TW338101B - Thermocouple of apparatus for manufacturing semiconductor device - Google Patents

Thermocouple of apparatus for manufacturing semiconductor device

Info

Publication number
TW338101B
TW338101B TW085110604A TW85110604A TW338101B TW 338101 B TW338101 B TW 338101B TW 085110604 A TW085110604 A TW 085110604A TW 85110604 A TW85110604 A TW 85110604A TW 338101 B TW338101 B TW 338101B
Authority
TW
Taiwan
Prior art keywords
thermocouple
semiconductor device
manufacturing semiconductor
insulator
metal wires
Prior art date
Application number
TW085110604A
Other languages
English (en)
Inventor
Jung Dong-Ok
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of TW338101B publication Critical patent/TW338101B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/04—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Control Of Combustion (AREA)
TW085110604A 1996-02-22 1996-08-30 Thermocouple of apparatus for manufacturing semiconductor device TW338101B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960004202A KR970063801A (ko) 1996-02-22 1996-02-22 반도체 소자 제조 장치의 열전대(thermocouple)

Publications (1)

Publication Number Publication Date
TW338101B true TW338101B (en) 1998-08-11

Family

ID=19451577

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085110604A TW338101B (en) 1996-02-22 1996-08-30 Thermocouple of apparatus for manufacturing semiconductor device

Country Status (4)

Country Link
US (1) US5868497A (zh)
JP (1) JPH09229779A (zh)
KR (1) KR970063801A (zh)
TW (1) TW338101B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0818671A3 (en) * 1996-07-12 1998-07-08 Isuzu Ceramics Research Institute Co., Ltd. A ceramic sheath type thermocouple
US6239432B1 (en) * 1999-05-21 2001-05-29 Hetron IR radiation sensing with SIC
US6995691B2 (en) * 2001-02-14 2006-02-07 Heetronix Bonded structure using reacted borosilicate mixture
US6713762B2 (en) 2001-07-16 2004-03-30 Heetronix Acoustic absorption electromagnetic radiation sensing with SIC
EP1303169A1 (de) * 2001-10-15 2003-04-16 Heraeus Sensor-Nite GmbH Temperatur-Sensor mit einem Sensor-Element sowie dessen Verwendung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2625573A (en) * 1950-02-13 1953-01-13 Maurice W Connell Bare wire thermocouple holder
US2999121A (en) * 1958-05-14 1961-09-05 Leeds & Northrup Co Fast acting totally expendable immersion thermocouple
US3232794A (en) * 1963-06-04 1966-02-01 Gen Electric Thermocouple probe
US3283580A (en) * 1963-09-24 1966-11-08 Nanmac Corp Fast response right angle thermocouple
FR1423845A (fr) * 1964-11-23 1966-01-07 Creusot Forges Ateliers Canne pyrométrique pour la mesure continue de la température de la fonte liquide
FR1459610A (fr) * 1965-04-12 1966-11-18 Electro Nite Engineering Co Détecteur de température combiné à un dispositif pour prélever un échantillon
US3501957A (en) * 1968-02-26 1970-03-24 Leeds & Northrup Co Expendable immersion thermocouple assembly and compensating circuit
LU57920A1 (zh) * 1969-02-04 1970-08-04
SU1173203A1 (ru) * 1973-04-10 1985-08-15 Finelonov Igor K Способ изготовлени термопары погружени дл измерени температуры металлических расплавов,преимущественно алюминиевых
US4018624A (en) * 1973-08-22 1977-04-19 Engelhard Minerals & Chemicals Corporation Thermocouple structure and method of manufacturing same
US4217463A (en) * 1978-03-13 1980-08-12 National Distillers And Chemical Corporation Fast responsive, high pressure thermocouple
US4752770A (en) * 1986-03-10 1988-06-21 General Electric Company Apparatus for monitoring temperatures of implements during brazing
US5520461A (en) * 1994-03-02 1996-05-28 Alliedsignal Inc. Airtight thermocouple probe

Also Published As

Publication number Publication date
JPH09229779A (ja) 1997-09-05
US5868497A (en) 1999-02-09
KR970063801A (ko) 1997-09-12

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees