1244407 玖、發明說明： I：發明戶斤屬之技術領域3 發明領域 本發明係有關於一種適用於去除附著於固體表面之異 5 物之精密研磨用清潔帶。 I：先前技術3 發明背景 在玻璃、金屬、塑膠等固體表面，特別是在薄膜電晶 體-液晶元件(TFT-LCD)、電漿顯示面板(DPD)、場發射元件 10 (FED)等顯示器用平面玻璃表面，一旦附著有灰塵、金屬、 無機物、有機物等異物，則像光折射率及透光度等光學特 性會劣化，並造成產品不良，而使成本提高，故以往是藉 各式各樣的清潔法進行去除上述異物之作業。 以往，主要在使金屬切刀的刃與固體表面接觸的狀態 15 下，沿著前述固體表面移動前述切刀，去除附著於前述固 體表面之異物。又，前述異物為有機化合物時，可藉由將 水或溶劑（例如··醇類、矽酮系化合物）附著於以海綿或極細 絲製織之纖維並進行擦拭作業，以去除異物。 最近，從上述方法更進一步發展，有人提出一種以研 20 磨粒子部分地塗佈於發泡體片狀表面而獲得之清潔片（參 照韓國專利公開公報第2003-30813號、第1圖）。又，使用該 清潔片去除附著於固體表面之異物的過程（步驟）係顯示於 第lb圖。由第lb圖可清楚地知道，在進行清潔作業之際， 附著於固體表面100的異物101會先附著於發泡體片50的研 1244407 "9 〇後在研磨材層30與固體表面loo之間滑動，同時 收术於研磨材未塗佈之發泡體片的空隙“間。但是，依據 4方去’會有因所去除之異物滑動而在固體表面產生刮痕 虞且異物去除效率不高，尤其是在用以去除有機化合 物方面成必須反覆進行多次清潔程序之問題。 又，韓國專利第366，_號揭示有-種在植***上的植 毛上塗佈研磨材層之研磨片，但此研磨片由於其植毛是並 J ;直線上’故無法持續保持所收集的異物，且由於該 異物所造成的刮痕產生率很高，因而會產生無法適用於如 10顯示器用平面玻璃之要求高精密度之製品使用等問題。 【專利文獻1】韓國專利公開公報第2003-3〇813號 【專利文獻2】韓國專利第366,9〇6號 L 明内3 發明欲解決課題 15 因此，本發明之目的係提供一種精密研磨用清潔帶， 該清潔帶藉由含有輪狀纖維基材層，因而不會在如LCD、 PDP'FED等顯示器用玻璃的固體表面發生刮痕，並可有效 率地去除附著於固體表面的異物。 欲解決課題之手段 20 為達成前述目的，在本發明中提供一種清潔帶，該清 潔帶包含有：在單面紗圈突出之纖維基材層；塗佈於前述 紗圈之研磨材層；及與前述纖維基材層之另一面結合之薄 膜層。 發明效果 12444071244407 (1) Description of the invention: I: Technical field of the inventors 3 Field of the invention The present invention relates to a precision abrasive cleaning tape suitable for removing foreign matter attached to a solid surface. I: Prior art 3 Background of the invention On solid surfaces such as glass, metal, plastic, etc., especially for displays such as thin film transistors-liquid crystal elements (TFT-LCD), plasma display panels (DPD), field emission elements 10 (FED), etc. Once foreign matter such as dust, metal, inorganic matter, organic matter adheres to the surface of flat glass, the optical characteristics such as light refractive index and light transmittance will be deteriorated, which will cause product failure and increase the cost. The cleaning method performs the operation of removing the above-mentioned foreign matter. Conventionally, in a state where the edge of a metal cutter is in contact with a solid surface, 15 the cutter is moved along the solid surface to remove foreign matter adhering to the surface of the solid. When the foreign matter is an organic compound, the foreign matter can be removed by attaching water or a solvent (for example, an alcohol, a silicone compound) to a fiber woven with a sponge or an ultra-thin filament, and performing a wiping operation. Recently, from the above method, a cleaning sheet obtained by partially coating abrasive particles on a foamed sheet surface has been proposed (see Korean Patent Publication No. 2003-30813, Fig. 1). The process (step) of removing foreign matter adhering to a solid surface using the cleaning sheet is shown in FIG. 1b. As can be clearly seen from FIG. 1b, during the cleaning operation, the foreign matter 101 adhering to the solid surface 100 will first attach to the foam sheet 50 and the research 1244407 " 90, and then the abrasive material layer 30 and the solid surface loo Sliding between them, and closing the gap between the uncoated foam sheet of the abrasive material. However, according to the four methods, there will be scratches on the solid surface due to the sliding of the removed foreign matter, and the foreign matter removal efficiency It is not high, especially the problem that it is necessary to repeatedly perform multiple cleaning procedures in order to remove organic compounds. In addition, Korean Patent No. 366, _ discloses an abrasive sheet in which an abrasive material layer is coated on the implanted hair on the implanted hair. However, because the implanted hair of this abrasive sheet is parallel; it cannot keep the collected foreign matter on a straight line, and the scratch generation rate caused by the foreign matter is very high, so it will be unsuitable for flat glass such as 10 displays. The use of high-precision products is required. [Patent Document 1] Korean Patent Laid-Open Publication No. 2003-3〇813 [Patent Document 2] Korean Patent No. 366,90.6 L Ming Nai 3 The problem to be solved by the invention 1 5 Therefore, an object of the present invention is to provide a cleaning tape for precision polishing, which contains a wheel-like fiber substrate layer, so that no scratches occur on the solid surface of display glass such as LCD, PDP'FED, etc. The foreign matter adhering to the solid surface can be efficiently removed. Means 20 to solve the problem In order to achieve the foregoing object, the present invention provides a cleaning tape, the cleaning tape comprising: a fibrous base material layer protruding from a single-sided loop; An abrasive material layer applied on the aforementioned loop; and a film layer combined with the other side of the aforementioned fiber base material layer. Effect of the Invention 1244407
右使用本發明之清潔帶’則不會在LCD、PDP、FED ^、、示的用目體表面產生刮痕等，可完全不損害固體表面 且有效率地去除附著於固體表面的異物(灰塵、金屬、無機 物、有機物等）。 【貧施^方式】 貫施發明之最佳形態 以下，更詳細地說明本發明。 本舍明之β潔帶的截面構造係顯示於第2圖。 如第2圖所不，本發明之清潔帶具有依序積層輪狀纖維 基材20之構造，且該纖維基材2〇係由薄膜層4〇 ;接著劑層 35,及由在早面（外部露出面）設有塗佈研磨材層3 〇之紗圈μ 的織物或編物層21構成。 本發明之輪狀纖維基材層20係由塗佈有研磨材層3〇且 在單面具有多數尺寸不規則的紗圈22之織物或編物層21構 15 成，且織物或編物層21，亦可使用聚對苯二甲酸乙二醇醋 (PET)、尼龍、聚丙烯(ΡΡ)、聚乙烯(ΡΕ)、100%純棉及其混 合物。織物可以毛巾製織方式製造，編物可以使用翠可特 (tricot)經編機、拉舍爾（raschelle)經編機、環編機等一般方 法獲得。 20 前述紗圈22係形成粗細度5〜100丹尼，最好是具有 20〜50丹尼之細絲直徑0.3〜3mm之輪狀，且每一纖維基材層 的單位面積中（lcm2)含有500〜12,000個，最好是含有 5,000〜1〇,〇〇0 個。 前述研磨材層30，係將混合有研磨材、接著劑、分散 1244407 劑、界面活性劑、顏料及溶劑等研磨材組成物，藉一般的 喷霧法(spray)或網目輥塗法(mesh r〇U coating)塗佈於紗圈 22後，再藉乾燥形成，且以20〜l〇〇g/m2的量塗佈為佳。如 此之研磨材層的塗佈，亦可在紗圈的全部或部分及/或在纖 5維基材的全面或一部分塗佈成扁平形態或圓點（dot)形態 (例如：四角形）。 研磨材成分，可使用二氧化矽（Si〇2)、氧化鋁(Al2〇3)、 石反化石夕（SiC)、二氧化鍅(AZ)、氧化鉻(cr〇2)、CBN(立方氮 化硼）、金剛石、氧化鈽(Ce〇3)及其混合物，且以具有平均 1〇粒徑為〇·3〜8〇μιη，最好是之研磨材。研磨材粒徑亦 可依用途適當地選擇，但由於平均粒徑小於〇 3(1111時，對於 去除異物是沒有效率的，故必須反覆進行多次清潔步驟， 但若平均粒徑大於80μιη，則有在固體表面產生刮痕之虞。 研磨材所混合之接著劑，可使用聚胺酯樹脂、環氧樹 月曰一 ♦氰胺树朐、尿素樹脂、聚酯樹脂及其混合物，且 、使用刀子畺為7萬〜12萬之聚胺醋樹脂為佳。又，構成研 磨材組成物之其他成分，即，亦可使用分散劑、界面活性 劑、顏料及溶劑等一般產品。 另外為了更有效率地去除異物，雖可對紗圈22或研 2〇磨材層30賦予導電性，但，具體而言，可以碳纖維形成紗 ^ 2或在研磨材層組成物添加導電性碳黑、石墨、微米 早位的金屬粉末、如導電性無機物及導電性有機物之導電 性物質。此時，電阻值必須在5百萬歐姆(μω)以下。 本t明之薄膜層40係擔任補強輪狀纖維基材層2〇的重 1244407 要任務，亦可由例如··厚度25〜75μπι的聚對笨二甲酸乙二 醇酉曰、聚丙烯或聚酯膜形成。 在薄膜層40上塗佈接著劑形成接著劑層35後，使其與 輪狀纖維基材2〇織物或編物層21的平面結合，並視其所 而’错由在20〜6(TC下熟成固化，製造本發明之清潔帶。薄 膜層40與輪狀纖維基材20的織物或編物層21的黏合成布所 使用之接著劑，亦可混合使用聚胺酯樹脂、環氧樹脂、聚 酯樹脂及其混合物。 將如上述方法所製造之本發明清潔帶，藉由例如：使 1〇用清潔機械接觸頭或墊與欲作為清潔帶之固體表面接觸 後’可藉由施加0 5〜2kgf/cm2的壓力同時使之水平移動，從 固體表面去除異物。此時，只要供給水、洗淨液或水與乙 醇的混合液至固體表面等，即可在濕式條件下更有效率地 去除異物。 15 使用本發明之清潔帶去除附著於固體表面之異物之過 程（步驟)係顯示於第3圖。由第3圖可清楚地知道，在進行清 潔作業之際，附著於固體表面1〇〇的異物101會快速地移動 至纖維基材層20為不規則形成之輪22的内側空間中。此 時’由於暫時脫離固體表面1〇〇的異物l〇la，不會經過滑動 2〇過程’而是快速地移動至以不規則尺寸所形成之輪22的空 隙中’因而幾乎不會因業已去除之異物而對固體表面造成 刮痕。 如此—來，本發明清潔帶由於完全不損害LCD、PDP、 FED等顯示器用固體表面，且與固體表面的附著性也非常 1244407 優異，故可有效率地去除附著於固體表面的異物(灰塵、金 屬、無機物、有機物等）。 【貫施例】 、 猎下述貝施例更詳細地說明本發明。下述實施 5例可例不本發明，但本發明之範圍不限於此。 【實施例1】 由粗細度30丹尼之尼龍單細絲所構成且在單面具有尺 寸為0.3〜0.5mm之7,000〜7,200個/cm2輪狀之基材的另一 面，以40〜50g/m2的接著劑(MC4〇4 (未來原料社製；韓國） ίο分子量W〇,〇〇〇〜12〇,〇〇〇)，將厚度50//m的PET薄膜黏合成 布。並且將70.0〇g研磨材(White Al2〇3#l,2〇〇(Kiirait社製； 曰本）；27.00g聚胺酯接著劑(MC5〇19(未來原料社製·，韓 國）、分子量 70,000〜80,000));及 3.00g 分散劑（Disper byk-181(BYK社製）；德國）充分混合攪拌3〇分鐘後，藉由添 15加120§的水再攪拌30分鐘，以獲得黏度調整至350〜45〇cps 之研磨材組成物。在業已將PET薄膜黏合成布之基材輪上， 以40g/m2的量將前述所獲得之研磨材組成物進行喷塗後， 以110°C乾燥30分鐘，再於室溫下熟成固化3天，以製造研 磨用清潔帶。 20 【比較例1】 預備在單面具有直徑10〜60μηι晶胞構造，且在另一面 黏合成布的5〇μηιΡΕΤ薄膜且厚度為350μπι之聚胺酯發泡塑 料片（U/super film(T&C社製；韓國））。並且將70.00g研磨材 (White Al203#l，200(Kiirait社製；日本製）；26.00g聚胺酯接 10 1244407 著劑（MC114(未來原料社製；韓國）、分子量 100,000〜120,000)) ; 3.00g 分散劑（BYK-161(BYK社製；德 國）；及l.OOg防沉澱劑(BYK-410(BYK社製；德國）)混合撥 拌30分鐘後，藉由在使用前以I20g乙酸乙酯稀釋，以獲得 5 黏度調整至350〜450cps之研磨材組成物。在具有晶胞構造 胺酯發泡塑料表面上，以40g/m2的量將前述所獲得之研磨 材組成物進行網目塗佈後，以110°C乾燥30分鐘，再於室溫 下熟成固化3天，以製造研磨用清潔帶。 【比較例2】 10 使用以排列在一直線上之方式，將由粗細度30丹尼的 尼龍單絲所構成且長度為〇 · 7 m m的植毛植入不織布使之成 為15,000〜17,000個/cm2之基材，除了對此基材以5〇g/m2的 量喷塗研磨材組成物之外，均進行與實施例1相同程序，以 製造研磨用清潔帶。 15 【實施例2】 於製造研磨材組成物之際，除了更添加1〇〇g搖變劑 (thixotropic agent、德國BYK社BYK-420製品）以外，均進行 與實施例1相同程序，以製造研磨用清潔帶。 [實施例3】 20 於製造研磨材組成物之際，除了使用60.〇〇g研磨材、 37.43g聚胺醋接著劑、2.57g分散劑、及i00g水的量之外， 均進行與實施例1相同程序’以製造研磨用清潔帶。 【實驗例】：研磨時間及刮痕發生率 為了進行從前述實施例1〜3與比較例1及2所獲得之研 1244407 磨用清潔帶的研磨能力試驗，將各個清潔帶安裝於清潔機 械後(德國FESTOOL社的ES150/30EQ製品），並在塗佈油性 奇異筆後’藉由切斷使沾有在切斷過程中產生的玻璃粉之 TFT-LCD玻璃板與前述清潔帶接觸，並同時施加〇 5kg/cm2 5的壓力使之水平移動。將其結果作成研磨時間及刮痕發生 率顯示於下述第1表。 【第1表】 試驗項目 實施例1 實施例2 實施例3 比較例1 比較例2 研磨時間 (對面積 100cm2去除 異物的 時間） (單位：秒） 45〜48 47 〜55 50 〜55 50 〜55 55 〜60 到痕產生 個數 1〜2 1〜2 由前述第1表可清楚地知道，在使用本發明之研磨用清 10潔帶的情形下，完全不會在TFT-LCD玻璃板的表面上發生 刮痕’尤其是在實施例1中，對於一定面積的研磨力最優 異。相反地，相較於實施例1，比較例1及2不僅研磨力差， 而且會在TFT-LCD玻璃板的表面上發生刮痕。 【圖式簡單說明】 15 弟1 a及1 b圖係顯不各種以往清潔片的概略戴面圖及分 別使用該清潔片去除附著於固體表面之異物的過程（步驟 第2圖係顯示本發明之清潔帶的概略截面圖。 第3圖係顯示使用本發明之清潔帶去除附著於固體表 面之異物之過程（步驟）圖。 12 1244407 【圖式之主要元件代表符號表】 20.. .輪狀纖維基材層 21.. .織物或編物層 22.. .紗圈 30.. .研磨材層 35.. .接著劑層 40.. .薄膜層 50.. .發泡體片 51.. .發泡體片空隙 100…固體表面 101.. .附著於固體表面之異物 101a…業已收集之異物 13The right use of the cleaning tape of the present invention will not cause scratches on the surface of the LCD, PDP, FED, and other objects, and can effectively remove foreign matter (dust attached to the solid surface without damaging the solid surface). , Metal, inorganic, organic, etc.). [Poor application method] The best mode of the present invention will be described in more detail below. The cross-sectional structure of the beta cleaning tape of Ben Sheming is shown in FIG. 2. As shown in FIG. 2, the cleaning tape of the present invention has a structure in which laminated fibrous substrates 20 are sequentially laminated, and the fibrous substrate 20 is composed of a film layer 40; an adhesive layer 35; and The externally exposed surface) is composed of a fabric or knitting layer 21 coated with a loop material μ coated with the abrasive material layer 30. The wheel-shaped fibrous substrate layer 20 of the present invention is composed of a fabric or knitted fabric layer 21 coated with an abrasive material layer 30 and having a plurality of loops 22 with irregular sizes on one side, and the fabric or knitted fabric layer 21, Polyethylene terephthalate (PET), nylon, polypropylene (PP), polyethylene (PE), 100% cotton, and mixtures thereof can also be used. The fabric can be manufactured by towel weaving, and the knitted fabric can be obtained by a general method such as a tricot warp knitting machine, a raschelle warp knitting machine, or a ring knitting machine. 20 The aforementioned yarn loop 22 is formed into a wheel shape with a thickness of 5 to 100 denier, preferably having a filament diameter of 0.3 to 3 mm with a diameter of 20 to 50 denier, and the unit area (lcm2) of each fiber base layer contains 500 to 12,000, preferably 5,000 to 10,000. The abrasive material layer 30 is a mixture of abrasive materials such as abrasive materials, adhesives, 1244407 agents, surfactants, pigments, and solvents, and is sprayed or mesh-coated (mesh r). (〇U coating) is applied to the loop 22, and then formed by drying, and it is preferably applied at an amount of 20 to 100 g / m2. In this way, the abrasive material layer can be applied in a flat shape or a dot shape (for example, a quadrangular shape) on the whole or part of the yarn loop and / or on the whole or a part of the 5-dimensional base material of the fiber. Abrasive material composition can use silicon dioxide (SiO2), aluminum oxide (Al203), stone inverse fossil (SiC), hafnium dioxide (AZ), chromium oxide (crO2), CBN (cubic nitrogen) Boron), diamond, hafnium oxide (CeO3), and mixtures thereof, and abrasives having an average 10 particle size of 0.3 to 80 μm are preferred. The particle size of the abrasive can also be appropriately selected according to the application. However, since the average particle size is less than 0.33 (1111, it is not efficient for removing foreign matter, it must be repeatedly cleaned multiple times. However, if the average particle size is greater than 80 μιη, then There may be scratches on the solid surface. For the adhesive mixed with the abrasive material, polyurethane resin, epoxy resin, cyanamide resin, urea resin, polyester resin, and mixtures thereof can be used. Polyurethane resin is preferably 70,000 to 120,000. In addition, other components constituting the abrasive material composition, that is, general products such as dispersant, surfactant, pigment, and solvent can also be used. In addition, in order to be more efficient Although foreign matter can be removed, conductivity can be imparted to the loop 22 or the abrasive material layer 30, but specifically, carbon fiber can be used to form the yarn ^ 2 or conductive carbon black, graphite, or micron can be added to the abrasive material layer composition. Metal powder, such as conductive inorganic and conductive organic conductive materials. At this time, the resistance value must be less than 5 million ohms (μω). The thin film layer 40 of this specification is used to reinforce the wheel fiber The weight of the material layer 20 is 1244407. According to the task, it can also be formed by, for example, a thickness of 25 to 75 μm polyethylene terephthalate, polypropylene, or polyester film. The adhesive is formed on the film layer 40 to form an adhesive. After the agent layer 35, it is combined with the plane of the wheel-shaped fibrous base material 20 fabric or the knitted fabric layer 21, and depending on the situation, it is cured by curing at 20-6 ° C to produce the cleaning tape of the present invention. The adhesive used for the bonding of the layer 40 and the fabric of the fibrous base material 20 or the knitting layer 21 can also be used in combination with polyurethane resin, epoxy resin, polyester resin, and mixtures thereof. The cleaning tape of the present invention can be moved horizontally from a solid state by applying a pressure of 0 5 to 2 kgf / cm2 after contacting a solid surface to be used as a cleaning tape with a cleaning mechanical contact or pad. Foreign matter is removed from the surface. At this time, as long as water, washing liquid or a mixture of water and ethanol is supplied to the solid surface, foreign matter can be removed more efficiently under wet conditions. 15 Use the cleaning tape of the present invention to remove adhesion to Foreign body on solid surface The process (step) is shown in Fig. 3. It is clear from Fig. 3 that during the cleaning operation, the foreign matter 101 attached to the solid surface 100 will quickly move to the fibrous base material layer 20 to be irregular. In the inner space of the formed wheel 22. At this time 'because the foreign matter 10la temporarily separated from the solid surface 100a, it will not go through the sliding 20 process', but quickly moves to the wheel 22 formed in an irregular size. In the gap, there is almost no scratch on the solid surface due to the foreign matter that has been removed. In this way, since the cleaning tape of the present invention does not damage the solid surface of the display such as LCD, PDP, FED, etc., and its adhesion to the solid surface It is also very good at 1244407, so it can effectively remove foreign matter (dust, metal, inorganic, organic, etc.) attached to the solid surface. [Examples] The following examples will be described in more detail to illustrate the present invention. The following five examples are examples of the present invention, but the scope of the present invention is not limited thereto. [Example 1] The other side is composed of a nylon monofilament with a thickness of 30 denier and has 7,000 to 7,200 pieces / cm2 of a wheel-shaped base material having a size of 0.3 to 0.5 mm on one side, with a thickness of 40 to 50 g / m2 adhesive (MC4104 (manufactured by Tomorrow Materials Co., Ltd .; Korea), molecular weight 500,000 ~ 120,000), and a PET film having a thickness of 50 // m is bonded to a cloth. In addition, 70,000 g of abrasive (White Al2 03 # 1, 2000 (manufactured by Kiirait Co., Ltd.); 27.00 g of polyurethane adhesive (MC5019 (manufactured by Future Materials Co., Korea); molecular weight 70,000 to 80,000 )); And 3.00g of dispersant (Disper byk-181 (by BYK); Germany) After fully mixing and stirring for 30 minutes, add 15 plus 120§ of water and stir for 30 minutes to obtain a viscosity adjustment of 350 ~ 45 cps abrasive material composition. On the substrate wheel on which the PET film has been bonded to the cloth, the abrasive material composition obtained above is sprayed at an amount of 40 g / m2, dried at 110 ° C for 30 minutes, and then cured and cured at room temperature. 3 Days to make abrasive cleaning tapes. 20 [Comparative Example 1] A polyurethane foamed plastic sheet (U / super film (T & C) with a thickness of 350 μm and a 50 μm PET film with a cloth on the other side and a synthetic cloth adhered on the other side was prepared. Social system; South Korea)). And 70.00g of abrasive material (White Al203 # 1, 200 (made by Kiirait; made in Japan); 26.00g of polyurethane connected with 10 1244407 adhesive (MC114 (made by Future Materials Co .; Korea), molecular weight 100,000 ~ 120,000)); 3.00g Dispersant (BYK-161 (manufactured by BYK; Germany); and 1,000 g of anti-settling agent (BYK-410 (by BYK; Germany)) mixed and stirred for 30 minutes. Dilute to obtain a grinding material composition with a viscosity adjusted to 350 to 450 cps. On the surface of the amine ester foamed plastic with a cell structure, the obtained grinding material composition is mesh-coated in an amount of 40 g / m2. , And dried at 110 ° C for 30 minutes, and then cured and cured at room temperature for 3 days to produce a cleaning tape for polishing. [Comparative Example 2] 10 Using a method of aligning in a line, a nylon sheet with a thickness of 30 denier A hair implant made of silk with a length of 0.7 mm is implanted into a non-woven fabric to make it a substrate of 15,000 to 17,000 pieces / cm2, except that the abrasive material composition is sprayed on the substrate in an amount of 50 g / m2. The same procedure as in Example 1 was carried out to produce a polishing tape for polishing. Example 2 In the manufacture of the abrasive material composition, except that 100 g of a shaker (thixotropic agent, BYK-420, a German BYK company) was added, the same procedure as in Example 1 was performed to manufacture abrasive materials. [Example 3] 20 In the production of the abrasive material composition, except for using 60.000 g of abrasive material, 37.43 g of polyurethane adhesive, 2.57 g of dispersant, and 100 g of water, all The same procedure as in Example 1 was performed to produce a polishing tape for cleaning. [Experimental Example]: The polishing time and the scratch generation rate were obtained from the above-mentioned Examples 1 to 3 and Comparative Examples 1 and 2 to perform the grinding cleaning of 1244407. After testing the abrasive ability of the belt, install each cleaning belt on a cleaning machine (ES150 / 30EQ product of FESTOOL, Germany), and apply the oily singular pen to the glass produced by the cutting process by cutting. The TFT-LCD glass plate of the powder was brought into contact with the aforementioned cleaning tape, and simultaneously moved by applying a pressure of 0.05 kg / cm 2 5. The results are shown in Table 1 below as the grinding time and the occurrence rate of scratches. [第 1 Table] Implementation of Test Project Example 1 2 Example 3 Comparative Example 1 Comparative Example 2 Grinding time (time to remove foreign matter for an area of 100 cm2) (unit: second) 45 to 48 47 to 55 50 to 55 50 to 55 55 to 60 Number of marks 1 to 2 1 ~ 2 It is clear from the above-mentioned Table 1 that, when the cleaning tape 10 for polishing of the present invention is used, no scratches will occur on the surface of the TFT-LCD glass plate, especially in Example 1. , The best grinding power for a certain area. In contrast, compared to Example 1, Comparative Examples 1 and 2 not only have poor polishing power, but also scratches on the surface of the TFT-LCD glass plate. [Schematic description] Figures 1a and 1b are schematic diagrams of various conventional cleaning pads and the processes of removing foreign matter attached to a solid surface using the cleaning pads respectively (step 2 shows the present invention A schematic cross-sectional view of the cleaning tape. Figure 3 is a diagram showing the process (step) of removing foreign matter attached to a solid surface using the cleaning tape of the present invention. Fibrous base material layer 21. Fabric or knitting layer 22. Loops 30. Abrasive material layer 35. Adhesive layer 40 .. Film layer 50 .. Foam sheet 51 .. .Foam sheet gap 100 ... Solid surface 101 .. Foreign matter 101a attached to the solid surface ... Foreign matter already collected 13