JP6847560B1 - Coating device and coating method - Google Patents

Coating device and coating method Download PDF

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JP6847560B1
JP6847560B1 JP2019229905A JP2019229905A JP6847560B1 JP 6847560 B1 JP6847560 B1 JP 6847560B1 JP 2019229905 A JP2019229905 A JP 2019229905A JP 2019229905 A JP2019229905 A JP 2019229905A JP 6847560 B1 JP6847560 B1 JP 6847560B1
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coating liquid
coating
coated
nozzle
slit
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JP2021098154A (en
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西尾　勤
勤 西尾
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Priority to JP2019229905A priority Critical patent/JP6847560B1/en
Priority to KR1020200122415A priority patent/KR102413490B1/en
Priority to TW109133126A priority patent/TWI756841B/en
Priority to CN202011510872.4A priority patent/CN113000296A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

【課題】 被塗布体の上において塗布用ノズルを被塗布体と相対的に移動させ、塗布用ノズルの先端部におけるスリット状吐出口から被塗布体の表面に塗液を濃度ムラ等が生じないようにして、各種の形状に簡単に塗布できるようにする。【解決手段】 被塗布体Wの上において塗布用ノズル10を被塗布体と相対的に移動させ、塗布用ノズル先端部のスリット状吐出口11から被塗布体の表面に塗液Pを塗布するにあたり、塗液が収容される塗布用ノズルの塗液導入部13をスリット状吐出口と連通するように設け、この塗液導入部内の底部に所定のパターン形状の塗液収容凹部14aが外周面に設けられた塗液供給体14をスリット状吐出口の上に回転可能に設け、この塗液供給体を回転させて塗液収容凹部内から塗液を、スリット状吐出口を通して相対的に移動する被塗布体の表面に塗布させる。【選択図】 図４PROBLEM TO BE SOLVED: To move a coating nozzle relative to an object to be coated on an object to be coated so that uneven concentration of a coating liquid is not generated on the surface of the object to be coated from a slit-shaped discharge port at the tip of the nozzle to be coated. In this way, it can be easily applied to various shapes. SOLUTION: A coating nozzle 10 is moved relative to an object to be coated on an object to be coated W, and a coating liquid P is applied to the surface of the object to be coated from a slit-shaped discharge port 11 at the tip of the nozzle to be coated. The coating liquid introduction portion 13 of the coating nozzle for accommodating the coating liquid is provided so as to communicate with the slit-shaped discharge port, and the coating liquid storage recess 14a having a predetermined pattern shape is provided on the outer peripheral surface at the bottom of the coating liquid introduction portion. The coating liquid supply body 14 provided in the above is rotatably provided on the slit-shaped discharge port, and the coating liquid supply body is rotated to relatively move the coating liquid from the coating liquid accommodating recess through the slit-shaped discharge port. Apply to the surface of the object to be coated. [Selection diagram] Fig. 4

Description

本発明は、被塗布体の上に、塗液を吐出させるスリット状吐出口を先端部に有する塗布用ノズルを設け、前記の被塗布体と塗布用ノズルとを相対的に移動させて、前記のスリット状吐出口を通して被塗布体の表面に塗液を塗布する塗布装置及びこのような塗布装置を用いて被塗布体の表面に塗液を塗布する塗布方法に関するものである。特に、前記のように被塗布体と塗布用ノズルとを相対的に移動されて、塗布用ノズルに設けたスリット状吐出口を通して被塗布体の表面に塗液を塗布するにあたり、塗液に濃度ムラや粘度ムラ等が生じないようにして、被塗布体の表面に塗液を円形状等の各種の形状になるようにして簡単に塗布できるようにした点に特徴を有するものである。 In the present invention, a coating nozzle having a slit-shaped discharge port for discharging the coating liquid at the tip thereof is provided on the object to be coated, and the object to be coated and the nozzle for coating are relatively moved to obtain the above. The present invention relates to a coating device for applying a coating liquid to the surface of an object to be coated through a slit-shaped discharge port of the above, and a coating method for applying a coating solution to the surface of the object to be coated using such a coating device. In particular, when the object to be coated and the nozzle for coating are relatively moved as described above and the coating liquid is applied to the surface of the object to be coated through the slit-shaped discharge port provided in the nozzle for coating, the concentration in the coating liquid is high. It is characterized in that the coating liquid can be easily applied to the surface of the object to be coated in various shapes such as a circular shape without causing unevenness or uneven viscosity.

ウエハー等の被塗布体の表面に、塗布装置により塗液を所定の形状に塗布するにあたっては、従来から様々な方法が使用されており、例えば、被塗布体の上に、塗液を吐出させるスリット状吐出口を先端部に有する塗布用ノズルを設け、前記の被塗布体と塗布用ノズルとを相対的に移動させて、前記のスリット状吐出口を通して被塗布体の表面に塗液を塗布するようにした塗布装置等の各種の塗布装置が知られている。 Various methods have been conventionally used to apply a coating liquid to a predetermined shape on the surface of an object to be coated such as a wafer by a coating device. For example, the coating liquid is discharged onto the object to be coated. A coating nozzle having a slit-shaped discharge port at the tip is provided, and the coated body and the coating nozzle are relatively moved to apply the coating liquid to the surface of the coated body through the slit-shaped discharge port. Various coating devices such as a coating device are known.

ここで、例えば、ウエハー等の円形状の被塗布体の表面に塗液を円形状に塗布するにあたっては、特許文献１に示されるように、円形状の被塗布体を回転するターンテーブルの上にセットして回転させ、このように回転する被塗布体の中心部にノズルから塗液を供給させ、回転する被塗布体の遠心力により塗液を円形状の被塗布体の表面に塗布させるようにしたスピンコーターが知られている。 Here, for example, when the coating liquid is applied in a circular shape to the surface of a circular object to be coated such as a wafer, as shown in Patent Document 1, the circular object to be coated is rotated on a turntable. The coating liquid is supplied from the nozzle to the central portion of the object to be coated that rotates in this way, and the coating liquid is applied to the surface of the circular object to be coated by the centrifugal force of the rotating object to be coated. The spin coater that made it is known.

しかし、特許文献１に示されるようなスピンコーターにおいては、回転する被塗布体の表面に塗液を一定した厚みになるようにして均一に供給することは困難であり、また回転する被塗布体の表面に供給された塗液が、遠心力によって被塗布体の上から振り飛ばされて塗液が無駄になり、特に高価な塗液の場合には、無駄になる塗液のコストが大きくなるという問題があった。 However, in a spin coater as shown in Patent Document 1, it is difficult to uniformly supply the coating liquid to the surface of the rotating object to be coated so as to have a constant thickness, and the rotating object to be coated is also The coating liquid supplied to the surface of the coating liquid is shaken off from the top of the object to be coated by the centrifugal force, and the coating liquid is wasted. Especially in the case of an expensive coating liquid, the cost of the wasted coating liquid increases. There was a problem.

また、特許文献２に示されるように、円形状の被塗布体を回転するターンテーブルの上にセットして回転させると共に、回転する被塗布体の表面に塗液を供給させるノズルを回転する被塗布体の中心部から外周側に徐々に移動させて、塗液を回転する被塗布体の表面に渦巻き状に供給して、回転する円形状の被塗布体の表面に塗液を塗布させるようにしたものが提案されている。 Further, as shown in Patent Document 2, a circular object to be coated is set on a rotating turntable and rotated, and a nozzle for supplying a coating liquid to the surface of the rotating object to be coated is rotated. Gradually move the coating liquid from the center of the coating body to the outer peripheral side, supply the coating liquid in a spiral shape to the surface of the rotating object to be coated, and apply the coating liquid to the surface of the rotating circular object to be coated. The one that has been made is proposed.

しかし、特許文献２に示されるように、回転する被塗布体の表面に塗液を供給させるノズルを回転する被塗布体の中心部から外周側に徐々に移動させて、塗液を回転する被塗布体の表面に渦巻き状に供給し、回転する円形状の被塗布体の表面に塗液を塗布させるようにした場合、円形状の被塗布体の表面に塗液を塗布させるのに要する時間が長くなって生産性が悪くなると共に、被塗布体の表面に塗液を均一な厚みになるようにして塗布することも困難になるいという問題があった。 However, as shown in Patent Document 2, the nozzle for supplying the coating liquid to the surface of the rotating object to be coated is gradually moved from the central portion of the rotating object to be coated to the outer peripheral side to rotate the coating liquid. When the coating liquid is supplied to the surface of the coated body in a spiral shape and the coating liquid is applied to the surface of the rotating circular object to be coated, the time required to apply the coating liquid to the surface of the circular object to be coated is applied. There is a problem that it becomes difficult to apply the coating liquid to the surface of the object to be coated so as to have a uniform thickness, as well as the problem that the productivity becomes poor.

また、特許文献３に示されるように、被塗布体が載置されて少なくとも１８０度回転可能な回転テーブルを設けると共に、前記の被塗布体の中心を通る第１の方向（Ｘ方向）軸で２分割された第１の被塗布体周辺領域及び第２の被塗布体周辺領域の一方に相当する円弧に沿って樹脂を吐出するための複数のノズルを配置させ、前記のノズルが被塗布体の周辺領域に対向するように設置される樹脂膜形成ヘッド部と、被塗布体と樹脂膜形成ヘッド部を相対的に第１の方向とは直交する第２の方向（Ｙ方向）に移動させる移動機構を設け、前記の移動機構により、樹脂膜形成ヘッド部の移動を制御すると共に、各ノズルにおける塗液の吐出及び停止を個別に制御して、各ノズルから吐出される塗液の吐出幅を個別に制御する機構して、円形状の被塗布体の表面に塗液を塗布させるようにしたものが提案されている。 Further, as shown in Patent Document 3, a rotary table on which the object to be coated is placed and which can rotate at least 180 degrees is provided, and at the first direction (X direction) axis passing through the center of the object to be coated. A plurality of nozzles for discharging the resin are arranged along an arc corresponding to one of the first peripheral area to be coated and the second peripheral area to be coated, which are divided into two, and the nozzles are the objects to be coated. The resin film forming head portion installed so as to face the peripheral region of the above, and the object to be coated and the resin film forming head portion are moved in a second direction (Y direction) relatively orthogonal to the first direction. A movement mechanism is provided, and the movement of the resin film forming head portion is controlled by the movement mechanism, and the discharge and stop of the coating liquid in each nozzle are individually controlled, and the discharge width of the coating liquid discharged from each nozzle is controlled. There has been proposed a mechanism for individually controlling the coating liquid so that the coating liquid is applied to the surface of the circular object to be coated.

しかし、特許文献３に示されるようにして円形状の被塗布体の表面に塗液を塗布させるためには、装置が複雑化すると共にその制御も困難であり、円形状の被塗布体の表面に塗液を塗布させるのに要する装置のコストが高くつくと共に、その制御操作を行うことも面倒になり、簡単に円形状の被塗布体の表面に塗液を塗布させることができず、さらに、被塗布体の表面に塗液を均一な厚みになるようにして塗布することも困難になる等の問題があった。 However, in order to apply the coating liquid to the surface of the circular object to be coated as shown in Patent Document 3, the apparatus is complicated and its control is difficult, and the surface of the circular object to be coated is difficult to control. The cost of the device required to apply the coating liquid to the coating liquid is high, and the control operation thereof becomes troublesome, so that the coating liquid cannot be easily applied to the surface of the circular object to be coated, and further. There is a problem that it becomes difficult to apply the coating liquid to the surface of the object to be coated so as to have a uniform thickness.

また、特許文献４に示されるように、ノズル長手方向に延びる円柱形状の空洞部と、ノズル長手方向に延びるスリット状の吐出口と、前記空洞部から前記吐出口までの薬液通路を形成するランド部とを有する長尺型のノズル本体において、前記の空洞部内に、塗液を収容させる円筒状の回転マニホールドに回転可能に嵌め込み、この回転マニホールド内に塗液供給部から塗液を供給させて収容させるように、この回転マニホールドの端部を閉塞させる一方、この回転マニホールドの外周部に被塗布体上に供給する塗液の塗布形状に対応する開口を貫通して設け、塗液を塗布させる被塗布体に対して、前記のノズル本体を相対的に移動させると共に、塗液が供給された前記の回転マニホールドを空洞部内において回転させて、この回転マニホールドの外周に貫通して設けられた開口を前記のスリット状の吐出口と対応する位置に導き、回転マニホールドの外周に設けられた前記の開口からスリット状の吐出口を通して塗液を前記の被塗布体の表面に供給し、被塗布体の表面に回転マニホールドの外周に設けられた開口の形状に対応するようにして塗液を塗布するようにしたものが提案されている。 Further, as shown in Patent Document 4, a cylindrical cavity extending in the longitudinal direction of the nozzle, a slit-shaped discharge port extending in the longitudinal direction of the nozzle, and a land forming a chemical liquid passage from the cavity to the discharge port. In a long nozzle body having a portion, the coating liquid is rotatably fitted into a cylindrical rotary manifold for accommodating the coating liquid in the cavity portion, and the coating liquid is supplied from the coating liquid supply portion into the rotating manifold. While closing the end of the rotating manifold so as to accommodate it, an opening corresponding to the coating shape of the coating liquid to be supplied onto the object to be coated is provided through the outer peripheral portion of the rotating manifold to apply the coating liquid. An opening provided through the outer periphery of the rotating manifold by moving the nozzle body relative to the object to be coated and rotating the rotating manifold to which the coating liquid is supplied in the cavity. Is guided to a position corresponding to the slit-shaped discharge port, and the coating liquid is supplied to the surface of the object to be coated through the slit-shaped discharge port from the opening provided on the outer circumference of the rotary manifold. that so as to apply the coating solution has been proposed in the surface of the to correspond to the shape of the opening provided in the outer periphery of the rotary manifold.

しかし、特許文献４に示されるように、ノズル本体の空洞部内に回転可能に嵌め込んだ円筒状の回転マニホールド内に塗液を供給させて収容させ、このように塗液が収容された回転マニホールドを空洞部内において回転させて、この回転マニホールドの外周に貫通して設けられた開口がノズル本体のスリット状の吐出口と対応する位置に導かれた場合に、回転マニホールド内に収容された塗液を前記の開口からスリット状の吐出口を通して塗液を前記の被塗布体の表面に供給させるようにすると、回転マニホールド内に収容された塗液が貫通して設けられた開口からスリット状の吐出口を通して過剰に被塗布体の表面に供給されたりし、一定した厚みで塗液を被塗布体の表面に供給することが困難になり、また回転マニホールドに設けた前記の開口を通して、回転マニホールド内における塗液が、回転マニホールドと空洞部との間に流れ込んで、この塗液がスリット状の吐出口を通して被塗布体の表面に液だれしたり、さらに回転マニホールド内に収容された塗液が万遍なく使用されずに、一部の塗液の濃度や粘度にムラが生じて塗工不良が発生したりするという問題があった。 However, as shown in Patent Document 4, the coating liquid is supplied and accommodated in a cylindrical rotating manifold rotatably fitted in the cavity of the nozzle body, and the coating liquid is accommodated in this way. Is rotated in the cavity, and when the opening provided through the outer periphery of the rotary manifold is guided to a position corresponding to the slit-shaped discharge port of the nozzle body, the coating liquid contained in the rotary manifold is contained. When the coating liquid is supplied to the surface of the object to be coated from the opening through the slit-shaped discharge port, the coating liquid contained in the rotary manifold penetrates and the slit-shaped discharge is provided. It may be excessively supplied to the surface of the object to be coated through the outlet, making it difficult to supply the coating liquid to the surface of the object to be coated with a constant thickness, and through the opening provided in the rotary manifold, the inside of the rotary manifold The coating liquid in the above flows between the rotating manifold and the cavity, and this coating liquid drips on the surface of the object to be coated through the slit-shaped discharge port, and the coating liquid contained in the rotating manifold is 10,000. There was a problem that the coating solution was not used evenly, and the concentration and viscosity of some coating solutions became uneven, resulting in poor coating.

また、特許文献５に示されるものも、前記の特許文献４に示されるものと同様に、塗液を内筒部内に収容させ、このように収容された塗液を周部開口と吐出口とが重なる部分を通して被塗布体の表面に供給するようになっており、前記の特許文献４に示されるものと同様の問題が存在した。 Further, in the case shown in Patent Document 5, similarly to the one shown in Patent Document 4, the coating liquid is contained in the inner cylinder portion, and the coating liquid contained in this manner is used as the peripheral opening and the discharge port. Is supplied to the surface of the object to be coated through the overlapping portion, and there is a problem similar to that shown in Patent Document 4 above.

特開２００９−２９００２９号公報Japanese Unexamined Patent Publication No. 2009-290029 特開２００２−３２０９０２号公報JP-A-2002-320902 特開２０１３−５４１２８号公報Japanese Unexamined Patent Publication No. 2013-54128 特開２０１４−２２５４５号公報Japanese Unexamined Patent Publication No. 2014-22545 特開２０１２−１２０９３８号公報Japanese Unexamined Patent Publication No. 2012-120938

本発明は、被塗布体等の被塗布体の表面に塗液を所定の形状に塗布する場合における前記のような様々な問題を解決することを課題とするものである。 An object of the present invention is to solve various problems as described above when the coating liquid is applied to a predetermined shape on the surface of an object to be coated such as an object to be coated.

すなわち、本発明においては、被塗布体の上に、塗液を吐出させるスリット状吐出口を先端部に有する塗布用ノズルを設け、前記の被塗布体と塗布用ノズルとを相対的に移動させて、前記のスリット状吐出口を通して被塗布体の表面に塗液を塗布するにあたり、塗液に濃度ムラや粘度ムラ等が生じないようにして、被塗布体の表面に塗液を円形状等の各種の形状になるようにして簡単に塗布できるようにすることを課題とするものである。 That is, in the present invention, a coating nozzle having a slit-shaped discharge port for discharging the coating liquid at the tip thereof is provided on the object to be coated, and the object to be coated and the coating nozzle are relatively moved. When applying the coating solution to the surface of the object to be coated through the slit-shaped discharge port, the coating solution is applied to the surface of the object to be coated in a circular shape or the like so that the coating solution does not have uneven concentration or viscosity. It is an object of the present invention to make it easy to apply by making it into various shapes of.

本発明に係る塗布装置においては、前記のような課題を解決するため、被塗布体の上に、塗液を吐出させるスリット状吐出口を先端部に有する塗布用ノズルを設け、前記の被塗布体と塗布用ノズルとを相対的に移動させて、前記のスリット状吐出口を通して被塗布体の表面に塗液を塗布する塗布装置において、前記の塗布用ノズルの内部に塗液供給口から塗液が供給される塗液導入部を前記のスリット状吐出口と連通するように設けると共に、この塗液導入部内に供給された塗液を収容させる所定のパターン形状になった塗液収容凹部が外周面に設けられた円柱状の塗液供給体を、前記の塗液導入部と連通するスリット状吐出口の上に位置するようにして塗液導入部内に回転可能に設けるにあたり、塗液が供給される前記の塗布用ノズルの内部における塗液導入部の少なくとも底部を平面状に形成し、この平面状に形成された塗液導入部の底部に前記のスリット状吐出口を連通させ、この平面状に形成された塗液導入部の底部と接触するように前記の塗液供給体を回転可能に設け、前記の被塗布体と塗布用ノズルとを相対的に移動させると共に、前記の塗液収容凹部内に塗液が供給された塗液供給体を塗液導入部内で回転させ、塗液収容凹部内から塗液を塗布用ノズルの先端部におけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給し、前記の被塗布体の表面に塗液収容凹部の形状に応じて塗液を塗布させるようにした。 In the coating apparatus according to the present invention, in order to solve the above-mentioned problems, a coating nozzle having a slit-shaped discharge port for discharging the coating liquid at the tip thereof is provided on the object to be coated, and the coating is to be coated. In a coating device that applies the coating liquid to the surface of the object to be coated through the slit-shaped discharge port by relatively moving the body and the coating nozzle, the coating liquid is applied to the inside of the coating nozzle from the coating liquid supply port. A coating liquid introduction portion to which the liquid is supplied is provided so as to communicate with the slit-shaped discharge port, and a coating liquid storage recess having a predetermined pattern shape for accommodating the supplied coating liquid is provided in the coating liquid introduction portion. Upon shaped cylinder provided on the outer peripheral surface of the coating liquid supply member, Ru rotatably provided coating liquid introducing portion so as to be positioned on the coating liquid introducing portion and the slit-shaped discharge port communicating, the coating liquid At least the bottom of the coating liquid introduction portion inside the coating nozzle to which is supplied is formed in a flat shape, and the slit-shaped discharge port is communicated with the bottom of the coating liquid introduction portion formed in a flat shape. The coating liquid supply body is rotatably provided so as to come into contact with the bottom portion of the coating liquid introduction portion formed in a plane shape, and the object to be coated and the coating nozzle are relatively moved and described above. The coating liquid supply body in which the coating liquid is supplied into the coating liquid storage recess is rotated in the coating liquid introduction portion, and the coating liquid is applied from the coating liquid storage recess through the slit-shaped discharge port at the tip of the coating nozzle to the coating nozzle. It is supplied to the surface of the object to be coated that is relatively moved, and the coating liquid is applied to the surface of the object to be coated according to the shape of the coating liquid accommodating recess.

そして、本発明に係る塗布装置のように、塗液供給口から塗液が供給される塗布用ノズルにおける塗液導入部内に、塗液供給体をスリット状吐出口の上に位置するようにして回転可能に設け、この塗液供給体の外周面に設けられた所定のパターン形状になった塗液収容凹部内に塗液導入部内に供給された塗液を導くようにし、このように塗液収容凹部内に塗液が導かれた塗液供給体を前記のスリット状吐出口の上の位置で回転させると共に、被塗布体と塗布用ノズルとを相対的に移動させると、前記の塗液供給体における塗液収容凹部がスリット状吐出口と連通される位置に導かれた状態では、この塗液収容凹部内から塗液が、塗布用ノズルの先端部におけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給され、被塗布体の表面に塗液収容凹部の形状に応じて塗液を塗布されるようになる。 Then, as in the coating device according to the present invention, the coating liquid supply body is positioned above the slit-shaped discharge port in the coating liquid introduction portion of the coating nozzle to which the coating liquid is supplied from the coating liquid supply port. The coating liquid is rotatably provided, and the coating liquid supplied into the coating liquid introduction portion is guided into the coating liquid storage recess having a predetermined pattern shape provided on the outer peripheral surface of the coating liquid supply body. When the coating liquid supply body in which the coating liquid is guided into the accommodating recess is rotated at a position above the slit-shaped discharge port and the object to be coated and the coating nozzle are relatively moved, the coating liquid is described. When the coating liquid accommodating recess in the feeder is guided to a position where it communicates with the slit-shaped discharge port, the coating liquid is discharged from the coating liquid accommodating recess through the slit-shaped discharge port at the tip of the coating nozzle. It is supplied to the surface of the object to be coated, which is moved relative to the subject, and the coating liquid is applied to the surface of the object to be coated according to the shape of the coating liquid storage recess.

また、本発明に係る塗布装置において、回転する塗液供給体を円柱状にし、塗液をいったん塗液収容凹部内に供給してから吐出させるため、前記の特許文献４のような円筒状の回転マニーホールド内に大量に収容された塗液を直接吐出する場合のように、塗液が過剰に吐出したり、液だれしたりするのが防止される。 Further, in the coating apparatus according to the present invention, the rotating coating liquid feeder is formed into a cylindrical shape, and the coating liquid is once supplied into the coating liquid accommodating recess and then discharged. It is possible to prevent the coating liquid from being excessively discharged or dripping, as in the case where a large amount of the coating liquid contained in the rotary manifold is directly discharged.

また、本発明に係る塗布装置においては、前記の被塗布体と塗布用ノズルとを相対的に移動させると共に、前記の塗液収容凹部内に塗液が供給された塗液供給体を塗液導入部内で回転させて、塗液収容凹部内に収容された塗液を塗布用ノズルの先端部におけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給し、前記の塗液収容凹部の形状に応じてウエハー等の円形状になった被塗布体の表面に塗液を円形状に塗布させることができる。 Further, in the coating apparatus according to the present invention, the coating body to be coated and the coating nozzle are relatively moved, and the coating liquid supply body to which the coating liquid is supplied is applied to the coating liquid storage recess. Rotated in the introduction portion, the coating liquid contained in the coating liquid accommodating recess is supplied to the surface of the object to be coated, which is moved relative to the coating nozzle through the slit-shaped discharge port at the tip of the coating nozzle. The coating liquid can be applied in a circular shape to the surface of the object to be coated, which has a circular shape such as a wafer, according to the shape of the coating liquid accommodating recess.

ここで、このように被塗布体の表面に塗布用ノズルから塗液を円形状に塗布させるにあたっては、塗液供給体の外周面に塗液収容凹部を軸方向の長さが長くなった楕円形状に凹設させ、前記の塗液供給体を回転させる周速度よりも被塗布体と塗布用ノズルとを相対的に移動させる移動速度を速くして、被塗布体の表面に塗液を円形状に塗布させることができる。このようにすると、塗液収容凹部を設ける塗液供給体の径を小さくすることができて、塗布用ノズルを小型化させることができるようになる。 Here, when the coating liquid is applied to the surface of the object to be coated in a circular shape from the coating nozzle, an ellipse having a coating liquid accommodating recess on the outer peripheral surface of the coating liquid supply body having a long axial length. The coating liquid is circularly formed on the surface of the coating body by making it recessed in a shape and making the moving speed of moving the object to be coated and the nozzle for coating relatively faster than the peripheral speed of rotating the coating solution supply body. It can be applied to the shape. In this way, the diameter of the coating liquid supply body provided with the coating liquid accommodating recess can be reduced, and the coating nozzle can be miniaturized.

そして、本発明に係る塗布方法においては、前記のような塗布装置を使用し、前記の塗液導入部内に回転可能に設けた塗液供給体における塗液収容凹部が設けられていない部分によって塗布用ノズルの先端部におけるスリット状吐出口を閉塞させた状態で、前記の塗液供給口から塗液を塗液導入部内に供給すると共に、この塗液導入部内に回転可能に設けた前記の塗液供給体の外周面に形成した所定のパターン形状になった塗液収容凹部内に前記の塗液を供給させ、前記の被塗布体と塗布用ノズルとを相対的に移動させると共に、前記の塗液収容凹部内に塗液が供給された塗液供給体を塗液導入部内で回転させて、塗液収容凹部内から塗液を塗布用ノズルの先端部におけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給し、前記の被塗布体の表面に塗液収容凹部の形状に応じて塗液を塗布させるようにする。 Then, in the coating method according to the present invention, the coating device as described above is used, and coating is performed by a portion of the coating liquid supply body rotatably provided in the coating liquid introduction portion where the coating liquid storage recess is not provided. With the slit-shaped discharge port at the tip of the nozzle closed, the coating liquid is supplied into the coating liquid introduction portion from the coating liquid supply port, and the coating liquid is rotatably provided in the coating liquid introduction portion. The coating liquid is supplied into the coating liquid storage recess having a predetermined pattern shape formed on the outer peripheral surface of the liquid supply body, the coated body and the coating nozzle are relatively moved, and the coating liquid is relatively moved. The coating liquid supply body in which the coating liquid is supplied into the coating liquid storage recess is rotated in the coating liquid introduction portion, and the coating liquid is applied from the coating liquid storage recess through the slit-shaped discharge port at the tip of the coating nozzle. It is supplied to the surface of the object to be coated, which is relatively moved to the surface of the object to be coated, and the coating liquid is applied to the surface of the object to be coated according to the shape of the coating liquid accommodating recess.

このようにした場合、前記の塗液供給口から塗液を筒状になった塗液導入部内に供給した際に、塗液供給体における塗液収容凹部が設けられていない部分により塗布用ノズルにおけるスリット状吐出口が閉塞され、塗液が外部に漏れ出すということがない。そして、前記のように被塗布体と塗布用ノズルとを相対的に移動させると共に、塗液収容凹部内に塗液が供給された前記の塗液供給体を塗液導入部内で回転させると、塗液収容凹部内に収容された塗液が、塗布用ノズルにおけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給されて、被塗布体の表面に塗液収容凹部の形状に応じて塗液を塗布させることができる。 In this case, when the coating liquid is supplied from the coating liquid supply port into the tubular coating liquid introduction portion, the coating nozzle is provided by the portion of the coating liquid supply body in which the coating liquid accommodating recess is not provided. The slit-shaped discharge port is not blocked, and the coating liquid does not leak to the outside. Then, as described above, the object to be coated and the nozzle for coating are relatively moved, and the coating liquid supply body to which the coating liquid is supplied into the coating liquid storage recess is rotated in the coating liquid introduction portion. The coating liquid contained in the coating liquid accommodating recess is supplied to the surface of the object to be coated, which is moved relative to the coating nozzle through the slit-shaped discharge port of the coating nozzle, and is applied to the surface of the object to be coated. The coating liquid can be applied according to the shape of the accommodating recess.

本発明における塗布装置においては、前記のように塗布用ノズルの内部に塗液供給口から塗液が供給される塗液導入部内の底部に、塗液供給体をスリット状吐出口の上に位置するようにして回転可能に設け、この塗液供給体の外周面に設けられた所定のパターン形状になった塗液収容凹部内に、前記の塗液導入部内に供給された塗液を収容させ、このように塗液収容凹部内に塗液が供給された塗液供給体を前記のスリット状吐出口の上の位置で回転させると共に、被塗布体と塗布用ノズルとを相対的に移動させると、前記の塗液収容凹部内から塗液が、塗布用ノズルの先端部におけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給されて、被塗布体の表面に塗液収容凹部の形状に応じて塗液を塗布させることができる。 In the coating apparatus of the present invention, as described above, the coating liquid supply body is positioned above the slit-shaped discharge port at the bottom of the coating liquid introduction portion where the coating liquid is supplied from the coating liquid supply port to the inside of the coating nozzle. The coating liquid supplied into the coating liquid introduction portion is stored in the coating liquid storage recess having a predetermined pattern shape provided on the outer peripheral surface of the coating liquid supply body so as to be rotatably provided. The coating liquid supply body in which the coating liquid is supplied into the coating liquid storage recess is rotated at a position above the slit-shaped discharge port, and the object to be coated and the coating nozzle are relatively moved. Then, the coating liquid is supplied from the inside of the coating liquid accommodating recess to the surface of the object to be coated, which is moved relative to the coating nozzle through the slit-shaped discharge port at the tip of the coating nozzle. The coating liquid can be applied to the surface according to the shape of the coating liquid accommodating recess.

この結果、本発明における塗布装置やこのような塗布装置を用いた塗布方法においては、被塗布体の上に、塗液を吐出させるスリット状吐出口を先端部に有する塗布用ノズルを設け、前記の被塗布体と塗布用ノズルとを相対的に移動させて、前記のスリット状吐出口を通して被塗布体の表面に塗液を塗布するにあたり、塗液に濃度ムラや粘度ムラ等が生じないようにして、被塗布体の表面に塗液を円形状等の各種の形状になるようにして簡単に塗布できるようになる。 As a result, in the coating device of the present invention and the coating method using such a coating device, a coating nozzle having a slit-shaped discharge port for discharging the coating liquid at the tip thereof is provided on the object to be coated. When applying the coating solution to the surface of the object to be coated through the slit-shaped discharge port by relatively moving the object to be coated and the nozzle for coating, the coating solution should not have uneven concentration or uneven viscosity. Then, the coating liquid can be easily applied to the surface of the object to be coated in various shapes such as a circular shape.

本発明の実施形態に係る塗布装置において、塗液が供給される塗布用ノズルにおける塗液導入部内に回転可能に設ける塗液供給体の外周面に対して塗液を収容させる楕円形状になった塗液収容凹部を設けた状態を示し、（Ａ）は塗液収容凹部を設けた塗液供給体の概略正面図、（Ｂ）は塗液供給体の外周面に設けた塗液収容凹部の展開平面図である。In the coating apparatus according to the embodiment of the present invention, the coating apparatus has an elliptical shape in which the coating liquid is accommodated with respect to the outer peripheral surface of the coating liquid supply body rotatably provided in the coating liquid introduction portion of the coating nozzle to which the coating liquid is supplied. The state in which the coating liquid accommodating recess is provided is shown, (A) is a schematic front view of the coating liquid feeder provided with the coating liquid accommodating recess, and (B) is the coating liquid accommodating recess provided on the outer peripheral surface of the coating liquid supply body. It is a developed plan view. 前記の実施形態に係る塗布装置において、前記の塗液供給体を塗布用ノズルの内部における塗液が供給される前記の塗布用ノズルの内部における塗液導入部の少なくとも底部を平面状に形成し、この平面状に形成された塗液導入部の底部に前記のスリット状吐出口が連通されるようにして、平面状に形成された塗液導入部の底部と接触するように前記の塗液供給体を回転可能に設け、塗液供給体における塗液収容凹部が設けられていない部分によって塗布用ノズルの先端部におけるスリット状吐出口を閉塞させた状態を示し、（Ａ）は塗布用ノズルの長手方向の概略断面説明図、（Ｂ）は塗布用ノズルの長手方向と交差する方向の概略断面説明図である。In the coating apparatus according to the above embodiment, the coating liquid supply body is formed with at least the bottom portion of the coating liquid introduction portion inside the coating nozzle to which the coating liquid is supplied inside the coating nozzle in a flat shape. The slit-shaped discharge port is communicated with the bottom of the flat coating liquid introduction portion so as to be in contact with the bottom of the flat coating liquid introduction portion. A state in which the feeder is rotatably provided and the slit-shaped discharge port at the tip of the coating nozzle is closed by a portion of the coating liquid supply body in which the coating liquid storage recess is not provided, and (A) shows the coating nozzle. FIG. 5B is a schematic cross-sectional explanatory view in the longitudinal direction of the above, and FIG. 3B is a schematic cross-sectional explanatory view in a direction intersecting the longitudinal direction of the coating nozzle. 前記の実施形態に係る塗布装置において、前記の塗液供給体を塗布用ノズルの内部における底部が平面状に形成された塗液導入部内に回転可能に設け、この塗液供給体における塗液収容凹部が設けられていない部分によって塗布用ノズルの先端部におけるスリット状吐出口を閉塞させた状態で、塗布用ノズルの塗液供給口から塗液導入部に塗液を供給させて、塗液供給体における塗液収容凹部内に塗液を収容させた状態を示し、（Ａ）は塗布用ノズルの長手方向の概略断面説明図、（Ｂ）は塗布用ノズルの長手方向と交差する方向の概略断面説明図である。In the coating apparatus according to the above embodiment, the coating liquid supply body is rotatably provided in a coating liquid introduction portion having a flat bottom inside the coating nozzle, and the coating liquid is stored in the coating liquid supply body. With the slit-shaped discharge port at the tip of the coating nozzle blocked by a portion not provided with a recess, the coating liquid is supplied from the coating liquid supply port of the coating nozzle to the coating liquid introduction portion to supply the coating liquid. The state in which the coating liquid is contained in the coating liquid accommodating recess in the body is shown, (A) is a schematic cross-sectional explanatory view in the longitudinal direction of the coating nozzle, and (B) is a schematic in the direction intersecting the longitudinal direction of the coating nozzle. It is sectional drawing explanatory drawing. 前記の実施形態に係る塗布装置において、塗布用ノズルにおける塗液導入部に塗液を供給させた状態で、この塗布用ノズルを被塗布体の上を移動させる共に、前記の塗液供給体を塗液導入部内で回転させて、塗液供給体における塗液収容凹部内から塗液を、塗布用ノズルの先端部のスリット状吐出口から被塗布体の表面に塗布させる状態を示し、（Ａ）は塗布用ノズルにより被塗布体の表面に塗液を塗布させる最初の状態を示した塗布用ノズルの長手方向及び長手方向と交差する方向の概略断面説明図、（Ｂ）は塗布用ノズルにより被塗布体の表面に塗液を最大幅で塗布させる状態を示した塗布用ノズルの長手方向及び長手方向と交差する方向の概略断面説明図、（Ｃ）は塗布用ノズルにより被塗布体の表面全体に塗液を塗布させた場合における塗布用ノズルの長手方向及び長手方向と交差する方向の概略断面説明図である。In the coating apparatus according to the above-described embodiment, in a state where the coating liquid is supplied to the coating liquid introduction portion of the coating nozzle, the coating nozzle is moved on the object to be coated, and the coating liquid supply body is moved. A state is shown in which the coating liquid is applied to the surface of the object to be coated from the slit-shaped discharge port at the tip of the coating nozzle by rotating in the coating liquid introduction portion from the inside of the coating liquid storage recess in the coating liquid supply body. ) Is a schematic cross-sectional explanatory view of the longitudinal direction of the coating nozzle and the direction intersecting the longitudinal direction showing the initial state in which the coating liquid is applied to the surface of the object to be coated by the coating nozzle, and (B) is the coating nozzle. Schematic cross-sectional explanatory view of the longitudinal direction of the coating nozzle and the direction intersecting the longitudinal direction showing the state in which the coating liquid is applied to the surface of the object to be coated in the maximum width, (C) is the surface of the object to be coated by the coating nozzle. It is a schematic cross-sectional explanatory view of the longitudinal direction of the coating nozzle and the direction intersecting the longitudinal direction when the coating liquid is applied to the whole. 前記の実施形態に係る塗布装置において、前記の図４に示したように、塗布用ノズルを被塗布体の上を移動させる共に、前記の塗液供給体を塗液導入部内で回転させて、塗液供給体における塗液収容凹部内から塗液を塗布用ノズルの先端部のスリット状吐出口から被塗布体の表面に塗布させた被塗布体の平面状態を示し、（Ａ）は図４（Ａ）の状態を示した平面図、（Ｂ）は図４（Ｂ）の状態を示した平面図、（Ｃ）は図４（Ｃ）の状態を示した平面図である。In the coating apparatus according to the above-described embodiment, as shown in FIG. 4, the coating nozzle is moved on the object to be coated, and the coating solution feeder is rotated in the coating solution introduction unit. FIG. 4A shows a flat state of the object to be coated, in which the coating liquid is applied to the surface of the object to be coated from the slit-shaped discharge port at the tip of the nozzle for coating from the inside of the recess for accommodating the coating liquid in the coating liquid supply body. A plan view showing the state of (A), (B) is a plan view showing the state of FIG. 4 (B), and (C) is a plan view showing the state of FIG. 4 (C). 本発明の参考形態に係る塗布装置において、前記の塗液供給体を塗布用ノズルの内部における底部が円弧状に形成された塗液導入部内に回転可能に設け、この塗液供給体における塗液収容凹部が設けられていない部分によって塗布用ノズルの先端部におけるスリット状吐出口を閉塞させた状態を示した概略断面説明図である。 In the coating apparatus according to the reference embodiment of the present invention, the coating liquid supply body is rotatably provided in the coating liquid introduction portion whose bottom portion inside the coating nozzle is formed in an arc shape, and the coating liquid in the coating liquid supply body is provided. It is a schematic cross-sectional explanatory view which showed the state which closed the slit-shaped discharge port at the tip part of the coating nozzle by the part which did not provide the accommodating recess. 本発明の実施形態に係る塗布装置において、塗液供給体の外周面に塗液を収容させる塗液収容凹部を設けるにあたって、塗液収容凹部の形状を変更させた複数の変更例を示した概略展開図である。 In the coating apparatus according to the embodiment of the present invention, when the coating liquid accommodating recess for accommodating the coating liquid is provided on the outer peripheral surface of the coating liquid supply body, an outline showing a plurality of modified examples in which the shape of the coating liquid accommodating recess is changed. It is a development view.

以下、本発明の実施形態に係る塗布装置及び塗布方法を添付図面に基づいて具体的に説明する。なお、本発明に係る塗布装置及び塗布方法は、下記の実施形態に示したものに限定されず、発明の要旨を変更しない範囲において、適宜変更して実施できるものである。 Hereinafter, the coating apparatus and coating method according to the embodiment of the present invention will be specifically described with reference to the accompanying drawings. The coating apparatus and coating method according to the present invention are not limited to those shown in the following embodiments, and can be appropriately modified and implemented without changing the gist of the invention.

ここで、この実施形態の塗布装置においては、図２（Ａ），（Ｂ）等の添付図面に示すように、塗液Ｐを吐出させるスリット状吐出口１１を先端部に有する塗布用ノズル１０を被塗布体Ｗの上に配置させ、前記の塗布用ノズル１０の内部に塗液供給口１２から圧力をかけて塗液Ｐが供給される塗液導入部１３を前記のスリット状吐出口１１と連通するように設けると共に、このスリット状吐出口１１に連通させる塗液導入部１３の底部を平面状に形成している。 Here, in the coating apparatus of this embodiment, as shown in the attached drawings of FIGS. 2A and 2B, the coating nozzle 10 having a slit-shaped discharge port 11 at the tip for discharging the coating liquid P. Is arranged on the body W to be coated, and the coating liquid introduction portion 13 to which the coating liquid P is supplied by applying pressure from the coating liquid supply port 12 to the inside of the coating nozzle 10 is provided with the slit-shaped discharge port 11. The bottom portion of the coating liquid introduction portion 13 communicating with the slit-shaped discharge port 11 is formed in a flat shape.

また、この実施形態における塗布装置においては、塗液供給体１４として、図１（Ａ），（Ｂ）に示すように、円柱状になった塗液供給体１４の外周面に軸方向の長さが長くなった楕円形状になった塗液収容凹部１４ａを凹設させたものを用い、図２（Ａ），（Ｂ）に示すように、この塗液供給体１４を前記のように平面状に形成された塗液導入部１３の底部に接触させるようにして、この塗液供給体１４を塗液導入部１３内の底部に回転可能に収容させると共に、この塗液供給体１４の両端面の中心部から両側に回転軸１４ｂを延出させて、各回転軸１４ｂを塗布用ノズル１０の両側部に密封させた状態で回転可能に保持させると共に、塗布用ノズル１０の片側の側部から延出された回転軸１４ｂを回転装置１５により回転させるようにしている。 Further, in the coating apparatus of this embodiment, as the coating liquid supply body 14, as shown in FIGS. 1A and 1B, the length of the coating liquid supply body 14 in the axial direction is long on the outer peripheral surface of the cylindrical coating liquid supply body 14. As shown in FIGS. 2 (A) and 2 (B), the coating liquid supply body 14 is flat as described above, using a concave coating liquid accommodating recess 14a having an elliptical shape and an elongated shape. The coating liquid supply body 14 is rotatably housed in the bottom portion of the coating liquid introduction portion 13 so as to be in contact with the bottom portion of the coating liquid introduction portion 13 formed in a shape, and both ends of the coating liquid supply body 14 are rotatably accommodated. Rotating shafts 14b extend from the center of the surface to both sides to rotatably hold each rotating shaft 14b in a sealed state on both sides of the coating nozzle 10, and one side of the coating nozzle 10. The rotating shaft 14b extended from the above is rotated by the rotating device 15.

ここで、この実施形態における塗布装置においては、前記のように円柱状になった塗液供給体１４を、平面状に形成した塗液導入部１３の底部に接触させるようにして塗液導入部１３内の底部に回転可能に収容させ、図３（Ａ），（Ｂ）に示すように、この塗液供給体１４における前記の塗液収容凹部１４ａが塗布用ノズル１０のスリット状吐出口１１と重ならないようにして、塗液収容凹部１４ａが設けられていない塗液供給体１４の部分においてスリット状吐出口１１を閉塞させ、この状態で、前記の塗液供給口１２から塗液Ｐを塗布用ノズル１０内部の塗液導入部１３に供給させるようにし、塗液導入部１３内に供給された塗液Ｐが前記の塗液供給体１４によってスリット状吐出口１１に導かれないようにしている。 Here, in the coating apparatus of this embodiment, the coating liquid introduction unit 14 having a columnar shape as described above is brought into contact with the bottom portion of the coating liquid introduction unit 13 formed in a flat shape. As shown in FIGS. 3A and 3B, the coating liquid accommodating recess 14a in the coating liquid supply body 14 is rotatably accommodated in the bottom portion of the coating nozzle 10, and the slit-shaped discharge port 11 of the coating nozzle 10 is formed. The slit-shaped discharge port 11 is closed at the portion of the coating liquid supply body 14 in which the coating liquid storage recess 14a is not provided so as not to overlap with the coating liquid supply port 12, and in this state, the coating liquid P is discharged from the coating liquid supply port 12. The coating liquid P supplied into the coating liquid introduction unit 13 is supplied to the coating liquid introduction unit 13 inside the coating nozzle 10 so that the coating liquid P supplied into the coating liquid introduction unit 13 is not guided to the slit-shaped discharge port 11 by the coating liquid supply body 14. ing.

そして、この実施形態における塗布装置においては、前記のように塗液導入部１３内に供給させた塗液Ｐが前記の塗液供給体１４によってスリット状吐出口１１に導かれないようにした状態で、前記のスリット状吐出口１１から被塗布体Ｗの表面に塗液Ｐの塗布を開始させる位置に導き、図４（Ａ）〜（Ｃ）に示すように、前記の塗布用ノズル１０を被塗布体Ｗの表面に塗液Ｐを塗布させる方向に移動させながら、前記の塗液供給体１４を前記の回転装置１５により回転させ、塗液供給体１４の外周面に凹設させた塗液収容凹部１４ａが塗布用ノズル１０のスリット状吐出口１１と重なった部分からスリット状吐出口１１を通して、塗液収容凹部１４ａ内に収容された塗液Ｐを被塗布体Ｗの表面に供給させるようにしている。なお、この塗布装置においては、操業中は、図３（Ａ），（Ｂ）や図４（Ａ）〜（Ｃ）に示すように、スリット状吐出口１１全体に塗液Ｐが溜まった状態になっており、図４（Ａ），（Ｂ）に示すように、塗液供給体１４が回転して、塗液供給体１４の外周面に凹設させた塗液収容凹部１４ａが塗布用ノズル１０のスリット状吐出口１１と重なった部分だけ、塗液Ｐがスリット状吐出口１１を通して被塗布体Ｗの表面に供給されるようになる。 Then, in the coating device of this embodiment, the coating liquid P supplied into the coating liquid introduction unit 13 as described above is prevented from being guided to the slit-shaped discharge port 11 by the coating liquid supply body 14. Then, the slit-shaped discharge port 11 is guided to a position where the coating liquid P is started on the surface of the object to be coated W, and as shown in FIGS. 4A to 4C, the coating nozzle 10 is used. While moving in the direction in which the coating liquid P is applied to the surface of the coating body W, the coating liquid supply body 14 is rotated by the rotating device 15 and is recessed in the outer peripheral surface of the coating liquid supply body 14. The coating liquid P contained in the coating liquid accommodating recess 14a is supplied to the surface of the object to be coated W through the slit-shaped discharging port 11 from the portion where the liquid accommodating recess 14a overlaps with the slit-shaped discharging port 11 of the coating nozzle 10. I am trying to do it. In this coating device, as shown in FIGS. 3 (A) and 3 (B) and FIGS. 4 (A) to 4 (C), the coating liquid P is accumulated in the entire slit-shaped discharge port 11 during operation. As shown in FIGS. 4A and 4B, the coating liquid supply body 14 rotates, and the coating liquid storage recess 14a recessed in the outer peripheral surface of the coating liquid supply body 14 is used for coating. Only the portion of the nozzle 10 that overlaps the slit-shaped discharge port 11 is supplied with the coating liquid P to the surface of the object to be coated W through the slit-shaped discharge port 11.

そして、この実施形態における塗布装置においては、図４（Ａ）〜（Ｃ）及び図５（Ａ）〜（Ｃ）に示すように、円形状になった被塗布体Ｗの表面に対して、前記の塗液供給体１４の外周面に凹設させた塗液収容凹部１４ａに収容された塗液Ｐを、塗布用ノズル１０からスリット状吐出口１１を通して円形状に塗布するようにしている。 Then, in the coating apparatus of this embodiment, as shown in FIGS. 4 (A) to 4 (C) and FIGS. 5 (A) to 5 (C), the surface of the object W to be coated has a circular shape. The coating liquid P contained in the coating liquid storage recess 14a recessed in the outer peripheral surface of the coating liquid supply body 14 is applied in a circular shape from the coating nozzle 10 through the slit-shaped discharge port 11.

この間、塗液供給口１２から圧力をかけて供給された塗液Ｐは、塗液導入部１３から塗液収容凹部１４ａを通して供給が続けられる。 During this time, the coating liquid P supplied by applying pressure from the coating liquid supply port 12 continues to be supplied from the coating liquid introduction portion 13 through the coating liquid accommodating recess 14a.

ここで、この実施形態における塗布装置においては、前記のように円柱状になった塗液供給体１４の外周面に塗液収容凹部１４ａを軸方向の長さが長くなった楕円形状になるように凹設させているため、前記のように塗液供給体１４の外周面に凹設させた塗液収容凹部１４ａに収容された塗液Ｐを、塗布用ノズル１０のスリット状吐出口１１から円形状になった被塗布体Ｗの表面に円形状に塗布するにあたっては、前記の塗液供給体１４を回転させる周速度よりも被塗布体Ｗの上を移動させる塗布用ノズル１０の移動速度を速くして、軸方向の長さが長くなった楕円形状になった塗液収容凹部１４ａから前記のスリット状吐出口１１を通して、円形状になった被塗布体Ｗの表面に塗液Ｐを円形状に塗布させるようにしている。 Here, in the coating apparatus in this embodiment, so that the elliptical shape coating liquid accommodating recess 14a of the axial length to the outer peripheral surface of the coating liquid supply member 14 which becomes cylindrical is prolonged as Since the coating liquid P is recessed in the coating liquid storage recess 14a recessed in the outer peripheral surface of the coating liquid supply body 14 as described above, the coating liquid P contained in the coating liquid storage recess 14a is discharged from the slit-shaped discharge port 11 of the coating nozzle 10. When applying in a circular shape to the surface of the object to be coated W having a circular shape, the moving speed of the coating nozzle 10 for moving the object to be coated W is higher than the peripheral speed for rotating the liquid supply body 14. The coating liquid P is applied to the surface of the object to be coated W, which has a circular shape, through the slit-shaped discharge port 11 from the coating liquid storage recess 14a having an elliptical shape having a long axial length. It is applied in a circular shape.

このようにすると、円形状になった被塗布体Ｗの表面に塗液Ｐを円形状に塗布させるにあたり、塗液供給体１４の外周面に被塗布体Ｗに対応した大きさの円形状の塗液収容凹部１４ａを設ける必要がなく、前記のように軸方向の長さが長くなった楕円形状の塗液収容凹部１４ａとすることによって塗液供給体１４の径を小さくすることができ、塗布用ノズル１０を小型化させることができるようになる。 In this way, when the coating liquid P is applied in a circular shape to the surface of the object to be coated W having a circular shape, the outer peripheral surface of the coating liquid supply body 14 has a circular shape having a size corresponding to the object to be coated W. It is not necessary to provide the coating liquid accommodating recess 14a, and the diameter of the coating liquid supply body 14 can be reduced by forming the elliptical coating liquid accommodating recess 14a having a long axial length as described above. The coating nozzle 10 can be miniaturized.

また、この実施形態における塗布装置においては、塗布用ノズル１０により被塗布体Ｗの表面に塗液Ｐを塗布させるにあたり、塗布用ノズル１０を被塗布体Ｗの表面に塗液Ｐを塗布させる方向に移動させるようにしたが、塗布用ノズル１０を固定させ、この塗布用ノズル１０に対して被塗布体Ｗを移動させるようにして、被塗布体Ｗの表面に塗液Ｐを塗布させることも可能である。 Further, in the coating apparatus of this embodiment, when the coating liquid P is applied to the surface of the object to be coated W by the coating nozzle 10, the coating nozzle 10 is directed to apply the coating liquid P to the surface of the object to be coated W. was to move to, to fix the coating nozzle 10, so as to move the member to be coated W to the coating nozzle 10, also it is coated with the coating liquid P on the surface of the medium to be coated W It is possible.

また、この実施形態における塗布装置においては、塗液Ｐを吐出させるスリット状吐出口１１を先端部に有する塗布用ノズル１０において、塗液Ｐが供給される塗液導入部１３をスリット状吐出口１１と連通するように設けると共に、このスリット状吐出口１１に連通させる塗液導入部１３の底部を平面状に形成するようにした。なお、図６に示す参考形態においては、スリット状吐出口１１に連通させる塗液導入部１３の底部を円弧状に形成している。 Further, in the coating device of this embodiment, in the coating nozzle 10 having a slit-shaped discharge port 11 for discharging the coating liquid P at the tip portion, the coating liquid introduction portion 13 to which the coating liquid P is supplied is a slit-shaped discharge port. It is provided so as to communicate with 11 and the bottom portion of the coating liquid introduction portion 13 communicating with the slit-shaped discharge port 11 is formed to be flat . In the reference mode shown in FIG. 6, the bottom portion of the coating liquid introduction portion 13 communicating with the slit-shaped discharge port 11 is formed in an arc shape.

また、この実施形態における塗布装置においては、円形状になった被塗布体Ｗの表面に、塗布用ノズル１０から塗液Ｐを円形状に塗布させるようにしたが、被塗布体Ｗの形状は特に円形状のものに限られず、また塗布用ノズル１０のスリット状吐出口１１を通して被塗布体Ｗの表面に塗液Ｐを塗布させる前記の塗液供給体１４の外周面に凹設させる塗液収容凹部１４ａの形状も限定されず、例えば、図７（Ａ），（Ｂ），（Ｃ）に示すように、塗液供給体１４の外周面に凹設させる塗液収容凹部１４ａの形状を四角形状や三角形状や瓢箪形状にする等、様々な形状の塗液収容凹部１４ａを設けるようにすることができる。 Further, in the coating device of this embodiment, the coating liquid P is applied in a circular shape from the coating nozzle 10 to the surface of the object to be coated W having a circular shape, but the shape of the object to be coated W is different. The coating liquid is not particularly limited to a circular shape, and the coating liquid P is applied to the surface of the object to be coated W through the slit-shaped discharge port 11 of the coating nozzle 10 so as to be recessed on the outer peripheral surface of the coating liquid supply body 14. The shape of the accommodating recess 14a is also not limited, and for example, as shown in FIGS. 7A, 7B, and 7C, the shape of the accommodating recess 14a recessed in the outer peripheral surface of the coating liquid supply body 14 is formed. It is possible to provide the coating liquid accommodating recess 14a having various shapes such as a quadrangular shape, a triangular shape, and a gourd shape.

１０ ：塗布用ノズル
１１ ：スリット状吐出口
１２ ：塗液供給口
１３ ：塗液導入部
１４ ：塗液供給体
１４ａ ：塗液収容凹部
１４ｂ ：回転軸
１５ ：回転装置
Ｐ ：塗液
Ｗ ：被塗布体
10: Coating nozzle 11: Slit-shaped discharge port 12: Coating liquid supply port 13: Coating liquid introduction portion 14: Coating liquid supply body 14a: Coating liquid storage recess 14b: Rotating shaft 15: Rotating device P: Coating liquid W: Cover Coating body

Claims (4)

被塗布体の上に、塗液を吐出させるスリット状吐出口を先端部に有する塗布用ノズルを設け、前記の被塗布体と塗布用ノズルとを相対的に移動させて、前記のスリット状吐出口を通して被塗布体の表面に塗液を塗布する塗布装置において、前記の塗布用ノズルの内部に塗液供給口から塗液が供給される塗液導入部を前記のスリット状吐出口と連通するように設けると共に、この塗液導入部内に供給された塗液を収容させる所定のパターン形状になった塗液収容凹部が外周面に設けられた円柱状の塗液供給体を、前記の塗液導入部と連通するスリット状吐出口の上に位置するようにして塗液導入部内に回転可能に設けるにあたり、塗液が供給される前記の塗布用ノズルの内部における塗液導入部の少なくとも底部を平面状に形成し、この平面状に形成された塗液導入部の底部に前記のスリット状吐出口を連通させ、この平面状に形成された塗液導入部の底部と接触するように前記の塗液供給体を回転可能に設け、前記の被塗布体と塗布用ノズルとを相対的に移動させると共に、前記の塗液収容凹部内に塗液が供給された塗液供給体を塗液導入部内で回転させ、塗液収容凹部内から塗液を塗布用ノズルの先端部におけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給し、前記の被塗布体の表面に塗液収容凹部の形状に応じて塗液を塗布させることを特徴とする塗布装置。 A coating nozzle having a slit-shaped discharge port for discharging the coating liquid at the tip thereof is provided on the object to be coated, and the object to be coated and the nozzle for coating are relatively moved to discharge the slit-shaped discharge. In a coating device that applies a coating liquid to the surface of an object to be coated through an outlet, a coating liquid introduction portion in which the coating liquid is supplied from the coating liquid supply port is communicated with the slit-shaped discharge port inside the coating nozzle. A columnar coating liquid supply body having a coating liquid accommodating recess having a predetermined pattern shape for accommodating the coating liquid supplied into the coating liquid introduction portion is provided on the outer peripheral surface thereof. Upon so as to be positioned above the slit-like discharge port communicating with the inlet portion Ru rotatably provided coating liquid introducing portion, at least a bottom portion of the coating liquid introducing portion inside of the coating nozzle of the coating liquid is supplied Is formed in a flat shape, and the slit-shaped discharge port is communicated with the bottom of the flatly formed coating liquid introduction portion so as to be in contact with the bottom of the flatly formed coating liquid introducing portion. The coating liquid supply body is rotatably provided , the coating body to be coated and the coating nozzle are relatively moved, and the coating liquid supply body to which the coating liquid is supplied is applied to the coating liquid storage recess. It is rotated in the introduction portion, and the coating liquid is supplied from the coating liquid accommodating recess to the surface of the object to be coated, which is moved relative to the coating nozzle through the slit-shaped discharge port at the tip of the coating nozzle, and is coated. A coating device characterized in that a coating liquid is applied to the surface of a body according to the shape of a coating liquid accommodating recess. 請求項１に記載の塗布装置において、前記の被塗布体と塗布用ノズルとを相対的に移動させると共に、前記の塗液収容凹部内に塗液が供給された塗液供給体を塗液導入部内で回転させ、塗液収容凹部内から塗液を塗布用ノズルの先端部におけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給し、前記の塗液収容凹部の形状に応じて被塗布体の表面に塗液を円形状に塗布させることを特徴とする塗布装置。 In the coating apparatus according to claim 1 , the coated body and the coating nozzle are relatively moved, and the coating liquid supply body in which the coating liquid is supplied into the coating liquid storage recess is introduced into the coating liquid. The coating liquid is supplied from the inside of the coating liquid storage recess to the surface of the object to be coated, which is moved relative to the coating nozzle through the slit-shaped discharge port at the tip of the coating nozzle, and is stored in the coating liquid. A coating device characterized in that a coating liquid is applied to the surface of an object to be coated in a circular shape according to the shape of the recess. 請求項１又は請求項２に記載の塗布装置において、前記の塗液供給体の外周面に塗液収容凹部を軸方向の長さが長くなった楕円形状に凹設させ、前記の塗液供給体を回転させる周速度よりも被塗布体と塗布用ノズルとを相対的に移動させる移動速度を速くして、被塗布体の表面に塗液を円形状に塗布させることを特徴とする塗布装置。 In the coating apparatus according to claim 1 or 2 , the coating liquid storage recess is recessed in an elliptical shape having an elongated axial length on the outer peripheral surface of the coating liquid supply body, and the coating liquid is supplied. A coating device characterized in that the coating liquid is applied in a circular shape on the surface of the object to be coated by making the moving speed of moving the object to be coated and the nozzle for coating relatively faster than the peripheral speed of rotating the body. .. 請求項１〜請求項３の何れか１項に記載の塗布装置を用い、前記の塗液導入部内に回転可能に設けた塗液供給体における塗液収容凹部が設けられていない部分によって塗布用ノズルの先端部におけるスリット状吐出口を閉塞させた状態で、前記の塗液供給口から塗液を前記の塗液導入部内に供給し、この塗液導入部内に回転可能に設けた前記の塗液供給体の外周面に形成した所定のパターン形状になった塗液収容凹部内に前記の塗液を供給し、前記の被塗布体と塗布用ノズルとを相対的に移動させると共に、前記の塗液収容凹部内に塗液が供給された塗液供給体を塗液導入部内で回転させて、塗液収容凹部内から塗液を塗布用ノズルの先端部におけるスリット状吐出口を通して塗布用ノズルと相対的に移動される被塗布体の表面に供給し、前記の被塗布体の表面に塗液収容凹部の形状に応じて塗液を塗布させることを特徴とする塗布方法。 The coating device according to any one of claims 1 to 3 is used, and coating is performed by a portion of the coating liquid supply body rotatably provided in the coating liquid introduction portion where the coating liquid accommodating recess is not provided. With the slit-shaped discharge port at the tip of the nozzle closed, the coating liquid is supplied into the coating liquid introduction portion from the coating liquid supply port, and the coating is rotatably provided in the coating liquid introduction portion. The coating liquid is supplied into the coating liquid storage recess having a predetermined pattern shape formed on the outer peripheral surface of the liquid supply body, the coated body and the coating nozzle are relatively moved, and the coating liquid is relatively moved. The coating liquid supply body in which the coating liquid is supplied into the coating liquid storage recess is rotated in the coating liquid introduction portion, and the coating liquid is applied from the coating liquid storage recess through the slit-shaped discharge port at the tip of the coating nozzle. A coating method characterized in that the coating liquid is supplied to the surface of the object to be coated, which is relatively moved to the surface of the object to be coated, and the coating liquid is applied to the surface of the object to be coated according to the shape of the coating liquid storage recess.
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