1299085 九、發明說明： 【發明所屬之技術領域】 本發明係與垂直式探針有關，特別是指一種具有高維 修效能的垂直式探針裝置。 5 15 【先前技術】 請參閱第一圖所示習用之垂直式探針卡1，探針卡電路 板10上複數個傳輸線11接設至探針組12,探針組12具有 一上導板121、一下導板122、一定位片123及複數個探針 120，上、下導板121、122及定位片123皆設有複數個針 孔用以插設各探針120;在組裝上先將定位片123支撐至相 對於下導板122有一預定之高度後，再使各探針12〇穿過 疋位片123及下導板122’最後於定位片123上覆蓋上導板 121以維持各探針120直立狀態，透過凸出於上導板ΐ2ι 之各探針12〇與電路板10上傳輸線u或其他訊號線電性 連接，因此探針卡i能透過各探針12〇凸出於下導板122 之針尖部位對晶圓電路執行晶圓測試工程，因定位片Η] 於探針組12中具有適度的活動性，且各探針12〇之身部於 上、下導板12卜122間有適度的活動空間，可提供各斜 Π0接觸所有待測元件時’輯得適#的自由度以微二至同 :量測平面’而不至於因針尖高度不一使部分探針12〇承 ，因此探針組12可使探針卡U 所有待測元件皆具有最佳之電性接觸效果。 上 實際應用上，測試探針經過長時間的使 行更換等維修工程’故上述習用探針卡i維修探針組^ 4 20 l299〇851299085 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a vertical probe, and more particularly to a vertical probe device having high maintenance performance. 5 15 [Prior Art] Referring to the conventional vertical probe card 1 shown in the first figure, a plurality of transmission lines 11 on the probe card circuit board 10 are connected to the probe set 12, and the probe set 12 has an upper guide plate. 121, a lower guide 122, a positioning piece 123 and a plurality of probes 120, the upper and lower guide plates 121, 122 and the positioning piece 123 are provided with a plurality of pin holes for inserting the probes 120; After the positioning piece 123 is supported to have a predetermined height with respect to the lower guiding plate 122, the probes 12 are passed through the clamping piece 123 and the lower guiding plate 122', and finally the upper guiding plate 121 is covered on the positioning piece 123 to maintain Each probe 120 is erected and electrically connected to the transmission line u or other signal lines on the circuit board 10 through the probes 12 凸 protruding from the upper guide ΐ2, so that the probe card i can protrude through the probes 12 Wafer test engineering is performed on the wafer circuit at the tip end portion of the lower guide 122, because the positioning sheet has moderate mobility in the probe set 12, and the probes 12 are on the upper and lower guides. There is a moderate activity space between the 12 and 122, which can provide the freedom of the slanting Π0 to contact all the components to be tested. The same applies to the measurement plane', and the probe set 12 can make all the components to be tested of the probe card U have the best electrical contact effect because the tip height is not uniform. In practical applications, the test probe has undergone a long-term replacement and other maintenance work. Therefore, the above-mentioned conventional probe card i repair probe set ^ 4 20 l299〇85
時，先將上導板121料後，才將欲更換的探針 抽取出，然而由於定位片123為非固定式 取下上導板121時往往宏異蓝—办^ 、击^ 此田 才“王奋易將疋位片123連同翻起，翻起 處也同3作起同部位之探針⑽，反而需重新進行針立的工 如此增加了探針維修_難度以及更多的人工時間成 本’更甚者使翻起的探針損毀而增加成本支出。When the upper guide plate 121 is first materialized, the probe to be replaced is extracted, but since the positioning piece 123 is non-fixed, the upper guide plate 121 is often removed. “Wang Fenyi will use the squatting piece 123 together with the cocking and turning up the same position as the probe of the same part (10). Instead, the need to re-needle the work increases the probe maintenance _ difficulty and more labor time cost. Even worse, the flipped probe is destroyed and the cost is increased.
習用上縱使有如第二圖所示美國專利公開 2006/0066328』號所提供之探針裝置2〇，為將固定片u 於下導板28之凸起結構上’雖然可避免日後維修探針 ίο W生如上述習用探針卡i之固定片123翻起之不 象，然相對的由於固定片32已固設於下導板28上，反而 無法在與待測元件電性接觸時提供如上述習用探針卡 固疋片123的活動性’如此使該探針裝置2〇巾各探針％ 接觸所有待測元件之瞬間，承受較大的正向應力，因而容 β易造成探針36使用上較高的毀損率；因此該探針裝置2〇 之改=構仍無法同時兼顧現今垂直式探針於維修與使用 上的品質。 【發明内容】 20 目此，本發明之主要目的乃在於提供—麵直式探針 裝置，有效提升探針祕，並同畴低探針使 用過程的磨損。 為達成前揭目的，本發明所提供一種垂直式探針裝 置’包括有相互《置之二導位板、—定位片及複數個探針， 5 1299085 ΐ些t針為具良好導電性之金屬物質所製成’可用以點觸 電路中的待測電子元件；該二導位板及該定位片分別 &有，數個相對應之針孔供以插設該些探針，其中一該導 位板^ u又有至少一通孔，該二導位板之間具有一容置空 5門Λ夂位片位於該二導位板之間，各該探針可於該容置 工門1產生交形量，該定位片於橫向、縱向上具有微量的 位移空間，透過各該通孔可施以作用力於該定位片上，使 其中-料位板移除_定位#固定於另_該導位板上。 10【實施方式】 、以下’茲配合圖示列舉若干較佳實施例，用以對本 發明之結構與功效作詳細說明，其中所關示之簡要說 明如下： 第一圖係本發明所提供第一較佳實施例之分解立體圖； 1：5 第四圖係上述第一較佳實施例之結構示意圖； 第五圖係上述第一較佳實施例所提供結構組裝過程之分 解立體圖； 第六圖係上述第一較佳實施例所提供結構維修拆解過程 之分解立體圖； 2〇 第七圖係本發明所提供第二較佳實施例之結構示意圖； 第八圖係本發明所提供第三較佳實施例之結構示意圖； 第九圖係本發明所提供第四較佳實施例之結構示意圖。 6 Ϊ299085 請參閱如第三及第四圖所示本發明提供之第一幸六户5 施例，為一垂直式探針裝置3，包括有一第一、_第二^二 板30、40、一定位片50及複數個探針6〇，該些探= 5具良好導電性之金屬材質所製成，可用以點觸^圓電路^ 的待測電子元件，其中： 該二導位板30、40為上、下相互對合之結構，分別設 有複數個相對應之針孔3卜41供以插設該些探針6〇，各該 針孔31、41之孔徑並相當於各該探針6〇兩端之戴面大小^ 1〇該第-導位板30上穿設有四通孔32，該些通孔&外圍之 下方則具有—第—支撐部33;該第二導位板4G具有二第二 支撐部42及-容置空間43，該二第二支撐部42之高度小 於該第-支撐部33,且其間之高度差大於該定位片5〇之厚 度’各該第二支撐部42上並設有二螺孔421分別與各該通 15孔32位置相對應，該容置空間43為位於該二第二支撐部 42之間的凹陷處。 该定位# 5〇為不具導電性之絕緣物質所製成，設於該 合置工間43與口亥—第二支擇部42上，具有複數個針孔$i 及四螺孔52 ’趟針孔51之位置與該二導位板如、4〇上 2〇所設置者相對應，同樣供以插設該些探針6〇，該些針孔51 之孔徑相當於^該探針6〇之針身截面大小，該些螺孔％ 之位置支撐部42上所設置者相對應，各該螺孔 52、421可供對應之鎖設裝置依序鎖設 ，如本實施例第五圖 所提供之補认裝置為_螺絲53，各該螺絲w之最大外德 7 1299085 皆可供各該螺絲53通 則小於各该通孔32 ’使各該通孔32 過0 請參閱如第五圖所示，該垂直式探針裝置3 式為先藉由四螺絲53與該些螺孔52、 ，，衣方 該定位片50鎖固於該第二導位板4 :的从結構將 H別穿過各該針孔5卜4卜因此維持該些探 立狀悲，餅該些探針6G準確對位於 上十 15 夕3^，即可使較位片5G於橫向、縱向上具有微量= 間’因此完成職直式探針裝置3之構裝；配合第四 ，荟L擔針6G藉由穿設於該第—導位板3()、該定位 片50及該第二導位才反4〇之三層結構以維持針立之狀能， 更由於各該第二支撐部42與該第—支撐部33之間㈣度 差^吏該定位片50則黃向及縱向皆具有微量之位移空間， 可提供各該探針60接觸所有待測元件時，除了於該容置允 間43中產生適當之變形量，且不會因定位片缺乏自由度的 缺點造成探針活動性不佳所產生探針與定位片的相^磨 耗0 配合第六圖參照，當部分之該些探針6〇需進行更換等 20維修工程時，則先將該些螺絲53穿過該第一導位板3〇、之 通孔32置於該定位片5〇上，與該些螺孔52、42丨相互鎖 設，因而可將該定位片50固定於該第二導位板4〇上再將 e亥第一導位板3〇取下，可避免發生如習用探針裝置之固定 片翻起之不良現象，最後才將欲更換或維修的各該探針60 1299085 抽取出，重«人探針，因此有效完成該垂直式探 針裝置3之探針維修工程。The probe device 2〇 provided by the US Patent Publication No. 2006/0066328, as shown in the second figure, is used to fix the piece u on the raised structure of the lower guide plate 28, although it is possible to avoid future maintenance of the probe ίο. The fixing piece 123 of the above-mentioned conventional probe card i is not turned up, but since the fixing piece 32 has been fixed on the lower guiding plate 28, it is not provided as described above when it is in electrical contact with the element to be tested. The activity of the conventional probe-clamping blade 123 is such that the probe device 2 is exposed to all the components to be tested at the moment of contact with the device to be tested, and is subjected to a large forward stress, so that the volume β is likely to cause the probe 36 to be used. The higher the damage rate; therefore, the modification of the probe device can not simultaneously meet the quality of the current vertical probe for maintenance and use. SUMMARY OF THE INVENTION [20] Accordingly, the main object of the present invention is to provide a face-to-face probe device that effectively enhances the probe's secret and the wear of the same-field low-probe process. In order to achieve the foregoing object, the present invention provides a vertical probe device 'comprising a mutual two-position plate, a positioning piece and a plurality of probes, 5 1299085 ΐ some t-pins are metals with good conductivity The material is made of 'the electronic component to be tested in the touch circuit; the two-position plate and the positioning piece respectively have a plurality of corresponding pin holes for inserting the probes, one of which The guiding plate ^u has at least one through hole, and the two guiding plates have a receiving space between the two guiding plates between the two guiding plates, and the probes are respectively available for the receiving work door 1 The locating piece has a slight displacement space in the lateral direction and the longitudinal direction, and the through hole can be applied to the positioning piece through the through hole, so that the level plate removal_positioning# is fixed to another _ On the guide plate. 10 [Embodiment] The following is a brief description of several preferred embodiments for illustrating the structure and function of the present invention. The brief description is as follows: The first figure is the first provided by the present invention. 1 is a schematic exploded view of the first preferred embodiment; the fifth is an exploded perspective view of the structural assembly process provided by the first preferred embodiment; An exploded perspective view of the structural maintenance and disassembly process provided by the first preferred embodiment; 2 is a schematic structural view of a second preferred embodiment of the present invention; and the eighth embodiment is a third preferred embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 9 is a schematic structural view of a fourth preferred embodiment of the present invention. 6 Ϊ 299085 Please refer to the first embodiment of the first six households provided by the present invention as shown in the third and fourth figures, which is a vertical probe device 3, including a first, second, second, second, 30, 40, A positioning piece 50 and a plurality of probes 6〇, which are made of a metal material having good conductivity, can be used to touch the electronic component to be tested, wherein: the second guiding plate 30 40 is a structure in which the upper and lower sides are mutually coupled, and a plurality of corresponding pinholes 3 are respectively provided for inserting the probes 6 , and the apertures of the pinholes 31 and 41 are equivalent to each The size of the wearing surface of the probe 6 ^ 1 〇 1 〇 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第The guiding plate 4G has two second supporting portions 42 and an accommodating space 43. The height of the second supporting portions 42 is smaller than the first supporting portion 33, and the height difference therebetween is greater than the thickness of the positioning piece 5' The second supporting portion 42 is provided with two screw holes 421 respectively corresponding to the positions of the through holes 15 , and the receiving space 43 is a recess between the two second supporting portions 42 . The positioning #5〇 is made of an electrically non-conductive insulating material, and is disposed on the assembly chamber 43 and the mouth-second selection portion 42 and has a plurality of pinholes $i and four screw holes 52'趟The position of the pinhole 51 corresponds to the position of the two-position plate, for example, on the second side of the second guide plate, and the probes 6 are also inserted, and the apertures of the pin holes 51 correspond to the probe 6 The size of the needle body cross-section is corresponding to the position of the screw hole %, and the screw holes 52, 421 can be sequentially locked by the corresponding locking device, as shown in the fifth embodiment of the embodiment. The provided replenishing device is _screw 53, and the maximum external de 7 799085 of each of the screws w is available for each of the screws 53 to be smaller than each of the through holes 32 ′ such that each of the through holes 32 passes through 0. As shown, the vertical probe device 3 is firstly secured by the four screws 53 and the screw holes 52, and the positioning piece 50 is locked to the second guiding plate 4: Passing through each of the pinholes 5 and thus maintaining the sense of suspicion, the probes 6G are accurately located on the upper tenth of the night, so that the comparative piece 5G has a trace amount in the lateral direction and the longitudinal direction. Between the two ends, the assembly of the straight-type probe device 3 is completed; in conjunction with the fourth, the L-shaped needle 6G is passed through the first-position plate 3 (), the positioning piece 50 and the second guide The three-layer structure of the anti-four 以 以 以 以 以 以 以 以 , , , , , , , , , , , , , 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位 定位The micro-displacement space can provide probe displacement when the probe 60 contacts all the components to be tested, except that the appropriate amount of deformation is generated in the accommodating space 43 without the disadvantage of lack of freedom of the positioning piece. The phase difference between the probe and the positioning piece generated by the poor 0 is matched with the reference in the sixth figure. When some of the probes 6 need to be replaced, etc. 20 maintenance work, the screws 53 are first passed through the first The through hole 32 of the guiding plate 3 is disposed on the positioning piece 5〇, and is locked with the screw holes 52 and 42丨, so that the positioning piece 50 can be fixed on the second guiding plate 4〇 Then, the first guide plate 3 of the e-hai is removed, which can avoid the phenomenon that the fixing piece of the conventional probe device is turned up, and finally the replacement or the dimension is to be replaced. The probe 601,299,085 each extracted, re «human probes, thus effectively completing the vertical probe maintenance means 3 of the probe.
當然該垂直式探針裝置3用以將該定位片50固定於該 第一V位板40上之方式並不限定於如上述該些螺絲y及 5螺孔52、421之鎖設裝置組合，亦可參閱如第七圖所示， 為本發明第二較佳實施例所提供之垂直式探針裝置4,將上 述鎖設組合取代為以多個磁性物34利用磁力作用將一定位 片54固定於-第二導位板44上之方式，例如於該垂直式 探針裝置4 T方放置有具磁性感應功能的裝置，使之與該 1〇 $磁性物34產生相互吸引的磁力，則可在插設該些探針⑼ 時具有固定該定位片54於該第二導位板44上之功能，當 ^本實施例所提供之磁感應方式不限定於感應裝置的種 颂，且不限定於感應裝置的放置處亦即感應磁場的方向， :、要了與π亥些磁性物34產生磁力感應，同時磁力作用方向 為自。玄疋位片54作用於該第二導位板44上，皆可發揮本 發=之功效；且當部分之該些探針6〇需進行更換等維修工 私¥，則同樣以該些磁性物34穿過該第一導位板3〇之通 孔32藉由磁性感應方式使該些磁性物34施以作用力於該 疋位片54上，進而固定該定位片54於該第二導位板44上， 2〇因而達成本發明所需之功能特性。 明茶閱如第八圖所示為本發明第三較佳實施例所提供 之垂直式探針裝置5，提供另一種固定定位片之方式，係具 有一第 第二導位板35、45、一定位片55及該些探針 各元件之間的相對位置關係與上述實施例所提供者相 9 1299085 同，差異僅在於固定結構的設置方式，其中該第一導位板 - 35上不具如上述通孔結構之設置，而改為於該第二導位板 • 45之支撐部處穿設多個通孔450，該定位片％可將該些通 孔450覆蓋，欲使該定位片55固定於該第二導位板45上， 5則利用抽氣裝置降低該些通孔450内的空氣壓力甚至使呈 真空狀態，則可使該定位片55固定吸附於該第二導位板45 上，同樣可達成本發明所需之功能特性。 • 值得一提的是，本發明所提供之垂直式探針裝置並不 限定如上述實施例所提供之二導位板與定位片之間的相對 ，10結構關係，請參閱如第九圖所示為本發明第四較佳實施例 所提供之垂直式探針裝置6，與上述第一較佳實施例之主要 差異在於以一間隔層70及一第二導位板46之結構取代上 述該垂直式探針裝置3之第二導位板40,該間隔層70則同 樣具有二第二支撐部71及設於各該支撐部71之多個螺孔 15 72,對應於該第一導位板3〇之通孔32及該定位片5〇之螺 鲁 孔52，因此提供將該定位片50固定於該間隔層70之方式， 同樣可達成本發明所需之功能特性，更可於因產品所需而 製造出不同長度規格之該探針6〇時，配合調整所需設置之 -该間隔層70的高度，將該定位片5〇架設於該二第二支撐 20部71上，使該第一導位板3〇、該定位片5〇及該第二導位 板46能以最佳之相對設置高度穿設該些探針6〇，因此方便 δ亥垂直式探針裝置6之生產製作；當然定位片固定於間隔 層上的固定裝置設置方式亦不限定於鎖設裝置之結構，而 可等效應用上述各實施例所提供者，皆可發揮本發明之功 10 1299085 效。 唯，以上所述者，僅為本發明之較佳可行實施例而已， 故舉凡應用本發明說明書及申請專利範圍所為之等效結構 變化，理應包含在本發明之專利範圍内。The manner in which the vertical probe device 3 is used to fix the positioning piece 50 to the first V-position plate 40 is not limited to the combination of the locking devices of the screws y and 5, and the screw holes 52 and 421. Referring to FIG. 7 , a vertical probe device 4 according to a second preferred embodiment of the present invention replaces the lock combination with a plurality of magnetic materials 34 to apply a positioning piece 54 by magnetic force. Fixed to the second guiding plate 44, for example, a device having a magnetic sensing function is placed on the T-side of the vertical probe device 4 to generate a mutual attraction magnetic force with the magnetic material 34. The function of the positioning piece 54 on the second guiding plate 44 can be fixed when the probes (9) are inserted. The magnetic induction mode provided in this embodiment is not limited to the type of the sensing device, and is not limited. In the direction of the induction device, that is, the direction of the induced magnetic field, :, and the magnetic induction of the magnetic material 34 is generated, and the direction of the magnetic force is self. The Xuanzao tablet 54 acts on the second guiding plate 44, and all of them can exert the effect of the hairpin==; and when some of the probes 6 need to be replaced, etc., the magnetics are also used. The magnetic material 34 is applied to the clamping piece 54 by magnetic induction through the through hole 32 of the first guiding plate 3, thereby fixing the positioning piece 54 to the second guiding On the bit plate 44, 2 〇 thus achieves the functional characteristics required by the present invention. As shown in the eighth embodiment, the present invention provides a vertical probe device 5 according to a third preferred embodiment of the present invention, and provides another method for fixing the positioning piece, which has a second guiding plate 35, 45, The relative positional relationship between a positioning piece 55 and the components of the probes is the same as that of the above-mentioned embodiment. The difference is only in the arrangement of the fixed structure, wherein the first guiding plate-35 does not have the same The through hole structure is disposed, and a plurality of through holes 450 are formed in the supporting portion of the second guiding plate and the through hole 450, and the positioning piece 55 can cover the through holes 450. The positioning plate 55 is fixedly attached to the second guiding plate 45 by being fixed on the second guiding plate 45, and the air pressure in the through holes 450 is reduced by the air suction device. In addition, it can also achieve the functional characteristics required by the invention. It is worth mentioning that the vertical probe device provided by the present invention is not limited to the relative relationship between the two-position plate and the positioning piece as provided in the above embodiment, and the structure relationship is as shown in FIG. The vertical probe device 6 of the fourth preferred embodiment of the present invention is different from the above-described first preferred embodiment in that the structure of a spacer layer 70 and a second alignment plate 46 is substituted for the above. a second guiding plate 40 of the vertical probe device 3, the spacer layer 70 also has two second supporting portions 71 and a plurality of screw holes 15 72 provided in each of the supporting portions 71, corresponding to the first guiding position The through hole 32 of the plate 3 and the screw hole 52 of the positioning piece 5 are provided, so that the positioning piece 50 is fixed to the spacer layer 70, which can also achieve the functional characteristics required by the invention, and is more suitable for When the probe of the length of the probe is required to be manufactured, the height of the spacer layer 70 is adjusted, and the positioning piece 5 is erected on the second support 20 portion 71. The first guiding plate 3〇, the positioning piece 5〇 and the second guiding plate 46 can be optimally opposed The height of the probes 6 is set to be high, so that the production of the vertical probe device 6 is facilitated; of course, the fixing device of the positioning piece fixed on the spacer layer is not limited to the structure of the locking device, but Equivalent application of the above embodiments can provide the work of the present invention 10 1299085. It is to be understood that the above-described embodiments are merely preferred embodiments of the present invention, and the equivalent structural changes of the present invention and the scope of the claims are intended to be included in the scope of the present invention.
11 1299085 【圖式簡單說明】 第一圖係習用垂直式探針卡之結構示意圖； 第二圖係美國專利公開第『2006/0066328』號之垂直 式探針結構示意圖； 5 第二圖本發明所提供第一較佳實施例之分解立體圖； 第四圖係上述第一較佳實施例之結構示意圖； 第五圖係上述第一較佳實施例所提供結構組装過程之分 解立體圖； 77 第六圖係上述第一較佳實施例所提供結構維修拆解過程 10 之分解立體圖； σ王 第七圖係本發明所提供第二較佳實施例之結構示意圖； 第八圖係本發明所提供第三較佳實施例之結構示意圖； 第九圖係本發a月所提供第四較佳實施例之結構示意圖。 12 1299085 【主要元件符號說明】 3、4、5、6垂直式探針裝置 30、35第一導位板 31、4卜51針孔 32、450通孔 33第一支撐部 5 34磁性物 4〇、44、45、46第二導位板 42、71第二支撐部 421、52、72螺孔 φ 43容置空間 53螺絲 . ίο 70間隔層 50、54、55定位片 60探針 1311 1299085 [Simple description of the drawings] The first figure is a schematic view of the structure of a conventional vertical probe card; the second figure is a schematic diagram of a vertical probe structure of the US Patent Publication No. 2006/0066328; The exploded view of the first preferred embodiment is provided; the fourth embodiment is a schematic structural view of the first preferred embodiment; and the fifth is an exploded perspective view of the structural assembly process provided by the first preferred embodiment; 6 is an exploded perspective view of the structural maintenance disassembly process 10 provided by the first preferred embodiment; the seventh embodiment of the present invention is a schematic structural view of the second preferred embodiment of the present invention; the eighth figure is provided by the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 9 is a schematic structural view of a fourth preferred embodiment provided by the present invention. 12 1299085 [Description of main component symbols] 3, 4, 5, 6 vertical probe device 30, 35 first guide plate 31, 4 51 pin hole 32, 450 through hole 33 first support portion 5 34 magnetic material 4 〇, 44, 45, 46 second guide plates 42, 71 second support portions 421, 52, 72 screw holes φ 43 accommodating space 53 screws. ίο 70 spacer layers 50, 54, 55 positioning piece 60 probe 13