TW358829B - A method of forming a polyimide coating, a polyimidesiloxane coating/pattern on the surface of a substrate - Google Patents
A method of forming a polyimide coating, a polyimidesiloxane coating/pattern on the surface of a substrateInfo
- Publication number
- TW358829B TW358829B TW085100120A TW85100120A TW358829B TW 358829 B TW358829 B TW 358829B TW 085100120 A TW085100120 A TW 085100120A TW 85100120 A TW85100120 A TW 85100120A TW 358829 B TW358829 B TW 358829B
- Authority
- TW
- Taiwan
- Prior art keywords
- forming
- dianhydride
- bis
- acid
- polyamic acid
- Prior art date
Links
- 239000004642 Polyimide Substances 0.000 title abstract 4
- 239000011248 coating agent Substances 0.000 title abstract 4
- 238000000576 coating method Methods 0.000 title abstract 4
- 229920001721 polyimide Polymers 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 229920005575 poly(amic acid) Polymers 0.000 abstract 4
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 abstract 3
- 239000002253 acid Substances 0.000 abstract 3
- 239000003960 organic solvent Substances 0.000 abstract 3
- -1 aryl dianhydride Chemical compound 0.000 abstract 2
- 150000004985 diamines Chemical class 0.000 abstract 2
- 239000000178 monomer Substances 0.000 abstract 2
- 125000005401 siloxanyl group Chemical group 0.000 abstract 2
- 239000007787 solid Substances 0.000 abstract 2
- DKKYOQYISDAQER-UHFFFAOYSA-N 3-[3-(3-aminophenoxy)phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=C(OC=3C=C(N)C=CC=3)C=CC=2)=C1 DKKYOQYISDAQER-UHFFFAOYSA-N 0.000 abstract 1
- OEJQEJBKJINOFJ-UHFFFAOYSA-N 4-(3,4-dihydroxyphenoxy)benzene-1,2-diol Chemical compound C1=C(O)C(O)=CC=C1OC1=CC=C(O)C(O)=C1 OEJQEJBKJINOFJ-UHFFFAOYSA-N 0.000 abstract 1
- NUSHXBRXMFIWKE-UHFFFAOYSA-N 4-[1-(4-aminophenoxy)-6-propylcyclohexa-2,4-dien-1-yl]oxyaniline Chemical compound CCCC1C=CC=CC1(OC=1C=CC(N)=CC=1)OC1=CC=C(N)C=C1 NUSHXBRXMFIWKE-UHFFFAOYSA-N 0.000 abstract 1
- PTJSLEDKKSNAPH-UHFFFAOYSA-N 4-[2-(3,4-dihydroxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]benzene-1,2-diol Chemical compound C1=C(O)C(O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(O)C(O)=C1 PTJSLEDKKSNAPH-UHFFFAOYSA-N 0.000 abstract 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 abstract 1
- FDLQZKYLHJJBHD-UHFFFAOYSA-N [3-(aminomethyl)phenyl]methanamine Chemical compound NCC1=CC=CC(CN)=C1 FDLQZKYLHJJBHD-UHFFFAOYSA-N 0.000 abstract 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 abstract 1
- 125000004432 carbon atom Chemical group C* 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 125000005313 fatty acid group Chemical group 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000000379 polymerizing effect Effects 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M1/00—Inking and printing with a printer's forme
- B41M1/12—Stencil printing; Silk-screen printing
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D179/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
- C09D179/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C09D179/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0387—Polyamides or polyimides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4867—Applying pastes or inks, e.g. screen printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
- H01L23/49894—Materials of the insulating layers or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Wood Science & Technology (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Paints Or Removers (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Inks, Pencil-Leads, Or Crayons (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/357,894 US5554684A (en) | 1993-10-12 | 1994-12-16 | Forming polyimide coating by screen printing |
Publications (1)
Publication Number | Publication Date |
---|---|
TW358829B true TW358829B (en) | 1999-05-21 |
Family
ID=23407466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085100120A TW358829B (en) | 1994-12-16 | 1996-01-06 | A method of forming a polyimide coating, a polyimidesiloxane coating/pattern on the surface of a substrate |
Country Status (8)
Country | Link |
---|---|
US (1) | US5554684A (zh) |
EP (1) | EP0800706B1 (zh) |
JP (1) | JP3145714B2 (zh) |
KR (1) | KR100256719B1 (zh) |
CN (1) | CN1094655C (zh) |
DE (1) | DE69506132T2 (zh) |
TW (1) | TW358829B (zh) |
WO (1) | WO1996019012A1 (zh) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3216849B2 (ja) * | 1993-11-26 | 2001-10-09 | セントラル硝子株式会社 | ポリイミド前駆体組成物、ポリイミド組成物およびその製造法 |
JP2928223B2 (ja) * | 1997-04-04 | 1999-08-03 | オクシデンタル ケミカル コーポレイション | 集積回路チップのサーキットリーへの結合方法 |
US6238223B1 (en) | 1997-08-20 | 2001-05-29 | Micro Technology, Inc. | Method of depositing a thermoplastic polymer in semiconductor fabrication |
KR100270406B1 (ko) * | 1998-05-08 | 2000-11-01 | 김충섭 | 다수의 지방족 고리구조를 포함하는 신규가용성 폴리이미드 수지 |
DE19910816A1 (de) * | 1999-03-11 | 2000-10-05 | Merck Patent Gmbh | Dotierpasten zur Erzeugung von p,p+ und n,n+ Bereichen in Halbleitern |
US6244274B1 (en) | 1999-07-30 | 2001-06-12 | Opi Products, Inc. | Thixotropic polymerizable nail sculpting compositions |
JP3765970B2 (ja) | 2000-07-12 | 2006-04-12 | ソニーケミカル株式会社 | エッチング液及びフレキシブル配線板の製造方法 |
FR2812224B1 (fr) * | 2000-07-27 | 2003-07-25 | Marquage Ind Soc | Procede pour deposer en continu une couche ou barriere de silicone sur un substrat et installation pour la mise en oeuvre de ce procede |
AUPR033400A0 (en) * | 2000-09-25 | 2000-10-19 | Kahn, Stephen R | Applied friction surface (afs) |
DE10104726A1 (de) | 2001-02-02 | 2002-08-08 | Siemens Solar Gmbh | Verfahren zur Strukturierung einer auf einem Trägermaterial aufgebrachten Oxidschicht |
US6770324B2 (en) | 2001-04-06 | 2004-08-03 | Kennedy Acquisition, Inc. | Method of forming a non-uniform, protective coating on a flexible substrate |
AU2003292790A1 (en) * | 2002-12-27 | 2004-07-29 | I.S.T Corporation | Polyimide precursor liquid composition and polyimide coating film |
DE10312628A1 (de) * | 2003-03-21 | 2004-10-07 | Friz Biochem Gmbh | Verfahren und Vorrichtung zum Benetzen eines Substrats mit einer Flüssigkeit |
KR100576357B1 (ko) * | 2003-10-21 | 2006-05-03 | 삼성전자주식회사 | 레졸을 함유하는 수지용액, 이를 사용하여 형성된열경화수지막 및 이를 사용하여 열경화수지막을 형성하는방법 |
CN100365158C (zh) * | 2004-08-17 | 2008-01-30 | 同济大学 | 超薄自支撑聚酰亚胺滤光薄膜的物理气相沉积制备方法 |
US7754108B2 (en) * | 2005-06-08 | 2010-07-13 | UBE Industires, Ltd. | Polyimide powder for antistatic polyimide molded product and polyimide molded product thereby |
US20070154716A1 (en) * | 2005-12-30 | 2007-07-05 | Saint-Gobain Performance Plastics Corporation | Composite material |
US20070154717A1 (en) * | 2005-12-30 | 2007-07-05 | Saint-Gobain Performance Plastics Corporation | Thermally stable composite material |
US20070152195A1 (en) * | 2005-12-30 | 2007-07-05 | Saint-Gobain Performance Plastics Corporation | Electrostatic dissipative composite material |
US20080224366A1 (en) * | 2005-12-30 | 2008-09-18 | Saint-Gobain Performance Plastics Corporation | Water resistant composite material |
JP4930143B2 (ja) * | 2006-06-29 | 2012-05-16 | Jnc株式会社 | 保護膜用組成物、カラーフィルター基板および液晶表示素子 |
JP5560562B2 (ja) * | 2008-06-23 | 2014-07-30 | デクセリアルズ株式会社 | シロキサンポリイミド樹脂の製造方法 |
CN101853761B (zh) * | 2010-06-09 | 2013-04-17 | 福州大学 | 用于三极式场发射阴极的无机绝缘膜和聚酰亚胺复合膜 |
WO2012057302A1 (ja) * | 2010-10-28 | 2012-05-03 | 株式会社カネカ | 導電性ポリイミドフィルムの製造方法 |
KR101397950B1 (ko) * | 2012-09-07 | 2014-05-27 | 피코맥스(주) | 연성인쇄회로기판 커버레이용 조성물 및 그 제조 방법 |
JP2015000939A (ja) * | 2013-06-14 | 2015-01-05 | ソマール株式会社 | 溶媒可溶型ポリイミド共重合体 |
DE102016106137B4 (de) * | 2016-04-04 | 2023-12-28 | Infineon Technologies Ag | Elektronikvorrichtungsgehäuse umfassend eine dielektrische Schicht und ein Kapselungsmaterial |
JP7111031B2 (ja) * | 2018-03-23 | 2022-08-02 | 信越化学工業株式会社 | 感光性樹脂組成物、感光性樹脂積層体、及びパターン形成方法 |
DE102019206559A1 (de) * | 2019-05-07 | 2020-11-26 | Aktiebolaget Skf | Imidzusammensetzung und Schutzmittelzusammensetzung mit der Imidzusammensetzung |
KR20230104059A (ko) | 2021-12-31 | 2023-07-07 | 한국전자기술연구원 | 백화 현상이 억제된 디스플레이 회로기판 인쇄용 투명폴리이미드 잉크와 그 제조방법, 이를 인쇄한 디스플레이 회로기판 및 이를 포함하는 디스플레이 패널 및 이를 적용한 전자기기 |
Family Cites Families (15)
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US3568012A (en) * | 1968-11-05 | 1971-03-02 | Westinghouse Electric Corp | A microminiature circuit device employing a low thermal expansion binder |
US4073788A (en) * | 1969-05-08 | 1978-02-14 | General Electric Company | Partially imidized polyamide-acid polymers, aqueous coating compositions, coated wire and method, and partially imidized intermediate |
US4369090A (en) * | 1980-11-06 | 1983-01-18 | Texas Instruments Incorporated | Process for etching sloped vias in polyimide insulators |
JPS5813088B2 (ja) * | 1981-02-27 | 1983-03-11 | 日東電工株式会社 | シロキサン変性ポリイミド前駆体の製造法 |
JPS59108068A (ja) * | 1982-12-11 | 1984-06-22 | Nitto Electric Ind Co Ltd | ペ−スト組成物 |
US4692272A (en) * | 1984-10-15 | 1987-09-08 | Stauffer Chemical Company | Thermally stable adhesive comprising soluble polyimide resin and epoxy resin |
EP0224680B1 (en) * | 1985-12-05 | 1992-01-15 | International Business Machines Corporation | Diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers |
JPS63226812A (ja) * | 1987-03-16 | 1988-09-21 | タムラ化研株式会社 | 印刷絶縁ペ−スト |
JPH01113434A (ja) * | 1987-10-27 | 1989-05-02 | Teijin Ltd | ポリイミド前駆体成形物の製造方法 |
US4829131A (en) * | 1988-02-09 | 1989-05-09 | Occidental Chemical Corporation | Novel soluble polymidesiloxanes and methods for their preparation and use |
JPH03157427A (ja) * | 1989-11-14 | 1991-07-05 | Sumitomo Bakelite Co Ltd | ポリイミド樹脂前駆体 |
JPH03197530A (ja) * | 1989-12-26 | 1991-08-28 | Sumitomo Bakelite Co Ltd | エマルジョンポリアミック酸樹脂組成物 |
JPH03227380A (ja) * | 1990-02-01 | 1991-10-08 | Toray Ind Inc | スクリーン印刷用インク |
AU7317191A (en) * | 1990-03-05 | 1991-10-10 | Olin Corporation | Method and materials for forming multi-layer circuits by an additive process |
US5317049A (en) * | 1993-06-21 | 1994-05-31 | Occidental Chemical Corporation | Polyimidesiloxane solution and method of coating substrates |
-
1994
- 1994-12-16 US US08/357,894 patent/US5554684A/en not_active Expired - Fee Related
-
1995
- 1995-12-15 KR KR1019970703993A patent/KR100256719B1/ko not_active IP Right Cessation
- 1995-12-15 DE DE69506132T patent/DE69506132T2/de not_active Expired - Fee Related
- 1995-12-15 WO PCT/US1995/016387 patent/WO1996019012A1/en active IP Right Grant
- 1995-12-15 EP EP95943835A patent/EP0800706B1/en not_active Expired - Lifetime
- 1995-12-15 JP JP51928696A patent/JP3145714B2/ja not_active Expired - Fee Related
- 1995-12-15 CN CN95196826A patent/CN1094655C/zh not_active Expired - Fee Related
-
1996
- 1996-01-06 TW TW085100120A patent/TW358829B/zh active
Also Published As
Publication number | Publication date |
---|---|
EP0800706B1 (en) | 1998-11-18 |
EP0800706A1 (en) | 1997-10-15 |
DE69506132T2 (de) | 1999-06-17 |
WO1996019012A1 (en) | 1996-06-20 |
CN1094655C (zh) | 2002-11-20 |
US5554684A (en) | 1996-09-10 |
KR100256719B1 (ko) | 2000-05-15 |
DE69506132D1 (de) | 1998-12-24 |
CN1170474A (zh) | 1998-01-14 |
JPH10502869A (ja) | 1998-03-17 |
KR980700686A (ko) | 1998-03-30 |
JP3145714B2 (ja) | 2001-03-12 |
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