TWI321802B - Method of making field emission electron source - Google Patents

Description

1321802 九、發明說明： 【發明所屬之技術領域】 . 本發明係涉及一種場發射電子源之製造方法，尤其涉 :及一種奈米碳管場發射電子源之製造方法。 【先前技術】.1321802 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a method of fabricating a field emission electron source, and more particularly to: and a method of manufacturing a carbon nanotube field emission electron source. [Prior technology].

按，奈米碳管材料具有可傳輸極大電流密度、電流極 穩定、使用壽命長等特性，因而其被廣泛應用於顯微鏡、χ 射線管、微波管、CRT電子搶、太陽能轉化農置、平板印 刷裝置、平面顯示裝置等設備中用以場發射電子源的發射 端。 又According to the carbon nanotube material, it has the characteristics of high current density, extremely stable current and long service life. Therefore, it is widely used in microscopes, X-ray tubes, microwave tubes, CRT electronic grabs, solar energy conversion, and lithography. A device for transmitting a source of electrons in a device, a flat display device, or the like. also

傳統的由奈米碳管作爲發射端的場發射電子源一般至 少包括-導電紐及形成於導電基體頂部上作爲發射端的 一維奈米碳管。奈米碳管形成於導電基體上之方法主要包 括機械方法及躲生長法。其巾，機械紋顧由原子力 顯微鏡操縱合成的奈米碳管，將合成後的奈米碳管用導電 膠固定於導電基體上，該種方法雖程式鮮，惟不易操作 且效率較低。3’藉由該方法得_場發射電子源中的夺 米碳管縣財電雜胁導電絲± _程中， 炭管與導電基_電接·態較差，不Μ分發;奈 水石反官的場發射性能。 =生紐_級導電絲上鍍金屬槪劑，後藉 ==_沈積、放電⑽贿發法等方法直接於導 4電維奈米碳管’該方法操作簡單’奈米碳管 電基體的電接觸良好。惟，藉由該方法得到的場發射 8A conventional field emission electron source having a carbon nanotube as a emitting end generally includes at least a conductive button and a one-dimensional carbon nanotube formed on the top of the conductive substrate as a transmitting end. The method of forming a carbon nanotube on a conductive substrate mainly includes a mechanical method and a hiding growth method. The towel is mechanically manipulated by an atomic force microscope to synthesize a carbon nanotube, and the synthesized carbon nanotube is fixed to the conductive substrate with a conductive adhesive. This method is fresh, but not easy to operate and low in efficiency. 3' By this method, the gamma-emitting carbon source in the field-emitting electron source is in the middle of the wire, and the carbon tube and the conductive group are inferior to the state. Field emission performance. = 纽 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Good electrical contact. However, the field emission obtained by this method 8

Claims (1)

1321802 卜申請專利範圍 1. 一歸魏f切之奴妓，主純括 、、 提供至少-陰極導電體、——步驟： 料及導_ ’該_料含^米碳管裳 粒; 坡瑪微拉及導電金屬微 於陰極導電體上塗敷導 成-導電襞料層； 電沒料’將導電黎料加熱形 於導電漿料層上塗數奈⑴您 料加熱從而於導電毁料層二二二:米碳管製 及 战不未石反官漿料層；以 將形成有導電製料層及 —條件下進行烘_燒::==於 =電層及奈米破管電子發射層，進二:： 項所述之場發射電子源之製造方 於有二=碳管崎包含有機载體及分散 :有=内的奈米碳管，奈米碳管 未，直牷爲M00奈米。 利fen第2項所述之場發射電子源之製造方 / 中’所述之奈米碳管㈣的製備過程包括： :備有機载體，該有機載體爲由作爲溶劑的松油 二：Ϊ増塑劑的少量鄰苯二曱酸二丁酿以及作爲穩定 背的>'量乙基纖維素形成的混合劑； 將粉末狀奈米碳管於二氯乙燒中用破碎機分散後再 16 1321802 I年]曰修正替換頁 進行超聲分散形成奈米碳管溶液； ~ -- 過渡奈米碳管溶液； 將奈米碳管溶液加入有機載體中同時利用超聲充分 分散；以及 於水浴條件下加熱混有奈米碳管溶液的有機載體， 氣乙炫*於加熱下完全蒸發。 4.如申請專魏圍第3項所述之場發射電子源之製造方 法，其中，所述之有機載體的製備過程爲： 於油浴8(Mi『c及擾拌的條件下將乙基纖維素溶 解到松油醇中；及 加入鄰苯二曱酸二丁酯於油浴8〇〜U(rc的條件下 持續攪拌10〜25小時即可得到有機載體。 、如申咕專利圍第4項所述之場發射電子源之製造方 ^其中，所述之混合劑中松油醇、乙基纖維素及鄰苯 -甲酸二丁_質量百分比分別爲霞、放和5%;所述 由办加熱溫度爲1()(rc ;所述之持續攪拌時間爲料小 日寻〇 ·:申請專利範圍第3項所述之場發射電子源之製造方 、耍:所述之奈米碳管與所述之二氣乙烧的比例優 =馬：每兩克奈米碳管需要5⑼毫升的二氣乙烧 ;所述 2碎機分散的時間爲2G分鐘；所述之奈米碳管溶液中 =叙官與所述的有機載體的質量比爲i5 : ι ;所述 =聲^散__爲3_ ;所叙水浴加熱溫度 17 1321802 Λ如^寻_圍第3項所述之場發射電子源之製造方 法，其中，所叙導電賴_雜料電金屬微粒及 玻賴粒於餘鱗、鄰苯二㈣二丁醋和乙基纖维素 形成的有機载體中於60〜8(rc下混合3 5小時 、 8.、如申請專·_ 7顧叙料射好社製造方 法其中，所述之玻璃微粒選用低炫點玻璃，炫點 350〜60(TC，直徑爲10〜1〇〇奈米，所述之導電全屬微粒 由導電材料製成，直徑爲0.1〜1〇微米。 ^ 纖㈣3項所叙場發射電伟之製造方 U，所叙錄導錢·所 浆料的過程於灰塵度小於麵—條件下5 瓜如申請專利範圍第3項所述之場發射電子源之製造方 法，其中，所述之烘乾與焙燒的過程包括： 於真空環境或通人·諸錢氣加贿護 下加熱至32(TC保溫20分鐘； 升溫至43(TC再保溫3〇分鐘；以及 降至室溫。 U法如申請專利範圍第3項所述之場發射電子源之製造方 ，，其中’進-步包括：對形成之奈米碳管電子發射層 表面進仃摩擦或者用膠帶枯結的方法將電子發射層表 面稀鬆的奈米碳管去除。 曰 181321802 Patent application scope 1. A return to the slave of Wei f, the main pure, provide at least - cathode electrical conductor, - steps: material and guide _ 'The _ material contains ^ m carbon tube granules; Po Ma micro Pulling and conductive metal slightly coated on the cathode conductor to form a conductive-conducting layer; the electric material is 'heating the conductive material to the conductive paste layer and coating the nano layer (1) heating the material to the conductive layer 2 2 : m carbon control and warfare is not a stone anti-official slurry layer; in order to form an electrically conductive material layer and under the conditions of baking _ burning:: = = in = electric layer and nano tube breaking electron emission layer, into 2: The manufacturer of the field emission electron source described in the item contains the organic carrier and dispersion: the carbon nanotubes in the =, the carbon nanotubes in the =, the direct carbon nanotubes are M00 nanometers. The preparation process of the nano-carbon tube (4) described in the manufacturer of the field emission electron source described in item 2 of the fen fen includes: preparing an organic carrier which is made of pine oil as a solvent: Ϊ a small amount of a phthalate dibutyl phthalate dimer and a mixture formed as a stable back > amount of ethyl cellulose; the powdered carbon nanotubes are dispersed in a dichloroethane bromide by a crusher 16 1321802 I year] 曰 correction replacement page for ultrasonic dispersion to form a carbon nanotube solution; ~ -- transition carbon nanotube solution; carbon nanotube solution added to the organic carrier while fully dispersed by ultrasound; and under water bath conditions The organic vehicle mixed with the carbon nanotube solution is heated, and the gas is completely evaporated under heating. 4. The method for manufacturing a field emission electron source according to item 3 of the Wei Weiwei, wherein the preparation process of the organic carrier is as follows: in an oil bath 8 (Mi cc and under stirring conditions, ethyl The cellulose is dissolved in terpineol; and the dibutyl phthalate is added to the oil bath at 8 〇 to U (continuous stirring for 10 to 25 hours under rc conditions to obtain an organic carrier. The manufacturing method of the field emission electron source of the above-mentioned item 4, wherein the mixture of terpineol, ethyl cellulose and o-benzene-formic acid dibutyl _ mass percentage are Xia, Put and 5% respectively; The heating temperature is 1 () (rc; the continuous stirring time is for the small day.): The manufacturer of the field emission electron source described in the third application patent scope, the carbon nanotubes described above The ratio of the two gas to the above-mentioned two-burning is excellent = horse: 5 (9) milliliters of two-air-burning is required for every two grams of carbon nanotubes; the time of dispersion of the two crushers is 2G minutes; the carbon nanotube solution is described The mass ratio of the medium = the official to the organic carrier is i5: ι; the = sound = __ is 3_; the temperature of the water bath is 17 1321802, such as ^ The method for manufacturing a field emission electron source according to Item 3, wherein the electrically conductive metal particles and the glass particles are used in the balance scale, phthalic acid (tetra) dibutyl vinegar and ethyl cellulose. The formed organic carrier is mixed at 60 to 8 (according to rc for 3 to 5 hours, 8., as for the application of the special method), wherein the glass particles are selected from low-focus glass, and the bright spots are used. 350~60 (TC, diameter 10~1〇〇 nanometer, the conductive all particles are made of conductive material, the diameter is 0.1~1〇 micron. ^ Fiber (4) 3 items of the field emission electric wave manufacturer U, the method of manufacturing the field emission electron source described in the third aspect of the patent application, wherein the process of guiding the money and the slurry is less than the surface of the dust, and the drying and roasting The process includes: heating to 32 in a vacuum environment or under the guise of money, and tempering for 20 minutes; heating to 43 (TC is kept for 3 minutes; and down to room temperature. U method as patent application scope) The manufacturer of the field emission electron source described in item 3, wherein the 'step-by-step includes: forming the carbon nanotube electrons The surface of the emissive layer is rubbed or rubbed with a tape to remove the loose carbon nanotubes on the surface of the electron-emitting layer. 曰 18