1246103 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種奈米碳管基板的技術領域，尤指一 種以支撐物支撐奈米碳管使其站立，而增加場發射效益及 均勻性之奈米碳管基板結構及其製法。 【先前技術】 按，傳統的陰極映像管（CRT)，其係藉由電子槍發 射電子束，透過偏向板進而控制電子束的方向撞擊磷光面 板來呈現影像，但傳統的陰極射線管顯示器存在著體積龐 大且重量較重的問題。 近年來，場發射顯示器（Field Emission Display ; FED)技術漸趨成熟，場發射顯示器的基本結構如第6圖所 示，其大致上是由陽極板（螢光板）8 1、陰極板8 2以 及陽極板和陰極板間之真空封合區8 3所構成，而在陰極 板8 2上會設置數十萬個微尖端（micro-tip)作為發射源 8 4，且於發射源8 4周圍設置控制閘極8 5，以供控制 發射源8 4所發射之電流大小。 由於場發射顯示器係由發射源複數個8 4作為電子發 射源，使每個畫素皆由單獨的發射源8 4來發射電子撞擊 陽極板8 1發光，因此整個顯示器的厚度可大幅縮減至數 公分内，而克服了傳統陰極映像管體積龐大且重量較重的 問題。 5 1246103 但是，前述之結構受到製作微尖端所需的蒸鍍技術的 限制’因而嚴重地降低了顯示器製作過程的良率。此外， 發射源的尖端也容易因為損耗而降低壽命，因此仍難進入 商品化的階段。 近年來在奈米碳管技術發展後，運用奈米破管作為發 射源的技術便被發展出來，稱之為奈米破管場發射顯示器 (carbon nanotube—field emission display ? CNT—FED )。目前在實驗室階段的奈米碳管場發射顯示器係以化學氣 相成長法使奈米破管成長於陰極板上，但此一方法目前並 不易於大量生產之模式，且由於生長過程所需的高溫以及 氣象沉積均勻性所造成的困難點不易突破，遂有業者以下 述方法來製作奈米碳管場發射顯示器，其係於陰極板9工 上設置一導電層9 2，再於導電層9 2上塗佈一層奈米碳 管9 3，奈米碳管9 3在塗佈前係先與黏膠9 4混拌而後 進行塗佈，待黏膠凝固後再設置一介電層9 5與一閘極層 9 6，並依顯示時所需之陣列位置對介電層9 5進行|虫刻 使奈米石厌官9 3曝i各出來’如弟7圖所示，如此便能由 奈米碳管9 3作為發射源，奈米碳管9 3製成之發射源可 方；低電壓之狀悲下進行放電’只現奈米;5炭管場發射顯示器 之技術之可能。 然而，由於奈米碳管9 3在塗佈前係先與黏膠9 4混 1246103 拌而後進行塗佈，因此奈米碳管9 3多半會呈交錯疊置或 傾斜狀態，且大部分的奈米碳管9 3均會被黏膠9 4包覆 ，或者整根平躺而黏著於導電層9 2之表面，這會導致奈 米碳管9 3突露出來的部份十分短淺，且由於大部分之奈 米碳管9 3均被包覆在黏膠9 4之内，而一般黏膠之材質 為低熔點之玻璃膠，其係為絕緣材質，所以會有一部分的 奈米碳管9 3無法直接與導電層9 2相接觸，這部分就成 為無效的場發射源，而影響其發射之效能，再者，由於碳 管外露之長度無法精確控制，造成場發射均勻性不佳，使 本方法之場發射顯示器之均勻性無法突破50%，因此前述 之奈米碳管場發射顯示器技術仍有加以改進之必要。 【發明内容】 本發明之主要目的，在於解決上述的問題而提供一種 奈米碳管基板結構及其製法，其主要係於奈米碳管層或導 電層中設置多數粒徑小於奈米碳管之支撐顆粒，使各奈米 碳管能靠抵於支撐顆粒而呈站立狀地凸出於奈米碳管層表 面，而能由凸露出來的奈米碳管作為有效的場發射源，俾 以達到提升發射電子效能之功效。 本發明之次一目的，係在於奈米碳管層中摻混有多數 導電粒子，而能達到奈米碳管與導電層之電性連結作用， 而能增加碳管與導電層之連結機會。 1246103 為達前述之目的，本發明之奈米碳管基板製法，其包 括下列步驟： a ·設置導電層： 於一基板上設置一導電層； b·設置奈米碳管層： 於導電層上設置一奈米礙管層，該奈米碳管層中具有 多數奈米碳管以及多數粒徑小於奈米碳管長度之支撐顆粒 ，且以黏膠使奈米碳管黏結於導電層表面並使支撐顆粒及 導電層相互黏結，而能由支撐顆粒供奈米碳管靠抵，而令 奈米碳管呈站立狀而凸出； c ·燒結 將設置奈米碳管層步驟完成後之基板進行燒結，使奈 米碳管、支撐顆粒與導電層穩固結合。 本發明之上述及其他目的與優點，不難從下述所選用 實施例之詳細說明與附圖中，獲得深入了解。 當然，本發明在某些另件上，或另件之安排上容許有 所不同，但所選用之實施例，則於本說明書中，予以詳細 說明，並於附圖中展示其構造。 【實施方式】 請參閱第1圖至第3圖，圖中所示者為本發明所選用 之實施例結構，此僅供說明之用，在專利申請上並不受此 1246103 種結構之限制。 本實施例之奈米碳管基板製法，其包括下列步驟· a ·設置導電層： 於一基板1 1上設置一導電層1 2，該導電層1 2係 由銀與玻璃等材料所製成。 b·設置奈米碳管層： 於導電層1 2上設置一奈米碳管層1 3，於本實施例 中該奈米碳管層1 3係將多數支撐顆粒1 3 1、多數直管 狀之奈米碳管1 3 2與黏膠（本實施例中之黏膠係使用低 熔點之玻璃膠）混拌後，再塗佈於導電層i 2上而形成者， 且各支撐顆粒1 3 1之粒徑係小於奈米碳管丄3 2之長度 ，而黏膠可使各奈米碳管1 3 2與導電層1 3 1黏結及與 支撐顆粒131與導電層丄2相互黏結，而能由支撐顆粒 1 3 1供奈米石厌官1 3 2靠抵，令奈米碳管工3 2呈站立 狀而凸出於奈米碳管層丄3之表面。 c ·燒結： 將設置奈米石炭管層步驟完成後之基板1 1進行燒結， 使不米石反吕1 3 2、支撐顆粒131與導電層12穩固結 合0 1¾明之_奈米石炭管基板運用於場發射顯示器之陰極板 時，更包含下列步驟·· 1246103 d·設置介電層： 於奈米碳管層1 3上設置一介電層1 4。 e ·設置閘極層： 之二介電層14上設置一間極層15，並依顯示時所需 列位置進行蚀刻而形成多數孔丄6，使奈来石炭管 3中凸出之奈米碳管欠了丨+^ 射源。 ^132在各孔16中露出來作為場發 由前述之製法所製成之奈米碳管基板結構係於— 1 1上設置—導電層1 2，而該導電層1 2上設置有二太 :石:官層1 3 ’該奈米碳管層丄3具有多數直管狀之奈米 奴官1 3 2以及多數粒徑小於奈米碳管i 3 2長度之支擇 顆粒1 3 1，且以黏膠使奈米碳管丄3 2與導電；2: 支擇顆粒1 3 1與導電層1 2相絲結，㈣由各支擇顆 3 1供各奈米碳管丄3 2靠抵’令各奈米碳管工u 呈站立狀而凸出於奈米碳管層1 3表面，另於該奈米碳管 層1 3上依序疊設-介電層i 4與—_層丄5，且㈣ 層14與閘極層15依顯示時所需之陣列位置分別具有一 孔1 6 ’使各孔1 6之位置中的奈米礙管丄3 2突露出來 作為場發射顯示器之陰極板的場發射源。 、，由於本發明之奈米碳管層丄3中具有多數直管狀之奈 米礙管1 3 2以及多數粒#小於奈米碳管長度之支撐顆粒 1246103 1 3 1，因此在混拌黏膠而塗佈於導電層丄2上時， 撐顆粒1 3 1可供各奈米碳管1 3 2靠抵，使各夺米石L 132呈站立狀而凸出於奈米碳管層”之表面，如= 圖所示，由於奈米碳管本身之強度很高，不容易因本身之 重量而彎曲，所以當奈米碳管靠在支撐 因重力而靠在導電層之一方m山入才曰有^ 而另外一鈿會因為支撐物的 支撐作用而朝向相反於導電層之一方，而設計時支撐顆粒 為高溶點之陶竟或是碳球，其不會因為燒結黏膠時之高溫 而與奈米碳管黏結，所以較佳狀態下支撐物是不與奈米碳 管黏結的，也因為如此的設計，可保證當施加電廠於該夺 米碳管基板時，奈米碳管能隨電場方向排列，使場發射之 特性增加且碳管高度會較均勾，亦即凸出的各奈米碳管能 形成明確的微尖端（丨nicr〇_tip)來作為有效的場發射源， 而有助於提升發射電子之效能。 當然，本發明仍存在許多例子，其間僅細節上之變化 例如·在b ·設置奈米碳管層之步驟中，先將多數支撐 顆粒1 3 1、多數導電粒子1 3 3與少量黏膠混拌後塗佈 於層1 2上开>成凹凸形態之表面，再將奈米破管1 3 2與黏膠混拌後塗佈於支撐顆粒i 3丄形成之凹凸表面上 ’如第4圖所示，而形成前述之奈米碳管層1 3，如此同 樣可由各支撐顆粒i 3 2供各奈米碳管丄3 2靠抵，令各 11 1246103 3 2呈站立狀而凸出於奈米碳管層1 3表面， 連二：S 3可使奈米碳管1 3 2與導電層1 2電性 魏。 ⑽例同樣可達到與前述第—實施列相同之 ::亦可於a.設置導電層之步驟時，將支撐顆 1以摻混於導電層12a巾，使導電層 凹凸之形能，‘楚〔门 — 心、“ 5圖所示，而後於b ·設置奈米碳管層 時’將多數直管狀之奈米碳管1 3 2混拌黏膠後塗 έ <導電層1 2 a上（可以將奈米碳管加人有機黏結劑而 、P ;表面）使奈米碳管1 3 2在由支撐顆粒工2 1所形 、 表面的支撐下呈站立狀而凸出於奈米碳管層13 表面再予以燒結結合。如此不僅減少無效場發射源發 _的機胃’更錢大部分的碳管均設置於於表面，降低碳 二埋入所造成的長度不均現象，而同樣可達到與前述第一 實施列相同之功效。 以上所述貫施例之揭示係用以說明本發明，並非用以 限制本發明，故舉凡數值之變更或等效元件之置換仍應隸 屬本發明之範疇。 由以上洋細説明，可使熟知本項技藝者明瞭本發明的 確可達成W述目的，實已符合專利法之規定，錢出專利 申請。 12 1246103 【圖式簡單說明】 弟1圖係本發明之製法的流程方塊圖 弟2圖係本發明之製法的製作流程示意圖 :3圖係本發明之奈米碳管基板的結構示意圖 弟4圖係本發明第二實施例之結構示意圖 第5圖係本i明第二實施例之製作流程示意圖 :6圖係習用之場發射顯示器的基本結構示意圖 第7圖係3用之奈米碳管場發射顯示器結構示意圖 (習用部分） 陽極板8 1 真空封合區8 3 閘極8 5 導電層9 2 黏膠9 4 閘極層g 6 (本發明部分） 基板1 1 奈米碳管層1 3、1 奈米碳管1 3 2 >M電層1 4 陰極板8 2 發射源8 4 陰極板9 1 奈米碳管9 3 介電層9 5 導電層1 2、1 2 支撐顆粒131 導電粒子1 3 3 閘極層1 5 1246103 孔1 6 141246103 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to the technical field of a nano carbon tube substrate, and particularly to a nano carbon tube supported by a support to make it stand, thereby increasing field emission efficiency and uniformity. Nano carbon tube substrate structure and manufacturing method thereof. [Previous technology] According to the conventional cathode-ray tube (CRT), an electron gun emits an electron beam, and then the deflection plate controls the direction of the electron beam to strike the phosphorescent panel to present an image. However, the traditional cathode-ray tube display has a volume. Large and heavy problems. In recent years, Field Emission Display (FED) technology has gradually matured. The basic structure of a field emission display is shown in Figure 6, which is roughly composed of an anode plate (fluorescent plate) 81, a cathode plate 8 2 and A vacuum sealing area 83 is formed between the anode plate and the cathode plate, and hundreds of thousands of micro-tips are set on the cathode plate 82 as the emission source 84, and are arranged around the emission source 84. The gate 85 is controlled for controlling the amount of current emitted by the emission source 8 4. Since the field emission display uses a plurality of emission sources as the electron emission sources, each pixel emits electrons from a separate emission source 8 4 to strike the anode plate 8 1 to emit light, so the thickness of the entire display can be greatly reduced to several Within centimeters, it overcomes the problems of large volume and heavy weight of traditional cathode-ray tube. 5 1246103 However, the aforementioned structure is limited by the vapor deposition technology required to make microtips, thus seriously reducing the yield of the display manufacturing process. In addition, the tip of the emission source is also prone to reduce life due to wear and tear, so it is still difficult to enter the stage of commercialization. In recent years, after the development of nanometer carbon tube technology, the technology of using nanometer tube breaking as a source has been developed, which is called carbon nanotube-field emission display (CNT-FED). At present, the nanometer carbon tube field emission display in the laboratory stage uses the chemical vapor growth method to grow the nanometer tube on the cathode plate, but this method is currently not easy to mass-produce, and due to the growth process required Difficult points caused by the high temperature and the uniformity of meteorological deposits are not easy to break through. Therefore, some practitioners use the following method to make nano-carbon tube field emission displays, which are provided with a conductive layer 92 on the cathode plate 9 and then a conductive layer. A layer of nano carbon tube 9 3 is coated on 9 2. Nano carbon tube 9 3 is mixed with viscose 9 4 before coating, and then coated. A dielectric layer 9 5 is set after the viscose is solidified. With a gate layer 9 6 and the dielectric layer 9 5 according to the array position required for display | insect engraving makes the nanostone anorexia 9 3 exposed, as shown in Figure 7 Nano carbon tube 93 is used as the emission source. The emission source made of nano carbon tube 93 can be square; the discharge is performed under the condition of low voltage 'only nano; 5 carbon tube field emission display technology is possible. However, because the carbon nanotubes 9 3 are mixed with viscose 9 4 before being coated with 1246103 before coating, the carbon nanotubes 9 3 are mostly staggered or tilted, and most of the carbon nanotubes are stacked. The carbon nanotubes 9 3 are all covered with adhesive 9 4, or they are lying flat and adhere to the surface of the conductive layer 92. This will cause the exposed portion of the carbon nanotubes 9 3 to be very short and shallow. The carbon nanotubes 9 3 are all covered in the adhesive 9 4, and the material of the general adhesive is low-melting glass adhesive, which is an insulating material, so some of the carbon nanotubes 9 3 cannot be used. Directly contacting the conductive layer 92, this part becomes an invalid field emission source, which affects the efficiency of its emission. Furthermore, because the exposed length of the carbon tube cannot be accurately controlled, the field emission uniformity is not good, which makes this method The uniformity of the field emission display cannot exceed 50%, so the aforementioned carbon nanotube field emission display technology still needs to be improved. [Summary of the Invention] The main object of the present invention is to solve the above problems and provide a nano carbon tube substrate structure and a manufacturing method thereof, which are mainly provided in the nano carbon tube layer or the conductive layer with a plurality of particle sizes smaller than the nano carbon tube. The supporting particles enable the carbon nanotubes to stand out from the surface of the carbon nanotube layer by standing against the supporting particles, and the protruding carbon nanotubes can be used as effective field emission sources. In order to achieve the effect of improving the efficiency of emitting electrons. A secondary object of the present invention is that a nano carbon tube layer is doped with a plurality of conductive particles, so that the electrical connection between the nano carbon tube and the conductive layer can be achieved, and the connection opportunity between the carbon tube and the conductive layer can be increased. 1246103 In order to achieve the aforementioned object, the method for manufacturing a nano carbon tube substrate of the present invention includes the following steps: a. Setting a conductive layer: setting a conductive layer on a substrate; b. Setting a nano carbon tube layer: on the conductive layer A nano tube blocking layer is provided. The nano carbon tube layer has most nano carbon tubes and most supporting particles with a particle diameter smaller than the length of the nano carbon tubes. The nano carbon tubes are adhered to the surface of the conductive layer with adhesive. The supporting particles and the conductive layer are adhered to each other, and the supporting carbon particles can be used to support the nano carbon tube, so that the nano carbon tube is standing and protruding; c. Sintering will be performed on the substrate after the step of setting the nano carbon tube layer is completed. Sintering makes the carbon nanotubes, supporting particles and conductive layer firmly combined. The above and other objects and advantages of the present invention can be easily understood from the detailed description and accompanying drawings of the selected embodiments below. Of course, the present invention allows some differences in the arrangement or arrangement of other parts, but the selected embodiment is described in detail in this specification and its structure is shown in the drawings. [Embodiment] Please refer to FIG. 1 to FIG. 3, which show the structure of the embodiment of the present invention, which is used for illustration only, and is not limited by these 1,246,103 structures in patent applications. The carbon nanotube substrate manufacturing method of this embodiment includes the following steps: a. Providing a conductive layer: A conductive layer 12 is provided on a substrate 11, and the conductive layer 12 is made of materials such as silver and glass. . b · Nano carbon tube layer is provided: A nano carbon tube layer 1 3 is disposed on the conductive layer 12. In this embodiment, the nano carbon tube layer 1 3 is composed of most supporting particles 1 3 1 and most straight tubes. Nano carbon tube 1 3 2 is mixed with viscose (the viscose used in this embodiment is a low-melting glass glue), and then coated on the conductive layer i 2 to form a support, and each supporting particle 1 3 The particle size of 1 is smaller than the length of the nano carbon tube 丄 3 2, and the adhesive can adhere the nano carbon tubes 1 3 2 to the conductive layer 1 3 1 and the support particles 131 and the conductive layer 丄 2 to each other, and The support particles 1 3 1 can be used to support the nano-stone anorexia 1 3 2 to make the nano carbon plumber 3 2 stand up and protrude from the surface of the nano carbon tube layer 丄 3. c · Sintering: Sintering the substrate 1 1 after the step of setting the carbon carbon tube layer is completed, so that the stone is reversed 1 2 2. The support particles 131 and the conductive layer 12 are firmly combined 0 1¾Ming_carbon carbon tube substrate application The cathode plate of a field emission display further includes the following steps: 1246103 d. Setting a dielectric layer: A dielectric layer 14 is disposed on the carbon nanotube layer 13. e. Setting the gate layer: The second dielectric layer 14 is provided with an interlayer 15 and is etched according to the required column position during display to form a large number of holes 丄 6, so that the nanometer carbon protruding from the carbon nanotube 3 Carbon tube owed 丨 + ^ source. ^ 132 is exposed in each hole 16 as a nano-carbon tube substrate structure made by the aforementioned manufacturing method, which is provided on a conductive layer 12 and a conductive layer 12 is provided on the conductive layer 12 : Stone: Guan layer 1 3 'The nano carbon tube layer 丄 3 has most of the straight tubular nano slaves 1 3 2 and most of the control particles 1 3 1 with a particle diameter smaller than the length of the nano carbon tube i 3 2, and The nano carbon tube 丄 3 2 is conductive with the adhesive; 2: the selection particles 1 3 1 are connected to the conductive layer 12, and each of the support particles 3 1 is used for each nano carbon tube 丄 3 2 'Let the carbon nanotubes u stand up and protrude from the surface of the carbon nanotube layer 1 3, and the nano carbon tube layer 13 is sequentially stacked with a -dielectric layer i 4 and a layer of-丄 5, and the ㈣ layer 14 and the gate layer 15 respectively have a hole 16 according to the array position required for display, so that the nanometer obstruction tube 2 3 2 in the position of each hole 16 is exposed as a field emission display. The field emission source of the cathode plate. Since the nano carbon tube layer 丄 3 of the present invention has most of the straight tubular nano tube 1 1 2 and most of the particles # support particles smaller than the length of the nano carbon tube 1246103 1 3 1, it is mixed in the viscose When coated on the conductive layer 丄 2, the supporting particles 1 3 1 can be used for each nano carbon tube 1 3 2 to make each of the rice stone L 132 stand up and protrude from the nano carbon tube layer. The surface, as shown in the figure, is due to the high strength of the carbon nanotube itself and it is not easy to bend due to its own weight. There is ^ and the other will be opposite to one of the conductive layers due to the supporting effect of the support, and the supporting particles are ceramics or carbon balls with a high melting point during design, which will not be due to the high temperature when sintering the adhesive. Because it is bonded to the carbon nanotubes, the support is not bonded to the carbon nanotubes in a better state. Because of this design, it can ensure that when the power plant is applied to the carbon nanotube substrate, the carbon nanotubes can Arranged with the direction of the electric field, so that the field emission characteristics increase and the height of the carbon tube will be more uniform, that is, protruding Each nano carbon tube can form a clear microtip as a valid field emission source, which can help improve the efficiency of emitting electrons. Of course, there are still many examples of the present invention, and only the details are in between. For example, in the step of setting the carbon nanotube layer in b, firstly, most of the supporting particles 1 3 1 and most of the conductive particles 1 3 3 are mixed with a small amount of viscose and then coated on the layer 12 2 to form unevenness. The surface of the shape, and then mix the nano tube 1 2 2 with viscose and apply it on the uneven surface formed by the supporting particles i 3 ′ as shown in FIG. 4 to form the aforementioned nano carbon tube layer 1 3. In this way, each supporting particle i 3 2 can be used for each carbon nanotube 丄 3 2 to make each 11 1 246 103 3 2 stand up and protrude from the surface of the nano carbon tube layer 1 3, and two: S 3 The nano carbon tube 1 3 2 and the conductive layer 12 can be electrically conductive. The example can also achieve the same as the aforementioned first embodiment :: also in a. The step of setting the conductive layer, the supporting particles 1 to 1 Blended into the conductive layer 12a to make the conductive layer concave-convex shape, 'chu [门 — 心, "shown in Figure 5, and then b. Set up a carbon nanotube At the time, most straight tubular carbon nanotubes 1 3 2 are mixed with adhesive and coated on the conductive layer 1 2 a (the carbon nanotubes can be added with an organic binder, and P; the surface). The carbon tubes 1 3 2 stand in the shape of a surface supported by a supporting particle worker 21 and protrude from the surface of the nano carbon tube layer 13 and are then sintered and bonded. In this way, not only the machine's stomach that emits ineffective field emission is reduced, but most of the carbon tubes are placed on the surface, which reduces the uneven length caused by the embedding of carbon two, and it can also achieve the same as the first embodiment. efficacy. The disclosure of the above-mentioned embodiments is used to illustrate the present invention, and is not intended to limit the present invention. Therefore, any change in numerical values or replacement of equivalent components should still belong to the scope of the present invention. From the above detailed explanation, those skilled in the art can understand that the present invention can indeed achieve the stated purpose, and it has actually met the provisions of the Patent Law, and issued a patent application. 12 1246103 [Schematic description] Figure 1 is a block diagram of the manufacturing method of the present invention. Figure 2 is a schematic diagram of the manufacturing process of the present invention. Figure 3 is a schematic diagram of the structure of the nano carbon tube substrate of the present invention. Figure 4 Fig. 5 is a structural schematic diagram of the second embodiment of the present invention. Fig. 5 is a schematic diagram of the manufacturing process of the second embodiment of the present invention: Fig. 6 is a schematic diagram of the basic structure of a conventional field emission display. Fig. 7 is a nano carbon tube field used in 3. Schematic diagram of emission display (conventional part) Anode plate 8 1 Vacuum sealing area 8 3 Gate 8 5 Conductive layer 9 2 Adhesive 9 4 Gate layer g 6 (part of the present invention) Substrate 1 1 Nano carbon tube layer 1 3 1 Nano carbon tube 1 3 2 > M electric layer 1 4 Cathode plate 8 2 Emission source 8 4 Cathode plate 9 1 Nano carbon tube 9 3 Dielectric layer 9 5 Conductive layer 1 2, 1 2 Support particles 131 Conductive Particle 1 3 3 Gate layer 1 5 1 246 103 Hole 1 6 14