TW283797B - Multiple local oxidation of silicon - Google Patents

Multiple local oxidation of silicon

Info

Publication number
TW283797B
TW283797B TW83103191A TW83103191A TW283797B TW 283797 B TW283797 B TW 283797B TW 83103191 A TW83103191 A TW 83103191A TW 83103191 A TW83103191 A TW 83103191A TW 283797 B TW283797 B TW 283797B
Authority
TW
Taiwan
Prior art keywords
size
layer
opening
silicon
local oxidation
Prior art date
Application number
TW83103191A
Other languages
English (en)
Inventor
Cherng-Hann Hwang
Huoo-Tiee Lu
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW83103191A priority Critical patent/TW283797B/zh
Application granted granted Critical
Publication of TW283797B publication Critical patent/TW283797B/zh

Links

Landscapes

  • Element Separation (AREA)
  • Formation Of Insulating Films (AREA)
  • Local Oxidation Of Silicon (AREA)
TW83103191A 1994-04-11 1994-04-11 Multiple local oxidation of silicon TW283797B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83103191A TW283797B (en) 1994-04-11 1994-04-11 Multiple local oxidation of silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83103191A TW283797B (en) 1994-04-11 1994-04-11 Multiple local oxidation of silicon

Publications (1)

Publication Number Publication Date
TW283797B true TW283797B (en) 1996-08-21

Family

ID=51397821

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83103191A TW283797B (en) 1994-04-11 1994-04-11 Multiple local oxidation of silicon

Country Status (1)

Country Link
TW (1) TW283797B (zh)

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