TW202239724A - Method for producing glass film - Google Patents
Method for producing glass film Download PDFInfo
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- TW202239724A TW202239724A TW111103581A TW111103581A TW202239724A TW 202239724 A TW202239724 A TW 202239724A TW 111103581 A TW111103581 A TW 111103581A TW 111103581 A TW111103581 A TW 111103581A TW 202239724 A TW202239724 A TW 202239724A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
- B26F3/00—Severing by means other than cutting; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
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- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
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Abstract
Description
本發明是有關於一種玻璃膜的製造方法。The invention relates to a method for manufacturing a glass film.
玻璃膜為具有例如300 μm以下的厚度的薄板玻璃,慣例是於其製造步驟中包括為了自大板的母玻璃膜獲得玻璃膜而將母玻璃膜切斷成與玻璃膜相應的規定的大小的步驟。The glass film is a thin plate glass having a thickness of, for example, 300 μm or less, and it is customary to cut the mother glass film into a predetermined size corresponding to the glass film in order to obtain the glass film from a mother glass film of a large plate in the manufacturing process. step.
於此種切斷步驟中,使用雷射割斷(例如參照專利文獻1)。於雷射割斷中,首先,在母玻璃膜的切斷預定線(假想性地存在的線)的一端部形成初始裂紋。接下來,自玻璃膜的切斷預定線的一端部朝向另一端部依次對藉由雷射而受到加熱的加熱區域和與之相隨的藉由冷媒而受到冷卻的冷卻區域進行掃描。藉此,藉由因加熱區域與冷卻區域的溫度差而產生的熱應力,初始裂紋沿著切斷預定線進展,從而母玻璃膜被割斷(全體(full-body)切斷)。 [現有技術文獻] [專利文獻] In such a cutting step, laser cutting is used (for example, refer to Patent Document 1). In laser cutting, first, an initial crack is formed at one end of a line to cut (a virtual line) of the mother glass film. Next, the heated area heated by the laser and the accompanying cooled area cooled by the refrigerant are sequentially scanned from one end to the other end of the planned cutting line of the glass film. Thereby, the initial crack develops along the line to cut due to the thermal stress generated by the temperature difference between the heated region and the cooled region, and the mother glass film is cut (full-body cut). [Prior art literature] [Patent Document]
專利文獻1:日本專利特開2011-57494號公報Patent Document 1: Japanese Patent Laid-Open No. 2011-57494
[發明所欲解決之課題][Problem to be Solved by the Invention]
於藉由雷射割斷切斷母玻璃膜的情況下,切斷後的尺寸精度良好,但另一方面,耗費切斷時間,而且雷射或冷媒等切斷條件的調整需要大量人員。因此,存在玻璃膜的製造成本變高的問題。In the case of cutting the mother glass film by laser cutting, the dimensional accuracy after cutting is good, but on the other hand, it takes time to cut, and a large number of people are required to adjust cutting conditions such as laser or refrigerant. Therefore, there is a problem that the production cost of the glass film becomes high.
本發明的課題在於實現玻璃膜的製造成本的低廉化。 [解決課題之手段] The object of the present invention is to reduce the production cost of the glass film. [Means to solve the problem]
(1)為了解決所述課題而首創的本發明所涉及的玻璃膜的製造方法的特徵在於包括:準備母玻璃膜的準備步驟;沿著母玻璃膜的切斷預定線賦予彎曲應力來切斷母玻璃膜而獲得玻璃膜的切斷步驟;以及將玻璃膜重疊於具有基準大小的基準板,評價玻璃膜的大小的評價步驟。(1) The method of manufacturing a glass film according to the present invention, which was invented in order to solve the above-mentioned problems, is characterized by including: a preparation step of preparing a mother glass film; A cutting step of obtaining a glass film from a mother glass film; and an evaluation step of evaluating the size of the glass film by superimposing the glass film on a reference plate having a standard size.
若如此,則於切斷步驟中,母玻璃膜藉由彎曲應力而被切斷,因此與雷射割斷相比,可縮短切斷時間。另外,於切斷步驟中,由於不需要雷射等的調整,因此可用少的人員執行切斷。另一方面,於賦予彎曲應力進行切斷的情況下,與雷射割斷相比,切斷後的尺寸精度有變差的傾向。因此,於本申請案發明中,在評價步驟中,將玻璃膜重疊於基準板,評價玻璃膜的大小。若為使用此種基準板的評價方法,則可於短時間內效率良好地評價玻璃膜的大小。因此,即便玻璃膜中包含在評價步驟中大小被評價為不合格的不良品,亦可大幅削減製造時間或人員,因此就製造成本整體而言,與在切斷步驟中使用雷射割斷的情況相比,可實現低廉化。In this way, in the cutting step, the mother glass film is cut due to the bending stress, so that cutting time can be shortened compared with laser cutting. In addition, in the cutting step, since adjustments such as laser light are not required, cutting can be performed with a small number of people. On the other hand, in the case of cutting while applying a bending stress, the dimensional accuracy after cutting tends to deteriorate compared with laser cutting. Therefore, in the invention of this application, in the evaluation step, the glass film is overlaid on the reference plate, and the size of the glass film is evaluated. According to the evaluation method using such a reference plate, the size of the glass film can be efficiently evaluated in a short time. Therefore, even if the glass film includes a defective product whose size is evaluated as unacceptable in the evaluation step, the manufacturing time and personnel can be greatly reduced. In comparison, it can be reduced in cost.
(2)於所述(1)的結構中,亦可於準備步驟中,沿著自玻璃卷捲出的玻璃帶的切斷預定線賦予彎曲應力來切斷玻璃帶,獲得母玻璃膜。(2) In the configuration of (1) above, in the preparatory step, the glass ribbon may be cut by applying bending stress along the planned cutting line of the glass ribbon unwound from the glass roll to obtain a mother glass film.
若如此,則可自捲繞玻璃帶而成的玻璃卷效率良好地獲得母玻璃膜。If so, the mother glass film can be obtained efficiently from the glass roll which wound the glass ribbon.
(3)於所述(2)的結構中,較佳為於準備步驟中,使用玻璃帶切斷裝置切斷玻璃帶,所述玻璃帶切斷裝置包括:第一移送部,對自玻璃卷捲出的玻璃帶沿著朝向下游側向上方傾斜的第一移送面進行引導;第二移送部,於第一移送部的下游側,對玻璃帶沿著朝向下游側向下方傾斜的第二移送面進行引導;以及彎曲應力賦予部,於第一移送部與第二移送部之間的頂部自下方支撐玻璃帶,並沿著玻璃帶的切斷預定線賦予彎曲應力。(3) In the structure of (2), preferably, in the preparatory step, the glass ribbon cutting device is used to cut the glass ribbon, and the glass ribbon cutting device includes: The unwound glass ribbon is guided along the first transfer surface inclined upward toward the downstream side; the second transfer section is on the downstream side of the first transfer section, and guides the glass ribbon along the second transfer surface inclined downward toward the downstream side. and a bending stress imparting section that supports the glass ribbon from below at the top between the first transfer section and the second transfer section, and applies bending stress along the planned cutting line of the glass ribbon.
若如此,則仿效第一移送面及第二移送面的傾斜,對玻璃帶以切斷預定線為中心作用彼此相反的張力。該張力以切斷預定線向兩側擴展的方式發揮作用,因此與由彎曲應力賦予部賦予的彎曲應力一起,促進沿著切斷預定線的切斷。因此,能夠效率良好地切斷玻璃帶。If so, mutually opposite tension acts on a glass ribbon centering on a planned cutting line, following the inclination of a 1st transfer surface and a 2nd transfer surface. Since the tension acts to spread the line to cut to both sides, cutting along the line to cut is promoted together with the bending stress applied by the bending stress imparting portion. Therefore, the glass ribbon can be efficiently cut.
(4)於所述(3)的結構中,較佳為根據玻璃帶的厚度變更玻璃帶切斷裝置的彎曲應力賦予部的種類。(4) In the structure of said (3), it is preferable to change the kind of the bending stress applying part of a glass ribbon cutting device according to the thickness of a glass ribbon.
若如此,則可根據玻璃帶的厚度對玻璃帶賦予最佳的彎曲應力。If so, optimal bending stress can be given to a glass ribbon according to the thickness of a glass ribbon.
(5)於所述(1)至(4)中任一項的結構中,較佳為於切斷步驟中,使用母玻璃膜切斷裝置切斷母玻璃膜,所述母玻璃膜切斷裝置包括:載置台,載置母玻璃膜;定位部,將母玻璃膜相對於載置台定位;一對按壓構件,將母玻璃膜的切斷預定線的兩側向載置台側推壓;以及彎曲應力賦予部,於一對按壓構件之間對母玻璃膜向遠離載置台的方向進行按壓,並沿著母玻璃膜的切斷預定線賦予彎曲應力。(5) In the structure of any one of (1) to (4), preferably in the cutting step, a mother glass film cutting device is used to cut the mother glass film, and the mother glass film is cut The device includes: a mounting table, on which the mother glass film is placed; a positioning part, which positions the mother glass film relative to the mounting table; a pair of pressing members, pushes both sides of the planned cutting line of the mother glass film to the side of the mounting table; and The bending stress applying unit presses the mother glass film in a direction away from the mounting table between the pair of pressing members, and applies bending stress along the line to cut the mother glass film.
若如此,則母玻璃膜於由定位部定位的狀態下載置於載置台。而且,載置於載置台的母玻璃膜於由一對按壓構件按壓切斷預定線的兩側的狀態下,由彎曲應力賦予部向遠離載置台的方向(上方或下方)按壓,因此可沿著切斷預定線確實地賦予彎曲應力。因此,能夠效率良好地切斷母玻璃膜。In this way, the mother glass film is placed on the mounting table in a state where it is positioned by the positioning unit. In addition, since the mother glass film placed on the mounting table is pressed by the pair of pressing members on both sides of the planned cutting line, it is pressed in a direction (upward or downward) away from the mounting table by the bending stress imparting portion, so it can be moved along the Bending stress is reliably applied along the line to be cut. Therefore, the mother glass film can be cut efficiently.
(6)於所述(5)的結構中,較佳為根據母玻璃膜的厚度變更母玻璃膜切斷裝置的彎曲應力賦予部的種類。(6) In the configuration of (5) above, it is preferable to change the type of the bending stress imparting portion of the mother glass film cutting device according to the thickness of the mother glass film.
若如此,則可根據母玻璃膜的厚度對母玻璃膜賦予最佳的彎曲應力。In this way, optimal bending stress can be applied to the mother glass film according to the thickness of the mother glass film.
(7)於所述(5)或(6)的結構中,較佳為根據母玻璃膜的厚度變更母玻璃膜切斷裝置的按壓構件相對於載置台的位置,以便改變距母玻璃膜的切斷預定線的距離。(7) In the structure of (5) or (6), it is preferable to change the position of the pressing member of the mother glass film cutting device relative to the mounting table according to the thickness of the mother glass film so as to change the distance from the mother glass film. Cut off the distance of the intended line.
若如此,則可簡單且確實地調整沿著切斷預定線所賦予的彎曲應力的大小。In this way, the magnitude of the bending stress applied along the line to cut can be easily and reliably adjusted.
(8)於所述(1)至(7)中任一項的結構中,較佳為基準板於基準板的主表面的輪廓部的至少一部分具有有色的標記部。(8) In the configuration of any one of (1) to (7) above, it is preferable that the reference plate has a colored marking portion on at least a part of the contour portion of the main surface of the reference plate.
若如此,則藉由有色的標記部而容易掌握玻璃膜的端面的位置,因此能夠正確地評價玻璃膜的大小。因此,該結構於基準板包含透明材料的情況下尤其有效果。In this way, since the position of the end surface of the glass film can be easily grasped by the colored marking portion, the size of the glass film can be accurately evaluated. Therefore, this structure is particularly effective when the reference plate comprises a transparent material.
(9)於所述(1)至(8)中任一項的結構中,較佳為基準板具有玻璃板作為基材。(9) In the structure of any one of (1) to (8), it is preferable that the reference plate has a glass plate as a base material.
若如此,則難以產生基準板的尺寸變化或翹曲等,因此能夠正確地評價玻璃膜的大小。尤其是,就獲取容易等方面而言,基準板較佳為由與玻璃膜相同的母玻璃膜製造。This makes it difficult to cause dimensional changes, warping, and the like of the reference plate, so that the size of the glass film can be accurately evaluated. In particular, it is preferable that the reference plate is made of the same mother glass film as the glass film in terms of easy availability and the like.
(10)於所述(1)至(9)中任一項的結構中,較佳為基準板於與玻璃膜的接觸面側具有緩衝層。(10) In the structure of any one of the above (1) to (9), it is preferable that the reference plate has a buffer layer on the contact surface side with the glass film.
若如此,則重疊於基準板的玻璃膜難以受到損傷。In this way, the glass film superimposed on the reference plate is less likely to be damaged.
(11)於所述(1)至(10)中任一項的結構中,較佳為於評價步驟中,對將玻璃膜重疊於基準板而成的積層體的端面進行觸摸檢查。此處,觸摸檢查例如是藉由作業者的手指來進行。(11) In the structure of any one of said (1)-(10), it is preferable to perform a touch inspection on the end surface of the laminated body which laminated|stacked the glass film on the reference board in the evaluation process. Here, the touch inspection is performed, for example, by an operator's finger.
若如此,則可簡單且迅速地評價玻璃膜的大小。If so, the size of the glass film can be evaluated simply and quickly.
(12)於所述(1)至(11)中任一項的結構中,較佳為基準板及玻璃膜分別為矩形形狀,於評價步驟中,在將玻璃膜重疊於基準板而成的積層體的四邊中的在一個角部相交的兩邊,使基準板及玻璃膜分別與定位部抵接來進行定位,且於積層體的剩餘的兩邊,評價玻璃膜的大小。(12) In the structure of any one of (1) to (11), it is preferable that the reference plate and the glass film are each in a rectangular shape, and in the evaluation step, the glass film is stacked on the reference plate. Two sides intersecting at one corner among the four sides of the laminate were positioned by bringing the reference plate and the glass film into contact with the positioning part, and the size of the glass film was evaluated on the remaining two sides of the laminate.
若如此,則於積層體的兩邊,基準板及玻璃膜藉由與定位部抵接而被定位。即,於該積層體的兩邊,基準板的端面與玻璃膜的端面的位置經對齊。另一方面,於積層體的剩餘的兩邊,在基準體與玻璃膜的大小不同的情況下,基準板的端面與玻璃膜的端面的位置不同。因此,僅於積層體的剩餘的兩邊便可評價玻璃膜的大小。即,由於不需要將積層體的四邊全部設為評價對象,因此可迅速地評價玻璃膜的大小。In this way, on both sides of the laminate, the reference plate and the glass film are positioned by being in contact with the positioning portion. That is, on both sides of the laminated body, the positions of the end faces of the reference plate and the end faces of the glass film were aligned. On the other hand, on the remaining two sides of the laminate, when the size of the reference body and the glass film are different, the positions of the end surface of the reference plate and the end surface of the glass film are different. Therefore, the size of the glass film can be evaluated only on the remaining two sides of the laminate. That is, since all four sides of the laminate do not need to be evaluated, the size of the glass film can be quickly evaluated.
(13)於所述(1)至(12)中任一項的結構中,較佳為於評價步驟中,在玻璃膜大於基準板的情況下,當玻璃膜相對於基準板的伸出尺寸為第一合格臨限值以下時,將玻璃膜視為良品,在玻璃膜小於基準板的情況下,當基準板相對於玻璃膜的伸出尺寸為第二合格臨限值以下時,將玻璃膜視為良品,並且第一合格臨限值小於第二合格臨限值。(13) In the structure of any one of the above (1) to (12), preferably in the evaluation step, when the glass film is larger than the reference plate, when the projecting dimension of the glass film relative to the reference plate is When it is below the first acceptable threshold value, the glass film is regarded as a good product. The film is considered good and the first pass threshold is less than the second pass threshold.
若如此,則由於第一合格臨限值成為比第二合格臨限值嚴格的基準,因此可降低大於基準板的玻璃膜被視為良品的概率。因此,於在與基準板的大小對應的框部的內部配置被視為良品的玻璃膜來使用的情況下,容易配置玻璃膜。In this way, since the first pass threshold value becomes a stricter standard than the second pass threshold value, the probability that a glass film larger than the reference plate is regarded as a good product can be reduced. Therefore, when arranging and using a glass film regarded as a good product inside the frame portion corresponding to the size of the reference plate, the glass film can be easily arranged.
(14)於所述(1)至(13)中任一項的結構中,較佳為將於評價步驟中被視為良品的玻璃膜配置於與基準板的大小對應的成膜用夾具的框部的內部。(14) In the structure of any one of the above (1) to (13), it is preferable to place the glass film deemed good in the evaluation step on the film-forming jig corresponding to the size of the reference plate. The inside of the frame.
若如此,則由於可將玻璃膜確實地配置於成膜用夾具的框部的內部,因此可於玻璃膜正確地進行成膜。 [發明的效果] In this way, since the glass film can be reliably arranged inside the frame portion of the film-forming jig, it is possible to accurately form a film on the glass film. [Effect of the invention]
根據本發明,可實現玻璃膜的製造成本的低廉化。According to the present invention, it is possible to reduce the production cost of the glass film.
以下,參照隨附圖式對本發明的實施形態進行說明。Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
如圖1所示,本實施形態所涉及的玻璃膜的製造方法包括:準備步驟S1、切斷步驟S2、以及評價步驟S3。準備步驟S1、切斷步驟S2以及評價步驟S3較佳為於對溫度以及濕度進行了管理的處理室(例如潔淨室)內進行。As shown in FIG. 1 , the manufacturing method of the glass film according to this embodiment includes a preparation step S1 , a cutting step S2 , and an evaluation step S3 . The preparation step S1, the cutting step S2, and the evaluation step S3 are preferably performed in a processing room (for example, a clean room) in which temperature and humidity are managed.
(準備步驟)
如圖2~圖6所示,準備步驟S1為準備母玻璃膜MG的步驟,於本實施形態中,使用玻璃帶切斷裝置1。
(preparation steps)
As shown in FIGS. 2 to 6 , the preparation step S1 is a step of preparing the mother glass film MG, and in this embodiment, the glass
如圖2所示,玻璃帶切斷裝置1包括:玻璃卷2;以及切斷部3,僅切斷自玻璃卷2捲出的玻璃帶GR及保護帶PR中的玻璃帶GR。玻璃卷2搭載於藉由腳輪(caster)(省略圖示)而能夠移動的台車2v,切斷部3配備於藉由腳輪(省略圖示)而能夠移動的基台3v上。再者,於同圖中,方便起見,用實線描繪玻璃帶GR,用點劃線描繪保護帶PR。As shown in FIG. 2 , the glass
此處,玻璃帶GR中,厚度為300 μm以下、200 μm以下或者100 μm以下,寬度尺寸為100 mm~2000 mm或者500 mm~1000 mm。另外,保護帶PR包含樹脂或發泡樹脂,厚度為200 μm以下,寬度方向兩端自玻璃帶GR的寬度方向兩端伸出。Here, in the glass ribbon GR, the thickness is 300 μm or less, 200 μm or less, or 100 μm or less, and the width dimension is 100 mm to 2000 mm or 500 mm to 1000 mm. In addition, protective tape PR contains resin or foamed resin, has a thickness of 200 μm or less, and has both ends in the width direction protruding from both ends in the width direction of glass ribbon GR.
切斷部3具有作為彎曲應力賦予部的圓柱狀或圓筒狀的折割棒4。折割棒4固定設置於使用框構件3w而固定於基台3v上的支撐構件3x的上端。該情況下,折割棒4配置於比玻璃卷2中的玻璃帶GR及保護帶PR的捲出開始部2z高的位置。詳細而言,玻璃卷2的捲出開始部2z位於玻璃卷2的下端部。另外,玻璃卷2於保護帶PR捲掛於玻璃帶GR的外周側且玻璃帶GR重疊於保護帶PR上的狀態下被捲出。此外,折割棒4配置於比玻璃卷2的捲出開始部2z(嚴格來說,玻璃卷2成為最小徑時的捲出開始部2z)高的位置。兩帶GR、PR自玻璃卷2的捲出開始部2z架設到折割棒4。The cutting
進而,切斷部3具有:作為第一移送部的第一工作台5,配置於折割棒4的後方;以及作為第二移送部的第二工作台6,配置於折割棒4的前方。再者,於以下的說明中,所謂「後方」,是指被捲出的玻璃帶GR的移送方向的上游側,是紙面中的左側。另外,所謂「前方」,是指被捲出的玻璃帶GR的移送方向的下游側,是紙面中的右側。Furthermore, the cutting
如圖3及圖4所示,第一工作台5朝向前方上升傾斜,第二工作台6朝向前方下降傾斜。於圖例中,第一工作台5及第二工作台6自折割棒4稍微離開,但亦可與折割棒4接觸。另外,第一工作台5被固定設置,相對於此,第二工作台6能夠以折割棒4側的端部為支點自圖2中實線所示的定位置轉動到點劃線所示的位置。As shown in FIGS. 3 and 4 , the
玻璃帶GR於重疊於保護帶PR上的狀態下自玻璃卷2捲出。該捲出後的兩帶GR、PR(包括後述的藉由切斷而獲得的母玻璃膜MG)沿著作為第一工作台5的上表面的第一移送面5a、以及作為第二工作台6的上表面的第二移送面6a被移送。再者,所謂「沿著第一移送面5a、第二移送面6a」,並不限於沿著第一移送面5a、第二移送面6a的整個區域的情況,亦包含沿著第一移送面5a、第二移送面6a的一部分區域的情況。圖3例示了玻璃帶GR經切斷之前的狀態(圖2亦相同),於圖例中,兩帶GR、PR僅沿著第一移送面5a的前側區域。另外,關於第二移送面6a,保護帶PR沿著移送方向整個區域且玻璃帶GR僅沿著後側區域。再者,雖未圖示,但藉由切斷而獲得的母玻璃膜MG(詳細情況將於後述)沿著第二移送面6a的前側區域。於該實施形態的說明中,保護帶PR沿著第一移送面5a、第二移送面6a的情況與保護帶PR與第一移送面5a、第二移送面6a接觸的情況為相同含義。The glass ribbon GR is unwound from the
如圖3所示,第一移送面5a為朝向前方成為上斜坡的面,第二移送面6a為朝向前方成為下斜坡的面。例如,第一移送面5a相對於水平面的傾斜角度α1為20°~60°,第二移送面6a相對於水平面的傾斜角度α2為20°~60°。第二工作台6以可將第二移送面6a的傾斜角度α2於所述角度範圍內設定為任意角度的方式被保持於基台3v上。第一工作台5於該實施形態中被固定設置於基台3v上,但亦可以可將第一移送面5a的傾斜角度α1於所述角度範圍內設定為任意角度的方式被保持於基台3v上。而且,第一移送面5a與第二移送面6a所成的角度β為60°~120°。As shown in FIG. 3, the
玻璃帶GR的切斷是於兩帶GR、PR的移送停止的狀態下進行。此處,第一移送面5a亦作為接住並支撐後述的切斷後的玻璃帶GR的承接面發揮作用。第二移送面6a亦發揮於兩帶GR、PR的移送停止時沿循保持兩帶GR、PR的作用。進而,第二移送面6a亦發揮移送後述的切斷後的母玻璃膜MG的作用。第一移送面5a的上端5x及第二移送面6a的上端6x均存在於比折割棒4的上端低的位置且比玻璃卷2的捲出開始部2z高的位置。Cutting of the glass ribbon GR is carried out in the state in which the transfer of both ribbons GR and PR is stopped. Here, the
於該實施形態中,藉由在比折割棒4更靠前側的位置拉拽保護帶PR,而自玻璃卷2捲出兩帶GR、PR。因此,於兩帶GR、PR被移送時,對保護帶PR賦予張力。此時,不對玻璃帶GR賦予張力。另外,於兩帶GR、PR的移送停止時,藉由將保護帶PR於第二移送面6a上保持於定位置,而對存在於較折割棒4更靠後側處的保護帶PR,賦予用於承受玻璃帶GR的下垂的張力。此時,亦不對玻璃帶GR賦予張力。In this embodiment, the two tapes GR, PR are unwound from the
再者,如圖2所示,切斷部3包括用於捲取通過第二移送面6a的保護帶PR的片材卷7。Furthermore, as shown in FIG. 2, the cutting
接下來,對使用以上所述的玻璃帶切斷裝置1來獲得母玻璃膜MG的方法進行說明。Next, a method of obtaining the mother glass film MG using the glass
於自玻璃卷2捲出玻璃帶GR及保護帶PR的過程中,兩帶GR、PR沿著第一移送面5a被移送,藉此玻璃帶GR的前端GRa通過折割棒4。其後,兩帶GR、PR沿著第二移送面6a被移送,如圖5所示,於玻璃帶GR的前端GRa於折割棒4上經過了規定長度L1的時間點,兩帶GR、PR的移送停止。於該實施形態中,兩帶GR、PR的移送是藉由作業者於較所述折割棒4更靠前側的位置拉拽保護帶PR來進行。具體而言,如圖例般,作業者藉由沿著第二移送面6a拉拽保護帶PR,而使玻璃帶GR到達經過了所述規定長度L1的位置。再者,所述規定長度L1可藉由標註到第二移送面6a的標記(省略圖示)由作業者來視認。因此,作業者進行用於將玻璃帶GR的前端GRa定位到所述標記的作業,於定位完成的時間點,中止拉拽保護帶PR的操作。藉此,兩帶GR、PR的移送停止。再者,亦可設為作業者拉拽保護帶PR而使其自第二移送面6a離開,但於進行用於所述定位的作業時,需要沿著第二移送面6a進行拉拽。此處,於自玻璃帶GR反覆切出相同長度的母玻璃膜MG的情況下,只要所述標記標註到第二移送面6a的一個部位即可。其中,於自玻璃帶GR切出的母玻璃膜MG的長度存在多種的情況下,所述標記被標註到第二移送面6a中的移送方向上的多個部位。In the process of unwinding the glass ribbon GR and the protective tape PR from the
如此於兩帶GR、PR的移送停止的時間點,藉由折割棒4而對玻璃帶GR賦予充分的彎曲應力。再者,於該時間點,為了確實地對玻璃帶GR賦予充分的彎曲應力,亦可進行於折割棒4的周邊將兩帶GR、PR向第一移送面5a、第二移送面6a推壓等操作。於此種狀態下,自折割棒4的上方(較佳為折割棒4的中心軸線的上方)對在玻璃帶GR的寬度方向上延伸的切斷預定線(假想性地存在的線)C1的一端部(圖5中箭頭A所示的玻璃帶GR的側緣部),使用損傷施加部件施加損傷(初始裂紋)。於該實施形態中,施加損傷的作業亦是由作業者進行。藉此,損傷沿著切斷預定線C1呈一直線狀進展至切斷預定線C1的另一端部。即,施加到切斷預定線C1的一端部的一個部位的損傷藉由彎曲應力的作用而遍及玻璃帶GR的寬度方向上的總長及厚度方向上的總長進展。結果,玻璃帶GR的折割(切斷)完成。如圖6所示,藉由該切斷而獲得的矩形形狀的母玻璃膜MG於第二移送面6a上追隨保護帶PR而被移送。其後,若將第二工作台6設為例如圖3中點劃線所示的姿勢,則可容易地將母玻璃膜MG以縱姿勢裝載到例如捆紮用托盤等。再者,如圖5所示,於本實施形態中,後述的切斷步驟S2中的母玻璃膜MG的切斷預定線C2(母玻璃膜MG的縱向)與準備步驟S1中的玻璃帶GR的切斷預定線C1(玻璃帶GR的寬度方向)正交。In this way, sufficient bending stress is given to the glass ribbon GR by the cutting
如圖7所示,折割棒能夠根據玻璃帶GR的厚度而變更種類。於本實施形態中,若將所述折割棒4稱為第一折割棒,則在玻璃帶GR的厚度例如為50 μm以下的情況下,將呈曲率比第一折割棒4小的圓筒狀或圓柱狀的第二折割棒8平行地配置於第一折割棒4上。第一折割棒4的曲率半徑例如為30 mm~70 mm,第二折割棒8的曲率半徑例如為10 mm~40 mm。而且,將自玻璃卷2捲出的玻璃帶GR及保護帶PR配置於該第二折割棒8上。藉此,於準備步驟S1中,可根據玻璃帶GR的厚度變更彎曲應力賦予部的種類。即,於玻璃帶GR的厚度薄的情況下,與玻璃帶GR的厚度厚的情況相比,可陡峭地使玻璃帶GR彎折,因此可與玻璃帶GR的厚度無關地賦予恰當的彎曲應力。再者,於本實施形態中,由於在第一折割棒4上配置有第二折割棒8,因此於自第一折割棒4變更為第二折割棒8的情況下,彎曲應力賦予部與玻璃卷2之間的高低差亦變大。能夠變更的折割棒的種類亦可為三種以上。As shown in FIG. 7, the kind of breaking rod can be changed according to the thickness of the glass ribbon GR. In this embodiment, if the above-mentioned
玻璃帶切斷裝置1除了包括所述結構以外,亦包括圖8所示般的長度調整機構9。The glass
長度調整機構9是於自玻璃卷2捲出保護帶PR及玻璃帶GR時,對第二工作台6的第二移送面6a上玻璃帶GR的捲出長度進行調整的機構。詳細而言,長度調整機構9是於玻璃帶GR的前端GRa經過了折割棒4的時間點,為了將玻璃帶GR的前端GRa正確地定位到標註於第二移送面6a的標記,而對捲出長度進行微調的機構。The
具體而言,長度調整機構9具有:大徑齒輪10,以能夠與玻璃卷2的卷軸2a一體旋轉的方式配置於同軸上;小徑齒輪11,與大徑齒輪10嚙合;蝸輪12,以能夠與小徑齒輪11一體旋轉的方式配置於同軸上;以及蝸桿13,與蝸輪12嚙合。小徑齒輪11、蝸輪12以及蝸桿13被保持於藉由氣缸等流體壓力缸14而能夠上下升降的升降台15。於蝸桿13,安裝有朝向前側延伸出且於前端具有把手16的作動軸17。作動軸17的後端部能夠旋轉地支撐於升降台15的軸支承部15a,作動軸17的前端部能夠旋轉地支撐於固定設置於基台3v的多個(於圖例中為兩個)軸支承壁材18。作動軸17於軸支承部15a與軸支承壁材18之間藉由多個(於圖例中為兩個)萬向接頭19而連結。把手16配置於第二工作台6的下方。於把手16的周邊部位(於圖例中為前側的軸支承壁材18)安裝有發出用於使升降台15上升及下降的訊號的開關20。Specifically, the
該長度調整機構9由作業者如以下般操作。首先,作業者藉由沿著第二移送面6a拉拽保護帶PR,而使玻璃帶GR的前端GRa位於標記的附近。於該狀態下,作業者操作開關20,使升降台15上移至同圖所示的上升端位置。於該時間點,在自玻璃帶GR的前端GRa至標記為止存在規定長度的空隙的情況下,作業者使把手16正轉。藉此,玻璃卷2向箭頭W1方向旋轉,將兩帶GR、PR捲出。與此相反地,於玻璃帶GR的前端GRa經過了標記且經過了規定長度的情況下,作業者使把手16反轉。藉此,玻璃卷2向箭頭W2方向旋轉,將兩帶GR、PR捲取。如此於作業者操作把手16的期間內,對保護帶PR賦予張力。該情況下,作業者藉由進行僅一次把手16的正轉或反轉、或者藉由反覆進行正轉與反轉,而進行用於將玻璃帶GR的前端GRa定位到標記的作業。於該定位完成的時間點,作業者中止把手16的操作。於該狀態下,如所述般進行玻璃帶GR的切斷,然後,作業者操作開關20使升降台15自圖示的狀態下降。藉此,大徑齒輪10與小徑齒輪11的嚙合被解除,動力不會自把手16傳遞至大徑齒輪10乃至玻璃卷2。再者,玻璃帶GR的切斷、與升降台15的下降的順序亦可與所述情況相反。其後,再次由作業者拉拽保護帶PR,進行與所述情況相同的操作。This
切斷裝置1並不限定於以上實施形態,能夠有各種變動。The
於所述實施形態中,將作為彎曲應力賦予部的折割棒4設為呈圓筒狀或圓柱狀者,但亦可為剖面呈橢圓形或其他彎曲形狀者,進而亦可為僅上部呈此種彎曲形狀者,另外,亦可為不呈彎曲形狀者。進而,折割棒4的個數亦不限於一個,亦可為由多個構成者。此外,彎曲應力賦予部亦可為不具有折割棒的結構,無論如何,彎曲應力賦予部只要為可賦予切斷玻璃帶GR所需的彎曲應力者即可。In the above-described embodiment, the breaking
於所述實施形態中,在折割棒4的上方對玻璃帶GR施加損傷,但亦可設為於折割棒4的後方、即被切斷之前對玻璃帶GR施加損傷。進而,除了施加損傷以外,亦可施加劃線(scribe line),較佳為於被切斷之前對玻璃帶GR預先施加劃線。In the said embodiment, although the damage was given to the glass ribbon GR above the breaking
於所述實施形態中,第一移送面5a、第二移送面6a被設為第一工作台5、第二工作台6的上表面,但該些移送面5a、移送面6a亦可為工作台以外的台等的上表面。另外,第一移送面5a、第二移送面6a亦可為該些的一者或兩者沒有斜坡的面。進而,第一移送面5a、第二移送面6a亦可為輸送機等的搬送面。該情況下,作業者亦可不拉拽保護帶PR。In the above-described embodiment, the
於所述實施形態中,設為將玻璃帶GR及保護帶PR自玻璃卷2的下部捲出,但亦可設為將該兩帶GR、PR自玻璃卷2的上部捲出。In the above-described embodiment, the glass ribbon GR and the protective tape PR were unwound from the lower part of the
於所述實施形態中,設為藉由切斷裝置1將自玻璃卷2捲出的玻璃帶GR切斷,獲得母玻璃膜MG,但準備母玻璃膜MG的方法並不限定於此。例如,亦可設為藉由執行溢流下拉法或浮法等的成形部將玻璃帶GR成形,並於成形部的下游側以規定長度為單位切斷與成形部連續的玻璃帶GR,獲得母玻璃膜MG。In the above-described embodiment, the glass ribbon GR unwound from the
(切斷步驟)
如圖9~圖11所示,切斷步驟S2為切斷母玻璃膜MG來獲得玻璃膜G的步驟,於本實施形態中,使用母玻璃膜切斷裝置21。再者,於圖9中,XYZ為正交座標系。X方向是設為母玻璃膜MG的縱向,Y方向是設為母玻璃膜MG的橫向,Z方向是設為母玻璃膜MG的厚度方向。
(cutting step)
As shown in FIGS. 9 to 11 , the cutting step S2 is a step of cutting the mother glass film MG to obtain a glass film G. In this embodiment, a mother glass
如圖9所示,母玻璃膜切斷裝置21包括:載置台22,載置母玻璃膜MG及保護片材PS;定位部23,將母玻璃膜MG及保護片材PS相對於載置台22定位;作為按壓構件的一對按壓棒24,於母玻璃膜MG的切斷預定線(假想性地存在的線)C2的兩側,將母玻璃膜MG及保護片材PS向載置台22側推壓;以及作為彎曲應力賦予部的折割棒25,於一對按壓棒24之間沿著切斷預定線C2賦予彎曲應力。切斷裝置21僅切斷母玻璃膜MG及保護片材PS中的母玻璃膜MG。保護片材PS自母玻璃膜MG的縱向兩端伸出。As shown in FIG. 9 , the mother glass
載置台22以沿著X方向延伸的折割棒25為邊界,被分割成第一支撐部22a與第二支撐部22b。換言之,折割棒25配置於第一支撐部22a與第二支撐部22b之間的間隙。第一支撐部22a的上表面及第二支撐部22b的上表面是設為以平置姿勢(較佳為水平姿勢)支撐母玻璃膜MG及保護片材PS的平面。The mounting table 22 is divided into a
定位部23由立設於載置台22的第二支撐部22b的板狀體構成。定位部23與Y方向上的母玻璃膜MG的前端面MGa抵接。再者,定位部23只要可對母玻璃膜MG的前端面MGa進行定位,則可為任意形狀,例如可為圓柱(銷)狀等。母玻璃膜MG於被載置於保護片材PS上的狀態下,被自第一支撐部22a向第二支撐部22b移送,且藉由其前端面MGa與定位部23抵接而被定位。再者,自第一支撐部22a向第二支撐部22b移送母玻璃膜MG的作業是藉由作業者的手動作業來進行,但亦可藉由輸送機等的搬送面進行。The
按壓棒24是沿著X方向延伸的板狀、角柱狀或角筒狀,並利用其下表面(按壓面)將母玻璃膜MG及保護片材PS向載置台22側推壓。於按壓棒24的上表面的長邊方向的中央部,設置有於推壓母玻璃膜MG及保護片材PS時由作業者握持的把手24a。再者,按壓棒24若可推壓母玻璃膜MG及保護片材PS,則可為任意形狀,例如亦可為由圓柱狀或圓筒狀等構成、且按壓面呈曲面形狀者。The
按壓棒24能夠於Y方向上滑動,以便可變更相對於載置台22的固定位置。具體而言,於與按壓棒24的X方向上的兩端部對應的位置,在載置台22設置有於Y方向上延伸的長孔26,且按壓棒24能夠於該長孔26的範圍內滑動移動。按壓棒24的兩端部能夠藉由螺栓等緊固構件27而於長孔26的任意位置固定。藉此,可根據母玻璃膜MG的厚度,變更按壓棒24與折割棒25(或切斷預定線C2)之間的距離L2(參照圖10),並簡單且確實地調整作用到切斷預定線C2的彎曲應力的大小。The
折割棒25為沿著X方向延伸的長條體,是Y方向上的剖面朝向上方凸出的半圓狀。母玻璃膜MG的切斷預定線C2位於折割棒25上。折割棒25能夠於如圖10所示般退避到比載置台22的上表面更靠下方處的退避狀態、與如圖11所示般突出到比載置台22的上表面更靠上方處的上升狀態之間上下移動。於該上升狀態下,折割棒25隔著保護片材PS自下方抬起母玻璃膜MG的切斷預定線C2,並以玻璃膜G的上表面側成為凸狀的方式進行保持。藉此,沿著切斷預定線C2賦予彎曲應力。The breaking
如圖12A及圖12B所示,折割棒25能夠根據母玻璃膜MG的厚度來變更種類。於本實施形態中,在母玻璃膜MG的厚度例如為100 μm以下的情況下,自圖12A的曲率(例如曲率半徑:20 mm~50 mm)相對大的剖面呈半圓狀的折割棒25變更為圖12B的曲率(例如曲率半徑:5 mm~25 mm)相對小的剖面呈半圓狀的折割棒25。藉此,於切斷步驟S2中,可根據母玻璃膜MG的厚度變更彎曲應力賦予部的種類。即,於母玻璃膜MG的厚度薄的情況下,與母玻璃膜MG的厚度厚的情況相比,可陡峭地使母玻璃膜MG彎折,因此可與母玻璃膜MG的厚度無關地賦予恰當的彎曲應力。再者,能夠變更的折割棒的種類亦可為三種以上。另外,如圖12A及圖12B所示,亦可根據母玻璃膜MG的厚度調整折割棒25的上推高度L3。As shown in FIGS. 12A and 12B , the type of the breaking
接下來,對使用以上所述的母玻璃膜切斷裝置21來切斷母玻璃膜MG而獲得玻璃膜G的方法進行說明。Next, a method of cutting the mother glass film MG to obtain the glass film G using the mother glass
母玻璃膜MG首先於重疊於保護片材PS上的狀態下,藉由定位部23而在載置台22上定位。接下來,於母玻璃膜MG的切斷預定線C2的兩側,藉由按壓棒24將母玻璃膜MG及保護片材PS向載置台22側按壓。於該狀態下,使折割棒25上升,隔著保護片材PS抬起母玻璃膜MG。藉此,以母玻璃膜MG的上表面側凸出的方式加以彎折,沿著切斷預定線C2賦予彎曲應力。於此種狀態下,自折割棒25的上方(較佳為折割棒25的中心軸線的上方)對母玻璃膜MG的切斷預定線C2的一端部(圖9中箭頭B所示的母玻璃膜MG的側緣部),使用損傷施加部件施加損傷。藉此,損傷沿著切斷預定線C2呈一直線狀進展至切斷預定線C2的另一端部。即,施加到切斷預定線C2的一端部的一個部位的損傷藉由彎曲應力的作用而遍及母玻璃膜MG的縱向上的總長及厚度方向上的總長進展。結果,母玻璃膜MG的折割(切斷)完成,獲得兩片矩形形狀的玻璃膜G。Mother glass film MG is first positioned on mounting table 22 by positioning
切斷裝置21並不限定於以上的實施形態,能夠有各種變動。例如,於所述實施形態中,將作為彎曲應力賦予部的折割棒25設為剖面呈半圓狀者,但亦可為呈圓筒狀或圓柱狀者、或者剖面呈橢圓形或其他彎曲形狀者,進而亦可為僅上部呈此種彎曲形狀者,另外亦可為不呈彎曲形狀者。進而,折割棒25的個數亦不限於一個,亦可為由多個構成者。The cutting
於所述實施形態中,在折割棒25的上方對母玻璃膜MG施加損傷,但亦可設為於使折割棒25上升之前、即被切斷之前,對母玻璃膜MG施加損傷。進而,除了施加損傷以外,亦可施加劃線,較佳為於被切斷之前對玻璃帶GR預先施加劃線。In the above-described embodiment, the mother glass film MG is damaged above the breaking
於所述實施形態中,作為對母玻璃膜MG賦予彎曲應力的方法,採用了使折割棒25自母玻璃膜MG的下方上升,以母玻璃膜MG的上表面側凸出的方式彎折的態樣,但亦可採用使折割棒25自母玻璃膜MG的上方下降,以母玻璃膜MG的下表面側凸出的方式彎折的態樣。In the above-described embodiment, as a method of imparting bending stress to the mother glass film MG, the cutting
(評價步驟) 如圖13~圖16所示,評價步驟S3為於將玻璃膜G重疊於具有基準大小的基準板SP而成的積層體LB的狀態下,評價玻璃膜G的大小的步驟。 (Evaluation step) As shown in FIGS. 13 to 16 , the evaluation step S3 is a step of evaluating the size of the glass film G in the state of the laminate LB formed by stacking the glass film G on the reference plate SP having a standard size.
如圖13所示,基準板SP於其四邊SP1~SP4中的在一個角部相交的兩邊SP1、SP2的輪廓部,形成有黑色等有色的標記部SPa。藉此,容易區別基準板SP與玻璃膜G,因此可簡單地掌握玻璃膜G的端面的位置。再者,於本實施形態中,後述的測定台31的定位部32與並未形成標記部SPa的基準板SP的剩餘的兩邊SP3、SP4抵接。再者,亦可於基準板SP的四邊SP1~SP4的所有的輪廓部形成標記部SPa。於圖14~圖16中,方便起見,省略了標記部SPa的圖示。As shown in FIG. 13 , the reference plate SP is formed with a colored marking portion SPa such as black on the contour portion of both sides SP1 and SP2 intersecting at one corner among the four sides SP1 to SP4 of the reference plate SP. Thereby, since it becomes easy to distinguish reference plate SP and glass film G, the position of the end surface of glass film G can be grasped easily. In addition, in this embodiment, the
如圖14所示,基準板SP具有玻璃板GP、以及緩衝層CL。As shown in FIG. 14 , the reference plate SP has a glass plate GP and a buffer layer CL.
玻璃板GP為基準板SP的基材,呈以基準大小被正確地切斷的矩形形狀。就獲取容易性等觀點而言,玻璃板GP較佳為包含切斷母玻璃膜MG而獲得的玻璃膜G。The glass plate GP is a base material of the reference plate SP, and has a rectangular shape accurately cut with a reference size. The glass plate GP preferably includes the glass film G obtained by cutting the mother glass film MG from the viewpoint of ease of acquisition and the like.
緩衝層CL形成於玻璃板GP的兩主表面中的與玻璃膜G接觸的面側。緩衝層CL例如包含聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)等樹脂膜。藉此,可抑制作為評價對象的玻璃膜G受到損傷的情況。於圖15及圖16中,方便起見,省略了緩衝層CL的圖示。Buffer layer CL is formed in the surface side which contacts glass film G among both main surfaces of glass plate GP. The buffer layer CL includes, for example, a resin film such as polyethylene terephthalate (PET). Thereby, damage to the glass film G to be evaluated can be suppressed. In FIGS. 15 and 16 , illustration of the buffer layer CL is omitted for convenience.
如圖15所示,於評價步驟S3中,包含玻璃膜G與基準板SP的積層體LB將玻璃膜G側設為上而載置於具有定位部32的測定台31上。定位部32是對積層體LB的四邊LB1~LB4中的在一個角部相交的兩邊LB3、LB4進行定位者,具有與邊LB3抵接的一對圓柱(銷)狀體32a、以及與邊LB4抵接的板狀體32b。再者,積層體LB亦可將基準板SP側設為上而載置於測定台31上。另外,定位部32若可對積層體LB的兩邊LB3、LB4進行定位,則可為任意形狀。As shown in FIG. 15 , in the evaluation step S3 , the laminate LB including the glass film G and the reference plate SP is placed on the
於評價步驟S3中,在積層體LB的兩邊LB3、LB4,使基準板SP及玻璃膜G各自的端面與圓柱狀體32a及板狀體32b抵接而進行定位,於該狀態下,在積層體LB的剩餘的兩邊LB1、LB2,藉由作業者的手指對基準板SP及玻璃膜G各自的端面進行觸摸檢查。藉此,測定玻璃膜G的端面的位置、與基準板SP的端面的位置之間的偏差,評價玻璃膜G的大小。於本實施形態中,積層體LB的兩邊LB1、LB2自測定台31伸出,以便在積層體LB的兩邊LB1、LB2容易對基準板SP及玻璃膜G各自的端面進行觸摸檢查。再者,評價玻璃膜G的大小的方法可為使用圖像處理等的方法,但由於使用觸摸檢查的方法是簡便且廉價的方法,因此較佳。In the evaluation step S3, on both sides LB3 and LB4 of the laminated body LB, the respective end surfaces of the reference plate SP and the glass film G are positioned in contact with the
如圖16所示,於評價步驟S3中,例如,在玻璃膜G大於基準板SP的情況下,當玻璃膜G相對於基準板SP的伸出尺寸為第一合格臨限值T1以下時,將玻璃膜視為良品,在玻璃膜G小於基準板SP的情況下,當基準板SP相對於玻璃膜G的伸出尺寸為第二合格臨限值T2以下時,將玻璃膜G視為良品。該情況下,較佳為將第一合格臨限值T1設定為比第二合格臨限值T2小的值。具體而言,例如,將第一合格臨限值T1設定為1 mm,將第二合格臨限值T2設定為2 mm。藉此,由於第一合格臨限值T1成為比第二合格臨限值T2嚴格的基準,因此可降低大於基準板SP的玻璃膜G被視為良品的概率。As shown in FIG. 16 , in the evaluation step S3, for example, when the glass film G is larger than the reference plate SP, when the projection size of the glass film G relative to the reference plate SP is below the first acceptable threshold value T1, The glass film is regarded as a good product, and when the glass film G is smaller than the reference plate SP, when the protruding dimension of the reference plate SP relative to the glass film G is below the second acceptable threshold value T2, the glass film G is regarded as a good product . In this case, it is preferable to set the first pass threshold value T1 to a value smaller than the second pass threshold value T2. Specifically, for example, the first pass threshold T1 is set to 1 mm, and the second pass threshold T2 is set to 2 mm. Thereby, since the first acceptance threshold T1 becomes a stricter standard than the second acceptance threshold T2, the probability that the glass film G larger than the reference plate SP is regarded as a good product can be reduced.
(成膜步驟) 如圖17及圖18所示,本實施形態所涉及的玻璃膜的製造方法亦可進而包括於在評價步驟S3中被視為良品的玻璃膜G進行成膜的成膜步驟S4。 (film formation step) As shown in FIG. 17 and FIG. 18 , the manufacturing method of the glass film according to the present embodiment may further include a film forming step S4 of forming a film of the glass film G regarded as a good product in the evaluation step S3 .
於成膜步驟S4中,例如,將在評價步驟S3中被視為良品的玻璃膜G配置於成膜用夾具41。In the film forming step S4, for example, the glass film G regarded as a good product in the evaluation step S3 is arranged on the
如圖17所示,成膜用夾具41具有:基台部42,載置玻璃膜G;以及框部43,包圍載置於基台部42的玻璃膜G的周圍。框部43劃分形成具有與基準板SP對應的大小的俯視時呈矩形形狀的空間,如圖18所示,於框部43的內部配置有玻璃膜G。而且,於如此將玻璃膜G配置於成膜用夾具41的狀態下,在玻璃膜G的上表面進而配置成膜用遮罩(省略圖示)等,並在玻璃膜G的表面實施規定圖案的成膜。As shown in FIG. 17 , the film-forming
如此經成膜的玻璃膜G例如被用於液晶顯示器、有機電致發光(electroluminescence,EL)顯示器等薄型顯示機器或感測器的基板、或者固體攝像元件或雷射二極體等半導體封裝用罩、以及薄膜化合物太陽能電池的基板等中。The glass film G formed in this way is used, for example, as a substrate for thin display devices or sensors such as liquid crystal displays and organic electroluminescence (EL) displays, or for packaging semiconductors such as solid-state imaging devices and laser diodes. Covers, and substrates of thin-film compound solar cells.
根據以上般的製造方法,於切斷步驟S2中,母玻璃膜MG藉由彎曲應力而被切斷,因此與使用雷射割斷的情況相比,可縮短切斷時間。另外,於切斷步驟S2中,由於不需要雷射等的調整,因此可用少的人員執行切斷。另一方面,於賦予彎曲應力來切斷的情況下,與雷射割斷相比,相對於切斷預定線C2的偏差容易變大。因此,於評價步驟S3中,將玻璃膜G重疊於基準板SP,評價玻璃膜G的大小。若為使用此種基準板SP的評價方法,則可於短時間內效率良好地評價玻璃膜G的大小。尤其是,若對將玻璃膜G重疊於基準板SP而成的積層體LB的端面進行觸摸檢查,則與使用圖像處理等的情況相比,可大幅縮短玻璃膜G的大小的評價時間,並且亦可抑制設備成本。因此,即便玻璃膜G中包含在評價步驟S3中大小被評價為不合格的不良品,亦可大幅削減製造時間或人員,因此就製造成本整體而言,與在切斷步驟S2中使用雷射割斷的情況相比可實現低廉化。According to the manufacturing method as described above, in the cutting step S2, the mother glass film MG is cut due to the bending stress, and thus the cutting time can be shortened compared with the case of cutting using a laser. In addition, in the cutting step S2, since adjustments such as laser light are not required, cutting can be performed with a small number of people. On the other hand, in the case of cutting while applying a bending stress, the deviation from the planned cutting line C2 tends to be larger than that of laser cutting. Therefore, in evaluation step S3, the glass film G is laminated|stacked on the reference plate SP, and the size of the glass film G is evaluated. According to the evaluation method using such a reference plate SP, the size of the glass film G can be efficiently evaluated in a short time. In particular, when the touch inspection is performed on the end face of the laminate LB formed by stacking the glass film G on the reference plate SP, the evaluation time for the size of the glass film G can be greatly shortened compared with the case of using image processing, etc. Furthermore, equipment cost can also be suppressed. Therefore, even if the glass film G includes defective products whose size is evaluated as unacceptable in the evaluation step S3, the manufacturing time and personnel can be greatly reduced. Compared with the case of cutting, the cost can be reduced.
再者,本發明並不限定於所述實施形態的結構,亦不限定於所述作用效果。本發明能夠於不脫離本發明的主旨的範圍內進行各種變更。In addition, this invention is not limited to the structure of the said embodiment, nor is it limited to the said operation effect. Various changes can be made in this invention in the range which does not deviate from the summary of this invention.
於所述實施形態中,較佳為玻璃膜G的四邊全部是使用彎曲應力而被切斷,但於在準備步驟S1或其前步驟中使用雷射切斷的情況下,玻璃膜G的四邊中亦可包含經雷射切斷的邊。此處,雷射切斷中包含例如雷射割斷或雷射熔斷。In the above-mentioned embodiment, it is preferable that all four sides of the glass film G are cut using bending stress, but in the case of using laser cutting in the preparatory step S1 or the previous step, the four sides of the glass film G It may also contain laser cut edges. Here, laser cutting includes, for example, laser cutting or laser fusing.
1:玻璃帶切斷裝置/切斷裝置 2:玻璃卷 2a:卷軸 2v:台車 2z:捲出開始部 3:切斷部 3v:基台 3w:框構件 3x:支撐構件 4:折割棒 5:第一工作台 5a:第一移送面 5x:第一移送面的上端 6:第二工作台 6a:第二移送面 6x:第二移送面的上端 7:片材卷 8:第二折割棒 9:長度調整機構 10:大徑齒輪 11:小徑齒輪 12:蝸輪 13:蝸桿 14:流體壓力缸 15:升降台 15a:軸支承部 16:把手 17:作動軸 18:軸支承壁材 19:萬向接頭 20:開關 21:母玻璃膜切斷裝置/切斷裝置 22:載置台 22a:第一支撐部 22b:第二支撐部 23:定位部 24:按壓棒 24a:把手 25:折割棒 26:長孔 27:緊固構件 31:測定台 32:定位部 32a:圓柱(銷)狀體/圓柱狀體 32b:板狀體 41:成膜用夾具 42:基台部 43:框部 A、B、W1、W2:箭頭 C1、C2:切斷預定線(假想性地存在的線) CL:緩衝層 G:玻璃膜 GP:玻璃板 GR:玻璃帶 GRa:玻璃帶的前端 L1:長度 L2:距離 L3:上推高度 LB:積層體 LB1~LB4:邊 MG:母玻璃膜 MGa:母玻璃膜的前端面 PR:保護帶 PS:保護片材 S1:準備步驟 S2:切斷步驟 S3:評價步驟 S4:成膜步驟 SP:基準板 SP1~SP4:邊 SPa:標記部 T1:第一合格臨限值 T2:第二合格臨限值 X、Y、Z:方向 α1、α2:傾斜角度 β:角度 1: Glass ribbon cutting device/cutting device 2: glass roll 2a: scroll 2v: Trolley 2z: roll out the beginning 3: cutting part 3v: abutment 3w: frame component 3x: support member 4: Folding and cutting stick 5: The first workbench 5a: The first transfer surface 5x: the upper end of the first transfer surface 6: The second workbench 6a: The second transfer surface 6x: the upper end of the second transfer surface 7: Sheet roll 8: Second folding cutting stick 9: Length adjustment mechanism 10: large diameter gear 11: Small diameter gear 12: worm gear 13: Worm 14: Fluid pressure cylinder 15:Lifting table 15a: shaft support 16: handle 17: Actuating shaft 18: Shaft support wall material 19: universal joint 20: switch 21:Mother glass film cutting device/cutting device 22: Carrying table 22a: the first support part 22b: the second support part 23: Positioning department 24: Press rod 24a: handle 25: Folding and cutting stick 26: long hole 27: fastening components 31: Measuring table 32: Positioning Department 32a: Cylindrical (pin) shaped body/cylindrical body 32b: plate-shaped body 41:Fixture for film formation 42: Abutment 43: frame A, B, W1, W2: Arrows C1, C2: Scheduled cutting line (virtually existing line) CL: buffer layer G: glass film GP: glass plate GR: glass ribbon GRa: the front end of the glass ribbon L1: Length L2: Distance L3: Push up height LB: laminated body LB1~LB4: side MG: mother glass film MGa: the front surface of the mother glass membrane PR: protective belt PS: Protective sheet S1: Preparatory steps S2: cut off step S3: Evaluation step S4: film forming step SP: reference plate SP1~SP4: side SPA: marking department T1: the first qualified threshold T2: Second qualified threshold X, Y, Z: directions α1, α2: tilt angle β: angle
圖1是本發明的實施形態所涉及的玻璃膜的製造方法的流程圖。 圖2是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的準備步驟的玻璃帶切斷裝置的概略正面圖。 圖3是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的準備步驟的玻璃帶切斷裝置的主要部分放大正面圖。 圖4是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的準備步驟的玻璃帶切斷裝置的主要部分放大立體圖。 圖5是用於說明本發明的實施形態所涉及的玻璃膜的製造方法中所含的準備步驟的實施狀況的主要部分放大立體圖。 圖6是用於說明本發明的實施形態所涉及的玻璃膜的製造方法中所含的準備步驟的實施狀況的主要部分放大立體圖。 圖7是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的準備步驟的玻璃帶切斷裝置的折割棒的變形例的主要部分放大正面圖。 圖8是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的準備步驟的玻璃帶切斷裝置的長度調整機構的概略正面圖。 圖9是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的切斷步驟的母玻璃膜切斷裝置的概略立體圖。 圖10是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的切斷步驟的母玻璃膜切斷裝置的概略正面圖。 圖11是表示用於說明本發明的實施形態所涉及的玻璃膜的製造方法中所含的切斷步驟的實施狀況的母玻璃膜切斷裝置的概略正面圖。 圖12A是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的切斷步驟的母玻璃膜切斷裝置的折割棒的主要部分放大正面。 圖12B是表示用於實施本發明的實施形態所涉及的玻璃膜的製造方法中所含的切斷步驟的母玻璃膜切斷裝置的折割棒的變形例的主要部分放大正面圖。 圖13是表示本發明的實施形態所涉及的玻璃膜的製造方法中所含的評價步驟中所使用的基準板的概略平面圖。 圖14是圖13的I-I剖面圖。 圖15是用於說明本發明的實施形態所涉及的玻璃膜的製造方法中所含的評價步驟的實施狀況的概略立體圖。 圖16是用於說明本發明的實施形態所涉及的玻璃膜的製造方法中所含的評價步驟的實施狀況的主要部分放大平面圖。 圖17是用於說明本發明的實施形態所涉及的玻璃膜的製造方法中所含的成膜步驟的實施狀況的概略立體圖。 圖18是用於說明本發明的實施形態所涉及的玻璃膜的製造方法中所含的成膜步驟的實施狀況的概略立體圖。 FIG. 1 is a flowchart of a method for producing a glass film according to an embodiment of the present invention. 2 is a schematic front view showing a glass ribbon cutting device for carrying out the preparatory steps included in the manufacturing method of the glass film according to the embodiment of the present invention. 3 is an enlarged front view of a main part showing a glass ribbon cutting device for carrying out the preparatory steps included in the manufacturing method of the glass film according to the embodiment of the present invention. 4 is an enlarged perspective view of a main part showing a glass ribbon cutting device for carrying out the preparatory steps included in the manufacturing method of the glass film according to the embodiment of the present invention. Fig. 5 is an enlarged perspective view of main parts for explaining the state of implementation of the preparatory steps included in the manufacturing method of the glass film according to the embodiment of the present invention. Fig. 6 is an enlarged perspective view of main parts for explaining the state of implementation of the preparatory steps included in the manufacturing method of the glass film according to the embodiment of the present invention. 7 is an enlarged front view of a main part showing a modified example of a cutting rod of a glass ribbon cutting device for carrying out a preparatory step included in a glass film manufacturing method according to an embodiment of the present invention. 8 is a schematic front view showing a length adjustment mechanism of a glass ribbon cutting device for carrying out the preparatory steps included in the manufacturing method of the glass film according to the embodiment of the present invention. 9 is a schematic perspective view showing a mother glass film cutting device for carrying out a cutting step included in the method for producing a glass film according to the embodiment of the present invention. 10 is a schematic front view showing a mother glass film cutting device for carrying out a cutting step included in the method for producing a glass film according to the embodiment of the present invention. 11 is a schematic front view showing a mother glass film cutting device for explaining the implementation of the cutting step included in the glass film manufacturing method according to the embodiment of the present invention. Fig. 12A is an enlarged front view of main parts showing a cutting rod of a mother glass film cutting device for carrying out the cutting step included in the glass film manufacturing method according to the embodiment of the present invention. 12B is an enlarged front view of main parts showing a modified example of a cutting rod of a mother glass film cutting device for carrying out a cutting step included in the glass film manufacturing method according to the embodiment of the present invention. 13 is a schematic plan view showing a reference plate used in an evaluation step included in the method for producing a glass film according to the embodiment of the present invention. Fig. 14 is an I-I sectional view of Fig. 13 . Fig. 15 is a schematic perspective view for explaining the implementation status of the evaluation step included in the method for producing a glass film according to the embodiment of the present invention. Fig. 16 is an enlarged plan view of main parts for explaining the implementation status of the evaluation step included in the method for producing a glass film according to the embodiment of the present invention. Fig. 17 is a schematic perspective view for explaining the state of implementation of a film forming step included in the method for producing a glass film according to the embodiment of the present invention. Fig. 18 is a schematic perspective view for explaining the state of implementation of a film forming step included in the method for producing a glass film according to the embodiment of the present invention.
S1:準備步驟 S1: Preparatory steps
S2:切斷步驟 S2: cut off step
S3:評價步驟 S3: Evaluation step
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