Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co LtdfiledCriticalSamsung Electronics Co Ltd
Application grantedgrantedCritical
Publication of TW356606BpublicationCriticalpatent/TW356606B/en
A kind of semiconductor device containing inductor, comprising: an insulator layer formed on a semiconductor substrate; a semi-circular columnar groove formed inside the insulator layer; and having formation of underlying conductive lines between the insulator layer and the groove, and thin-spring-shape inductor of upper conductive lines connected with the said underlying conductive lines.
TW086117305A1996-11-191997-11-19Inductor for semiconductor device and method of making the same
TW356606B
(en)