經濟部智慧財產局員工消費合作社印製 五、發明説明（） 〔發明之領域〕 本發明係關於依馬達等的回轉驅動裝置來驅動多軸壓 送型幫浦，而實施泵唧作用的幫浦裝置。 〔習用技術〕 在市售的幫浦裝置爲2軸壓送型幫浦和馬達成一體之型 式。在此，2軸壓送型幫浦中，其外殼內形成至少有一個 具有吸氣口及排氣口之幫浦室。在一或多個幫浦室內配 置以2個成爲1組的轉子，各轉子被裝設於互相平行的2 支軸上，並且互相保持微小間隙而回轉•在單段的2軸 壓送型幫浦的外殼上，開設有幫浦室的吸氣口，並且亦 開設有排氣口。在多段的2軸壓送型幫浦的外殻上，最 前段的幫浦室上開設有吸氣口，在前段的幫浦室和後段 的幫浦室之間形成軸比較長的長隔壁，前段幫浦室之排 氣口約環繞此隔壁內大致180,並依序地和後段的幫浦室 的吸氣口連接，最後段的幫浦室則開設有排氣口。而且 ，在2軸壓送型幫浦的各軸的一側，與從馬達的驅動本 體突出而做回轉驅動用的驅動軸連結。然後，在和馬達 的驅動軸連接的2軸壓送型幫浦的一側之軸的前端上， 固定著驅動齒輪，此驅動齒輪與2軸壓送型幫浦的另一 側的軸之前端上固定的從動齒輪嚙合，而傳遞轉動。 使用這種幫浦裝置而將某個室內抽真空以作爲減壓室 時，使2軸壓送型幫浦的吸氣口在此室內開設，同時使 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標牟（CNS ) Α4規格（210Χ297公釐） 4 6 63 0 4 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（） 排氣口開放於大氣等。然後，由馬達驅動2軸壓送型幫 浦。據此，各轉子在2軸壓送型幫浦的幫浦室內互相保 持微小的間隙而回轉，因此在2軸壓送型幫浦的幫浦室 內實施泵啷作用，將室內的空氣放出到大氣等’而將其 室內作爲減壓室。 〔發明欲解決之課題〕 但，在上述習用幫浦裝置’與馬達的驅動軸連接的2軸 壓送型幫浦的一方的軸的前端上固定著驅動齒輪’藉由 此驅動齒輪和固定於2軸壓送型幫浦的他方的軸前端的 從動齒輪嚙合，將驅動軸的回轉傳達於魯氏幫浦的各軸 。因此，在這種幫浦裝置中，驅動齒輪及從動齒輪以潤 滑油實施潤滑不可或缺，爲防止潤滑油的污染，必需使 容納驅動齒輪及從動齒輪的齒輪室內保持高密閉性，因 此造成製造成本的高漲。而且，由於潤滑油因摩擦熱而 減少，或容易劣化等，因此潤滑油的添加，更換等的維 護不可缺少，導致維護成本的高漲。並且，對於驅動齒 輪及從動齒輪而言，因這些直接嚙合而傳達回轉之故， 而不得不採用較厚之設計，所以在齒輪室需要某程度的 軸長而增大了全長，故亦造成設置場所（底部空間）的大型 化的問題。而且，在驅動齒輪和從動齒輪的嚙合容易發 生噪音，也有安靜性的問題。 本發明係鑑於上述習知技術之實際情況，其解決課題在 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標牟（CNS ) A4規格（210X297公釐） A7 4 6 63 04 B7 五、發明説明（) 提供一種幫浦裝置，其製造成本及維護成本低廉，並且 設置場所減少，而且安靜度優良。 〔爲解決課題之裝置〕 本發明的幫浦裝置，係具備吸氣口及排氣口之至少1個 幫浦室的外殼，和具有配置於該幫浦室內，並具裝設於 互相平行的多數個軸上，互相保持微小的間隙而回轉之 轉子的多軸壓送型幫浦， 以及具有鄰接於該多軸壓送型幫浦而裝設之驅動本體 ，和從該驅動本體突出而轉動之驅動軸的回轉驅動裝置 » 以及固定於該回轉驅動裝置之該驅動軸的驅動回轉體 ，及固定於該多軸壓送型幫浦各該軸的從動回轉體，及 具有捲繞於該驅動回轉體及該從動回轉體，使該驅動回 轉體的回轉傳遞到該從動回轉體的捲繞媒介體的捲繞傳 動列爲其特徵。 在本發明的幫浦裝置，驅動回轉體的回轉由捲繞媒介體 而傳送到從動回轉體，使驅動軸的回轉可傳送到多軸壓 送型幫浦的各軸。由於在本發明的幫浦裝置中，不採用 習用驅動齒輪及從動齒輪中不可缺少之潤滑油的潤滑， 因此不必擔心潤滑油的污染。所以，對於容納具有驅動 回轉體，從動回轉體及有捲繞之媒介體之捲繞傳動列的 傳動室中，可省略〇環等，不需要使傳動室內的密封性 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） I ----：-----V 乂------訂------味 t (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 4 6 63 04 A7 經濟部智慧財產局員工消費合作社印製 B7五、發明説明（） 維持很高。而且，未必需要潤滑油的添加，更換等的維 護。並且，由於以捲繞之媒介體傳遞轉動之故，對驅動 回轉體及從動回轉體而言可採用肉厚較薄者，因此傳動 室的短軸化從而全長的短軸化可實現。而且，因爲經由 捲繞傳動軸之故，使提供驅動力的驅動回轉體和接受驅 動力的從動回轉體並不直接嚙合，較不容易發生噪音。 因此，本發明的幫浦裝置，可實現製造成本及維護成本 的低廉化，可謀求設置場所的減少，而且成爲安靜性優 良者。 在本發明的幫浦裝置中，最好將驅動回轉體固定於多軸 壓送型幫浦的各軸中的一個。由於可減少零件數量，因 此可將幫浦裝置的製造成本加以更低廉化。 而且，在本發明的幫浦裝置中，最好採用可節距傳動者 作爲捲繞傳動列。對於可節距式傳動（pitch transmission) 的捲繞傳動列而言，可採用作爲驅動回轉體及從動回轉 體的齒形輪，和作爲捲繞媒介體的齒形傳動皮帶（定時皮 帶），或採用作爲驅動回轉體及從動回轉體的鏈輪，和作 爲捲繞媒介體用的鏈條。因此，和採用作爲驅動回轉體 及從動回轉體的皮帶輪及作爲捲繞媒介體的平皮帶比較 ，沒有滑動，且可平順地進行泵唧作用。 並且，在本發明的幫浦裝置中，最好使驅動回轉體及從 動回轉體爲塑膠製，而捲繞媒介體爲橡膠製。由於不產 {請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 4 6 63 04 A7 B7__ 五、發明説明（） 生金屬之間的帶動，因此不需要潤滑油’同時可更減少 噪音。 (請先閱讀背面之注意事項再填寫本頁) 而且，在本發明的幫浦裝置中’最好在多軸壓送型幫浦 和回轉驅動裝置之間裝設捲繞之傳動列。在此幫浦裝置 中，因轉動裝置的驅動軸之回轉是經由捲繞傳動列傳送 到多軸壓送型幫浦的各軸，因而在多軸壓送型幫浦的各 軸上不容易發生扭曲變形的影響，在幫浦室內確實地使 轉子轉動而可平順地進行泵_作用。 並且，在本發明的幫浦裝置中，幫浦室有多數個時，最 好最前段的幫浦室旳吸氣口係在從捲繞傳動列最遠的位 置上開設，最後段的幫浦室的排氣口則在最接近捲繞傳 動列的位置上設開口較佳。如果是這樣，最前段的幫浦 室開設有吸氣口之室內等，由於捲繞傳動列而使異物不 易飛散。而且，即使只使用微小的潤滑油時，其潤滑油 仍然不容易飛散於最前段的幫浦室開設有吸氣口的室內 等。因此，可適當地維持其室內等的環境。 〔發明之實施形態〕 經濟部智慧財產局8工消资合作社印製 下面將參照圖面說明本發明具體化的實施形態。 在此多段幫浦裝置中，如第1圖所示，作爲多段多軸壓 送型幫浦的多段魯氏（Roots)幫浦P由作爲回轉驅動裝置 的馬達Μ形成一體。於是，在多段魯氏（Roots)幫浦p中 ，使第1〜6缸體1〜6經由0環而依序地積層，這些和 本紙悵尺度適用中國國家標率（CNS ) A4規格（2!0X297公董） 4 6 63 04 A7 __ B7 五、發明説明（） (請先閲讀背面之注意事項再填寫本頁) 裝設於第1缸體1側的前面板lc同時依未圖示的貫通螺 栓連接。由這些第1~6缸體1~6及前面板lc構成外殻的 一部份。 在第1~5缸體1~5中分別成水平的兩個軸孔在上下互相 平行地貫設著，在各軸孔中容納著第1軸7及第2軸8。 在第1缸體1的各軸孔內裝設有支持著第1、2軸7、8 所用的軸承裝置la、lb，這些則由前面板lc包覆起來。 如第2圖中亦顯示，在第2缸體2中，從後方凹設有1 個幫浦室2a，在幫浦室2a的周圍凹設有用來容納上述0 環的溝。在幫浦室2a內，配置著裝設在位於下方第1軸 7的第1轉子9,和裝設在位於上方第2軸8的第2轉子 10。第1、2轉子9、10互相保持微小的間隙而回轉。在 第2缸體2上，有水平貫穿而與幫浦室2a連通，由於第 1、2轉子9、10的回轉而吸入空氣用的吸氣口 2b，和排 出空氣用的排氣口 2c。 經濟部智慧財產局員工消費合作社印製 第1圖所示的第4缸體4，如第4圖所示，亦從後方凹 設一個同樣的幫浦室4a，在幫浦室4a內配置同樣的第1 、2轉子11、12。而且，在第4缸體4中，有水平貫穿的 同樣之吸氣口 4b及排氣口 4c。但是，由於第2缸體2之 故而使前段幫浦室2a的軸長，比由於第4缸體4之故而 使後段幫浦室4a的軸長爲長。而且，與這些各個幫浦室 2a、4a的軸長配合的第1、2轉子9〜12的軸長也不同》 本紙張尺度適用中國國家標隼（CNS ) A4規格（210X297公釐） 4 6 63 04 A7 B7___ 五、發明説明（） 在第1圖所示的第3缸體3上，如第3圖所示’有水平 貫穿的空氣通路3a。 在第1圖所示的第5缸體5之各軸孔內，裝設有支持著 第1、2軸7、8所用的軸承裝置5a、5b。 如第1及5圖所示，在第6缸體6中，從後方凹設有 傳動室6a。在傳動室6a內，做爲驅動回轉體用的塑膠製 驅動輪21固定在第1軸7上，做爲從動回轉體用的塑膠 製從動輪22固定在第2軸8上。驅動輪21及從動輪22 ，在第1、2軸7、8之間具有未圖示的螺栓，由這些螺栓 而可調整軸向的位置。而且，在第5缸體5和第6缸體6 之間，與第1、2軸7、8平行地裝設有第3軸20,在第5 、6缸體5、6內，其兩端由圖中未示的軸承裝置支持者 。在此第3軸20上，固定著塑膠製的空轉輪23。這些驅 動輪21，從動輪22及空轉輪23係分別爲同樣的節距的 齒形輪。捲繞在驅動輪21及空轉輪23之外側捲繞有做爲 捲繞媒介部用的橡膠製計時皮帶24,在其計時皮帶24的 外側上裝設有從動輪22。此計時皮帶24係在表裡設有與 驅動輪21等同一節距的齒。因此，驅動輪21和空轉輪 23由於計時皮帶24而可朝同一方向回轉，而從動輪22 則與這些驅動輪21及空轉輪23朝相反方向回轉。由這些 驅動輪21，從動輪22，空轉輪23及計時皮帶24構成捲 繞傳動列。 本紙張尺度適用中國國家標隼（CNS ) A4規格（210 X 297公釐） ---------VL______丁____^___象 、τ '· (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作杜印製 4 6 63 04 經濟部智慧財產局員工消費合作社印敦 A7 B7___五、發明説明（） 而且，如第1圖所示，在第6缸體6上，以未圖示的 螺栓而將馬達Μ的驅動本體30固定著，第1軸7係從 驅動本體30突出，而與回轉驅動的馬達Μ之驅動軸由未 圖示的接頭而連接。 然後，如第6圖所示，在第2〜4缸體2〜4的側面上’ 也如第2〜4圖所示一般，經由墊片18-19，以未圖示的 螺栓而與第1、2板16、17連接。由這些第1、2板16、 1 7構成外殻的其餘部份。 如第2圖、第3圖及第6圖所示，在第2板17上水平 地貫穿有和第2缸體2的吸氣口 2b相連通的吸氣口 17a ，在第1板16上凹設有和第2缸體2之排氣口 2c，及第 3缸體3之空氣通路3a相連通的連通溝16a»而且，如第 3圖、第4圖及第6圖所示，在第2板17上凹設有和第3 缸體3之空氣通路3a，及第4缸體4之吸氣口 4b相連通 的連通溝17b，在第1板16上水平地貫穿有和第4缸體4 之排氣口 4c相連通的排氣口 16b。 使用如以上構成之多段幫浦裝置，用來將某室內抽真空 而欲作爲減壓室時，在多段魯氏（Roots)幫浦P中，如第6 圖所示，經由軟管等而使第2板17的吸氣口 17a開設於 其室內，同時經由軟管等而使第1板16的排氣口 16b開 放到大氣等°然後，由馬達Μ驅動多段魯氏（Roots)幫浦 。由於第1、2轉子9〜12在多段魯氏幫浦P的各幫浦室 -10- {請先聞讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 4 6 63 04 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（） 2a、4a內，彼此僅保持微小的間隙而回轉，因此在各幫 浦室2a、4a內依序地實施泵唧作用，可將其室內的空氣 放出於大氣等，所使室內可成爲減壓室。 其間，在此多段幫浦裝置中，採用塑膠製的驅動輪21 及從動輪22和橡膠製的計時皮帶24，由時間皮帶24將 驅動輪21的回轉傳達到從動輪22,而使馬達Μ的驅動軸 的回轉可傳達到多段魯氏（Roots)幫浦ρ的第1、2軸7、8 。因此，在此多段幫浦裝置中，不需要潤滑油之故，因 而傳動室6a亦可省略0環等，故不需要將其傳動室6a 內的密閉性保持很高。而且也不需要潤滑的添加，更換 等的維修。而且，因經由計時皮帶24傳達轉動，而可採 用厚度較薄的設計做爲驅動輪21及從動輪22，因而可實 現從傳動室6a的短軸化，從而到全長的短軸化。而且， 因經由計時皮帶24之故，使提供驅動力的驅動輪21和接 受驅動力的從動輪22並不直接嚙合，因而不會金屬物之 間的滑動，所以也不易發生噪音。 因此，此多段幫浦裝置，可實現製造成本及維護成本的 低廉化，可使設置場所的減少，而且安靜度很優良。 而且，在此多段幫浦裝置，由於將驅動輪21固定於多 段魯氏（Roots)幫浦P的第1軸7上，因此減少零件點數 ，可進一步地使多段幫浦裝置的製造成本更低廉化。 而且，在此多段幫浦裝置中，由於驅動輪21，從動輪22 -11 - ---------I------*#--.——^---^ (請先閱讀背面之注意事項再填寫本頁} 本紙張尺度適用中國國家襟準（CNS ) A4規格（2!〇X297公釐） 4 6 63 04 經濟部智慧財產局員工消費合作社印製 A7 B7___五、發明説明（） 及計時皮帶24可達成節距式之傳動，因此沒有滑動’ 可平順地實施泵啷作用。 並且，在此多段幫浦裝置中，由於在多段魯氏（Roots) 幫浦P和馬達Μ之間設置有傳動室6a，經由驅動輪21， 從動輪22及計時皮帶24將馬達Μ之驅動軸的轉動，傳 達到多段魯氏（Roots)幫浦Ρ的第1、2軸7、8上’因此 不容易在多段魯氏（Roots)幫浦P的第1、2軸7、8發生 扭曲的影響，因而轉子9〜12可在幫浦室2a、4a內確實 地轉動，並且平順地進行泵唧作用。 而且，在此多段幫浦裝置中，由於前段的幫浦室2a的 吸氣口 2b、17a在離傳動室6a最遠的位置上開設，後段 之幫浦室4a的排氣口 4c、16b在最接近傳動室6a的位置 上開設，因此前段幫浦室2a的吸氣口 2b、17a所開設的 室內，驅動輪21等磨損粉的異物不易飛散，可使室內的 環境維持舒適。 此外，本發明可將幫浦室作爲一個的單段幫浦裝置，或 作爲三個以上的多段幫浦裝置。而且，也可使用螺旋型 幫浦等來取代魯氏（Roots)幫浦，以做爲多軸壓送型幫浦 ύ 〔圖式之簡單說明〕 第1圖係實施形態的多段幫浦裝置的縱剖面圖。 第2圖係有關實施形態的多段幫浦裝置，係第1圖的Π -12- (請先閱讀背面之注意事項再填寫本頁) 訂 本紙張尺度適用中國國家標準（CNS ) Α4規格（2丨0Χ297公釐） A7 d 6 63 04 B7____ 五、發明説明（） -π箭頭符號剖面圖。 第3圖係有關實施形態的多段幫浦裝置，係第1圖的ΙΠ -1Π箭頭符號剖面圖。 第4圖係有關實施形態的多段幫浦裝置，係第1圖的IV -W箭頭符號剖面圖。 第5圖係有關實施形態的多段幫浦裝置，係第1圖的v -V箭頭符號剖面圖。 第6圖係實施形態的多段幫浦裝置的平面圖。 符號之說明 1〜6…第丨〜6缸體 1C…前面板 2a，4a_··幫浦室 2b,4b,17a…吸氣口 2c,4c, 16b …排氣口 7,8…第1，2軸 9〜12…第1，2轉子 16…第1板 1 7…第2板 21…驅動回轉體（驅動輪） 22…從動回轉體（從動輪） 23…空轉輪 24…捲繞媒介體（計時皮帶） -13- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁jPrinted by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (Field of Invention) The present invention relates to a pump that drives a multi-axis pressure-feed pump by a rotary drive device such as a motor, and performs a pumping action. Device. [Conventional Technology] The commercially available pump device is a two-axis pressure feed type pump and motor integrated. Here, in the biaxial pressure feed type pump, at least one pump chamber having an air inlet and an air outlet is formed in the housing. Two or more rotors are arranged in one or more pump chambers. Each rotor is installed on two parallel shafts and rotates with a slight gap between each other. • Single-axis two-axis pressure feed type The casing of the pump is provided with an air inlet of the pump chamber and an air outlet. On the casing of the multi-stage two-axis pressure-feed pump, a suction port is opened in the pump chamber at the front stage, and a long partition wall with a relatively long shaft is formed between the pump chamber at the front stage and the pump chamber at the rear stage. The exhaust port of the pump chamber in the front section surrounds approximately 180 in the next wall, and is sequentially connected with the suction port of the pump chamber in the rear section, and the exhaust chamber in the last section is provided with an exhaust port. In addition, one side of each shaft of the two-axis pressure feed type pump is connected to a drive shaft that protrudes from the drive body of the motor for rotational driving. Then, a driving gear is fixed to a front end of a shaft of one side of the two-axis pressure-feed pump connected to a drive shaft of the motor, and the drive gear is connected to a front end of the shaft of the other side of the two-axis pressure-feed pump. The upper fixed driven gear meshes and transmits rotation. When using this pump device to evacuate a certain room as a decompression chamber, open the suction port of the 2-axis pressure-feed pump in this room and use (Please read the precautions on the back before filling in this Page) This paper size is applicable to China National Standards (CNS) A4 specifications (210 × 297 mm) 4 6 63 0 4 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () The exhaust port is open to the atmosphere . Then, a 2-axis pressure feed type pump is driven by a motor. According to this, each rotor rotates while maintaining a slight gap with each other in the pump chamber of the biaxial pressure feed type pump. Therefore, a pumping action is performed in the pump chamber of the biaxial pressure feed type pump to release indoor air to the atmosphere. Wait 'and use the interior as a decompression chamber. [Problems to be Solved by the Invention] However, in the conventional pump device, a driving gear is fixed to the tip of one of the shafts of the two-axis pressure-feed pump connected to the driving shaft of the motor. The driven gear at the tip of the other shaft of the two-axis pressure-feed pump is meshed, and the rotation of the drive shaft is transmitted to each of the Roots pumps. Therefore, in such a pump device, it is indispensable to lubricate the driving gear and the driven gear with lubricating oil. In order to prevent the contamination of the lubricating oil, it is necessary to maintain a high airtightness in the gear chamber containing the driving gear and the driven gear. Causes high manufacturing costs. In addition, since lubricating oil is reduced due to frictional heat, or easily deteriorated, maintenance such as the addition and replacement of lubricating oil is indispensable, leading to high maintenance costs. In addition, for the driving gear and the driven gear, because of the direct meshing and transmission of rotation, a thicker design has to be adopted. Therefore, a certain degree of shaft length is required in the gear room to increase the total length, which also causes The problem of enlargement of installation place (bottom space). In addition, the meshing of the driving gear and the driven gear is prone to noise and has a problem of quietness. In view of the actual situation of the above-mentioned conventional technology, the present invention solves the problem (please read the precautions on the back before filling this page) The paper size is applicable to China National Standards (CNS) A4 specifications (210X297 mm) A7 4 6 63 04 B7 V. Description of the invention () A pump device is provided, which has low manufacturing cost and maintenance cost, reduced installation space and excellent quietness. [A device for solving the problem] The pump device of the present invention is a casing having at least one pump chamber having an air intake port and an air exhaust port, and a casing arranged in the pump chamber and installed in parallel to each other. A multi-axis pressure-feed pump with a rotor that rotates while maintaining a small gap with each other on a plurality of shafts, and a driving body provided adjacent to the multi-axis pressure-feed pump, and protruding from the drive body to rotate A rotary drive device of the drive shaft »and a drive rotary body of the drive shaft fixed to the rotary drive device, and driven rotary bodies fixed to each of the shafts of the multi-axis pressure feed type pump, and It is characterized by a winding drive train that drives the turning body and the driven turning body to transmit the turning of the driving turning body to the winding medium of the driven turning body. In the pump device of the present invention, the rotation of the driving slewing body is transmitted to the driven slewing body by the winding medium, so that the rotation of the driving shaft can be transmitted to each shaft of the multi-axis pressure feed type pump. Since the pump device of the present invention does not use the lubrication oil indispensable in the conventional driving gear and the driven gear, there is no need to worry about the pollution of the lubrication oil. Therefore, for a transmission room containing a winding drive train with a driving slewing body, a driven slewing body, and a winding medium body, o-rings and the like can be omitted, and it is not necessary to make the sealing inside the transmission room. Standard (CNS) A4 specification (210X297 mm) I ----: ----- V 乂 ------ Order ------ Taste (Please read the notes on the back before filling in this Page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 6 63 04 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs B7 V. Description of Invention () Maintained very high. Furthermore, maintenance such as the addition and replacement of lubricant is not necessarily required. In addition, since the rotation is transmitted by the wound medium, the driving slewing body and the driven slewing body can be thinner. Therefore, the transmission shaft can be shortened to shorten the entire length. Furthermore, since the drive revolving body that provides the driving force and the driven revolving body that receives the driving force are not directly meshed due to the winding of the transmission shaft, noise is less likely to occur. Therefore, the pump device of the present invention can reduce manufacturing costs and maintenance costs, reduce the number of installation places, and become a quieter person. In the pump device of the present invention, it is preferable that the driving slewing body is fixed to one of the axes of the multi-axis pressure feed type pump. Since the number of parts can be reduced, the manufacturing cost of the pump device can be reduced. Further, in the pumping device of the present invention, it is preferable to use a pitch drive as the winding drive train. For winding transmission trains with pitch transmission, toothed wheels as driving and driven rotating bodies, and toothed driving belts (timing belts) as winding media, Or use a sprocket as a driving slewing body and a driven slewing body, and a chain as a winding medium. Therefore, compared with the use of a pulley as a driving slewing body and a driven slewing body and a flat belt as a winding medium body, there is no slippage and smooth pumping can be performed. In the pump device of the present invention, it is preferable that the driving revolving body and the driven revolving body are made of plastic, and the winding medium is made of rubber. As it is not produced {Please read the precautions on the back before filling this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 4 6 63 04 A7 B7__ 5. Description of the invention () Driven, so no lubricant is needed 'while reducing noise even more. (Please read the precautions on the back before filling this page.) In the pump device of the present invention, it is preferable to install a winding drive train between the multi-axis pressure feed pump and the rotary drive device. In this pump device, the rotation of the drive shaft of the rotating device is transmitted to the shafts of the multi-axis pressure-feed pump through the winding drive train, so it is not easy to occur on the shafts of the multi-axis pressure-feed pump. The effect of twisting and distortion can surely rotate the rotor in the pump chamber and smoothly perform the pump action. In addition, in the pump device of the present invention, when there are a plurality of pump chambers, it is preferable that the pump chamber at the front stage is opened at the farthest position from the winding drive train, and the pump at the last stage is preferably opened. The exhaust port of the chamber is preferably provided with an opening at a position closest to the winding drive train. If this is the case, the frontmost pump room has a room with an air inlet, etc., and foreign objects are not easily scattered by winding the drive train. In addition, even when only a small amount of lubricating oil is used, the lubricating oil is not easily scattered in the front-end pump room where a suction port is provided. Therefore, the environment such as the room can be appropriately maintained. [Implementation Mode of the Invention] Printed by the Industrial and Commercial Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The embodiment of the present invention will be described with reference to the drawings. In this multi-stage pump device, as shown in Fig. 1, a multi-stage Roots pump P, which is a multi-stage multi-axis pressure feed type pump, is integrally formed by a motor M as a rotary drive device. Therefore, in the multi-stage Roots pump p, the 1st to 6th cylinder blocks 1 to 6 are sequentially laminated through the 0 ring. These and the paper scale are applied to the Chinese National Standard (CNS) A4 specification (2 ! 0X297 public director) 4 6 63 04 A7 __ B7 V. Description of the invention () (Please read the precautions on the back before filling this page) The front panel lc installed on the 1 side of the first cylinder block is also shown in the figure. Through bolt connection. The first to sixth cylinders 1 to 6 and the front panel lc constitute a part of the housing. Two shaft holes, which are horizontally formed in the first to fifth cylinder blocks 1 to 5, are arranged in parallel with each other up and down, and the first shaft 7 and the second shaft 8 are accommodated in the shaft holes. Bearings 1a, 1b for supporting the 1st, 2nd shafts 7, 8 are installed in each of the shaft holes of the first cylinder block 1, and these are covered by the front panel lc. As also shown in FIG. 2, in the second cylinder block 2, a pump chamber 2 a is recessed from the rear, and a groove for accommodating the above-mentioned 0 ring is recessed around the pump chamber 2 a. In the pump chamber 2a, a first rotor 9 installed on the lower first shaft 7 and a second rotor 10 installed on the upper second shaft 8 are arranged. The first and second rotors 9 and 10 rotate while maintaining a slight gap with each other. The second cylinder block 2 has a horizontal penetration through the pump chamber 2a, an intake port 2b for sucking in air due to the rotation of the first and second rotors 9, 10, and an exhaust port 2c for exhausting the air. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the fourth cylinder block 4 shown in Fig. 1. As shown in Fig. 4, a similar pump chamber 4a is also recessed from the rear, and the same is arranged in the pump chamber 4a. The first and second rotors 11,12. In addition, the fourth cylinder block 4 has the same intake port 4b and exhaust port 4c which penetrate horizontally. However, the shaft length of the front-stage pump chamber 2a due to the second cylinder block 2 is longer than the shaft length of the rear-stage pump chamber 4a due to the fourth cylinder block 4. In addition, the shaft lengths of the first and second rotors 9 to 12 that match the shaft lengths of these pump chambers 2a and 4a are also different. ”This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 4 6 63 04 A7 B7___ 5. Description of the invention () On the third cylinder block 3 shown in Fig. 1, as shown in Fig. 3, there is a horizontally penetrating air passage 3a. Bearing shafts 5a and 5b for supporting the first and second shafts 7, 8 are mounted in the shaft holes of the fifth cylinder block 5 shown in Fig. 1. As shown in Figs. 1 and 5, in the sixth cylinder block 6, a transmission chamber 6a is recessed from the rear. In the transmission chamber 6a, a plastic driving wheel 21 for driving the rotating body is fixed to the first shaft 7, and a plastic driven wheel 22 for driving the rotating body is fixed to the second shaft 8. The driving wheel 21 and the driven wheel 22 have bolts (not shown) between the first and second shafts 7, 8 and the axial position can be adjusted by these bolts. A third shaft 20 is installed between the fifth cylinder block 5 and the sixth cylinder block 6 in parallel with the first and second shafts 7, 8 and two of the fifth and sixth cylinder blocks 5 and 6 The end is supported by a bearing device not shown in the figure. A plastic idler wheel 23 is fixed to the third shaft 20. These driving wheels 21, driven wheels 22, and idler wheels 23 are toothed wheels each having the same pitch. A rubber timing belt 24 as a winding medium is wound around the driving wheels 21 and the idler wheels 23, and a driven wheel 22 is mounted on the outside of the timing belt 24. The timing belt 24 is provided with teeth having a pitch equivalent to that of the driving wheel 21 in the watch. Therefore, the driving wheel 21 and the idler wheel 23 can rotate in the same direction due to the timing belt 24, and the driven wheel 22 rotates in the opposite direction to these driving wheels 21 and the idler wheel 23. These driving wheels 21, driven wheels 22, idler wheels 23, and timing belt 24 constitute a winding drive train. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) --------- VL______ 丁 ____ ^ ___ Elephant, τ '· (Please read the precautions on the back first (Fill in this page again.) Du Yin printed by the Intellectual Property Bureau of the Ministry of Economic Affairs 4 6 63 04 Staff Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs of India A7 B7___ 5. Description of the invention () Moreover, as shown in Figure 1, 6 The cylinder 6 is fixed to the driving body 30 of the motor M with bolts (not shown). The first shaft 7 protrudes from the driving body 30, and the driving shaft of the motor M driven by rotation is connected by a joint (not shown). While connected. Then, as shown in Fig. 6, on the side surfaces of the second to fourth cylinder blocks 2 to 4, as shown in Figs. 2 to 4, as shown in Figs. 1, 2 boards 16, 17 are connected. These first and second plates 16, 17 constitute the remainder of the housing. As shown in FIG. 2, FIG. 3 and FIG. 6, an intake port 17 a communicating with the intake port 2 b of the second cylinder block 2 is horizontally penetrated through the second plate 17, and the first plate 16 is penetrated. A communication groove 16a communicating with the exhaust port 2c of the second cylinder block 2 and the air passage 3a of the third cylinder block 3 is recessed, and as shown in Figs. 3, 4 and 6, The second plate 17 is concavely provided with a communication groove 17b communicating with the air passage 3a of the third cylinder block 3 and the suction port 4b of the fourth cylinder block 4, and the first plate 16 is horizontally penetrated with the fourth groove. The exhaust port 16b of the cylinder block 4 communicates with the exhaust port 4c. When a multi-stage pump device configured as above is used to evacuate a certain room and it is intended to be used as a decompression chamber, in a multi-stage Roots pump P, as shown in FIG. The suction port 17a of the second plate 17 is opened in the room, and the exhaust port 16b of the first plate 16 is opened to the atmosphere through a hose or the like. Then, a plurality of Roots pumps are driven by the motor M. As the first and second rotors 9 to 12 are in the pump chambers of the multi-stage Lu's pump P-10- (Please read the precautions on the back before filling out this page) This paper size applies to China National Standard (CNS) A4 specifications (210X297 mm) 4 6 63 04 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention () 2a, 4a, with only a slight gap between each other and turning, so in each pump room 2a, 4a The pumping action is performed sequentially inside, and the air in the room can be released from the atmosphere, so that the room can be a decompression room. Meanwhile, in this multi-stage pumping device, a plastic driving wheel 21 and a driven wheel 22 and a rubber timing belt 24 are used. The time belt 24 transmits the rotation of the driving wheel 21 to the driven wheel 22, and the motor M The rotation of the drive shaft can be transmitted to the first and second shafts 7, 8 of the multi-stage Roots pump ρ. Therefore, in this multi-stage pumping device, no lubricant is needed, and therefore, the transmission chamber 6a can also omit 0 ring, etc., so it is not necessary to keep the airtightness in the transmission chamber 6a high. It also does not require maintenance such as adding or replacing lubrication. Furthermore, since the rotation is transmitted via the timing belt 24, a thin design can be adopted as the driving wheel 21 and the driven wheel 22, so that the short axis from the transmission room 6a can be realized, and the entire axis can be shortened. Furthermore, since the driving wheel 21 that supplies driving force and the driven wheel 22 that receives driving force are not directly meshed with each other via the timing belt 24, sliding between metal objects is prevented, and noise is less likely to occur. Therefore, this multi-stage pump device can reduce the manufacturing cost and maintenance cost, reduce the installation place, and have excellent quietness. Moreover, in this multi-stage pump device, since the driving wheel 21 is fixed to the first shaft 7 of the multi-stage Roots pump P, the number of parts is reduced, and the manufacturing cost of the multi-stage pump device can be further increased. Low cost. Moreover, in this multi-stage pumping device, due to the driving wheel 21 and the driven wheel 22 -11---------- I ------ * # --.—— ^ --- ^ ( Please read the notes on the back before filling in this page} This paper size is applicable to China National Standard (CNS) A4 (2! 〇X297 mm) 4 6 63 04 Printed by A7 B7___ V. Description of the invention () and timing belt 24 can achieve pitch-type transmission, so there is no sliding 'can smoothly perform pumping action. Also, in this multi-stage pump device, due to the multi-stage Roots pump A transmission room 6a is provided between P and the motor M, and the rotation of the driving shaft of the motor M is transmitted to the first and second shafts of the Roots pump P through the driving wheels 21, the driven wheels 22, and the timing belt 24. "7, 8" is therefore not easily affected by the distortion of the first and second shafts 7, 8 of the multi-stage Roots pump P. Therefore, the rotors 9 to 12 can be reliably rotated in the pump chambers 2a, 4a. In addition, in this multi-stage pumping device, the suction port 2b, 17a of the pump chamber 2a in the front stage is the distance from the transmission chamber 6a. The exhaust ports 4c, 16b of the pump chamber 4a in the rear section are opened at the position closest to the transmission chamber 6a. Therefore, the indoor openings of the intake ports 2b, 17a of the pump chamber 2a in the previous section are driven by the wheels 21 Foreign matter such as worn powder is not easy to fly away, which can maintain the indoor environment comfortable. In addition, the present invention can use the pump chamber as a single-stage pump device or as three or more multi-stage pump devices. Moreover, a spiral type can also be used. Pumps replace Roots pumps as multi-axis pressure feed pumps [Simplified description of the figure] Figure 1 is a longitudinal sectional view of a multi-stage pump device of an embodiment. Figure 2 It is a multi-stage pump device related to the implementation form, and it is Π -12- in Figure 1 (please read the precautions on the back before filling this page) The paper size of the book is applicable to China National Standard (CNS) Α4 specification (2 丨 0 × 297) (Centi) A7 d 6 63 04 B7____ 5. Explanation of the invention () -π arrow symbol cross-section. Figure 3 is a multi-stage pump device related to the embodiment, which is a cross-sectional view of arrow symbol Π-1 -1Π in Figure 1. Figure 4 Multi-stage pump equipment related to the implementation form , Is a cross-sectional view taken along the arrow IV-W in Fig. 1. Fig. 5 is a multi-stage pump device related to the embodiment, and is a cross-section taken along the v-V arrow symbol in Fig. 1. Fig. 6 is a multi-stage pump according to the embodiment. Plan view of the device. Explanation of the symbols 1 to 6 ... The first to sixth cylinders 1C ... Front panels 2a, 4a _... Pump chambers 2b, 4b, 17a ... Suction ports 2c, 4c, 16b ... Exhaust ports 7, 8 … The first and second shafts 9 to 12… the first and second rotor 16… the first plate 1 7… the second plate 21… the driving slewing body (drive wheel) 22… the driven slewing body (driven wheel) 23… the idler wheel 24… Rolling media (timing belt) -13- This paper size is applicable to China National Standard (CNS) A4 (210X297 mm)
，1T 經濟部智慧財產局員工消費合作社印製 4 6 63 04 A7 五、發明説明（） 30…驅動本體 Μ…回轉驅動裝置（馬達） Ρ…多段魯氏（Roots)幫浦 多段多軸壓送型幫浦 經濟部智慧財產局員工消費合作社印製 -14- (請先閱讀背面之注意事項再填寫本頁), 1T Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 6 63 04 A7 V. Description of the invention () 30 ... Driving body M ... Rotary drive device (motor) P ... Multi-stage Roots pump Multi-stage multi-axis pressure feed Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-14- (Please read the precautions on the back before filling this page)
本紙張尺度適用中國國家標準（CNS > A4規格（2丨0X297公釐）This paper size applies to Chinese national standards (CNS > A4 size (2 丨 0X297 mm)