TW202237978A - Height adjustable electro hydro dynamic pump head assembly - Google Patents
Height adjustable electro hydro dynamic pump head assembly Download PDFInfo
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- TW202237978A TW202237978A TW111110616A TW111110616A TW202237978A TW 202237978 A TW202237978 A TW 202237978A TW 111110616 A TW111110616 A TW 111110616A TW 111110616 A TW111110616 A TW 111110616A TW 202237978 A TW202237978 A TW 202237978A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/085—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to flow or pressure of liquid or other fluent material to be discharged
- B05B12/087—Flow or presssure regulators, i.e. non-electric unitary devices comprising a sensing element, e.g. a piston or a membrane, and a controlling element, e.g. a valve
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
- B05B13/0463—Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length
- B05B13/0468—Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length with reciprocating or oscillating spray heads
- B05B13/0473—Installation or apparatus for applying liquid or other fluent material to moving work of indefinite length with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/005—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means the high voltage supplied to an electrostatic spraying apparatus being adjustable during spraying operation, e.g. for modifying spray width, droplet size
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/16—Arrangements for supplying liquids or other fluent material
Abstract
Description
本發明是有關於一種電流體動力泵頭組合，更詳細而言是有關於一種對黏性溶液施加電位差並藉由噴嘴分配黏性溶液的高度可調整電-流體動力（Electro Hydro Dynamic，EHD）泵頭組合。The present invention relates to an electrohydrodynamic pump head combination, and more specifically relates to a height-adjustable electro-hydrodynamic (Electro Hydro Dynamic, EHD) that applies a potential difference to a viscous solution and distributes the viscous solution through a nozzle. Pump head combination.
以高速定量對黏性溶液進行分配的泵廣泛用於包括半導體製程等的各種技術領域中。Pumps that dispense viscous solutions quantitatively at high speeds are widely used in various technical fields including semiconductor manufacturing.
如上所述，分配黏性溶液的泵使用螺旋（Auger）泵、氣壓泵、壓電（piezo）泵、噴墨（inkjet）泵等各種形態與結構的泵。As described above, pumps for dispensing viscous solutions use various forms and structures such as Auger pumps, pneumatic pumps, piezoelectric (piezo) pumps, and inkjet (inkjet) pumps.
為了更加精巧地調整黏性溶液的分配容量且將微細線寬的圖案分配至材料，亦存在使用電流體動力（Electro Hydro Dynamic，EHD）泵的情況。In order to finely adjust the dispensing capacity of the viscous solution and distribute a fine line width pattern to the material, there are also cases where an Electro Hydro Dynamic (EHD) pump is used.
電流體動力泵為利用由對儲存於儲存部的黏性溶液施加高電壓產生的電場帶來的能量、藉由噴嘴噴出黏性溶液的泵。The electrohydrodynamic pump is a pump that discharges a viscous solution through a nozzle using energy from an electric field generated by applying a high voltage to the viscous solution stored in a reservoir.
如上所述的電流體動力泵可以微細容量噴出黏性溶液，但存在分配特性因溶液的黏性或周邊環境、電極的形狀等重要原因而受到很大影響的缺點。The above-mentioned electrohydrodynamic pump can discharge a viscous solution with a fine volume, but has a disadvantage that the distribution characteristics are greatly affected by important factors such as the viscosity of the solution, the surrounding environment, and the shape of the electrode.
因此，為了有效地用於半導體製程等各種領域，需要以下結構的高度可調整電流體動力泵頭組合：亦可容易分配較高黏度的黏性溶液，且可較容易地控制黏性溶液的噴出形狀、圖案、流量等，同時可保持穩定的分配特性。Therefore, in order to be effectively used in various fields such as semiconductor manufacturing processes, a height-adjustable electrohydrodynamic pump head combination with the following structure is required: it can also easily dispense viscous solutions with higher viscosity, and can easily control the ejection of viscous solutions shape, pattern, flow, etc., while maintaining stable dispensing characteristics.
本發明是為了解決如上所述的問題點而提出，目的在於提供一種具有分配黏性溶液的性能優異且亦可穩定地保持分配特性、且容易調整分配特性的結構的高度可調整電流體動力泵頭組合。The present invention is made to solve the above-mentioned problems, and an object thereof is to provide a height-adjustable electrohydrodynamic pump having a structure that is excellent in dispensing viscous solution, can maintain the dispensing characteristics stably, and can easily adjust the dispensing characteristics head combination.
用於解決如上所述的目的的本發明的高度可調整電流體動力泵頭組合的特徵在於包括：儲存部，儲存黏性溶液；絕緣噴嘴，為絕緣材質，連接至所述儲存部並以在長度方向上延伸的方式形成，以噴出所述黏性溶液；內電極，配置於將儲存於所述儲存部的所述黏性溶液傳遞至所述絕緣噴嘴的路徑上；以及外電極，以包圍所述絕緣噴嘴的至少一部分的方式形成且以向上下延伸的方式形成。The height-adjustable electrohydrodynamic pump head combination of the present invention for solving the above-mentioned purpose is characterized by comprising: a storage part for storing a viscous solution; an insulating nozzle made of an insulating material, connected to the storage part and configured to formed to extend in the length direction to eject the viscous solution; an inner electrode arranged on a path for delivering the viscous solution stored in the storage part to the insulating nozzle; and an outer electrode to surround At least a part of the insulating nozzle is formed to extend upward and downward.
本發明的高度可調整電流體動力泵頭組合具有可使EHD泵容易對分配黏性溶液的條件進行調整，從而提高分配品質的效果。The height-adjustable electrohydrodynamic pump head combination of the present invention has the effect of enabling the EHD pump to easily adjust the conditions for distributing viscous solutions, thereby improving the dispensing quality.
本發明的高度可調整電流體動力泵頭組合具有可穩定地保持分配黏性溶液的高度可調整電流體動力泵頭組合的分配品質的效果。The height-adjustable electrohydrodynamic pump head combination of the present invention has the effect of stably maintaining the dispensing quality of the height-adjustable electrohydrodynamic pump head combination for dispensing viscous solutions.
以下，參照附圖，對根據本發明的一實施例的高度可調整電流體動力泵頭組合進行說明。Hereinafter, a height-adjustable electrohydrodynamic pump head combination according to an embodiment of the present invention will be described with reference to the accompanying drawings.
本發明的高度可調整電流體動力泵頭組合用於將黏性溶液塗佈至配置於基底上的材料。在接地的基底上配置有材料的狀態下，若對黏性溶液施加電壓，則因基底與黏性溶液之間的電位差而使黏性溶液藉由噴嘴噴出至材料上。The height-adjustable electrohydrodynamic pump head assembly of the present invention is used to apply a viscous solution to a material disposed on a substrate. When a voltage is applied to the viscous solution with the material disposed on the grounded substrate, the viscous solution is sprayed onto the material through the nozzle due to the potential difference between the substrate and the viscous solution.
圖1是根據本發明的一實施例的高度可調整電流體動力泵頭組合的立體圖，圖2及圖3是如圖1所示的高度可調整電流體動力泵頭組合的正面圖，圖4及圖5分別是如圖1所示的高度可調整電流體動力泵頭組合的VI-VI線剖面圖與局部放大圖。Fig. 1 is a perspective view of a height-adjustable electrohydrodynamic pump head assembly according to an embodiment of the present invention, Fig. 2 and Fig. 3 are front views of the height-adjustable electrohydrodynamic pump head assembly shown in Fig. 1, Fig. 4 5 and FIG. 5 are the VI-VI line sectional view and partial enlarged view of the height-adjustable electrohydrodynamic pump head combination shown in FIG. 1, respectively.
參照圖1至圖5，根據本實施例的高度可調整電流體動力泵頭組合包括儲存部（110）、內電極（310）、絕緣噴嘴（330）以及外電極（350）而形成。Referring to FIG. 1 to FIG. 5 , the height-adjustable electrohydrodynamic pump head assembly according to this embodiment includes a storage part ( 110 ), an inner electrode ( 310 ), an insulating nozzle ( 330 ) and an outer electrode ( 350 ).
儲存部（110）為儲存用於藉由絕緣噴嘴（330）噴出的黏性溶液的構成。儲存部（110）可以可儲存黏性溶液的各種形態構成。亦可使用藉由如管（tube）般的管道對儲存於另外的容器中的黏性溶液進行傳遞的形態的儲存部。在本實施例中，如圖1至圖5所示，以使用由圓筒形盒（cartridge）形態的容器結構形成的儲存部（110）的情況為例進行說明。可在如上所述般的儲存部（110）連接可對儲存於內部的黏性溶液施加壓力的氣壓調節器（regulator）來使用。The storage part (110) is configured to store the viscous solution to be sprayed by the insulating nozzle (330). The storage part (110) can be configured in various forms capable of storing the viscous solution. It is also possible to use a storage unit in a form that transfers a viscous solution stored in another container through a tube such as a tube. In this embodiment, as shown in FIG. 1 to FIG. 5 , the case of using the storage part ( 110 ) formed of a container structure in the form of a cylindrical box (cartridge) will be described as an example. An air pressure regulator (regulator) capable of applying pressure to the viscous solution stored inside may be connected to the storage part ( 110 ) as described above, and used.
如圖4及圖5所示，在儲存部（110）的下端設置有內電極（310）。內電極（310）由導電材質形成，以使得可對儲存於儲存部（110）的黏性溶液施加電壓。本實施例的內電極（310）以沿長度方向內徑與厚度固定地形成的金屬管道形態形成。藉由如上所述的結構，內電極（310）可對儲存於儲存部（110）的黏性溶液施加電壓，同時將黏性溶液傳遞至絕緣噴嘴（330）。As shown in FIG. 4 and FIG. 5 , an internal electrode ( 310 ) is provided at the lower end of the storage portion ( 110 ). The internal electrode (310) is formed of a conductive material so that a voltage can be applied to the viscous solution stored in the storage part (110). The internal electrode ( 310 ) of this embodiment is formed in the shape of a metal pipe whose inner diameter and thickness are fixed along the length direction. With the structure as described above, the internal electrode ( 310 ) can apply a voltage to the viscous solution stored in the storage part ( 110 ), while delivering the viscous solution to the insulating nozzle ( 330 ).
如圖4、圖5及圖7所示，絕緣噴嘴（330）以在長度方向上延伸的方式形成。絕緣噴嘴（330）以至少一部分越向下側內徑越減小的方式形成的情況為佳。於本實施例的情況，如圖7所示，絕緣噴嘴（330）的上部以沿長度方向內徑固定的方式形成，且下部以越向下側內徑越減小的管道形態形成。As shown in FIG. 4 , FIG. 5 and FIG. 7 , the insulating nozzle ( 330 ) is formed to extend in the longitudinal direction. It is preferable that at least a part of the insulating nozzle (330) is formed such that the inner diameter decreases toward the lower side. In the case of this embodiment, as shown in FIG. 7 , the upper part of the insulating nozzle ( 330 ) is formed with a constant inner diameter along the length direction, and the lower part is formed in the shape of a pipe whose inner diameter decreases toward the lower side.
絕緣噴嘴（330）由如玻璃般的絕緣材質形成。於本實施例的情況，絕緣噴嘴（330）藉由對玻璃材質的管道進行拉製加工的方法製作。如上所述的絕緣噴嘴（330）與內電極（310）同樣地組裝至儲存部（110）的下端。The insulating nozzle ( 330 ) is formed of an insulating material like glass. In the case of this embodiment, the insulating nozzle ( 330 ) is manufactured by drawing a glass pipe. The insulating nozzle ( 330 ) as described above is assembled to the lower end of the reservoir ( 110 ) in the same manner as the inner electrode ( 310 ).
於本實施例的情況，如圖7所示，絕緣噴嘴（330）以內電極（310）***至內部的狀態組裝至儲存部（110）。較佳為絕緣噴嘴（330）以與螺母形態的合成樹脂材質結構物結合的狀態藉由螺合方式組裝至儲存部（110）。此時，以向儲存部（110）的下端突出的方式設置的內電極（310）***至絕緣噴嘴（330）的狀態將絕緣噴嘴（330）連接至儲存部（110）。藉由如上所述的結構，內電極（310）可對黏性溶液施加電壓，同時直接對絕緣噴嘴（330）供應黏性溶液。於本實施例的情況，如圖7所示，內電極（310）以僅***至絕緣噴嘴（330）的內徑固定地形成的上部的方式形成。藉由如上所述的結構，內電極（310）可將黏性溶液傳遞至與絕緣噴嘴（330）的出口（outlet）非常近的位置並對該黏性溶液施加電壓。In the case of this embodiment, as shown in FIG. 7 , the electrode ( 310 ) inside the insulating nozzle ( 330 ) is assembled to the storage unit ( 110 ) in a state where the electrode ( 310 ) is inserted therein. Preferably, the insulating nozzle ( 330 ) is assembled to the storage part ( 110 ) by screwing in a state of being combined with a nut-shaped synthetic resin material structure. At this time, the insulating nozzle ( 330 ) is connected to the storage part ( 110 ) in a state where the inner electrode ( 310 ) provided to protrude toward the lower end of the storage part ( 110 ) is inserted into the insulating nozzle ( 330 ). With the structure as described above, the internal electrode (310) can apply voltage to the viscous solution while directly supplying the viscous solution to the insulating nozzle (330). In the case of the present embodiment, as shown in FIG. 7 , the inner electrode ( 310 ) is formed so as to be inserted only into the upper portion of the insulating nozzle ( 330 ) whose inner diameter is fixedly formed. With the structure as described above, the inner electrode ( 310 ) can deliver the viscous solution to a position very close to the outlet of the insulating nozzle ( 330 ) and apply voltage to the viscous solution.
絕緣噴嘴（330）的內徑與內電極（310）的外徑之間的間隔盡可能窄的情況為佳。若使絕緣噴嘴（330）的內徑與內電極（310）的外徑之間的間隔變窄，則可減小傳遞至絕緣噴嘴（330）的壓力損失與電磁力的損失並藉由絕緣噴嘴（330）有效地噴出黏性溶液。It is preferable that the distance between the inner diameter of the insulating nozzle (330) and the outer diameter of the inner electrode (310) be as narrow as possible. If the distance between the inner diameter of the insulating nozzle (330) and the outer diameter of the inner electrode (310) is narrowed, the pressure loss and the loss of electromagnetic force transmitted to the insulating nozzle (330) can be reduced and the insulating nozzle (330) Efficiently spray viscous solution.
較佳為絕緣噴嘴（330）的內徑與內電極（310）的外徑之間的間隔為0.05 mm至0.1 mm的情況為佳。若絕緣噴嘴（330）的內徑與內電極（310）的外徑之間的間隔小於0.05 mm，則難以對絕緣噴嘴（330）與內電極（310）進行組裝，於絕緣噴嘴（330）的內徑與內電極（310）的外徑之間的間隔大於0.1 mm的情況下，黏性溶液可能流至絕緣噴嘴（330）與內電極（310）之間，或者在絕緣噴嘴（330）的內壁與內電極（310）的外壁之間形成氣泡，或者該氣泡藉由絕緣噴嘴（330）與黏性溶液一同排出。Preferably, the interval between the inner diameter of the insulating nozzle ( 330 ) and the outer diameter of the inner electrode ( 310 ) is 0.05 mm to 0.1 mm. If the distance between the inner diameter of the insulating nozzle (330) and the outer diameter of the inner electrode (310) is less than 0.05 mm, it is difficult to assemble the insulating nozzle (330) and the inner electrode (310). When the distance between the inner diameter and the outer diameter of the inner electrode (310) is greater than 0.1 mm, the viscous solution may flow between the insulating nozzle (330) and the inner electrode (310), or between the insulating nozzle (330) Bubbles are formed between the inner wall and the outer wall of the inner electrode (310), or the bubbles are discharged together with the viscous solution through the insulating nozzle (330).
絕緣噴嘴（330）、內電極（310）與儲存部（110）組裝至上部主體（210）。上部主體（210）為結合儲存部（110）、內電極（310）與絕緣噴嘴（330）的組合並支撐的構成。如上所述的上部主體（210）與下部主體（230）組裝使用。The insulating nozzle (330), the inner electrode (310) and the storage part (110) are assembled to the upper body (210). The upper body (210) is a combination of the storage part (110), the internal electrode (310) and the insulating nozzle (330) and is supported. As mentioned above, the upper body (210) is assembled with the lower body (230) for use.
如圖4及圖5所示，下部主體（230）具有以向上下延伸的方式形成的組裝槽（231）。上部主體（210）具有以與組裝槽（231）對應的形狀形成的組裝延伸部（211）。藉由上部主體（210）的組裝延伸部（211）***至下部主體（230）的組裝槽（231）的方法來將上部主體（210）與下部主體（230）彼此進行組裝。As shown in FIG. 4 and FIG. 5 , the lower body ( 230 ) has an assembly groove ( 231 ) formed to extend upward and downward. The upper body (210) has an assembly extension (211) formed in a shape corresponding to the assembly groove (231). The upper body (210) and the lower body (230) are assembled with each other by inserting the assembly extension part (211) of the upper body (210) into the assembly groove (231) of the lower body (230).
在下部主體（230）固定有外電極（350）。即，外電極（350）設置並支撐在下部主體（230）。本實施例的外電極（350）以向上下延伸的管道形態形成。於本發明的情況，以由沿上下方向內徑與厚度固定地形成的結構形成的外電極（350）為例進行說明，但外電極（350）的結構與形狀可進行各種變形。例如，亦可形成為外電極的內徑沿上下方向增加或減小的管道形態的結構。另外，如圖9所示，亦可使用由沿圓周方向以固定角度間隔排列且在長度方向上延伸的結構的多個外電極元件（361）形成的外電極（360）。An external electrode (350) is fixed on the lower body (230). That is, the external electrode (350) is disposed and supported on the lower body (230). The external electrode ( 350 ) in this embodiment is formed in the form of a pipe extending upward and downward. In the case of the present invention, the external electrode (350) formed with a structure having a constant inner diameter and thickness along the vertical direction is described as an example, but the structure and shape of the external electrode (350) can be variously modified. For example, it may be a tube-shaped structure in which the inner diameter of the outer electrode increases or decreases in the vertical direction. In addition, as shown in FIG. 9 , an external electrode ( 360 ) formed of a plurality of external electrode elements ( 361 ) arranged at fixed angular intervals in the circumferential direction and extending in the longitudinal direction may also be used.
若組裝延伸部（211）***至組裝槽（231）以將上部主體（210）與下部主體（230）彼此組裝，則外電極（350）以不接觸狀態包圍絕緣噴嘴（330）的至少一部分的外周。於本實施例的情況，如圖5所示，絕緣噴嘴（330）的末端部分呈***至外電極（350）的狀態。此時，呈***至絕緣噴嘴（330）的內部的狀態的內電極（310）亦呈***至外電極（350）的內部的狀態。When the assembly extension (211) is inserted into the assembly groove (231) to assemble the upper body (210) and the lower body (230) with each other, the outer electrode (350) surrounds at least a part of the insulating nozzle (330) in a non-contact state. peripheral. In the case of this embodiment, as shown in FIG. 5 , the end portion of the insulating nozzle ( 330 ) is inserted into the external electrode ( 350 ). At this time, the inner electrode ( 310 ) inserted into the insulating nozzle ( 330 ) is also inserted into the outer electrode ( 350 ).
在如上所述的狀態下，上部主體（210）以可相對於下部主體（230）升降的方式設置。於本實施例的情況，上部主體（210）以可沿設置於下部主體（230）的導引軌道相對於下部主體（230）向上下升降的方式設置。本實施例的高度可調整電流體動力泵頭組合以如下方式構成：在手動調整上部主體（210）的高度後，使用另外的固定部件（250）對上部主體（210）的高度進行固定。視情況，亦可以以下方式構成高度可調整電流體動力泵頭組合：設置可藉由控制訊號調整上部主體（210）的高度的如線性馬達般的形態的升降部件，從而使上部主體（210）相對於下部主體（230）自動升降。若藉由如上所述的升降部件調整上部主體（210）的高度，最終絕緣噴嘴（330）相對於外電極（350）的高度得到調整。In the state as described above, the upper body (210) is provided in a manner to be able to move up and down relative to the lower body (230). In the case of this embodiment, the upper body ( 210 ) is provided in such a manner that it can move up and down relative to the lower body ( 230 ) along the guide rail provided on the lower body ( 230 ). The height-adjustable electrohydrodynamic pump head assembly of this embodiment is configured in the following manner: after manually adjusting the height of the upper body (210), use another fixing component (250) to fix the height of the upper body (210). Depending on the situation, the height-adjustable electrohydrodynamic pump head combination can also be formed in the following way: a lifting component in the form of a linear motor that can adjust the height of the upper body (210) through a control signal, so that the upper body (210) Automatically lifts relative to the lower body (230). If the height of the upper body ( 210 ) is adjusted by the above-mentioned lifting components, the height of the insulating nozzle ( 330 ) relative to the outer electrode ( 350 ) is finally adjusted.
本實施例的高度可調整電流體動力泵頭組合具有連接在絕緣噴嘴（330）與外電極（350）之間的氣體流道（410）。如上所述的氣體流道（410）連接在絕緣噴嘴（330）與外電極（350）之間，以在絕緣噴嘴（330）與外電極（350）之間傳遞正壓氣體或負壓氣體。The height-adjustable electrohydrodynamic pump head assembly of this embodiment has a gas flow channel (410) connected between the insulating nozzle (330) and the outer electrode (350). The gas channel ( 410 ) as mentioned above is connected between the insulating nozzle ( 330 ) and the outer electrode ( 350 ), so as to transmit positive pressure gas or negative pressure gas between the insulating nozzle ( 330 ) and the outer electrode ( 350 ).
如上所述的氣體流道（410）在絕緣噴嘴（330）與外電極（350）之間經由下部主體（230）的內部連接至外部氣壓裝置。於本實施例的情況，氣體流道（410）經由上部主體（210）的組裝延伸部（211）與下部主體（230）的組裝槽（231）之間的路徑。The gas flow channel ( 410 ) as described above is connected to the external gas pressure device via the interior of the lower body ( 230 ) between the insulating nozzle ( 330 ) and the outer electrode ( 350 ). In the case of this embodiment, the gas channel ( 410 ) passes through the path between the assembly extension ( 211 ) of the upper body ( 210 ) and the assembly groove ( 231 ) of the lower body ( 230 ).
組裝槽（231）形成為圓筒形，且組裝延伸部（211）以外徑與組裝槽（231）完全相配的圓柱形態形成。在組裝延伸部（211）的外表面形成沿圓周方向以相同間隔（90度間隔）向上下延伸的槽形態的部分流道（213）。在部分流道（213）的上端部形成並連接有沿組裝延伸部（211）的外徑以環形態形成的環形槽（211）。氣體流道（410）沿藉由如上所述的部分流道（213）與環形槽（211）形成的路徑連接在組裝延伸部（211）與組裝槽（231）之間。氣體流道（410）以自環形槽（211）向下部主體（230）的側方向相連的方式延伸。氣體流道（410）藉由如上所述的路徑連接至外部氣壓裝置。The assembly groove ( 231 ) is formed in a cylindrical shape, and the outer diameter of the assembly extension part ( 211 ) is formed in a cylindrical shape that completely matches the assembly groove ( 231 ). Partial flow channels ( 213 ) in the form of grooves extending up and down at equal intervals (90 degree intervals) along the circumferential direction are formed on the outer surface of the assembly extension portion ( 211 ). An annular groove (211) formed in a ring shape along the outer diameter of the assembly extension part (211) is formed and connected to the upper end of the partial flow channel (213). The gas channel ( 410 ) is connected between the assembly extension ( 211 ) and the assembly groove ( 231 ) along the path formed by the partial flow channel ( 213 ) and the annular groove ( 211 ) as described above. The gas channel (410) extends from the annular groove (211) to the side of the lower body (230). The gas channel ( 410 ) is connected to an external air pressure device through the above-mentioned path.
若使外部氣壓裝置產生正壓，則將壓縮氣體分散至外電極（350）與絕緣噴嘴（330）之間。反之，若使外部氣壓裝置產生負壓，則降低外電極（350）與絕緣噴嘴（330）之間的壓力，並藉由氣體流道（410）吸入絕緣噴嘴（330）周圍的空氣。If the external air pressure device generates a positive pressure, the compressed gas is dispersed between the external electrode (350) and the insulating nozzle (330). Conversely, if the external air pressure device generates negative pressure, the pressure between the external electrode (350) and the insulating nozzle (330) is reduced, and the air around the insulating nozzle (330) is sucked in through the gas flow channel (410).
另一方面，所述絕緣噴嘴（330）相對於外電極（350）的相對位置藉由將上部主體（210）的組裝延伸部（211）***至下部主體（230）的組裝槽（231）自動對準。若以使組裝延伸部（211）與組裝槽（231）之間的公差非常小的方式進行加工，則在組裝延伸部（211）***至組裝槽（231）後，絕緣噴嘴（330）的水平方向位移固定。因此，若組裝延伸部（211）***至組裝槽（231）且被組裝槽（231）導引同時進行滑動，則絕緣噴嘴（330）容易進入至外電極（350）的內部。利用如上所述的方法可防止絕緣噴嘴（330）的損壞。由於絕緣噴嘴（330）由非常脆的玻璃材質形成得非常細且長，因此即使受到小的衝擊亦容易損壞。如上所述，因組裝槽（231）與組裝延伸部（211）的形狀與結構，絕緣噴嘴（330）容易進入至外電極（350）的內部。在將絕緣噴嘴（330）相對於外電極（350）的水平方向位置對準的狀態下，若將上部主體（210）與下部主體（230）進行組裝，則防止絕緣噴嘴（330）的損壞且使絕緣噴嘴（330）容易進入至外電極（350）的內部。On the other hand, the relative position of the insulating nozzle (330) relative to the external electrode (350) is automatically adjusted by inserting the assembly extension (211) of the upper body (210) into the assembly groove (231) of the lower body (230). alignment. If the tolerance between the assembly extension (211) and the assembly groove (231) is processed so that the tolerance between the assembly extension (211) and the assembly groove (231) is very small, after the assembly extension (211) is inserted into the assembly groove (231), the level of the insulating nozzle (330) Direction displacement is fixed. Therefore, if the assembly extension ( 211 ) is inserted into the assembly groove ( 231 ) and slides while being guided by the assembly groove ( 231 ), the insulating nozzle ( 330 ) can easily enter the inside of the external electrode ( 350 ). Damage to the insulating nozzle (330) can be prevented using the method described above. Since the insulating nozzle ( 330 ) is formed of a very brittle glass material and is very thin and long, it is easily damaged even by a small impact. As mentioned above, due to the shape and structure of the assembling groove ( 231 ) and the assembling extension part ( 211 ), the insulating nozzle ( 330 ) can easily enter into the inside of the external electrode ( 350 ). In the state where the insulating nozzle (330) is aligned with the horizontal position of the external electrode (350), if the upper body (210) and the lower body (230) are assembled, the insulating nozzle (330) is prevented from being damaged and Allows easy access of the insulating nozzle (330) to the inside of the outer electrode (350).
為此，絕緣噴嘴（330）向上部主體（210）的下側突出的長度較組裝槽（231）的深度短的情況為佳。若如上所述般構成，則於絕緣噴嘴（330）與組裝槽（231）的底部接觸之前，組裝延伸部（211）開始***至組裝槽（231）。組裝延伸部（211）藉由組裝槽（231）進行位置對準的同時亦自動對準絕緣噴嘴（330）的位置。For this reason, it is preferable that the protruding length of the insulating nozzle ( 330 ) to the lower side of the upper body ( 210 ) is shorter than the depth of the assembly groove ( 231 ). If configured as described above, the assembly extension ( 211 ) starts to be inserted into the assembly groove ( 231 ) before the insulating nozzle ( 330 ) comes into contact with the bottom of the assembly groove ( 231 ). The assembling extension part (211) is automatically aligned to the position of the insulating nozzle (330) while being aligned through the assembling groove (231).
如上所說明，由於組裝槽（231）與組裝延伸部（211）之間以公差非常小的方式形成，因此除氣體流道（410）之外的剩餘部分的組裝槽（231）與組裝延伸部（211）之間是氣密的。視需要亦可在組裝延伸部（211）或組裝槽（231）設置如O形環等密封部件，從而更加切實地將組裝槽（231）與組裝延伸部（211）之間進行氣體密封。As explained above, since the assembly groove ( 231 ) and the assembly extension ( 211 ) are formed with a very small tolerance, the rest of the assembly groove ( 231 ) and the assembly extension ( 210 ) except the gas flow channel ( 410 ) (211) are airtight. If necessary, sealing components such as O-rings can also be provided on the assembly extension ( 211 ) or the assembly groove ( 231 ), so as to more reliably seal the gas between the assembly groove ( 231 ) and the assembly extension ( 211 ).
另一方面，在下部主體（230）設置有絕緣材質的絕緣蓋（233）。絕緣蓋（233）形成有以沿上下貫通的方式形成的電極孔。絕緣蓋（233）以可於電極孔的內部配置外電極（350）的狀態結合至下部主體（230）。絕緣蓋（233）起到將外電極（350）固定至下部主體（230）的作用與保護作業人員免受施加至外電極（350）的高電壓的影響的作用。On the other hand, an insulating cover (233) made of an insulating material is provided on the lower body (230). The insulating cover (233) is formed with an electrode hole formed in a vertically penetrating manner. The insulating cover ( 233 ) is coupled to the lower body ( 230 ) in a state where the external electrode ( 350 ) can be disposed inside the electrode hole. The insulating cover ( 233 ) functions to fix the external electrode ( 350 ) to the lower body ( 230 ) and protect workers from high voltage applied to the external electrode ( 350 ).
以下，對如上所述構成的高度可調整電流體動力泵頭組合的操作進行說明。Hereinafter, the operation of the height-adjustable electrohydrodynamic pump head combination constructed as above will be described.
首先，對根據本實施例的高度可調整電流體動力泵頭組合的組裝順序進行說明。First, the assembly sequence of the height-adjustable electrohydrodynamic pump head assembly according to this embodiment will be described.
參照圖1、圖2及圖4，將外電極（350）組裝至下部主體（230）。如上所說明，利用絕緣蓋（233）將外電極（350）固定至下部主體（230）的下部。此時，外電極（350）經由絕緣蓋（233）的電極孔暴露於下側。Referring to FIG. 1 , FIG. 2 and FIG. 4 , assemble the external electrode ( 350 ) to the lower body ( 230 ). As explained above, the external electrode ( 350 ) is fixed to the lower portion of the lower body ( 230 ) using the insulating cover ( 233 ). At this time, the external electrode ( 350 ) is exposed to the lower side through the electrode hole of the insulating cover ( 233 ).
外電極（350）藉由下部主體（230）電性連接至電源供應裝置。電源供應裝置以在控制部設定的電壓對外電極（350）施加直流電壓。The external electrode (350) is electrically connected to the power supply device through the lower body (230). The power supply device applies a DC voltage to the external electrode (350) at a voltage set in the control unit.
接著，參照圖1、圖2及圖7，於儲存部（110）組裝內電極（310）與絕緣噴嘴（330）。儲存於儲存部（110）的黏性溶液呈可藉由內電極（310）排出至外部的狀態。另外，如圖7所示，對儲存部（110）組裝絕緣噴嘴（330），以使得內電極（310）呈***至絕緣噴嘴（330）的內徑固定地形成的部分的狀態。若呈如上所述般的狀態，則儲存於儲存部（110）的黏性溶液可藉由內電極（310）直接傳遞至絕緣噴嘴（330）。在儲存部（110）連接氣壓調節器。氣壓調節器可以在控制部中設定的壓力對儲存於儲存部（110）的黏性溶液施加壓力。Next, referring to FIG. 1 , FIG. 2 and FIG. 7 , the inner electrode ( 310 ) and the insulating nozzle ( 330 ) are assembled in the storage part ( 110 ). The viscous solution stored in the storage part (110) is in a state that can be discharged to the outside through the internal electrode (310). In addition, as shown in FIG. 7 , the insulating nozzle ( 330 ) is assembled to the reservoir ( 110 ) such that the inner electrode ( 310 ) is inserted into a part of the insulating nozzle ( 330 ) whose inner diameter is fixedly formed. In the state as described above, the viscous solution stored in the storage part (110) can be directly transferred to the insulating nozzle (330) through the inner electrode (310). Connect the air pressure regulator to the reservoir (110). The air pressure regulator can apply pressure to the viscous solution stored in the storage part (110) at the pressure set in the control part.
在如上所述的狀態下，如圖1及圖2所示，將儲存部（110）、內電極（310）與絕緣噴嘴（330）的組合安裝至上部主體（210）。如圖1及圖2所示，在使上部主體（210）為相對於下部主體（230）上升的狀態下，將儲存部（110）及其周邊構成安裝至上部主體（210）。如上所述，在上部主體（210）為上升的狀態下，內電極（310）與絕緣噴嘴（330）可不卡合在下部主體（230）且容易安裝至上部主體（210）。In the above state, as shown in FIG. 1 and FIG. 2 , the combination of the storage part ( 110 ), the inner electrode ( 310 ) and the insulating nozzle ( 330 ) is mounted to the upper body ( 210 ). As shown in FIG. 1 and FIG. 2 , in a state where the upper body ( 210 ) is raised relative to the lower body ( 230 ), the storage part ( 110 ) and its peripheral structures are attached to the upper body ( 210 ). As described above, when the upper body (210) is raised, the inner electrode (310) and the insulating nozzle (330) can be easily attached to the upper body (210) without engaging the lower body (230).
內電極（310）藉由上部主體（210）連接至電源供應裝置。電源供應裝置對內電極（310）施加在控制部中設定的直流電壓。The inner electrode (310) is connected to the power supply device through the upper body (210). The power supply device applies the DC voltage set in the control unit to the inner electrode (310).
在使上部主體（210）向下側滑動時，如圖3及圖5所示，組裝延伸部（211）***至組裝槽（231），且將上部主體（210）與下部主體（230）彼此組裝。此時，絕緣噴嘴（330）亦***至外電極（350）的內部。如上所述的過程亦可手動執行，亦可藉由根據控制部的訊號進行作動的升降部件執行。上部主體（210）與下部主體（230）之間的相對位置可根據作業條件或黏性溶液的特性等各種參數來調整。When the upper body (210) is slid downward, as shown in Figure 3 and Figure 5, the assembly extension (211) is inserted into the assembly groove (231), and the upper body (210) and the lower body (230) are connected to each other Assemble. At this time, the insulating nozzle ( 330 ) is also inserted into the inside of the external electrode ( 350 ). The above-mentioned process can also be performed manually, and can also be performed by a lifting member that operates according to a signal from the control unit. The relative position between the upper body (210) and the lower body (230) can be adjusted according to various parameters such as working conditions or properties of the viscous solution.
如上所說明，若絕緣噴嘴（330）向上部主體（210）的下側突出的長度較組裝槽（231）的深度短地形成，則具有可降低組裝槽（231）的損壞危險的優點。由於在絕緣噴嘴（330）與組裝槽（231）的底部接觸或進入至外電極（350）的內部之前，組裝延伸部（211）開始***至組裝槽（231），因此在組裝延伸部（211）的位置藉由組裝槽（231）對準的同時亦自動對準絕緣噴嘴（330）的位置。因此，絕緣噴嘴（330）在準確的位置處進入至外電極（350）的內部。另外，在絕緣噴嘴（330）進入的過程中，絕緣噴嘴（330）不與外電極（350）接觸。As described above, if the length of the insulating nozzle ( 330 ) protruding to the lower side of the upper body ( 210 ) is formed shorter than the depth of the assembly groove ( 231 ), there is an advantage that the risk of damage to the assembly groove ( 231 ) can be reduced. Since the assembly extension ( 211 ) starts to be inserted into the assembly groove ( 231 ) before the insulating nozzle ( 330 ) comes into contact with the bottom of the assembly groove ( 231 ) or enters the inside of the outer electrode ( 350 ), the assembly extension ( 211 ) ) is aligned with the position of the insulating nozzle (330) while being aligned with the assembly groove (231). Therefore, the insulating nozzle ( 330 ) enters into the inside of the outer electrode ( 350 ) at an accurate position. In addition, during the entry process of the insulating nozzle ( 330 ), the insulating nozzle ( 330 ) does not contact the external electrode ( 350 ).
完成上部主體（210）與下部主體（230）的組裝時，如圖6所示，絕緣噴嘴（330）的末端部分向外電極（350）的下部暴露出。視情況對上部主體（210）的高度進行調整，從而亦可在絕緣噴嘴（330）的末端部分不向外電極（350）的下部暴露出的狀態下實施分配作業。When the assembly of the upper body ( 210 ) and the lower body ( 230 ) is completed, as shown in FIG. 6 , the end portion of the insulating nozzle ( 330 ) is exposed to the lower part of the outer electrode ( 350 ). The height of the upper body (210) is adjusted as appropriate, so that the dispensing operation can also be performed in a state where the end portion of the insulating nozzle (330) is not exposed to the lower portion of the outer electrode (350).
按照如上所述般的順序進行組裝使用的本實施例的高度可調整電流體動力泵頭組合可以如圖8所示般的狀態使用。如圖8所示，本實施例的電流體動力泵在與照相機、感測器等其他構成一起設置於支撐面板的狀態下設置於另外的移送裝置來使用。藉由移送裝置向垂直方向與水平方向移送且利用各種方法對配置於底部的材料分配黏性溶液。The height-adjustable electrohydrodynamic pump head assembly of this embodiment, which is assembled and used according to the above-mentioned sequence, can be used in the state shown in FIG. 8 . As shown in FIG. 8 , the electrohydrodynamic pump of this embodiment is installed on a support panel together with other components such as a camera and a sensor, and is used by being installed on another transfer device. The viscous solution is transferred to the vertical and horizontal directions by the transfer device and distributed to the materials arranged at the bottom by various methods.
如上所述，若將材料配置於接地的基底（底部），且利用電源供應裝置對內電極（310）與外電極（350）施加直流電壓，則藉由由內電極（310）及外電極（350）產生的針對基底的電位差將絕緣噴嘴（330）內部的黏性溶液朝向下側噴出。於本實施例的情況，對內電極（310）施加固定的直流電壓，對外電極（350）施加各種圖案與頻率的脈衝電壓，從而藉由絕緣噴嘴（330）噴出黏性溶液。視情況亦可相反地利用對外電極（350）施加固定的直流電壓、對內電極（310）施加特定頻率的脈衝電壓的方法構成高度可調整電流體動力泵頭組合。As mentioned above, if the material is placed on the grounded substrate (bottom), and a DC voltage is applied to the inner electrode (310) and the outer electrode (350) by a power supply device, the inner electrode (310) and the outer electrode ( The potential difference against the substrate generated by 350) sprays the viscous solution inside the insulating nozzle (330) towards the lower side. In the case of this embodiment, a fixed DC voltage is applied to the inner electrode (310), and pulse voltages of various patterns and frequencies are applied to the outer electrode (350), so that the viscous solution is ejected through the insulating nozzle (330). Depending on the situation, the method of applying a fixed DC voltage to the external electrode (350) and a pulse voltage of a specific frequency to the internal electrode (310) can be used instead to form a height-adjustable electrohydrodynamic pump head combination.
如圖7所示，由於內電極（310）進入至絕緣噴嘴（330）的內部，因此可更有效地施加直流電壓以噴出黏性溶液。藉由如上所述的結構可提高黏性溶液的分配性能。另外，由於本實施例的內電極（310）以管道形態形成，因此形成電位差的同時執行將黏性溶液供應至絕緣噴嘴（330）的功能，從而可進一步提高分配性能。As shown in FIG. 7 , since the inner electrode ( 310 ) enters the interior of the insulating nozzle ( 330 ), DC voltage can be applied more effectively to eject the viscous solution. The dispensing performance of the viscous solution can be improved by the structure as described above. In addition, since the inner electrode ( 310 ) of this embodiment is formed in the form of a pipe, it performs the function of supplying the viscous solution to the insulating nozzle ( 330 ) while forming a potential difference, thereby further improving dispensing performance.
因如上所述的內電極（310）與絕緣噴嘴（330）之間的結構，可使將儲存於儲存部（110）的黏性溶液供應至絕緣噴嘴（330）的部分與自絕緣噴嘴（330）噴出黏性溶液的部分之間的距離變得非常近。藉由此種結構，可顯著降低在分配過程中產生氣泡的可能性。另外，由於因如上所述的結構在與絕緣噴嘴（330）的噴出口非常近的位置處利用內電極（310）對黏性溶液施加電壓，因此使得本實施例的高度可調整電流體動力泵頭組合具有優異的分配性能。另外，如上所述的結構具有非常容易直接控制分配特性的優點。Due to the structure between the inner electrode (310) and the insulating nozzle (330) as described above, the part that supplies the viscous solution stored in the storage part (110) to the insulating nozzle (330) can be separated from the self-insulating nozzle (330). ) the distance between the parts where the viscous solution is ejected becomes very close. With this structure, the possibility of air bubbles during dispensing is significantly reduced. In addition, since the internal electrode (310) is used to apply a voltage to the viscous solution at a position very close to the discharge port of the insulating nozzle (330) due to the structure as described above, the height-adjustable electrohydrodynamic pump of this embodiment The head combination has excellent dispensing properties. In addition, the structure as described above has the advantage that it is very easy to directly control the dispensing characteristics.
另外，由於外電極（350）亦可在與內電極（310）及絕緣噴嘴（330）非常近的位置處施加直流電壓，因此本實施例的高度可調整電流體動力泵頭組合具有更優異的分配性能。特別是，本實施例的高度可調整電流體動力泵頭組合的外電極（350）以管道形態形成，從而形成包圍絕緣噴嘴（330）的外周且向上下延伸的空間。在如上所述的狀態下，由於對外電極（350）施加直流電壓，因此本發明的高度可調整電流體動力泵頭組合可減少由外部環境或噪音的干涉帶來的影響。結果，本發明的高度可調整電流體動力泵頭組合具有更穩定地分配黏性溶液的性能。In addition, since the outer electrode (350) can also apply DC voltage at a position very close to the inner electrode (310) and the insulating nozzle (330), the height-adjustable electrohydrodynamic pump head combination of this embodiment has more excellent Allocate performance. In particular, the outer electrode ( 350 ) of the height-adjustable electrohydrodynamic pump head combination of this embodiment is formed in the form of a pipe, thereby forming a space surrounding the outer periphery of the insulating nozzle ( 330 ) and extending upward and downward. In the above state, since the external electrode ( 350 ) is applied with a DC voltage, the height-adjustable electrohydrodynamic pump head combination of the present invention can reduce the influence caused by the interference of the external environment or noise. As a result, the height-adjustable electrohydrodynamic pump head assembly of the present invention has the property of more stably dispensing viscous solutions.
另外，於內電極（310）與外電極（350）二者以圓筒形形成的情況下，藉由進一步增大在內電極（310）與外電極（350）之間產生電位差的面積與空間，從而使得本發明的高度可調整電流體動力泵頭組合具有可對黏性溶液更有效地傳遞電磁力的結構。In addition, in the case where both the inner electrode ( 310 ) and the outer electrode ( 350 ) are formed in a cylindrical shape, by further increasing the area and space where the potential difference is generated between the inner electrode ( 310 ) and the outer electrode ( 350 ), , so that the height-adjustable electrohydrodynamic pump head assembly of the present invention has a structure that can more effectively transmit electromagnetic force to viscous solutions.
接著，對氣體流道（410）的作用進行說明。連接至外部氣壓泵的氣體流道（410）利用形成於組裝延伸部（211）的環形槽（211）與部分流道（213）連至上部主體（210）及下部主體（230）的下部。在部分流道（213）的下端部，氣體流道（410）再次以放射狀沿半徑方向延伸，且連至外電極（350）的內側空間為止。結果，氣體流道（410）的末端部分連接至外電極（350）與絕緣噴嘴（330）之間的空間。根據外部氣壓泵的作動，氣體流道（410）向外電極（350）與絕緣噴嘴（330）之間供應正壓氣體或負壓氣體。Next, the function of the gas channel ( 410 ) will be described. The gas channel (410) connected to the external air pump is connected to the lower part of the upper body (210) and the lower body (230) by using the annular groove (211) and part of the channel (213) formed in the assembly extension (211). At the lower end of the part of the flow channel (213), the gas flow channel (410) extends radially again in the radial direction, and is connected to the inner space of the external electrode (350). As a result, the end portion of the gas flow channel ( 410 ) is connected to the space between the outer electrode ( 350 ) and the insulating nozzle ( 330 ). According to the action of the external air pump, the gas channel (410) supplies positive pressure gas or negative pressure gas between the external electrode (350) and the insulating nozzle (330).
通常而言，分配黏性溶液的泵在開始作業的步驟中去除內部氣泡或在執行校正（calibration）的過程中執行吹掃（purge）作業的情形是普遍的。在執行如上所述般的吹掃作業時，若藉由氣體流道（410）產生正壓，則起到有助於藉由絕緣噴嘴（330）噴出黏性溶液的作用。另外，若不僅在開始吹掃作業的情況下、而且在針對產品的分配作業的情況下，亦藉由氣體流道（410）在絕緣噴嘴（330）的周圍產生固定壓力的氣體流動，產生可縮短形成用於噴出的穩定的彎液面（meniscus）的時間的效果。In general, it is common for a pump dispensing a viscous solution to remove internal air bubbles during a start-up step or to perform a purge during a calibration. When performing the above-mentioned purging operation, if the positive pressure is generated through the gas channel (410), it will help to eject the viscous solution through the insulating nozzle (330). In addition, if the gas flow of a fixed pressure is generated around the insulating nozzle (330) through the gas flow channel (410) not only when the purge operation is started but also when the product distribution operation is started, a possible The effect of shortening the time to form a stable meniscus for ejection.
若對藉由氣體流道（410）傳遞的氣體壓力的大小或氣體的流量進行調整，則亦可使本實施例的高度可調整電流體動力泵頭組合以噴霧形態分配黏性溶液的方式作動，而並非以液滴（droplet）單位噴出黏性溶液。If the pressure of the gas or the flow rate of the gas transmitted through the gas flow channel (410) is adjusted, the height-adjustable electrohydrodynamic pump head combination of this embodiment can also be activated to distribute the viscous solution in the form of a spray , instead of spraying a viscous solution in droplet units.
另一方面，亦可使高度可調整電流體動力泵頭組合作動，以藉由氣體流道（410）傳遞負壓以在絕緣噴嘴（330）的周圍形成真空。若在執行如上所述般的吹掃作業期間在氣體流道（410）中產生負壓，則藉由絕緣噴嘴（330）吹掃的黏性溶液被抽吸（suction）並藉由氣體流道（410）排出至外部。即，藉由在對高度可調整電流體動力泵頭組合進行校正或進行作業準備的步驟中使黏性溶液不向絕緣噴嘴（330）的下側下落，且藉由氣體流道（410）排出至外部，從而可防止由黏性溶液引起的作業空間的污染。另外，如上所述，即使在以噴霧形態分配黏性溶液的情況下，亦可在不對材料分配黏性溶液期間對氣體流道（410）施加負壓，以藉由氣體流道（410）抽吸黏性溶液的微細粒子並排出至外部。On the other hand, the height-adjustable electrohydrodynamic pump head assembly can also be operated to transmit negative pressure through the gas flow channel (410) to form a vacuum around the insulating nozzle (330). If a negative pressure is generated in the gas flow channel (410) during the purging operation as described above, the viscous solution purged by the insulating nozzle (330) is sucked and passed through the gas flow channel (410) is vented to the outside. That is, by preventing the viscous solution from falling to the lower side of the insulating nozzle (330) during the steps of calibrating or preparing the height-adjustable electrohydrodynamic pump head combination, and discharging through the gas flow channel (410) to the outside, thereby preventing contamination of the work space by viscous solutions. In addition, as described above, even in the case of dispensing the viscous solution in the form of a spray, negative pressure can be applied to the gas flow path (410) during the period when the viscous solution is not being dispensed to the material to draw air through the gas flow path (410). Suction fine particles of viscous solution and discharge to the outside.
由於本實施例的高度可調整電流體動力泵頭組合以外電極（350）以不接觸狀態包圍絕緣噴嘴（330）的方式配置，因此具有容易將氣體流道（410）連接至絕緣噴嘴（330）與外電極（350）之間的結構上的優點。由於藉由如上所述般的結構可使氣體流道（410）接近距絕緣噴嘴（330）非常近的位置，因此具有可提高由氣體流道（410）所傳遞的正壓或負壓的氣體壓力帶來的作用效果的優點。Since the height-adjustable electrohydrodynamic pump head combination of this embodiment is arranged in such a way that the outer electrode (350) surrounds the insulating nozzle (330) in a non-contact state, it is easy to connect the gas flow channel (410) to the insulating nozzle (330) Structural advantages with the external electrode (350). Since the gas channel (410) can be placed very close to the insulating nozzle (330) through the structure as described above, there is a gas that can increase the positive pressure or negative pressure transmitted by the gas channel (410). The advantage of the action effect brought by pressure.
另一方面，如本發明的高度可調整電流體動力泵頭組合般的分配泵將噴嘴的高度保持為設定的值是非常重要的。於本發明的情況，可使用如下所述的方法來對外電極（350）及絕緣噴嘴（330）的高度進行校正（calibration）及控制。On the other hand, it is very important for a dispensing pump like the height-adjustable electrohydrodynamic pump head combination of the present invention to maintain the height of the nozzle at the set value. In the case of the present invention, the following method can be used to calibrate and control the height of the outer electrode (350) and the insulating nozzle (330).
如圖1、圖2及圖4所示，在使上部主體（210）為相對於下部主體（230）上升的狀態下，使如圖7般的整體結構物下降來對外電極（350）的高度進行測定。於使用線性可變位移感測器（Linear Variable Displacement Transducer，LVDT）的情況下，使外電極（350）下降至外電極（350）與LVDT感測器接觸時為止，從而把握外電極（350）的基準高度。藉由上部主體（210）與下部主體（230）之間的相對位移，可容易地對內電極（310）或絕緣噴嘴（330）相對於外電極（350）的相對位移進行測定或調整。因此，若利用如上所述般的方法直接測定外電極（350）的高度，且利用間接的方法測定內電極（310）或絕緣噴嘴（330）的高度，則既可防止內電極（310）或絕緣噴嘴（330）損壞，亦可準確地掌握並調整主要構成的高度。利用如上所述般的方法可容易調整與主要構成的高度相關的因素，從而控制黏性溶液的分配特性。As shown in Figure 1, Figure 2 and Figure 4, in the state where the upper body (210) is raised relative to the lower body (230), the overall structure as shown in Figure 7 is lowered to the height of the external electrode (350) To measure. In the case of using a linear variable displacement transducer (Linear Variable Displacement Transducer, LVDT), the outer electrode (350) is lowered until the outer electrode (350) contacts the LVDT sensor, so as to grasp the outer electrode (350) base height. Through the relative displacement between the upper body (210) and the lower body (230), the relative displacement of the inner electrode (310) or the insulating nozzle (330) relative to the outer electrode (350) can be easily measured or adjusted. Therefore, if the height of the external electrode (350) is directly measured by the method as described above, and the height of the internal electrode (310) or the insulating nozzle (330) is measured by an indirect method, it is possible to prevent the internal electrode (310) or If the insulating nozzle (330) is damaged, the height of the main components can also be accurately grasped and adjusted. Factors related to the height of the main constituents can be easily adjusted using methods such as those described above to control the dispensing properties of viscous solutions.
另一方面，如上所述，本實施例的高度可調整電流體動力泵頭組合為可將容器形態的儲存部（110）與內電極（310）及絕緣噴嘴（330）作為一組安裝至上部主體（210）的結構，因此具有使用上的便利與性能上的優異性。先前，經常使用將黏性溶液儲存於如小玻璃瓶（vial）般的容器並藉由管將黏性溶液傳遞至噴嘴的結構，但於本發明的情況，使用將容器形態的儲存部（110）與內電極（310）及絕緣噴嘴（330）直接短距離連接的結構。因此，可將連接至儲存部（110）的調節器壓力的損失最小化同時傳遞至內電極（310）。另外，由於不使用中間連接管，因此本實施例的高度可調整電流體動力泵頭組合具有可將結構簡單化且亦可使大小構成得小的優點。On the other hand, as described above, the height-adjustable electrohydrodynamic pump head of this embodiment is combined so that the storage part (110) in the form of a container, the inner electrode (310) and the insulating nozzle (330) can be installed on the upper part as a set. The structure of the main body (210) therefore has convenience in use and excellent performance. Previously, a viscous solution was stored in a container such as a vial and the viscous solution was delivered to the nozzle through a tube, but in the case of the present invention, a container-shaped storage part (110 ) is directly connected to the inner electrode (310) and the insulating nozzle (330) in a short distance. Therefore, the loss of regulator pressure connected to the reservoir ( 110 ) can be minimized while being transferred to the inner electrode ( 310 ). In addition, since no intermediate connecting pipe is used, the height-adjustable electrohydrodynamic pump head combination of this embodiment has the advantages of simplifying the structure and making the size smaller.
如上所述般的本發明的結構可保持如上所述般的優點且進行各種變形。在上文中，說明了儲存部（110）與內電極（310）及絕緣噴嘴（330）以組裝為一組的狀態安裝至上部主體（210）的情形，但如上所述般的結構可視需要進行變形。例如，亦可以如下方式構成：在內電極（310）與絕緣噴嘴（330）組裝於上部主體（210）的狀態下，可以可裝卸的方式將儲存部（110）結合至上部主體（210），從而與內電極（310）及絕緣噴嘴（330）結合。The structure of the present invention as described above can be variously modified while maintaining the advantages as described above. In the above, the case where the storage part (110), the inner electrode (310) and the insulating nozzle (330) are assembled to the upper body (210) in a state of being assembled is described, but the above-mentioned structure can be modified as needed. out of shape. For example, it may also be configured as follows: in a state where the inner electrode (310) and the insulating nozzle (330) are assembled on the upper body (210), the storage part (110) can be detachably combined with the upper body (210), Thereby combined with the inner electrode (310) and the insulating nozzle (330).
以上，以較佳的例子為例對本發明進行了說明，但本發明的範圍並非限定於上文中說明並示出的形態。As mentioned above, although this invention was demonstrated taking a preferable example as an example, the scope of this invention is not limited to the form demonstrated and shown above.
例如，內電極（310）、絕緣噴嘴（330）及外電極（350）的結構除圓筒形的結構之外，可分別變形為其他各種結構，且外徑及內徑的大小亦可視需要進行各種變形。另外，如圖9所示，外電極（360）亦可以如下方式進行變形：藉由在圓周方向上排列的多個外電極元件（361）構成具有與圓筒形相似的結構的外電極（360）。內電極（310）的結構亦可變形為如上所述般的結構來使用。For example, the structures of the inner electrode (310), the insulating nozzle (330) and the outer electrode (350) can be deformed into other structures in addition to the cylindrical structure, and the size of the outer diameter and inner diameter can also be adjusted according to the needs. Various deformations. In addition, as shown in FIG. 9, the external electrode (360) can also be deformed in the following manner: an external electrode (360) having a structure similar to a cylinder is formed by a plurality of external electrode elements (361) arranged in the circumferential direction ). The structure of the internal electrode ( 310 ) can also be modified to the above-mentioned structure for use.
另外，與在上文中參照圖式說明的結構不同，亦可以可相對於另一者對內電極與絕緣噴嘴中的任一者進行高度調整的方式構成本發明的高度可調整電流體動力泵頭組合。如上所述，藉由對內電極與絕緣噴嘴之間的高度進行調整，從而可對黏性溶液的分配特性進行調整。In addition, unlike the structure described above with reference to the drawings, the height-adjustable electrohydrodynamic pump head of the present invention can also be configured in such a manner that the height of any one of the inner electrode and the insulating nozzle can be adjusted relative to the other. combination. As described above, by adjusting the height between the inner electrode and the insulating nozzle, the dispensing characteristics of the viscous solution can be adjusted.
另外，在上文中說明了內電極（310）***至絕緣噴嘴（330）的內部的情形，但視情況亦可以內電極不***至絕緣噴嘴的形態構成高度可調整電流體動力泵頭組合。視情況亦可使用並非管道形態的內電極。In addition, the case where the inner electrode (310) is inserted into the insulating nozzle (330) has been described above, but depending on the situation, the height-adjustable electrohydrodynamic pump head assembly can also be formed in a form where the inner electrode is not inserted into the insulating nozzle. Optionally, an inner electrode other than a pipe can also be used.
另外，對內電極（310）與絕緣噴嘴（330）直接連接至容器形態的儲存部（110）的情形進行了說明並示出，但亦可構成使容器形態的儲存部藉由如管般的中間結構物與內電極及絕緣噴嘴連接的結構的高度可調整電流體動力泵頭組合。In addition, the case where the inner electrode ( 310 ) and the insulating nozzle ( 330 ) are directly connected to the storage part ( 110 ) in the form of a container has been described and shown, but the storage part in the form of a container can also be constructed so that the storage part in the form of a tube can The height of the structure connecting the intermediate structure with the inner electrode and the insulating nozzle can be adjusted to combine with the electrohydrodynamic pump head.
另外，在上文中以上部主體（210）以可相對於下部主體（230）升降的方式設置的結構為例進行了說明，但亦可變更為下部主體以可相對於上部主體升降的方式設置的結構。於此情況，升降部件使下部主體相對於上部主體進行升降。In addition, the upper body (210) has been described as an example in which the upper body (210) can be raised and lowered relative to the lower body (230). structure. In this case, the lifting member lifts the lower body relative to the upper body.
另外，上部主體與下部主體的組裝結構亦可不是相互滑動的方式，而多樣地變形為相互螺合的結構、扣合的結構等。亦可構成不是彼此分離成上部主體與下部主體的結構，而是具有形成為一體的主體部的高度可調整電流體動力泵頭組合。In addition, the assembly structure of the upper body and the lower body may be variously deformed into a screwed structure, a buckled structure, etc. instead of a mutual sliding manner. It is also possible to configure a height-adjustable electrohydrodynamic pump head assembly that is not separated from each other into an upper body and a lower body, but has a body part that is integrally formed.
另外，在上文中以具有氣體流道（410）的結構的高度可調整電流體動力泵頭組合為例進行了說明，但氣體流道的結構可進行各種變形，且亦可構成不具有氣體流道的結構的高度可調整電流體動力泵頭組合。除在上文中說明的環形槽（211）與部分流道（213）的結構之外，氣體流道的結構亦可變形為其他各種形態。In addition, the height-adjustable electrohydrodynamic pump head combination with the structure of the gas flow channel (410) has been described above as an example, but the structure of the gas flow channel can be modified in various ways, and it can also be configured without gas flow. The height of the structure of the channel can be adjusted in combination with an electrohydrodynamic pump head. In addition to the structure of the annular groove ( 211 ) and the partial flow channel ( 213 ) described above, the structure of the gas flow channel can also be deformed into other various forms.
110:儲存部 210:上部主體 211:組裝延伸部 213:部分流道 215:環形槽 230:下部主體 231:組裝槽 233:絕緣蓋 250:固定部件 310:內電極 330:絕緣噴嘴 350:外電極 360:外電極 361:外電極元件 410:氣體流道 IV-IV:線 110: storage department 210: upper body 211: Assembling the extension 213: part of the runner 215: Annular groove 230: lower body 231: assembly slot 233: insulation cover 250: fixed parts 310: inner electrode 330: insulating nozzle 350: External electrode 360: External electrode 361: External electrode components 410: gas channel IV-IV: line
圖1是根據本發明的一實施例的高度可調整電流體動力泵頭組合的立體圖。 圖2及圖3是如圖1所示的高度可調整電流體動力泵頭組合的正面圖。 圖4及圖5分別是如圖1所示的高度可調整電流體動力泵頭組合的VI-VI線剖面圖與局部放大圖。 圖6是針對如圖1所示的高度可調整電流體動力泵頭組合的一部分的正面圖。 圖7是將如圖1所示的高度可調整電流體動力泵頭組合的一部分放大的剖面圖。 圖8是用於說明將如圖1所示的高度可調整電流體動力泵頭組合安裝至分配器來使用的狀態的圖。 圖9示出關於如圖1所示的電流體動力泵頭組合的外電極的另一結構。 FIG. 1 is a perspective view of a height-adjustable electrohydrodynamic pump head assembly according to an embodiment of the present invention. 2 and 3 are front views of the height-adjustable electrohydrodynamic pump head assembly shown in FIG. 1 . Fig. 4 and Fig. 5 are respectively a VI-VI line sectional view and a partially enlarged view of the height-adjustable electrohydrodynamic pump head combination shown in Fig. 1 . 6 is a front view of a portion of the height-adjustable electrohydrodynamic pump head assembly shown in FIG. 1 . FIG. 7 is an enlarged cross-sectional view of a portion of the height-adjustable electrohydrodynamic pump head assembly shown in FIG. 1 . Fig. 8 is a diagram for explaining a state in which the height-adjustable electrohydrodynamic pump head assembly shown in Fig. 1 is attached to a dispenser and used. FIG. 9 shows another configuration of the outer electrodes for the electrohydrodynamic pump head combination shown in FIG. 1 .
110:儲存部 110: storage department
210:上部主體 210: upper body
211:組裝延伸部 211: Assembling the extension
213:部分流道 213: part of the runner
215:環形槽 215: Annular groove
230:下部主體 230: lower body
231:組裝槽 231: assembly slot
233:絕緣蓋 233: insulation cover
250:固定部件 250: fixed parts
330:絕緣噴嘴 330: insulating nozzle
350:外電極 350: External electrode
IV-IV:線 IV-IV: line
Claims (13)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210037187A KR102486132B1 (en) | 2021-03-23 | 2021-03-23 | Height Adjustable Electro Hydro Dynamic Pump Head Assembly |
| KR10-2021-0037187 | 2021-03-23 |
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| TW202237978A true TW202237978A (en) | 2022-10-01 |
| TWI819535B TWI819535B (en) | 2023-10-21 |
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| TW111110616A TWI819535B (en) | 2021-03-23 | 2022-03-22 | Height adjustable electro hydro dynamic pump head assembly |
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| KR (1) | KR102486132B1 (en) |
| CN (1) | CN117202994A (en) |
| TW (1) | TWI819535B (en) |
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| US7748343B2 (en) * | 2004-11-22 | 2010-07-06 | The Board Of Trustees Of The University Of Illinois | Electrohydrodynamic spraying system |
| CN101068623A (en) * | 2004-12-28 | 2007-11-07 | 大金工业株式会社 | Electrostatic spray apparatus |
| JP2008153322A (en) * | 2006-12-15 | 2008-07-03 | Dainippon Screen Mfg Co Ltd | Two-fluid nozzle, substrate processor, and method for processing substrates |
| KR20140012515A (en) * | 2012-07-20 | 2014-02-03 | (주)위시스 | Apparatus for manufacturing led device using ehd pump |
| KR101615576B1 (en) * | 2014-09-12 | 2016-05-11 | 순천향대학교 산학협력단 | Electro hydro dynamic inkjet apparatus |
| JP6657505B2 (en) * | 2015-11-09 | 2020-03-04 | アネスト岩田株式会社 | Electrostatic spray device and electrostatic spray method |
| KR20210002304A (en) * | 2019-06-30 | 2021-01-07 | 참엔지니어링(주) | Nozzle assembly for Ink ejection apparatus by electrohydrodynamics |
| KR102082621B1 (en) * | 2019-12-13 | 2020-02-27 | 엔젯 주식회사 | Induced electrohydrodynamic jet printing apparatus |
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- 2022-03-21 CN CN202280023761.1A patent/CN117202994A/en active Pending
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| KR102486132B1 (en) | 2023-01-09 |
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| WO2022203317A1 (en) | 2022-09-29 |
| KR20220132196A (en) | 2022-09-30 |
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