表 面。 •再者,在上述實施例中之塗布裝置中,使塗布用模具 相對於被塗布物i移動,但使此塗布用模具^ 〇固定而 使被塗布物1移動也是為可能。 • , I《月雖已以Λ &例方式完整說明,但咸信於此項技 私i員域中具有通吊知識者,可明顯瞭解各種變化與修改。 因此,除非該等變化與修改悖離本發明之範疇,否則 該等變化與修改皆應包含於本發明中。 【圖式簡單說明】 第1圖係表示在以往之塗布裝置中,使塗布液塗布至 被塗布物之狀態之示意說明圖。 第2圖係表示在以往之塗布裝置中,在縮小塗布用模 具與被塗布物表面之間隙情形,從流出口至被塗布物表面 #所供給之塗布液轉人至與塗布用模具之移動方向相反側部 分之狀態之示意說明圖。 第3圖係表不在設置減壓室於塗布用模具之移動方向 下游側之以往塗布裝置中,使塗布液塗布至被塗布物表面 之狀態之示意說明圖。 第4圖係表示在有關本發明之一實施例之實施裝置 中,使塗布液塗布至被塗布物表面之狀態之示意說明圖。 第5圖係在同實施例中之塗布裝置中,從設置氣體喷 出裝置之塗布用模具之移動方向下游側之示意說明圖。 319276 13 1322717 第6圖係表示在同實施例申之塗布裝置中,使塗布液 j塗布至被塗布物表面之狀態之放大說明圖。 【主要元件符號說明】 1 被塗布物 2 塗布液 2a 後跟部份 3 減壓室 3a 調整閥 3b 減壓泵 10 塗布用模具 11 流出口 20 驅動裝置 21 氣體供給泵 22 壓力調整閥 23 氣體喷嘴 23a 氣體喷出口 d 於被塗布物所塗布之塗布液之膜厚1322717 IX. Description of the invention: [Related application] This application claims priority based on Japanese Patent Application No. 2 _ 6 337 685. [Technical Field of the Invention] The present invention relates to a coating die for providing a slit-like outlet for supplying a coating liquid to relatively move an object to be coated, and to supply a coating liquid from the upper to the outlet. In particular, the coating apparatus on the surface of the coating material has such a feature that the high-viscosity coating liquid can be applied to the surface of the object to be coated in a thin, smooth, and even manner even when a high-viscosity coating liquid is used. [Prior Art] In the past, when manufacturing a plasma display panel or an organic electroluminescence (ELECTROluminescence) display panel, a liquid crystal display panel, etc., various coating objects such as a glass substrate, a resin film, and a metal squeegee were applied to the surface. The coating device is coated with various coating liquids. Further, in the case of such a coating apparatus, for example, as shown in Fig. 1, a coating die 1 which is provided with a crack-like outflow D^ at the tip end is provided in the self-formed coating object i The coating die 1〇 is moved relative to the object 1 by the position of the gap gp at a desired interval, and the coating liquid 2 is supplied from the slit Δ of the coating die 10 to the above. The surface of the W is applied to the object to be coated! The surface is coated with a coating liquid 2 . In addition, in recent years, when coating the coating liquid 2 319276 5 丄 to 2717 on the surface of the object 1 to be coated as described above, in order to reduce the cost of the coating liquid 2 and the like, "the coating liquid 2 is contained therein." The method of reducing the thickness of the coating liquid 2 applied to the surface of the object 1 to be coated while reducing the amount of the solvent. Here, if the amount of the solvent contained in the coating liquid 2 is reduced as described above, the viscosity of the coating liquid 2 is increased. In order to accelerate the application speed of the coating mold ί as described above, the coating liquid 2 having a high viscosity is applied to the surface of the object to be coated i as described above, and the coating liquid 2 supplied to the surface of the object to be coated is coated. The dragging device 10 is dragged, so that there is a problem that the coating is uneven, or the coating liquid is interrupted, etc. In addition, in order to suppress the coating unevenness and the coating liquid interruption as described above, the surface of the mold 10 and the object 1 to be coated are used. In the gap Gp, as shown in Fig. 2, the coating liquid 2 supplied from the outlet ii to the surface of the object to be coated is transferred to the side opposite to the moving direction of the coating die 1 to be coated. To the coated object! Surface On the other hand, the surface of the coating liquid 2 coated on the surface of the object to be coated i has a problem of unevenness. 1 Further, in recent years, the coating liquid is applied from a coating die as described above to a fully supported roller (backupr〇11). When arranging a mobile web (web) to form a coated object, as disclosed in Japanese Patent Laid-Open Publication No. 2003-236434, it is proposed to have a coating consisting of a net relative to the above-mentioned coating die: A decompression chamber is provided on the upstream side, and a pressure-reducing portion of the coating liquid from the coating mold to the coating material supply upper side is subjected to a pressure-reducing portion to control the heel portion of the coating liquid supplied to the object to be coated. In addition, as shown in Fig. 3, the house reduction chamber 3 is provided on the side of the moving mold 319276 6 U22111 in the moving direction of the coating die 1〇, and the adjustment valve h is passed through the face chamber 3 via the adjustment valve h. The pump 3b (4) is lowered to a predetermined dust force, and the downstream side portion of the coating liquid 2 is supplied from the coating die 1 () to the surface of the object to be coated in a reduced pressure state, and the lower edge of the chamber 3 and the object to be coated are reduced. 】The gap between the surfaces becomes larger, and the outside air is transmitted through. This interval flows into the decompression chamber 3, and the angling method is supplied, and the downstream side portion of the coating liquid 2 on the surface of the coating material i is reduced, in particular, the coating of high viscosity is as described above. When the liquid 2 is thinly applied to the surface of the object 1 to be coated, there is a problem that coating unevenness occurs. On the other hand, in order to suppress the passage of outside air through the gap between the lower edge of the decompression chamber 3 and the surface of the object to be coated 1, The inside of the decompression chamber 3 is contacted with the object to be coated by the vibration of the coating die 或 or the unevenness of the surface of the object 1 to be coated, etc. [Problems to be Solved by the Invention] The present invention is to solve the problem of providing a slit-like outlet for supplying a coating liquid at a tip end. The problem as described above in the coating apparatus in which the coating material is relatively moved by the mold and the coating liquid is supplied from the above-mentioned outlet to the surface of the object to be coated is a subject. In other words, in the present invention, even when a high-viscosity coating liquid is used, the high-viscosity coating liquid can be applied thinly, smoothly, and evenly onto the surface of the object to be coated. (Means for Solving the Problem) In the present invention, in order to solve the problem as described above, a coating 319276 7 1322717 is provided, which is used to provide a coating liquid for supplying a coating liquid: In the above-mentioned = = cloth liquid to the surface of the object to be coated, in the vicinity of the position where the cloth liquid is supplied from the above-mentioned outlet port to the object to be coated, a gas nozzle for ejecting the gas toward the downstream side in the moving direction of the coating crucible is provided. The coating is placed on the coating mold and moved: the cultivating device is placed, and the gas is ejected obliquely on the downstream side in the direction of the gas. Here, in order to pass the gas 啥 毋 毋 遐 遐 遐 , 为了 供给 供给 供给 供给 供给 供给 供给 为了 供给 为了 为了 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给 供给Think more about using molds. Further, in the above coating apparatus, it is preferable that the gas discharge port of the gas discharge device is formed into a continuous crack shape over the entire length of the slit-like outlet. Further, when the gas ejecting apparatus is ejected from the gas ejecting apparatus on the downstream side in the moving direction of the coating mold as described above, the gas is sprayed into the mold for the vertical direction of the object to be coated. The downstream side of the moving direction is inclined by 10. To 70. The range is preferably ideal, and it is more desirable to tilt it at 20. To 40. The range allows the gas to be ejected. < (Effect of the Invention) In the coating apparatus of the present invention, the coating die is relatively moved toward the object to be coated as described above, and the coating liquid is supplied from the slit-like outlet provided at the tip end of the coating die. When the surface of the object to be coated is in the vicinity of the position where the coating liquid is supplied, the downstream side portion of the moving direction of the coating die moves the gas ejection device to the side of the coating die, and the gas is supplied to the coating die. The air in the downstream side portion of the movement-direction of the coating die near the position of the coating liquid is dragged by the gas to be in a reduced pressure state. Therefore, the change can be appropriately controlled after the coating liquid supplied from the object to be coated, and the heel portion is simultaneously. Even if dust or the like exists on the surface of the object to be coated, the dust or the like is applied from the object to be coated by the gas. Surface removal. ' 〇 ° The surface of the object to be coated, such as dust, can be applied evenly in a proper state, and even in the case of using a high-viscosity coating liquid, such a high-viscosity coating liquid can be made thin, smooth and uniform. Apply to the surface of the zero coating. Further, when the gas discharge port in the gas discharge device is formed into a continuous crack in the entire length of the crack-like outlet of the large end of the coating die, the gas ejected from the gas discharge port is passed through the gas. The machine outlet of the machine is removed from the surface of the object to be coated with the coating liquid, and the air in the downstream side of the moving direction of the coating die is dragged on average in the entire length of the outlet of the coating die. A uniform φ reduction state is presented. As a result, the coating liquid is supplied to the surface of the object to be coated in a relatively uniform state, and the coating liquid is applied to the surface of the object to be coated more uniformly, and such a high viscosity can be applied even in the case of using a yttrium-coating liquid. The liquid is thin and the vehicle is smoothly and uniformly applied to the surface of the object to be coated. In addition, when the gas ejecting apparatus is inclined to the downstream side in the moving direction of the coating die and the gas is ejected from the gas ejecting apparatus as described above, it is inclined to be coated when it is ejected from the vertical direction of the object to be coated. The downstream side of the moving direction of the mold is at 10. To 70. In the range of the gas 319276 9 1322717, the moving mold is applied in the vicinity of the position where the coating liquid is supplied. The air in the side portion is appropriately dragged by the above gas to exhibit a reduced pressure = fear, and the coating liquid is supplied to the surface of the object to be coated in an appropriate state. Special 3, • If you tilt it at 20.14〇. In the range of the above gas, the amount of gas which is discharged from the salt is also appropriately reduced. The above and other objects, advantages and features of the invention are set forth in the description of the appended claims. [Embodiment] ^ Hereinafter, a coating device according to an embodiment of the present invention will be specifically described with reference to the drawings. Further, the coating apparatus according to the present invention is not limited to the following examples, and can be suitably carried out without departing from the scope of the invention. In the coating apparatus of this embodiment, as shown in FIG. 4, the coating die 1 provided with the slit-like outlet port u at the tip end is provided on the surface of the object-coated object i. The position of the gap φ across the required interval. Then, the coating die 1 is moved relative to the object to be coated i, and the coating liquid 2 is supplied from the coating die 1 to the coating material 2 to the object to be coated! On the surface, the coating liquid 2 is applied to the surface of the workpiece to be coated. Here, in the coating apparatus of this embodiment, as shown in FIG. 4 and FIG. 5, the movement of the coating die 1G when the coating liquid 2 is applied to the surface of the object to be coated 1 as described above On the downstream side of the direction, the gas ejecting apparatus is mounted in the longitudinal direction of the coating die 10, and high-pressure gas is supplied from the gas supply pump 21 319276 Ϊ 522 Ί 1 to the gas ejecting apparatus 2 藉 by the Lily regulating valve 22. In addition, the gas nozzle is extended from the outlet port 11 of the coating cooker 1 to the surface side of the object 1 to be coated with the coating liquid 2 by the same amount, and the tip end of the gas nozzle 23 is extended. The downstream side of the coating die 1 is bent in the moving direction, and a gas discharge port 23a having a crack shape is provided at the tip end of the gas nozzle 23. Then, the gas discharge port 2〇 is inclined to the downstream side in the moving direction of the coating die 1 to eject the high-pressure gas from the gas discharge device. Further, the gas discharge port 23a of the cracked end of the gas nozzle 23 is formed in a continuous crack shape at the entire length of the slit-shaped outlet port 11 at the tip end of the coating die 1. Further, in the coating apparatus of this embodiment, when the coating liquid 2 is applied to the surface of the object 1 to be coated, the coating die 1 is moved relative to the object 1 as described above, and is coated therefrom. The coating liquid 2 is supplied to the surface of the coated object by the cracked fishing port 11 of the mold (7). Then, the sputum coating liquid 2 is supplied to the surface of the object to be coated i to the vicinity of the downstream side in the moving direction of the mold W, and the gas ejection port 20 is formed from the tip end of the gas nozzle 23 by the gas ejection device 20 The elongate body is ejected obliquely to the downstream side in the moving direction of the coating die 1Q. The gas is ejected from the gas nozzle 23 / 丨, CJ & π ^ . The gas of the cavern of the hole is inclined to the downstream side of the moving direction of the coating die 1G (two dusts present on the surface of the object 1 to be coated, etc.) The surface of the high-strength fabric 1 is removed, and as shown in Fig. 6, the position of the supply liquid 2 to the downstream side of the coating mold 1 η is near 319276 1322717. The discharged high-pressure gas is dragged to the reduced pressure state, and thus the coating liquid 2 supplied from the object 1 to be coated can be appropriately controlled to follow the portion 2a. Then, the coating liquid 2 supplied to the object 1 to be coated is appropriately controlled, and the portion 2a is appropriately controlled, and even when the high-viscosity coating liquid 2 is used, the tip of the coating die 1 is enlarged. The high-viscosity coating liquid 2 can be applied to the surface of the object 1 to be thin, smooth, and evenly applied to the gap Gp between the outlet i1 and the surface of the object 1 to be coated. Here, the coating liquid 2 is supplied from the slit-like outlet port 11 at the tip end of the coating die 10 to the surface of the object 1 to be coated, and when the coating liquid 2 is applied to the surface of the object 1 to be coated, for example, the viscosity is made. l When the high-viscosity coating liquid 2 of the cps degree is applied to the surface of the object to be coated to a predetermined film thickness d in the range of 1 〇 to 3 〇 #m, in the past, if the coating die 1 tip is applied When the gap Gp between the slit-shaped outlet port 1 and the surface of the object to be coated becomes large, the coating liquid 2 supplied from the outlet port j丨 to the surface of the object to be coated is as shown in FIG. 2 In the state of being transferred to the side opposite to the moving direction of the coating die 1Q, the surface of the coating liquid 2 applied to the surface of the object to be coated i is unevenly formed, and the high-viscosity coating liquid 2 as described above is thinly applied to the surface. There is difficulty in the surface of the object 1 to be coated. In contrast to the coating apparatus shown in the above-described embodiment, when the gas discharge port 23a having the crack shape at the tip end of the private gas nozzle 23 is inclined to the downstream side in the coating direction to discharge the high-pressure gas, even the force cloth is The gap Gp of the 10th-end crack-like outlet surface is set at (10)p/= 319276 12 with respect to the predetermined thickness d. The coating unevenness and the coating liquid are not interrupted, and the (four) degree coating liquid can also be used. 2 Thin, smooth and evenly applied to the object to be coated! Surface. In the coating apparatus of the above-described embodiment, the coating die is moved relative to the object to be coated i. However, it is also possible to fix the coating die to move the object 1 to be coated. • , I. Although the month has been fully explained in the form of Λ &, but the letter has a knowledge of the technology in the private sector, you can clearly understand the changes and modifications. Accordingly, such changes and modifications are intended to be included within the scope of the invention. [Brief Description of the Drawings] Fig. 1 is a schematic explanatory view showing a state in which a coating liquid is applied to an object to be coated in a conventional coating apparatus. In the conventional coating apparatus, when the gap between the coating die and the surface of the object to be coated is reduced, the coating liquid supplied from the outlet to the surface of the object to be coated is transferred to the moving direction of the coating die. A schematic illustration of the state of the opposite side portion. Fig. 3 is a schematic explanatory view showing a state in which a coating liquid is applied to the surface of the object to be coated in a conventional coating apparatus in which the decompression chamber is provided on the downstream side in the moving direction of the coating die. Fig. 4 is a schematic explanatory view showing a state in which a coating liquid is applied to the surface of a coated object in an apparatus for carrying out an embodiment of the present invention. Fig. 5 is a schematic explanatory view of the downstream side of the moving direction of the coating die in which the gas ejecting apparatus is disposed, in the coating apparatus of the same embodiment. 319276 13 1322717 Fig. 6 is an enlarged explanatory view showing a state in which the coating liquid j is applied to the surface of the object to be coated in the coating apparatus of the same embodiment. [Description of main components] 1 Coating material 2 Coating liquid 2a Heel part 3 Decompression chamber 3a Adjustment valve 3b Pressure reducing pump 10 Coating die 11 Outlet 20 Driving device 21 Gas supply pump 22 Pressure regulating valve 23 Gas nozzle 23a gas discharge port d film thickness of the coating liquid applied to the object to be coated

Gp 塗布用模具尖端之流出口與被塗布物表面間之間隙 s 間隔The gap between the outlet of the Gp coating die tip and the surface of the object to be coated s

14 31927614 319276

Claims (1)

丄322717 十、申請專利範圍: L 一種塗布裝置,使於尖端設置有用以供給塗布液之呈裂 縫狀之流出口之塗布用模具對於被塗布物相對地移 •動,而從上述流出口供給塗布液至被塗布物表面,其 中,在從上述流出口供給塗布液至被塗布物之位置附^ 設置使氣體向塗布用模具之移動方向下游側部分喷出 t氣體噴出裝置,且使此氣體噴出裝置向塗布用模具之 移動方向下游側傾斜噴出氣體。 2. 如申請專利範圍第!項之塗布裝置,其中,上述氣體喷 出裝置係安裝於上述塗布用模具。 3. ^申請專利範圍第i項之塗布裳置,其中,上述氣體喷 裝置令之氣體喷出口,係在上述呈裂縫狀之流出口之 全長中皆形成連續之裂縫狀。 4. =申請專·圍第2項之塗布裝置,其中,上述氣體嗔 =置中之氣體喷出口’係在上述呈裂縫狀之流出口之 王長中皆形成連續之裂縫狀。 5. 如申請專利範圍第1項之塗 .L _ 體噴出裝置向塗布用模且 ^内、 述乱 $ 叩用耦具之移動方向下游側傾斜噴出 乱-之時’從對於被塗布物之垂直方 ::方向下游側傾斜…。之範圍而使上述氣: 第2項之塗布裝置,其中,在使上述氣 氣體之梓义肖塗布用模具之移動方向下游側傾斜喷出 ⑽之時,從對於被塗布物之㈣方向向塗布用模具之 319276 15 移動方向下游側傾斜10。 噴出。 至70。之範圍而使上述氣體 ’在使上述氣 游側傾斜噴出 塗布用模具之 而使上述氣體 :申請專利範圍第3項之塗布裝置,其中 ,噴出裴置向塗布用模具之移動方向下 氣體之時,從對於被塗布物之垂直方向向 移動方向下游側傾斜10。至70。之範圍 噴出。 319276 16丄322717 X. Patent Application Range: L A coating device for applying a coating die having a slit-like outlet for supplying a coating liquid to a tip to relatively move the object to be coated, and supplying the coating from the above-mentioned outlet port The liquid is applied to the surface of the object to be coated, and a gas ejecting means for ejecting the gas to the downstream side of the moving direction of the coating die is disposed at a position where the coating liquid is supplied from the outlet port to the object to be coated, and the gas is ejected. The apparatus obliquely ejects gas toward the downstream side in the moving direction of the coating die. 2. If you apply for a patent scope! The coating apparatus of the above aspect, wherein the gas discharge device is attached to the coating die. 3. ^Application of the coating range of item i of the patent range, wherein the gas ejection device of the gas spraying device forms a continuous crack shape in the entire length of the slit-like outlet. 4. The application apparatus of the second aspect of the invention, wherein the gas 嗔 = centered gas discharge port is formed in a continuous crack shape in the length of the slit-shaped outlet. 5. As in the case of the coated article, the coating of the coating material is applied to the coating die and the inner side of the moving direction of the coupling is inclined. Vertical side:: The direction of the downstream side is inclined... In the coating device of the second aspect, the coating device is coated obliquely (10) on the downstream side in the moving direction of the mold for applying the gas gas, and is coated from the direction of (4) to the object to be coated. Tilt 10 on the downstream side of the moving direction with the mold 319276 15 moving direction. ejection. To 70. In the range of the gas, the gas is sprayed onto the coating die, and the gas is applied to the coating device according to the third aspect of the invention, wherein the gas is discharged to the coating die in the moving direction. It is inclined 10 from the vertical direction to the object to be coated toward the downstream side in the moving direction. To 70. The range is spouted. 319276 16
TW096118479A 2006-12-15 2007-05-24 Coating device TWI322717B (en)

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JP4865893B2 (en) * 2009-09-28 2012-02-01 パナソニック株式会社 Die head and liquid applicator
JP5321643B2 (en) * 2011-05-25 2013-10-23 パナソニック株式会社 Coating device
CN107812673B (en) * 2017-10-19 2020-01-31 苏州协鑫纳米科技有限公司 Coating device for perovskite thin film
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JP3777404B2 (en) * 1994-04-29 2006-05-24 スリーエム カンパニー Multilayer and slide die coating method and apparatus
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JP3432819B1 (en) * 2002-07-31 2003-08-04 株式会社メンテック Liquid spraying apparatus, liquid spraying method using the same, and chemical liquid
JP2004148167A (en) * 2002-10-29 2004-05-27 Nordson Corp Method and apparatus for applying viscous fluid material
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