TW356606B - Inductor for semiconductor device and method of making the same - Google Patents

Inductor for semiconductor device and method of making the same

Info

Publication number
TW356606B
TW356606B TW086117305A TW86117305A TW356606B TW 356606 B TW356606 B TW 356606B TW 086117305 A TW086117305 A TW 086117305A TW 86117305 A TW86117305 A TW 86117305A TW 356606 B TW356606 B TW 356606B
Authority
TW
Taiwan
Prior art keywords
inductor
semiconductor device
making
same
insulator layer
Prior art date
Application number
TW086117305A
Other languages
Chinese (zh)
Inventor
Tai-Foku Ri
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of TW356606B publication Critical patent/TW356606B/en

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

A kind of semiconductor device containing inductor, comprising: an insulator layer formed on a semiconductor substrate; a semi-circular columnar groove formed inside the insulator layer; and having formation of underlying conductive lines between the insulator layer and the groove, and thin-spring-shape inductor of upper conductive lines connected with the said underlying conductive lines.
TW086117305A 1996-11-19 1997-11-19 Inductor for semiconductor device and method of making the same TW356606B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR19960055392 1996-11-19

Publications (1)

Publication Number Publication Date
TW356606B true TW356606B (en) 1999-04-21

Family

ID=57940363

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086117305A TW356606B (en) 1996-11-19 1997-11-19 Inductor for semiconductor device and method of making the same

Country Status (1)

Country Link
TW (1) TW356606B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405643B2 (en) 2005-01-03 2008-07-29 Samsung Electronics Co., Ltd. Inductor and method of forming the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405643B2 (en) 2005-01-03 2008-07-29 Samsung Electronics Co., Ltd. Inductor and method of forming the same

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees