TW480536B - Flat panel color illuminator having vacuum nanotube emitter and the manufacturing method thereof - Google Patents
Flat panel color illuminator having vacuum nanotube emitter and the manufacturing method thereof Download PDFInfo
- Publication number
- TW480536B TW480536B TW89126713A TW89126713A TW480536B TW 480536 B TW480536 B TW 480536B TW 89126713 A TW89126713 A TW 89126713A TW 89126713 A TW89126713 A TW 89126713A TW 480536 B TW480536 B TW 480536B
- Authority
- TW
- Taiwan
- Prior art keywords
- emitter
- field emission
- item
- layer
- color
- Prior art date
Links
Abstract
Description
480536 五、發明說明（1) 5 - 1發明領域： 本發明係有關於一種用以一平面面板顯示器的平面彩 色照射器，特別是有關於一平面式彩色照射器其利用彎曲 型式排列之奈米管的場發射光源，做為液晶顯示器（LCD) 的照度或是其他平面面板顯示器及其製造方法。 5 - 2發明背景： 0 在液晶顯不面板（L C D)的結構中’因為液晶本身不會 發光，必須使用一種照射的方法。當可以看液晶顯示器的 光線不充足時，照明是很重要的。為了製造大型的液晶顯 示器面板以及特殊的彩色液晶顯示器面板，一個高效率的 光源須做為照射使用，這是為了達到面板的厚度小、重量 較輕以及低功率消耗量。對於在手提式液晶顯示器的應用 上，能得到電池再充電之間得到一較長的電池壽命，能夠 達成在低功率消耗量上對於高亮度而言是基本的。最近幾 年，在製造液晶顯示器的其他部份的改善，如，彩色濾光 器陣列，薄膜電晶體及其他功能加強層，降低了液晶顯示 4 器面板的整體透明度。因此，任何可以在亮度與功率比上 得到的改善，必須從面板背光源的改善而得到。 於平面面板顯示器，在傳統的背光源技術上，陰極發480536 V. Description of the invention (1) 5-1 Field of the invention: The present invention relates to a flat color illuminator for a flat panel display, and more particularly to a flat color illuminator which uses a curved arrangement of nanometers. The field emission light source of the tube is used as the illuminance of liquid crystal display (LCD) or other flat panel display and its manufacturing method. 5-2 Background of the Invention: 0 In the structure of a liquid crystal display panel (LCD), because the liquid crystal itself does not emit light, an irradiation method must be used. Illumination is important when there is insufficient light to see the LCD display. In order to manufacture large-scale liquid crystal display panels and special color liquid crystal display panels, a high-efficiency light source must be used for irradiation. This is to achieve a small panel thickness, light weight, and low power consumption. For the application of portable liquid crystal displays, a longer battery life can be obtained between battery recharging, and it can be achieved that low power consumption is essential for high brightness. In recent years, improvements in the manufacture of other parts of liquid crystal displays, such as color filter arrays, thin-film transistors, and other functional enhancement layers, have reduced the overall transparency of liquid crystal display panels. Therefore, any improvement that can be achieved in the ratio of brightness to power must be obtained from the improvement of the backlight of the panel. For flat panel displays, in traditional backlight technology,
第4頁 480536 五、發明說明（2) 光照射器是用來照明平面面板顯示器。陰極發光照射器有 高度發光效率的優點，使用壽命長，以及重量輕且為耐用 的結構。照射器通常是成對著安裝在一顯示器控制面板的 側邊，例如，一筆記型電腦上的顯示器面板，具有一燈管 的安排是用以產生均勻性的光源以橫越過一擴散器螢幕。 最近，在背光源的改進，包含一平面發光背光源以及一楔 形燈管，此燈管分佈光源從單一電子管均勻地覆蓋在整個 顯示器表面。楔型結構允許一單一照射器照亮整個液晶顯 示器面板。一塑膠模燈管包含分光鏡反射器可以幫助光源 通過在元件的前平面而均勻地的散佈。 4 平面發光照射器在最近也發展出可以直接照射一顯示 器面板。一平面發光照射器元件的典型結構量測厚度只有 3毫米。藉由利用傳統的冷陰極技術可以使得面板的大小 由對角線長度排列是約在2 5毫米與3 5 0毫米之間，照射器 燈罩可利用平板與一平坦薄片所組成。例如，一典型的照 射器可以藉著在每一個尾端都有一個電極的四個間隔彎曲 引道所組成。典型的平面發光照射器的設計包含在頂部及 底部平板塗佈磷，而反射塗佈只在底部的平板上。操作一 平面光燈管通常須要大約1 k伏特與3 k伏特（與面板大小以⑩ 及陰極形式有關）之間的高電壓。 對於一彩色液晶顯示器元件而言，彩色濾光器利用三 原色，紅，綠及藍色。對於彩色濾光器的製造程序包含數Page 4 480536 V. Description of the invention (2) The light irradiator is used to illuminate the flat panel display. Cathode luminous irradiators have the advantages of high luminous efficiency, long service life, and light weight and durable structure. The illuminator is usually mounted on the side of a display control panel in pairs, for example, a display panel on a laptop computer, with a light tube arranged to generate a uniform light source across a diffuser screen. Recently, improvements in backlights include a flat light-emitting backlight and a wedge-shaped tube. The tube distributes light from a single tube to cover the entire display surface uniformly. The wedge-shaped structure allows a single illuminator to illuminate the entire LCD panel. A plastic mold tube contains a spectroscope reflector to help spread the light evenly across the front plane of the component. 4 Flat-lighting illuminators have also recently been developed that can directly illuminate a display panel. The thickness of a typical structure of a planar illuminator is only 3 mm. By using the traditional cold cathode technology, the size of the panel can be arranged by the diagonal length between about 25 mm and 350 mm. The illuminator can be made of flat plate and a flat sheet. For example, a typical illuminator can be composed of four spaced-apart curved channels with an electrode at each end. The design of a typical planar luminous irradiator involves coating phosphorous on the top and bottom plates, while reflection coating is only on the bottom plate. Operating a flat light tube usually requires a high voltage between approximately 1 kV and 3 kV (depending on the panel size in ⑩ and cathode form). For a color liquid crystal display element, the color filter uses three primary colors, red, green, and blue. The manufacturing procedure for color filters contains several
480536 五、發明說明（3) 個步驟如化學氣相沉積，絕緣層與金屬的旋轉塗佈以及平 坦化與定位膜塗佈。藉由複雜的製程步驟，彩色濾光器可 以在玻璃底材上形成，其步驟包含玻璃完成以及前底材與 後底材的製備，拋光與重疊製程，底材的清洗及清潔，塗 佈，烘烤熱處理以及其它必需在底材上完成的步驟。 對於形成三原色的要素，形成彩色濾光器須要反覆的 製程來完成。在彩色要素的中間，與黑色邊界或是一黑色 矩陣須要提供做為必要的對比顏色。為了製備彩色濾光器 ，只要適用於光吸收彩色濾光材料。例如，藉由利用最基 本的印刷設備以及標準的光阻材料，可以沉積一凝膠以及 在連續的光學微影製程中染色。可以利用一種顏料分散的 方法，以消除凝膠層以及具有高溫穩定性。對於形成彩色 濾光器的其它方法包含電沉積以及印刷。 第一圖表示一傳統的彩色過濾元件11 0至少包含三原 色濾光器，例如，紅色濾光器11 2，綠色濾光器1 1 4以及藍 色濾光器11 6。一白色光源1 2 0是做為像素11 0背光所用。 在傳統的彩色濾光器/背光源排列中，一單一像數佔用一 大面積，在一液晶顯示器面板上的解析度是很差的。 在其它的傳統彩色濾光器/背光源元件1 2 2，如第一 B 圖所示，當一白色背光源使用時，一單一像素利用一白色 背光源佔據在相同的面積，排列三的像素對每一個像數而480536 5. Description of the invention (3) Steps such as chemical vapor deposition, spin coating of insulating layer and metal, and flattening and positioning film coating. Through complex process steps, color filters can be formed on glass substrates. The steps include glass completion and preparation of front and back substrates, polishing and overlapping processes, substrate cleaning and cleaning, and coating. Baking heat treatment and other steps that must be completed on the substrate. For the elements forming the three primary colors, the process of forming a color filter needs to be repeated. In the middle of the colored elements, a border with black or a black matrix must be provided as a necessary contrast color. In order to prepare a color filter, as long as it is suitable for a light absorbing color filter material. For example, by using the most basic printing equipment and standard photoresist materials, a gel can be deposited and dyed in a continuous optical lithography process. A pigment dispersion method can be used to eliminate the gel layer and have high temperature stability. Other methods for forming a color filter include electrodeposition and printing. The first figure shows that a conventional color filter element 110 includes at least three primary color filters, for example, a red filter 112, a green filter 1114, and a blue filter 116. A white light source 120 is used as the backlight of the pixel 110. In a conventional color filter / backlight arrangement, a single image occupies a large area, and the resolution on a liquid crystal display panel is poor. In other traditional color filters / backlight elements 1 2 2, as shown in the first figure B, when a white backlight is used, a single pixel occupies the same area with a white backlight, and three pixels are arranged. For each image
第6頁 480536 五、發明說明（4) 言其中每一點可以利用三個不同的光源1 2 4，1 2 6及1 2 8。 因此可能是由於降低像數尺寸而在解析度上有重大的改善 。以此排列方式的彩色濾光器，1 3 0，1 3 2以及1 3 4是必須 非常的清晰以接受由色源1 2 4， 1 2 6及1 2 8得到的彩色光源 。此種安排方式如同習知的連續式彩色顯示器。在連續式 彩色顯示器排列方式，一陰極射線管通常使用一光源，此 光源發射在數個波長的光。因此固有的光源損失是由於發 射光的極化以及液晶晶胞負荷周期所產生，對於傳送白色 光源的最大效率降低至百分之二十五。顯示器亮度在一曝 光區中，連續式彩色顯示器是最主要的考量。 _ 在最近幾年，已經發展出平面式面板顯示器元件以及 廣泛的用在電子應用上如同個人電腦一樣。其中常使用的 平面式面板顯示器元件為一主動矩陣液晶顯示器，此顯示 器已經改進解析度。然而，液晶顯示器元件具有很多内在 的限制使得液晶顯示器無法適合多種應用。例如，液晶顯 示器具有很多製造限制包括在一慢速沉積製程中塗佈一非 結晶性矽的玻璃面板，高的製造複雜性以及低產率的製造 程序。此外，液晶顯示器元件須要一發光背光源，當大部 份的產生光都被浪費時，此發光背光源可以得到很高的功〇 率。在亮度的條件下或是在寬廣的視角一液晶顯示器影像 很難去察看，而更進一步的限制在許多應用上的使用。 其他平面面板顯示器元件已經在最近幾年發展出以取Page 6 480536 V. Description of the invention (4) Each of these points can use three different light sources 1 2 4, 1 2 6 and 1 2 8. Therefore, there may be a significant improvement in resolution due to the reduction in image size. In this arrangement, the color filters 1 3 0, 1 2 2 and 1 3 4 must be very clear to accept the color light sources obtained from the color sources 1 2 4, 1 2 6 and 1 2 8. This arrangement is like the conventional continuous color display. In a continuous color display arrangement, a cathode ray tube typically uses a light source that emits light at several wavelengths. Therefore, the inherent light source loss is caused by the polarization of the emitted light and the duty cycle of the liquid crystal cell. The maximum efficiency for transmitting a white light source is reduced to 25%. The brightness of the display in an exposed area, continuous color display is the most important consideration. _ In recent years, flat panel display elements have been developed and are widely used in electronic applications like personal computers. The commonly used flat panel display element is an active matrix liquid crystal display. This display has improved resolution. However, liquid crystal display elements have many inherent limitations that make liquid crystal displays unsuitable for many applications. For example, liquid crystal displays have many manufacturing limitations including glass panels coated with amorphous silicon in a slow deposition process, high manufacturing complexity, and low yield manufacturing processes. In addition, the liquid crystal display element requires a light-emitting backlight. When most of the generated light is wasted, the light-emitting backlight can obtain a high power. Under the condition of brightness or at a wide viewing angle, a liquid crystal display image is difficult to view, and further restricts its use in many applications. Other flat panel display elements have been developed in recent years
第7頁 480536 五、發明說明（5) 代液晶顯示器面板。其中一個元件是場發射顯器元件，此 元件可以克服一些液晶顯示器的限制以及提供一重大的優 點而超過傳統的液晶顯示器元件。例如，與傳統的薄膜電 晶體（TFT )液晶顯示器面板比較，場發射顯示元件具有高 的相對比，大的視角，高的最大亮度，低消耗功率以及寬 廣的操作溫度範圍。 產率是。，題 的而功都到此問 端磷，光看因率 極的構的者，良 曰取色結有用列的 間有的所使陣器 之用雜乎由體示 器利複幾接晶顯 示器太，直電晶 顯示要示以膜液 晶顯須所可薄陣 液射不果而的矩 )#發器結，大動 D場示如的要主 F ，顯都生須及 C器射器產不以 器示發光所器源 示顯場濾器示來 顯晶。及示顯的 射液源以顯射本 發像光源射發成。 場不的光發場高除 在，身背場，要消 是本耗由此主以 異生損藉因一可 在一場發射顯示器中，電子是由陰極發射出，以及在 撞擊在磷上以塗佈在一可穿透遮蓋板的背面以產生一影像 。如一陰極發光製程為其中一種產生光的有效方法。相對 於傳統的CRT元件，每一個點數或是發射裝置在一場發射 顯示器中具有本身的電子來源。如，典型的一發射微尖的 陣列。在一陰極與一閘電極之間存在一電壓的差異，由陰 極抽出電子以及加速電子有助於在磷上的塗佈。發射電流 以及顯示器的亮度與發射材料的功函數有關。為了得到場 11Page 7 480536 V. Description of the invention (5) Generation LCD panel. One of these elements is a field emission display element, which can overcome some of the limitations of liquid crystal displays and provide a significant advantage over conventional liquid crystal display elements. For example, compared with a traditional thin film transistor (TFT) liquid crystal display panel, a field emission display element has a high relative ratio, a large viewing angle, a high maximum brightness, a low power consumption, and a wide operating temperature range. The yield is. This question and answer are all about phosphorus. Those who only look at the structure of the cause of the problem, Liang said that the use of the array is sometimes used by the array. The use of the array is mixed by the display device. The display is too, the direct crystal display must show the thin film liquid crystal display whisker can not be achieved by the thin array of liquid) # hair device knot, the large motion D field as shown in the main F, the display must be born and the C device emitter The crystals are not displayed by the source of the display field filter. And the display's cumshot source is radiated from the display source. In addition to the field emission, the field height is divided by the body's back field. If the cost is lost, the owner can use the heterogeneous loss. In a field emission display, the electrons are emitted from the cathode, and the impact on the phosphorus Coated on the back of a transparent cover to produce an image. For example, a cathode luminescence process is one of the effective methods to generate light. Compared to traditional CRT elements, each point or emitting device has its own electron source in a field emission display. For example, a typical micro-tipped array. There is a voltage difference between a cathode and a gate electrode. The extraction of electrons from the cathode and the acceleration of the electrons facilitate the coating on phosphorus. The emission current and the brightness of the display are related to the work function of the emitting material. To get field 11
第8頁 480536 五 發 常 、發明說明（6) 射顯示器所須要的效率，射力 致性非 重要。 午射極材料的潔淨度與 在場發射顯示器中為了讓 真空至低壓於10-7托爾這是為 由路徑以及防止微尖端的污染 藉由利用焦距格子以對準電子 在較早的發展對於射極陰 發射極。在此設備，一矽晶片 接著一含有金屬閘層在氧化層 圖案以形成閘開口 ，當隨後的 問的下部以及形成一井。鎳為 止錄的沉積到發射極内部。接 此具有一尖點一圓錐體在凹處 為犧牲鎳層移除時一發射極圓Page 8 480536 Five shots, description of invention (6) The efficiency and radiation consistency required for the display are not important. The cleanliness of the noon emitter material and the field emission display in order to make the vacuum to a low pressure of 10-7 Torr. This is the reason for the path and to prevent the contamination of the microtip. Emitter cathode Emitter. In this device, a silicon wafer followed by a metal gate layer is patterned on the oxide layer to form a gate opening, and subsequently a lower part is formed and a well is formed. Nickel is deposited into the emitter only for recording. Then there is a sharp point, a cone in the recess, an emitter circle when the sacrificial nickel layer is removed
電子移動，場發射顯示 了提供電子有一長的平^ 及退化。顯示器'的解析户| 由微頂端抽出來改善。X 極三利用一金屬鉬的微頂端 先氧化以產生厚的氧化矽層 上沉積。金屬製的閘層轉移 氧化矽蝕刻在開口底下切除 犧牲性材料層，沉積鎳是防 著鉑在垂直的入射角沉積如 成長直到開口上部結合。作 錐體離開。 f 一可選擇設計中’矽微尖發射體藉由實施一熱氧化 I w： ^矽上而產生以及接著利用圖案轉移一氧化層以及選 Ϊ刻以形成矽頂尖。更進一步氧化作用或是蝕刻保護 j削尖端以提供一犧牲性材料。在其他可選擇的設 If尖建立在以玻璃做為底材的上方，此玻璃多於大 φ二w，平面顯示器而言可視為一理想底材。微尖可由導 電材枓製成如同金屬或是摻雜半導體材#。對於一場發射The electrons move and the field emission shows that the electrons provided have a long flatness and degradation. Monitor's resolution | Extracted from the micro top to improve. The X pole three is oxidized first with a micro-molybdenum tip to produce a thick silicon oxide layer. Metal gate transfer Silicon oxide etching cuts the sacrificial material layer under the opening. Nickel is deposited to prevent platinum from being deposited at a vertical incident angle such as growing until the upper part of the opening is combined. Make the cone leave. f In a selectable design, the 'silicon microtip emitter is produced by performing a thermal oxidation I w: ^ on silicon and then using a pattern to transfer an oxide layer and selective engraving to form a silicon tip. Further oxidation or etching protects the sharpened tip to provide a sacrificial material. Among other optional settings, the If tip is built on top of a glass substrate. This glass is more than two φ, and can be regarded as an ideal substrate for flat displays. The microtips can be made of conductive material like metal or doped semiconductor material #. For a launch
第9頁 五、發明說明（7) ~ 〜-—________ 顯示器設備而言在此可選擇的巧 陰極與微尖之間的導電度沉積^ °曰目，一内層可以控制在 當的電阻率可以使得設備在穩〜具有高的滿意度。在適 顯示器設備的製造上，可以y 件下操作。在場發射 在非結晶矽與摻雜n+非妹曰：々非：晶性矽薄膜該電導度 ^ ^ 非阳形石夕。換雜Π+非結晶性矽Μ . 调整磷原子在薄膜中的量來#制。 7精由 一般’在場發射顯示器設備的製造，其設備中包含在 一非常低壓的凹處以致於電子的發散不會被阻止。例如， 10 - 7托爾的低壓下通常是須要的。為了阻止兩個相對大的 玻璃面板的崩潰而形成場發射顯示器設備，間隙壁必需用 於支撐以及在兩個面板之間提供適當的空間。例如，傳統 的場發射顯示器設備，玻璃球或是玻璃棒已用於維持在場 發射顯示器設備的空間。延長間隙壁也是用於此目的。 參見最初的第2 Α放大圖，一傳統的場發射顯示器設備 1 0的戴面圖。在一玻璃底材1 4上沉積一典型之非多晶性矽 基本薄膜的一光阻層而形成場發射顯示器設備1 0。介電材 料的一絕緣層1 6以及接著沉積一金屬閘層1 8以及在一起形 成以提供金屬微尖2 0以及藉由光阻層1 2覆蓋之一陰極結構 2 2以及因此，一光阻但某些導電非結晶形石夕層1 2在一冋絶 緣層1 6下方且在下方有一介電材料如二氧化石夕的形成。對 於控制#多晶形矽層1 2的光阻是非常重要以致於不能過度 的光阻，該行為如同一限制電阻器以阻止過度電流流通’5. Description of the invention on page 9 (7) ~ ~-________ For the display device, the conductivity between the optional cathode and the microtip can be deposited here. The inner layer can be controlled at a specific resistivity. Make the equipment stable and have high satisfaction. In the manufacture of suitable display equipment, it can be operated under y pieces. Field emission In amorphous silicon and doped n + Fei Mei said: 々 Fei: the conductivity of crystalline silicon thin film ^ ^ non-positive stone. Change the impurity Π + amorphous silicon M. Adjust the amount of phosphorus atoms in the film to make. The 7S is manufactured by a general 'field emission display device, which contains a very low-voltage recess so that the emission of electrons is not prevented. For example, low pressures of 10-7 Tor are usually required. In order to prevent the collapse of two relatively large glass panels to form a field emission display device, a spacer must be used to support and provide a suitable space between the two panels. For example, traditional field emission display devices, glass balls or glass rods have been used to maintain the space of field emission display devices. An extended spacer is also used for this purpose. Referring to the first enlarged view of FIG. 2A, a face view of a conventional field emission display device 10 is shown. A photoresist layer of a typical non-polycrystalline silicon base film is deposited on a glass substrate 14 to form a field emission display device 10. An insulating layer 16 of dielectric material and then a metal gate layer 18 are deposited and formed together to provide metal microtips 20 and a cathode structure 22 covered by the photoresist layer 12 and therefore, a photoresist However, some conductive amorphous stone layers 12 are formed under a stack of insulating layers 16 and a dielectric material such as stone dioxide is formed below. It is very important to control the photoresistance of #polycrystalline silicon layer 1 2 so that the photoresistance cannot be excessive. This behavior is the same as limiting the resistor to prevent excessive current flow ’
第10頁 480536 五、發明說明（8) 若微尖2 0其中之一短缺於金屬層1 8。Page 10 480536 V. Description of the invention (8) If one of the micro tips 20 is short of the metal layer 18.
在第2 B圖為一完整的場發射顯示器結構3 0，其包含陽 極2 8鑲嵌在結構3 0的頂部。值得注意的是，在簡單的理由 ，陰極層2 2與光阻層1 2對陰極而言均表示成一單一層22。 形成一微尖2 0使得散發由微尖的尖部發射電子2 6。閘電極 1 8供給一正電荷，當陽極2 8提供較高的正電荷。陽極2 8由 一玻璃平板3 6形成，該玻璃平板塗佈含磷的粒子3 2。可以 利用一間歇性銦氧化錫層（ΙΤ0) 34的導電層當電子26轟擊 含磷層時更進一步的改進含磷層的亮度。這只是第2C圖放 大後部份的表示。場發射顯示器設備的整個厚度只有大約 2毫米，隨著真空引力在底層玻璃平板1 4以及上層玻璃平 板3 6中間利用側壁面板38 (表示在第2B圖）密封。 在第2A圖至第2C圖表示當與液晶顯示器設備比較時， 藉由微尖以形成傳統的場發射顯示器設備製造改善品質的 一平板平面顯示器設備。然而，微尖場發射顯示器設備的 主要缺點為複雜的製程步驟該步驟必須用於製造設備。例 如，在設備中不同層的形成，特別是微尖的形成，須要一 薄膜沉積技術利用一光學微影方法。如同結果，執行很多 f 的光遮罩步驟是為了在場發射顯示器設備上定義以及製作 出不同的結構特徵。化學氣相沉積（CVD)製程與光學微影 製程須要大量的增加場發射顯示器設備的成本。 480536 五、發明說明（9) 同樣在審查中 Attorney’ s Dock丨 相同的受讓人，在 以利用奈米管射極 件的一種方法。在 件是由第一電子絕 陰極，此第一絕緣 材料所形成的一層 電阻層上形成一奈 極層形成一射極堆 所隔絕，一垂直在 在介電材料上頂端 形成一 極所構成 造場發射顯示器元 造成本上以及高製 用微尖要好。然而 要，如，一陰極， 的專利 s t No) 此揭露 做為電 二極管 緣平板 平板是 ，在碳 米射極 疊由附 多重性 有一閘 的一場 件是藉 造欵率 ’對於 一閘電 申請，代理人 64, 6 0 0〜〇5〇, 的是一場發射 源所製 發射顯 一電子 屬的材 ’鑽石 中陰極 極堆疊 堆疊上 以及在 示器元 膜印刷 結果比 言，三 一陽極 疋 子發射 結構場 ’在第 含有金 化材料 層，其 近的射 的射極 電極， 發射顯 由一厚 ’這個 元件而 極以及 文件序 其讓受 顯示器 造的三 一 口口一 不裔兀 絕緣平 料，在 或是類 的 的 電阻 一絕 一介 第二電 件。提 技術在 場發射 個分離 號為（ 給與本發明 設備以及藉 極管結構元 件中，此元 板上形成一 一高電阻層 鑽石材料的 層與奈米射 緣肋狀區段 電材料層， 子絕緣平板 出有利於製 相當低的製 顯示器以利 電極仍是必 5 - 3發明目的及概述：Fig. 2B shows a complete field emission display structure 30, which includes an anode 28 inlaid on top of the structure 30. It is worth noting that, for simple reasons, the cathode layer 22 and the photoresist layer 12 are both represented as a single layer 22 to the cathode. The formation of a microtip 20 causes electrons 26 to be emitted from the tip of the microtip. The gate electrode 18 supplies a positive charge, while the anode 28 provides a higher positive charge. The anode 28 is formed of a glass plate 36 which is coated with phosphorus-containing particles 32. An intermittent indium tin oxide (ITO) 34 conductive layer can be used to further improve the brightness of the phosphorus-containing layer when electrons 26 bombard the phosphorus-containing layer. This is just the enlarged part of Figure 2C. The entire thickness of the field emission display device is only about 2 millimeters, and is sealed by a side wall panel 38 (shown in FIG. 2B) between the bottom glass plate 14 and the upper glass plate 36 with vacuum gravity. Figs. 2A to 2C show a flat-panel display device of improved quality manufactured by forming a conventional field emission display device by microtips when compared with a liquid crystal display device. However, the main disadvantage of microtip field emission display devices is the complex process steps that must be used to fabricate the device. For example, the formation of different layers in a device, especially the formation of microtips, requires a thin film deposition technique using an optical lithography method. As a result, many f-masking steps are performed to define and fabricate different structural features on a field emission display device. The chemical vapor deposition (CVD) process and optical lithography process require a substantial increase in the cost of field emission display equipment. 480536 V. Description of the invention (9) Attorney ’s Dock 丨 The same assignee is also using the method of using the nano tube emitter. The element is made of a first electronic insulating cathode, a resistive layer formed by the first insulating material, a nano-electrode layer, an emitter stack, and a vertical electrode formed on top of the dielectric material. Field emission display elements are better for micro-tips as well as for high systems. However, if, for example, a cathode, the patent st No.) This disclosure, as an electric diode edge flat plate, is a field piece with a multiplier and a gate in the carbon meter emitter stack. The agent, 64,600 ~ 〇5〇, is a material produced by a field source emitting a display of an electronic material 'diamonds in the cathode electrode stacks and printed on the display element film comparison results, Trinity anode 疋The sub-emission structure field contains a layer of aluminized material, and its near-emitter emitter electrode has a thick display element and a file sequence that allows the display to be made by the display. The flat material, or a resistor of the same type, is a second electrical component. In the field emission method, a separation number is given to the device of the present invention and the structure of the borrow tube. A high-resistance diamond material layer and a nano-radiation rib-shaped electrical material layer are formed on this element board. It is still necessary to make a sub-insulating flat panel to make a relatively low-manufactured display to facilitate the electrodes. 5-3 Purpose and summary of the invention:
鑒於上述之發明背旦 照射器包括奈米射極以 傳統的平面式場發射型彩色 &供—製造彩色照射器的方法。In view of the invention described above, the illuminator includes a nanometer emitter and a conventional flat-type field emission type color & supply-method for manufacturing a color illuminator.
苐12頁 五、發明說明〜 器，=ί ΐ ί明的目的在於提供一平面式場發射#多昭如 丨丨】用示米管射極且此射極沒有 、/…射 的缺點。 何傳統彩色照射器 本發明的另一目的在於提供一 為’以利用本氺总以 > 八野發射彩色照射 的製造方法。 受m雜槭尖電子發射極 本發明的再_ g AA H Le /ti τ 、 以利用奈米管射#民+ M : e 、’面式場發射彩色照射器 |空纖維所；^❻且此射極是由具有電導性的毫微米中 本發明更進—步的目的是提供 以利用奈米管射極且此 ：面2發射彩色照 l·卡官射極的優點是由厚膜印刷技術所電子源，在此奈 本發明的接下來的目的是提供— f器，以利用奈米管射極且此射極曰2 ?式場發射彩色照 |疋鑽石材料所構成。 疋由奴以及類鑽石碳或 Ο 本發明的另一的目的θ提供一、， 平:乂利用奈米管射#，對：極電；發射彩色射器 千板上以一彎曲的形式形成。丁旳$是在照射器的絕緣 第13頁 480536 五、發明說明（11) 本發明的目的是提供一平面式場發射彩色照射器且平 面式彩色照射器以奈米管做為一電子源以及藉由奈米管射 極發射電子，對於在一覆蓋平板上螢光塗佈去光阻活化而 以彎曲的型式形成。 本發明的目的是提供一製造具有奈米管射極之平面式 場發射彩色照射器，藉著一厚膜印刷技術的方法使得彎曲 形狀的奈米管與螢光塗佈去光阻可以在一底板上以及在一 遮蓋平板上形成。 在 所提供 射器主 側壁以 間間隔 個彎曲 及在頂 ，在電 導性材 光阻在 射極堆 一個至 疊發射 > 多 例中 較佳實施 的奈米管射極，平 體且具有 及兩個末 在電子絕 平面式場 面式場發 電子絕緣遮蓋平 形狀 部由 子絕 料層 第二 疊， 少三 適用 數個 射極 第一 緣遮 ，至 電導 當遮 個螢 於在 電子 端壁而在 緣平板上 堆疊連續 電導性材 蓋平板的 少三個空 性材料層 蓋平板形 光塗佈去 活化上方 絕緣間隙 此形成一 以形成射 平行的方 料層所形 表面且平 間間隔， 上相當於 成照射器 光阻藉由 發射紅色 壁在遮蓋 發射彩色照 射彩色照射 板，一絕緣 密封 極堆 式放置在兩 成的的一奈 板朝 射器以利用 器包括一照 底板 至少三 凹洞， 疊，每一個至 個末端 米管射 向凹處之一第 彎曲形狀之螢光塗 一鏡像關係，至少 主體置放在底板上 電子由至少三個射 ，綠色或是藍色的 板與底板之間，是 兩個 個空 少三 壁以 極層 二電 佈去 三個 ，每 極堆 光源 為了苐 Page 12 5. Description of the invention ~ Device, = ΐ ί Ming's purpose is to provide a flat field emission # 多 昭 如 丨 丨】 The use of a meter tube emitter and this emitter does not have the shortcomings of ... What is a conventional color irradiator? Another object of the present invention is to provide a method for manufacturing a color irradiation using the present invention > Yano. The m-maple-tip electron emitter of the present invention re-g AA H Le / ti τ to use a nano tube to shoot # 民 + M: e, 'area-type field emission color irradiator | air fiber institute; and this The emitter is made of nanometers with electrical conductivity. The purpose of the present invention is to provide a further advantage of the use of the nano tube emitter and this: the surface 2 emits a color photo. The advantage of the kangan emitter is the thick film printing technology. The electron source here is the next object of the present invention is to provide-f device, using a nano tube emitter and this emitter is a 2? Field emission color photo | 疋 diamond material.疋 You slave and diamond-like carbon or 〇 Another object of the present invention is to provide a flat, 乂 Using the nano tube to shoot #, pair: polar electricity; emitting color emitter is formed in a curved form on the thousand plate.丁 旳 $ is the insulation of the irradiator Page 13 480536 V. Description of the invention (11) The purpose of the present invention is to provide a planar field emission color irradiator and the planar color irradiator uses a nano tube as an electron source and borrows Electrons are emitted by the emitter of the nano tube, and are formed in a curved pattern for fluorescent coating to remove photoresist activation on a cover plate. The purpose of the present invention is to provide a planar field emission color irradiator with a nano tube emitter. By means of a thick film printing method, a curved nano tube and fluorescent coating can be used to remove photoresist on a bottom plate. And on a cover plate. The main side wall of the provided emitter is bent and spaced at intervals, and the photoresistor of the conductive material is a one-on-one emission emitter in a plurality of cases. The nanometer emitter is a flat body and has and The two ends in the electronic absolute plane type field-type electronic insulation cover the flat part by the second layer of the sub-insulation layer. The least three are applicable to the first edge of several emitters. There are at least three hollow material layers on the edge plate, which are stacked with a continuous conductive material cover plate. The cover plate is light-coated to deactivate the upper insulating gap. This forms a surface formed by the parallel-shaped square material layer and the interval between flats. The irradiator photoresist is used to cover the color emission panel by emitting red walls. An insulating and sealed pole is placed in a stack of 20% of a nano-plate facing the radiator. The device includes a bottom plate with at least three recesses. , Each one to the end of the meter tube shoots the first curved shape of the fluorescent paint a mirror relationship, at least the main body is placed on the bottom plate, the electrons are shot by at least three, Or between the blue color and the bottom plate are two walls to empty least three electrode layer electrically cloth to two three, the light source for each electrode stack
第14頁 480536 五、發明說明（12) 維持在中間的間隔 ^在具奈米管射極之平面式場發 管射極層是由奈米大小之中空管，以1形士照射器，奈米 物所形成。電子絕緣遮蓋板更進一步^ ^ 1劑材料的混合 空間間隔，以及f油形狀營先塗饰去先;;支少有三個 陣層。當在黑色矩陣t擊時，黑色矩陣；：-黑色矩 導性材料的種類以藉由電子散佈電荷。戒^:可能為一電 連續性可穿透的陶篆材料所形成。對於平而=與底板可由 照射器而言，第〆導5材料層可能為 3場發射彩色 之碳中空管，鑽石 劑的混合物所形成的/當活化是物為基礎的黏 得到的電子所形成％，每-個至少：“：二個射極堆 發射-紅色，•色或是藍色光源且“營光塗佈去光阻 射的光不同。 著 疊 严能由銦氧化錫（π)所形成。奈米管:陽極且照 之碳中空管，鑽石成疋類鑽石碳以及以聚^奈未尺寸 著劑的！么糾蝌彬成的。當活化熹益，.5為基礎的黏 光源且與藉二：：：：= 本發明更進〆夕的指出—製造〜平m义 射器的方法，平面式場發射彩色照射^式％發射彩色照 奈米管射極可藉由提供—電子絕緣底二=管射極，此 該步驟包含藉由《印刷方法連續地： = 面 的方向，•-個 極堆叠且= 料層以及在頂端的条“射極層’提供-電子絕緣遮蓋平Page 14 480536 V. Description of the invention (12) Maintain the interval in the middle ^ In a planar field emitter with a nano tube emitter, the emitter layer is a hollow tube of the size of a nanometer, with a 1-shaped irradiator, nanometer物 的 的 Formation. The electronic insulation cover plate goes further ^ ^ a mixture of 1 agent materials, space interval, and f-oil shape first coating to go first; support has three layers. When hitting on the black matrix, the black matrix;:-Black moment The type of conductive material to disperse charge by electrons. Caution ^: It may be formed by a ceramic material that can be continuously penetrated by electricity. For the flat and the bottom plate can be illuminated by the irradiator, the material layer of the 5th guide may be a carbon hollow tube emitting 3 fields of color, formed by a mixture of diamond agents / when activated is a substance-based electron Formation%, each at least: ": two emitter stacks emit-red, • color or blue light source and" the light applied to remove light blocking is different. The overlap can be formed by indium tin oxide (π). Nano tube: Anode and photo-carbon hollow tube, diamond into diamond-like diamond carbon, and poly-nano-sized particles! What corrects Bin Cheng. When activating the benefits, the .5 based viscous light source and the following two :::: = The present invention further points out-a method of manufacturing ~ flat m ejector, planar field emission color irradiation ^ type% emission color The emitter of a nanometer tube can be provided by-electronic insulation bottom = tube emitter, this step includes the method of printing continuously: = the direction of the surface, • the poles are stacked and = the material layer and the top Strip "Emitter Layer" Provided-Electronic Insulation Cover Flat
第15頁 480536 五、發明說明（13) 板，在電子絕緣遮蓋平板且面對於一電子絕 形成一第二導電性材料層，當遮蓋板與底板組f板的表面 的：成一至少三個空間間隔’當活化是藉由射極起時 形成一真空密封凹處，在第二電導性材料層j ，在此以 形=螢光塗佈去光阻’才目當於至少三個射二聂：彎曲 ’綠或是藍色的位置。 A ^射出紅 製造具 方法、可以 以及底板的 材料的步驟 米射極層是 以及與鑽石 明的方法更 堆疊下方的 電性材料層 明的方法更 驟，而在電 阻。藉由一 。當活化是 成至少三個 、綠色或藍色 的。本方法 有奈米管射 又包含在一 步驟。此方 。本方法更 由一黏著劑 相似碳纖維 進一步的包 第一電導性 。第二電導 包含在電子 子絕緣遮板 厚膜印刷技 藉由從多數 螢光塗佈去 的光源而與 又包括轉由 極之一平面 連續可穿透 法更包括在 加包括網印 的混合物以 選出之毫微 括提供一負 材料，以及 性材料層由 絕緣遮板上 之間有一至 術以形成至 個射極出來 光阻使得每 鄰近的去光 含有磷的材 式場發射彩 的破璃上提 銀膏上印刷 奈米射極層 及由碳纖維 米中空管所 電荷到位於 提供一正電 銦氧化錫所 塗佈一里耷 少三個螢光 少三個螢光 的電子形成 一個去光阻 阻所發射的 料所形成的 色照射器的 供一遮蓋板 第一電導性 的步驟而奈 ，鑽石纖維 形成。本發 多數個射極 荷至第二導 形成。本發 矩陣層的步 塗佈的去光 '塗佈去光阻 時，可以形 發射紅色， 光源是不同 至少三個螢Page 15 480536 V. Description of the invention (13) The plate, which forms a second conductive material layer on the electronic insulation cover plate and faces an electron insulator, when the cover plate and the surface of the base plate f plate: form at least three spaces The interval 'when activated by the emitter is formed by a vacuum-sealed recess, in the second conductive material layer j, where shape = fluorescent coating to remove photoresistance' is considered to be at least three emitters : Bend 'green or blue position. A ^ Injection red manufacturing method, can and the steps of the material of the bottom plate. The emitter layer is as well as the diamond method. Stacking the electrical material layer under the method is more difficult, and the resistance is lower. With one. When activated is at least three, green or blue. The method has a nano tube shot and includes a step. This side . This method further consists of an adhesive similar to carbon fiber to further encapsulate the first conductivity. The second conductivity includes a thick film printing technique in an electronic sub-insulating shield. The light source is coated with a majority of fluorescent light, and a planar continuous penetrating method is also included. The selected nanometers provide a negative material, and a layer of sexual material is formed between the insulating shield to form an emitter. The photoresistance makes each adjacent light-removing material containing phosphorous field emission color on the broken glass. A nano-emitter layer is printed on the silver-paste paste and the charge from the carbon fiber hollow tube is located to provide a positively charged indium tin oxide coated with one mile less three fluorescent light and less three fluorescent light electrons to form a delustering Diamond fibers are formed when the color irradiator formed by the emitted material is blocked for a step of shielding the first conductivity of the cover plate. The majority of the emitters are charged to the second lead. This step of the matrix layer is applied to remove light. When applied to remove photoresist, it can emit red light, and the light source is different. At least three fluorescent
第16頁 480536 五、發明說明（14) 光塗佈去光阻。本發明的方法進一步的包含形成六個空間 間隔的步驟，以及為了發射彩色光源在紅色，綠色，藍色 等級以及紅色，綠色及藍色彎曲形狀螢光塗佈去光阻之步 驟。 5 - 4發明詳細說明： 本發 面面板顯 的照射器 形狀之射 的螢光塗 藍色以至 色燈源由 光器的功 構以及猎 料是利用 網印或是 射器可以 高的操作 明揭 不 主體 極堆 佈去 於當 照射 能。 由奈 低成 喷墨 很容 效率 示對 且平 遮蓋 疊以 光阻 不同 器發 場發 米管 本的 印刷 易的 於一平 面顯示 板以及 及在遮 ，每一 的通道 射使得 射型式 材料所 厚膜印 技術。 製造以 面式場 器有以 在底板 蓋板上 個表示 相繼的 彩色照 彩色照 形成的 刷技術 本發明 及在低 發射彩色照射器 一遮蓋板以及一 上所形 形成的 最基本 打開時 射器具 射器利 電子發 製成的 新的平 的驅動 成的至少 至少三個 的紅色， ，紅色， 有背光器 用一二極 射器且該 ，此印刷 面場發射 電壓下操 以照射平 底板構成 三個彎曲 彎曲形狀 綠色及以 綠色及藍 及彩色濾 真空管結 奈米管材 技術如， 型彩色照 作而產生 二極真空管結構 在本發明的場發射顯示器面板中 以利用一單一陰極以及一單一陽極形成。單一陰極可以由Page 16 480536 V. Description of the invention (14) Light coating to remove photoresist. The method of the present invention further includes a step of forming six space intervals, and a step of fluorescently coating the photoresist in red, green, blue levels and red, green, and blue curved shapes to emit colored light sources. 5-4 Detailed description of the invention: The fluorescent light emitted by the shape of the irradiator displayed on the faceplate of the present invention is coated with blue or even colored light. Remove the main body and stack it to the radiation energy. The inkjet display from Naicheng Cheng is very efficient and flat. It can be printed on a flat display panel and covered in a flat cover. It can be printed on a flat display panel. Film printing technology. The present invention relates to a method for manufacturing a surface field device with a brush formed by successively displaying color photos and color photos on a cover plate of the base plate. The new flat drive made of device electronics is made of at least three red, red, and two, with a backlight and a polarizer, and the printed surface field emission voltage is operated to illuminate the flat base plate to form three. The curved shape is green and the green and blue and color filter vacuum tubes are combined with nano tube technology such as, to produce a diode vacuum tube structure in the field emission display panel of the present invention using a single cathode and a single anode. A single cathode can be made by
第17頁 480536 五、發明說明（15) ^ 一^ 含有銀的漿料或是任何具有導電性的銀膏或者是具有導電 性的薄膜形成。而陽極可由在頂部絕緣板，例如，一光學 透明玻璃平板上的銦氧化錫層所形成。銦氧化錫材料本質 為透明的因此不會影響顯示器面板的功能。 藉由先提供一透明玻璃平板作為底部絕緣平板而形成 二極真空官結構’接著在玻璃平板上藉著一厚膜印刷技術 例如’網印技術或是奈米管大小的中空管的喷墨印刷技術 或是如碳纖維，鑽石纖維或是似鑽石碳纖維以形成一多數 個彎曲形狀射極堆疊。 在頂σ卩的的絕緣平板，例如，一第二玻璃平板，如同 氣化锡的透明電極材料在多數彎，曲螢光粉末塗佈去光阻 在鋼氧化錫層或是在陽極層上形成。藉著電子由多數射極 堆®發射，多重螢光粉末的去光阻塗佈在主動區域上面發 射紅色’綠色或是藍色光。每一個螢光塗佈去光阻發射一 光源而在彩色光源上與藉著最接近塗佈去光阻發射的彩色 光源比較是不同的。多數個側面面板，如，四個側面面板 可以利用在一真空密封的凹洞中形成一玻璃無機粘結劑以 將第一和第二玻璃乎板的四周結合在一起。 本發明新的二棰真空管結構場發射的電子發射源是在 一銀膠的頂部的一条米管射極的厚膜印刷陰極層。厚膜印 刷技術可以為網印技術或是喷墨印刷技術。厚膜印刷方法Page 17 480536 V. Description of the invention (15) ^ a ^ A paste containing silver or any silver paste having conductivity or a thin film having conductivity is formed. The anode may be formed of an indium tin oxide layer on a top insulating plate, for example, an optically transparent glass plate. The indium tin oxide material is transparent in nature and therefore does not affect the function of the display panel. A two-pole vacuum structure is formed by first providing a transparent glass plate as a bottom insulating plate ', and then by a thick film printing technology such as' screen printing technology or nano-tube-sized hollow tube inkjet on the glass plate' Printing technology is either carbon fiber, diamond fiber or diamond-like carbon fiber to form a plurality of curved shape emitter stacks. On the top slab of an insulating plate, for example, a second glass plate, the transparent electrode material like vaporized tin is bent in most bends, and curved fluorescent powder is applied to remove photoresist on the steel tin oxide layer or on the anode layer . As the electrons are emitted by most emitter stacks, the photoresist of multiple fluorescent powders is coated on the active area to emit red ’green or blue light. Each fluorescently coated deresist emits a light source that is different on a colored light source compared to a colored light source that is emitted by the closest coating to the resist. Most side panels, for example, four side panels, can use a glass inorganic adhesive formed in a vacuum-sealed recess to bond the first and second glass panels together around the periphery. The electron emission source of the field emission of the new Erbium vacuum tube structure of the present invention is a thick film printed cathode layer of a meter tube emitter on top of a silver glue. Thick film printing technology can be screen printing technology or inkjet printing technology. Thick film printing method
第18頁 480536 五、發明說明（16) 可以適用於製造大型的埸狀& θ 可以在高效率的方法下實-射頌示器面板以至於製造程序 厚膜印刷技術，一印刷解=二在此已經被發現，藉著利用 本發明新的厚膜印刷方獲得與100微米一樣高。 更大的製造視頻圖像陣列林=二此用於製造64〇*48〇或是 千力袼式的場發射顯示器面板。 在一透明電極材料如鈿 厚膜印刷技術形成至少：個：曲匕錫所形成的陰極，藉由--種勞光粉末材料形成塗佈去光阻。 ，在一可供替換的方法私私螢先塗佈去光阻，如磷光劑 、 毛射不同的紅色，綠色戋是Ιέ色光 源使得每一個去光阻盥多番拇技^ > T e, 3c 7C ^ a Tfc 射不同的純光源。、營光鄰近的去光阻比較是發 參考最初的第 明的場發射彩色照 部絕緣平板4 2以及 璃平板可適用於絕 形成一多數個一電 阻4 6。藉由金屬粒 的電導性膏材。利 (並未表示）連接。 頂部絕緣平板4 4的 電導層4 8。鋼氧化 層玻璃板4 4以及在 三圖 ，在此 40。場 一頂部絕緣 板42。 材料， 所使用 射器 緣平 導性 子在 用銀 此為 表面 錫層 底層 為部份的 發射彩色 平板44所 在頂部的 如一含銀 的黏結劑 膠去光阻4 6是作 一截面圖且表示 内側藉 4 8如同 玻璃板 由一材料 一陽極傳 4 2之間的 圖示說明，為 照色器40是由 構成。光學透 玻璃平板4 2上 的膏材之塗佈 中混合以形成 為陰極與一負 在第四圖中。 如銦氧化錫形 送正電荷以及 凹洞5 0中形成 本發 一底 明玻 ，先 去光 其他 電荷 在一 成一 在頂 有效Page 18 480536 V. Description of the invention (16) Can be applied to the manufacture of large-scale 埸 -shaped & θ can be implemented in a high-efficiency method-to illuminate the horn panel and the manufacturing process thick film printing technology, one printing solution = two It has been found here that by using the new thick film printing method of the present invention, it is obtained as high as 100 microns. Larger manufacturing of video image arrays = This is used to make 64 * 48〇 or Thousands type field emission display panels. A transparent electrode material such as 钿 thick film printing technology is used to form at least: a cathode formed by curly tin, and a coating is used to remove the photoresist by using a light-emitting powder material. In an alternative method, the private light is first coated with photoresist, such as phosphors, hairs with different red colors, and the green light source is an illuminant light source, which makes each photoreceptor more effective. ^ ≫ T e , 3c 7C ^ a Tfc different pure light sources. The comparison of the photoresistance removal in the vicinity of the camping light is to refer to the original first field emission color photo insulation plate 42 and the glass plate which can be used to form a plurality of resistors 46. Conductive paste with metal particles. (Not shown) connection. Conductive layer 4 8 of the top insulating plate 4 4. Steel oxide coated glass plates 4 4 and 3 in the figure, here 40. Field a top insulating plate 42. The material used is the emitter-edge flat-conductor, which uses silver as the surface tin layer and the bottom layer as part of the emission color flat plate 44. The top of the plate, such as a silver-containing adhesive, is used to remove the photoresist. Borrowing 4 8 is like a glass plate that is illustrated by a material and an anode 4 to 2, and the color shader 40 is composed of. The coating of the paste on the optically transparent glass plate 42 is mixed to form a cathode and a negative in the fourth figure. For example, indium tin oxide sends positive charges and forms a cavity in 50. This light is clear, and other charges are removed first.
第19頁 五、發明說明（17) 電場。 在銀膠 奈米管射極 。藉由一負 子5 6。利用 52。奈米管 奈米管而與 可以適用於 。其它適合 之間都可以 幵> 狀形成且 伏特的低操 /主意的是， 的操作微尖 電導層 層5 2是 電荷之 在銀膏 射極層 含溶劑 厚膜印 於奈米 使用。 直徑小 作電壓 此操作 電壓， 4 6的頂部，一奈米管 銀膏層4 6與一射極堆 銀膏層4 6充電，奈米 層4 6上的一厚膜技術 5 2是打碎碳奈米管， 的漿料在一致性的情 刷技術，此技術包括 管的材料，只要直徑 必須注意的是奈米管 於纖維。對於射極電 下一般用於活化奈米 電壓比傳統的場發射 如1 0 0伏特要來得小 射極層5 2形成，此 疊5 6在一起所形成 管射極層5 2射極電 沉積奈米管射極層 鑽石或是似鑽石碳 況下混合形成，而 網印以及噴墨印刷 介於30到5 0毫微米 是中空管以圓柱的 子而言，在30到50 管射極材料。值得 顯示器元件中所須 在彎曲开V 、 曲形狀奈米技狀示米射極層5 2網印在銀膠層4 6之後，將彎 料所殘留的、、1 =極層5 2硬烤以趕出在膠材中以熱烤處理材 米管，而剩=二i ί米官射極材料包含2〇Wt%至80wt%的奈 漿料包含大3有/合劑的黏結劑。更佳的是，奈米管 黏結劑。/、、有5〇Wt%的奈米管以及大約50wt%的含溶劑的 在奈米管；；烤步驟之後’ “管突出的尖端或是頂尖是 性元件的上面作為電子發射源而成為本發明新穎 月匕 夕重性彎曲形狀射極堆疊5 4可在橫截面Page 19 5. Description of the invention (17) Electric field. Emitter in silver glue Nano tube. With a negative 5 6. Use 52. Nano tube and nano tube can be applied to. Other suitable ones can be 幵 > shaped and volt low operation / idea is that the operation of the micro-tip conductive layer 5 2 is the charge in the silver paste emitter layer containing solvent thick film printed on nanometers. A small diameter makes this operating voltage. At the top of 4 6, a nano tube silver paste layer 4 6 and an emitter pile silver paste layer 4 6 are charged. A thick film technology 5 2 on the nano layer 4 6 is carbon breaking. Nano tube, the slurry in the consistent brushing technology, this technology includes the tube material, as long as the diameter must pay attention to the nano tube to the fiber. For emitter, it is generally used to activate the nanometer voltage, which is smaller than the traditional field emission, such as 100 volts. The emitter layer 5 2 is formed, and the stack 5 6 is formed together to form a tube emitter layer 5 2. Nano tube emitter layer is formed by mixing diamond or diamond-like carbon, while screen printing and inkjet printing are between 30 and 50 nanometers. Hollow tubes are cylindrical. In the case of 30 to 50 tube emitters, material. It is worthwhile in the display element to bend the V, curved nanometer technology display emitter layer 5 2 screen-printed on the silver glue layer 4 6 and hard-bake the remaining 1 = polar layer 5 2 of the bent material. In order to drive out the processed rice tube in the glue material by hot roasting, the remaining material of the official emitter electrode contains 20Wt% to 80% by weight of the nano-slurry, which contains a large binder / mixture. Even better, a nano tube adhesive. / 、 There is a 50Wt% nano tube and about 50wt% of the solvent-containing nano tube; after the baking step, "" The protruding tip of the tube or the top is the top of the sexual element as the electron emission source. Invented novel Moon Dagger heavy curved shape emitter stack 5 4 can be in cross section
480536 五、發明說明（18) 方向的底層玻璃平板42形成，在橫截面方向以大約n 〇毫 微米的缺口做為空間分隔。對於底層玻璃平板42的平面圖 一份表示在第六圖。同樣地，一部份的頂層玻璃平板 4 4的平面圖在第四圖表示。 中空管可由碳化奈米管材料形成，中空管為單層壁或 是多層壁的奈米管。當奈米管的長度為1毫微米以及直徑 為1 〇毫微米時，奈米管在斷裂之後其長度在1毫微米及3毫 微米之間。奈米管的外徑大約在5毫微米及5 〇毫微米之 在一頂層玻璃平板44的表面内部，沉積一透明電極材 料層4 8作為一陽極。透明電極4 8適用的材料如銦氧化錫， 銦氧化錫不會影響顯示器面板的光學特性。在透明電極48 的頂層利用厚膜印刷技術沉積一多重性的螢光粉末塗佈的 去光阻6 0 ’ 6 2以及64。螢光塗佈去光阻排列的方式為每一480536 V. Description of the invention The bottom glass plate 42 in the direction of (18) is formed, and a gap of about 0 nm is used as a space separation in the cross-sectional direction. A plan view of the bottom glass plate 42 is shown in the sixth figure. Similarly, a plan view of a portion of the top glass plate 44 is shown in the fourth figure. The hollow tube may be formed of a carbon nanotube material. The hollow tube is a single-walled or multi-walled nanometer tube. When the length of the nanotube is 1 nm and the diameter is 10 nm, the length of the nanotube after the fracture is between 1 nm and 3 nm. The outer diameter of the nano tube is approximately 5 nm and 50 nm. Inside the surface of a top glass plate 44, a transparent electrode material layer 48 is deposited as an anode. Suitable materials for the transparent electrode 48 are indium tin oxide. Indium tin oxide does not affect the optical characteristics of the display panel. On the top layer of the transparent electrode 48, a multi-layered fluorescent powder-coated de-photoresist 6 0 '6 2 and 64 is deposited using a thick film printing technique. Fluorescent coating to remove photoresist
個去光阻發射一紅色，綠色或藍色與藉由鄰近去光阻發射 彩色光源比較是不同的。例如，去光阻6〇發射紅色，去光 阻6 2發射綠色而去光阻6 4則是發射藍色。對於每一個紅色 去光阻基團，綠色去光阻基團以及藍色去光阻基團，形成 一單一圖像素。磷的粉末可以適用於螢光粉末塗佈，在此 ，不同粉末的等級散發不同紅色，綠色及藍色。同樣在第 三圖所表示，㈣間隙壁68以維持在頂層玻璃平板以與底 層玻璃平板42之間的適當空間。利用 '網印技術或是預製Each photoresist emits a red, green, or blue color compared to a colored light source that emits by adjacent photoresist removal. For example, removing photoresist 60 will emit red, removing photoresist 62 will emit green, and removing photoresist 64 will emit blue. For each red photoresist group, green photoresist group and blue photoresist group, a single picture pixel is formed. Phosphorous powder can be used for fluorescent powder coating. Here, different powder grades emit different red, green and blue colors. Also shown in the third figure, the diaphragm wall 68 is maintained in a proper space between the top glass plate and the bottom glass plate 42. Use 'screen printing technology or prefabrication
第21胃 480536 五、發明說明（19) 造以及置放在兩塊玻璃平板之間，一絕緣材料可以適用於 形成間隙壁。 曰在& =佈光阻6 〇，6 2以及6 4的中間，一黑色矩陣層7 2 疋為:阻檔不良的光源以及增加顯示器面板的對比而形成 的藉由網，技術’碳化承載聚合物材料可以做為黑色矩 P材料。如第四圖，係在彎曲形狀射極堆疊中間的一多數 個肋狀區段8 Π，甘rK e i f ^ ^ υ 其中疋由一頂端面積82與一底部面積84所21st stomach 480536 V. Description of the invention (19) Fabricated and placed between two glass plates, an insulating material can be used to form the partition wall. In the middle of & = cloth photoresist 6 〇, 6 2 and 6 4, a black matrix layer 7 2 疋 is: a poorly blocked light source and an increase in the contrast of the display panel is formed by the net, the technology 'carbonized load A polymer material can be used as the black moment P material. As shown in the fourth figure, a plurality of rib-shaped sections 8 Π in the middle of the curved-shaped emitter stack, where 疋 rK e i f ^ ^ υ where 疋 is composed of a top area 82 and a bottom area 84
玻瑤第五圖與第六圖是說明本發明頂層玻璃平板4 4與底層 佈板4 2的的平面圖。第五圖是表示一彎曲形狀螢光塗 一綠色阻、7〇的剖面圖’係說明一紅色螢光塗佈去光阻6 0， 零^矩營光塗佈去光阻7 〇以及藍色螢光塗佈去光阻6 4。一 對比。E ^層7 2做為·阻擔不必要的光源以及增加圖像元素的 人铷从f色矩陣層7 2一般是由一電導體材料如碳化承載聚 的消失構成以致於電子在黑色矩陣層72上轟擊會立即 藉由涂且不會對該層引起破壞。每一個圖像元素7 〇，可以 制。二^ 一銀膠材料的電導層4 6的奈米管射極5 2分開控 浐絡"、區段80可任意地用於不同的奈米管堆疊54之間的 囝每弟/、圖為本發明的螢光塗佈去光阻7 0的適當 、大小。例如，一螢光粉末塗佈去光阻的寬度大約The fifth and sixth drawings of Boyao are plan views illustrating the top glass plate 44 and the bottom cloth plate 42 according to the present invention. The fifth figure is a cross-sectional view showing a curved fluorescent coating, a green resist, and 70, which illustrates a red fluorescent coating to remove the photoresist 60, zero square light coating to remove the photoresist 70, and blue. Fluorescent coating to remove photoresist 6 4. A contrast. E ^ layer 7 2 is used as a person who resists unnecessary light sources and increases image elements. From the f-color matrix layer 72, it is generally composed of the disappearance of an electrical conductor material such as carbonized polymer, so that the electrons are in the black matrix layer. The bombardment on 72 will immediately be applied without causing damage to the layer. Each image element can be made. 2 ^ A conductive layer of silver glue 4 6 Nano tube emitter 5 2 Separate control network ", section 80 can be used arbitrarily between different nano tube stacks 54 This is the proper size of the photoresist 70 for the fluorescent coating of the present invention. For example, the width of a photoresist coating to remove photoresist is about
第22頁 480536 五、發明說明（20) 120毫微米。黑色矩陣層的寬度ι4〇毫微米。在螢光粉末塗 佈去光阻6 2與6 4之間的間隔大約為！ 〇 〇毫微米。 如^六圖所表示，當導體塗佈層之間的間隔距離，例 如銀 '層4 6大約為1 〇 〇宅微米，奈米管射極的寬度大約 為1 2 0¾微米。在奈米管之間的間隔距離大約為1 1 〇毫微米 參 場發射 三個隔 並且在 電導性 應該 段）其 及 16〇c 與第 是在射 步的構 在 2第八圖，其中上述是表示本發明新潁性的平面化 彩色照射器40的底板140的平面圖。底板14〇至少由 間所形成，彎曲形狀射極堆疊156，158以及16〇， 之間有一空間1 7 〇。每一個至少三個射極堆疊是在 材料層（並未表示）以及在電極162，164以166充電 f ^的是在第三圖所表示的底板14〇的角落（或是區 中射極堆疊52是相當於第八圖的射極堆疊156， 158 二在第八圖中的射極堆疊的寬度χ大約為i 2〇毫微 二圖t射極堆疊的寬度相似。在此應注意空間1 70 °、堆s 1 5 6，1 5 8及1 6 0之間所提供的空間，更進一 成條狀區段而此區段與第四圖的肋狀區段8 〇相似。 蓋板平 在一起 圖所表示的遮蓋板24〇與在第八圖所表示的 =相似；Ϊ遮蓋板24〇的表面，當兩個板子組合 空間間ρ ，ί，遮蓋板2 4 〇是面對底板1 4 0而形成至少三個 工a同，’今曲形狀螢光塗佈去光阻2 5 6，2 58以及26〇。Page 22 480536 V. Description of the invention (20) 120 nm. The width of the black matrix layer is 40 nm. The interval between photoresist removal 6 2 and 6 4 on the fluorescent powder coating is approximately! 〇 〇 nm. As shown in Fig. 6, when the separation distance between the conductor coating layers, for example, the silver 'layer 46' is approximately 100 μm, and the width of the emitter of the nanotube is approximately 120 μm. The separation distance between the nano tubes is about 110 nm. The three field emission is three and the conductivity should be in the segment.) And its 16c and the first is the structure of the shooting step in Figure 2-8, where the above It is a plan view showing the bottom plate 140 of the novel planarized color irradiator 40 according to the present invention. The base plate 14 is formed by at least between, and the curved-shaped emitter stacks 156, 158, and 160 have a space of 170 between them. Each at least three emitter stacks are charged at the material layer (not shown) and at 166, 166 at electrodes 162, 164. f ^ is the corner of the bottom plate 14 (or the emitter stack in the area shown in the third figure) 52 is equivalent to the emitter stack 156 in the eighth figure. 158 The width x of the emitter stack in the eighth figure is approximately i 2 0. The width of the emitter stack in the second figure t is similar. Note here that the space 1 The space provided between 70 °, piles 156, 158, and 160 is further divided into strip-shaped sections which are similar to the rib-shaped section 8 of the fourth figure. The cover plate 24o shown in the figure is similar to that shown in the eighth figure; Ϊ The surface of the cover plate 24o, when the space between two board combinations ρ, ί, the cover plate 2 4 〇 is facing the bottom plate 1 4 0 to form at least three processes a, 'Jinqu shape fluorescent coating to remove photoresist 2 5 6, 2 58 and 26.
第23頁 480536 五'發明說明（21) 在螢光塗佈去光卩且之間包括一空間2 7 0，在肋狀區段也可 以提供一空間2 7 0如同在第四圖條狀區段8 〇。每一個至少 三個螢光塗佈去光阻2 5 6，2 5 8及2 6 0顯示最初的紅色，綠 色或是藍色，即使在此等級是不須要的。螢光塗佈去光阻 可以通用構成一螢光粉末以產生所要的色彩，例如，在電 子的能量之上所產生一紅色光源的一粉末為氧化釔：銪發 射一光譜，其光譜具有一線帶寬度在6 1 1毫微米。一螢光 粉末材料可為鱗酸_而產生一綠色光源：鈽，铽顯示在一 線帶寬為55 4毫微米尖峰的光譜，或是（〇61^)^^人111019可 顯示在一線帶帶寬為5 4 3毫微米尖峰的光譜。s r 5( P 0 ) 3C 1 : 銪在 447毫微米顯示一波峰，或是（SrCaBa)5(P04)3Cl··銪在 4 5〇毫微米顯示一波峰，或是BaMgAl 16〇27••銪在4 5 0毫微米顯 示一波峰。值得注意的是只要在足夠的強度下可以產生最 初的紅色，綠色以及藍色’其它任何的螢光粉末材料可以 適用在本發明的新穎性裝置。 應該注意的是在第九圖中說明當塗佈去光阻2 5 6，2 5 8 以及2 6 0，其彩色的階數可以任何須要的方法安排以及並 不須要在第九圖中連續的表示。 本發明之新的平面式彩色照射器4 0可以藉著很多的側 面面板（並未表示）連接底板1 4 0以及遮蓋板2 4 0構成。底板 1 4 0與遮蓋板2 4 0可以由絕緣玻璃材料構成以及可以藉由側 面面板以利用陶瓷粉末燒結製程連接在一起。含有一玻璃Page 23 480536 Description of the Five 'Invention (21) In the fluorescent coating, there is a space 2 70 between the two, and a space 2 7 0 can also be provided in the ribbed section as in the strip area of the fourth figure. Paragraph 8 0. Each of at least three phosphor-coated de-resistors 2 56, 2 5 8 and 2 60 shows the original red, green or blue, even at this level is not required. Fluorescent coating and photoresist removal can be used to form a fluorescent powder to produce the desired color. For example, a powder that generates a red light source above the energy of electrons is yttrium oxide: erbium emits a spectrum with a line band The width is 6 1 1 nm. A fluorescent powder material can produce a green light source for phosphonic acid: 钸, 铽 shows a spectrum with a peak width of 55 4 nm, or (〇61 ^) ^^ 人 111019 can display the bandwidth of a line Spectrum of 5 4 3 nm spikes. sr 5 (P 0) 3C 1: 铕 shows a peak at 447 nm, or (SrCaBa) 5 (P04) 3Cl · · 铕 shows a peak at 4 50 nm, or BaMgAl 16〇27 •• 〇 A peak is shown at 450 nm. It is worth noting that as long as the initial red, green, and blue 'other fluorescent powder materials can be produced with sufficient intensity, they can be used in the novel device of the present invention. It should be noted that in the ninth figure, when the photoresist is removed 2 6 6, 2 5 8 and 2 60, the color order can be arranged in any desired method and does not need to be continuous in the ninth figure. Means. The new flat-type color illuminator 40 of the present invention can be constituted by connecting a bottom plate 1 40 and a cover plate 2 4 0 through a number of side panels (not shown). The bottom plate 140 and the cover plate 240 may be made of insulating glass material and may be connected together by a side panel using a ceramic powder sintering process. Contains a glass
第24頁 480536 五、發明說明（22) 粉末，黏結劑以及溶劑是適合的陶瓷粉末。合適的玻璃材 料可以由 Ferro Corporation of Cleveland，Ohi 〇戶斤描述 密封玻璃的生產線中提供的材料中做選擇。例如，一適用 的密封玻璃的等級須用在形成本發明C F 1 4 1 6的彩色照射器 腔，CF 1 4 1 6為一玻璃體玻璃其熱膨脹係數8 2 · 〇 *1 〇 _V°C (在 0至3 0 0°C之間），回火溫度為38 9°C，軟化點為4 6 3°C，密 度為5. 2 6gm/cc，封焊接度為51；rc以及焊接時間為15分鐘 。其它合適的材料等級為玻璃體CF 755 5玻璃，CF755 5的熱 膨脹係數為8 8 · 〇 *1 〇 _7/°c (在〇至3 0 0°C之間），回火溫度為 3 7 0 C ’軟化點為4 1 5°C，密度為5 · 7 g m / c c，封焊接度為 4 5 0°C以及焊接時間為1 5分鐘。這些玻璃粉末—般適合在 100，2 0 0或是3 2 5網目（mesh)粉末形成，這些粉末適用於 本發明彩色照射器反應室連接製程。 對於本發明的射極堆疊所適用的寬度或是螢光塗佈去 光阻（如在第八圖與第九圖中的X)大約是在1毫米以及7毫 米之間，而最佳的寬度約在2毫米與5毫米之間。彩色照射 器反應室的厚度或是遮蓋板之2 4 0與底板140之間的距離約 為6毫米。當須要不同大小尺寸的時候，應該注意的是這 些尺寸大小對於特殊的應用可以做適當的改變。 在第七圖為本發明的平面場發射彩色照射器的操作以 時間連續的曲線圖表示。在第七圖中，時間連續軌跡i 8 〇 ，182以及184分別表示一紅色光源，綠色光源以及藍色光Page 24 480536 V. Description of the invention (22) Powder, binder and solvent are suitable ceramic powders. Suitable glass materials can be selected from the materials provided in Ferro Corporation of Cleveland, Ohioka, Japan's Sealed Glass Production Line. For example, a suitable sealing glass grade must be used to form the color irradiator cavity of CF 1 4 1 6 according to the present invention. CF 1 4 1 6 is a glass body with a thermal expansion coefficient of 8 2 · 〇 * 1 〇_V ° C ( (Between 0 and 3 0 ° C), tempering temperature is 38 9 ° C, softening point is 4 6 3 ° C, density is 5. 2 6gm / cc, seal welding degree is 51; rc and welding time are 15 minutes. Other suitable material grades are glass body CF 755 5 glass, CF755 5 has a thermal expansion coefficient of 8 8 · 〇 * 1 〇_7 / ° c (between 0 and 300 ° C), and a tempering temperature of 3 7 0 C 'softening point is 4 1 5 ° C, density is 5 · 7 gm / cc, seal welding degree is 450 ° C and welding time is 15 minutes. These glass powders are generally suitable for forming at 100, 2000 or 3 2 5 mesh powders, and these powders are suitable for the connection process of the color irradiator reaction chamber of the present invention. The width suitable for the emitter stack of the present invention or fluorescent coating to remove photoresist (such as X in the eighth and ninth figures) is about 1 mm and 7 mm, and the optimal width is Between 2 mm and 5 mm. The thickness of the reaction chamber of the color irradiator or the distance between the cover plate 240 and the bottom plate 140 is about 6 mm. When different sizes are required, it should be noted that these sizes can be changed appropriately for special applications. The operation of the flat field emission color illuminator of the present invention is shown in the seventh figure as a time-continuous graph. In the seventh figure, the time continuous trajectories i 8 0, 182 and 184 represent a red light source, a green light source and a blue light, respectively.
第25頁 480536 五、發明說明（23) 源。對於每一個射極疊的開/關而言，執跡是表示一時間 連續以及因此，每一個螢光塗佈去光阻是為了發射三原色 。紅色，綠色以及藍色光源可以在頻率大約6 0赫茲連續的 打開。對於磷而言，其延遲在1 0千赫茲時為0. 1亳秒。因 此在6 0赫茲時連續的打開紅色，綠色以及藍色光源，一個 完整三個彩色光源的循環須要1 6. 7毫秒，對每一個彩色光 源而言，打開的時間須要5. 6毫秒。 圖，對於三個彩色光源 約為1至5毫秒，對液晶 。T1+T2的總和應大約 182以及184所表示的三 ，紅色光源最先被打開 源關掉之後打開，所剩 綠色光源關掉之後藍色 1至5毫秒。對於所有三 期，每一秒大約6 0次。 面板一足夠的彩色響應 如同在第七圖中時間連續曲線 中的任何一個在打開時間為T 1時大 而言延遲時間大約在1至2毫秒之間 為5 . 6毫秒。這與如同在軌跡1 8 0， 個彩色光源相同。在一般的操作中 以及關上。綠色光源緊接著紅色光 下的時間周期大約為1至5毫秒。在 光源立即打開，打開的時間大約為 個彩色光源重覆的開/關的完整周 此三個彩色光源供應給一液晶顯示 而顯示在高解析度的一彩色顯示器 <1 在第十圖中為在本發明新穎性的平面式場發射彩色照 射器1 9 0的一可替換的實施例。在第八圖以及第九圖中為 代替三個空間間隔，彎曲形狀結構的最佳實施例，本發明 的可替換的實施例中表示一共有六個空間間隔，彎曲形狀Page 25 480536 V. Description of Invention (23) Source. For the on / off of each emitter stack, the track is a time continuity and therefore, each phosphor is coated to remove the photoresist in order to emit the three primary colors. Red, green, and blue light sources can be continuously turned on at about 60 Hz. For phosphorus, the delay is 0.1 0 seconds at 10 kHz. Therefore, the red, green, and blue light sources are continuously turned on at 60 Hz. A complete cycle of three colored light sources takes 16.7 milliseconds. For each colored light source, the turn-on time needs 5.6 milliseconds. Figure, about three to five milliseconds for three color light sources, for liquid crystals. The sum of T1 + T2 should be about 182 and 184. The red light source is turned on first and then turned off, and the remaining green light source is turned off after 1 to 5 milliseconds of blue. For all three periods, about 60 times per second. Panel 1 has sufficient color response. As in any of the time-continuous curves in the seventh figure, when the opening time is T 1, the delay time is about 5.6 ms between 1 and 2 ms. This is the same as the colored light sources at track 180. During normal operation and closed. The time period of the green light source immediately after the red light is about 1 to 5 milliseconds. Immediately after the light source is turned on, the turn-on time is about a complete cycle of repeated on / off of the color light sources. The three color light sources are supplied to a liquid crystal display and displayed on a high-resolution color display < 1 in the tenth figure. It is an alternative embodiment of the novel planar field emission color illuminator 190 of the present invention. In the eighth and ninth figures, instead of three space intervals, the curved shape is the best embodiment. The alternative embodiment of the present invention shows a total of six space intervals and a curved shape.
第26頁 480536 五、發明說明（24) ' 結構可以提供在一照射器的主體上。六個-曲形狀射極堆 疊或是螢光塗佈去光阻按照紅色，綠色，藍色，紅色，綠 色以及藍色的順序排列如同以i 92， i 94，j 96，丨98， qq、 以及102來確認。應當注意的是，並未表示在第十圖，以 一相似的方法提供六個分離的電極到射極堆疊，就如 第八圖是對於射，極電子而言，是將包含在射極堆疊中太 官射極充電。相似的螢光粉末塗佈材料可以 = 要的彩色光源。可供替換的實施例並不咅明^斤須 彩色照射器只f艮制於六個.彎曲形^ f月的平面化 用大數量的空間間隔，彎曲形 幻m構的使用，可以利 阻，在沒有很大的差異下可 、極堆疊與螢光塗佈去光 乂構成結構。 ，照射器的優點，已經於以 圖中做詳細的描述。本發 器可以做為一平面面板顯 清藉，利用本發明之新的平貝 S ί !! 一般須要完全的被刪 個、# ^為此將—背光以及彩 太f利的包裝，此包裝可以 =未射極堆疊。對於平 製造成本下有高品質的彩： 本發明中平面式場發射 上的敘述以及附圖第三圖至^ 明之新的平面式場發射彩色= 示元件照光如同背光光源—π 面式彩色照射器，傳統的脊$ 除。本發明之新的平面式‘ 色；慮過器的功能合併而成為 利用厚膜印刷技術製成以步: 平板顯示裝置而言可以多/成 照度。 乂在低的 當本發明已在說明方法中插述， 此說明方法須了解的Page 26 480536 V. Description of the invention (24) The structure can be provided on the body of an illuminator. Six-curved emitter stacks or fluorescent coating to remove photoresist are arranged in the order of red, green, blue, red, green and blue as i 92, i 94, j 96, 丨 98, qq, And 102 to confirm. It should be noted that, as shown in the tenth figure, six separate electrodes are provided to the emitter stack in a similar way, as in the eighth figure, for the emitter, the polar electrons are included in the emitter stack. Zhongtaiguan emitter charging. Similar fluorescent powder coating materials can = desired color light source. The alternative embodiments are not clear. The color of the irradiator is only made of six. The curved shape ^ f flattening uses a large number of space intervals, and the use of curved magic structures can be beneficial. In the absence of a big difference, the structure can be formed by polar stacking and fluorescent coating. The advantages of the irradiator have been described in detail in the figure. The hair dryer can be used as a flat panel for display and clear borrowing. The use of the new flat shell of the present invention is generally required to be completely deleted. # ^ This will be—backlight and color packaging. This packaging can = Unemittered stack. For high-quality color at a flat manufacturing cost: the description of the planar field emission in the present invention and the new planar field emission color of the third figure to ^ of the drawings = display element light is like a backlight light source-π area type color illuminator, Traditional ridge $ division. The new flat-type color of the present invention is considered to be combined with the functions of the device to be made using thick film printing technology. Steps: For a flat-panel display device, it can be multi-lit. When the present invention has been interpolated in the description method,
480536 五、發明說明（25) 是在專門用語上文字本質上的描述而不是文字上的限制。 此外，當本發明已在最佳實施例以及可選擇的實施例 中描述，可以察知本發明這些技藝可以立即的應用這些學 說在其他不同的發明上。 發明的實施例在此為獨一的特性以及所要求的基本權 利在以下定義。480536 V. Description of the invention (25) is a description of the essence of the word in a specific term, not a limitation on the word. In addition, when the present invention has been described in the preferred embodiment and alternative embodiments, it can be seen that these techniques of the present invention can be immediately applied to these different theories. The embodiments of the invention are unique here and the basic rights required are defined below.
第28頁 480536 圖式簡單說明 第一 A圖為藉由彩色濾光器及一白色光源所形成的一 傳統彩色照射器之示意圖； 第一 B圖為傳統的連續彩色顯示器元件在此每一圖像 顯示為紅，綠或藍； 第二A圖為一放大圖示，一傳統場發射顯示器元件利 用微尖對電子散射之截面示意圖； 第二B圖為一放大圖示，說明第二A圖的傳統場發射顯 示器元件的截面圖包括一陽極以及側壁以形成一密封室之 不意圖， 第二C圖為一放大圖示，部份第二B圖之傳統場發射顯 示器元件的截面圖說明一單一微尖的結構示意圖； 第三圖為一部份，本發明具有二極真空管結構之平面 式場發射彩色照射器的透視圖； · 第四圖為一放大圖示，一單一射極堆疊與本發明第三 圖的平面式場發射彩色照射器的一單一螢光塗佈去光阻的 部份截面圖；480536 on page 28 Brief description of the diagram The first diagram A is a schematic diagram of a conventional color illuminator formed by a color filter and a white light source; the first diagram B is a conventional continuous color display element. The image is displayed in red, green or blue. The second diagram A is an enlarged view, and a cross-sectional view of a conventional field emission display element using a microtip to scatter electrons. The second diagram B is an enlarged diagram illustrating the second diagram A. The cross-sectional view of a conventional field emission display element includes an anode and a side wall to form a sealed chamber. FIG. 2C is an enlarged view, and part 2B of the conventional field emission display element illustrates a cross-sectional view. Schematic diagram of a single microtip; The third figure is a part of a perspective view of a planar field emission color irradiator with a diode vacuum tube structure of the present invention; the fourth figure is an enlarged illustration of a single emitter stack Partial cross-sectional view of a single fluorescent coating to remove photoresist of the planar field emission color illuminator of the third invention;
第29頁 480536 圖式簡單說明 平色 的藍 板及 平以 蓋綠 遮， 緣色 絕紅 一佈 的塗 明上 發器 本射 ，照 示色 圖彩 份射 部發； 一場阻 是式光 圖面去 五平佈 第，塗 圖光 面 米 奈 以 ； 板圖 平面 蓋平 之的 緣器 絕射 的照 明色 發彩 本射 ，發 示場 圖式 份面 部平 一之 是佈 圖塗 六極 第射 管 空 管安 米續 奈連 括色 包藍 器及 射綠 照， 色紅 彩’ 式色 面顏 平的 明本 發基； 本最圖 對個意 明三示 說於之 為對上 圖件形 七元圖 第之一 極在 射排 照阻 色光 彩去 射佈 發塗 場光 式螢 面的 平圖 之九 明第 發與 本疊 於堆 板極； 平射一1| 層狀面 底形平 在曲之 為彎合 圖佈符 八塗相 第上置 器位 的 平的 蓋成 遮形 一所 的阻 射光 照去 色佈 彩塗 射光 發螢 場狀 式形 面曲 平彎 之的 明色 發藍 本及 為綠 Isil ? ; 九紅圖 第由面 是平 板一 源形 光曲 色彎 藍個 及六 色示 綠表 ， 圖 色面 紅平 彩本 色基 匕心 活例 於施 對實 明二 發第 本之 為器 。 圖射疊 十照堆 第色極 彩射 ，狀Page 480536 The diagram briefly explains the flat blue plate and flat cover with green cover, and the bright-colored and bright-painted hair sprayer, which emits light according to the color portion of the color map; In the drawing, go to Wuping cloth, paint the smooth surface Minai ;; The plate is flat, the flat edge of the edge of the device is absolutely illuminated, the color is emitted, the field pattern is shown, and the face is flat. The shot tube Amitsu Naina includes the blue package and the green photo, the color red color, the color surface of Yan Ping's Benben hair base; this picture shows the meaning of the three meanings, as shown above. The first pole of the piece-shaped seven-element figure is shot in the photoresistance and color to emit cloth. The flat picture of the field-type fluorescent screen is placed on the pile plate. The flat shot is 1 | The shape of the flat surface is the flat cover of the curved upper part of the eighth coating phase. The flat cover is a blocker to block the light. The color-repellent cloth is colored and the light is emitted. Bright color blue and green Isil ?; The first surface of the nine red pictures is a flat one source-shaped light curve curved blue And six green color table shown, FIG red color surface color level of the color of the present embodiment in the group administered live dagger center of real hair out of two of the present device. Figure shot stack Shizhaodui No. Color pole Color shot
第30頁 480536 圖式簡單說明 主要部分之代表符號： 1 〇場發射顯示器 1 2光阻層 1 4玻璃底材 1 6絕緣層 1 8金屬閘極 2 0金屬微尖端 2 2陰極結構 2 6發射電子 2 8陽極 丨g 3 0場發射顯示器結構 3 2磷粒子 3 4銦氧化錫層 3 6玻璃平板 3 8側壁面板 4 0場發射彩色顯示器 4 2底層玻璃平板 4 4頂層玻璃平板 4 6銀膠塗佈去光阻 4 8姻氧化錫層 5 0凹洞 5 2奈米管射極層 5 6射極堆疊 60螢光粉末塗佈去光阻Page 30 480536 Schematic representation of the main symbols: 1 〇 field emission display 1 2 photoresist layer 1 4 glass substrate 1 6 insulation layer 1 8 metal gate 2 0 metal microtip 2 2 cathode structure 2 6 emission Electronics 2 8 anode 丨 g 3 0 field emission display structure 3 2 phosphor particles 3 4 indium tin oxide layer 3 6 glass plate 3 8 side wall panel 4 0 field emission color display 4 2 bottom glass plate 4 4 top glass plate 4 6 silver glue Photoresist removal 4 8 tin oxide layer 5 0 recess 5 2 nanometer emitter layer 5 6 emitter stack 60 fluorescent powder removal photoresist
第31頁 480536 圖式簡單說明 6 2螢光粉末塗佈去光阻 6 4螢光粉末塗佈去光阻 7 0彎取形狀塗佈去光阻 7 2黑色矩陣層 8 0條狀區段 8 2頂部面積 8 4底部面積 1 0 0綠色螢光塗佈去光阻 I 0 2藍色螢光塗佈去光阻 參 II 0過濾元件 I 1 2紅色濾光器 II 4綠色濾光器 1 1 6藍色濾光器 120白色光源 1 2 2背光源元件 1 2 4光源 1 2 6光源 1 2 8光源 1 3 0彩色濾光器 1 3 2彩色濾光器 1 3 4彩色濾光器 1 4 0底板 1 5 6彎曲形狀射極堆疊 1 5 8彎曲形狀射極堆疊Page 31 480536 Brief description of the drawing 6 2 Fluorescent powder coating to remove photoresist 6 4 Fluorescent powder coating to remove photoresist 7 0 Curved shape coating to remove photoresist 7 2 Black matrix layer 8 0 Strip section 8 2 Top area 8 4 Bottom area 1 0 0 Green fluorescent coating to remove photoresistance I 0 2 Blue fluorescent coating to remove photoresistance parameter II 0 Filter element I 1 2 Red filter II 4 Green filter 1 1 6 blue filter 120 white light source 1 2 2 backlight source 1 2 4 light source 1 2 6 light source 1 2 8 light source 1 3 0 color filter 1 3 2 color filter 1 3 4 color filter 1 4 0 base plate 1 5 6 curved shape emitter stack 1 5 8 curved shape emitter stack
第32頁 480536 圖式簡單說明 16 0彎曲 16 2電極 1 6 4電極 1 6 6電極 17 0空間 1 8 0時間 1 8 2時間 1 8 4時間 19 0平面 1 9 2紅色 1 9 4綠色 19 6藍色 1 9 8紅色 2 4 0遮蓋 2 5 6彎曲 2 5 8彎曲 2 6 0彎曲 2 7 0空間 形狀射極堆疊 連續軌跡 連續軌跡 連續執跡 式場發射照射器 彎曲形狀射極堆疊 彎曲形狀射極堆疊 彎曲形狀射極堆疊 彎曲形狀射極堆疊 板 形狀螢光塗佈去光阻 形狀螢光塗佈去光阻 形狀螢光塗佈去光阻Page 32 480536 Simple illustration of the drawing 16 0 Bend 16 2 Electrode 1 6 4 Electrode 1 6 6 Electrode 17 0 Space 1 8 0 Time 1 8 2 Time 1 8 4 Time 19 0 Plane 1 9 2 Red 1 9 4 Green 19 6 Blue 1 9 8 Red 2 4 0 Cover 2 5 6 Bend 2 5 8 Bend 2 6 0 Bend 2 7 0 Space shape emitter stacking continuous trajectory continuous track continuous track type field emission illuminator curved shape emitter stacked curved shape emitter Stacked curved shape emitter Stacked curved shape emitter stacked plate shape Fluorescent coating to remove photoresistance shape Fluorescent coating to remove photoresistance shape Fluorescent coating to remove photoresistance
第33頁Page 33
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW89126713A TW480536B (en) | 2000-12-14 | 2000-12-14 | Flat panel color illuminator having vacuum nanotube emitter and the manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW89126713A TW480536B (en) | 2000-12-14 | 2000-12-14 | Flat panel color illuminator having vacuum nanotube emitter and the manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW480536B true TW480536B (en) | 2002-03-21 |
Family
ID=21662315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW89126713A TW480536B (en) | 2000-12-14 | 2000-12-14 | Flat panel color illuminator having vacuum nanotube emitter and the manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW480536B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI404449B (en) * | 2004-03-25 | 2013-08-01 | Pureron Japan Co Ltd | Lighting device |
-
2000
- 2000-12-14 TW TW89126713A patent/TW480536B/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI404449B (en) * | 2004-03-25 | 2013-08-01 | Pureron Japan Co Ltd | Lighting device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6426590B1 (en) | Planar color lamp with nanotube emitters and method for fabricating | |
| US6448709B1 (en) | Field emission display panel having diode structure and method for fabricating | |
| TW498380B (en) | An electron releasing device, a production method thereof and an image display apparatus using the device | |
| JP4069532B2 (en) | Carbon ink, electron-emitting device, method for manufacturing electron-emitting device, and image display device | |
| US6445122B1 (en) | Field emission display panel having cathode and anode on the same panel substrate | |
| US6541906B2 (en) | Field emission display panel equipped with a dual-layer cathode and an anode on the same substrate and method for fabrication | |
| JP5153772B2 (en) | Liquid crystal display with field emission backlight | |
| JP2002343280A (en) | Display unit and method of manufacturing the same | |
| TWI278891B (en) | Carbon nano-tube field emission display having strip shaped gate | |
| US6486599B2 (en) | Field emission display panel equipped with two cathodes and an anode | |
| EP2079095A1 (en) | Field emission display | |
| TW483015B (en) | Field emission cathode electron emission device and electron emission device manufacturing method | |
| TW200425208A (en) | Manufacturing process of carbon nanotube field emission transistor | |
| US6750617B2 (en) | Field emission display device | |
| JP3582410B2 (en) | Electron emitting device and method of manufacturing the same | |
| TW480536B (en) | Flat panel color illuminator having vacuum nanotube emitter and the manufacturing method thereof | |
| KR100351068B1 (en) | field emission display and manufacturing method thereof | |
| US6750616B2 (en) | Field emission display device | |
| TWI259493B (en) | Planar light unit using field emitters and method for fabricating the same | |
| JP3674844B2 (en) | Field emission display panel having cathode and anode on same substrate and method for manufacturing the same | |
| TW483016B (en) | Manufacturing method of electron emitter stack and structure of field emission display | |
| JP2005116469A (en) | Cold-cathode field electron emission element and manufacturing method of the same | |
| TWI272870B (en) | Field emission display device | |
| TW529050B (en) | Field emission display having diode structure and the manufacturing method thereof | |
| TW486708B (en) | Field emission display panel having cathode and anode on the same substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |