TWI318300B - Shielded probe apparatus for probing semiconductor wafer - Google Patents

Shielded probe apparatus for probing semiconductor wafer

Info

Publication number
TWI318300B
TWI318300B TW092117657A TW92117657A TWI318300B TW I318300 B TWI318300 B TW I318300B TW 092117657 A TW092117657 A TW 092117657A TW 92117657 A TW92117657 A TW 92117657A TW I318300 B TWI318300 B TW I318300B
Authority
TW
Taiwan
Prior art keywords
semiconductor wafer
probe apparatus
shielded probe
probing semiconductor
probing
Prior art date
Application number
TW092117657A
Other languages
English (en)
Other versions
TW200405019A (en
Inventor
J Root Bryan
A Funk William
Original Assignee
Celadon Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Celadon Systems Inc filed Critical Celadon Systems Inc
Publication of TW200405019A publication Critical patent/TW200405019A/zh
Application granted granted Critical
Publication of TWI318300B publication Critical patent/TWI318300B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/18—Screening arrangements against electric or magnetic fields, e.g. against earth's field

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW092117657A 2002-06-28 2003-06-27 Shielded probe apparatus for probing semiconductor wafer TWI318300B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39239402P 2002-06-28 2002-06-28
US10/607,768 US6992495B2 (en) 2002-06-28 2003-06-27 Shielded probe apparatus for probing semiconductor wafer

Publications (2)

Publication Number Publication Date
TW200405019A TW200405019A (en) 2004-04-01
TWI318300B true TWI318300B (en) 2009-12-11

Family

ID=29782678

Family Applications (2)

Application Number Title Priority Date Filing Date
TW097122234A TWI327226B (en) 2002-06-28 2003-06-27 Shielded probe apparatus
TW092117657A TWI318300B (en) 2002-06-28 2003-06-27 Shielded probe apparatus for probing semiconductor wafer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
TW097122234A TWI327226B (en) 2002-06-28 2003-06-27 Shielded probe apparatus

Country Status (3)

Country Link
US (3) US6992495B2 (zh)
CN (1) CN100480714C (zh)
TW (2) TWI327226B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI623759B (zh) * 2013-09-04 2018-05-11 克萊譚克公司 用於測量電流對電壓特性之裝置

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US6201402B1 (en) 1997-04-08 2001-03-13 Celadon Systems, Inc. Probe tile and platform for large area wafer probing
US6586954B2 (en) * 1998-02-10 2003-07-01 Celadon Systems, Inc. Probe tile for probing semiconductor wafer
TWI327226B (en) * 2002-06-28 2010-07-11 Celadon Systems Inc Shielded probe apparatus
US6847219B1 (en) * 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US7170305B2 (en) 2005-02-24 2007-01-30 Celadon Systems, Inc. Apparatus and method for terminating probe apparatus of semiconductor wafer
US6975128B1 (en) * 2003-03-28 2005-12-13 Celadon Systems, Inc. Electrical, high temperature test probe with conductive driven guard
WO2006028812A1 (en) * 2004-09-03 2006-03-16 Celadon Systems, Inc. Replaceable probe apparatus for probing semiconductor wafer
US7355422B2 (en) * 2005-09-17 2008-04-08 Touchdown Technologies, Inc. Optically enhanced probe alignment
US7728609B2 (en) * 2007-05-25 2010-06-01 Celadon Systems, Inc. Replaceable probe apparatus for probing semiconductor wafer
US8674715B2 (en) * 2010-01-20 2014-03-18 Celadon Systems, Inc. Test apparatus having a probe core with a twist lock mechanism
US9746496B2 (en) 2010-04-01 2017-08-29 Koninklijke Philips N.V. Signal measuring system, method for electrically conducting signals and a signal cable
US8698515B2 (en) 2010-08-16 2014-04-15 Celadon Systems, Inc. Probe test equipment for testing a semiconductor device
US8994390B2 (en) 2011-07-06 2015-03-31 Celadon Systems, Inc. Test systems with a probe apparatus and index mechanism
US9024651B2 (en) 2011-07-06 2015-05-05 Celadon Systems, Inc. Test apparatus having a probe card and connector mechanism
TWI574013B (zh) * 2013-03-15 2017-03-11 穩懋半導體股份有限公司 探針卡、探針結構及其製造方法
EP3131481B1 (en) * 2014-04-11 2019-03-20 Koninklijke Philips N.V. Needle with thin film piezoelectric sensors
JP6686846B2 (ja) * 2016-11-11 2020-04-22 住友電装株式会社 電線接合部の保護構造及びワイヤハーネス
CN108107230A (zh) * 2017-12-01 2018-06-01 中广核工程有限公司 一种核电站主泵转速测量***及方法
US20200234854A1 (en) * 2019-01-22 2020-07-23 Kyzen Corporation Cabling apparatus for high resistance applications

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US4480223A (en) * 1981-11-25 1984-10-30 Seiichiro Aigo Unitary probe assembly
JPS6177286A (ja) 1984-09-21 1986-04-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 同軸ケーブル用インターフェース装置
US4667523A (en) * 1986-03-07 1987-05-26 Orion Research Inc. Electrode friction chuck
US4731577A (en) * 1987-03-05 1988-03-15 Logan John K Coaxial probe card
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US5015947A (en) * 1990-03-19 1991-05-14 Tektronix, Inc. Low capacitance probe tip
US5168218A (en) * 1990-06-01 1992-12-01 Rich Donald S Tray-to-tray circuit package handler
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US5150040A (en) * 1990-10-22 1992-09-22 International Business Machines Corporation Dual-mode z-stage
US5325052A (en) * 1990-11-30 1994-06-28 Tokyo Electron Yamanashi Limited Probe apparatus
KR0138618B1 (ko) * 1993-08-04 1998-06-15 이노우에 아끼라 프로브카드, 프로브카드용 동축 프로브빔 및 그 제조방법
US5488292A (en) * 1993-10-04 1996-01-30 Tokyo Seimitsu Co., Ltd. Wafer inspecting system
US5473254A (en) * 1994-08-12 1995-12-05 At&T Corp. Test probe assembly provides precise and repeatable contact forces
US5742174A (en) * 1995-11-03 1998-04-21 Probe Technology Membrane for holding a probe tip in proper location
US6075376A (en) * 1997-12-01 2000-06-13 Schwindt; Randy J. Low-current probe card
US5729150A (en) * 1995-12-01 1998-03-17 Cascade Microtech, Inc. Low-current probe card with reduced triboelectric current generating cables
US6050829A (en) * 1996-08-28 2000-04-18 Formfactor, Inc. Making discrete power connections to a space transformer of a probe card assembly
US6603322B1 (en) * 1996-12-12 2003-08-05 Ggb Industries, Inc. Probe card for high speed testing
US5949018A (en) * 1996-12-23 1999-09-07 Commscope, Inc. Of North Carolina Water blocked shielded coaxial cable
US6586954B2 (en) * 1998-02-10 2003-07-01 Celadon Systems, Inc. Probe tile for probing semiconductor wafer
US6201402B1 (en) * 1997-04-08 2001-03-13 Celadon Systems, Inc. Probe tile and platform for large area wafer probing
WO1999004273A1 (en) 1997-07-15 1999-01-28 Wentworth Laboratories, Inc. Probe station with multiple adjustable probe supports
JP3188876B2 (ja) * 1997-12-29 2001-07-16 インターナショナル・ビジネス・マシーンズ・コーポレ−ション プロダクト・チップをテストする方法、テスト・ヘッド及びテスト装置
US5952843A (en) * 1998-03-24 1999-09-14 Vinh; Nguyen T. Variable contact pressure probe
US6124723A (en) * 1998-08-31 2000-09-26 Wentworth Laboratories, Inc. Probe holder for low voltage, low current measurements in a water probe station
US6276956B1 (en) * 1999-04-12 2001-08-21 Sencore, Inc. Dual point test probe for surface mount type circuit board connections
TWI327226B (en) 2002-06-28 2010-07-11 Celadon Systems Inc Shielded probe apparatus
US6727726B1 (en) * 2002-11-12 2004-04-27 Actel Corporation Field programmable gate array architecture including a buffer module and a method of distributing buffer modules in a field programmable gate array
US6860756B2 (en) * 2003-01-14 2005-03-01 Uta Auto Industrial Co., Ltd. Terminal with a heat shrink collar for wrapping connected wires

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI623759B (zh) * 2013-09-04 2018-05-11 克萊譚克公司 用於測量電流對電壓特性之裝置

Also Published As

Publication number Publication date
TW200912342A (en) 2009-03-16
US20060114009A1 (en) 2006-06-01
CN1508555A (zh) 2004-06-30
US7545157B2 (en) 2009-06-09
CN100480714C (zh) 2009-04-22
US20070252606A1 (en) 2007-11-01
US6992495B2 (en) 2006-01-31
TWI327226B (en) 2010-07-11
US20040000920A1 (en) 2004-01-01
TW200405019A (en) 2004-04-01
US7259577B2 (en) 2007-08-21

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