TWI322040B - Coating method - Google Patents

Coating method Download PDF

Info

Publication number
TWI322040B
TWI322040B TW096119076A TW96119076A TWI322040B TW I322040 B TWI322040 B TW I322040B TW 096119076 A TW096119076 A TW 096119076A TW 96119076 A TW96119076 A TW 96119076A TW I322040 B TWI322040 B TW I322040B
Authority
TW
Taiwan
Prior art keywords
coating
coated
coating liquid
die
liquid
Prior art date
Application number
TW096119076A
Other languages
Chinese (zh)
Other versions
TW200824800A (en
Inventor
Zhidan Wei
Fumiaki Mimura
Original Assignee
Chugai Ro Kogyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Kogyo Kaisha Ltd filed Critical Chugai Ro Kogyo Kaisha Ltd
Publication of TW200824800A publication Critical patent/TW200824800A/en
Application granted granted Critical
Publication of TWI322040B publication Critical patent/TWI322040B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet
    • B05C5/0262Coating heads with slot-shaped outlet adjustable in width, i.e. having lips movable relative to each other in order to modify the slot width, e.g. to close it
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/26Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Description

1322040 九、發明說明: [優先權主張] 5 . 本申請案係基於日本專利申請案號數2006-337687號 主張優先權者。 【發明所屬之技術領域】 本發明係有關一種塗佈方法,一邊從塗佈用模具(以^) 的噴嘴部的前端面所設之狹縫狀的喷出口供給塗佈液至被 .塗佈體的表面,一邊使該塗佈用模具相對地行走於被塗佈 •體而將塗佈液塗佈至被塗佈體的表面。詳而言之,係具有 即使使用低黏度的塗佈液於上述的塗佈液,亦可防止產生 行走方向之紋理不均,同時抑制塗佈開始位置的塗佈液 的膜厚變厚之特徵者。 【先前技術】 直以來,於製造液晶顯示面板、電漿顯示面板、有 機電激發光顯示(organic electr〇luminescence 此响; φ )面板專面板時,係以塗佈裝置來進行塗佈各種的塗 佈液至玻璃基板、樹脂薄膜、金屬猪等各式各樣的被塗佈 體的表面。 此處,係使用例如第丨圖所示的塗佈裝置作為上述的 塗佈裝置。 在該塗佈裝置係將塗佈用模具10的噴嘴部的前端面 所設之為狹縫狀之噴出口 u,設置於距離板狀的被塗佈體 1的表面所需間隔之位置。並且,利用供給泵4將塗佈液 供給槽3所收容之塗佈液2供給至該塗佈用模具的歧管 319278 5 1322040 .(manif〇id)12’ 一邊將該塗佈液2從上述為狹縫狀之噴出口 .11供給至上述被塗佈體1的表面,一邊使該塗佈用模具10 ,朝固定方向地行走於上述被塗佈體1之上,以將塗佈液2 • 塗佈至被塗佈體1的表面。 此處,於如上述般從為狹縫狀的喷出口 n供給塗佈液 2至被上述被塗佈體的表面丨時,若特別銭低黏度的塗 佈液2,由於喷出不均等原因而如第2圖#)、…)所示, 從噴出π U喷出後之塗佈液2的下端部分係為起伏狀 •態,若以此方式將塗佈液2的下端部分在起伏之不均勾狀 態下直接供給至被塗佈體i的表面,便產生塗佈液2 一開 始接觸之部分與未接觸之部分。然後,若在該狀態下,如 上所輕塗佈用模具1〇行走,將塗佈液2塗佈至被塗佈體 1的表面,便會有產生塗佈不到或塗佈不均等的問題。 、、故,在習知技術中係進一步從上述的喷出口 n喷出塗 佈液2,使塗佈液2充分地接觸被塗佈體^的表面後,再 鲁進订如上;4般使塗佈用模具1G行走,以將塗佈液2塗佈至 被塗佈體1的表面(參照日本特開2002-113411號公報)。 然而,即使是在進行了上述操作的情況下,在塗佈液 2 -開始接觸之部分與之後接觸之部分,塗佈液2的狀離 ^同’除了產生沿塗佈用模具1Q的行走方向之紋理不 /罢同知如第1圖所不’供給塗佈液2且在從開始塗佈之 =到預定範圍的塗佈開始部分13,會有供給至被塗佈體 、表面之塗佈液2的膜厚變厚之問題。 此外’為了使低黏度的塗佈液均一地塗佈至被塗佈體 319278 6 丄 的表面’在習知技術係提出有在 地設定噴嘴部的前端面所設之狹缝狀的狀= 法者^日本特開2_.1532〇5號公報)、。出㈣狀專方 狀的:Ϊ ’ I使如上所述變更喷嘴部的前端面所設之狹缝 佈液仍‘I為it情形下,如上所述從噴出口喷出之塗 【發明内容】§、“,而無法解決上述問題。 (發明所欲解決之課題) 的前::::目的係在解決於一邊從塗佈用模具的噴嘴部 =%面:设之狹缝狀的喷出口供給塗佈液至被塗佈體的 邊使該塗佈用模具相對地行走於被塗佈體,將塗 佈液塗佈至被塗佈體的表面時的上述問題。 即,在本發明的塗佈方法中,其目的在於即使是使用 二的=液時’仍可防止塗佈時產生沿行走方向之紋 理不均,同時抑制塗佈開始位置的塗佈液的膜厚變厚。 (解決課題的手段) 呈j本發W ’為了解決上㈣題,在—邊從塗佈用模 =喷嘴部的前端面所設之狹缝狀的喷出口供給塗佈液至 =佈體的表面,一邊使該塗佈用模具相對地行走於被塗 :體,以將塗佈液塗佈至被塗佈體的表面之塗佈方法中, =包含有下列步驟··從上述塗佈用模具的喷出口喷出塗佈 、<’使塗佈液保持在塗佈用模具的前端面之步驟;待 =所述保持於塗佈用模具之前端面之塗佈液均一化為止 之乂驟,·使上述塗佈用模具下降,以使保持於其前端面之 7 5 319278 1322040 •塗佈液接觸被塗佈體的表面之步驟;以及一邊從上述喷出 口噴出預定量的塗佈液,一邊使塗佈用模具上升至距離被 '塗佈體所需間隔之塗佈開始位置為止之步驟。 此處,上述的塗佈方法所使用之塗佈液的種類並無特 別限定,如上所述使用低黏度的塗佈液來進行塗佈時亦有 效,於使用5〇Cps以下的塗佈液時、甚至於使用2〇cps以 下的塗佈液時更有效。 此外,在如上所述從喷出口噴出塗佈液以保持於塗佈 籲用模具的前端面時,最好將從噴出口喷出之塗佈液的量設 在可藉由表面張力來保持於塗佈用模具的前端面之範圍内 為較佳。 此外,在如上所述從喷出口喷出塗佈液以保持於塗句 用模具的前端面時,保持於塗佈關具的前端面之塗佈液 的量若為少量’則如上所述使塗佈用模具下降以使保持於 前端面之塗佈液接觸被塗佈體的表面時的塗佈賴具與被 塗佈體的間隔d便變得非常小,會有因為被塗佈體的表面 的凹凸而使塗佈用模具的前端接觸到被塗佈體之虞。另一 =面㈣於塗佈用模具的前端面之塗佈液的量變得多 =’上述的間隔d若接近塗佈開始位置的塗佈㈣具與被 的間隔D’則保持於塗❹模具的前端面之塗佈液 =易山溢出到被塗佈體的表面,同時保持於塗佈用模具的 心面之塗佈液達到均-化為止的待機時間會變長。 故,使塗佈用模具下降以使件 ^Πθ又長 塗佈體的表面時的塗佈用模if:::面之塗佈液接觸被 ㈣用核具與被㈣體的間隔d最好為 319278 8 丄J厶厶 布開始位置的塗佈用模具與被塗佈體的間隔D的“ (J·9 〇 土 • 此外’ #上所述使塗饰用模具下降以使保持於其前端 面,塗佈液接觸被塗佈體的表面後,於一邊從上述的 噴出預疋里的塗佈液,一邊使塗佈用模具上離 塗佈體所需間_之塗佈開始位置時,從噴出口喷出= 、、"為少畺則有塗佈液在塗佈用模具與被塗佈體之間 =開之虞。另一方面’從噴出口噴出之塗佈液的量若變多 ⑩量’則從塗佈開始位置到預定範圍,供給至被塗佈體的表 面之塗佈液的膜厚會變厚。&,係以將上升至塗佈開始位 置時從嘴出口喷出之塗佈液的量,於塗佈液不會在塗佈用 杈具與被塗佈體之間斷開之範圍控制為較少量較佳。 (發明的效果) =本發明的塗佈方法中係如上所述以保持於塗佈用模 /、的别端面之範圍之量將塗佈液從塗佈用模具的喷出口噴 籲出在如此噴出再將保持於塗佈用模具的前端面之塗佈液 均一化後,使該塗佈用模具下降來使保持於其前端面之塗 佈液接觸被塗佈體的表面,故保持於塗佈用模具的前端面 之塗佈液會同時地接觸被塗佈體的表面。 然後,由於在以如上所述使保持於塗佈用模具的前端 面之塗佈液接觸被塗佈體的表面之狀態下,一邊從上述的 噴出口喷出預定量的塗佈液,一邊使塗佈用模具上升至距 離被塗佈體所需間隔之塗佈開始位置,故無塗佈液在塗佈 用模具與被塗佈體之間斷開之情事,塗佈用模具可適當地 91322040 IX. Description of the invention: [Priority claim] 5. This application claims priority based on Japanese Patent Application No. 2006-337687. [Technical Field of the Invention] The present invention relates to a coating method in which a coating liquid is supplied from a slit-shaped discharge port provided on a tip end surface of a nozzle portion of a coating die (to) The surface of the body is applied to the surface of the object to be coated while the coating die is relatively moved toward the object to be coated. In particular, it is possible to prevent the occurrence of uneven texture in the traveling direction and to suppress the film thickness of the coating liquid at the coating start position, even when a coating liquid having a low viscosity is used in the coating liquid described above. By. [Prior Art] When manufacturing a liquid crystal display panel, a plasma display panel, or an organic electrification display (φ) panel panel, a coating device is used to apply various coatings. The cloth is applied to the surface of various coated bodies such as a glass substrate, a resin film, and a metal pig. Here, for example, a coating device shown in Fig. 1 is used as the above coating device. In the coating apparatus, the slits of the nozzle end portion of the coating die 10 are provided in a slit-like discharge port u at a position spaced apart from the surface of the plate-shaped object 1 to be coated. Then, the coating liquid 2 accommodated in the coating liquid supply tank 3 is supplied to the manifold 319278 5 1322040 of the coating die by the supply pump 4 (manif〇id) 12' while the coating liquid 2 is supplied from the above The slit-shaped discharge port 11 is supplied to the surface of the object 1 to be coated, and the coating die 10 is moved on the object to be coated 1 in a fixed direction to apply the coating liquid 2 • Apply to the surface of the object 1 to be coated. When the coating liquid 2 is supplied from the discharge port n of the slit shape to the surface of the object to be coated as described above, the coating liquid 2 having a particularly low viscosity is uneven due to uneven discharge. As shown in Fig. 2), the lower end portion of the coating liquid 2 ejected from the discharge of π U is in an undulating state, and the lower end portion of the coating liquid 2 is undulated in this manner. When the surface of the object to be coated i is directly supplied to the surface of the object to be coated i in the uneven hook state, a portion where the coating liquid 2 initially contacts and a portion which is not in contact with each other are generated. Then, in this state, when the coating die 1 is walked as described above and the coating liquid 2 is applied to the surface of the object 1 to be coated, there is a problem that coating is not applied or coating unevenness occurs. . Therefore, in the prior art, the coating liquid 2 is further ejected from the above-described ejection port n, and the coating liquid 2 is sufficiently brought into contact with the surface of the object to be coated, and then the above is further processed; The coating die 1G is moved to apply the coating liquid 2 to the surface of the object 1 to be coated (refer to Japanese Laid-Open Patent Publication No. 2002-113411). However, even in the case where the above operation is performed, in the portion where the coating liquid 2 - comes into contact and the portion which is in contact with thereafter, the coating liquid 2 is separated from the same direction except that the traveling direction along the coating die 1Q is generated. The texture is not the same as that of the coating liquid 2 and the coating start portion 13 from the start coating to the predetermined range is applied to the coated body and the surface. The problem that the film thickness of the liquid 2 becomes thick. In addition, in order to uniformly apply a low-viscosity coating liquid to the surface of the object to be coated 319278 6 ', it is proposed in the prior art that a slit-like shape is provided in the front end surface of the nozzle portion. ^ ^Japanese Special Open 2_.1532〇5 Bulletin),. In the case of the above-mentioned (four)-shaped square shape: Ϊ ' I change the slit liquid which is provided on the front end surface of the nozzle portion as described above, and in the case where I is it, the coating is ejected from the discharge port as described above. §, ", can not solve the above problem. (The problem to be solved by the invention):::: The purpose is to solve the problem from the nozzle portion of the coating die = the % surface: the slit-shaped discharge port When the coating liquid is supplied to the object to be coated, the coating die is relatively moved to the object to be coated, and the coating liquid is applied to the surface of the object to be coated. In the coating method, the object is to prevent the occurrence of unevenness in the traveling direction during coating even when the liquid is used, and to increase the thickness of the coating liquid at the coating start position. In order to solve the above problem (4), the coating liquid is supplied from the slit-shaped discharge port provided on the tip end surface of the coating die to the nozzle portion to the surface of the cloth body. The coating die is relatively moved on the coated body to apply the coating liquid to the object to be coated. In the coating method of the surface, = the following steps are included: - the coating is sprayed from the discharge port of the coating die, and the step of holding the coating liquid on the front end surface of the coating die; The coating liquid held in the end surface before the coating die is homogenized, and the coating die is lowered so as to be held at the front end surface of the film 5 5 319 278 1322040 • the coating liquid contacts the object to be coated And a step of ejecting a predetermined amount of the coating liquid from the discharge port to raise the coating die to a coating start position at a desired interval between the "applied bodies". The type of the coating liquid to be used in the coating method is not particularly limited, and it is also effective when applied by using a low-viscosity coating liquid as described above, and when a coating liquid of 5 〇 Cps or less is used, or even 2 is used. It is more effective when the coating liquid is cps or less. Further, when the coating liquid is discharged from the discharge port as described above to be held on the front end surface of the coating application mold, it is preferable to apply the coating liquid discharged from the discharge port. The amount is set to be maintained by the surface tension It is preferable to use a range of the front end surface of the mold. Further, when the coating liquid is ejected from the discharge port as described above to be held on the front end surface of the stencil mold, the coating is applied to the front end surface of the coating tool. When the amount of the liquid is a small amount, the coating die is lowered as described above, so that the distance d between the coating device and the object to be coated when the coating liquid held on the front end surface contacts the surface of the object to be coated becomes The front end of the coating die is in contact with the object to be coated due to the unevenness of the surface of the object to be coated. The other surface (four) is the coating liquid on the front end surface of the coating die. When the amount of the above-mentioned interval d is close to the coating start position (4) and the interval D' is the coating liquid which is held on the front end surface of the coating die, Yishan overflows to the surface of the object to be coated. At the same time, the waiting time until the coating liquid held on the core surface of the coating die reaches the uniformization becomes long. Therefore, when the coating die is lowered so that the surface of the coating body is longer than the surface of the coating body, the coating solution of the coating surface if::: is contacted by (4) the spacing between the nuclear tool and the (four) body is preferably the best. "JJ9 〇 • 此外 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 319 ( 319 ( 319 319 ( 319 319 319 319 When the coating liquid comes into contact with the surface of the object to be coated, the coating liquid is discharged from the coating liquid in the prepreg as described above, and when the coating mold is separated from the coating body, the coating start position is required. When the coating liquid is discharged from the discharge port, the coating liquid is applied between the coating die and the object to be coated, and the amount of the coating liquid discharged from the discharge port is When the amount is increased by 10, the film thickness of the coating liquid supplied to the surface of the object to be coated is increased from the coating start position to the predetermined range. The film is discharged from the mouth when it is raised to the coating start position. The amount of the coating liquid to be ejected is preferably controlled to be smaller in a range in which the coating liquid is not broken between the coating cookware and the object to be coated. In the coating method of the present invention, as described above, the coating liquid is sprayed from the discharge port of the coating die in an amount that is maintained in the range of the other end faces of the coating die, and is thus ejected and then retained. After the coating liquid on the front end surface of the coating die is made uniform, the coating die is lowered to bring the coating liquid held on the front end surface to the surface of the object to be coated, so that it is held by the coating die. The coating liquid of the front end surface is in contact with the surface of the object to be coated at the same time. In the state where the coating liquid held on the front end surface of the coating die is brought into contact with the surface of the object to be coated as described above, When a predetermined amount of the coating liquid is discharged from the above-described discharge port, the coating mold is raised to a coating start position at a required interval from the object to be coated, so that no coating liquid is applied to the coating die and coated. The case of disconnection between the cloth bodies, the coating mold can be appropriately 9

(S 319278 1322040 被導引至塗佈開始位置。 再者丄在該狀態下,若如上述般一邊從塗佈用模呈的 噴嘴部的W端面所設之狹縫狀的嘴出σ供給塗佈液 佈體…邊使㈣賴具相對地行走於被塗佈體,而將塗 饰液塗佈至被塗佈體的表面,則得以防止產生沿行走方向 之紋理不均’同時亦抑制塗佈開始位置的塗佈液的膜厚變 厚。 從以下說明與相關之顯示特定具體之本發明之實施例 之圖式將能明白了解上述本發明内容與其他的要、 與特徵。 愛點 【實施方式】 以下, 法。另外, 態所示者, 而實施者。 根據附圖具體說明本發明的實施形態之塗佈方 本發明之塗佈方法並非被限定於下述的實施形 在未變更發明要旨之範圍内’能夠做適當變更(S 319278 1322040 is guided to the application start position. Further, in this state, the slit-like nozzle σ provided from the W end surface of the nozzle portion of the coating mold is supplied as described above. In the liquid cloth body, the coating material is applied to the surface of the object to be coated while the coating liquid is applied to the surface of the object to be coated, thereby preventing unevenness in the traveling direction and preventing the coating. The film thickness of the coating liquid at the beginning of the cloth is increased. The above description of the present invention and other features and features will be apparent from the following description of the specific embodiments of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION The following is a description of the embodiment of the present invention. The coating method of the present invention is not limited to the following embodiment. Within the scope of the gist of the invention, 'can make appropriate changes

• 在本實施形態中係如第3圖(Α)至⑼所示,利用供給 豕4將塗佈液供給槽3所收容之塗佈液2導引至塗佈用模 具、1〇的歧管12,來將塗佈液2從塗佈用模具1〇的噴嘴= 的前端面所設之為狹缝狀之喷出口 u喷出。並且,以控制 裝置5來控制從該喷出口 U喷出之塗佈液2的量。I 並且,在本實施形態的塗佈方法,於將塗佈液2從上 述塗佈用模具10的喷出π n喷出,開始將塗佈液2 至板狀的被塗佈體1的表面之作業時,首先,如第3圖(八 所示,在離開了板狀的被塗佈體!的表面之位置,以θ控制 319278 10 1322040 裝置5控制從塗佈用模且 的量,在從喷出口 η嘖出::喷本出口 11喷出之塗佈液2 模且10的义# 、出此夠以表面張力來保持於塗佈用 -的心面之量的塗佈液2之後, 出’保持該塗佈液2於塗佈 Μ的噴 上述般將從喷出口 u噴出之=、」°;?仏面。此處,如 10贺出之塗佈液2保持於塗佈用模具 且^山之最初係如第4圖㈧所示,保持於塗佈用模 …〇的刖知面之塗佈液2的下端邻八矽蜱盔』丄 厚度係變得不均-。 下W…為起伏之狀態’ 述戶ΐί约在該Λ態下使塗佈用模具10待機時’在如上所 2Π: 使保持於塗佈用模具10的前端面 二 =:漸地均一化,如第4圖⑻所示,保持 布用极具10的前端面之塗佈液係變為固定厚度。 然後’在如此保持於塗你用谨目^ Λ 2為固定厚度之狀態下,如第圖⑻:月心面之塗佈液 弟圖(B)所不,將該塗佈用模 〃 下’使保持於其前端面之塗佈液2接觸被塗佈體! 的表面。此處,藉由如此使保持於塗佈用模具則前端面 之塗佈液2接觸被塗佈體!的表面時,便如第4圖⑹所 示,保持於塗佈用模具10的前端面之塗佈液2,係在上述 狭縫狀之喷出口 U的全長同時地接觸被塗佈體!的表面。 另外,如此使保持於塗佈用模具1G的前端面之塗佈液2 接觸被塗佈體1的表面之狀態的塗佈用模具ι〇與被塗佈體 1之間的間隔d,係依據保持於塗佈用模具1()的前端面之 塗佈液2的量而定。 此外,若在以上述般使保持於塗佈用模具1〇的前端面 11In the present embodiment, as shown in Fig. 3 (Α) to (9), the coating liquid 2 accommodated in the coating liquid supply tank 3 is guided by the supply crucible 4 to the coating die and the manifold of 1 inch. 12, the coating liquid 2 is ejected from the discharge port u which is provided in the slit shape from the tip end surface of the nozzle of the coating die 1〇. Further, the amount of the coating liquid 2 ejected from the discharge port U is controlled by the control device 5. In the coating method of the present embodiment, the coating liquid 2 is ejected from the coating die 10, and the coating liquid 2 is applied to the surface of the plate-shaped object 1 to be coated. In the case of the operation, first, as shown in Fig. 3 (eighth, the position of the surface of the plate-shaped object to be coated is removed, and the amount of the coating die is controlled by the device 5 by the θ control 319278 10 1322040. From the discharge port η, the coating liquid 2 which is ejected from the discharge port 11 and the meaning of 10 are obtained, and after the coating liquid 2 which is held by the surface of the coating for surface tension by the surface tension In the above, the coating liquid 2 is sprayed from the discharge port u as described above, and the coating liquid 2 is kept on the coating surface. The mold and the first part of the mountain are as shown in Fig. 4 (8), and the thickness of the coating liquid 2 is kept at the lower end of the coating liquid 2 of the coating mold. In the state in which the coating mold 10 is in standby state, the W is in the state of the undulations. 4 (8), the coating liquid for holding the front end surface of the cloth pole 10 is fixed to a thickness. Then, in the state of being fixed to the thickness of the coating, as shown in the figure (8) : The coating liquid of the moon surface is not shown in the figure (B), and the coating die 2 is brought into contact with the coating liquid 2 held on the front end surface thereof. When the coating liquid 2 held on the front end surface of the coating die is brought into contact with the surface of the object to be coated, the coating liquid 2 held on the front end surface of the coating die 10 is shown in Fig. 4 (6). The surface of the object to be coated is simultaneously contacted with the entire length of the slit-shaped discharge port U. The coating liquid 2 held on the front end surface of the coating die 1G is brought into contact with the object 1 to be coated. The distance d between the coating die ι 〇 and the object 1 to be coated in the state of the surface depends on the amount of the coating liquid 2 held on the front end surface of the coating die 1 (). The front end surface 11 held by the coating die 1 is held as described above.

S 319278 1322040 佈液2接觸被塗佈肢!的表面之狀態下待機時,便變 得能夠更均一地將塗佈液2接觸被塗佈 又 為理想。 巾體1的表面,而更 接著’以上述般使保持於塗佈用模具10的前端面之塗 佈液2接觸被塗佈體i的表面之狀態下,如第3圖(C 示,一邊利用上述控制裝置5控制從喷出口 ^噴出之塗= 液2的量…邊將上述塗佈用模具1()上升至距離被塗佈體 1所需間隔D之塗佈開始位置。此處,如此—邊利用护制 裝置5控制從喷出口 u喷出之塗佈液2的量,—邊將二述 塗佈用模具10上升至距離被塗佈體1所需間隔。之涂: 開始位置時’便如第4圖⑼所示,塗佈液2不會在塗^用 模具10與被塗佈體k間斷開,而在塗佈液2於塗佈用模 具1〇與被塗佈液1之間連續之狀態下,適當地導引塗佈用 模具10至預定的塗佈開始位置。 然後’如此將塗佈關具㈣引至預定的塗佈開始位 置後’利用上述控制裝置5將從塗佈用模具1()的喷出口 η喷出之塗佈〉夜2的量控制為預定的塗佈量,如帛3圖⑼ 所不’從該噴出π η喷出塗佈液2並供給至上述被塗佈體 1的表面,同時使言亥塗佈用模具1〇在如上述般距離所需間 隔D之狀態下朝固定方向行走於被塗佈體ι之上,來使塗 佈液2塗佈至被塗佈體1的表面。 如上述般使塗佈液2塗佈至被塗佈體i 以防止產生沿塗佈用模具1G的行走方向之紋理不面; 亦抑制塗佈開始部分13的塗佈液2的膜厚變厚。 319278 12 丄: 雖然上述實施例的方法已充份描述了本發明,但需尸 :出的是’各種的改變與修飾均為由熟習本技術領域者所^ 易理解者。 因此,除非該改變與修飾脫離本發明的範圍,否則仍 應視為包含於本發明。 【圖式簡單說明】 第1圖係顯示在習知例的塗佈裝置,一邊從設於塗佈 用模具的前端面之狹缝狀的喷出口供給塗佈液至被塗佈體 籲的表面、’-邊使塗佈用模具朝固定方向行走,以將塗佈液 塗佈至被塗佈體的表面之狀態之概略說明圖。 a帛2圖⑷及(B)係顯示習知例中塗佈液係在不均一的 狀態下從塗佈用模具的噴出口喷出之狀態以及不均一的狀 態的塗佈液被供給至被塗佈體的表面之狀態之概略說明 圖。 、第3圖(A)至(D)係顯示在本發明的一實施形態的塗佈 鲁方法,使保持於塗佈用模具的前端面之塗佈液接觸被塗佈 體的表面後,將該塗佈用模具上升至距離被塗佈體所需間 P明之塗佈開錄置,將塗佈液塗佈至被塗佈體的表面之步 驟之正面側的概略說明圖。 第4圖(A)至(D)係顯示在同實施形態的塗佈方法,使 保持於塗佈用模具的前端面之塗佈液接觸被塗佈體的表面 後將該塗佈用杈具上升至距離被塗佈體所需間隔之塗佈 開始位置之步驟之側面側的概略說明圖。 【主要元件符號說明】 13 319278 丄似040 1 被塗佈體 2 塗佈液 3 塗佈液供給槽 4 供給果 5 控制裝置 10 塗佈用模具 11 喷出口 12 歧管 13 塗佈開始部分 d 使^保持於塗佈用模具 塗佈體的表面狀態的 D '塗佈開始位置的塗佈 的前端面之塗佈液在接觸至被 塗佈用模具與被塗佈體的間隔 模具與被塗佈體的間隔S 319278 1322040 Cloth solution 2 contact coated limbs! In the case of standby in the state of the surface, it is preferable to make the coating liquid 2 more uniformly contacted and coated. In the state in which the coating liquid 2 held on the front end surface of the coating die 10 is brought into contact with the surface of the object to be coated i as described above, the surface of the body 1 is as shown in Fig. 3 (C The control device 5 controls the amount of the coating liquid 2 ejected from the discharge port to raise the coating die 1 () to a coating start position at a required interval D from the object 1 to be coated. In this manner, the amount of the coating liquid 2 ejected from the discharge port u is controlled by the protective device 5, and the coating die 10 is lifted up to a required distance from the object 1 to be coated. When the coating liquid 2 is not broken between the coating die 10 and the object to be coated k as shown in Fig. 4 (9), the coating liquid 2 is applied to the coating die 1 and the coating liquid. In a continuous state between 1 , the coating mold 10 is appropriately guided to a predetermined coating start position. Then, after the coating (4) is introduced to a predetermined coating start position, the control device 5 will be used. The amount of coating>Night 2 ejected from the ejection port η of the coating die 1() is controlled to a predetermined coating amount, and is not ejected from the π as shown in Fig. 3 (9). η The coating liquid 2 is ejected and supplied to the surface of the object 1 to be coated, and the coating die 1 is moved to the object to be coated in a fixed direction while being spaced apart from the required interval D as described above. The coating liquid 2 is applied to the surface of the object 1 to be coated. The coating liquid 2 is applied to the object to be coated i as described above to prevent the traveling direction of the coating die 1G from being generated. The texture of the coating liquid 2 of the coating start portion 13 is also suppressed from increasing. 319278 12 丄: Although the method of the above embodiment has fully described the present invention, it is required to have a 'various The changes and modifications are to be understood by those skilled in the art. Therefore, unless the changes and modifications are outside the scope of the present invention, they are considered to be included in the present invention. In the coating apparatus of the conventional example, the coating liquid is supplied from the slit-shaped discharge port provided on the tip end surface of the coating die to the surface of the object to be coated, and the coating die is turned toward A schematic diagram of the state in which the coating liquid is applied in a fixed direction to apply the coating liquid to the surface of the object to be coated In the conventional example, the coating liquid is discharged from the discharge port of the coating die in a state where the coating liquid is not uniform, and the coating liquid is supplied in a non-uniform state. A schematic view of the state of the surface of the object to be coated. Fig. 3 (A) to (D) show a coating method according to an embodiment of the present invention, and the film is held at the front end surface of the coating die. After the coating liquid contacts the surface of the object to be coated, the coating die is lifted up to a coating distance from the object to be coated, and the coating liquid is applied to the surface of the object to be coated. 4(A) to (D) show the coating method in the same embodiment, and the coating liquid held on the front end surface of the coating die is brought into contact with the object to be coated. A schematic view of the side surface side of the step of raising the coating cooker to a coating start position at a desired interval from the object to be coated. [Description of main component symbols] 13 319278 040 040 1 coating body 2 coating liquid 3 coating liquid supply tank 4 supply fruit 5 control device 10 coating die 11 discharge port 12 manifold 13 coating start portion d The coating liquid of the coating tip end surface of the coating at the D' coating start position held in the surface state of the coating die-coated body is brought into contact with the spacer die of the coating die and the object to be coated. Body spacing

319278 14319278 14

Claims (1)

十、申請專利範圍: 種塗佈方法,係-邊從塗佈用模具的喷嘴部的前端面 所設之狹㈣㈣出口供給塗佈液至被塗佈體的表 面,一邊使該塗佈用模且相斟从> i A A 保/、相對地仃走於被塗佈體,以將 塗佈㈣佈至被塗佈體的表面者,其包含有下列步驟: =上述塗佈用模具的噴出口嘴出塗佈液,使塗佈液 保持在塗佈用模具的前端面之步驟; 待機至如上所述保持於塗佈用模具之前端面之塗 佈液被均一化為止之步驟; 使上述塗佈用模且下卩备以你Y 口』士 /、卜降以使保持於其前端面之塗 佈液接觸被塗佈體的表面之步驟;以及 你用上34喷出σ噴出職量的塗佈液,—邊使塗 署夕上升至距離被塗佈體所需間隔之塗佈開始位 置之步驟。 2. 如申請專利範圍第i ,,^ 唄&坌佈方法,其中,上述塗佈液 的·^度係為5〇cps以下。 3. 如申請專利範圍第1 項之主佈方法,其中,於從上述塗 佈用模具的喷出口嗜屮涂/士、+ 噴出塗佈液而使塗佈液保持在塗佈 用杈具的前端面時,係脾奸 ^ 係將攸贺出口贺出之塗佈液的量設 為保持於塗佈用模具的前端面之範圍。 4·如申請專利範圍第1 -a _ 項之塗佈方法,其中,將使上述塗 ^ ^ ± 使保持於則端面之塗佈液接觸被塗佈 ^ ^ 用杈具與破塗佈體的間隔設為d、且 將塗佈開始位置的涂 土佈用板具與被塗佈體的間隔設為 319278 15 1322040 D時,d/D的值的範圍為〇,6至〇 9。 5.如申請專利範圍第2項之塗· 佈用模具下_而使保持於前^法,其中,將使上述塗 體的表面時的塗佈用模且之塗佈液接觸被塗佈 將塗佈開始位ί = 間隔設^、且 D 0i ,/n AA 布用核具與被塗佈體的間隔設為 ,d/D的值的範圍為0.6至〇9 6. :::範圍第1項之塗佈方法,其中,於如上述般 上ίΓΓ 定量的塗佈液,-邊使塗佈用模具 二::距:被塗佈體所需間隔之塗佈開始位置時,係將 二喷出之塗佈液的量’以在塗佈液在塗佈用 量:、被塗佈體之間不會斷開之範圍而控制為較少的 7. 範圍第2項之塗佈方法,其中,於如上述般 2噴出口贺出預定量的塗佈液,一邊將塗佈用模且 =域離被塗佈體所㈣隔之塗佈開始 將 ;具與被塗佈體之間不會斷開之範圍而控制為;Π 319278 16(10) Patent application range: a coating method for supplying a coating liquid to a surface of an object to be coated from a narrow (four) (four) outlet provided at a tip end surface of a nozzle portion of a coating die, and applying the coating die And the opposite side is moved from the object to be coated, and the coating (4) is applied to the surface of the object to be coated, which comprises the following steps: = spraying of the above-mentioned coating die a step of discharging the coating liquid from the nozzle to hold the coating liquid on the front end surface of the coating die; waiting for the coating liquid to be uniformized before the coating die is held as described above; The cloth is used in the mold and the lower part is prepared to bring the coating liquid held on the front end surface to the surface of the object to be coated; and the squirting amount of the squirting amount is 34. The coating liquid, the step of raising the coating layer to a coating start position at a desired interval from the object to be coated. 2. The method of claim i, the 呗 & 坌 method, wherein the coating liquid has a degree of 5 〇 cps or less. 3. The main cloth method according to the first aspect of the invention, wherein the coating liquid is held in the coating cooker by ejecting the coating liquid from the discharge port of the coating die. In the case of the front end surface, the amount of the coating liquid which is used for the export of the spleen is set to be in the range of the front end surface of the coating die. 4. The coating method according to the first aspect of the invention, wherein the coating solution is held in contact with the coating liquid which is held at the end surface and is coated with the cookware and the broken coating body. When the interval is set to d and the interval between the coated cloth sheet and the object to be coated at the application start position is 319278 15 1322040 D, the value of d/D ranges from 〇, 6 to 〇9. 5. In the case of the coating/distributing die of the second application of the patent application, the coating method is applied to the surface of the coating body, and the coating liquid is applied in contact with the coating liquid. Coating start bit ί = interval setting ^, and D 0i , /n AA The spacing between the cloth fixture and the object to be coated is set, and the value of d/D ranges from 0.6 to 〇9 6. ::: In the coating method of the first aspect, the coating liquid of the coating amount is as described above, and the coating die 2:: the distance from the coating start position of the object to be coated is two The amount of the coating liquid to be ejected is controlled to be less in the range in which the coating liquid is applied in the coating amount: the object to be coated is not broken. In the above-described two discharge ports, a predetermined amount of the coating liquid is ejected, and the coating mold is applied, and the coating is started from the coating body (four), and the coating body is not coated with the object to be coated. Controlled by the range of disconnection; Π 319278 16
TW096119076A 2006-12-15 2007-05-29 Coating method TWI322040B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006337687A JP4799390B2 (en) 2006-12-15 2006-12-15 Application method

Publications (2)

Publication Number Publication Date
TW200824800A TW200824800A (en) 2008-06-16
TWI322040B true TWI322040B (en) 2010-03-21

Family

ID=39565310

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096119076A TWI322040B (en) 2006-12-15 2007-05-29 Coating method

Country Status (4)

Country Link
JP (1) JP4799390B2 (en)
KR (1) KR100859082B1 (en)
CN (1) CN101204696B (en)
TW (1) TWI322040B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101498607B1 (en) * 2008-09-19 2015-03-05 주식회사 탑 엔지니어링 Method for selecting a region of a paste pattern for inspection
JP6033313B2 (en) * 2011-09-28 2016-11-30 スリーエム イノベイティブ プロパティズ カンパニー Method for coating a rigid substrate with a liquid and optically transparent adhesive
JP6460694B2 (en) * 2014-09-22 2019-01-30 Ntn株式会社 Coating method and coating apparatus
JP6801387B2 (en) * 2015-11-16 2020-12-16 東京エレクトロン株式会社 Coating film forming method, coating film forming apparatus and storage medium

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2715775B2 (en) * 1992-01-10 1998-02-18 三菱電機株式会社 Semiconductor manufacturing equipment
JPH11239754A (en) * 1998-02-25 1999-09-07 Hirata Corp Method and device for coating liquid
JP4130058B2 (en) * 2000-10-10 2008-08-06 東京応化工業株式会社 Application method
JP4736177B2 (en) * 2000-11-16 2011-07-27 大日本印刷株式会社 Manufacturing method of single wafer substrate
JP4218376B2 (en) * 2003-03-12 2009-02-04 東レ株式会社 Coating method and manufacturing method of display member
JP4071183B2 (en) * 2003-09-12 2008-04-02 東京エレクトロン株式会社 Coating method and coating apparatus
JP4562412B2 (en) 2004-03-25 2010-10-13 東京応化工業株式会社 Coating method
KR20060006540A (en) * 2004-07-16 2006-01-19 삼성전자주식회사 Apparatus for coating photoresist and coating method for the same
JP4490780B2 (en) * 2004-10-07 2010-06-30 大日本スクリーン製造株式会社 Substrate processing apparatus and substrate processing method

Also Published As

Publication number Publication date
KR20080055594A (en) 2008-06-19
KR100859082B1 (en) 2008-09-17
TW200824800A (en) 2008-06-16
JP4799390B2 (en) 2011-10-26
CN101204696A (en) 2008-06-25
CN101204696B (en) 2012-07-25
JP2008149225A (en) 2008-07-03

Similar Documents

Publication Publication Date Title
TWI322040B (en) Coating method
JP4708726B2 (en) Cleaning unit, coating apparatus and method having the same
TWI326618B (en) Coater and method of coating a substrate with a coating solution using the same
US9343339B2 (en) Coating method and coating apparatus
TW201217066A (en) Coating apparatus and method of forming coating layer using the same
US20100144080A1 (en) Method and apparatus to transfer coat uneven surface
TW200920499A (en) Intermittent coating method and intermittent coating device
WO2011131121A1 (en) Gumming device and method
KR20070079820A (en) Slit coater for manufacturing display device and manufacturing method of display device using the same
TW200821662A (en) Method for repairing defective portion in flat display panel
TWI313194B (en) Coating film forming method
TWI281693B (en) Apparatus for treating substrates
TW200824797A (en) Coating device
JP2000189877A (en) Slitted die coater mouthpiece and production of coating film with use of it
TWI293581B (en) Single-wafer coating film apparatus and method
JP2006305548A (en) Coating applicator and method for applying coating liquid
JP6495947B2 (en) Method of bonding substrates by distributing bonding material by proximity of substrates
JPS6311939B2 (en)
JP4862222B2 (en) Coating nozzle and coating apparatus using the same
KR20070122100A (en) Slit coater
KR100191847B1 (en) Method for coating on the elongated metal plate and an apparatus therefor
KR101248384B1 (en) Preliminary dischare device in substrate coater apparatus having slit nozzle
JP7219562B2 (en) Coating method and coating device
KR100665949B1 (en) Slit nozzle for photo register coating and manufacturing method thereof
JP2004089754A (en) Coating film forming method and coating film formed article