TWI310840B - Ic tester - Google Patents

Ic tester Download PDF

Info

Publication number
TWI310840B
TWI310840B TW095144129A TW95144129A TWI310840B TW I310840 B TWI310840 B TW I310840B TW 095144129 A TW095144129 A TW 095144129A TW 95144129 A TW95144129 A TW 95144129A TW I310840 B TWI310840 B TW I310840B
Authority
TW
Taiwan
Prior art keywords
converter
voltage
reference voltage
integrated circuit
output
Prior art date
Application number
TW095144129A
Other languages
Chinese (zh)
Other versions
TW200745575A (en
Inventor
Hideki Naganuma
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Publication of TW200745575A publication Critical patent/TW200745575A/en
Application granted granted Critical
Publication of TWI310840B publication Critical patent/TWI310840B/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31917Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924Voltage or current aspects, e.g. driver, receiver
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Analogue/Digital Conversion (AREA)
  • Tests Of Electronic Circuits (AREA)

Description

!310840 九、發明說明: 【發明所屬之技術領域】 減算器,即可以電路=器;並且關於不須採用偏移 解析度、尚精度之測定的積體電路測試器。 【先前技術】 動液多階段(多階層)電壓,以驅 於例如曰本公開二置的積體電路測試器 加以說明之。 ㈣2GG2·98738 m,町參照圖i 於圖1中,受測試對象(以 ===峨接鳴 偏電移偏移 之多階段電壓與賴產生部2 ^ 的輸出’並將DUT1 後,再輸出之。開關4盘偏移者間的電壓差加以放大 將偏移減算器3 ^開關4之輸^^列而裝置。A/D轉換器5 器5 DUT1之輸出在A/D轉換 之信號產生部崎人的輪人模式、卜依未圖示 4,輸入到A/D轉換器5。趟;再經由開關 :資料,未㈣幽鴨數 圖示之信餘生,*誦依未 5。辦換w的電 5 1310840 种數位㈣與偏移電壓值,以判斷DUT1是否良好。 使用Ϊ移減有以下的問題點。前述之裝置中, 入範圍之力i使⑽11的輸出電壓納入㈣轉換器5的私 哭3㈣壯#而貫現高解析度、高精度的設定。為此,偏移減^ G ί ΐί ί於A/D轉換器5之輸人段的前段,並且 咸异益3之精度或漸趨穩定期間的影響。 偏移 【發明内容】 於 【實施方式】 例圖°圖2顯示本發明之第1實施 說明。 /、圖1相同部份則標上同一符號,並省略其 將t i ί置多數個A/D轉換器6以取代A/D轉換器5, 電壓供庠到輸出加以輸入。D/A轉換器7將下限基準 的二2=個=^+器6。驗轉換器w轉換器t 供應到多數個A/D轉加上賴’㈣上限基準電壓 生部。在此,上限=二此外,DA轉換器7、8成為電壓產 之輸入範圍的t壓:亦即1下限J準電壓係規定A/D轉換器6 電麼與下限基準電壓』:於一般的趟轉換器中,依上限基準 進行比較而形成㈣成比較電壓,並制内部之比較器 出加以輸人,^行言H。計算部9將多數個A/D轉換器6的輸 部的控制(數位置^^ D/Af奐器7、8依未圖示之控制 、丁十)以分別將下限基準電壓VL、上限基準電壓 6 1310840!310840 IX. Description of the invention: [Technical field to which the invention pertains] A subtractor, that is, a circuit = a device; and an integrated circuit tester that does not require measurement of offset resolution and accuracy. [Prior Art] A multi-stage (multi-level) voltage of a moving liquid is described in order to drive an integrated circuit tester such as the second disclosed in the present disclosure. (4) 2GG2·98738 m, the town refers to Figure i in Figure 1, the object to be tested (with ===峨, the multi-stage voltage of the partial offset shift and the output of the Lai generation unit 2 ^) and then the DUT1 is output The voltage difference between the shifts of the switch 4 discs is amplified and the output of the offset subtractor 3^switch 4 is arranged. The output of the A/D converter 5 and the output of the DUT1 is generated in the A/D conversion signal. The part of the people of the Ministry of the People's Republic of China, Buyi is not shown in Figure 4, and is input to the A/D converter 5. 趟; and then via the switch: data, not (four) the number of the number of the ducks, the rest of the letter, * 诵 depends on 5. Change the power of 5 1310840 kinds of digits (4) and offset voltage value to judge whether DUT1 is good. The following problem is solved by using Ϊ shifting. In the above device, the force i of the range is included to make the output voltage of (10)11 into the (four) converter. 5 private cry 3 (four) Zhuang # and high-resolution, high-precision settings. For this reason, the offset is reduced to the front segment of the input segment of the A/D converter 5, and the salty benefit 3 The influence of the accuracy or the period of the gradual stabilization period. [Description] [Embodiment] FIG. 2 shows a first embodiment of the present invention. Some parts are marked with the same symbol, and are omitted, and ti ί is placed in a plurality of A/D converters 6 to replace the A/D converter 5, and the voltage is supplied to the output for input. The D/A converter 7 sets the lower limit reference. Two 2 = one = ^ + device 6. The converter w converter t is supplied to a plurality of A/D turn plus Lai's (four) upper limit reference voltage generation. Here, the upper limit = two in addition, the DA converters 7, 8 The t-voltage that becomes the input range of the voltage production: that is, the 1st lower limit J-precision voltage defines the A/D converter 6 and the lower limit reference voltage: in a general 趟 converter, it is formed by comparison with the upper limit reference (4) Comparing the voltage, and making the internal comparator to input, ^I. H. The calculation unit 9 controls the input sections of the plurality of A/D converters 6 (number position ^^ D/Af奂7, 8 Control not shown, D) to lower the lower limit reference voltage VL and the upper limit reference voltage 6 1310840

VH供應到A/D轉換哭6如,A . ^>ν^νί nT VL=VS-VH/2(VS : DUTl 輪入的輸入模辅出1侑、,JT1依未圖示之信號產生部所 換器並輸入到A/D轉 等輪出疋否在敎之_值細⑽躺或接_之^的判斷 換器靖形時德轉 慶;再供應到趟ίί^,更下限基準電壓、上限基準電 如則述,由於D/A轉換器7、8將 Α 7 屋可變動地供應到A/D轉換$ 6,基丰賴、上限基準電 仍可進行高解析度、高精b T不姻偏移減算器’ 广上裝置偏移減算器,因此能夠氏=二每 輪入範圍可容易地進行變換。 綠自)从構成。此外, 其次’本發明並不限定於此;關於DUT1 j 行電壓輸出之液晶驅練置,㈣f ’雖提示進 有姐=電流輪出之 轉換器設置於DUT1的輸出段,以脾私^圖3所不,將I/V 出到A/D轉換器6。 ;輸出電&轉換成電壓,再輪 又’所提示的構成雖於DUT1的每去接聯卜壯罢A & 6 ;但亦可裝置多工器等之選擇部二她轉,器 支接腳裝置一個A/D轉換器6。 、 的接腳,而每數 至於計算部9 ’可裝置位準移位電路於 換器6間取得位準之整合;或裝置位準移位/電二1和A/D轉 後段之數位電路(未圖示)間取得位準之整合。”、内和以和 又,可將範圍電路裝置於A/D轉換器6。 限基準電換器7、8將下限基準電壓、上 平㈣、應到職1的母支接腳之⑽轉換器6 ;但亦可每 1310840 多數個A/D轉換器6裝置D/A轉換器7、8。 此外,可藉由電壓測定部(未圖示),以測定DUT1之輸出電壓 的概略值,而設定D/A轉換器7、8的電塵值。 【圖式簡單說明】 圖1係顯示習用之積體電路測試器的構成圖。 圖2係顯示本發明之實施例的構成圖。 圖3係顯示本發明之其他實施例的構成圖。 【主要元件符號說明】 1〜受測試對象 2〜電壓產生部 3〜偏移減算器 4〜開關 5,6〜A/D轉換器 VH〜上限基準電壓 VL〜下限基準電壓 7,8〜D/A轉換器 9〜計算部 10〜I/V轉換器VH supply to A/D conversion cry 6 as, A. ^>ν^νί nT VL=VS-VH/2 (VS: DUTl wheeled input mode is supplemented by 1侑, JT1 is generated according to the signal not shown The converter is input and input to the A/D turn, etc., whether it is in the _ value of the _ value of the fine (10) lying or connected _ ^ ^ the judgment of the change of the shape of the Jingde dynasty; then supply to 趟 ί ί, lower limit datum The voltage and the upper limit reference voltage are as described above. Since the D/A converters 7 and 8 can be variably supplied to the A/D conversion $6, the base Fenglai and the upper limit reference power can still be high-resolution and high-precision. b T does not match the offset reducer's wide-range device offset reducer, so it can be easily converted every two rounds of the range. Green from). In addition, the second embodiment of the present invention is not limited to this; for the liquid crystal drive of the DUT1 j voltage output, (4) f 'there is a converter that is set to the output of the DUT1, and the spleen private map 3 No, the I/V is output to the A/D converter 6. The output power & converts into voltage, and then the round and 'presented composition, although the DUT1 is connected to each other, A &6; but can also be installed in the multiplexer, etc. The pin device is an A/D converter 6. , the pin of each, and the calculation unit 9 ' can be the device level shift circuit to obtain the level integration between the converters 6; or the device level shift / electric two 1 and A / D turn rear digital circuit (Unillustrated) the integration of the level is achieved. , and the range circuit can be installed in the A/D converter 6. The limit reference converters 7 and 8 convert the lower limit reference voltage, the upper level (four), and the parent support pin of the job 1 (10). 6; however, a plurality of A/D converters 6 may be provided for D/A converters 7 and 8 per 1310840. Further, a voltage measuring unit (not shown) may be used to measure the approximate value of the output voltage of the DUT 1. The electric dust value of the D/A converters 7 and 8 is set. [Brief Description of the Drawings] Fig. 1 is a view showing the configuration of a conventional integrated circuit tester. Fig. 2 is a view showing the configuration of an embodiment of the present invention. 3 shows a configuration diagram of another embodiment of the present invention. [Description of Main Element Symbols] 1 to Test Subject 2 to Voltage Generation Unit 3 to Offset Reducer 4 to Switch 5, 6 to A/D Converter VH to Upper Limit Reference voltage VL to lower limit reference voltage 7, 8 to D/A converter 9 to calculation unit 10 to I/V converter

Claims (1)

1310840 十、申請專利範圍: 1. 一種積體電路測試器,係將受測試對象之輸出以A/D轉換 器進行測定;其特徵為具備: 電壓產生部,用以根據該受測試對象之輸出,將上限基準電 壓、下限基準電壓可變動地供應至該A/D轉換器。 2. 如申請專利範圍第1項之積體電路測試器,其中,該電壓產 生部設有: 第1個D/A轉換器,將該下限基準電壓供應至該A/D轉換器; 第2個D/A轉換器,將該上限基準電壓供應至該A/D轉換器。 3. 如申請專利範圍第1或2項之積體電路測試器,其中,該受 測試對象係液晶驅動裝置。 4. 如申請專利範圍第1或2項之積體電路測試器,其中,於該 受測試對象的輸出路線上裝設有I/V轉換器,用以將電流轉換成電 壓。 十一、圖式Z1310840 X. Patent application scope: 1. An integrated circuit tester that measures the output of a test object by an A/D converter; it is characterized by: a voltage generating unit for outputting according to the test object The upper limit reference voltage and the lower limit reference voltage are variably supplied to the A/D converter. 2. The integrated circuit tester of claim 1, wherein the voltage generating unit is provided with: a first D/A converter that supplies the lower reference voltage to the A/D converter; A D/A converter supplies the upper reference voltage to the A/D converter. 3. The integrated circuit tester of claim 1 or 2, wherein the object to be tested is a liquid crystal driving device. 4. The integrated circuit tester of claim 1 or 2, wherein an I/V converter is mounted on the output path of the test object to convert the current into a voltage. XI, schema Z 99
TW095144129A 2005-11-29 2006-11-29 Ic tester TWI310840B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005343096A JP2007147469A (en) 2005-11-29 2005-11-29 Ic tester

Publications (2)

Publication Number Publication Date
TW200745575A TW200745575A (en) 2007-12-16
TWI310840B true TWI310840B (en) 2009-06-11

Family

ID=38125659

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095144129A TWI310840B (en) 2005-11-29 2006-11-29 Ic tester

Country Status (4)

Country Link
JP (1) JP2007147469A (en)
KR (1) KR100798837B1 (en)
CN (1) CN1975450A (en)
TW (1) TWI310840B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101354414B (en) * 2007-07-26 2011-03-16 联华电子股份有限公司 System and method for detecting defect with multi-step output function
CN109343516A (en) * 2018-12-11 2019-02-15 广西玉柴机器股份有限公司 A method of measurement assessment engine controller AD conversion precision

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810919A (en) * 1981-07-13 1983-01-21 Nippon Telegr & Teleph Corp <Ntt> Analog-to-digital converter
JPH03205921A (en) * 1990-01-08 1991-09-09 Hitachi Denshi Ltd Digitizer circuit
JP3144563B2 (en) * 1991-02-18 2001-03-12 横河電機株式会社 Waveform measuring device
KR100499368B1 (en) * 1997-12-30 2005-09-14 엘지전자 주식회사 Apparatus for regulating reference voltage of analog/digital convertor
KR20000004592A (en) * 1998-06-30 2000-01-25 김영환 Analog-to-digital converting apparatus utilizing comparison window of variable size
JP2002098738A (en) * 2000-09-27 2002-04-05 Yokogawa Electric Corp Ic tester
JP3874164B2 (en) * 2000-10-26 2007-01-31 横河電機株式会社 IC tester
JP2002250754A (en) * 2001-02-26 2002-09-06 Yokogawa Electric Corp Semiconductor test apparatus
JP4059174B2 (en) * 2003-09-09 2008-03-12 村田機械株式会社 Image processing device
JP2005229257A (en) * 2004-02-12 2005-08-25 Toshiba Corp Analog/digital converter and microcomputer mounted with it
JP2005265612A (en) * 2004-03-18 2005-09-29 Kawasaki Microelectronics Kk Test circuit
JP2005300287A (en) * 2004-04-09 2005-10-27 Yokogawa Electric Corp Ic tester

Also Published As

Publication number Publication date
KR20070056929A (en) 2007-06-04
KR100798837B1 (en) 2008-01-28
CN1975450A (en) 2007-06-06
TW200745575A (en) 2007-12-16
JP2007147469A (en) 2007-06-14

Similar Documents

Publication Publication Date Title
TWI375806B (en) Apparatus for testing driving circuit in display
US7492178B2 (en) Method and apparatus for testing a hall magnetic field sensor on a wafer
EP1241475A2 (en) Blood sugar level measuring device and semiconductor integrated circuit
JP2008004778A (en) Semiconductor device, its inspection method, and probe card
JP2004020256A (en) Differential voltage measuring device, semiconductor testing device
JP4978779B2 (en) Semiconductor integrated circuit test method and IC tester
JP4514104B2 (en) Magnetic detector
TWI310840B (en) Ic tester
TWI398647B (en) Testing apparatus, testing method and semiconductor device
WO2012137708A1 (en) Semiconductor device and method for inspecting same
JP6544256B2 (en) Measuring device and material testing machine
KR100827736B1 (en) Ic tester
JP2010096606A (en) Voltage applying current measurement circuit and semiconductor tester using the same
JPWO2005064583A1 (en) Display device drive device, display device, drive device or display device inspection method
JP2010145373A (en) Resistance measuring apparatus
JP2009156580A (en) Input capacitance measuring circuit
TWI279570B (en) Test system
JP2007178257A (en) Measuring device
JPWO2005064586A1 (en) Display device drive device, display device, drive device or display device inspection method
JP2006234763A (en) Waveform measuring device
JP2008067269A (en) Digital/analog conversion apparatus, and dc testing device
JP3554767B2 (en) Semiconductor test equipment
TW200818106A (en) IC tester and testing method
TWI311651B (en) Ic tester
JP2011242350A (en) Semiconductor testing device

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees